JP3174432B2 - Constant temperature measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring electric characteristics of an object having a large change in electric characteristics with respect to a temperature change of a thermistor or the like. The present invention relates to a constant temperature measuring device for performing electric measurement.

[0002]

2. Description of the Related Art When measuring electrical characteristics of an object to be measured such as an NTC thermistor having a large change in electrical characteristics with respect to a temperature change, the electrical characteristics of the object to be measured at a certain temperature using a constant temperature measuring device. To do.

In a conventional thermostatic measuring apparatus, the measurement of the electrical characteristics of the object under constant temperature is performed by immersing the object in a temperature-controlled liquid (oil bath or the like) with the object fixed to the measurement terminal. Has been done by In this conventional constant temperature measuring apparatus, since the measurement is performed in a liquid in a constant temperature state, the temperature distribution of the object to be measured can be made uniform in a shorter time than in the air, and highly accurate measurement is possible. .

[0004]

However, in the constant temperature measurement using the above-mentioned conventional constant temperature measuring device, there is a problem such as liquid leakage due to the use of a liquid. Not suitable for automation. In addition, there is a problem that it takes time and effort to remove and dry the liquid when the object to be measured is taken in and out of the apparatus.

On the other hand, measurement in the air is also considered, but there is a problem that it takes a long time for an object to be measured to reach a temperature equilibrium due to low heat conduction of gas (air or the like). .

SUMMARY OF THE INVENTION In view of the above, the present invention provides a method for measuring an electric characteristic of an object under measurement at a constant temperature while maintaining the object at a constant temperature in the air without using a liquid and performing high-speed measurement. It is an object of the present invention to provide a constant-temperature measuring device that enables the measurement.

[0007]

To achieve the above object, according to the Invention The thermostatic type measuring apparatus of the present invention, a temperature-controlled room which was maintained indoor gas at a constant temperature, and increased the pressure from the outside, 該恒temperature
Provided inside the chamber, good heat and conductive thermostatic plate,該恒temperature plates disposed on electrically conductive with good thermal conductivity of the object mount block having a circulation pipe thermostatic liquid circulates inside And the thermostatic plate and the workpiece
Conductor pattern with good thermal conductivity
Are formed on both sides, and the conductors on both sides are formed through through holes.
An insulating substrate that is thermally coupled to the pattern, the thermostatic play
The object to be measured is placed on the
Block and the object to be measured mounted on the object mounting block
A cover constituting a measuring chamber for accommodating Jobutsu inside, measuring the
The object to be measured is transferred from the supply unit of the material to the object mounting block.
Transport means for transporting the object to be measured
The hook is connected to and placed on the conductor pattern.
It is configured to conduct to the electrode part of the object, and when the cover is lowered
To press the DUT against the DUT mounting block
It is characterized by having a bracing means.

In the thermostatic measuring apparatus, the thermostatic chamber
Inside the instrument after measurement is completed and temporarily placed
A temporary storage station for discharging
The storage space corresponding to the measurement result of
The configuration may be such that the measurement object is dropped.

[0009]

[0010]

[0011]

[0012]

In the constant temperature measuring apparatus according to the present invention, when measuring the electric characteristics of the measured object, the measured object mounting block holds the measured object and electrically connects the terminal electrode of the measured object to the terminal electrode of the measured object. Since it has a role as a measurement electrode to be electrically connected, and is formed of a material having good thermal conductivity, the object to be measured is moved from the constant temperature plate kept at a constant temperature through the object mounting block. Heat can be effectively conducted to the substrate. Therefore, it is possible to shorten the time required until the temperature of the device under test reaches temperature equilibrium as compared with the case where the device under test is simply placed in the air and the temperature of the device under test is in an equilibrium state. In addition, the temperature of the device under test can be brought into a stable equilibrium state defined by the temperature in the constant temperature room.

Further, in the thermostatic measuring device of the present invention, the electric characteristics of the object to be measured are measured in the air, which is a problem with the conventional thermostatic measuring device for measuring the electric characteristics of the object to be measured in liquid. Inconveniences such as the occurrence of liquid leakage and the drying and removal of the liquid at the time of transport and removal of the object to be measured can be solved, so that the electric characteristic measurement of the object to be measured can be significantly speeded up.

Further, a cover is arranged on the constant temperature plate to constitute a substantially closed measurement chamber for accommodating the measurement object and the measurement object mounting block therein,
By increasing the internal pressure of the constant temperature chamber from the outside,
Since the internal temperature of the measurement room or the constant temperature room can be stably maintained constant, the equilibrium state of the temperature of the measured object can be further stabilized.

[0015]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of a constant temperature measuring apparatus according to the present invention.

FIGS. 1 to 3 show an embodiment of a constant temperature measuring apparatus according to the present invention. This constant temperature measuring device is for measuring the electrical characteristics of the electronic component 1 as an object to be measured at a constant temperature, and includes a constant temperature chamber 2, a component supply unit 3, a component selection unit 4, and a plurality of measurement blocks 10. The operation panel 5 performs an operation associated with the measurement.

The electronic component 1 is an NTC thermistor or the like whose electrical characteristics change greatly with a change in temperature, and here is exemplified by one formed in a chip shape. Electrode portions 6A and 6B are formed at both ends of the electronic component 1 as shown in FIGS.

The constant temperature chamber 2 has, for example, an outer wall made of a heat insulating material, is supplied with air at a constant temperature to increase the internal pressure, and has an X-axis for transporting the electronic component 1 as an object to be measured. It has a transport unit having a Z drive mechanism 7 and a suction / mounting device 8.

The component supply unit 3 includes a plurality of component supply units 3a.
(Various parts feeders that supply parts by using a tape or using vibration or air flow), and supply a plurality of electronic components 1 to a component supply position in the constant temperature chamber 2. The opening of the constant temperature chamber 2 formed to supply the electronic component 1 from the component supply unit 3 to the component supply position in the constant temperature chamber is made as small as possible to keep the internal temperature constant.

The component sorting section 4 includes a sorting box 9 having a plurality of storage spaces arranged in a line in the X direction for sorting and storing the electronic components 1 according to a predetermined standard.
A guide rail 30 movably supporting the sorting box 9, a sorting box drive shaft 31 for driving the sorting box 9 in the X direction,
The drive shaft 31 is provided at the shaft end of the sorting box drive shaft 31.
And a sorting box drive motor 32 for driving the rotation of the sorting box. That is, the sorting box 9 is movably supported in the X direction by the fixed guide rail 30 on the moving table 33, and the driving shaft 31 is rotated by the motor 32 fixed to the moving table 33, so that the sorting box 9 The position in the X direction can be changed. Also,
The moving table 33 of the component selection unit 4 moves along a component selection unit guide rail 34 provided below the component supply unit 3.
Freely movable in Y direction. It can be moved in the Y direction by a drive mechanism (not shown).

The XZ driving mechanism 7 includes an X driving shaft 35 and a Z driving shaft 36 provided in the X direction, an X driving shaft motor 37 and a Z driving shaft motor 38 connected to respective shaft ends. The X drive shaft 35 is, for example, a ball screw shaft and is rotationally driven by a motor 37. The Z drive shaft 36 is, for example, a spline shaft and is rotationally driven by a motor 38. Then, the suction / mounting device 8 is driven in the X direction by the rotation of the X drive shaft 35, and a plurality of (corresponding to the number of the component feeders 3a) included in the suction / mounting device 8 by the rotation of the Z drive shaft 36. The suction nozzle is moved up and down (Z direction). The heating elements such as the X drive shaft motor 37 and the Z drive shaft motor 38 are arranged outside the constant temperature chamber 2 so as not to affect the temperature inside the constant temperature chamber 2.

The suction / mounting device 8 has a plurality of suction nozzles for simultaneously suctioning a plurality of electronic components 1 supplied from the plurality of component supply devices 3a to the component supply position in the constant temperature chamber 2. ing. After the suction / mounting device 8 is moved in the X direction by the XZ drive mechanism 7 and stopped at the component supply position, the suction nozzle is moved up and down (driven in the Z direction) by the XZ drive mechanism 7. As a result, the plurality of electronic components 1 sent to the component supply position in the constant temperature chamber 2 are sucked at the tip side of the suction nozzle, and further driven in the X direction by the XZ driving mechanism 7, whereby each electronic component 1 Execute transfer. That is, XZ
The drive mechanism 7 and the suction / mounting device 8 constitute a transport unit.
I have.

A temporary storage station 11 is disposed between the tip of the component supply unit 3 in the thermostatic chamber 2 and the left end of the measurement block 10. The discharge temporary placement station 11 has a plurality of component placement units 11a for receiving and temporarily placing the electronic component 1 for which measurement has been completed. The component placement unit 11a sorts the electronic component 1 according to the standard according to the measurement result, and sorts the electronic component 1 into the sorting box 9 of the component selection unit 4.
The bottom is opened individually so that it can be dropped into each storage space.

As shown in FIGS. 2 and 3, the measuring block 10 has a measuring chamber 15 surrounded by a constant temperature plate 12 and a cover 14 which are thermally isolated from adjacent portions by a heat insulating material 13. ing. The constant temperature plate 12
Is formed of a metal plate having good thermal conductivity such as copper, and a plurality of circulation pipes 16 pass therethrough, and a desired constant temperature (air supplied to the constant temperature chamber and By circulating the constant temperature liquid 17 kept at substantially the same temperature), the constant temperature plate 12 is kept at the same constant temperature as the temperature in the constant temperature chamber 2. In order to mount and measure the electronic component 1 on the thermostat plate 12, measurement component mounting blocks 18A and 18B, a copper foil wiring pattern 19 on the upper surface, and a copper foil pattern 20 on the entire back surface are etched or the like. A measurement substrate 22 including the formed insulating resin substrate 21 is provided. That is, the measurement substrate 22 is arranged and fixed on the thermostat plate 12,
The measuring component mounting blocks 18A and 18B are fixed on the upper side, and the entire copper foil pattern 20 on the back surface of the measuring board 22 is in contact with the constant temperature plate 12.

A pair of measurement component mounting blocks 18A,
18B (measurement object mounting block) is formed of a metal having good conductivity and heat conductivity such as copper, and one set of a pair facing one electronic component at an interval in the X direction is formed. A plurality of rows provided in the direction (depth direction) are provided in the X direction. A pair of measurement component mounting blocks 18
In A and 18B, a measurement object mounting concave portion 23 for mounting the electronic component 1 is formed on the upper surface side of both of them facing each other at an interval. A pair of measurement component mounting blocks 18A,
The bottom surface of 18B is fixed to the upper surface of the measurement substrate 22.
That is, the block 18A is connected and fixed to the copper foil pattern portion 19A of the copper foil wiring pattern 19 having good electrical conductivity and good thermal conductivity, and the block 18B is connected to the copper foil pattern portion 19B.
Connected and fixed. The copper foil pattern portion 19A connected to the measuring component mounting block 18A is
Is connected to the entire copper foil pattern 20 on the rear surface side through a through hole (provided with copper having good electrical conductivity and good thermal conductivity) therein, and is connected to the component mounting block 18B for measurement. The copper foil pattern section 19B is a scanner section (not shown) (means for sequentially switching electronic components to be measured).
Is electrically connected to a measuring terminal (non-ground side) of a measuring device for measuring electric characteristics such as electric resistance via the terminal.
One of the copper foil pattern portions 1 through the through holes 24
The entire copper foil pattern 20 connected to 9A has good electrical conductivity and good thermal conductivity, is connected and fixed to the facing thermostatic plate 12, and is electrically connected to the measuring terminal (ground side) of the measuring instrument. I have.

The measuring component mounting blocks 18A, 1
8B, the copper foil pattern portions 19A, 19B of the measurement substrate 22,
The entire surface copper foil pattern 20 and the through hole 24 not only serve to electrically connect with the electronic component 1 as the device under test, but also
Component mounting block 1 for measuring heat from constant temperature plate 12
8A and 18B, and has a role of effectively conducting the electronic component 1.

The heat insulating material 13 is formed of an insulating material having a high heat insulating property, and is provided so as to surround the constant temperature plate 12.

The cover 14 is formed of an insulating resin or the like, and is vertically movable by a cover raising / lowering drive mechanism (not shown). The cover 14 covers the measurement substrate 22 with its opening surface in contact with the constant temperature plate 12. The measurement chamber 15 is formed between the cover and the thermostat plate 12. The cover 14 can maintain the temperature inside the measurement chamber 15 at a constant temperature without being greatly affected even if a temperature change outside the measurement chamber 15, for example, a temperature change accompanying the passage of the suction / mounting device 8 occurs. it can. The electronic component 1 is pressed from above onto the ceiling surface inside the cover 14 to fix it.
A fixing spring pin 25 as a mounting means is provided corresponding to the pair of the pair of measurement component mounting blocks 18A and 18B. As shown in FIG.
The electronic component 1 mounted on the pair of measurement component mounting blocks 18A and 18B with the cover 14 covered thereon.
Is pressed from above.

The measuring block 10 having the above configuration is
A plurality of electronic components 1 are provided in the constant temperature chamber 2, but the electronic components 1 can be separately measured.

The electric characteristics of the electronic component 1 are measured by placing the electronic component 1 on a pair of measurement component mounting blocks 18A and 18B of a measurement board 22 as shown in FIG. Is closed and the inside of the measurement chamber 15 is maintained at a constant temperature. At this time, the electronic component 1 is housed in the measurement object mounting concave portion 23 of the pair of measurement component mounting blocks 18A and 18B, and both ends thereof are provided. The electrode portions 6A and 6B are arranged so as to be in contact with the pair of measurement component mounting blocks 18A and 18B, respectively. As shown in FIG. 2, the electronic component 1 is supplied to and removed from the measurement component mounting blocks 18A and 18B by the suction / mounting device 8 with the cover 14 opened, as shown by arrows in the drawing. Done by
The same is done for each column.

Next, the procedure for measuring the electrical characteristics of the electronic component 1 in the constant temperature measuring device described above and the operation of the device will be described. The supply of the electronic component 1 as the device under test to the transport means in the constant temperature chamber 2 is performed by a plurality of component supply devices 3.
a plurality of electronic components 1 arranged in a line in the Y-direction are picked up and mounted by the XZ drive mechanism 7 at the component supply position on the tip side of the component supply unit 3. It is taken out by being sucked by the suction nozzle of the device 8. The suction / mounting device 8 holding the electronic component 1
It moves in the X direction as it is and moves on the target measurement block 10.

As shown in FIG. 2, the target measurement block 10 receives the electronic component 1 with the cover 14 opened so as to open the upper side of the measurement substrate 22. The electronic component 1 is a pair of measurement component mounting blocks 18A and 18B. DUT mounting recess 23
Respectively. At this time, the electrode portions 6A, 6B at both ends of the electronic component 1 are connected to a pair of measurement component mounting blocks 18A,
18B so as to be electrically conductive.

Since a plurality of rows of a pair of measurement component mounting blocks 18A and 18B are provided for each measurement block 10, the above-described component supply unit 3 by the suction / mounting device 8 transfers the measurement block 10 to the measurement block 10. The transport of the electronic component 1 to each row of the measurement component mounting blocks 18A and 18B is repeated.

When the transfer of the electronic components 1 to each row of the measuring component mounting block 18 of the measuring block 10 is completed, the cover 1
4 is lowered and closed as shown in FIG. By closing the cover 14, the fixing spring pins 25 provided on the inner ceiling surface of the cover 14 press the electronic component 1 against the component mounting block, and the electronic component 1 is measured by the measurement component mounting block 18. Positioning is reliably performed in the object mounting recess 23, and conduction between the electrode portions 6A and 6B and the pair of measurement component mounting blocks 18A and 18B is ensured. Cover 14
Is closed until the temperature in the measurement chamber 15 reaches an equilibrium state at a predetermined temperature (temperature of the constant temperature plate). Then, the temperature of the electronic component 1 becomes the same as the equilibrium temperature in the measurement chamber 15 due to heat conduction from the constant temperature plate 12 maintained at a constant temperature. The temperature in the measurement chamber 15 is controlled by applying feedback based on the measured value of a temperature measuring element (for example, a standard thermistor is used for thermistor measurement) placed in the measurement block 10.

When the temperature in the measuring chamber 15 reaches an equilibrium state, the electrodes 6A and 6B at both ends of the electronic component 1 to be measured which are mounted on the measuring component mounting block 18 are connected to the copper foil wiring pattern 19 and The entire component is connected to a measurement device via a scanner unit (not shown) through the copper foil pattern 20, and the measurement device measures the electrical characteristics of the electronic component 1. Since each of the measurement blocks 10 is individually shut off, the measurement of the electronic component 1 is executed with a staggered time each time the temperature of each measurement block 10 reaches the temperature equilibrium.

When the measurement is completed, the cover 14 is raised to open the upper surface of the measurement substrate 22, and the electronic component 1 is sucked and collected from the measurement component mounting blocks 18A and 18B by using the suction / mounting device 8. Each of the measured electronic components 1 sucked by the suction and mounting device 8 is transported in the X direction and placed on each of the component placement units 11 a on the temporary storage station 11 for discharge.

In the discharge temporary storage station 11, the stored electronic components 1 are individually classified according to a predetermined standard (for example, a standard with an error of 10% or less, 20% or less, etc.) based on the measurement result by the measuring device. The electronic component 1 is dropped and sorted by opening the bottom of the component mounting portion 11a. At the time of this sorting and discharging, the moving table 33 of the parts sorting section 4 enters the constant temperature chamber 2 and is located below the parts supply section 3 (two-dot chain line in FIG. 1). By moving 9 in the X direction, a specific storage space of the sorting box 9 is sequentially positioned immediately below the temporary storage station 11 for discharge. In other words, if there is an electronic component 1 conforming to the standard of the storage space located immediately below the temporary storage station 11 for discharging, the bottom of the component mounting portion 11a where the electronic component 1 is located is opened and dropped into the storage space. For example, assuming that the storage space 9a of the sorting box 9 is a place for storing a non-defective product having an error of 10% or less, the bottom of the component mounting portion 11a on which a non-defective product having an error of 10% is placed is opened and an error of 10% or less is performed. The non-defective electronic component 1 falls into the storage space 9a. In this way, the sorting box 9 is moved in the X direction, and the electronic component 1 that meets the standard of each storage space of the sorting box 9 is moved.
Is dropped, the electronic components 1 are sorted and stored in the sorting box 9 according to a predetermined standard.

The supply or collection of the electronic components 1 to the measurement blocks 10 described above is individually performed for each measurement block 10, and when the supply of the electronic components 1 to a certain measurement block 10 is completed, the other components are supplied. Measurement block 10
Are sequentially supplied or collected.

As described above, according to the embodiment of the present invention, in measuring the electrical characteristics of the electronic component 1, the electronic component 1 is held and electrically connected to the electrode portions 6A and 6B of the electronic component 1. The measuring component mounting blocks 18A and 18B serving as measuring terminal electrodes to be formed are made of a metal such as copper having good conductivity and heat conductivity, and are fixed through the measuring component mounting blocks 18A and 18B. Since the heat is transferred from the thermostat plate 12 kept at the temperature to the electronic component 1 so as to bring the temperature of the electronic component 1 into an equilibrium state that matches the temperature inside the thermostat chamber 2, the electronic component 1 is simply put in the air and Part 1
The time required for the electronic component 1 to reach the temperature equilibrium can be shortened as compared with the case where the temperature of the electronic component 1 is set to the equilibrium state.

Since the internal pressure of the constant temperature chamber 2 is increased, the constant temperature plate 12 is maintained at a desired constant temperature, and the temperature of the measurement chamber 15 is maintained by the cover 14, the electronic components 1 Temperature equilibrium is stable.

Further, in the above-described embodiment, since the electric characteristics of the electronic component 1 are measured in the air, there is a problem in the conventional thermostatic measuring device for measuring the electric characteristics of the electronic component 1 in a liquid. Obstacles in automation of measurement by high-speed transport of the electronic component 1 such as liquid leakage and drying and removal of the liquid are solved, so that the measurement of the electrical characteristics of the electronic component 1 can be significantly speeded up. .

In the above embodiment, the pair of electrode portions 6
Although the configuration of the constant temperature measuring apparatus using the electronic component 1 having A and 6B as the object to be measured has been described, the present invention is also applicable to the case where an electronic component having three or more electrode portions (or terminals) is used as the object to be measured. Is applicable. In this case, three or more measurement component mounting blocks of the measurement substrate 22 corresponding to three or more electrode portions of the electronic component are set as one set, and a copper foil wiring pattern and a copper foil wiring pattern corresponding to those measurement component mounting blocks are formed. The measurement substrate may be configured using a resin substrate having an entire copper foil pattern. For example, when an electronic component having four terminals is to be measured, two pairs of measurement component mounting blocks each having a measured object mounting recess corresponding to the measured object are set as one set, and a copper foil corresponding to the set is provided. By forming the wiring pattern and the copper foil pattern on the entire surface of the resin substrate, it is possible to configure a constant temperature measuring device capable of measuring four terminals.

In the above embodiment, the conductor patterns connected to the measurement component mounting blocks 18A and 18B are as follows.
Although the measurement substrate 22 having the copper wiring pattern 19, the entire copper foil pattern 20, and the through-hole 24 formed on the resin substrate 21 is used, a direct conductor is provided on the upper surface of the thermostat plate 12 via an insulating paint (insulating layer) or the like. It may be configured to form a pattern.

Although the embodiments of the present invention have been described above, it is obvious to those skilled in the art that the present invention is not limited to the embodiments and various modifications and changes can be made within the scope of the claims. Would.

[0045]

As described above, according to the constant temperature measuring apparatus of the present invention, a constant temperature liquid having substantially the same temperature as the gas in the room is placed inside the constant temperature room in which the gas in the room is maintained at a constant temperature. A good heat conductive constant temperature plate having a circulating pipe inside is provided, and a conductive and good heat conductive object mounting block is disposed on the constant temperature plate, and the object mounting block is provided on the object mounting block. Since the device under test is configured to be placed, it can be effectively conducted to the device under test from the constant temperature plate maintained at a constant temperature via the device mounting block. Therefore, compared to a case where the object to be measured is simply placed in the air and the temperature of the object to be measured is in an equilibrium state, the time required for the temperature of the object to be measured to reach the temperature equilibrium is shortened. Measurement speed can be increased. Also conductive and good thermal conductivity
The DUT mounting block is electrically connected to the electrode of the DUT.
It also functions as a connecting measurement electrode. In addition, inconveniences such as the occurrence of liquid leakage and the drying and removal of liquid during transport of the object to be measured, which have been problems with conventional thermostatic measurement devices that measure the electrical characteristics of the object to be measured in liquid, are solved. This is also advantageous in automating measurement by transporting the object to be measured at high speed.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of a thermostatic measuring apparatus according to the present invention.

FIG. 2 is a partial side sectional view showing a state where a cover is opened in the measurement block of the embodiment.

FIG. 3 is a partial side sectional view showing a state where a cover is closed in the measurement block of the embodiment.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 object to be measured 2 constant temperature chamber 3 component supply unit 4 component selection unit 6A, 6B electrode unit 7 XZ drive mechanism 8 suction / mounting device 9 selection box 10 measurement block 11 temporary storage station for discharge 12 constant temperature plate 13 heat insulating material 14 Cover 15 Measurement chamber 16 Circulation pipe 17 Constant temperature liquid 18A, 18B Measurement component mounting block 19 Copper foil wiring pattern 20 Full copper foil pattern 21 Resin board 22 Measurement board 23 Measurement object mounting recess 24 Through hole

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G01R 31/26 G01R 31/00 H01L 21/66

Claims (2)

(57) [Claims] An indoor gas is maintained at a constant temperature .
A thermostatic chamber higher than the outside pressure, is provided inside the該恒greenhouse, and good thermal conductivity of the thermostatic plate having a circulation pipe thermostatic liquid circulating therein, conductive disposed該恒warm plate The object placement block with good thermal conductivity, between the constant temperature plate and the object placement block
Formed conductive patterns with good thermal conductivity on both sides
And heat the conductor patterns on both sides through the through holes.
And an insulating substrate, which is connected to the substrate, and is disposed on the constant temperature plate so as to be movable up and down.
The target object mounting block and the target object mounting block
Constructs a measurement chamber to house the placed DUT
The object to be measured is placed on the cover from
Transport means for transferring the object to be measured onto the rack, and the object mounting block is connected to the conductor pattern.
In addition, it is configured to conduct to the electrode part of the placed DUT.
When the cover is lowered, the DUT is placed on the DUT.
A thermostatic measuring device comprising a pressing means for pressing against a block . 2. A measurement object after the measurement is completed in the constant temperature room.
Temporary storage tray for receiving and temporarily placing objects
Station is arranged and corresponds to the measurement result of the DUT
The object to be measured is dropped into a storage space.
2. The constant temperature measuring device according to 1.