JP4716671B2 - Thin plate support container lid - Google Patents

Description

  The present invention relates to a lid for a thin plate support container that accommodates a thin plate such as a semiconductor wafer, a storage disk, and a liquid crystal glass substrate and can be used in storage, transportation, manufacturing processes, and the like.

  Thin plate supporting containers for storing, storing and transporting thin plates such as semiconductor wafers are generally known.

  This thin plate support container is mainly composed of a container body and a lid that closes the upper opening of the container body. A member for supporting a thin plate such as a semiconductor wafer is provided inside the container body. In such a thin plate supporting container, in order to prevent contamination of the surface of a thin plate such as a semiconductor wafer housed inside, it is necessary to transport the container while keeping the inside of the container clean. For this reason, the inside of the container is sealed. That is, the lid body is fixed to the container body, and the inside of the container body is sealed. There are various structures for fixing the lid to the container body.

  The thin plate support container transported to a semiconductor manufacturing factory or the like is placed on the production line, and the lid is automatically attached and detached by a dedicated device.

  There exists a thing of patent document 1 as a cover corresponding to this exclusive apparatus. As shown in FIG. 2, the lid 1 includes a main body 2, a cam member 3, a latch arm 4, and a fulcrum 5.

  The cam member 3 is rotatably attached to the main body 2. The cam member 3 is provided with a cam portion 6. The cam portion 6 is provided with an elongated hole-like connection opening 7.

  The latch arm 4 is provided with an S-shaped cam follower portion 8 at a base end portion thereof, and the S-shaped cam follower portion 8 is fitted into the connection opening 7 and captured.

  The fulcrum 5 is constituted by a protruding member provided on the main body 2 and supports the latch arm 4.

  With this configuration, when the cam member 3 rotates, the S-shaped cam follower portion 8 captured in the connection opening 7 is pushed upward while being moved rightward in the drawing. As a result, the latch arm 4 is rotated from the fulcrum 5 while being extended from the main body 2, and the tip of the latch arm 4 is pushed downward.

At this time, the leading end of the latch arm 4 is fitted in the hole on the container body side, and is pressed downward to press the lid on the container body side and fix it.
JP 2001-512288 A

  However, in the lid body 1 as described above, the latch arm 4 is rotated around the fulcrum 5 by the base end of the latch arm 4 being captured by the cam member 3 and lifted upward. Therefore, when replaced by the lever principle, the base end of the latch arm 4 is a force point, the tip is an action point, and the fulcrum 5 is a fulcrum.

  In this case, in order to strongly press the lid 1 against the container body in order to increase the confidentiality in the container body, it is necessary to strongly press the tip of the latch arm 4 against the hole on the container body side.

  In order to realize this, it is necessary to increase the strength of the cam member 3 and the latch arm 4. This is because the distance between the tip of the latch arm 4 and the fulcrum 5 is long. In this case, if the fulcrum 5 is shifted to the tip side of the latch arm 4, the tip of the latch arm 4 is strongly pressed against the hole on the container body side without increasing the strength of the cam member 3 and the latch arm 4. Can do.

  However, if the fulcrum 5 is shifted to the distal end side, the distance to lift the base end of the latch arm 4 has to be increased, and the lid 1 will become thicker if the lifting distance is to be secured. There's a problem.

  In addition, a wafer presser is usually provided on the back surface of the lid to hold and support the semiconductor wafer housed in the container body from above. However, as the diameter of the semiconductor wafer increases, the force to support each semiconductor wafer increases. There is a need. For this reason, the repulsive force from the semiconductor wafer that the wafer presser receives is increased. Similarly, when the number of stored semiconductor wafers increases, the repulsive force from the semiconductor wafer increases. As a result, the lid and the wafer presser are bent outward due to the repulsive force, and the pressing force at the center of the wafer presser is weakened. Therefore, there is a problem that the semiconductor wafer rotates when vibration is transmitted from the outside.

  The present invention has been made in view of the above-described points, and can be securely fixed with a strong force without being bulky, and the thin plate supporting container can prevent the rotation of the thin plate even when vibration is transmitted from the outside. An object is to provide a lid.

A lid for a thin plate support container according to a first invention is a lid for a thin plate support container that closes a container main body of a thin plate support container that is housed and transported by storing a plurality of thin plates therein. Equipped with a simple attachment / detachment mechanism that can be easily fixed and unlocked and attached / detached, and the simple attachment / detachment mechanism extends and engages with the container main body side, and a feed that is connected to the engagement member and moves out and in A member, a distal end cam that pushes the distal end side of the locking member upward when the locking member is fed by the feeding member, and the lid that closes the container body upward, and the engagement member A base end cam that pushes the base end side of the locking member downward when the stop member is extended, and the tip cam includes a slope that pushes the front end side of the locking member upward. And the tip of the locking member A fulcrum part for turning the locking member is provided on the side, the fulcrum part is in sliding contact with the slope, and the distal end side is supported by pushing out the locking member and pushed upward. When the base end side of the locking member is pushed downward and the locking member rotates, the fulcrum portion becomes the rotation center of the locking member .

With the above configuration, when the locking member is extended by the supply member, the distal end cam pushes the distal end side of the locking member to one side and the proximal end cam pushes the proximal end side of the locking member to the other. Thereby, a cover body is fixed to the container main body side. Further, when the locking member is extended, the fulcrum portion is in sliding contact with the inclined surface of the distal end cam, the distal end side of the locking member is pushed upward and locked to the container body side, and the proximal end cam Thus, when the base end side of the locking member is pushed downward and the locking member rotates, the fulcrum portion becomes the rotation center of the locking member. Thereby, a locking member rotates centering on a fulcrum part. Since the fulcrum portion is provided on the distal end side of the locking member, the lid can be pressed against the container body with a strong force by the lever principle.

The thin plate supporting container lid according to the second invention is the thin plate supporting container lid according to the first invention, wherein the base end side cam includes a slope that pushes the base end side of the locking member downward. It is characterized by being configured.

With the above configuration, the base end side of the locking member is pushed downward on the slope of the base end side cam, and is locked to the container body side.

The thin plate supporting container lid according to the third invention is the thin plate supporting container lid according to either the first or second invention, wherein the simple attachment / detachment mechanism is detachably provided and the components are disassembled. It is characterized by being assembled as possible.

  In the case of cleaning with the above configuration, it is removed, disassembled into each component, and cleaned individually. Thereby, it can wash | clean to every corner and can be dried quickly.

  A lid for a thin plate support container according to a sixth invention is a lid for a thin plate support container that closes a container main body of a thin plate support container that is transported by storing a plurality of thin plates therein, and is housed in the container main body. A thin plate presser for supporting the formed thin plate is provided, and the thin plate presser includes support pieces arranged alternately.

  By the said structure, the support piece arrange | positioned alternately supports the periphery of a thin plate. At this time, the peripheral edges of the thin plate are surely supported by the support pieces abutting alternately.

  A lid for a thin plate support container according to a seventh invention is a lid for a thin plate support container that closes a container main body of a thin plate support container that is housed and transported by storing a plurality of thin plates therein, and is stored in the container main body. A thin plate presser for supporting the thin plate, and the thin plate presser includes two contact pieces having support pieces arranged alternately, and an elastic support plate for elastically supporting the contact pieces. The elastic support plate portion is attached between the contact pieces and supported on both sides, and the elastic support plate portions between the contact pieces are slightly floated, and each contact piece It is characterized by supporting.

  With the above-described configuration, the elastic support plate portion between the contact pieces is supported in a state where the elastic support plate portion is slightly lifted from the mounting surface. When a large impact is applied from the outside, such as when the thin plate support container is accidentally dropped, the elastic support plate portion between the contact pieces comes into contact with the support surface and strongly supports the contact pieces. This protects the thin plate from strong impacts.

  A lid for a thin plate support container according to an eighth invention is a lid for a thin plate support container that closes a container main body of a thin plate support container that is accommodated and transported with a plurality of thin plates therein, and is attached to the container main body. And a lid holder for covering and fixing from outside.

  With the above configuration, the lid holder is attached to the container body to support the lid. Thereby, even if a strong impact is applied by dropping or the like, the lid body does not come off from the container body.

  A lid for a thin plate support container according to a ninth aspect of the present invention is a thin plate support container lid that closes a container main body of a thin plate support container that is transported by storing a plurality of thin plates therein, and is stored in the container main body. A plurality of thin plate retainers for supporting the plurality of thin plates, and a plurality of the thin plate retainers are provided in parallel, and are provided with contact pieces that directly contact the plurality of thin plates, respectively. The contact piece is arranged such that the contact piece bulges toward the thin plate side as compared with the contact piece located on both sides thereof.

  With the above configuration, each contact piece arranged with the central side raised to the thin plate side as compared with both sides can absorb the bending of the lid and support each thin plate with an equal force.

  A lid for a thin plate support container according to a tenth aspect of the invention is the lid for a thin plate support container according to the ninth aspect of the invention, wherein the thin plate presser is fixed to the back side of the lid, and the base end support portion And a plurality of elastic support plate portions that support one end of each of the contact pieces, and the elastic support plate portions that support the contact pieces are compared to the contact pieces located on both sides. The contact piece located on the center side is formed so as to rise to the thin plate side.

  According to the above configuration, each elastic support plate portion supports the center side by raising the center side to the thin plate side as compared with both sides of each of the contact pieces arranged in parallel. The thin plate can be supported with equal force.

  The lid for a thin plate support container according to an eleventh aspect of the invention is the lid for a thin plate support container according to the ninth aspect of the invention, wherein the thin plate retainer is fixed to the back side of the lid, and the base end support portion A plurality of one-side elastic support plates that are supported by each of the contact pieces and support one end of each of the contact pieces, and a plurality of other sides that support the other end of each of the contact pieces and contact the back side of the lid body One or both of the one-side elastic support plate portion and the other-side elastic support plate portion that support each of the contact pieces, and are located closer to the center than the contact pieces located on both sides. The contact piece is formed so as to be raised toward the thin plate.

  With the above configuration, the one side elastic support plate portion or the other side elastic support plate portion is supported by raising the central side toward the thin plate side compared to both sides among the contact pieces arranged in parallel. It is possible to support each thin plate with an equal force.

  The lid for a thin plate support container according to a twelfth aspect of the invention is the lid for a thin plate support container according to the ninth aspect of the invention, wherein the thin plate presser is fixed to the back side of the lid, and the base end support portion A plurality of one-side elastic support plates that are supported by each of the contact pieces and support one end of each of the contact pieces, and a plurality of other sides that support the other end of each of the contact pieces and contact the back side of the lid body An elastic support plate, and a support ridge provided on the back side of the lid body and abutting the other side elastic support plate to support the other side elastic support plate, the support ridge or the like One or both of the side elastic support plate portions are formed so that the contact piece located on the center side is raised toward the thin plate side as compared with the contact pieces located on both sides.

  With the above configuration, the support protrusion or the other side elastic support plate portion supports the center side of the abutting pieces arranged in parallel by raising the center side toward the thin plate side as compared with both sides. Can be absorbed, and each thin plate can be supported with equal force.

  The lid for a thin plate support container according to a thirteenth aspect of the present invention is the lid for a thin plate support container according to any one of the ninth to twelfth aspects of the present invention, wherein the contact piece has a slope of 40 ° to 44 °. It is characterized by having a groove.

  With the above configuration, when the edge of the thin plate is fitted in a V-shaped groove having an inclination of 40 ° to 44 °, the V-shaped groove can grip the edge of the thin plate and reliably support each thin plate.

  A thin plate support container lid according to a fourteenth aspect of the present invention is a thin plate support container lid that closes a container main body of a thin plate support container that is housed and transported in a plurality of thin plates, and is housed in the container main body. A thin plate presser for supporting the thin plate, and the thin plate presser is provided with two base end support portions fixed to the back side of the lid body, and a plurality of the thin plate pressers are provided along the peripheral edge of the thin plate. Contact pieces that are in contact with each other, two elastic support plate parts that are supported by the respective base end support parts and support the outer ends of the contact pieces at both ends of the plurality of contact pieces, A connecting support plate portion that connects the abutting pieces to each other to support each abutting piece, and a displacement in a direction perpendicular to the back surface of the lid body by preventing the displacement of the connecting support plate portion along the back surface of the lid body. It is characterized by comprising a supporting member that permits the above.

  With the above configuration, the outer ends of the contact pieces at both ends of the plurality of contact pieces are supported by the elastic support plate portions, and the contact support plate portions are supported by the connection support plate portions between the contact pieces. By being supported by the supporting member, each contact piece reliably supports the peripheral edge of the thin plate. In particular, since the space between the contact pieces is supported by the connecting support plate portion supported by the support member, the contact pieces can be prevented from being displaced along the back surface of the lid body, and the thin plate can be reliably secured. Can be supported.

  The lid for a thin plate support container according to the fifteenth aspect of the present invention is the lid for a thin plate support container according to the fourteenth aspect of the present invention, so that the supporting member does not shift the connecting support plate portion along the back surface of the lid. It is characterized by comprising supporting ribs that are individually supported.

  With the above configuration, since the supporting ribs support the connection support plate portion, it is possible to prevent the contact pieces from being displaced along the back surface of the lid body, and it is possible to reliably support the thin plate.

  A lid for a thin plate support container according to a sixteenth aspect of the present invention is the lid for a thin plate support container according to the fourteenth aspect, wherein the support member is fitted into a fitting hole provided in the connection support plate portion. The connecting support plate portion is provided with a fitting protrusion that prevents a deviation along the back surface of the lid body and allows variation in a direction perpendicular to the back surface of the lid body.

  With the above configuration, the fitting protrusions are fitted into the fitting holes provided in the connection support plate portion to support the connection support plate portion, thereby preventing each contact piece from being displaced along the back surface of the lid body. And the thin plate can be reliably supported.

  The lid for a thin plate support container according to a seventeenth aspect of the present invention is the lid for a thin plate support container according to the fourteenth aspect of the present invention, wherein the connecting support plate portion is more elastic than the elastic force of the elastic support plate portion supporting the contact piece. The elastic force for supporting the contact piece is increased.

  With the above configuration, the connecting support plate portion strengthens the elastic force that supports the contact piece, thereby eliminating the difference in elastic force (support force) between the center portion and the end portion of the thin plate presser and holding the thin plate. The force can be equalized as a whole, and the thin plate can be reliably supported.

  A thin plate supporting container lid according to an eighteenth aspect of the present invention is a thin plate supporting container lid that closes a container main body of a thin plate supporting container that is housed and transported by storing a plurality of thin plates therein, and is housed in the container main body. A thin plate presser for supporting the thin plate, and the thin plate presser includes a contact piece that directly contacts the thin plate to support the thin plate, and the contact piece is fitted to an edge of the thin plate. A V-shaped groove is provided, and the inclination angle of the V-shaped groove is set to 20 ° to 60 °.

  With the above configuration, when the thin plate is fitted into the V-shaped groove of the contact piece, the edge of the thin plate bites into the V-shaped groove. At this time, if the inclination angle of the V-shaped groove is set to 20 ° to 60 °, the edge of the thin plate is supported by biting into the V-shaped groove. Further, when the abutting piece is pulled away from the thin plate, the thin plate that bites into the V-shaped groove is smoothly separated without being caught by the V-shaped groove. If the inclination angle of the V-shaped groove is set to 20 ° or less, when the contact piece is pulled away from the thin plate, the thin plate is caught by the V-shaped groove and pulled out. If the inclination angle of the V-shaped groove is set to 60 ° or more, the thin plate bites into the V-shaped groove of the abutting piece and rotates without sufficient. When the inclination angle of the V-shaped groove is set to 20 ° to 60 °, both prevention of rotation due to biting of the thin plate into the V-shaped groove and smooth pulling can be achieved.

  A lid for a thin plate support container according to a nineteenth aspect of the invention is the lid for a thin plate support container according to the eighteenth aspect of the invention, wherein the edge of the thin plate is fitted into the V-shaped groove. And a bottom portion of the V-shaped groove.

  With the above configuration, when the thin plate is fitted into the V-shaped groove of the contact piece, the edge of the thin plate bites into the V-shaped groove. At this time, there is a gap between the edge of the thin plate and the bottom of the V-shaped groove. Since there is no contact with each other, the edge of the thin plate and the inclined surface of the V-shaped groove are strongly pressed. Thereby, the thin plate bites into the V-shaped groove and is reliably supported.

  A lid for a thin plate supporting container according to a twentieth aspect of the invention is a thin plate supporting container lid that closes a container main body of a thin plate supporting container that is housed and transported by storing a plurality of thin plates therein, and is housed in the container main body. A thin plate presser for supporting the thin plate, and the thin plate presser includes a contact piece that directly contacts the thin plate to support the thin plate, and the contact piece is an edge of an edge of the thin plate. A V-shaped groove having the same inclination angle as the corner is provided, and a gap is provided between the edge of the thin plate and the bottom of the V-shaped groove in a state where the edge of the thin plate is fitted in the V-shaped groove. It is characterized by.

  With the above configuration, when the thin plate is fitted into the V-shaped groove of the contact piece, the edge angle of the edge of the thin plate and the inclination angle of the V-shaped groove are aligned and contact is made in a wide area. At this time, since there is a gap between the edge of the thin plate and the bottom of the V-shaped groove and they are not in contact with each other, the edge of the thin plate and the inclined surface of the V-shaped groove are strongly in contact with each other over a wide area. Pressed.

  The lid for a thin plate support container according to a twenty-first aspect of the invention is the lid for a thin plate support container according to the twentieth aspect, wherein the inclination angle of the V-shaped groove of the contact piece is set to 44 °.

  With the above configuration, when the thin plate with the edge angle set to 44 ° is fitted into the V-shaped groove of the contact piece set to the inclination angle of 44 °, the edge of the thin plate and the V-shaped groove are aligned. , It is strongly pressed in contact with a wide area.

  A lid for a thin plate support container according to a twenty-second invention is a lid for a thin plate support container that closes a container main body of a thin plate support container that is transported with a plurality of thin plates stored therein, and is housed in the container main body. A thin plate presser for supporting the thin plate, and when the thin plate presser contacts the thin plate to support the thin plate, the central portion that is bent outward by the repulsive force is previously set so as to cancel the bending. It is characterized by being formed to be depressed toward the container body side.

  With the above configuration, the repulsive force can be absorbed when the thin plate presser contacts the thin plate and supports the thin plate by recessing the central portion of the thin plate supporting container lid. The central part of the lid for the thin plate support container bends outward due to the repulsive force when supporting the thin plate. Support with.

  A thin plate support container lid according to a twenty-third aspect of the present invention is a thin plate support container lid that closes a container main body of a thin plate support container that is transported by accommodating a plurality of thin plates therein, and is housed in the container main body. A thin plate presser for supporting the thin plate, and when the thin plate presser contacts the thin plate to support the thin plate, the surrounding reinforcing flange that bends outward by the repulsive force cancels the bending. As described above, it is formed by bending in advance toward the container main body.

  With the above configuration, the reinforcing flange around the lid for the thin plate support container is curved in advance, so that the repulsive force can be absorbed when the thin plate presser contacts the thin plate and supports the thin plate. . The reinforcing flange is bent outward by the repulsive force when supporting the thin plate, but the reinforcing flange formed by bending in advance is linearly canceled by this bending and supports the entire thin plate with a uniform force. .

  A thin plate supporting container lid according to a twenty-fourth aspect of the present invention is a thin plate supporting container lid that closes a container main body of a thin plate supporting container that is housed and transported in a plurality of thin plates, and that forms a surrounding flange. A reinforcing member is inserted into and insert-molded.

  With the above configuration, since the reinforcing member is inserted into the reinforcing flange that forms the periphery of the lid for the thin plate support container and insert-molded, when the thin plate presser contacts the thin plate and supports the thin plate, It can withstand and supports the entire sheet with uniform force.

  As described above in detail, the thin plate support container of the present invention has the following effects.

(1) Since the locking member is fed out using the lever principle, the production line lid can be reliably fixed to the container body with a strong force.

(2) Since the simple attachment / detachment mechanism can be easily disassembled into each component, when cleaning, it can be removed and disassembled into each component so that it can be thoroughly washed and dried quickly.

(3) Since the support pieces are alternately arranged, the support pieces are alternately brought into contact with the periphery of the thin plate and can be reliably supported.

(4) Of the abutting pieces in parallel, the one located on the center side of the abutting pieces is raised relative to the thin plate side, so that the thin plate absorbs the bending of the lid. Can be supported with equal force.

(5) Since each elastic support plate portion supports the center side of the abutting pieces arranged in parallel by raising the center side toward the thin plate side, each thin plate absorbs the bending of the lid. Can be supported with equal force.

(6) Since the one-side elastic support plate portion or the other-side elastic support plate portion supports the center side by raising the center side to the thin plate side compared to both sides of the contact pieces arranged in parallel, By absorbing the deflection, each thin plate can be supported with an equal force.

(7) Since the supporting ridge or the other side elastic support plate portion supports the center side by raising the center side to the thin plate side compared to both sides among the abutting pieces arranged in parallel, the bending of the lid body Absorbing and supporting each thin plate with equal force.

(8) Since the connecting support plate portion between the contact pieces is supported by the support member, the contact pieces can be prevented from being displaced along the back surface of the lid, and the thin plate is reliably supported. be able to.

(9) Since the connecting support plate portion is supported by the support rib, each contact piece can be prevented from shifting along the back surface of the lid, and the thin plate can be reliably supported.

(10) Since the fitting protrusion fits into the fitting hole provided in the connection support plate portion to support the connection support plate portion, it is possible to prevent each contact piece from being displaced along the back surface of the lid body. And the thin plate can be reliably supported.

(11) By increasing the elastic force with which the connecting support plate part supports the contact piece, the difference in support force between the center part and the end part of the thin plate presser is eliminated, and the force to hold the thin plate is evenly distributed throughout And the thin plate can be reliably supported.

(12) Since the inclination angle of the V-shaped groove of the contact piece is set to 20 ° to 60 °, the edge of the thin plate is supported by being bitten into the V-shaped groove, thereby preventing the thin plate from rotating. Further, when the abutting piece is pulled away from the thin plate, the thin plate that bites into the V-shaped groove is smoothly separated without being caught by the V-shaped groove. Thereby, while being able to support a thin plate reliably, attachment or detachment of a cover body becomes easy.

(13) Since there is a gap between the edge of the thin plate and the bottom of the V-shaped groove of the contact piece, when the thin plate is fitted into the V-shaped groove, the edge of the thin plate and the bottom of the V-shaped groove are The edge of the thin plate and the inclined surface of the V-shaped groove are strongly pressed without contacting each other. Thereby, the thin plate bites into the V-shaped groove and is reliably supported.

(14) The contact piece includes a V-shaped groove having the same inclination angle as the edge angle of the edge of the thin plate, and the edge of the thin plate is fitted with the edge of the thin plate in the V-shaped groove. Since there is a gap between the bottom of the V-shaped groove, the edge angle of the thin plate and the inclined angle of the V-shaped groove are aligned and contacted in a wide area, and the edge of the thin plate and the bottom of the V-shaped groove The edge of the thin plate and the V-shaped groove are strongly pressed by the gap. That is, the edge of the thin plate can be strongly pressed against the inclined surface of the V-shaped groove without strongly pressing the contact piece against the thin plate. As a result, even if the thin plate presser is not pressed too strongly against the thin plate, the thin plate presser can reliably support the thin plate, and the rotation of the thin plate due to vibration or the like can be prevented. Thus, the thin plate can be reliably supported without attaching the lid to the container body too strongly, and it is not necessary to increase the strength of the lid.

(15) Since the inclination angle of the V-shaped groove of the contact piece is set to 44 °, the V-shaped groove and the thin plate whose edge angle is set to 44 ° are aligned and contacted and pressed strongly over a wide area. . As a result, even if the thin plate presser is not pressed too strongly against the thin plate, the thin plate presser can reliably support the thin plate, and the rotation of the thin plate due to vibration or the like can be prevented. Accordingly, the thin plate can be reliably supported without attaching the lid to the container main body so strongly that rotation of the thin plate due to vibration or the like can be prevented. Thus, the thin plate can be reliably supported without attaching the lid to the container body too strongly, and it is not necessary to increase the strength of the lid.

(16) The central portion of the lid for the thin plate support container is depressed, and the deflection of the central portion of the lid for the thin plate support container due to the repulsive force when the thin plate presser contacts the thin plate and supports the thin plate is caused by the depression. By canceling out and supporting the whole with uniform force, rotation of the thin plate due to vibration or the like can be prevented.

  Even when the reinforcing flange around the lid for the thin plate supporting container is bent toward the container main body, the bending of the reinforcing flange due to the repulsive force when the thin plate presser contacts the thin plate and supports the thin plate is Since the entire body can be canceled out by bending toward the main body and supported with a uniform force, rotation of the thin plate due to vibration or the like can be prevented.

(17) To insert a reinforcing member into a reinforcing flange around the main body and insert-mold it to reinforce it. When the thin plate presser supports the thin plate, it withstands the repulsive force and supports the whole with a uniform force. Further, rotation of the thin plate due to vibration or the like can be prevented.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. The thin plate support container of the present invention is a container for storing thin plates such as semiconductor wafers, storage disks, liquid crystal glass substrates, etc., for use in storage, transportation, production lines and the like. Here, a thin plate support container for storing a semiconductor wafer will be described as an example. As the lid that closes the thin plate supporting container, a lid for transportation and a lid used in the production line are used properly.

[First Embodiment]
As shown in FIGS. 3 to 8, the thin plate support container 11 according to the present embodiment has a container body 12 that houses a plurality of semiconductor wafers (not shown) therein, and opposing side walls in the container body 12, respectively. Two thin plate supporting portions 13 for supporting the semiconductor wafer provided and housed inside from both sides, a transport lid 14 and a production line lid 15 for closing the container main body 12, and a transfer device (not shown) in the factory. 1) and a carrying handle 17 that is gripped when the operator carries the thin plate supporting container 11 by hand.

  As shown in FIGS. 3 and 4, the container body 12 is generally formed in a substantially cubic shape. The container body 12 is in a vertically placed state (the state shown in FIGS. 3 and 4), and is composed of four side wall portions 12A, 12B, 12C, and 12D and a bottom plate portion 12E as surrounding walls, and an opening 12F is formed on the top thereof. Is provided. When the container body 12 is installed facing a wafer transfer robot (not shown) in a semiconductor wafer production line or the like, it is placed horizontally. Positioning means (not shown) for the thin plate supporting container 11 is provided on the outside of the side wall portion 12A which becomes the bottom in the horizontally placed state. A top flange 16 is detachably attached to the outside of the side wall portion 12A that becomes a ceiling portion in the horizontal state. A carrying handle 17 is detachably attached to the outside of the side wall portions 12C and 12D, which become horizontal wall portions in the horizontal state.

  As shown in FIGS. 5 and 6, a lid body receiving portion 21 for fitting the lid body 4 is provided at the upper end portion of each side wall portion 12 </ b> A, 12 </ b> B, 12 </ b> C, 12 </ b> D of the container body 12. The lid receiving portion 21 is formed by expanding the upper end portion of the container body 12 to the size of the lid 4. As a result, the lid body 4 is fitted to the lid body receiving portion 21 by fitting inside the vertical plate portion 21A of the lid body receiving portion 21 and contacting the horizontal plate portion 21B. Further, the horizontal plate portion 21B is provided with a seal groove 21C on the entire periphery thereof, and a gasket 22 attached to the lower surface of the transport lid 14 is fitted to seal the inside of the thin plate support container 11. It has become. On the inner side surfaces of the vertical plate portions 21A at the four corners of the lid receiving portion 21, lid locking claws (not shown) of a transport simple attachment / detachment mechanism 26, which will be described later, are fitted, and the transport lid 14 is attached to the container body. The 1st to-be-fitted part 23 for fixing to 12 side is provided. The first fitted portion 23 is formed by recessing the vertical plate portion 21 </ b> A in a square shape, and a lid locking claw is fitted on the inner upper surface thereof.

  Further, a second fitted portion 24 is provided in the vicinity of each first fitted portion 23. The second fitted portion 24 is for use on a production line. The second fitted portion 24 is configured such that the locking member 42 of the simple attachment / detachment mechanism 32 of the production line lid 15 is fitted to fix the production line lid 15 to the container body 12 side. .

  The transport lid 14 is a known lid. The transport lid 14 is formed in a dish shape, and is formed so as to be raised in a cylindrical shape so that the central portion thereof does not come into contact with the upper part of the semiconductor wear housed therein.

  At the four corners of the transport lid 14, as shown in FIGS. 3 and 4, a transport simple attachment / detachment mechanism 26 for detachably fixing the transport lid 14 to the container body 12 is provided. The transporting simple attachment / detachment mechanism 26 is mainly provided with a lid locking claw (not shown) provided in a state of protruding from the peripheral edge of the transporting lid 14. This lid locking claw is adapted to be fitted to the first fitted portion 23.

  The production line lid 15 is a lid for allowing the container main body 12 of the transported thin plate supporting container 11 to be used as it is in a production line in a factory. The production line lid 15 is placed in a semiconductor production factory or the like as a single product independent of the thin plate support container 11. As shown in FIGS. 7 and 8, the production line lid 15 includes a main body 30, a cover plate (not shown), and a simple attachment / detachment mechanism 32.

  The main body 30 is formed in a thin, substantially quadrangular shape as a whole, and a reinforcing flange is formed around the main body 30 so that the main body 30 does not protrude outside when mounted on the lid receiving portion 21 of the container main body 12. ing. A gasket receiving portion 31 is attached around the lower portion of the main body portion 30. The gasket receiving portion 31 is provided with a gasket (not shown), and the main body portion 30 is fitted to the seal groove 21C in a state where the main body portion 30 is attached to the lid receiving portion 21, so that the inside of the container main body 12 is sealed. It has become. The gasket is appropriately formed according to the shape of the seal groove 21 </ b> C, similarly to the gasket 22 of the transport lid 14.

  Concave portions 33 to which the simple attachment / detachment mechanism 32 is attached are respectively provided at the ends of the main body 30 of the production line lid 15 on both sides in the longitudinal direction (upper left and lower right in FIG. 7). The recess 33 is formed by recessing the end of the main body 30 in a substantially rectangular shape. At both ends in the longitudinal direction of the concave portion 33 (upper right and lower left ends in FIG. 7), openings 34 are provided in which leading end fitting portions 56 of a locking member 42 described later appear and disappear. The opening 34 is provided at a position aligned with the second fitted portion 24 of the lid receiving portion 21 in a state where the main body 30 is fitted to the lid receiving portion 21. A rotation support shaft 36, a stopper 37, a locking claw 38, a proximal lower cam 39, and a distal cam 40 are provided at the bottom of the recess 33, respectively. A cover plate is detachably attached to the recess 33. The cover plate is removed when cleaning the simple attachment / detachment mechanism 32 provided in the recess 33.

  The rotation support shaft 36 is a member for rotatably supporting a feeding member 43 described later. The rotation support shaft 36 is provided so as to protrude in a cylindrical shape from the bottom. The rotation support shaft 36 is fitted into the rotating cylinder portion 63 of the feeding member 43 to support the feeding member 43 rotatably. The stopper 37 is a member for supporting the feeding member 43 in a state of being rotated by a predetermined angle. The stopper 37 is composed of a plate-like member raised from the bottom at two places around the rotation support shaft 36. The plate-shaped member is curved to form a receiving portion 37A. By fitting the projection 65A of the engaging piece 65 of the feeding member 43 into the receiving portion 37A, the feeding member 43 is supported at a predetermined angle.

  The locking claw 38 is a member for fixing a later-described cover presser 46 to the bottom of the recess 33. Since the cover pressers 46 are respectively attached to both sides in the longitudinal direction of the recess 33, six locking claws 38 are also attached to both sides in the longitudinal direction of the recess 33. The locking claw 38 is formed of an L-shaped member, and the lower support plate piece 88 of the cover presser 46 is fitted therein.

  The proximal lower cam 39 and the distal cam 40 are members constituting a cam mechanism 44 described later. Further, the base end lower cam 39 and a base end upper cam 53 described later constitute a base end cam that pushes down the base end side of the locking member 42 when the locking member 42 is extended.

  As shown in FIGS. 1 and 7, the base end lower cam 39 is a member for pushing (lowering) the base end side to the other side (downward in FIG. 1) as the locking member 42 is extended. . The base end lower cams 39 are provided on both sides of the rotation support shaft 36, respectively. The base end lower cam 39 is formed with a slope 39 </ b> A that is formed in a substantially triangular shape in a side sectional shape and moves up and down the base end side of the locking member 42. The slope 39A is mirror-finished so as to reduce the frictional resistance with the base end side sliding contact surface 52 of the locking member 42.

  The distal end cam 40 is a member for pushing (raising) the distal end fitting portion 56 to one side (upward in FIG. 1) as the locking member 42 is extended. The distal cam 40 is provided at both ends in the longitudinal direction of the recess 33 so as to face the opening 34. The distal-side cam 40 is configured to include a slope 40 </ b> A that has a side cross-sectional shape formed in a triangular shape and lifts the distal end side of the locking member 42 upward. The inclined surface 40A is mirror-finished in order to reduce the frictional resistance with the tip side sliding contact surface 55A of the fulcrum portion 55 of the locking member 42. A fitting recess 40B is provided at the upper end of the inclined surface 40A. The fitting recess 40B is a portion into which the fulcrum 55 of the locking member 42 is fitted.

  A simple attachment / detachment mechanism 32 is provided in the recess 33. The simple attachment / detachment mechanism 32 is a device that allows the production line lid 15 to be easily attached to and detached from the container body 12. As shown in FIG. 1, the simple attachment / detachment mechanism 32 includes a locking member 42, a feeding member 43, a cam mechanism 44, a holding cover 45, and a cover presser 46.

  The locking member 42 extends from the opening 34 of the main body 30 in a state where the production line lid 15 is mounted on the lid receiving portion 21 of the container main body 12, and the second fitting of the lid receiving portion 21 is performed. This is a member for fitting into the joint portion 24. As shown in FIGS. 1 and 9 to 11, the locking member 42 includes a connecting shaft 51, a base end side sliding contact surface 52, a base end upper cam 53, an upper groove portion 54, and a fulcrum portion 55. The distal end fitting portion 56, the proximal end side plate portion 57, and the distal end side plate portion 58 are configured.

  The connecting shaft 51 is a member for fitting the feeding member 43 and the locking member 42 to each other by fitting into a long hole portion 64 of the feeding member 43 described later. The connecting shaft 51 is formed in a round bar shape, and is provided on the base end portion of the locking member 42 toward the upper side.

  The base end side sliding contact surface 52 is a portion for sliding up and down the base end portion of the locking member 42 in sliding contact with the inclined surface 39A of the base end lower cam 39. The base end side sliding contact surface 52 is formed by obliquely shaving the lower side of the base end portion of the locking member 42. The base end side slidable contact surface 52 is mirror-finished to reduce the frictional resistance with the inclined surface 39A of the base end lower cam 39. In a state where the base end side sliding contact surface 52 is in sliding contact with the inclined surface 39A of the base end lower cam 39, the locking member 42 is extended, whereby the base end portion of the locking member 42 is pushed downward, When the stop member 42 is pulled, the base end portion of the locking member 42 is pushed upward.

  The base end upper cam 53 is a part for moving the base end portion of the locking member 42 up and down together with the base end lower cam 39. The proximal upper cam 53 is a portion that becomes a power point on the lever principle. Note that the connecting shaft 51 is not a force point of the lever principle, but is a portion that receives a force in the longitudinal direction when the locking member 42 is simply moved in and out.

  The proximal upper cam 53 is provided in the vicinity of the proximal end portion of the locking member 42 so as to face upward. The base end upper cam 53 has a side surface cross-sectional shape formed in a triangular shape, and includes a slope 53A that moves the base end side of the locking member 42 up and down. The slope 53A of the base end upper cam 53 is mirror-finished like the slope 39A of the base end lower cam 39, and comes into sliding contact with a cam presser protrusion 69 on the holding cover 45 described later. The slope 53A of the base end upper cam 53 is set to be substantially parallel to the slope 39A of the base end lower cam 39. Accordingly, when the locking member 42 is extended in a state where the cam presser protrusion 69 and the inclined surface 53A of the base end upper cam 53 are in sliding contact with each other, the base end upper cam 53 is pressed by the cam presser protrusion 69 and the locking member 42. The base end part of this is pushed downward. Further, when the locking member 42 is pulled, the base side sliding contact surface 52 is pushed by the inclined surface 39A of the base end lower cam 39 so that the base end portion of the locking member 42 is pushed upward. .

  The fulcrum portion 55 is a portion that supports the distal end portion of the locking member 42 and serves as a rotation center. The fulcrum portion 55 is a portion that becomes a fulcrum in the lever principle. The fulcrum portion 55 is formed on the lower side in the vicinity of the tip of the locking member 42 so as to be squared at a substantially right angle. A tip side sliding contact surface 55 </ b> A is formed at the apex portion of the angular fulcrum portion 55. The front end side sliding contact surface 55A is a part for sliding up and down the front end fitting portion 56 of the locking member 42 in sliding contact with the inclined surface 40A of the front end side cam 40. The tip side sliding contact surface 55A is formed by obliquely shaving the apex portion of the fulcrum portion 55. The tip side sliding contact surface 55A is mirror-finished to reduce the frictional resistance with the inclined surface 40A of the tip side cam 40. In a state where the tip side sliding contact surface 55A is in sliding contact with the inclined surface 40A of the tip side cam 40, the locking member 42 is extended, whereby the tip fitting portion 56 of the locking member 42 is pushed down and locked. By pulling the member 42, the tip end portion of the locking member 42 is pushed downward.

  Further, the fulcrum portion 55 is configured to rotate around the fitting recess 40B by being fitted into the fitting recess 40B of the distal cam 40.

  The front end fitting portion 56 is a portion that extends to the outside from the opening 34 of the concave portion 33 and is directly fitted to the second fitted portion 24 of the lid receiving portion 21. The tip fitting portion 56 is an action point of the lever principle. The front end fitting portion 56 is provided at a slight distance from the fulcrum portion 55 so that a sufficient force can be exerted in a state where it is fitted to the second fitted portion 24 of the lid receiving portion 21.

  The proximal end side plate portion 57 and the distal end side plate portion 58 are members for supporting the locking member 42 and allowing reciprocation.

  The feeding member 43 is a member that is connected to the locking member 42 and moves the locking member 42 in and out. The feeding member 43 is rotatably attached to the rotation support shaft 36 of the recess 33. As shown in FIGS. 1, 7, and 12 to 15, the feeding member 43 includes a top plate portion 61, a key groove 62, a rotating cylinder portion 63, a long hole portion 64, and an engagement piece 65. Yes.

  The top plate portion 61 is formed in a substantially disc shape. Cutouts 66 for providing engagement pieces 65 are provided at two opposing positions of the top plate portion 61.

  The key groove 62 is a groove into which a latch key of the apparatus is fitted when the production line lid 15 is automatically attached / detached by a lid attaching / detaching device (not shown). The key groove 62 is provided at the center of the upper side surface of the top plate portion 61.

  The rotating cylinder portion 63 is a member for rotatably attaching the feeding member 43 to the rotation support shaft 36 of the recess 33. The rotating cylinder portion 63 is provided at the center of the lower surface of the top plate portion 61. A key groove 62 is positioned at the center of the rotating cylinder portion 63.

  The elongated hole portion 64 is a portion for converting the rotation of the feeding member 43 into the retracting operation of the locking member 42. The long hole portions 64 are provided at two opposing positions of the top plate portion 61, respectively. The elongated hole portion 64 is formed of a part of a spiral so that one end portion 64A is close to the center of the top plate portion 61 and the other end portion 64B is far away. When the connecting shaft 51 of the locking member 42 is fitted at the one end portion 64A of the elongated hole portion 64, the locking member 42 is retracted, and when the coupling shaft 51 is fitted at the other end portion 64B, the locking member 42 is extended.

  A gently inclined wall surface 64 </ b> C is provided on the lower surface of the top plate portion 61 of the long hole portion 64. The wall surface 64 </ b> C is set to have the same height as the lower side surface of the top plate portion 61 at one end portion 64 </ b> A of the long hole portion 64 and gradually increase toward the other end portion. This is for reliably connecting the locking member 42 and the feeding member 43. That is, in the state where the connecting shaft 51 of the locking member 42 is fitted and fed out at the other end portion 64B of the elongated hole portion 64, the base end portion of the locking member 42 is pushed down. This is because the connecting shaft 51 can be reliably fitted into the long hole portion 64 even when the base end portion is pushed down.

  The engagement piece 65 is a member for supporting the feeding member 43 in a state where it is rotated by a predetermined angle. The engaging pieces 65 are provided at two opposing positions on the periphery of the top plate portion 61, respectively. The engagement piece 65 is configured by a plate-like member extending from the top plate portion 61 along the periphery. The tip of the engagement piece 65 is provided with a protrusion 65A that fits into the receiving portion 37A of the stopper 37. Furthermore, the engagement piece 65 has elasticity and elastically supports the protrusion 65A. When the protrusion 65A is fitted into the receiving portion 37A of the stopper 37, the feeding member 43 rotates a predetermined angle (an angle at which the locking member 42 is extended and the production line lid 15 is fixed to the container body 12). It comes to be supported when it moves.

  The cam mechanism 44 has a second fitted portion in a state where the tip fitting portion 56 of the locking member 42 fed by the feeding member 43 is fitted to the second fitted portion 24 of the lid receiving portion 21. It is a member that abuts on the upper surface of the part 24 and presses and fixes the production line lid 15 toward the container body 12 side. By this cam mechanism 44, the distal end fitting portion 56 of the locking member 42 fed by the feeding member 43 is pushed up and brought into contact with the upper surface of the second fitted portion 24, and the base end portion is pushed down to this principle. Thus, the production line lid 15 is pushed down to the container body 12 side and fixed. The cam mechanism 44 includes a proximal lower cam 39, a proximal upper cam 53, a proximal sliding surface 52, a cam presser protrusion 69, a distal cam 40, and a distal sliding surface 55A. Has been. The proximal lower cam 39, the proximal upper cam 53, the proximal sliding surface 52, the distal cam 40, and the distal sliding surface 55A are as described above.

  The cam retainer protrusion 69 is a member that abuts the inclined surface 53 </ b> A of the proximal upper cam 53 and pushes down the proximal end portion of the locking member 42 as the locking member 42 is extended. The cam presser protrusion 69 is provided on the lower surface of the holding cover 45. Specifically, in a state where the base end side sliding contact surface 52 of the locking member 42 is in sliding contact with the slope 39 of the base end lower cam 39, the cam presser protrusion 69 and the slope 53 </ b> A of the base end upper cam 53 have a gap. It is provided at a position where it comes into sliding contact.

  The holding cover 45 is a member for holding the locking member 42 and the feeding member 43. As shown in FIGS. 16 and 17, the holding cover 45 includes a feeding member holding portion 71 and a locking member holding portion 72.

  The feeding member holding part 71 is a member for supporting the feeding member 43 in a state where the rotation of the feeding member 43 is allowed. The feeding member holding portion 71 is composed of a peripheral plate 74 and a top plate 75. The peripheral plate 74 is formed so as to cover the peripheral edge of the feeding member 43. The top plate 75 is formed so as to cover the upper side of the feeding member 43. A key hole 76 having the same size as the key groove 62 of the feeding member 43 is provided at the center of the top plate 75. The key hole 76 is aligned with the key groove 62 of the feeding member 43 in a state where the top plate 75 covers the feeding member 43. As a result, the key groove 62 and the key hole 76 are aligned in a state where the locking member 42 is retracted.

  The locking member holding part 72 is a member for supporting the locking member 42 in a state in which the reciprocating motion is allowed. The locking member holding portion 72 is provided on each of the left and right sides of the feeding member holding portion 71. Each locking member holding portion 72 includes a side plate 78 and a top plate 79.

  The side plate 78 is a member for supporting the vicinity of the proximal end of the locking member 42 from the left and right. The side plate 78 includes a wide portion 78A and a narrow portion 78B. The wide portion 78A is a portion into which the base end side plate portion 57 of the locking member 42 is fitted. The narrow width portion 78 </ b> B is a portion into which the gap between the proximal end side plate portion 57 and the distal end side plate portion 58 of the locking member 42 is fitted.

  The top plate 79 is a member for supporting the locking member 42 from above. The above-described cam presser protrusion 69 is provided on the base end portion of the lower surface of the top plate. A support protrusion 80 that fits into the upper groove 54 of the locking member 42 is provided at the tip of the lower surface of the top plate 79. A slit 81 is provided on the tip side of the top plate, and a raised portion 82 is provided at the tip of the slit 81. The raised portion 82 includes a central raised piece 82 </ b> A and left and right locking pieces 82 </ b> B, and is elastically supported by a slit 81. The central raised piece 82A and the left and right locking pieces 82B of the raised portion 82 are fitted with the cross-shaped notch 86A of the cover presser 46 so that the holding cover 45 and the cover presser 46 are positioned. It has become.

  As shown in FIGS. 1, 18 and 19, the cover presser 46 is a member for fixing the holding cover 45 to the concave portion 33 of the production line lid 15. Specifically, the two cover pressers 46 support the respective locking member holding portions 72 and fix the holding cover 45 to the recess 33. The cover presser 46 includes a side plate 85, a top plate 86, an upper support plate piece 87, and a lower support plate piece 88.

  Each side plate 85 covers the left and right sides of the locking member 42 and allows the locking member 42 to reciprocate. The top plate 86 integrally supports the side plates 85 and covers the upper side of the locking member 42 to allow the locking member 42 to reciprocate. The upper support plate piece 87 is a member for supporting the top plate 79 of the locking member holding portion 72 of the holding cover 45 from below. The top plate 79 of the locking member holding part 72 is supported from above and below by the top plate 86 of the cover presser 46 and the upper support plate piece 87. The lower support plate piece 88 is a part for fixing the cover presser 46 to the recess 33. Three lower support plate pieces 88 are provided at the lower end of each side plate 85. Each lower support plate piece 88 is fitted into the locking claw 38 provided in the recess 33, thereby fixing the cover presser 46 to the recess 33. Each lower support plate 88 is provided with a taper 88 </ b> A so as to be easily fitted into the locking claw 38.

  As shown in FIGS. 20, 21, and 22, a wafer presser 91 as a thin plate presser is provided on the lower surface of the transport cover 14 and the production line cover 15. The wafer retainer 91 is a member for supporting a plurality of semiconductor wafers housed in the container body 12 from above. The wafer presser 91 includes a base end support portion 92, an elastic support plate portion 93, and a contact piece 94.

  The base end support portion 92 is a member for supporting the elastic support plate portion 93 and the contact piece 94. The proximal end support portion 92 is formed in a square bar shape over the entire length of the wafer retainer 91 and is fixed to the lower surface of the lid.

  The elastic support plate portion 93 is a member for elastically supporting the contact piece 94. The elastic support plate portions 93 are arranged side by side as many as the number of semiconductor wafers stored in the container body 12. Each elastic support plate portion 93 is fixed to the base end support portion 92 in a state of being arranged in a horizontal row. The elastic support plate portion 93 is composed of a first support plate piece 93A that is bent into a S shape on the side surface and a second support plate piece 93B that is bent into a U shape. The first support plate piece 93A has a base end portion fixed to the base end support portion 92, and a first contact piece 94A fixed to the tip end portion. The base end portion of the second support plate piece 93B is integrally connected to the first support plate piece 93A via the first contact piece 94A, and the second contact piece 94B is fixed to the distal end portion.

  The contact piece 94 is a member for directly supporting each semiconductor wafer. Each contact piece 94 includes a first contact piece 94A and a second contact piece 94B, and supports the semiconductor wafer at two locations. Each contact piece 94 includes two blocks 96 and support claws 97 as support pieces arranged alternately.

  The block 96 includes an inclined surface 96A and a contact surface 96B. The inclined surface 96 </ b> A is formed so as to open outward in a state where the two blocks 96 are attached to face each other, so that the peripheral edge of the semiconductor wafer can be easily inserted between the two blocks 96. The abutting surface 96B is formed so as to form a groove having a constant width (a width slightly wider than the thickness of the semiconductor wafer) in a state where the two blocks 96 are attached to face each other.

  The support claw 97 is a member for directly contacting and supporting the peripheral edge of the semiconductor wafer. The support claws 97 are provided on the contact surfaces 96B of the blocks 96, respectively. The support claw 97 is composed of vertically long ridges. The support claws 97 are alternately arranged on the contact surfaces 96B facing each other. Specifically, by providing two support claws 97 at both ends of one abutment surface 96B and one at the center of the other abutment surface 96B, the opposing support claws 97 are alternately arranged. ing. Each support claw 97 is formed of an elastic member and elastically supports the peripheral edge of the semiconductor wafer. Since the width between the two contact surfaces 96B is slightly wider than the thickness of the semiconductor wafer, the distance between the tips of the support claws 97 disposed on each contact surface 96B is narrower than the thickness of the semiconductor wafer. Become. For this reason, the semiconductor wafer is inserted between the support claws 97 while crushing the support claws 97 made of elastic members arranged alternately. Thereby, the support claws 97 arranged alternately are surely supported at the peripheral edge of the semiconductor wafer.

  A lid holder 100 is provided outside the production line lid 15 as shown in FIG. The lid holder 100 is a member for preventing the production line lid 15 from being detached from the container body 12. The lid holder 100 includes a support plate part 101, a hook part 102, and a fitting protrusion 103.

  The support plate portion 101 is a member for supporting the hook portion 102 and the fitting protrusion 103. Hook portions 102 are provided at both ends of the support plate portion 101, respectively. The hook portion 102 is hooked on the flange of the container body 12.

  The fitting protrusion 103 is provided on one side surface of the support plate portion 101. The fitting protrusion 103 is formed in the same shape as the key groove 62 and is fitted into the key groove 62 through the key hole 76. Two fitting protrusions 103 are provided at positions aligned with the two key grooves 62. Thereby, in a state where the hook portion 102 is hooked on the flange of the container main body 12, each fitting projection 103 is fitted into each key groove 62 to fix the feeding member 43. This is to prevent the feeding member 43 from rotating due to vibration, impact, or the like during transportation of the thin plate support container and loosening the fixing of the production line lid 15 to the container body 12.

  The thin plate support container 11 configured as described above is used as follows.

  When removing the production line lid 15 from the container body 12, the latch key is fitted into the key groove 62 and rotated. Thereby, from the state of FIG. 24A, the feeding member 43 rotates and the locking member 42 is gradually pulled. As a result, the tip side sliding contact surface 55A of the fulcrum portion 55 of the locking member 42 comes into sliding contact with the inclined surface 40A of the tip side cam 40, and the tip fitting portion as shown in FIGS. 24 (B), (C), and (D). 56 is pushed downward. At the same time, the base end side sliding contact surface 52 of the locking member 42 is in sliding contact with the inclined surface 39A of the base end lower cam 39, and the base end portion of the locking member 42 is pushed up. Thereby, the front end fitting portion 56 is completely accommodated in the main body portion 30. Then, the production line lid 15 is removed from the container body 12.

  When attaching the production line lid 15 to the container body 12, the production line lid 15 is attached to the lid receiving portion 21, and the latch key is fitted into the key groove 62 and rotated. Thereby, contrary to the above case, the main body 30 is pushed out by the locking member 42. At this time, the fulcrum portion 55 of the locking member 42 comes into sliding contact with the inclined surface 40A of the distal end side cam 40, and the distal end fitting portion 56 is pushed upward. Further, the cam pressing projection 69 comes into contact with the inclined surface 53 </ b> A of the base end upper cam 53 to push down the base end portion of the locking member 42. Thereby, the base end side sliding contact surface 52 of the locking member 42 is pushed down along the inclined surface 39 </ b> A of the base end lower cam 39.

  At the fulcrum portion 55 of the locking member 42, the distal-side slidable contact surface 55A is fitted into the fitting recess 40B, and the locking member 42 rotates around the fitting recess 40B.

  At the base end portion of the locking member 42, the base end side sliding contact surface 52 is in sliding contact with the inclined surface 39 </ b> A of the base end lower cam 39, and the cam presser protrusion 69 is in contact with the inclined surface 53 </ b> A of the base end upper cam 53. The base end portion of the locking member 42 is pushed down.

  Accordingly, the locking member 42 functions by using the fulcrum portion 55 fitted in the fitting recess 40B as a fulcrum, and the tip fitting portion 56 is fitted into the second fitted portion 24 of the lid receiving portion 21. In the joined state, the production line lid 15 is firmly pushed down to the container body 12 side and fixed.

  The lid holder 100 is attached in a state where the production line lid 15 is attached to the container body 12. Specifically, the hook portion 102 is hooked on the flange portion of the container body 12. As a result, the fitting protrusion 103 is fitted into the key groove 62 to fix the feeding member 43.

  Inside the container body 12, the peripheral edge of the semiconductor wafer is fitted into the contact piece 94. In the abutment piece 94, the peripheral edge of the semiconductor wafer fits between the support claws 97 arranged alternately, and is reliably supported by the support claws 97.

  When a strong impact is applied from the outside of the thin plate support container 11, the locking member 42 strongly presses the production line lid 15 against the container main body 12 according to the principle of the lever. It will not deviate from 12. Further, since the feeding member 43 is fixed by the lid holder 100, the feeding member 43 does not rotate and the locking member 42 does not come off from the second fitted portion 24.

  On the other hand, the semiconductor wafer in the thin plate support container 11 is fitted to the contact piece 94 of the wafer retainer 91 and is supported from both sides by the support claws 97 arranged alternately. It will not deviate from 94. Further, since the abutment piece 94 is supported by the elastic support plate portion 93, the first support plate piece 93A and the second support plate piece 93B hit the lower surface of the production line lid body 15 by their own elasticity and the semiconductor. Supports the wafer and prevents damage to the semiconductor wafer.

  When cleaning, the cover presser 46 is shifted and removed from the locking claw 38, so that the simple attachment / detachment mechanism 32 causes the locking member 42, the feeding member 43, the cam mechanism 44, the holding cover 45, and the cover presser 46 to be separated. Can be washed separately and dried.

  As described above, the thin plate support container 11 has the following effects.

(1) Since the locking member 42 is fed out using the lever principle, the production line lid 15 can be reliably fixed to the container body 12 with a strong force.

(2) Since the simple attachment / detachment mechanism can be easily disassembled into each component, when cleaning, it can be removed and disassembled into each component so that it can be thoroughly washed and dried quickly.

(3) Since the support claws 97 are arranged in a staggered manner, the support claws 97 abut on the periphery of the semiconductor wafer in a staggered manner and can be reliably supported.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. In the present embodiment, the wafer presser is improved.

  The thin plate support container may vibrate due to various factors such as during transportation. If this vibration is transmitted to the semiconductor wafer, the vibration may cause the semiconductor wafer to rotate, which is not desirable. For this reason, when the thin plate support container is used in a mode exposed to vibration, the wafer presser (thin plate presser) of the present embodiment is used. The wafer holder 121 of this embodiment will be described with reference to FIGS. In addition, since it is the same as that of the thin plate support container 11 of the said 1st Embodiment except the wafer holder 121, the same code | symbol is attached | subjected to the same member and the description is abbreviate | omitted.

  As shown in FIG. 40, the wafer retainer 121 includes a base end support portion 122, an elastic support plate portion 123, a contact piece 124, a connection support plate portion 125, and support ribs 126.

  The base end support portions 122 are members that are respectively provided at both ends of the wafer retainer 121 and directly support the two elastic support plate portions 123. The base end support portion 122 is formed in a square bar shape and is formed over the entire length of the wafer presser 121 in the longitudinal direction (vertical direction in FIG. 35). Two hook-shaped support portions 128 are provided on the lower surface of the lid 127, respectively. The proximal end support portions 122 are fitted into the respective hook-shaped support portions 128 and are fixed to the back side of the lid.

  The elastic support plate portion 123 is a member for elastically supporting the outer end of the contact piece 124. The two elastic support plate portions 123 are provided side by side as many as the number of semiconductor wafers 120 accommodated in the container body 12. Each elastic support plate portion 123 is fixed to the base end support portion 122 in a state of being arranged in a horizontal row. The elastic support plate portion 123 is configured by bending the side surface shape into an S shape. The two elastic support plate parts 123 are fixed at their base end parts to the two base end support parts 122, respectively, and contact pieces 124 are respectively attached to the front end parts to elastically support the contact pieces 124. ing.

  The contact piece 124 is a member for directly supporting the semiconductor wafer 120 by directly contacting the peripheral edge of each semiconductor wafer 120. As shown in FIGS. 42 and 43, a V-shaped fitting groove 124 </ b> A into which the semiconductor wafer 120 is fitted is provided on one side surface of each contact piece 124. The fitting groove 124A is a two-stage V-shaped groove. The first stage is a groove having a gentle slope with an angle of 124 °. The second stage is a groove having an inclination of an angle of 44 °. As a result, when the edge of the semiconductor wafer 120 comes into contact with the first-stage groove, the edge of the semiconductor wafer 120 is guided by a gentle inclination and falls into the second-stage groove. The wafer 120 is supported. The bottom of the second-stage groove is formed in a flat surface shape with the same width as the thickness of the semiconductor wafer 120. The inclination angle and the bottom width of the second-stage groove are formed in accordance with the dimensions of the edge of the semiconductor wafer 120. Since the edge of the semiconductor wafer 120 is cut at an edge angle of 44 °, the inclination angle of the groove is set to 44 °. Further, the width of the bottom of the groove is set in accordance with the width of the edge of the semiconductor wafer 120. As a result, the second-stage groove grips the edge of the semiconductor wafer 120, so that the semiconductor wafer 120 can be reliably supported in contact with a wide area, and the rotation of the semiconductor wafer 120 can be suppressed against vibration. It is like that. The second-stage groove is set to 44 ° in accordance with the edge angle of the semiconductor wafer 120, but may be a slightly narrower angle in relation to the material of the contact piece 124. Specifically, it is appropriately set in the range of about 40 ° to 44 ° according to the difference in elastic force. If the angle of the second-stage groove is too narrow, the edge of the semiconductor wafer 120 is pinched, and the semiconductor wafer 120 may be lifted together when the lid 127 is lifted, so the semiconductor wafer 120 is not pinched. Set to an angle of about. In addition, when the edge angle of the semiconductor wafer 120 is different, or in the case of a thin plate other than the semiconductor wafer 120, the angle is appropriately set within a range of about 20 ° to 60 °.

  As shown in FIGS. 40 and 41, the bottom of the fitting groove 124A is set so as to be at an angle along the outer peripheral edge shape of the semiconductor wafer 120, that is, a tangential direction of the outer peripheral edge of the semiconductor wafer 120. In addition, since the elastic force increases in proportion to the amount of deflection of the wafer presser 121, the force with which each contact piece 124 presses the semiconductor wafer 120 is equalized as a whole. That is, when the amount of change in one of the two abutting pieces 124 increases, the elastic force increases according to the amount of change, and the semiconductor wafer 120 is pushed slightly toward the other abutting piece 124 side, so that the two abutting pieces Since the elastic force of the piece 124 is settled at the same strength, as a result, the left and right are automatically adjusted so as to have the same elastic force. Furthermore, in a state in which the lid body 127 is attached to the container main body 12, it is set so as to come into contact with the bottom near the center of the fitting groove 124A (contact point A in FIG. 41).

  The connection support plate part 125 is a member for connecting and supporting the two contact pieces 124 together. Both end portions of the connecting support plate portion 125 are connected to the contact pieces 124 to elastically support the contact pieces 124. The connecting support plate portion 125 is formed by bending the side surface shape into a substantially U shape. Specifically, it is composed of vertical plate portions 125A and 125B on both sides and a horizontal plate portion 125C. The vertical plate portions 125 </ b> A and 125 </ b> B are arranged in a direction perpendicular to the back surface of the lid body 127 and support each contact piece 124 with almost no bending.

  The horizontal plate portion 125C is elastically bent. The function of the connecting support plate portion 125 to elastically support each contact piece 124 is mainly performed by the horizontal plate portion 125C. The horizontal plate portion 125C is arranged in a direction along the back surface of the lid 127 with the vertical plate portions 125A and 125B connected to both ends thereof. The central portion of the horizontal plate portion 125C is supported by a support protrusion 131 described later, and both ends are bent around the support protrusion 131.

  The elastic force generated by the deformation of the horizontal plate portion 125C (the elastic force by which the connecting support plate portion 125 supports the contact piece 124) is set stronger than the elastic force by which the elastic support plate portion 123 supports the contact piece 124. ing. As a result, the two abutting pieces 124 are supported at their inner ends with a strong elastic force and supported at their outer ends with a weak elastic force. Further, the bottoms of the fitting grooves 124A of the two contact pieces 124 are disposed in the tangential direction of the outer peripheral edge of the semiconductor wafer 120 as described above. Thereby, the supporting force of the semiconductor wafer 120 by the wafer holder 121 is set so as to increase in proportion to the movement amount (vibration amount) of the semiconductor wafer 120. That is, in a normal state, as indicated by a solid line in FIG. 41, the semiconductor wafer 120 is supported by being in contact with the bottom of the fitting groove 124A in the vicinity of the substantially central portion (contact point A in FIG. 41). When the semiconductor wafer 120 vibrates, the inner end of the contact piece 124 supported by the strong elastic force of the connecting support plate 125 does not change much, and the outer end of the elastic support plate 123 supported by the weak elastic force becomes large. As indicated by the phantom line in FIG. 41, the semiconductor wafer 120 is supported by moving to the inner end side (contact B side in FIG. 41) on the bottom of the fitting groove 124A. Thereby, when the vibration amount of the semiconductor wafer 120 is small (the deflection amount of the wafer presser 121 is small), the semiconductor wafer 120 contacts the bottom of the fitting groove 124A on the outer end side (contact A side in FIG. 41). When the semiconductor wafer 120 is supported by a weak elastic force and the vibration amount of the semiconductor wafer 120 increases (the amount of deflection of the wafer presser 121 increases), the contact point of the semiconductor wafer 120 becomes the inner end side of the fitting groove 124A ( It moves to the contact B side in FIG. 41 and is supported by a strong elastic force. Furthermore, the greater the amount of movement of the contact point of the semiconductor wafer 120 toward the inner end side, the greater the force applied to the connecting support plate portion 125 than the elastic support plate portion 123, and the elastic force becomes stronger. It is designed to efficiently suppress vibrations.

  The support rib 126 is a support member for supporting the connection support plate portion 125 and preventing displacement in the direction along the back surface of the lid. As shown in FIGS. 34 to 40, the support rib 126 is provided at the center of the back surface of the lid 127. The supporting ribs 126 are provided so as to cover all of the connecting support plate portions 125 of the wafer pressers 121 arranged in large numbers. Specifically, the length is set such that all of the connecting support plate portions 125 arranged side by side as many as the number of stored semiconductor wafers 120 can be fitted. The support rib 126 includes two support wall portions 129 and 130.

  The support wall portions 129 and 130 are provided in parallel to face each other. Each of the support wall portions 129 and 130 includes a support plate piece 133 and a partition plate piece 134.

  The support plate piece 133 is a member for supporting the vertical plate portions 125 </ b> A and 125 </ b> B of the connection support plate portion 125 so as not to be displaced in the circumferential direction of the semiconductor wafer 120 (left and right direction in FIG. 40). The support plate piece 133 directly supports the vertical plate portions 125 </ b> A and 125 </ b> B of the connection support plate portion 125, thereby indirectly supporting the contact pieces 124 so as not to be displaced in the circumferential direction of the semiconductor wafer 120. is doing.

  The partition plate piece 134 is a plate piece for individually partitioning the connection support plate portions 125 arranged in large numbers. Each partition plate piece 134 is provided so as to be positioned between the outermost side and each connection support plate portion 125. Thereby, each partition plate piece 134 supports each connection support plate part 125 from the width direction both sides. Thereby, each partition plate piece 134 supports the connection support plate part 125 directly, so that each contact piece 124 is not indirectly shifted in a direction orthogonal to the circumferential direction of the semiconductor wafer 120. I support it.

  The support plate piece 133 and the partition plate piece 134 support the articulated support plate portion 125 by sandwiching them from the periphery (a direction perpendicular to the circumferential direction of the semiconductor wafer 120 housed in the container body 12). The shift of the connecting support plate 125 in the direction along the back surface of the lid body is prevented, and variation in the direction perpendicular to the back surface of the lid body is allowed.

  A small gap is set between the support plate piece 133 and the partition plate piece 134 and the connection support plate portion 125 so that they do not come into contact with each other when the vibration is small. That is, when the semiconductor wafer 120 is slightly vibrated, the connecting support plate portion 125 is bent without absorbing the support plate piece 133 and the partition plate piece 134 and absorbs the vibration. When the vibration becomes intense, the connection support plate portion 125 also vibrates vigorously through the contact pieces 124, so that the connection support plate portion 125 is supported by being in contact with the support plate piece 133 and the partition plate piece 134. It has become.

  Between the two support wall portions 129 and 130 of the support rib 126, as shown in FIGS. 34 and 37 to 39, a support protrusion 131 is provided. The supporting ridge 131 is a member for directly abutting and supporting each connecting support plate portion 125. Specifically, the center portion of the horizontal plate portion 125C of each connection support plate portion 125 is supported by being in contact with the support protrusion 131, and both end portions of the horizontal plate portion 125C can be freely bent. ing. The support ridge 131 is provided at a central portion between two support wall portions 129 and 130 provided in parallel to face each other, in parallel with the support wall portions 129 and 130 and with substantially the same length. .

  The supporting ridge 131 is configured as shown in FIGS. 38 and 39. That is, both sides (b side in FIG. 38) are thin and the center side (in FIG. 38) so that the contact piece 124 located on the center side is raised toward the semiconductor wafer 120 side compared to the contact pieces 124 located on both sides. a side) is formed thick. In the present embodiment, the entirety is curved in a bow shape. Thereby, in a state where the wafer presser 121 is attached to the lid 127, the distance from each connecting support plate 125 is set to be wide on both sides and narrow on the center side as shown in FIG. . The specific dimension of the supporting protrusion 131 is appropriately set according to the amount of bending of the lid 127.

  The supporting ridge 131 is formed in this way for the following reason. When the lid 127 is attached in a state where a plurality of semiconductor wafers 120 are accommodated in the container body 12, a certain repulsive force acts on the lid 127. Since the wafer presser 121 attached to the back surface of the lid supports each semiconductor wafer 120 with a constant force one by one, the diameter of the semiconductor wafer 120 becomes large and the force to support the single semiconductor wafer 120 is large. The greater the number of sheets and the greater the number of sheets, the greater the repulsive force that pushes back the wafer retainer 121. Due to the repulsive force, the lid 127 to which the wafer presser 121 is attached is slightly bent outward. When the lid 127 is bent outward, the force for supporting the semiconductor wafer 120 by the wafer retainer 121 is weakened at the center. In order to eliminate the non-uniformity of the force for supporting the semiconductor wafer 120, a supporting protrusion 131 is provided. The bending of the lid 127 is absorbed by the supporting protrusion 131 having a thicker central side, so that the wafer presser 121 supports each semiconductor wafer 120 with an equal force.

  The thin plate support container configured as described above operates as follows.

  When the lid 127 is attached in a state where a plurality of semiconductor wafers 120 are stored in the container main body 12, the wafer presser 121 is fitted to each semiconductor wafer 120. Specifically, the fitting groove 124A of each contact piece 124 is individually fitted to the periphery of each semiconductor wafer 120, and the periphery of each semiconductor wafer 120 is guided to the bottom of the fitting groove 124A. At this time, with the edge of the semiconductor wafer 120 fitted into the second-stage groove, the second-stage groove grips the edge of the semiconductor wafer 120 and reliably contacts the semiconductor wafer 120 over a wide area. To support. Each contact piece 124 is supported by the elastic support plate portion 123 and the connection support plate portion 125.

  The elastic support plate 123 elastically supports the outer end of each abutting piece 124 at the distal end portion of the elastic support plate portion 123 supported by the proximal end support portion 122 fixed to the back surface of the lid 127. is doing. The connection support plate portion 125 elastically supports the inner ends of the contact pieces 124 at both side end portions with the central portion supported by the support rib 126.

  Further, the support protrusions 131 curved in a bow shape support the contact pieces 124 in a state where the bending of the lid 127 is absorbed. Thereby, each contact piece 124 supports each semiconductor wafer 120 with equal force.

  Each contact piece 124 is elastically supported at its inner end with a relatively strong force and elastically supported at its outer end with a relatively weak force. At this time, each contact piece 124 is in contact with each semiconductor wafer 120 with the bottom of the fitting groove 124 </ b> A extending along the tangential direction of the periphery of each semiconductor wafer 120, and the two contact pieces 124. The elastic force is automatically adjusted so as to have the same strength, and the force for pressing the semiconductor wafer 120 is equalized as a whole, so that the semiconductor wafer 120 is stably supported.

  When vibration is applied to the thin plate support container during conveyance of the thin plate support container, each semiconductor wafer 120 also vibrates. Further, each contact piece 124 also vibrates according to the vibration of the semiconductor wafer 120.

  At this time, if the vibration is gentle, the amplitude of each contact piece 124 is small, so that the contact between the semiconductor wafer 120 and each contact piece 124 is outside (for example, near the contact A in FIG. 41) and is mainly elastic. The support plate portion 123 bends and supports with weak elastic force.

  When the vibration is intense, the amplitude of each contact piece 124 increases, but as the contact piece 124 swings greatly, the contact between the semiconductor wafer 120 and each contact piece 124 moves inward (for example, near the contact B in FIG. 41). Depending on the amount of movement, the force applied to the connecting support plate 125 from the elastic support plate 123 increases, and the elastic force increases. For this reason, when the semiconductor wafer 120 tries to vibrate greatly, the contact piece 124 is pushed back with a strong elastic force to suppress the vibration of the semiconductor wafer 120. As a result, the force for supporting the semiconductor wafer 120 is automatically changed according to the intensity of vibration, so that the semiconductor wafer 120 is reliably supported.

  As a result, all the semiconductor wafers 120 are supported with a uniform force, and the vibrations of the semiconductor wafers 120 can be minimized with respect to external vibrations, thereby preventing the semiconductor wafers 120 from rotating. Can do.

[Modification]
(1) In the first embodiment, the wafer presser 91 is composed of the base end support portion 92, the elastic support plate portion 93, and the contact piece 94, but as shown in FIGS. The base end support part 110, the elastic support plate part 111, and the contact piece 112 are comprised. The elastic support plate portion 111 supports one end of the contact piece 112 in a state where the base end portion is fixed to the base end support portion 110. Further, the elastic support plate portion 111 is formed to extend from the other end of the contact piece 112 to the lower surface of the production line lid 15. In the contact piece 112, the inclined surface 112A and the contact surface 112B have substantially the same functions as the inclined surface 96A and the contact surface 96B of the above embodiment. The support claws 113 are alternately arranged in groups of three. The number of the support claws 113 is set as necessary.

  Even in this configuration, the same operations and effects as the above-described embodiment can be achieved.

(2) In the first embodiment, the wafer retainer 91 has a cantilever structure, but it may have a both-end structure as shown in FIGS. The elastic support plate portions are attached between the contact pieces and supported on both sides, and the elastic support plate portions between the contact pieces are slightly lifted by the gap S from the lower surface of the production line lid 15. Each contact piece is supported in a state.

  Thus, the elastic support plate portion between the contact pieces is supported in a state where the elastic support plate portion is slightly lifted from the mounting surface, so that the thin plate is normally supported with a force that is not so strong. When a large impact is applied from the outside, such as when the thin plate support container is accidentally dropped, the gap S disappears and the elastic support plate portion between the contact pieces comes into contact with the support surface. Strongly support. This protects the thin plate from strong impacts.

(3) Although the semiconductor wafer is supported by the support claws 97 in the first embodiment, it may be supported by a block. As shown in FIGS. 30 and 31, the two blocks 115 are arranged in a staggered manner in the same manner as in the above embodiment. That is, a set of two blocks 115 that are butted together are arranged in groups of four while maintaining a constant distance from each other, and they are alternately shifted. Furthermore, each contact surface 115A of the set of blocks 115 was set to 20 ° and 4 ° with respect to the vertical. The side on which the semiconductor wafer abuts was set to 4 °. Accordingly, the semiconductor wafer can be reliably supported without being shifted by holding the periphery of the semiconductor wafer at an angle of 4 ° on one side (8 ° on both sides).

  In this case, each block may be provided as shown in FIGS. This is substantially the same configuration as that described with reference to FIGS. 28 and 29, and can provide the same operations and effects.

(4) In the first embodiment, the example in which the thin plate support container lid is used in the production line has been described. However, the thin plate support container lid may be used for storage, transportation, and the like. Also in this case, the same operation and effect as the above-described embodiment can be obtained.

(5) In the first embodiment, two simple attachment / detachment mechanisms 32 are provided on the production line lid 15, but one, three, or more may be provided according to the standard or the like.

(6) In the first embodiment, the case where the thin plate support container lid is applied to a semiconductor wafer storage container has been described as an example. However, the present invention is not limited to a semiconductor wafer but may be applied to other thin plate storage containers. Can do. Also in this case, the same operation and effect as the above-described embodiment can be obtained.

(7) In the first embodiment and the modification, the wafer holder as a thin plate holder for supporting the thin plate housed in the container body is applied to the thin plate support container 11 of the above embodiment. However, the present invention can be applied to thin plate supporting containers having other structures. Also in this case, the same operation and effect as the above-described embodiment can be obtained.

(8) In the first embodiment, the lid holder 100 is applied to the thin plate support container 11. However, the present invention is not limited to this and can be applied to thin plate support containers having other structures. Also in this case, the same operation and effect as the above-described embodiment can be obtained.

(9) In the second embodiment, two contact pieces 124 of the wafer presser 121 are provided, but three or more contact pieces 124 may be provided. When three or more contact pieces 124 are provided, the connecting support plate portion 125 and the support rib 126 are provided between the contact pieces 124. Also in this case, the same operation and effect as the above-described embodiment can be obtained.

(10) In the second embodiment, the horizontal plate portion 125C is supported by the support protrusions 131, but a support protrusion may be provided at the center of the horizontal plate portion 125C. When providing the support protrusion, the support protrusion 131 may or may not be provided. When the supporting protrusion 131 is provided, the supporting protrusion comes into contact with the supporting protrusion 131, and when the supporting protrusion 131 is not provided, the supporting protrusion comes into contact with the back surface of the lid 127. Support 125C.

  When the supporting protrusion 131 is not provided, the height of the supporting protrusion at the center of the horizontal plate portion 125C is set so that the center side is higher than both sides as in the second embodiment. In the case of providing the supporting ridge 131, the total height of the supporting protrusion and the supporting ridge 131 at the center of the horizontal plate portion 125C is set so that the center side is higher than both sides. Also in this case, the same operation and effect as the second embodiment can be obtained.

(11) In the second embodiment, the fitting groove 124A of the contact piece 124 is formed in a V shape. However, like the contact piece 94 of the first embodiment, the contact pieces 124 are alternately arranged. You may provide the support piece arrange | positioned. That is, the contact piece 124 of the second embodiment may be configured by two blocks 96 and support claws 97 (support pieces) arranged alternately, like the contact piece 94 of the first embodiment. Good. Thereby, the support pieces arranged alternately are in contact with the periphery of the semiconductor wafer 120 alternately, and the semiconductor wafer 120 is reliably supported. As a result, it is possible to more reliably prevent the semiconductor wafer 120 from rotating, coupled with the fact that the vibration of the semiconductor wafer 120 can be minimized with respect to external vibration.

(12) The configuration for supporting the contact piece 124 of the wafer presser 121 is not limited to the second embodiment, and other configurations may be used. Any configuration is possible as long as the abutting piece 124 can be disposed so as to protrude toward the semiconductor wafer 120 from the center side compared to those located on both sides thereof.

  For example, the elastic support plate portion 123 may be formed so that the contact piece 124 located on the center side is raised relative to the contact piece 124 located on both sides and is raised toward the semiconductor wafer 120 side. One or both of the elastic support plate 123 and the connection support plate 125 are arranged such that the contact piece 124 located on the center side is raised to the semiconductor wafer 120 side as compared to the contact pieces 124 located on both sides. Alternatively, it may be formed.

(13) In the second embodiment, the connection support plate 125 is supported by the support rib 126, but may be supported by a protrusion. Specifically, as shown in FIG. 44, by fitting in the fitting hole 141 provided in the connection support plate part 125, displacement along the cover back surface of the connection support plate part 125 is prevented to prevent the cover body back surface. The connection support plate portion 125 may be supported by the fitting protrusion 142 that allows a change in the direction perpendicular to the vertical direction. Also in this case, the same operation and effect as the second embodiment can be obtained.

(14) In the second embodiment, the bottom portion of the V-shaped fitting groove 124A of the contact piece 124 is formed in a flat surface shape with substantially the same width as the thickness of the semiconductor wafer 120, but as shown in FIG. The bottom may be made thinner. Specifically, the contact piece 151 includes a V-shaped groove 151 </ b> A having the same inclination angle 44 ° as the edge angle 44 ° of the edge of the semiconductor wafer 152. The V-shaped groove 151A has an angle set in two stages, but the angle may be set in one stage.

  The bottom of the V-shaped groove 151 </ b> A is formed thinner than the heat of the semiconductor wafer 152. Thus, with the semiconductor wafer 152 fitted in the V-shaped groove 151A, a gap 153 is formed between the edge of the semiconductor wafer 152 and the bottom of the V-shaped groove 151A. It is supported by the inclined surface of the groove 151A. At this time, since the edge angle of the edge of the semiconductor wafer 152 and the inclination angle of the V-shaped groove 151A of the contact piece 151 are both 44 °, the edge of the semiconductor wafer 152 and the inclined surface of the V-shaped groove 151A are Contact in a large area.

  Further, since there is a gap 153 between the edge of the semiconductor wafer 152 and the bottom of the V-shaped groove 151A, the edge of the semiconductor wafer 152 is not directly supported, and as a result, the edge of the semiconductor wafer 152 becomes the V-shaped groove. I bite into 151A like a wedge. As a result, the edge of the semiconductor wafer 152 is strongly pressed against the inclined surface of the V-shaped groove 151A.

  As a result, the semiconductor wafer 152 can be reliably supported by the thin plate press contact piece 151 without pressing the thin plate press contact piece 151 too strongly against the semiconductor wafer 152, and the semiconductor wafer 152 of the semiconductor wafer 152 caused by vibration or the like can be supported. Rotation can be prevented. As a result, the semiconductor wafer 152 can be reliably supported without attaching the lid to the container main body so strongly that rotation of the semiconductor wafer 152 due to vibration or the like can be prevented. This eliminates the need to increase the strength of the lid. Thereby, automation of the attaching / detaching operation of the lid is also facilitated.

  In addition, by setting the inclination angle of the V-shaped groove 151A of the contact piece 151 to 20 ° to 60 °, substantially the same operation and effect as described above can be achieved. In this case, when the semiconductor wafer 152 is fitted into the V-shaped groove 151A of the contact piece 151, the edge portion of the semiconductor wafer 152 bites into the V-shaped groove 151A. At this time, if the inclination angle of the V-shaped groove 151A is set to 20 ° to 60 °, the semiconductor wafer 152 can be reliably supported and detached. That is, when the semiconductor wafer 152 is fitted into the V-shaped groove 151A, the edge of the semiconductor wafer 152 is supported by being bitten into the V-shaped groove 151A. At this time, if the inclination angle of the V-shaped groove 151A is set to 60 ° or more, the semiconductor wafer 152 may rotate due to insufficient penetration of the V-shaped groove 151A. Actually, when the experiment was conducted by setting the inclination angle of the V-shaped groove 151A to 60 °, the V-shaped groove 151A was slightly rotated by vibration from the outside. When the inclination angle exceeded 60 °, the rotation became severe due to external vibration.

  Further, when the contact piece 151 is pulled away from the semiconductor wafer 152, the semiconductor wafer 152 that has bitten into the V-shaped groove 151A is smoothly separated without being caught by the V-shaped groove 151A. At this time, if the inclination angle of the V-shaped groove 151A is set to 20 ° or less, when the contact piece 151 is pulled away from the semiconductor wafer 152, the semiconductor wafer 152 is caught by the V-shaped groove 151A and the semiconductor wafer 152 is pulled out. May end up. Actually, when the experiment was conducted with the inclination angle of the V-shaped groove 151A set to 20 °, the semiconductor wafer 152 was caught in the V-shaped groove 151A, and the semiconductor wafer 152 was pulled out of the container body. When the inclination angle was less than 20 °, the catch became serious.

  For this reason, it is desirable to set the inclination angle of the V-shaped groove 151A to 20 ° to 60 °. Thereby, it is possible to achieve both the prevention of rotation due to the biting into the V-shaped groove 151A of the semiconductor wafer 152 and the smooth separation.

  Accordingly, the semiconductor wafer 152 can be reliably supported, the lid can be easily attached and detached, and the attachment and detachment of the lid can be easily automated.

  In addition, the inclination angle of the V-shaped groove 151A is set to 20 ° to 60 °, and it is desirable to provide a gap between the edge of the semiconductor wafer 152 and the bottom of the V-shaped groove 151A of the contact piece 151. In this case, when the semiconductor wafer 152 is fitted into the V-shaped groove 151A, the edge of the semiconductor wafer 152 and the bottom of the V-shaped groove 151A do not contact each other, and the edge of the semiconductor wafer 152 and the V-shaped groove 151A The inclined surface is strongly pressed, and the semiconductor wafer 152 is firmly supported by biting into the V-shaped groove 151A. Moreover, attachment / detachment is also facilitated as described above.

(15) In the second embodiment, the center side of the support protrusion 131 of the lid 127 is thickened to absorb the deflection of the lid 127, and the wafer holder 121 supports each semiconductor wafer 120 with an equal force. However, the lid 127 itself may be improved.

  Specifically, the center part of the flat lid 127 is recessed toward the container body side to cancel the deflection caused by each semiconductor wafer 120. That is, when the lid 127 is attached to the container main body, the lid 127 is pushed back by each semiconductor wafer 120 and the central portion thereof is bent outward, but the central portion of the lid 127 is previously set so as to cancel the bending. It is formed to be depressed toward the container body side. As a result, when the central portion of the lid 127 bends outward, the depression absorbs the bend and becomes flat, and the wafer presser 121 supports the entire semiconductor wafer 120 with equal force. it can.

  The size of the central portion of the lid 127 that is depressed toward the container body is set according to various conditions such as repulsive force that varies depending on the number of semiconductor wafers 120 and the like. In addition, the shape of the recess is appropriately set in a state where the semiconductor wafer 120 can be supported with an equal force by canceling it according to a deformation state due to a repulsive force such as a spherical shape, an elliptical shape, or an aspherical shape. Thereby, the whole semiconductor wafer 120 can be supported with an equal force, and the rotation of the semiconductor wafer 120 due to vibration or the like can be prevented. In this case, the supporting protrusion 131 of the lid 127 is set to have the same thickness on both ends and the center. Further, the thickness of the central recess of the lid 127 and the thickness of the support ridge 131 are absorbed by both the recess of the central portion of the lid 127 and the thickness of the support ridge 131. Both of them may be adjusted.

  Further, the reinforcing flange around the lid 127 may be curved. That is, the reinforcing flange that forms the periphery of the lid 127 may bend due to the repulsive force of each semiconductor wafer 120. In order to cancel the bending of the reinforcing flange, the reinforcing flange is formed by bending the container body in advance. May be.

  When the thin plate presser abuts against the semiconductor wafer 120 and supports the semiconductor wafer 120, the reinforcing flange that forms the periphery of the lid 127 is also bent outward by the repulsive force. This outward deflection is absorbed by bending to the left. In other words, the reinforcing flange that has been curved in advance becomes a straight line by the outward deflection, thereby canceling the deflection and supporting the entire semiconductor wafer 120 with a uniform force. The specific dimensions of the reinforcing flange are appropriately set to dimensions and shapes that can absorb and cancel the deflection, as in the case of the central portion of the lid 127. A mode in which the reinforcing flange is curved, a mode in which the central portion of the lid 127 is depressed, and a mode in which the thickness of the supporting protrusion 131 is adjusted may be appropriately combined.

  Alternatively, a reinforcing member may be inserted into a reinforcing flange that forms the periphery of the lid 127 and insert molding may be performed. As a result, the strength of the reinforcing flange is increased, the repulsive force of each semiconductor wafer 120 can be withstood, and the entire semiconductor wafer 120 can be supported with a uniform force. Also in this case, the reinforcing member is inserted into the reinforcing flange for reinforcement, the reinforcing flange is bent, the central portion of the lid 127 is depressed, and the thickness of the supporting protrusion 131 is adjusted. You may combine an aspect suitably.

  In these cases, the same operations and effects as the above-described embodiments can be obtained.

It is a fragmentary perspective view which shows the cover body for manufacturing lines which concerns on 1st Embodiment of this invention. It is a side cross section which shows the cover body for the conventional thin plate support container. It is a perspective view which shows the thin plate support container which concerns on 1st Embodiment of this invention. It is a perspective view which shows the thin plate support container which concerns on 1st Embodiment of this invention in the state which removed the cover body. It is a fragmentary perspective view which shows the cover body receiving part of the thin plate support container which concerns on 1st Embodiment of this invention. It is a fragmentary sectional view of the lid receiving part of the thin plate support container concerning a 1st embodiment of the present invention. It is an upper surface perspective view which shows the cover body for manufacturing lines which concerns on 1st Embodiment of this invention. It is a bottom perspective view showing the production line lid according to the first embodiment of the present invention. It is a top perspective view showing the locking member concerning a 1st embodiment of the present invention. It is a bottom perspective view showing a locking member concerning a 1st embodiment of the present invention. It is side surface sectional drawing which shows the locking member which concerns on 1st Embodiment of this invention. It is an upper surface perspective view which shows the feeding member which concerns on 1st Embodiment of this invention. It is a bottom perspective view showing a feeding member according to the first embodiment of the present invention. It is a top view which shows the feeding member which concerns on 1st Embodiment of this invention. It is a reverse view which shows the payout member which concerns on 1st Embodiment of this invention. It is a top perspective view showing a holding cover concerning a 1st embodiment of the present invention. It is a bottom perspective view showing a holding cover concerning a 1st embodiment of the present invention. It is a top perspective view showing a cover presser according to the first embodiment of the present invention. It is a top perspective view showing a cover presser according to the first embodiment of the present invention. It is a side view which shows the wafer holder which concerns on 1st Embodiment of this invention. It is a perspective view which shows the wafer holder which concerns on 1st Embodiment of this invention. It is a perspective view which shows the wafer holder which concerns on 1st Embodiment of this invention. It is a perspective view which shows the cover body holder which concerns on 1st Embodiment of this invention. It is a schematic diagram which shows operation | movement of the simple attachment / detachment mechanism which concerns on 1st Embodiment of this invention. It is a side view which shows the wafer holder which concerns on the 1st modification of 1st Embodiment of this invention. It is a perspective view which shows the wafer holder which concerns on the 1st modification of 1st Embodiment of this invention. It is a perspective view which shows the wafer holder which concerns on the 1st modification of 1st Embodiment of this invention. It is a perspective view which shows the wafer holder which concerns on the 2nd modification of 1st Embodiment of this invention. It is a front view which shows the wafer holder which concerns on the 2nd modification of 1st Embodiment of this invention. It is a perspective view which shows the wafer holder which concerns on the 3rd modification of 1st Embodiment of this invention. It is principal part sectional drawing which shows the wafer holder which concerns on the 3rd modification of 1st Embodiment of this invention. It is a perspective view which shows the wafer holder which concerns on the 4th modification of 1st Embodiment of this invention. It is a front view which shows the wafer holder which concerns on the 4th modification of 1st Embodiment of this invention. It is a principal part perspective view which shows the wafer holder which concerns on 2nd Embodiment of this invention. It is a perspective view which shows the back surface of the cover body containing the wafer holder which concerns on 2nd Embodiment of this invention. It is a fragmentary perspective view which shows the back surface of the cover body containing the wafer holder which concerns on 2nd Embodiment of this invention. It is a principal part perspective view which shows the back surface of the cover which concerns on 2nd Embodiment of this invention in the state except the wafer clamp. It is a fragmentary perspective view which shows the back surface of the cover which concerns on 2nd Embodiment of this invention in the state which removed the wafer holder. It is a perspective view which shows the rib for support which concerns on 2nd Embodiment of this invention in a cross-sectional state. It is a principal part enlarged view which shows the wafer clamp which concerns on 2nd Embodiment of this invention. It is a principal part enlarged view which shows the contact piece of the wafer holder which concerns on 2nd Embodiment of this invention. It is a principal part enlarged view which shows the contact piece of the wafer holder which concerns on 2nd Embodiment of this invention. It is principal part sectional drawing which shows the contact piece of the wafer holder which concerns on 2nd Embodiment of this invention. It is a principal part perspective view which shows the modification of 2nd Embodiment of this invention. It is principal part sectional drawing which shows the modification of 2nd Embodiment of this invention.

Explanation of symbols

  11: Thin plate support container, 12: Container body, 12A, 12B, 12C, 12D: Side wall portion, 12E: Bottom plate portion, 12F: Opening, 13: Thin plate support portion, 14: Cover for transportation, 15: Cover for production line Body: 16: Top flange, 30: Main body, 32: Simple attachment / detachment mechanism, 34: Opening, 36: Rotation support shaft, 37: Stopper, 39: Base end lower cam, 40: Front end cam, 42: Locking Member: 43: feeding member, 44: cam mechanism, 45: holding cover, 46: cover presser, 53: base end upper cam, 55: fulcrum portion, 55A: tip side sliding contact surface, 56: tip fitting portion, 69 : Cam presser protrusion, 120: Semiconductor wafer, 121: Wafer holder, 122: Base end support part, 123: Elastic support plate part, 124: Contact piece, 124A: Fitting groove, 125: Connection support plate part, 125A, 125B: Vertical plate portion, 125C: Plate part, 126: support rib, 127: lid, 128: bowl-shaped support part, 129, 130: support wall part, 131: support protrusion, 133: support plate piece, 134: partition plate piece, 136 : Articulated support plate part fitting part, 141: fitting hole, 142: fitting protrusion.

Claims (3)

A lid for a thin plate support container that closes a container main body of a thin plate support container that is transported by storing a plurality of thin plates therein,
Provided with a simple attachment / detachment mechanism that can be easily fixed to and released from the container body,
When the simple attachment / detachment mechanism extends and is engaged with the container main body, the feeding member is connected to the locking member and moves in and out, and when the locking member is fed out by the feeding member. A distal end side cam that pushes the distal end side of the locking member upward in a state where the lid that closes the container main body faces upward, and a proximal end side of the locking member when the locking member is extended. A base end cam that pushes downward,
The tip cam is provided with a slope that pushes the tip side of the locking member upward, and a fulcrum portion for turning the locking member is provided on the tip side of the locking member,
The fulcrum is in sliding contact with the inclined surface, supports the distal end side thereof by feeding out the locking member and pushes it upward, and the proximal end side of the locking member is pushed downward by the proximal cam. The lid for a thin plate supporting container, wherein the fulcrum portion serves as a rotation center of the locking member when the locking member rotates . In the lid for thin plate supporting containers according to claim 1 ,
The lid for a thin plate supporting container, wherein the base end cam is provided with a slope that pushes the base end side of the locking member downward. In the lid for thin plate supporting containers according to claim 1 or 2 ,
A lid for a thin plate supporting container, wherein the simple attachment / detachment mechanism is detachably provided and the components are assembled so as to be disassembled.

Images