JP3139842B2 - Actuator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator using an induction motor as a drive source comprising a main motor and a sub motor.

[0002]

2. Description of the Related Art In a conventional linear or rotary actuator, a stepping motor, an AC servomotor,
DC servo motors and the like are generally used.

[0003]

In recent years, while there has been a strong demand for advanced control of actuators and improvement in accuracy, demands for miniaturization and cost reduction have been increasing, and it is necessary to harmonize the two. is there. In view of the above, a stepping motor, A
When using C servo motor, DC servo motor, etc.
There are the following problems.

For example, a stepping motor has a relatively simple structure and is inexpensive. On the other hand, however, it is difficult to perform feedback control in an open loop. Exists. For this reason, it is difficult to demand advanced control for an actuator using a stepping motor as a drive source.

On the other hand, a synchronous AC servomotor having a neodymium-iron-based or samarium-cobalt-based magnet,
The brushless DC servomotor can perform a high degree of control, but has the disadvantage that the magnet is heavy, expensive and fragile, and the structure is complicated. Further, the complexity of the structure of the servomotor not only increases the manufacturing cost, but also tends to reduce the maintainability and reliability. Further, for example, even when the servomotor is provided integrally with a main body, a structural member, a guide, or the like of the actuator, the entire structure of the actuator becomes large, and the above requirement cannot be satisfied.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems. It is an object of the present invention to divide a driving source into two motors, a main motor and a sub motor, and to use an induction motor for the main motor and the sub motor. With advanced control of the actuator, improvement of accuracy,
It is an object of the present invention to provide a miniaturized and inexpensive actuator.

[0007]

In order to achieve the above object, the present invention provides an actuator in which a moving body displaced under the action of a driving source is disposed with respect to a structural member constituting an outer frame. The driving source includes a first induction motor that is a main motor and a second induction motor that is a sub motor that assists or controls the main motor, and transmits a driving force of the driving source to the moving body. A driving force transmitting unit, a displacement amount detecting unit for detecting a displacement amount of the moving body, and a driving force of the main motor and the sub motor based on the displacement amount detected by the displacement amount detecting unit. And control means for controlling the moving position or moving speed of the moving body.

[0008]

In the above-described actuator according to the present invention, the moving member disposed on the structural member via the driving force transmitting means under the driving action of the first induction motor as the main motor and the second induction motor as the sub motor. Displace the body. In this case, the displacement amount detecting means can control the moving position or moving speed of the moving body by detecting the displacement amount of the moving body and inputting the detected amount to the control means.

[0009]

Next, preferred embodiments of the actuator according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of an actuator according to a first embodiment, FIG. 2 is a partial perspective view of the actuator shown in FIG. 1 with a part thereof omitted, FIG. FIG.

The actuator 1 according to the first embodiment
0 indicates that a table (moving body) 16 displaced along the linear motion guide 14 under the rotation of the ball screw shaft 12 is disposed in a long frame (structural member) 18;
Two induction motors (hereinafter, referred to as motors) 20a and 20b each including a main motor and a sub motor
Are disposed opposite to both ends of the. The motors 20a and 20b are controlled by an inverter motor controller (hereinafter, referred to as a controller) 23 via an encoder 21 functioning as a displacement amount detecting means.

In detail, the actuator 10 has a groove 2 having a substantially T-shaped cross-section formed on a side surface except an opening 22 and forming an outer frame.
4, a linear motion guide 14 disposed on the bottom of the frame 18, and a slide along the linear motion guide 14, for example, an infinite circulation ball bearing or an infinite circulation. A bearing 26 made of a cross roller bearing, a needle bearing, or a biological protein is applied, and is linearly displaced by the rotation of the ball screw shaft 12 fixed to the bearing 26 and fitted to the ball screw bush 28. It has a table 16 and motors 20a and 20b that are disposed opposite to both ends of the ball screw shaft 12 and that also use the bearings of the ball screw shaft 12. Table 1
For example, a swivel joint, an Oldham coupling, or the like is suitable for joining the ball screw bush 28 with the ball screw bush 28.

The motors 20a and 20b are connected to the frame 1
Reference numeral 8 also serves as a casing for the motors 20a and 20b, and stators 30a and 30b of the motors 20a and 20b are directly fixed to the frame 18 (see FIG. 3). The ball screw shaft 12 is formed integrally with the motor shafts 32a, 32b of the motors 20a, 20b, and the cage shaft rotors 34a, 34b are rotatably provided on the motor shafts 32a, 32b. The cage rotors 34a, 3
Bearings 35a and 35b are provided at both ends of 4b to support the motor shafts 32a and 32b.

In this case, the cage type rotors 34a, 34b may be directly connected to the motor shafts 32a, 32b as shown in FIG.
Since the concentric accuracy of the ball screw shaft 12 and the ball screw shaft 12 is good, a spline groove similar to the ball screw shaft 12 is defined in the motor shafts 32a and 32b, and the cage rotors 34a and 34b are May be attached to the spline groove via a hole (see FIG. 5). here,
When the ball 36 is engaged with the helix-shaped spline groove, the ball 36
May be appropriately selected. At both ends of the cage rotor 34b in the axial direction of the cage rotor 34b, external threads 38 are provided on the outer peripheral surface of the motor shaft in which spline grooves are defined.
0b, and the cage type rotor 34b is fixed by the stoppers 40a and 40b. An end stopper 42 is fitted to the end of the motor shaft where the spline groove is defined. In addition, a cage rotor integrally formed by die casting, vacuum die casting, or the like is connected to the ball screw shaft 12 by press fitting, caulking, welding with an electron beam, or the like.
2, the cage rotors 34a and 34b may be directly and integrally molded by a method such as die casting or vacuum die casting.

Next, the rotation angle of the ball screw shaft 12 is detected by an encoder 21 provided at one end of the ball screw shaft 12. The encoder 21
It is preferable to use an absolute type encoder or an encoder integrated with an absolute signal output by an integrating counter memory, and has a sensor signal processing circuit, a serial signal generation circuit, and the like (not shown).

As shown in FIG. 4, the controller 23 provided close to the motor 20a includes a driver module 44, a control module 46, and a communication interface 48 according to its functions.
The communication interface 48 is connected to an external device (not shown) via connectors 49a and 49b.

The driver module 44 includes drivers 50a, 50b for driving the respective motors 20a, 20b.
And a driver controller 5 for integrally controlling these.
2 and a distributor 54 connecting the two. The drivers 50a and 50b perform inverter control by PWM and digital control.

The control module 46 manages an actuator operation program and transmits a position command and a speed command to the driver module 44. Further, it monitors a feedback signal from each element of the motors 20a, 20b and the driver module 44.

Communication interface 48
Is a LAN 56 or an external controller, a PC, a computer, etc., an Ethernet, a token ring via a serial interface represented by RS232C, RS422, a parallel interface represented by GP-IB, BCD, Centronics Parallel, etc. , MAP, PC LAN, WAN, OSI, and the like, and communicates with the control module 46.

The components of the controller 23 may be integrally formed in order to realize miniaturization, or may be separable for each function so that they can be shared with various types of actuators and generalized. The cost may be reduced. For example, the control module 46 is ASIC,
The control function may be fully digitized using a one-chip multi-CPU, a DSP, or the like, to achieve both high functionality and low cost. Furthermore, by switching software, not only various induction motors, AC servo motors, DC servo motors, and stepping motors, but also pneumatic actuators, air balancers and their combined control, end effects, force control, position / speed control, XYZ , Θ, etc., and device control of a conveyor, lifter, etc., can achieve both higher functions and lower cost. In this case, if the controlled motor and the corresponding interface type are determined from impedance, circuit configuration, etc., identification memory using data carrier technology, barcode, ID tag, etc., and automatically responded by software, network or network Significant labor saving and intelligent operation can be achieved when constructing lines. In addition, a signal may be transmitted simultaneously using a power supply line for a motor or the like, and wiring may be significantly reduced. Active noise control may be performed as a measure against actuator noise.

The casings of the encoder 21 and the controller 23 are shared with the frame 18.
Note that, due to the configuration of the actuator 10, the casing and the frame 18 may be divided. In this case, they are fitted with circular or polygonal pins, pins, etc., and the connection of electricity, signals, buses, LANs, sensors, etc. is also made by connectors, etc. Fix with. Alternatively, each of the controller, the motor, and the like may be modularized, and may be added or detached as necessary.

These configurations of the actuator 10 are realized by a simple structure of the motors 20a and 20b. By simplifying the configuration of the actuator 10, cost reduction and compactness can be achieved. .

Incidentally, the linear motion guide 14 and the ball screw shaft 12 are configured as a cam follower, a slide guide and a timing belt made of a low-friction self-lubricating material such as polyimide, Teflon, nylon and polyacetal.
SUS301, 304, 430, 63SK of perforation type having wire rope and hole opening, phosphor copper,
The same applies to the configuration with a metal belt made of nickel or the like.

The structure of the actuator 10 may be further simplified by using the induction motor alone without dividing it. In this case, it is preferable to improve the holding characteristics at the time of stoppage by braking with hydraulic pressure, pneumatic pressure, electromagnetic force, a piezo element, electricity or the like. The material constituting the brake is preferably a material having excellent heat resistance, such as CFRP and ceramics.

The actuator 10 according to the first embodiment includes:
Basically, the configuration is as described above. Next, the operation will be described.

The driving force of the two motors 20a and 20b composed of the main motor and the sub motor is transmitted to the ball screw bush 28 via the ball screw shaft 12,
Rotational movement by the ball screw shaft 12 is converted to linear movement, and the table 16 is displaced.

The main and sub motors 20a, 20a
0b generates a driving force in the same direction as each other when the normal table 16 is driven. Therefore, the actuator 1
The output of 0 is the sum of the two motors 20a and 20b.

On the other hand, at the time of deceleration when the table 16 is displaced, the main and sub motors 20a, 20a
One or both of the motors b operate as an induction brake. Further, when strong deceleration is required, it is necessary to positively generate torque in the deceleration direction by both motors 20a and 20b. Table 16
During the stop, the two motors 20a and 20b generate torques in directions opposite to each other, and the table 16 is stopped and held by the differential force between the two, so that highly accurate positioning can be performed.

On the other hand, when the induction motor is provided in the rotary actuator, for example, an integral structure of the joint can be realized, and the rotary actuator can be significantly reduced in size and weight. In the case of a rotary actuator having a plurality of joints or a multi-axis actuator such as an XYZ axis, the weight of the driven portion greatly affects positioning, speed, and acceleration. By using a relatively lightweight induction motor, the positioning, speed, It is possible to improve control accuracy such as acceleration.

Next, FIGS. 6 to 11 show an actuator according to a second embodiment in which a timing belt 90 is used as a power transmission means and a pulley for a timing belt and an induction motor are integrated. In the embodiments described below, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

As shown in FIG. 6, the actuator 70 includes a frame 72 forming a structural member, and a pulley-integrated induction motor (hereinafter referred to as a motor) 74a disposed in the frame 72 and serving as a main motor and a sub motor. , 74b, and a connection plate 78 for connecting the drive unit 76 to the frame 72. The controller 23 for controlling the driving unit 76 is provided near the motor 74a.

The frame 72 is made of, for example, extruded or drawn out of a light metal or bearing steel made of an alloy such as Al, Mg, etc .;
It may be formed by lost wax, and if necessary, a cladding may be formed on the inner wall surface by explosion to obtain surface hardening. In the frame 72, a groove 24 having a substantially T-shaped cross section for connecting another frame, panel, or the like to three of the outer side surfaces or providing wiring or the like is defined on each side surface. , The controller 23, and the opening 80 for accommodating the connection plate 78. A groove 82 for connecting and fixing a driving unit 76 is provided at the bottom of the frame 72 in which the opening 80 is defined. A relief 84 is provided for easy insertion through the opening 80 (see FIG. 11).

The drive unit 76 has motors 74a, 74 with guide rails 88 interposed at both ends of the base plate 86.
a timing belt 90 for suspending the two motors 74a and 74b separated by a predetermined distance, a belt holder 92 for holding the timing belt 90, and a timing belt 90 by the belt holder 92. And a table 94 that is linearly displaced with the rotation of the timing belt 90, and a guide block 96 that mediates the guide rail 88 and the table 94. The connection between the base plate 86, the motors 74a and 74b, and the guide rail 88 is performed via a screw (not shown). However, the base plate 86 may be provided with a groove such as a T-slot and connected via a T-bolt or the like.

Here, the motors 74a and 74b disposed opposite to both ends of the base plate 86 will be described. Since the motors 74a and 74b are substantially the same, only one motor 74a will be described in detail, and the description of the other motor 74b will be omitted.

As shown in FIGS. 7 to 9, the motor 74a basically includes an outer frame 98 having a substantially U-shaped cross section, and a rotating body rotatably attached to the outer frame 98. 100, and fixing members 104a and 104b for fixing the rotating body 100 to the outer frame 98 via screws 102.

The rotating body 100 includes a first housing 106 having an opening and having a substantially cylindrical shape, and a disk-shaped second housing 108 connected to the opening. The outer peripheral portion of the first housing 106 has teeth 110 for driving the timing belt 90 and flanges 112 and 11 for preventing the timing belt 90 from falling off.
3 and an encoder rotor 114 for detecting a rotation angle by an encoder sensor 115 via light, magnetism, CCD-PICKUP, laser or the like. First
A hole (not shown) for fixing the bearing is defined in the inner bottom portion of the housing 106, and the outer peripheral portion of the bearing 116 is fixed to the hole. Further, the first housing 10
A rotor 118 is provided on the inner peripheral surface of the housing 6 and is fixed to a portion surrounding the stator 122 supported by a fixed shaft 120 in the first housing 106. Further, a male screw portion 126 is formed on the outer peripheral portion of the second housing 108, and is tightened by fitting with a female screw portion 124 formed in the opening of the first housing 106.

The wiring of the stator 122 is
Are drawn out from the end of the fixed shaft 120 through the inside of the shaft. On the other hand, protrusions are provided on both sides of the fixed shaft 120,
Cross roller bearing, angular bearing, Ex
A pair of bearings 116 such as a Cell-O type bearing, a conical roller bearing and the like are opposed to each other. In addition, both ends of the fixed shaft 120 have a substantially square cross-sectional shape, and serve to prevent rotation when a motor frame described later is mounted.

The motor 7 basically constructed as described above
4a and 74b are fixed to the outer frame 98 via fixing members 104a and 104b at substantially square cross-sectional portions at both ends of the fixed shaft 120. As a result, the motors 74a and 74b generate rotational power due to the rotation of the first housing 106 and the second housing 108, and drive the timing belt 90 via the teeth 110 on the outer periphery. In addition, in the outer frame 98,
An encoder sensor 115 is provided, and the first housing 1
The rotation angle is detected in combination with the encoder rotor 114 at the outer periphery of the reference numeral 06.

Next, the connection plate 78 and the base plate 86 are formed by extruding or drawing a light metal or bearing steel made of an alloy such as Al or Mg, injection molding of metal or ceramics, vacuum casting, or lost wax. . The base plate 86 has a groove 1 for positioning when the guide rail 88 is attached in the longitudinal direction.
30 are defined (see FIG. 6). The base plate 86 and the guide rail 88 may be integrally formed of bearing steel or the like, and the sliding surface of the guide rail may be ground by electric field polishing, chemical polishing, or the like, or a light metal such as an alloy of Al, Mg, or the like. Extrude and pull out ceramics, etc.
It may be formed by vacuum die casting, lost wax, metal injection molding, or ceramic injection molding, and bearing steel or the like may be joined to the guide rail sliding portion. Further, the base plate 86 is provided with a mounting hole 132 for connecting to the connection plate 78.

Timing belt 90 as a power transmission member
Transmits the rotational power generated by the motors 74a and 74b to the table 94. As another power transmission member, a steel belt with a hook eye, a chain, a wire rope, or the like may be used. When it is necessary to accurately position the table 94, for example, a synchronous transmission mechanism such as a chain is suitable. As shown in FIG. 10, the timing belt 90 has the belt teeth 134 that mesh with the teeth 110 of the motors 74a and 74b, and has a ridge 136 along the longitudinal direction at the center of the belt. The meandering of the timing belt 90 is prevented, and wear of the side surface of the timing belt 90 is prevented. For example, by forming the timing belt 90 with a polyurethane material, it is possible to avoid generation of dust. Regarding dust generation of moving parts such as the power transmission members, the motors 74a and 74b, and the linear motion guides, the components are built in the frame 72 and sealed to prevent the diffusion of dust to the outside. Furthermore, by actively discharging the internal air to a specific outside by vacuum extraction or the like, for example, production of semiconductors and the like in a clean room and precision experiments, biological
Ideal for use in chemical experiments.

The table 94 is formed by, for example, extruding or drawing a light metal or bearing steel from an alloy such as Al or Mg, injection molding from a material such as metal or ceramics, vacuum die casting, lost wax or the like. The table 94 is provided with screw holes 138 for mounting a work and holes 140 for mounting and positioning on both side surfaces of the table 94. Further, a magnet (not shown) is connected to the table 94. For example, a sensor is inserted into a groove 24 having a substantially T-shaped cross section defined on a side surface of the frame 72, and the sensor detects the magnetic force of the magnet. Thus, the position of the table 94 can be detected. This sensor may simply function as a limit switch, or may perform position detection more accurately using a linear magnetic encoder, a linear optical encoder, or the like, and obtain position / velocity feedback information. In this case, it is not necessary to provide the encoder 21 for detecting the rotation speed and the like of the motors 74a and 74b, which are the driving sources, as in the first embodiment. , The control accuracy of the position and the speed can be improved.

As means for connecting the timing belt 90 to the table 94, a screw, a caulking or the like is provided on the side surface of the table together with a belt holder 92 formed by fitting both ends of the timing belt 90 to the shape of the belt teeth 134 of the timing belt 90. Fixed through.

The guide rail 88 is connected to a base plate 86 as a connecting member by bolts or the like. A guide block 96 moves on the guide rail 88 as a rolling guide using balls, cylindrical rollers, cross rollers, or the like.
As linear motion guides, in addition to rolling guides, guide rails,
The guide block may be formed of a low-friction self-lubricating material such as polyimide, Teflon, nylon, or polyacetal, and a plain guide used as a sliding guide may be used. Further, a part of or the whole of a moving body such as a table formed by using an alloy or a resin thereof may be used. Similarly, the guide rail 88 and the base plate 86 as a connecting member may be integrally formed.

In general, the motors 74a and 74b are connected to power transmission members such as the timing belt 90 by connecting a belt driving pulley (not shown) to the driving shafts of the motors 74a and 74b. A method of transmitting the motor driving force to the timing belt 90 via the motor is adopted. However, the method of connecting the belt driving pulley to the drive shaft of the motors 74a, 74b is based on the method of connecting the motors 74a, 74b.
4b and the entire length of the belt driving pulley are increased, and the motors 74a and 74b protrude from the frame 72. On the other hand, the motors 74a and 74b
In order to store without protruding from the outer surface of 2,
The orthogonal means between the motors 74a and 74b and the rotation axis of the belt driving pulley is required, and the structure is further complicated. For this reason, in the present embodiment, the motors 74a and 74b are induction motors, and are integrated with the belt driving pulley using a simple structure thereof, thereby realizing the miniaturization of the driving part. Thus, the motor 74a has a simple structure,
The motor 74a and 74b are housed in a flush manner without projecting from the outer surface of the frame 72. In this case, it goes without saying that the motors 74a and 74b may be used by projecting from the outer surface of the frame 72.

In this embodiment, the two motors 74a and 74b consisting of main and sub are controlled by the controller 23, and the frame 72 may be overlapped as in the first embodiment. It may be stored in a block shape inside the frame 72 having the portion 80. Further, since the configuration and operation of the controller 23 are the same as those of the first embodiment, detailed description thereof will be omitted.

FIGS. 12 to 14 show a third embodiment.
The actuator 150 according to the third embodiment has a timing belt 90a as a driving force transmitting means, similarly to the second embodiment, and uses a pulley-integrated induction motor (hereinafter, referred to as a motor) 152a, 152b to generate power. This is to reduce the size of the unit. The components corresponding to those of the second embodiment are denoted by the same reference numerals with the letter a.
A detailed description thereof will be omitted.

The actuator 150 includes a frame 154 forming a structural member, and a driving unit 157 having a table 156 that is displaced by rotating the timing belt 90a under the driving action of the motors 152a and 152b.

The table 156 is formed by extruding or drawing a light metal or bearing steel of an alloy such as Al or Mg, injection molding of metal or ceramics, vacuum casting, or lost wax. Linear guide bearings 158, 1 provided substantially parallel to the bottom of the table 156.
Numeral 59 is formed in a hollow cylindrical shape with an open part, and a plurality of passages containing steel balls slidably in contact with the two guide shafts 160 and 161 and infinitely circulating are formed on the inner surface of the cylinder. Instead of the linear guide bearings 158 and 159, a plain guide formed of a low-friction self-lubricating material such as polyimide, Teflon, nylon, or polyacetal may be used. Further, a part or the whole of the table 156 or the like formed by using them may be used.

Further, the motors 152a and 152b
As shown in FIG. 3, the first fixing member 16 is
The rotating body 100a is fixed to the fourth and second fixing members 166, and the rotating body 100a is
Support the fixed shafts 120a, 120a at both ends. Other functions and effects are the same as those of the first embodiment, and a detailed description thereof will be omitted.

FIGS. 15 to 18 show a fourth embodiment.
The actuator 170 according to the fourth embodiment has a ball screw shaft 172 as a driving force transmitting means, and has induction motors (hereinafter, referred to as motors) 174a, 174a.
4b is used to reduce the size of the power unit. The components corresponding to those of the second embodiment are denoted by the same reference numerals, and the detailed description thereof is omitted.

The actuator 170 includes a frame 176 forming a structural member, and a driving unit 180 including a table 178 which is displaced by rotating a ball screw shaft 172 under the driving action of motors 174a and 174b.
And

The driving unit 180 includes a connecting plate 182.
The base plate 184 is fixedly connected to the bottom of the frame 176 via a base plate, and is connected to an upper surface of the connection plate 182 by a guide rail 186.
Is concluded. The base plate 184 and the guide rail 186 may be integrally formed.

The table 178 is fixed on a guide block (not shown) which moves linearly on the guide rail 186. The table 178 has a ball screw nut 18.
8 is fixed, and the ball screw shaft 172 is fitted to the ball screw nut 188, so that the motor 174
The table 178 can be displaced linearly by converting the rotational driving forces a and 174b into linear driving forces. In addition,
The axis of the ball screw nut 188 is eccentric from the axis of the guide rail 186 to suppress the height of the table 178. Therefore, the axes of the ball screw shaft 172 and the guide rail 186 are both
0 is provided away from the central axis.

In general, the connection between the ball screw shaft 172 and the motors 174a and 174b is made via an Oldham's joint, a flexible joint, a universal joint made of rubber or the like to the end of the ball screw shaft 172 and the end of the motor shaft. Done. Also, as shown in the first embodiment, the motor 20
The ball screw shaft 172 and the motor shaft may be integrated using a and 20b. However, when the axis of the ball screw shaft 172 is separated from the center axis of the actuator 170, if the ball screw shaft 172 and the motor shaft are coaxial, the motors 174a and 174b
76 protrudes from the upper surface. In such a case, in order to prevent the motors 174a and 174b from projecting from the frame 176, a method is usually used in which the axis of the ball screw shaft 172 is separated from the axis of the motor shaft, and both are connected using gears. However, in this case, there is a problem that the power portion is complicated. In the present embodiment, the axis of the ball screw shaft 172 and the axis of the motor shaft are separated from each other, and both are connected using the timing belt 190, and the pulley integrated type is used as in the second and third embodiments. Using an induction motor, the power section is significantly reduced in size and simplified.

In this case, the fixing member 166b holding the motors 174a and 174b holds the shaft end of the ball screw shaft 172 by a bearing (not shown). The driven pulley 19 is provided at the shaft end of the ball screw shaft 172.
2 is connected, and the motor 1 is
The rotational driving forces 74a and 174b are transmitted. It is needless to say that the driven pulley 192 may be formed integrally with the ball screw shaft 172.

Actuator 7 in Embodiments 2 to 4
Nos. 0, 150, and 170 are integrated with a driving pulley using an induction motor and its simple structure, realize a downsized driving portion, and accommodate the motor without protruding from the outer surface of the frame. In addition, these actuators 70, 150, and 170 have a groove portion 24 having a substantially T-shaped cross section on the outside so that they can be incorporated into a production line or the like in a factory or the like. It can be used not only for mounting frames and panels of other actuators, protective wire nets, handrails, etc., but also for fixing wiring and piping, solenoid valves, ejector units with solenoid valves, and their manifolds.
As a result, the frames of the actuators 70, 150, and 170 can be used as structural members for constructing a structure of the actuator described later, and can be easily used without using beams or panels for attachment as in the related art. Can be incorporated into the structure of the actuator. Also,
When it is necessary to change the mounting position of the actuator etc. in the actuator structure once constructed, work such as changing the position of the beam or re-piercing the panel was necessary with the conventional actuator, In the case of this actuator, as described later, it is only necessary to loosen the mounting bolt of the fastening member, move the required amount in the frame, and then tighten the mounting bolt again, which not only simplifies the work but also reduces the number of work steps. Can be reduced. Furthermore, in the event of a trouble or during maintenance and inspection, the actuator can be easily removed from the structure of the actuator, which not only improves workability, but also replaces the actuator with another actuator to perform work quickly. be able to. Furthermore, since a plurality of actuators can be incorporated into one long frame, the size of the actuator can be reduced.

Next, a description will be given of a case where a plurality of actuators and air balancers according to the present invention are connected and used as an actuator structure.

As shown in FIG. 19, the structure 200 of the actuator according to the first assembling example includes a plurality of columnar members (structural members) 202 forming a framework, and first to fourth actuators 204, 206, 208. , 210, and an air balancer (hereinafter, referred to as “the air balancer”)
212, a work table 214, a work 216, a work storage box 218, a work holding plate 220, moving bodies 222, 224, 226,
228 and a suction pad 230 as a work holding means
Are connected to a cylinder 232 and a cylinder rod 234.
, A control box 238 for an electric actuator, a filter / regulator / lubricator controller 240, a compressor, a dehumidifier, and an aftercooler (not shown). The actuators 204 and 20 in FIG.
6, 208, and 210 have the same basic configuration as the actuators in the first to fourth embodiments.

A compressor, a dehumidifier (not shown),
The aftercooler etc. are integrated into each actuator 20
4, 206, 208 and 210 are inserted in the blocks. In this case, the wires are integrated or connected in the columnar member. Further, it is also possible to circulate and transmit the vacuum pressure using a suction device such as a well-known compressor or scroll compressor. In addition, these compressors, dehumidifiers, aftercoolers, well-known compressors,
A suction device such as a scroll compressor may be dispersed and incorporated in a motor box, a valve unit, or the like of each actuator described later.

The first actuator 204 includes a second actuator 20 mounted on the upper surface of the moving body 222.
6 and the balancer 212 are moved in a straight line direction.
This is for moving the third actuator 208 attached to the motor 24 in the vertical direction. Further, the moving body 226 of the third actuator 208 that is orthogonally connected to the second actuator 206 and the balancer 212 provided in parallel with the second actuator 206 has a suction pad 2.
The cylinder 232 to which the cylinder 30 is connected is connected. Further, a cylinder 236 is connected to the moving body 228 of the fourth actuator 210, and is used for transporting and positioning the work 216. A motor box 242 is provided at a connecting portion between the first actuator 204 and the columnar member 202.
A valve unit 244 is provided at a connection between the fourth actuator 210 and the columnar member 202. Of course, the motor box 242 and the valve unit 2
It is needless to say that, for example, as shown in the second actuator 206, the shape 44 may be flush with the shape avoiding projection from the upper surface. Further, a part of the electric actuator control box 238 may be dispersed and incorporated in the motor box 242 and the valve unit 244.

In operation, first, compressed air is supplied to the cylinder 232 connected to the third actuator 208 via the fluid passage in the columnar member 202. By the supply of the compressed air, the cylinder rod of the cylinder 232 is displaced downward, and the work 216 arranged in the work storage box 218 is sucked by the suction pad 230. The cylinder rod is again displaced upward by the supply of compressed air, and the second actuator 206
, The moving body 224 of the balancer 212 attached thereto is moved upward, and the third actuator 208 is moved upward. Further, the moving body 222 of the first actuator 204
Is moved in the direction of the vertical axis, and the first actuator 204 is moved.
Actuator 206 connected to moving body 222
Then, the balancer 212 attached to the second actuator 206 is moved. The first actuator 204
And the third actuator 208 includes the suction pad 23.
When the work 216 sucked to the position 0 approaches above a desired position, the movement is paused, and the second actuator 206 and the moving body 224 of the balancer 212 and the cylinder rod of the cylinder 232 attached thereto are displaced downward. The work 216 is inserted into the hole 2 of the work holding plate 220.
Insert at 46. At this time, the fourth actuator 210
The workpiece 216 can be positioned in the hole 246 by displacing the cylinder rod 234. further,
The fourth actuator 210 moves the work 21 to the work table 214 by the moving body 228 and the cylinder 236.
6 can be transported. The work storage box 218 and the work holding plate 220 are positioned on the work table 214 by positioning means (not shown).

Here, the columnar member 202, the actuators 204, 206, 208, 210, the balancer 2
The connecting means for connecting 12 and the like will be described with reference to FIGS.

FIGS. 20 and 21 show a first embodiment of the connecting means. FIG. 20 (a) is a partially schematic front view showing a case where the columnar members are connected to each other, and FIG. 21A is a partial sectional side view, and FIG. 21 is an exploded perspective view.

In FIG. 20, a columnar member 248 formed substantially identically has a linear groove 25 in the longitudinal direction of each side surface.
0 is defined. A screw 252 is provided in the groove 250.
A plate 254, which is screwed through, is slidably disposed. The tip 256 of the screw 252 is formed in a conical shape. Fluid passages 2, which are transmission paths for fluids such as air, oil, and water, are provided at the four corners at both ends of the columnar member 248.
58 is formed therethrough, and a hole 264 for inserting a bolt 262 via a spring 260 is defined at a substantially central portion. The head 266 of the bolt 262 is formed in accordance with the cross-sectional shape of the groove 250, and is loosely fitted from one end of the columnar member 248 in a direction substantially orthogonal to the column. Further, a V-shaped groove 268 is cut at an intermediate portion of the bolt 262, and a circular recess 270 serving as a spring receiver is provided on the opposite side of the head 266. Therefore, when connecting and connecting the columnar members 248, the plate 254 is inserted into the groove 250, the spring 260 and the bolt 262 are inserted into the hole 264 from one end of the columnar member 248 in the length direction thereof. At the same time, the head 266 of the bolt 262 is loosely fitted in a direction orthogonal to the groove 250 at one end of the columnar member 248. Subsequently, the screw 252 is screwed into the plate 254 through the groove 250 so that the bolt 26
The two columnar members 248 are connected and fixed to each other in a substantially right angle direction via the two. That is, as shown in FIG. 20B, the head integrated with the bolt 262 is formed by the inclined surface of the tip end portion 256 of the screw 252 abutting against the inclined surface of the V-shaped groove 268 of the bolt 262. The part 266 is displaced in the direction of arrow A. Due to the displacement of the head 266, the back side of the head 266 that has been loosely fitted in the groove 250 comes into contact with the groove 250, and the columnar member 248 is fixed. In this manner, the columnar members 248 can be easily connected to each other, and a fluid pressure signal can be transmitted via the fluid passage 258 in the columnar member 248.

Next, the connection is released and the columnar member 248 is released.
In order to separate the bolts 262 from each other, the screws 252 are loosened,
Is displaced in the direction of arrow B. Due to the displacement of the bolt 262, the back side of the head 266 of the bolt 262 is separated from the groove 250, and the head 266 of the bolt 262 is again moved into the groove 250.
In a loosely fitted state. Due to the loose fit of the head 266 of the bolt 262, the groove 25 of one of the columnar members 248 is formed.
Bolt 262 inserted into the other columnar member 248 from zero
Can be slid, and can be removed by moving the columnar member 248 along the groove 250. Although the first embodiment of the connecting means has been described for connecting the columnar members 248 to each other, the columnar member 248 and the actuators 204, 206,
The same applies to the case where 08, 210 or the balancers 212 are connected, and a detailed description thereof will be omitted.

Next, in a second embodiment of the connecting means shown in FIG.
The present embodiment differs from the above-described embodiment in that two bolts 278 integrated with 76 are provided. In the second and subsequent embodiments of the connecting means, the same reference numerals are given to the same components as those in the first embodiment, and the detailed description thereof will be omitted.

Subsequently, in the third and fourth embodiments of the connecting means shown in FIGS. 23 and 24, for example, the columnar members are respectively connected in three directions substantially orthogonal to each other. The third shown in FIG.
In the embodiment of FIG. 19, the balancer 21 provided in parallel as shown in FIG.
The columnar member 248 shown in the first embodiment of the connecting means is connected to each side surface of the second and second actuators 206, and further straddles the frames 280 and 282 of the balancer 212 and the second actuator 206, respectively. Substantially perpendicular to the columnar member 272, two bolts 2 are formed so as to correspond to the groove 250 parallel to the bottom surface of each frame 280, 282 of the balancer 212 and the second actuator 206.
62 are connected. Note that, in the fourth embodiment of the connecting means shown in FIG.
4 and the balancer 212 are attached to the columnar member 2 respectively.
48 and 286 are connected, and a detailed description thereof will be omitted.

Next, a fifth embodiment of the connecting means will be described with reference to FIG.
This will be described with reference to FIGS.

FIG. 25 is a perspective view of the columnar member and the connecting member, FIG. 26 is a partial cross-sectional view showing a state where the connecting member is connected to the columnar member, and FIG. 27 shows a state where the columnar members are connected via the connecting member. It is a perspective view.

In FIG. 25, a connection block (hereinafter, referred to as a block) 290 which is connected to a cut end surface cut substantially perpendicularly to the longitudinal direction of the columnar member 288 and functions as a connecting means is die-casting, precision casting, or the like. Is formed by vacuum die casting, vacuum casting, lost wax method, extrusion, drawing, metal powder injection, ceramics, or the like, and a substantially cylindrical projection is formed at a substantially central portion of the surface where the block 290 is joined to the columnar member 288. Part 292
Is provided. The protrusion 292 is defined at the axial center of one of the columnar members 288 to be attached,
It is fitted with a dimensional tolerance of fitting into the through hole 294 functioning as a fluid passage. Thereby, the columnar member 288
Even if the cut surface of the block is not cut perpendicular to the longitudinal direction, the projecting portion 292 of the block is defined perpendicular to the contact surface, and the through hole 294 of the columnar member 288 is parallel to the longitudinal direction. Since it is formed, the contact surface of the block 290 is straightened in the longitudinal direction of the columnar member 288.

The block 290 is provided with claw portions 296 a to 296, which are arranged to face each other so as to surround the protruding portion 292.
6d are provided. Substantially circular holes 298a to 298d are defined in the claws 296a to 296d. The claw portions 296a to 296d are inserted into the groove portions 300 having a substantially T-shaped cross section of the columnar member 288, and the holes 298 are formed.
By tightening the set screw 302 through a to 298d, the set screw 302 bites into the deep part 304 of the groove 300 defined in the columnar member 288, and is elastically or plastically deformed, preferably plastically deformed. It can be connected reliably. Further, the tip 305 of each of the claws 296a to 296d expands outward in a direction opposite to the fitting direction of the set screw 302, so that the claws 296a
296 d cut into the inclined surface between the groove 300 and the deep portion 304, and the effect of preventing the block 290 from falling off can be more reliably obtained (see FIG. 26). At this time, the protruding portion 292 is inserted into the through hole 294 to prevent the block 290 from shifting due to the difference in the amount of tightening of the set screw 302, and further, each claw portion provided to face the end surface of the block 290. 296a to 296d are inserted from the longitudinal direction of the groove 300 of the columnar member 288, and can be positioned reliably.

A bolt member 306 having a substantially T-shape is inserted into a block 290 attached to the columnar member 288 together with a spring 308, and the head 3 of the bolt member 306 is inserted.
10 is inserted from the longitudinal side surface of the counterpart columnar member 288 to be connected, and is rotated by about 90 °, so that the retaining action can be exhibited. The bolt member 306
By tightening the set screw 312, the block 290 can be reliably and easily connected to the columnar member 288 without rotating or wobbling due to the elastic force of the spring 308 (see FIG. 26). It should be noted that these blocks 290 are connected to each other from the connected columnar member 288.
When removing the set screw 312, loosen the set screw 312 and the spring 3
08 resilient force the bolt member 306 to the opposing columnar member 28
8 acts in a direction to separate the columnar members 288 from each other.
Can be removed and rebuilt.

Here, as shown in FIG. 28, a part of the columnar member 288 in which the head 310 of the bolt member 306 is connected to the block 290 is plastically or elastically deformed.
Preferably, the case of elastic deformation will be described. When the bolt member 306 is inserted into the block 290, the back surface 314 of the head 310 of the bolt member 306 has a cross section substantially T-shaped.
It contacts the flat part 316 of the U-shaped groove part 300. The surface that abuts on the opposite block side of the flat portion 316 includes a step portion 3.
18 is defined, and the back surface portion 314 of the bolt member 306 is formed.
Presses the flat portion 316 of the groove portion 300, so that the corner portion 320 is deformed toward the block 290 and fits into the block 290.

Next, as shown in FIGS. 29 and 30,
A sixth embodiment in which the columnar members 288 are connected to each other will be described.

The bolt member 328 and the spring 330 are inserted into the through hole 326 of the rectangular block 324 attached to the cut end surface of the columnar member 288 by four hexagonal tapping screws 322, and the set screw 332 is tightened. The one columnar member 288 and the other columnar member 288 can be easily connected. The spring 33
As the action of 0, the bolt member 328 is inserted and pressed against the elastic force of the spring 330 at the time of connection,
The position of the groove of the bolt member 328 is prevented from rotating and shifting or wobbling, and after the connection, when the set screw 332 is tightened again, the bolt member 328 is connected to the one column member 288 and the other column member 288. Serves to easily separate the

At the four corners of the rectangular block 324, holes 334 into which the hexagon socket tapping screws 322 are fitted are defined. When used as various fluid passages such as compressed air, a gasket groove, which is difficult to be additionally processed, is formed in advance on the end surface of the columnar member 288 on the rectangular block side, and a sheet-like gasket is used by sealing. The leakage of various fluids inside the columnar member 288 is prevented without causing problems such as a decrease in rigidity of the coupling portion and a dimensional change at the time of connection of the structural member, and the through hole 29 in the end face of the columnar member 288 is prevented.
The fluid can enter and exit through the opening 4. Further, a gasket groove and a seal member are provided between the columnar member 288 and the columnar member 288 further connected to the rectangular block 324,
A fluid passage may be provided between the plurality of connected columnar members 288.

Next, a description will be given of a case where a plurality of columnar members 336 are connected to assemble a structure, and then a reinforcing member or another columnar member is attached.

As shown in FIGS. 31 and 32, a groove 30 having a substantially T-shaped section is formed on the side surface of the columnar member 336.
Then, the bolt member 338 is inserted into the “0”. In this case, the long side 339 of the head 337 of the bolt member 338 is
After being inserted along the longitudinal direction of the
By rotating the head 337 by about 90 °, the bolt member 338 is fixed at a desired position of the groove 300. After the bolt member 338 is fixed in the groove 300 on the side surface of the columnar member 336 in this manner, as shown in FIG.
The 341, 342, 343 can be tightened by the nut member 344. Therefore, by using the bolt member 338 and the reinforcing members 340, 341, 342, 343, etc., the strength connection of the constructed structure is reinforced, the rigidity as a whole is increased, and the accuracy when the actuator or the like is used is reduced. In addition to preventing the
By linking the above, it is possible to easily expand the equipment.

Next, FIGS. 33 to 37 show side views of end surfaces of other various columnar members.

FIGS. 33 to 35 illustrate column members 346, 348, and 350 suitable for use in a portion where a strong load is applied to a structure assembled into a desired shape.
FIGS. 36 and 37 illustrate that by defining a space,
Illustrated are the columnar members 352 and 354 which are made lighter. The columnar members 346, 348, 350, 352, 3
54 is formed from a light metal material such as aluminum alloy, magnesium alloy, aluminum, silicon, magnesium alloy and the like, and is subjected to surface treatment such as alumite, hard alumite, titanium coating, cermet, PVD, CVD, etc., so that its mechanical strength is improved. And the reduction of scratches on the surface attached when attaching or removing various members can be achieved. Further, coloring by painting, preferably coloring by colored alumite treatment, may be used for identification of facilities and insulation.

Note that the columnar member has laser trimming,
By inkjet, etc., the serial number, date, product number, cutting length, manufacturer name, sales company, user, etc., encoded data, for example, bar code is marked, and the data is conveyed, processed, and assembled at the time of laying. Registered on the computer base of the equipment, for example, columnar members and actuators etc. owned by the entire equipment in integrated production such as CIM can be easily managed.
It can be efficiently rebuilt as a part of the CIM database.

Next, a seventh embodiment of the connecting means is shown in FIGS. In the following embodiments, the same components as those in the seventh embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

In FIG. 38, when connecting the columnar members 356 to each other, a connection block 358 is attached to the cutting end surface of one of the columnar members 356. This connection block 3
58 is inserted into a through hole 360 substantially at the center of the cutting end surface of the columnar member 356, and a plurality of slits 362a to 362f are provided.
Has a projection 364 engraved. The slit 36
Projection portion 36 divided into a plurality of pieces by 2a to 362f
The claw portions 366a to 366f are provided on the outer peripheral surface of the tip portion of No. 4, and the connecting convex portion 368 is provided at the four corners near the protrusion 364. On the other hand, the protrusion 364
A hole 373 for inserting a bolt member 372 having a substantially T-shaped cross section and having a tapered portion 370 at the tip is defined on the opposite side surface. On the upper surface of the connection block 358, a set screw 3 having an external thread engraved on the outer peripheral surface
A female screw portion 376 that fits with the screw member 74 is provided, and a tip portion of the set screw 374 is formed with a tapered portion 378 and engages with a tapered concave portion 380 defined in the bolt member 372. In addition, on the outer peripheral side surface of the columnar member 356,
A groove 384 having a substantially T-shaped cross section is defined.

Then, the connection projection 368 of the connection block 358 is inserted into the hole 382 defined at the four corners of the columnar member 356, and the projection 364 is inserted into the through hole 360, respectively. 358 is attached to the cut end surface of the columnar member 356. Next, the tapered portion 370 of the bolt member 372 comes into contact with the inner peripheral surface of the tip 386 of the projection 364 (see FIG. 39A). The bolt member 372
Of the other columnar member 356 is engaged with the groove 384 of the other columnar member 356. Subsequently, the distal end of the set screw 374 is attached to the female screw portion 376 of the connection block 358 by the bolt member 37.
The bolt member 372 is displaced in the direction of arrow A by pressing the inclined surface of the second concave portion 380. The bolt member 372 has an arrow A
The head member 388 of the bolt member 372 causes one of the columnar members 356 to move into the other columnar member 356.
Are pulled together in the direction of the axis to connect the two. At this time, the tapered portion 370 at the tip of the bolt member 372 is
Claw portions 366a to 366f formed on the outer peripheral surface of the distal end portion 386 of the projection portion 364 bite into the inner peripheral surface of the through hole 360. , Works to prevent escape. In this manner, one columnar member 356 and the other columnar member 356 can be easily connected.

Next, an eighth embodiment of the connecting means is shown in FIGS.

The eighth embodiment is different from the seventh embodiment in that a C-ring 390 is fitted to the outer peripheral surface of the tip of the projection 364 of the connection block 358 instead of providing the claws 366a to 366f. The point is that a sharp claw portion 392 is engraved on the outer peripheral surface of the C ring 390 at a predetermined interval. Thus, the C-ring 39 having the claw portion 392
After the columnar members 356 are once connected to each other by attaching 0 to the distal end of the protrusion 364, when separating the two, the bolt members 372 are detached to elastically deform and expand the diameter. There is an advantage that the diameter of the C-ring 390 is reduced to return to the original state, and the columnar members 356 can be easily separated from each other. The other configuration and the operation at the time of connection are the same as those of the above-described embodiment, and thus detailed description thereof will be omitted.

Next, a ninth embodiment of the connecting means is shown in FIGS.

The columnar member 394 according to the present embodiment has a linear groove 398 that extends in the longitudinal direction of the columnar member 394 and faces the entrance of a groove 396 formed on the outer peripheral surface and having a substantially T-shaped cross section.
Is formed at the bottom of the groove 396 so that the through-hole 400 has a substantially elliptical cross section. The through-hole 400 is formed so as to be orthogonal to the through-hole 402 provided along the axis of the columnar member 394. A holding member 404 is inserted into the through hole 400, a first bevel gear 406 is integrally connected to a lower portion of the holding member 404, and an annular groove 410 for mounting a C ring 408 is defined at an upper portion, A hole 412 having a substantially hexagonal cross section is defined on the upper surface. On the other hand, the columnar member 394
A female screw portion 414 is formed near the entrance of the through-hole 402 on the end surface of the cut portion, and a bolt member 416 is formed in the through-hole 402.
Is inserted. As shown in FIG. 42, the bolt member 416 includes a second bevel gear 418 that meshes with the first bevel gear 406 of the holding member 404, a male screw part 420 that fits with the female screw part 414 of the through hole 402, Head 422 engaging groove 396 of the other columnar member 394 to be connected
Are integrally formed.

Therefore, when connecting one columnar member 394 and the other columnar member 394, one columnar member 39
The head 422 of the bolt member 416 is engaged with the groove 396 of No. 4, and the bolt member 416 is fitted into the through hole 402 of the other columnar member 394. Subsequently, the other columnar member 39
The holding member 404 is inserted from the oval through hole 400 defined in the groove 396 of No. 4 and the annular groove 410 of the holding member 404 is inserted into the linear groove 398 defined at the entrance of the groove 396.
The C-ring 408 fitted to the
4 is prevented (see FIG. 43 (a)). Then, for example, a hexagonal wrench or the like is used to insert the holding member 4
04 is rotated in a predetermined direction. By the rotation of the holding member 404, the first integrated with the lower portion of the holding member 404
The bevel gear 406 rotates, and the second bevel gear 418 meshing with the first bevel gear 406 also rotates. Due to the rotation of the second bevel gear 418, the bolt member 416 is screwed in the direction of arrow A to pull one column member 394 in the axial direction of the other column member 394 (see FIG. 43 (b)). In this way, the columnar members 394 can be easily connected to each other, and compared to the case where the columnar members 394 are simply tightened by contact between the tip of the set screw and the recessed inclined surface of the bolt member as in the above-described embodiment, 1, second bevel gear 406, 4
Through the intermediary of 18, the columnar members 394 can be reliably connected to each other with a weak tightening torque. In addition, there is an advantage that loosening of the connecting portion due to vibration or impact is reduced.

Next, the columnar member 4 having the sectional shape shown in FIG.
A case will be described in which the through hole 426 defined in the center of the H.24 is used for various facilities such as conveyance, processing, and assembly.

As shown in FIG. 45, four groove portions 428 are defined on the inner wall surface of the through hole 426 of the columnar member 424, and a through hole having a convex portion at a portion engaging with the groove portion 428 is formed. The member 430 is inserted into the through hole 426. The through-hole member 430 is, for example, extruded from a resin, aluminum, a magnesium alloy, or the like, and a plurality of divided holes 432a to 432a to
432d is defined. The holes 432a to 432
d is a wiring 434, a coaxial / optical fiber cable 4 respectively.
36, an air pipe 438, a liquid fluid pipe 440, and the like. Therefore, the beautification of the appearance, the holes 432a to 432
There are advantages such as prevention of entanglement of each wiring / pipe in d, and prevention of influence on other members when leakage or disconnection occurs in the middle of each wiring / pipe.

Further, as shown in FIG.
Can be used as an energy transmission path 442 for microwaves or the like by coating the inner wall surface.

Further, as shown in FIG. 47, a ball spline 444 may be used, and the columnar member 424 itself may be used as a moving body that moves relatively to the spline nut 446. In this case, the spline nut 446 is attached by inserting a pin member 448 into a pre-processed groove, using the pin member 448 to prevent rotation of the shaft with the columnar member 424, and further screwing a set screw 450 from the outside. Accordingly, the spline nut 446 can be prevented from coming off.

Next, a tenth embodiment of the connecting means will be described with reference to FIG.
Shown in In the tenth embodiment, a description will be given of a cylinder mounting block that can be easily mounted on various types of equipment such as a transfer device, processing, and assembly constructed using a columnar member having a groove having a substantially T-shaped cross section.

As shown in FIG. 48, a pneumatic cylinder 456 having a recess 452 serving as a spigot on the head side and having through-holes 454 at four corners subjected to tightening screw processing is conventionally provided with, for example, a bracket and a bolt. It is attached to various facilities by etc.

Therefore, a connection block 458 is connected to the pneumatic cylinder 456, and the connection block 458 is connected.
The bolts 461 can be inserted into the through holes 460 defined at the four corners of the. At the time of the connection, the circular convex portion 4 defined in the connection block 458 is used.
64 is inserted and positioned in the circular recess 452 of the pneumatic cylinder. After connecting the connection block 458 to the pneumatic cylinder 456, a bolt member 462 having a substantially T-shaped cross section is inserted into the hole 466 of the connection block 458, and the bolt member 462 is easily tightened via a set screw 468. Or can be loosened. The pneumatic cylinder 456 and the connection block 458 are formed by die casting, precision casting, preferably vacuum die casting, vacuum casting, lost wax, extrusion, drawing, metal powder injection, ceramics, or the like.

Next, an eleventh embodiment of the connecting means will be described with reference to FIG.
Shown in In the eleventh embodiment, different types of columnar members 4 are used.
A case where the vacuum ejector system 475 equipped with the solenoid valve 474 is connected to the one columnar member 472 while connecting the 70 and 472 to each other will be described.

FIG. 49 (b) shows a side view of the columnar member 472. The columnar member 472 has a mounting through hole 476, a fluid passage through hole 478, and a groove 480 having a substantially T-shaped cross section.
Is connected to the other columnar member 470 via a connection block 482 sealed with a gasket or the like.
An electromagnetic valve 474 is provided on a columnar member 472 used for various facilities.
When a pneumatic device such as a vacuum ejector system 475 is to be disposed, a lateral hole for taking out air is formed on the outer surface of one of the columnar members 472 so that the vacuum ejector system 475 in which the electromagnetic valve 474 is mounted on the columnar member 472 is provided. connect. Female threads are applied to the open surface of the columnar member 472,
By performing piping such as supply and exhaust of compressed air therefrom, one of the columnar members 472 can be used similarly to the manifold block. Supply of the compressed air,
The exhaust can be performed through the through hole 478 for the fluid passage. The columnar member 472, the solenoid valve 474, and the vacuum ejector system 475 are formed by die casting, precision casting, preferably vacuum die casting, vacuum casting, lost wax, extrusion, drawing, metal powder injection, ceramics, or the like. It is composed.

As described above, in the connecting means relating to the structure of the actuator, the number of side surfaces can be increased by forming the end sections of the columnar member, the air balancer, the actuator and the like into a polygonal shape such as a square or a hexagon. Is possible. Further, it is needless to say that the shape may be circular or substantially circular. Therefore, a desired groove portion is defined on the side surface, a bolt is loosely fitted in the groove portion, and the bolt is screwed, so that the connection can be easily performed in multiple directions.

In the structure of the actuator according to this assembly example, various structures of the actuator are assembled.
A case where a plurality of actuators and an air balancer are arranged to convey a workpiece has been described. The structure of the actuator is formed, and the structure enables the work to be transported freely in all directions.

Next, FIG. 50 shows a second example of assembling an actuator structure similar to that shown in FIG. In the figure, the same components as those in FIG.
A detailed description thereof will be omitted.

The actuator structure 484 shown in FIG.
Depending on the working process, the first section 486 and the first section
A second section 488 is arranged in parallel with the section 486, and a belt conveyor 490 is arranged in parallel with the first section 486.

The first section 486 is provided with a motor box 494 disposed at one end of the actuator 492 and flush with the upper surface of the actuator 492, and a controller 496 having a display unit. The motor box 494 and the controller 496 are formed flush with the upper surface of the actuator 492 on which they are disposed, so that they have compatibility when they are attached to other members and are compact in shape, so that the space is effective. It can be used. Therefore, the other motor box 242 and the like shown in the drawing can be formed flush with the upper surface of the actuator 210 provided.

On the other hand, in the second section 488, balancers provided side by side with the actuators are respectively erected, and both ends of the actuator 506 are attached to moving bodies of the mounted actuators 498 and 500 and the balancers 502 and 504. The parts are connected respectively. The actuator 506 is substantially orthogonal to the actuators 498 and 500 and the balancers 502 and 504, respectively, and is connected while maintaining a substantially horizontal state. The actuator 208 is connected to a moving body 508 of the actuator 506, and a cylinder 512 having a mechanical hand 510 connected to the tip of a rod is connected to the moving body 226 of the actuator 208. The portions where the first section 486 and the second section 488 are connected and the actuators 210, 2
10, a moving body 228 of the actuator,
228 are positioning cylinder rods 234, 2 respectively.
Cylinders 236, 236 with 34 are connected.

By the way, a belt conveyor 490 is provided so as to be connected to the first section 486, and programming keyboards 514, 516 having a function as an input / output device of the control system are provided at the connected portion. . This programming keyboard 514, 516
Are variously attached to the columnar member 202 in a detachable manner and are incorporated in the present structure 484, specifically, various actuators 210, 206, 208, 492, and 4.
98, 500, balancers 212, 502, 504, cylinders 232, 236, 512, mechanical hand 51
0, the belt conveyor 490, and the like can be collectively managed by a control system described later. Note that various controllers and processors constituting the control system, and a transmission circuit of various signals including, for example, an optical signal, an electric signal, a fluid pressure signal, and a transmission / reception circuit of a wireless signal include actuators 210 and 206, respectively. 208,
492, 498, 500 and the columnar member 202.

FIG. 51 shows an actuator 208 of the first section 486 replaced with another actuator 518. Note that reference numeral 520 indicates a moving body.

Next, the structure 484 of the actuator is described.
Has a plurality of steps as a whole and functions as an independent production line.

As shown in FIG. 52, a parts pallet 525 having an ID module (not shown) is conveyed from a warehouse 522 via an unmanned vehicle 524 via a belt conveyor 490. The parts pallet 525 is provided with the structure 484.
Is transported to the first section 486 and subjected to a predetermined process. It is assumed that the work 216 is also provided with an ID module. Thereafter, the parts pallet 526 is transferred to the second section 4 via a transporting means (not shown).
88. In the second section 488,
After the predetermined process is performed, all the processes of the predetermined production line are completed, and the product is conveyed to another process.

On the other hand, the structure 484 of the actuator
, Each section 486, 488 will function as an independent production line.

In FIGS. 50 and 52, the actuator 492 is controlled by the actuator controller 1 to the actuator 208, the cylinder 232, and the suction pad 2.
The actuator 30 and the balancer 212 are respectively controlled by the actuator controller 2 and the balancer controller 1. Further, the actuator controllers 1 and 2 and the balancer controller 1
Each is connected to the multi-axis controller 1 via the multi-bus 526, and is integrally controlled as one work unit. Further, the actuator 210 and the cylinder 236 are controlled by the actuator controller 3 and connected to the multi-axis controller 2 via the multi-bus 528, and are integrally controlled as one work unit.

As described above, the integrated control of the first section 486 in the structure 484 is performed by the multi-axis controller 1,
This is performed via the management microprocessor 1 connected to the multi-axis controller 2.

The second section 48 in the structure 484
8, the actuator 506 is controlled by the actuator controller 4 in the same manner as described above.
08, the cylinder 512 and the mechanical hand 510 are controlled by the actuator controller 5, and the actuator 210 and the cylinder 236 are controlled by the actuator controller 6 by the actuator 498 and the balancer 5.
02 is the balancer controller 2 and the actuator 500 and the balancer 504 are the balancer controller 3
, Respectively. Further, the balancer controller 2 and the balancer controller 3
06 are connected to the local controller 530 in order to move them in a substantially vertical direction while maintaining the horizontal state, and integrated synchronization control is performed. The actuator controllers 4 and 5 and the local controller 530 are connected to the multi-axis controller 3 via the multi-bus 532, respectively, and are integrally controlled as one work unit. Accordingly, the integrated control in the second section 488 is also performed by the management microprocessor 2 connected to the multi-axis controllers 3 and 4 by a LAN using electric signals, optical signals, and wireless communication. Note that these actuator controllers 1 to 6 can also function as balancer controllers, respectively, while the balancer controllers 1 to 3 can also function as actuator controllers. Next, the belt conveyor 490
Is controlled by a belt conveyor controller 534, and the unmanned vehicle 524 and the warehouse 522 are respectively controlled by a control device, a control system, and the like (not shown).

Management microprocessors 1 and 2, belt conveyor controller 534, and unmanned vehicle 52
4. Each control device (not shown) of the warehouse 522 is networked by a LAN using electrical signals, optical signals, wireless communication, etc., and can freely transmit information to each other. Thus, an integrated control system of the actuator structure 484 as an independent production line can be formed.

The above-described configuration of the control system constitutes a centralized control system in which integrated control of the entire system depends on a specific host computer and controls each control device through its node. While this centralized control system has many advantages, the entire network must be down due to the host computer going down, and large-scale control application programs must be changed to change or add nodes and control equipment. Disadvantages exist. Therefore, each control device and control unit of the control system has a control application program for controlling itself, operates by communicating with each other, and does not require a host computer.
(Local Operating Network)
May be a distributed intelligent control system. In a distributed intelligent control system, a control application program are distributed to each node has a simple structure, flexibly accommodate additions and changes of the network and node control device (Tokuoyake Table <br/> Rights 3- 504,066 No. and Tokuoyake table flat 3-505642
No.).

The LAN network is connected not only to the control system of the actuator structure 484 as a similar production line, but also to other production, management, information, communication, and control systems. A management system is established. For example, F
A, a production management computer 536 that acts as a higher-level management computer as seen in the CIM may be connected, and may be part of a network of a large-scale integrated production system. In this case, the order, the process management, the assembly, the processing, the transfer procedure and the respective actuators, sensors, pallets,
A program procedure or program editing is appropriately performed in real time so that a control target such as a robot or a control device operates according to the above-described process.

As the user interface of these systems, input / output devices 538 such as programming keyboards 514 and 516 as shown in FIG. 50 are prepared. These input / output devices 538 are RS232C,
It can be freely connected to each controller, processor, computer, etc. by a general-purpose interface such as 422C or the like, a LAN using electrical signals, optical coaxial communication, wireless signals and the like, a multibus, an Ethernet, and a token ring. In addition, upper CIM computer and controller,
An input / output device 540 or a general-purpose interface connectable to a processor or the like is provided. In this case, the entire operation of editing, creating, changing, downloading, uploading, inputting / outputting, etc. the control program is not limited to the upper CIM computer.
It can be performed by a computer or the like. Further, any controller, processor, or computer can be accessed. In this case, the multi-bus, L
Communication may be performed via an AN, but all controllers, processors, and computers may be directly connected to each other via a network. Alternatively, the virtual network may be directly connected by software. As a result, it is possible to perform overall control at the work site, monitor and operate management information, and perform independent individual control that preserves not only operability but also the integrity of the entire system in each operation and process unit. This increases the flexibility of the entire system, and is very effective for system change, maintenance, and high-mix low-volume production.

Incidentally, these controllers, processors and computers may communicate via the above-mentioned multi-bus and LAN, but all controllers, processors and computers may be directly connected to each other via a network. . Further, a virtual network may be provided by software. Further, the upper computer, the lower computer, the PC, and the local controller may be integrated by the OS of UNIX, minicomputer, or microcomputer. The execution may be performed by an object architecture using a splash board window such as a Macintosh. Graphic / two-dimensional / solid modeling, for example, SDRC's Ideas and IBM's CA
DAM, DB2, CAIIA CAE, AUTOCA
Design / development simulation may be performed as concurrent engineering using a CAD / CAM / CAE / LA data structure such as DXT of Company D. in this case,
It is effective to utilize virtual reality technology as a man-machine interface (MMI).

Further, virtual reality may be introduced as a user interface of the system. In this case, an existing production system, network, parts, order status, etc. may be provided as a virtual space as an aid to system recognition. However, the user may proceed further regardless of the actual factory equipment and the configuration and arrangement of the FA system. Provide a virtual recognition system according to (system configurator, programmer, production planner, maintenance manager, etc.) to help workability and understanding. This makes it possible to separate the system to be recognized from the real configuration system, eliminating the need to adapt the real configuration system to the capabilities of the user. For example, a single real configuration system can be recognized and operated as multiple virtual recognition systems simultaneously. The real configuration system can be changed by changing the virtual recognition system without hardware change. The real configuration system is operated by subdividing it in time (time shearing). The real configuration system is spatially subdivided. It is possible to operate the system beyond the user's recognition limit in terms of space and time, such as in multi-layer operation. This system is composed of a system (GOD) that integrally manages and controls the actual configuration systems, and a system (DEVIL) that translates them into a virtual recognition system and provides them to the user. In the production system of the actuator structure 484 standardized under the CIM management, the work 2
16 with its constituent standardized structures 484 and actuators 210, 206, 208, 492,
498, 500, a suction pad 230, a mechanical hand 510, cylinders 232, 236, 512.
IM system (Artificial-Life CIM: ALCIM)
It may be. Further, the self-proliferation may be carried out from the lowest unit ALCIM system to production of a local factory group as well as a production line or an entire factory. These technologies can also be made into a biological composition with the development of genetic technology in the future. In this case, for example, one ultra DNA / RN
It may be self-propagated from seeds of A to production systems or factories. Complete self-reproduction system (Artificial-L
Ife Manufacturing System (ALMS) is not only factory, distribution, medical, general household, but also special environment such as nuclear power, vacuum, super clean room, polar environment, severe cold region, deep sea, outer space, planet, etc. It is very effective for regional development. In addition, ALMSs with multiple production purposes are arranged in a limited single environment, and the system scale, capacity, and efficiency are integrated with each other, and the optimal combined ALMS according to the required capacity, environmental conditions, etc. in a single environment unit scale It is possible to construct In this case, if the ability to self-proliferate, self-modify, and suddenly change the system in a continuous manner is continuously provided, a combined ALMS with a single environmental unit that can adapt to the required capacity and environmental conditions that cannot be changed to the maximum. It is possible to nurture. The concept of optimization by system competition is also effective for a system having self-modifying capability such as AI, and is not limited to ALMS, but also includes system management software, network order, manufacturing line construction, manufacturing order, process order. It is effective for optimization of division and construction. on the other hand,
The concept of optimization due to system contention also implies the possibility of operating a CIM system due to contention of multiple systems with independent control. In this case, the CIM system does not have a specific centralized control system, and the integrated operation of the entire system is operated by the consensus of all the independent control systems constituting the entire system. These integration intentions may be specifically coordinated by a specific independent control system, or specific parts of all independent control systems that constitute the entire system as a distributed centralized control system from a hardware point of view are each organically controlled. May be linked to and function. In such a situation, if the determination of the integration intention is made in consideration of the requirements of each independent control system and the importance of the task, optimal overall control can always be performed.

[0119]

According to the actuator of the present invention,
The following effects can be obtained.

That is, by using the first induction motor as the main motor and the second induction motor as the sub motor as the driving sources, the actuator can be reduced in size and size. Also, by dividing the drive source into the first induction motor and the second induction motor, the control means can control the driving force of each of the first and second induction motors based on the displacement detected by the displacement detection means. Can be controlled, and as a result, more advanced control can be performed.

[Brief description of the drawings]

FIG. 1 is a perspective view of an actuator according to a first embodiment of the present invention.

FIG. 2 is a partially omitted perspective view of the actuator shown in FIG. 1;

FIG. 3 is a partial sectional view of the actuator shown in FIG. 1;

FIG. 4 is a block diagram showing an operation of the actuator shown in FIG.

FIG. 5 is a partial sectional view of an end of the actuator shown in FIG. 1;

FIG. 6 is an exploded perspective view of an actuator according to a second embodiment of the present invention.

FIG. 7 is an exploded perspective view of a pulley integrated induction motor.

FIG. 8 is an exploded perspective view of a pulley integrated induction motor.

FIG. 9 is a sectional view of a pulley integrated induction motor.

FIG. 10 is a perspective view showing a relationship between a timing belt and a pulley integrated induction motor.

FIG. 11 is an explanatory view showing a state in which a connecting plate is inserted into a frame.

FIG. 12 is an exploded perspective view of an actuator according to a third embodiment of the present invention.

FIG. 13 is an exploded perspective view of the pulley integrated induction motor.

FIG. 14 is an exploded perspective view of a pulley integrated induction motor.

FIG. 15 is an exploded perspective view of an actuator according to a fourth embodiment of the present invention.

16 is an exploded perspective view of an induction motor provided in the actuator shown in FIG.

17 is an exploded perspective view of an induction motor provided in the actuator shown in FIG.

18 is an exploded perspective view of an induction motor provided in the actuator shown in FIG.

FIG. 19 is a first assembly example of an actuator structure.

FIG. 20 is an explanatory view showing a first embodiment of a connecting means for connecting an actuator, a columnar member and the like.

FIG. 21 is a perspective view showing a first embodiment of the connecting means.

FIG. 22 is a partial sectional view showing a second embodiment of the connecting means.

FIG. 23 is a partial sectional view showing a third embodiment of the connecting means.

FIG. 24 is a partial sectional view showing a fourth embodiment of the connecting means.

FIG. 25 is a perspective view showing a fifth embodiment of the connecting means.

FIG. 26 is a partial cross-sectional view showing a connection state of the connection means shown in FIG. 25.

FIG. 27 is a perspective view showing a fifth embodiment of the connecting means.

FIG. 28 is an explanatory view showing a connected state of the connecting means shown in FIG. 25;

FIG. 29 is a perspective view showing a sixth embodiment of the connecting means.

30 is a partial cross-sectional view showing a connection state of the connection means shown in FIG. 29.

FIG. 31 is a perspective view when a reinforcing member is attached.

FIG. 32 is a perspective view showing a state where a reinforcing member is attached.

FIG. 33 is a side view of the end surface of the columnar member.

FIG. 34 is a side view of the end face of the columnar member.

FIG. 35 is a side view of the end surface of the columnar member.

FIG. 36 is a side view of the end surface of the columnar member.

FIG. 37 is a side view of the end surface of the columnar member.

FIG. 38 is a perspective view showing a seventh embodiment of the connecting means.

FIG. 39 is an explanatory view showing a connected state of the connecting means shown in FIG. 38;

FIG. 40 is a perspective view showing an eighth embodiment of the connecting means.

FIG. 41 is an explanatory view showing a connected state of the connecting means shown in FIG. 40;

FIG. 42 is a perspective view showing a ninth embodiment of the connecting means.

FIG. 43 is an explanatory view showing a connected state of the connecting means shown in FIG. 42;

FIG. 44 is a sectional view showing a through hole of a columnar member.

FIG. 45 is a partial cross-sectional view showing a through hole of a columnar member.

FIG. 46 is a cross-sectional view showing a through hole of a columnar member.

FIG. 47 is a partial cross-sectional view showing a through hole of a columnar member.

FIG. 48 is a perspective view showing a tenth embodiment of the connecting means.

FIG. 49 is a perspective view showing an eleventh embodiment of the connecting means.

FIG. 50 is a perspective view showing a second example of assembling the structure of the actuator.

FIG. 51 is a partial perspective view of the structure of the actuator shown in FIG. 50;

52 is a block diagram showing the operation of the structure of the actuator shown in FIG. 50.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Actuator 12 ... Ball screw shaft 16 ... Table 18 ... Frame 20a, 20b ... Induction motor 21 ... Encoder 23 ... Inverter motor controller

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G05D 3/00-3/20

Claims (1)

(57) [Claims] 1. An actuator in which a moving body displaced under the action of a driving source is disposed with respect to a structural member constituting an outer frame, wherein the driving source is a first induction motor as a main motor; A second induction motor that is a sub motor that assists or controls the main motor, a driving force transmitting unit that transmits a driving force of the driving source to the moving body, and a displacement amount that detects a displacement amount of the moving body. Control means for controlling a moving position or a moving speed of the moving body by controlling respective driving forces of the main motor and the sub-motor based on the displacement detected by the displacement detecting means; An actuator comprising: