JP3262345B2 - Wafer carrier box and wafer carrier box fixing system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[Object of the invention]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer carrier box for storing and transporting wafers.

[0002]

2. Description of the Related Art Conventionally, when transferring a wafer between processes, the wafer is housed in a container called a wafer carrier box to protect the wafer from dust and the like.

[0003] Many of these wafer carrier boxes are
In order to increase the transportation efficiency, a large number of wafers can be stored. For this reason, the weight becomes considerable, and the manual transportation becomes a heavy work. Therefore, recently, it is usual to carry out robot transfer.

In carrying out this robot transfer, it is necessary to fix the box, and FIGS. 7 and 8 illustrate the conventional box fixing method.

[0005] First, FIG. 7 shows a configuration in which the side surface of the box is held from the side. Reference numeral 1 denotes a wafer carrier box.
And an upper lid 3 which abuts or fits on the lower lid 2 and cooperates with the lower lid 2 to form a closed container therein. The plurality of wafers are stored in the cabinet 2 in a state of being arranged in the lower lid 2 in a state of being aligned. The lower lid 2 and the upper lid 3 are rotatably connected at one side edge thereof, and the box 1 can be opened by rotating the upper lid 3.

Reference numeral 4 denotes a chuck device. The chuck device 4 has two mechanical arms 5 and 6, and the box 1 is held by the chuck device 4 by sandwiching a side portion between the two arms 5 and 6. , In such a state.

FIG. 8 shows a case where the side of the box is held from below. Reference numeral 7 denotes a mounting table, and the box 1 is mounted on the mounting table 7. Projecting members 8 and 9 are fixed to each side surface of the lower lid 2 of the box 1.

A chuck device 10 is provided below the mounting table 7, and the chuck device 10 includes two mechanical arms 8, 9, both of which pass through the mounting table 7 and each side of the box 1 respectively. On the other side, the projections 8 and 9 are locked from above. As a result, the box 1 is pressed and fixed to the mounting table 7 in the direction of gravity.

According to the above configuration, the box 1 can be firmly fixed.

However, since both of the above-mentioned conventional fixing systems have a structure for holding the side surface of the wafer carrier box, a space exceeding the installation area is required on the side of the wafer carrier box.

Further, since the working space of the mechanical arm is on the side of the wafer carrier box, impurities such as dust easily adhere to the wafer when the wafer carrier box is opened and closed. The adhesion of the impurity causes a defect of the semiconductor device.

The problem of dust is serious because the arm itself for holding the wafer carrier box is apt to be littered and difficult to clean.

The wafer carrier box is generally made of a resin such as polypropylene for weight reduction. Therefore, the above-described method of holding the side surface of the box puts a large stress on the wafer carrier box and deforms the wafer carrier box to shorten its life.

[0014]

As described above, the conventional box fixing method has a structure in which the side surface portion of the wafer carrier box is held. There are various problems such as shortened life.

Accordingly, it is an object of the present invention to provide a wafer carrier box capable of fixing and holding the same without causing the above-mentioned problems.

[Configuration of the Invention]

[0017]

According to the present invention, there is provided a wafer carrier box provided with a box body for accommodating wafers in an openable and closable container, and provided on the bottom of the box body below the bottom of the box body. A supporting member that supports the box body when placed on a mounting table for placing the box body, and is provided below the bottom of the box body so as to protrude from the bottom by a smaller amount than the supporting member. And a fixing auxiliary member. In this case, the box body may include a lower lid and an upper lid, and the lower lid and the upper lid may be configured to be openable and closable.
Further, the wafer carrier box fixing system according to the present invention is a wafer carrier box fixing system having a wafer carrier box and a mounting table on which the wafer carrier box is mounted, wherein the wafer carrier box can be opened and closed. A box main body that accommodates a wafer in a closed container, and a support member provided on the bottom surface below the bottom surface of the box main body and supporting the box main body when the box main body is mounted on the mounting table. And a fixing auxiliary member provided below the bottom of the box main body so as to protrude from the bottom by a smaller amount than the support member, and the mounting table protrudes toward the wafer carrier box. The convex plate portion, when the wafer carrier box is placed, the fixed By pressing the auxiliary member to said protruding plate portion direction, said the entire wafer carrier box by pressing to the protruding plate portion direction is engaged with the support member to the protruding plate portion and said wafer carrier box in a fixed state,
And a fixing mechanism.

[0018]

According to the present invention, the wafer carrier box can be fixed and held below the bottom of the box body by hooking a hook or the like on the fixing auxiliary member.

Therefore, the installation space is not necessarily required to be larger than the box body, and the space can be saved.

In addition, since the working space of the fixing mechanism is located below the box main body and the work is not performed at a short distance to the wafer, the problem of impurity adhesion can be solved and the wafer carrier box itself can be fixed. If garbage is collected, cleaning is not necessary. This contributes to an improvement in product yield.

Further, a large stress is not applied to the wafer carrier box, and the service life can be extended.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a front view showing a wafer carrier box according to a first embodiment of the present invention together with a fixing and holding mechanism, and FIG. 2 is a side view of a fixing auxiliary member shown in FIG.

In these figures, reference numeral 21 denotes a wafer carrier box according to the present invention.
Has a lower lid 22 and an upper lid 23 which abuts or fits on the lower lid 22 and cooperates with the lower lid 22 to form a closed container therein. The plurality of wafers are housed in the lower lid 22 in a state where a plurality of wafers are arranged in a cabinet. The lower lid 22 and the upper lid 23 are rotatably connected at one side edge thereof,
The box 21 can be opened by rotating the upper lid 23. Reference numeral 24 denotes a hook member for opening and closing the box 21.

The bottom portion 25 of the lower lid 22 is provided with leg members at four corners, and two leg members 2 are shown in FIG.
Only 6, 27 are shown.

A fixing auxiliary member 28 is provided at the center of the bottom surface 25 of the lower lid 22 by integral molding.
7, ... project from the bottom surface 25 by a smaller amount.
The fixing auxiliary member 28 is connected to two connecting plate portions 28a and 28b vertically connected to the bottom portion 25 at an interval, and connects the tip portions of the connecting plate portions 28a and 28b to each other to be parallel to the bottom portion 25. The space surrounded by these is a fixing member insertion space 28d.

Reference numeral 30 denotes a mounting table, and guide convex plate portions 31 and 32 on rails are erected vertically and parallel to each other at intervals on the upper surface of the mounting table 30, and the box 21 is mounted on both of them. 32, legs 26, 27, ...
The box 21 is positioned in the width direction by being positioned inside these convex plate portions 31 and 32 and locked to either of them.

A through hole 34 is formed between the convex plate portions 31 and 32 of the mounting table 30, and the box 21 is placed on the mounting table 30 so that the fixing auxiliary member 28 matches the through hole 34. ing.

On the back side of the mounting table 30, a box 21 is provided.
A linear actuator 35 and a hook member 36 serving as a fixing mechanism are provided. The actuator 35 is attached and fixed to the back surface of the mounting table 30, and the hook member 3
Reference numeral 6 denotes the output shaft. The base end side of the hook member 36 extends parallel to the opposing plate portion 28c from directly below the fixing auxiliary member 28 to a position beyond the fixing auxiliary member 28 to form an activation shaft portion 36a. The front end side of the wire extends through the through hole 34 to reach the vicinity of the bottom surface 25, and the portion up to that portion is formed as a transmission portion 36b, and the further front end side is bent at right angles to the fixing auxiliary member 28 side. The portion from the folded portion to the tip extends toward the fixing member insertion space 28d, and in the vicinity thereof, faces the fixing member insertion space 28d, and this portion is a locking portion 36c.

As a result, when the actuator 35 is operated and the driving portion 36a moves in the direction of the arrow Ia, this movement is transmitted to the locking portion 36c through the transmission portion 36b, and the locking portion 36c is inserted into the fixing member insertion space 28d. Then, the transmission portion 36b is locked to the opposing plate portion 28c, and the force of the actuator 35 pushes the entire box 21 toward the convex plate portion 32 through the opposing plate portion 28, and the leg member 27 is locked to this. The box 21 is fixed on the mounting table 30.

When the actuator 35 operates in the reverse direction and the actuating portion 36a moves in the direction of the arrow Ib, the locking portion 36
c comes out of the fixing member insertion space 28d, and the box 21
Is in a free state and can be removed from the mounting table 30.

According to the present embodiment, the hook body 36 is hooked on the fixing auxiliary member 28, so that the box main body can be fixed and held below the lower lid bottom surface portion 25. In addition, since the work space of the fixing mechanism is located below the main body and the work is not performed at a short distance to the wafer, the problem of impurity adhesion can be solved. In connection with this, even if what fixes the wafer carrier box 21 (the hook member 36 and the like) becomes dusty, it is not necessary to clean it. Further, a long life can be achieved without applying great stress to the wafer carrier box.

FIG. 3 is a front view showing a wafer carrier box according to a second embodiment of the present invention together with a fixing and holding mechanism, and FIG. 4 is a side view of a fixing auxiliary member shown in FIG.

This embodiment has the same structure as the first embodiment except for the structure of the fixing auxiliary member.

Reference numeral 37 denotes a fixing auxiliary member. The fixing auxiliary member 37 projects from the bottom portion 25 by a smaller amount than the legs 26, 27,... And is adhered to the bottom portion 25 in parallel with the bottom portion 25. Mounting plate portion 37a and the connecting plate portion 3 vertically projecting downward from each end of the mounting portion 37a.
7b and 37c and a facing plate portion 37d provided so as to connect the lower end portions of the connecting plate portions 37b and 37c and facing in parallel with the bottom surface portion 25. The hollow rectangular portion has a hollow portion for fixing. It is a member insertion space 37e. The locking portion 36c of the hook member 36 faces the fixing member insertion space 37e so as to be able to advance and retreat.

In this configuration, when the actuator 35 is actuated and the driving portion 36a moves in the direction of the arrow IIIa, the locking portion 36c enters the fixing member insertion space 37e, and the transmission portion 36b moves to the opposing plate portion 37d. The opposite plate portion 37 is locked.
The force of the actuator 35 pushes the entire box 21 toward the convex plate 32 through d, and the leg member 27 is locked on the box 21, so that the box 21 is fixed on the mounting table 30.

When the actuator 35 operates in the reverse direction and the actuating portion 36a moves in the direction of the arrow IIIb, the locking portion 3
6c comes out of the fixing member insertion space 37e, and the box 2
1 is free and can be removed from the mounting table 30.

According to the embodiment described above, the same effects as above can be obtained.

FIG. 5 is a front view showing a wafer carrier box according to a third embodiment of the present invention together with its fixing and holding mechanism, and FIG. 6 is a side view of a fixing auxiliary member shown in FIG.

This embodiment is different from the above-mentioned embodiment in the structure of both the fixing auxiliary member and the fixing mechanism, and the other is the same as the above-mentioned embodiment.

First, reference numeral 39 denotes a fixing auxiliary member of the present embodiment. The fixing auxiliary member 39 includes a mounting plate portion 39a adhered to the bottom surface portion 25 in parallel with the bottom surface portion 25 and a mounting plate portion 39a of the mounting plate portion 39a. A connecting plate portion 39b vertically projecting downward from one end, and a mounting plate portion 3 from the lower end of the connecting plate portion 39b;
The bottom plate 25 extends in the same direction as 9a, and comprises a facing plate portion 39c facing in parallel. Mounting plate 39
a and the opposing plate portion 39c are opposed in parallel at an interval, and a space between the two 39a and 39c is a fixing member insertion space 39d.

A mounting member 41 is fixed on the back surface of the mounting table 30 and below the through hole 34, and a rotary actuator 42 is mounted on the mounting member 41. 42a is the rotation output shaft. This rotary output shaft 4
One end of the hook member 43 is attached to 2a as a passive end 43a. The hook member 43a has a transmission portion 43b with an intermediate portion on the tip side from the passive end portion 43a extending in a direction orthogonal to the rotation output shaft 42a.
Is rotated integrally with the rotation of the rotation output shaft 42a in the direction around the axis of the rotation output shaft 42a. Further, the tip end is bent at a right angle, and the circle from the bent portion to the tip is drawn by the rotation locus of the transmission portion 43b. Is formed so as to extend in a tangential direction to a locking portion 43c, and a tip of the locking portion 43c faces the fixing member insertion space 39a of the fixing auxiliary member 39 so as to be able to advance and retreat.

In the above configuration, the actuator 42
When the rotation output shaft 42a rotates in the direction of the arrow Va, this movement is transmitted to the locking portion 43c through the transmission portion 43b, and the locking portion 43c enters the fixing member insertion space 39d, and further the transmission portion 43b Are locked to the opposing plate portion 39c, and the force of the actuator 42 pushes the entire box 21 toward the convex plate portion 32 through the opposing plate portion 39c, and the leg member 2
7 is locked to this, so that the box 21
It will be in the state fixed above.

When the actuator 42 operates in the reverse direction and the actuating portion 43b moves in the direction of the arrow Vb, the locking portion 4
3c comes out of the fixing member insertion space 39d, and the box 2
1 is free and can be removed from the mounting table 30.

Therefore, according to the present embodiment, the same effects as described above can be obtained.

[0046]

As described above, according to the present invention, the wafer carrier box can be fixed and held below the bottom of the box main body by hooking a hook or the like on the fixing auxiliary member. The working space is below the box main body, so that the installation space does not require an installation area larger than the box main body, and the space can be saved.

Further, since the working space of the fixing mechanism is below the box body, the work is not performed at a short distance to the wafer, so that the problem of impurity adhesion is solved and the wafer carrier box is fixed. If things themselves become litter, they do not need to be cleaned. This contributes to an improvement in product yield.

Furthermore, a large stress is not applied to the wafer carrier box, and the service life can be extended.

[Brief description of the drawings]

FIG. 1 is a front view showing a wafer carrier box according to a first embodiment of the present invention together with a fixed holding mechanism thereof.

FIG. 2 is a side view of the fixing auxiliary member shown in FIG.

FIG. 3 is a front view showing a wafer carrier box according to a second embodiment of the present invention together with a fixed holding mechanism thereof.

FIG. 4 is a side view of the fixing auxiliary member shown in FIG. 3;

FIG. 5 is a front view showing a wafer carrier box according to a third embodiment of the present invention together with a fixed holding mechanism thereof.

FIG. 6 is a side view of the fixing auxiliary member shown in FIG. 5;

FIG. 7 is a perspective view showing a first example of a conventional method of fixing a wafer carrier box in which a box side portion is held from the side.

FIG. 8 is a front view showing a second example of a conventional method of fixing a wafer carrier box in which a box side portion is held from below.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 21 Wafer carrier box 22 Lower lid 23 Upper lid 25 Bottom part 28, 37, 39 Fixing auxiliary member

Continuing on the front page (72) Inventor Tadashi Tsuchiya 25-1, Ekimae Honcho, Kawasaki-ku, Kawasaki, Kanagawa Prefecture In-house (72) Inventor Takashi Narishima Takashi 25-1, Ekimae-Honcho, Kawasaki-ku, Kawasaki-shi, Kanagawa Toshiba Microelectronics Co., Ltd. In-house (72) Inventor Kiyotaka Inoue 72 Horikawa-cho, Saiwai-ku, Kawasaki-shi, Kanagawa Pref. Toshiba Horikawa-cho Plant (56) References JP-A-64-43681 (JP, A) JP-A-1-118261 (JP, A) JP-A-3-104257 (JP, A) Actually open Japanese Utility Model Application , U) (58) Field surveyed (Int. Cl. ⁷ , DB name) H01L 21/68 B65D 85/86

Claims (3)

(57) [Claims] A box body for accommodating a wafer in an openable and closable container; and a mounting table provided on the bottom surface below the bottom surface of the box body for mounting the box body. In this case, a wafer carrier comprising: a support member for supporting the box body; and a fixing auxiliary member provided below the bottom of the box body and protruding from the bottom by a smaller amount than the support member. box. 2. The box body includes a lower lid and an upper lid, and the lower lid and the upper lid are configured to be openable and closable.
The wafer carrier box according to claim 1 . 3. A wafer carrier box fixing system having a wafer carrier box and a mounting table on which the wafer carrier box is mounted, wherein the wafer carrier box accommodates a wafer in an openable and closable closed container. A box body, a support member provided on the bottom part below the bottom part of the box body and supporting the box body when the box body is placed on the mounting table; and a bottom part of the box body under the bottom part. And a fixing auxiliary member provided so as to protrude from the bottom portion by a smaller amount than the support member, wherein the mounting table includes a convex plate portion protruding in a direction of the wafer carrier box, and the wafer carrier. When the box is placed, by pushing the fixing auxiliary member toward the convex plate portion A fixing mechanism that pushes the entire wafer carrier box in the direction of the convex plate portion to lock the support member to the convex plate portion, thereby fixing the wafer carrier box. Carrier box fixing system.