JP3099216B2 - Donut substrate grinding tool - Google Patents
Donut substrate grinding toolInfo
- Publication number
- JP3099216B2 JP3099216B2 JP06219521A JP21952194A JP3099216B2 JP 3099216 B2 JP3099216 B2 JP 3099216B2 JP 06219521 A JP06219521 A JP 06219521A JP 21952194 A JP21952194 A JP 21952194A JP 3099216 B2 JP3099216 B2 JP 3099216B2
- Authority
- JP
- Japan
- Prior art keywords
- donut
- shaped substrate
- core member
- grinding
- flare
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims description 76
- 235000012489 doughnuts Nutrition 0.000 title description 3
- 239000010432 diamond Substances 0.000 claims description 46
- 229910003460 diamond Inorganic materials 0.000 claims description 44
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000007730 finishing process Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 241001272720 Medialuna californiensis Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】本発明は、板ガラス等の硬脆材料
を用いて製造されるドーナツ状基板の研削工具及び研削
方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grinding tool and a grinding method for a donut-shaped substrate manufactured using a hard and brittle material such as a sheet glass.
【０００２】[0002]
【従来の技術】高密度情報記録媒体に用いられるディス
ク基板の材料は、アルミ材等の金属材の他ガラス、セラ
ミック、プラスチック等の非金属材料が用いられてお
り、最近では平面性に優れるという理由でガラス等の材
料が多用されている。2. Description of the Related Art As a material of a disk substrate used for a high-density information recording medium, non-metallic materials such as glass, ceramics and plastics are used in addition to metallic materials such as aluminum materials. For that reason, materials such as glass are frequently used.
【０００３】ディスク基板としては、一般にその中心部
に円孔を有するドーナツ状基板が多く用いられ、切出し
直後のガラス等のドーナツ状基板の場合は、その内外周
に切削時の微小な凹凸が残り、それらの凹凸の除去およ
び強度の向上を図る上で、周端面の仕上加工と面取りと
を行わなければならなかった。[0003] As a disk substrate, a donut-shaped substrate having a circular hole at the center thereof is generally used. In the case of a donut-shaped substrate such as glass immediately after cutting, minute irregularities during cutting remain on the inner and outer circumferences. In order to remove the irregularities and improve the strength, the peripheral end face must be finished and chamfered.
【０００４】そのため、従来は、例えば、実開昭６３−
２０１０４８号公報および実開昭６３−６４４６０号公
報に示されるように、ガラスを図１０（イ）のようにド
ーナツ状に切出し、この切出したドーナツ状基板を真空
吸着テーブルの上に吸着固定し、その後内外周研削具内
に前記ドーナツ状基板を収納し、周壁部とコアー部の内
外周にそれぞれ形成された環状凹部に前記ドーナツ状基
板の内周部と周縁部とを当接させ、内外周研削具と真空
吸着テーブルとをそれぞれを回転させるとともに、内外
周研削具とドーナツ状基板との間に水平運動を与え、ド
ーナツ状基板の内周部と周縁部とを研削し、図１０
（ロ）のような研削仕上げ加工を行っていた。For this reason, conventionally, for example,
As shown in JP-A-201048 and JP-A-63-64460, glass is cut out in a donut shape as shown in FIG. 10A, and the cut out donut-shaped substrate is fixed by suction on a vacuum suction table. Thereafter, the donut-shaped substrate is housed in an inner and outer peripheral grinding tool, and the inner and outer peripheral portions of the donut-shaped substrate are brought into contact with annular concave portions formed on the inner and outer peripheries of the peripheral wall portion and the core portion, respectively. While rotating each of the grinding tool and the vacuum suction table, a horizontal motion is applied between the inner and outer circumference grinding tools and the donut-shaped substrate to grind the inner peripheral portion and the peripheral edge portion of the donut-shaped substrate.
A grinding finish process was performed as in (b).
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記従
来のドーナツ状基板の研削工程にあっては、周壁部とコ
アー部の内外周にそれぞれ形成された一対の環状凹部で
一気にドーナツ状基板の研削を行うようにすると種々の
問題が発生する。However, in the above-described conventional donut-shaped substrate grinding step, the donut-shaped substrate is ground at once by a pair of annular concave portions formed on the inner and outer circumferences of the peripheral wall portion and the core portion. Doing so causes various problems.
【０００６】即ち、環状凹部のダイヤモンド砥石面には
仕上げ研削に適した粒度のダイヤモンドが使用されてい
るため、ドーナツ状基板が図１０（イ）から図１０
（ロ）に変化するまで、言い換えると粗加工から仕上げ
加工まで同じ粒度のダイヤモンドが使用されることにな
り、研削時間が長時間となる。That is, since a diamond having a grain size suitable for finish grinding is used for the diamond grindstone surface of the annular concave portion, the donut-shaped substrate is shown in FIGS.
Until it changes to (b), in other words, diamonds of the same grain size are used from roughing to finishing, and the grinding time becomes long.
【０００７】また、仕上げ研削に適した細かい粒度のダ
イヤモンドで粗加工を行うとすると、ダイヤモンド砥石
面の寿命が短くなり、工具の取り換えを頻繁に行わなけ
ればならなくなる。Further, when rough machining is performed with diamond having a fine grain size suitable for finish grinding, the life of the diamond grinding wheel surface is shortened, and the tool must be replaced frequently.
【０００８】そこで、粗仕上げ加工と仕上げ加工とを別
々の工具を用いて同一の装置で２工程で行うとすると、
工具取り換えが必要になり、手間を要する。そこで、別
々の複数の装置で上述の２工程を行うとすると、ドーナ
ツ状基板を固定テーブルに設置する際、軸合せが煩雑に
なるばかりか、軸の中心が狂ってしまうとドーナツ状基
板の精度が落ちるといった問題がある。[0008] Therefore, if rough finishing and finishing are performed in two steps by the same apparatus using different tools,
Tool replacement is required, which is troublesome. Therefore, if the above-described two steps are performed by a plurality of separate devices, when the donut-shaped substrate is set on the fixed table, not only the alignment becomes complicated, but also if the center of the shaft is deviated, the accuracy of the donut-shaped substrate is reduced. There is a problem that falls.
【０００９】本発明は、上記のような問題に着目してな
されたもので、粗仕上げから仕上げまでを短時間に行
え、かつダイヤモンド砥石の寿命を大幅に延ばせる高精
度のドーナツ状基板の研削工具およびこの工具を利用し
た研削方法を提供することである。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and is a high-accuracy donut-shaped substrate grinding tool capable of performing rough finishing to finishing in a short time and greatly extending the life of a diamond grindstone. And a grinding method using the tool.
【００１０】[0010]
【課題を解決するための手段】本発明のドーナツ状基板
の研削工具は、コアー部材と該コアー部材を包囲するよ
うに形成されたフレアー部材とからなるワークの、該コ
アー部材にドーナツ状基板の中心孔を挿入して、該ドー
ナツ状基板をコアー部材とフレアー部材との所定高さに
位置する環状凹部に位置させ、回転状態の前記ワークと
ドーナツ状基板との間に相対的水平運動を与え、前記所
定高さの内外環状凹部でドーナツ状基板の内外周の粗仕
上げ研削を行い、続いて前記ワークの中心とドーナツ状
基板の中心とを接近させ、ワークとドーナツ状基板とを
上下方向に相対移動して、ドーナツ状基板を前記環状凹
部と異なる高さに位置する別の環状凹部に位置させ、再
度、ワークとドーナツ状基板との間に偏心運動を与えて
ドーナツ状基板の内外周の仕上げ研削を行う研削工具で
あり、前記コアー部材の外周部には上下位置に複数の環
状凹部が、さらにフレアー部材には前記コアー部材の外
周の環状凹部と同高さにやはり上下位置に複数の環状凹
部が形成されており、同高さの内外の環状凹部を一対と
して、この一対の環状凹部は、他の異なる高さの一対の
環状凹部に対して粒度の異なるダイヤモンドを使用した
ダイヤモンド砥石面であることを特徴としている。According to the present invention, there is provided a donut-shaped substrate grinding tool which surrounds a core member and the core member.
Of a workpiece consisting of a flare member
Insert the center hole of the donut-shaped substrate into the
Set the nut-shaped substrate at a predetermined height between the core member and flare member.
Positioned in the annular recess that is located,
A relative horizontal motion is applied between the donut-shaped substrate and
Rough finishing of the inner and outer circumferences of the donut-shaped substrate with inner and outer annular recesses of constant height
Up grinding, and then donut shape with the center of the work
Move the workpiece and the donut-shaped substrate close to the center of the substrate.
The donut-shaped substrate is moved relative to the vertical
Position in another annular recess located at a different height from the
Degree, giving an eccentric movement between the workpiece and the donut-shaped substrate
A grinding tool that performs finish grinding of the inner and outer circumference of a donut-shaped substrate
A plurality of annular recesses are formed in the outer peripheral portion of the core member in the vertical position, and a plurality of annular recesses are formed in the flare member at the same height as the annular recess of the outer periphery of the core member. The inner and outer annular recesses having the same height are paired, and the pair of annular recesses is characterized by being a diamond grindstone surface using diamond having a different grain size for a pair of other annular recesses having different heights. .
【００１１】本発明のドーナツ状基板の研削工具は、コ
アー部材とフレアー部材とが同一シャンクを共有してい
ることが好ましい。 [0011] The grinding tool of the donut-shaped substrate of the present invention, the co
And the flare member share the same shank.
Preferably.
【００１２】本発明のドーナツ状基板の研削工具は、コ
アー部材とフレアー部材とがそれぞれ回転軸の異なる別
々のシャンクを有していることが好ましい。 [0012] The grinding tool of the donut-shaped substrate of the present invention, the co
And the flare member have different rotation axes.
It is preferable to have various shanks.
【００１３】[0013]
【００１４】[0014]
【００１５】[0015]
【００１６】[0016]
【００１７】[0017]
【作用】ワークの中心とドーナツ状基板の中心とを接近
させるのみで、ワークが回転中であったとしても、自由
にドーナツ状基板を高さの異なる他の環状凹部に移動さ
せることができる。すなわち、高さの異なる一対の環状
凹部のダイヤモンド砥石面のダイヤモンドの粒度がそれ
ぞれ上下で異なっているため、例えば、粒度の大きなダ
イヤモンドを有するダイヤモンド砥石面でドーナツ状基
板の粗仕上げ加工を行った後、次に研削工具を取り外す
ことなく上下方向に移動するのみで、粒度の小さなダイ
ヤモンドを有するダイヤモンド砥石面でのドーナツ状基
板の高精度な仕上げ研削を一連の作業として行える（請
求項１）。[Function] Close the center of the work and the center of the donut-shaped substrate
Only when the workpiece is rotating.
The donut-shaped substrate is moved to another annular recess with a different height.
Can be made. That is, since the diamond grain size of the diamond grindstone surfaces of the pair of annular concave portions having different heights is different from each other at the top and bottom, for example, after performing a rough finishing process on a donut-shaped substrate with a diamond grindstone surface having a large grain size diamond. Then, by simply moving the grinding tool in the vertical direction without removing the grinding tool, high-precision finish grinding of the donut-shaped substrate on the surface of the diamond grindstone having small-diameter diamond can be performed as a series of operations (claim 1).
【００１８】[0018]
【００１９】[0019]
【００２０】コアー部材とフレアー部材とを一体に同一
シャンクで回転できるようにすると、ワークの装着、取
り外しが容易なばかりか、コアー部材とフレアー部材と
の位置調整も省略できる（請求項２）。[0020] a core member and a flare member to rotate the same shank integrally mounting the work, not only removal is easy, can be omitted also alignment between the core member and the flare member (claim 2).
【００２１】コアー部材とフレアー部材とのシャンクを
別々にすることにより、コアー部材とフレアー部材との
回転数を変化させたり、コアー部材とフレアー部材との
回転方向を変化させることができ、ダイヤモンド砥石部
の長寿命化、さらにはドーナツ状基板の仕上げ速度の向
上等を図ることができる（請求項３）。By separating the shank between the core member and the flare member, the number of rotations of the core member and the flare member can be changed, and the direction of rotation between the core member and the flare member can be changed. life of the parts, more can be achieved such improvement in the finishing speed of the donut-shaped substrate (claim 3).
【００２２】[0022]
【００２３】[0023]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。Embodiments of the present invention will be described below with reference to the drawings.
【００２４】図１には、ガラス等の硬脆材料の板からな
るドーナツ状基板を研削するための研削工具１（以下、
ワークと言う）が示されており、天板２の上方にはシャ
ンク３が突設されているとともに、シャンク３と同軸下
方には円柱状のコアー部材４が延びており、また天板２
の円周部からは前記コアー部材４を包囲するようにフレ
アー部材５が垂設されている。FIG. 1 shows a grinding tool 1 (hereinafter, referred to as a grinding tool) for grinding a doughnut-shaped substrate made of a plate of a hard and brittle material such as glass.
A shank 3 is projected above the top plate 2, and a columnar core member 4 extends coaxially below the shank 3.
A flare member 5 is suspended from the circumference of the core member 4 so as to surround the core member 4.
【００２５】ワーク１は主に鋼製でできており、このコ
アー部材４の外周およびフレアー部材５の内周には、同
じ高さ位置に環状凹部８が複数本切設され、その形状は
断面がほぼ台形状をしている。ただし、断面台形に限ら
ずその用途によっては半月状または三角形になってもよ
い。The work 1 is mainly made of steel, and a plurality of annular recesses 8 are cut out at the same height on the outer periphery of the core member 4 and the inner periphery of the flare member 5, and have a sectional shape. Has a substantially trapezoidal shape. However, the shape is not limited to a trapezoidal cross section, and may be a half-moon shape or a triangular shape depending on the application.
【００２６】これら環状凹部８はダイヤモンド砥石部１
２を構成しており、このダイヤモンド砥石部１２は、メ
タルボンド砥石あるいは電着砥石等として製作される。
ここで、図１では明らかではないが、ダイヤモンド砥石
部は、各同じ高さの内外の環状凹部８、８を一対として
使用されるダイヤモンドの粒度や環状凹部の形状等が異
なっている。即ち、環状凹部の断面については、例えば
図５（ａ）、（ｂ）に示されるように、上下の環状凹部
の開放角θがそれぞれθ1、θ2のように異なっている。These annular recesses 8 are provided in the diamond grindstone portion 1.
The diamond grindstone portion 12 is manufactured as a metal bond grindstone, an electrodeposition grindstone, or the like.
Here, although not clear in FIG. 1, the diamond grindstone portions differ in the grain size, the shape of the annular concave portions, etc. of the diamond used as a pair of the inner and outer annular concave portions 8 having the same height. That is, as shown in FIGS. 5A and 5B, for example, the open angles θ of the upper and lower annular concave portions are different from each other, such as θ 1 and θ 2 .
【００２７】図３、図４に基づいて、ワーク１を用いた
ドーナツ状基板６の粗加工から仕上げの工程についてそ
の一例を説明する。Referring to FIGS. 3 and 4, an example of a process from rough processing to finishing of the donut-shaped substrate 6 using the work 1 will be described.
【００２８】回転しているワークもしくは非回転状態の
ワーク１内に、（ａ）に示されるようにドーナツ状基板
６が挿入され、所定の高さのダイヤモンド砥石面１２に
臨むように位置決めされる。この位置で、所定の回転が
与えられたワークに、（ｂ）に示されるように水平運動
を与え、例えば、粒度の大きいダイヤモンドを使用した
ダイヤモンド砥石面１２で粗加工が行われる。この場
合、ドーナツ状基板６に回転や水平運動を与えても同じ
効果がある。A donut-shaped substrate 6 is inserted into a rotating or non-rotating work 1 as shown in FIG. 1A and positioned so as to face a diamond grindstone surface 12 having a predetermined height. . At this position, a horizontal motion is given to the workpiece to which a predetermined rotation is given, as shown in (b), and rough work is performed, for example, on the diamond grinding wheel surface 12 using diamond having a large grain size. In this case, the same effect is obtained even if the donut-shaped substrate 6 is given a rotation or a horizontal motion.
【００２９】この粗加工において、ドーナツ状基板６を
最終形状に近付け、続いてこのセット状態のまま（ｃ）
に示されるようにワーク１の回転中心とドーナツ状基板
６の中心とを近付けることにより、このワークとドーナ
ツ状基板とは上下に移動可能となる。In this rough processing, the donut-shaped substrate 6 is brought close to the final shape, and subsequently in this set state (c).
By bringing the center of rotation of the work 1 and the center of the donut-shaped substrate 6 closer to each other as shown in (1), the work and the donut-shaped substrate can be moved up and down.
【００３０】図２に示されるように、円板状のドーナツ
状基板６がこのワーク１内に収納され、所定の環状凹部
８に対応する水平位置にセットされると、コアー部材４
の回転中心Ｏに対して所定の寸法の水平移動が与えられ
る。この水平運動はドーナツ状基板６の中心点の回りを
ワークの回転中心Ｏが円周軌道を描く移動形態、さらに
はワークを所定の方向に往復移動させながら、ドーナツ
状基板６を低速で回転させることもできる。言い換える
と、研削中にドーナツ状基板６の内外周がコアー部材４
とフレアー部材５とに形成された所定のダイヤモンド砥
石面１２にほぼ均一に接触すれば足りるため、相対的な
両者の水平移動が達成されればよい。As shown in FIG. 2, when the disk-shaped donut-shaped substrate 6 is housed in the work 1 and set at a horizontal position corresponding to a predetermined annular concave portion 8, the core member 4 is formed.
The horizontal movement of a predetermined dimension is given to the rotation center O of. This horizontal movement is such that the rotation center O of the work follows a circumferential trajectory around the center point of the donut-shaped substrate 6, and further, the donut-shaped substrate 6 is rotated at a low speed while reciprocating the work in a predetermined direction. You can also. In other words, the inner and outer peripheries of the donut-shaped substrate 6 are ground during the grinding.
It suffices that it suffices to make a substantially uniform contact with the predetermined diamond grindstone surface 12 formed on the flare member 5 and the flare member 5.
【００３１】この状態で、再度ワーク１とドーナツ状基
板６とに上下方向の移動を与え、次の加工、即ちドーナ
ツ状基板６が仕上げ用のダイヤモンド砥石面１２’に臨
む図４（ｄ）の位置で位置決めされる。In this state, the workpiece 1 and the donut-shaped substrate 6 are again moved in the vertical direction, and the next processing, that is, the donut-shaped substrate 6 faces the finishing diamond grindstone surface 12 'in FIG. Positioned by position.
【００３２】この位置で図３（ｂ）と同様に水平移動が
与えられ、例えば、粒度の小さいダイヤモンドを使用し
たダイヤモンド砥石面１２’で仕上げ加工が行われる。
この後、ワーク１の回転中心とドーナツ状基板６との中
心とを近付けることにより、ドーナツ状基板をワークか
ら容易に分離できる。このワーク１による研削加工には
ダイヤモンド砥石面１２と１２’とを使用したが、更に
ダイヤモンド砥石面１２”を使用し、粗仕上げ、中仕上
げ、そして高精度仕上げのように、３段階の工程を行っ
てもよい。At this position, horizontal movement is given in the same manner as in FIG. 3 (b). For example, finishing is performed on the diamond grindstone surface 12 'using diamond having a small grain size.
Thereafter, by bringing the rotation center of the work 1 close to the center of the donut-shaped substrate 6, the donut-shaped substrate can be easily separated from the work. The grinding process by the work 1 uses the diamond grinding surfaces 12 and 12 ', but further uses the diamond grinding surface 12 "and performs three stages of processes such as rough finishing, medium finishing and high precision finishing. May go.
【００３３】図５は環状凹部即ちダイヤモンド砥石面１
２の開放角θをそれぞれ変化させた実施例であり、前述
の工程における、粗仕上げの際、（ａ）に示されるよう
に上部傾斜面９と下部傾斜面１０とで形成される開放角
θ1の大きいダイヤモンド砥石面１２で糸面部１１を予
め削り落とす。このため、次段階の仕上げ用のダイヤモ
ンド砥石面１２’を用いた研削時には、（ｂ）に示され
るように上部傾斜面９’と下部傾斜面１０’とで形成さ
れる開放角θ2の小さいダイヤモンド砥石面１２’にか
かる研削負担は極めて少なくなる。ここで、粗加工と仕
上げ加工とに用いられるダイヤモンド砥石面において、
ダイヤモンドの粒子の大小と開放角とを組み合わせるこ
とも可能である。FIG. 5 shows an annular recess or diamond grinding wheel surface 1.
2 is an example in which the opening angle θ is changed, and the opening angle θ formed by the upper inclined surface 9 and the lower inclined surface 10 as shown in FIG. The thread surface portion 11 is preliminarily shaved off with a large diamond grindstone surface 12. Therefore, 'at the time of grinding with the upper inclined surface 9 as shown in (b)' diamond grindstone surface 12 for finishing the next stage small opening angle theta 2 which is formed out with a lower inclined surface 10 ' The grinding burden on the diamond wheel surface 12 'is extremely reduced. Here, on the surface of the diamond wheel used for roughing and finishing,
It is also possible to combine the size of the diamond particles with the open angle.
【００３４】図６には、円筒状のフレアー部材５にダイ
ヤモンド砥石面が上下２箇所に形成されたものが、さら
に図７にはフレアー部材５が円筒状ではなくバランス良
く複数片垂下されたフレアー部材を有するものが示され
ている。FIG. 6 shows a cylindrical flare member 5 in which diamond grindstone surfaces are formed at two upper and lower portions. FIG. 7 shows a flare member 5 which is not cylindrical but has a plurality of single-hanging flares. One having members is shown.
【００３５】図８には、更に他の実施例が示されてお
り、ワーク１のフレアー部材５とコアー部材４とが同じ
回転中心軸を共有するが、それぞれ別々の回転駆動部
（図示せず）と連結されるように、フレアー部材５のシ
ャンク３内にコアー部材４と一体のコアーシャンク７が
形成されている。FIG. 8 shows still another embodiment, in which the flare member 5 and the core member 4 of the work 1 share the same rotation center axis, but separate rotation drive units (not shown). ), A core shank 7 integral with the core member 4 is formed in the shank 3 of the flare member 5.
【００３６】このワークを使用して例えば、コアー部材
４の回転方向とフレアー部材５の回転方向とを逆にする
ことにより、下方で真空吸着テーブル（図示せず）等で
固定されたドーナツ状基板６に掛かる一方向の回転研削
抵抗が減少し、固定する力の多少にかかわらずドーナツ
状基板の位置ずれ等の危険を防止することができる。By using this work, for example, the rotation direction of the core member 4 and the rotation direction of the flare member 5 are reversed, so that a donut-shaped substrate fixed below by a vacuum suction table (not shown) or the like. 6, the rotational grinding resistance in one direction is reduced, and it is possible to prevent a danger such as displacement of the donut-shaped substrate regardless of the fixing force.
【００３７】また、このワークを使用して、コアー部材
４の周速度をフレアー部材５の周速度よりも高めること
により、それぞれの部材４、５のダイヤモンド砥石面の
寿命を等しくすることができる。Further, by using this work, the peripheral speed of the core member 4 is made higher than the peripheral speed of the flare member 5, so that the life of the diamond grinding stone surface of each of the members 4, 5 can be made equal.
【００３８】図９には、本発明の更に他の実施例が示さ
れており、これは、前述の形態と異なり、コアー部材４
とフレアー部材５とが回転軸の異なる別々のシャンク１
３、１４を有しているものである。これらコアー部材４
とフレアー部材５とはテーブルプレート１５に対して位
置決めされ使用されるものであり、回転中のコアー部材
４とフレアー部材５とでドーナツ状基板が研削される。FIG. 9 shows still another embodiment of the present invention.
And the flare member 5 are separate shank 1 having different rotation axes.
3 and 14. These core members 4
The flare member 5 is positioned and used with respect to the table plate 15, and the donut-shaped substrate is ground by the rotating core member 4 and flare member 5.
【００３９】以上、実施例を図面により説明してきた
が、具体的な構成は実施例に限られるものではなく、本
発明の要旨を逸脱しない範囲における変更や追加等があ
っても本発明に含まれる。Although the embodiment has been described with reference to the drawings, the specific configuration is not limited to the embodiment, and any changes or additions without departing from the gist of the present invention are included in the present invention. It is.
【００４０】例えば、フレアー部材５とコアー部材４の
下方にドリル部を設け、ドーナツ状基板の切取りを行
い、続いて本発明の仕上げ工程を行うようにしてもよ
い。また、このワークやドーナツ状基板の水平移動幅や
その速度ついても材質やその大きさ等によって種々に変
更できることは明らかである。For example, a drill portion may be provided below the flare member 5 and the core member 4 to cut out the donut-shaped substrate, and then perform the finishing step of the present invention. It is apparent that the horizontal movement width and the speed of the workpiece and the donut-shaped substrate can be variously changed depending on the material, the size, and the like.
【００４１】なお、水平移動時にワークとドーナツ状基
板とが相対的に上下方向に移動すると、ドーナツ状基板
が破損されるため、本発明の実施にあたってはシステム
的にこの誤動作は許されない。If the workpiece and the donut-shaped substrate move relatively up and down during the horizontal movement, the donut-shaped substrate will be damaged. Therefore, in practicing the present invention, this erroneous operation is not systematically allowed.
【００４２】[0042]
【発明の効果】本発明は次の効果を奏する。The present invention has the following effects.
【００４３】（ａ）ワークの中心とドーナツ状基板の中
心とを接近させるのみで、ワークが回転中であったとし
ても、自由にドーナツ状基板を高さの異なる他の環状凹
部に移動させることができる。すなわち、高さの異なる
一対の環状凹部のダイヤモンド砥石面のダイヤモンドの
粒度がそれぞれ上下で異なっているため、例えば、粒度
の大きなダイヤモンドを有するダイヤモンド砥石面でド
ーナツ状基板の粗仕上げ加工を行った後、次に研削工具
を取り外すことなく上下方向に移動するのみで、粒度の
小さなダイヤモンドを有するダイヤモンド砥石面でのド
ーナツ状基板の高精度な仕上げ研削を一連の作業として
行える（請求項１）。(A) The center of the work and the inside of the donut-shaped substrate
The work is rotating only by approaching the mind
Even freely donut-shaped substrate with different annular recesses of different height
Part can be moved. That is, since the diamond grain size of the diamond grindstone surfaces of the pair of annular concave portions having different heights is different from each other at the top and bottom, for example, after performing a rough finishing process on a donut-shaped substrate with a diamond grindstone surface having a large grain size diamond. Then, by simply moving the grinding tool in the vertical direction without removing the grinding tool, high-precision finish grinding of the donut-shaped substrate on the surface of the diamond grindstone having small-diameter diamond can be performed as a series of operations (claim 1).
【００４４】（ｂ）コアー部材とフレアー部材とを一体
に同一シャンクで回転できるようにすると、ワークの装
着、取り外しが容易なばかりか、コアー部材とフレアー
部材との位置調整も省略できる（請求項２）。(B) If the core member and the flare member can be integrally rotated by the same shank, the work can be easily mounted and removed, and the position adjustment between the core member and the flare member can be omitted. 2 ).
【００４５】（ｃ）コアー部材とフレアー部材とのシャ
ンクを別々にすることにより、コアー部材とフレアー部
材との回転数を変化させたり、コアー部材とフレアー部
材との回転方向を変化させることができ、ダイヤモンド
砥石部の長寿命化、さらにはドーナツ状基板の仕上げ速
度の向上等を図ることができる（請求項３）。(C) By setting the shank of the core member and the flare member separately, the number of rotations of the core member and the flare member can be changed, and the rotation direction of the core member and the flare member can be changed. In addition, it is possible to extend the life of the diamond grindstone portion and further improve the finishing speed of the donut-shaped substrate (Claim 3 ).
【００４６】[0046]
【００４７】[0047]
【００４８】[0048]
【００４９】[0049]
【図１】本発明実施例のワークの断面図である。FIG. 1 is a sectional view of a work according to an embodiment of the present invention.
【図２】ワークとドーナツ状基板との関係を示す平面図
ある。FIG. 2 is a plan view showing a relationship between a work and a donut-shaped substrate.
【図３】ワークを利用した仕上げ工程を示す断面図であ
る。FIG. 3 is a cross-sectional view showing a finishing step using a work.
【図４】ワークを利用した仕上げ工程を示す断面図であ
る。FIG. 4 is a cross-sectional view showing a finishing step using a work.
【図５】ワークのダイヤモンド砥石面の部分断面図であ
る。FIG. 5 is a partial cross-sectional view of a diamond grindstone surface of a work.
【図６】本発明の他の実施例のワークの断面図である。FIG. 6 is a sectional view of a work according to another embodiment of the present invention.
【図７】本発明の他の実施例のワークの斜視図である。FIG. 7 is a perspective view of a work according to another embodiment of the present invention.
【図８】本発明の更に他の実施例のワークの断面図であ
る。FIG. 8 is a sectional view of a work according to still another embodiment of the present invention.
【図９】本発明の更に他の実施例のワークの断面図であ
る。FIG. 9 is a sectional view of a workpiece according to still another embodiment of the present invention.
【図１０】ドーナツ状基板の加工前と加工後の斜視図で
ある。FIG. 10 is a perspective view of a donut-shaped substrate before and after processing.
１ 研削工具（ワーク） ２ 天板 ３ シャンク ４ コアー部材 ５ フレアー部材 ６ ドーナツ状
基板 ７ コアーシャンク ８ 環状凹部 ９ 上部傾斜面 １０ 下部傾斜面 １１ 糸面部 １２ ダイヤモ
ンド砥石部 １３ シャンク １４ シャンク １５ テーブルプレートDESCRIPTION OF SYMBOLS 1 Grinding tool (work) 2 Top plate 3 Shank 4 Core member 5 Flare member 6 Donut-shaped substrate 7 Core shank 8 Annular concave portion 9 Upper inclined surface 10 Lower inclined surface 11 Thread surface portion 12 Diamond grinding stone portion 13 Shank 14 Shank 15 Table plate
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭58−160050（ＪＰ，Ａ) 特開 昭52−92186（ＪＰ，Ａ) 特開 平２−145265（ＪＰ，Ａ) 実開 昭63−64460（ＪＰ，Ｕ) 実開 平２−117861（ＪＰ，Ｕ) 実開 昭62−19166（ＪＰ，Ｕ) 実開 昭63−113560（ＪＰ，Ｕ) 実開 昭49−18198（ＪＰ，Ｕ) 実開 昭51−2796（ＪＰ，Ｕ) 実公 平１−21727（ＪＰ，Ｙ２) 特公 昭32−9044（ＪＰ，Ｂ１) (58)調査した分野(Int.Cl.7，ＤＢ名) B24D 5/00 B24D 17/00 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-58-16050 (JP, A) JP-A-52-92186 (JP, A) JP-A-2-145265 (JP, A) 64460 (JP, U) Japanese Utility Model 2-117861 (JP, U) Japanese Utility Model 62-19166 (JP, U) Japanese Utility Model 63-113560 (JP, U) Japanese Utility Model 49-18198 (JP, U) Shokai Sho 51-2796 (JP, U) Shoko Hei 1-27172 (JP, Y2) Tokubo Sho 32-9044 (JP, B1) (58) Fields investigated (Int. Cl. 7 , DB name) B24D 5/00 B24D 17/00
Claims (3)
うに形成されたフレアー部材とからなるワークの、該コ
アー部材にドーナツ状基板の中心孔を挿入して、該ドー
ナツ状基板をコアー部材とフレアー部材との所定高さに
位置する環状凹部に位置させ、回転状態の前記ワークと
ドーナツ状基板との間に相対的水平運動を与え、前記所
定高さの内外環状凹部でドーナツ状基板の内外周の粗仕
上げ研削を行い、 続いて前記ワークの中心とドーナツ状基板の中心とを接
近させ、ワークとドーナツ状基板とを上下方向に相対移
動して、ドーナツ状基板を前記環状凹部と異なる高さに
位置する別の環状凹部に位置させ、 再度、ワークとドーナツ状基板との間に偏心運動を与え
てドーナツ状基板の内外周の仕上げ研削を行う研削工具
であり、前記 コアー部材の外周部には上下位置に複数の
環状凹部が、さらにフレアー部材には前記コアー部材の
外周の環状凹部と同高さにやはり上下位置に複数の環状
凹部が形成されており、同高さの内外の環状凹部を一対
として、この一対の環状凹部は、他の異なる高さの一対
の環状凹部に対して粒度の異なるダイヤモンドを使用し
たダイヤモンド砥石面であることを特徴とするドーナツ
状基板の研削工具。1. A core member and a member surrounding the core member.
Of a workpiece consisting of a flare member
Insert the center hole of the donut-shaped substrate into the
Set the nut-shaped substrate at a predetermined height between the core member and flare member.
Positioned in the annular recess that is located,
A relative horizontal motion is applied between the donut-shaped substrate and
Rough finishing of the inner and outer circumferences of the donut-shaped substrate with inner and outer annular recesses of constant height
Up grinding, and then contact the center of the workpiece with the center of the donut-shaped substrate.
The workpiece and the donut-shaped substrate in the vertical direction.
To move the donut-shaped substrate to a height different from that of the annular recess.
Position it in another annular concave part, and give eccentric movement between the workpiece and the donut-shaped substrate again.
Tool for finishing grinding the inner and outer circumferences of donut-shaped substrates
A plurality of annular concave portions are formed in the outer peripheral portion of the core member in the vertical position, and a plurality of annular concave portions are formed in the flare member in the vertical position also at the same height as the annular concave portion of the outer periphery of the core member. A pair of inner and outer annular recesses having the same height, and the pair of annular recesses are diamond grindstone surfaces using diamonds having different grain sizes for a pair of other annular recesses having different heights. Tool for grinding donut-shaped substrates.
ンクを共有している請求項１に記載のドーナツ状基板の
研削工具。 2. The core member and the flare member have the same chassis.
2. The donut-shaped substrate according to claim 1, wherein
Grinding tools.
回転軸の異なる別々のシャンクを有している請求項１に
記載のドーナツ状基板の研削工具。 3. The core member and the flare member are each
2. The method according to claim 1, wherein the shank has a different shank having a different rotation axis.
A donut-shaped substrate grinding tool as described in the above.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06219521A JP3099216B2 (en) | 1994-08-22 | 1994-08-22 | Donut substrate grinding tool |
| JP10134510A JP3061605B2 (en) | 1994-08-22 | 1998-04-28 | Donut-shaped substrate circular grinding tool |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06219521A JP3099216B2 (en) | 1994-08-22 | 1994-08-22 | Donut substrate grinding tool |
| JP10134510A JP3061605B2 (en) | 1994-08-22 | 1998-04-28 | Donut-shaped substrate circular grinding tool |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10134510A Division JP3061605B2 (en) | 1994-08-22 | 1998-04-28 | Donut-shaped substrate circular grinding tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0857756A JPH0857756A (en) | 1996-03-05 |
| JP3099216B2 true JP3099216B2 (en) | 2000-10-16 |
Family
ID=47711451
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06219521A Expired - Fee Related JP3099216B2 (en) | 1994-08-22 | 1994-08-22 | Donut substrate grinding tool |
| JP10134510A Expired - Lifetime JP3061605B2 (en) | 1994-08-22 | 1998-04-28 | Donut-shaped substrate circular grinding tool |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10134510A Expired - Lifetime JP3061605B2 (en) | 1994-08-22 | 1998-04-28 | Donut-shaped substrate circular grinding tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP3099216B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0617817A (en) * | 1992-06-30 | 1994-01-25 | Musashi Seimitsu Ind Co Ltd | Spherical slide bush and its manufacture |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3099216B2 (en) | 1994-08-22 | 2000-10-16 | 旭栄研磨加工株式会社 | Donut substrate grinding tool |
| CN1078182C (en) * | 1998-03-13 | 2002-01-23 | 咸阳多晶材料厂 | Cobalt aluminate for colour kinescope and preparation technology thereof |
| GB0002251D0 (en) * | 2000-02-02 | 2000-03-22 | Unova Uk Ltd | Improvements in and relating to grinding machines |
| JP5020603B2 (en) * | 2006-11-15 | 2012-09-05 | ショーダテクトロン株式会社 | Glass substrate chamfering equipment |
| JP5006011B2 (en) * | 2006-11-15 | 2012-08-22 | 古河電気工業株式会社 | Manufacturing method of disk-shaped substrate |
| JP4252093B2 (en) | 2007-01-18 | 2009-04-08 | 昭和電工株式会社 | Disc-shaped substrate grinding method and grinding apparatus |
| JP4838188B2 (en) * | 2007-04-16 | 2011-12-14 | 旭栄研磨加工株式会社 | Drill for hole formation |
| JP5074311B2 (en) * | 2008-06-30 | 2012-11-14 | Ｈｏｙａ株式会社 | Magnetic disk glass substrate processing method, magnetic disk glass substrate manufacturing method, and magnetic disk manufacturing method |
| JP5227132B2 (en) * | 2008-10-01 | 2013-07-03 | Ｈｏｙａ株式会社 | Manufacturing method of glass substrate for magnetic disk and manufacturing method of magnetic disk |
| JP2010211882A (en) * | 2009-03-11 | 2010-09-24 | Showa Denko Kk | Grinding machine for magnetic recording disk base, manufacturing method of disk base, and grinding wheel for the disk base |
| JP5639215B2 (en) * | 2013-03-25 | 2014-12-10 | Hoya株式会社 | Glass substrate for magnetic disk, method for manufacturing glass substrate for magnetic disk, and method for manufacturing magnetic disk |
| CN107004431B (en) * | 2014-12-31 | 2019-09-13 | Hoya株式会社 | The manufacturing method and grinding grinding stone of substrate for magnetic disc |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0121727Y2 (en) * | 1980-11-29 | 1989-06-28 | ||
| JPS58160050A (en) * | 1982-03-15 | 1983-09-22 | Fujikoshi Kikai Kogyo Kk | Chamfering method of wafer and grinding wheel used therefor |
| JPS6322259A (en) | 1986-07-10 | 1988-01-29 | Hitachi Cable Ltd | Semiconductor wafer grinding method and device thereof |
| JPS6364460U (en) * | 1986-10-20 | 1988-04-28 | ||
| JPH0546845Y2 (en) † | 1987-06-11 | 1993-12-08 | ||
| JPH0428955U (en) † | 1990-06-28 | 1992-03-09 | ||
| JP2921250B2 (en) † | 1992-02-28 | 1999-07-19 | 信越半導体株式会社 | Mirror polishing method and apparatus for wafer chamfer |
| JPH06190700A (en) | 1992-12-25 | 1994-07-12 | Ishikawajima Harima Heavy Ind Co Ltd | Processing method and processing tool for code disc for rotary encoder |
| JP3099216B2 (en) | 1994-08-22 | 2000-10-16 | 旭栄研磨加工株式会社 | Donut substrate grinding tool |
-
1994
- 1994-08-22 JP JP06219521A patent/JP3099216B2/en not_active Expired - Fee Related
-
1998
- 1998-04-28 JP JP10134510A patent/JP3061605B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0617817A (en) * | 1992-06-30 | 1994-01-25 | Musashi Seimitsu Ind Co Ltd | Spherical slide bush and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3061605B2 (en) | 2000-07-10 |
| JPH10329037A (en) | 1998-12-15 |
| JPH0857756A (en) | 1996-03-05 |
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