JP3096816B2 - Manufacturing method of electrical connection member - Google Patents
Manufacturing method of electrical connection memberInfo
- Publication number
- JP3096816B2 JP3096816B2 JP02067811A JP6781190A JP3096816B2 JP 3096816 B2 JP3096816 B2 JP 3096816B2 JP 02067811 A JP02067811 A JP 02067811A JP 6781190 A JP6781190 A JP 6781190A JP 3096816 B2 JP3096816 B2 JP 3096816B2
- Authority
- JP
- Japan
- Prior art keywords
- electrical connection
- connection member
- solder
- conductive member
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3421—Leaded components
Landscapes
- Wire Bonding (AREA)
- Manufacturing Of Electrical Connectors (AREA)
- Multi-Conductor Connections (AREA)
- Coupling Device And Connection With Printed Circuit (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、電気回路部品同士を電気的に接続する際に
使用する電気的接続部材の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing an electrical connection member used when electrically connecting electric circuit components to each other.
電気回路部品同士を電気的に接続する方法としては、
ワイヤボンディング方法,TAB(Tape Automated Bondin
g)法等が公知である。ところがこれらの方法にあって
は、両電気回路部品間の接続点数の増加に対応できな
い、コスト高である等の難点があった。このような難点
を解決すべく、絶縁保持体中に複数の導電部材を互いに
絶縁して埋設させた構成をなす電気的接続部材を用い
て、電気回路部品同士を電気的に接続することが提案さ
れている(特開昭63−222437号公報,特開昭63−228726
号公報,特開昭63−246835号公報等)。As a method of electrically connecting electric circuit components to each other,
Wire bonding method, TAB (Tape Automated Bondin)
g) The method is known. However, these methods have drawbacks such as an inability to cope with an increase in the number of connection points between the two electric circuit components and an increase in cost. In order to solve such difficulties, it is proposed to electrically connect electric circuit components to each other by using an electric connection member having a configuration in which a plurality of conductive members are buried insulated from each other in an insulating holder. (JP-A-63-2222437, JP-A-63-228726).
JP, JP-A-63-246835, etc.).
第4図は、このような電気的接続部材を用いた電気回
路部品間の電気的接続を示す模式図であり、図中31は電
気的接続部材,32,33は接続すべき電気回路部品を示す。
電気的接続部材31は、金属または合金からなる複数の導
電部材34を、夫々の導電部材34同士を、電気的に絶縁し
て電気的絶縁材料からなる保持体35中に埋設して構成さ
れており、導電部材34の一端38を一方の電気回路部品32
側に露出させ、導電部材34の他端39を他方の電気回路部
品33側に露出させている(第4図(a))そして、一方
の電気回路部品32の接続部36と電気回路部品32側に露出
した導電部材34の一端38とを合金化することにより両者
を接続し、他方の電気回路部品33の接続部37と電気回路
部品33側に露出した導電部材34の他端39とを合金化する
ことにより両者を接続している(第4図(b))。FIG. 4 is a schematic diagram showing an electrical connection between electrical circuit components using such an electrical connection member, in which 31 is an electrical connection member, and 32 and 33 are electrical circuit components to be connected. Show.
The electrical connection member 31 is configured by burying a plurality of conductive members 34 made of a metal or an alloy in a holder 35 made of an electrically insulating material by electrically insulating the respective conductive members 34 from each other. One end 38 of the conductive member 34 is connected to one of the electric circuit components 32.
And the other end 39 of the conductive member 34 is exposed to the other electric circuit component 33 (FIG. 4 (a)), and the connecting portion 36 of one electric circuit component 32 and the electric circuit component 32 are exposed. The one end 38 of the conductive member 34 exposed to the side is alloyed to connect the two, and the connecting portion 37 of the other electric circuit component 33 and the other end 39 of the conductive member 34 exposed to the electric circuit component 33 are connected. Both are connected by alloying (FIG. 4 (b)).
このような構成をなす電気的接続部材、及びこの電気
的接続部材を用いた電気的接続には以下に示すような利
点があり、実用性に優れている。The electrical connection member having such a configuration and the electrical connection using the electrical connection member have the following advantages and are excellent in practicality.
導電部材の大きさを微細にすることにより、電気回
路部品の接続部を小型化でき、また接続点数を増加させ
ることができ、電気回路部品間の高密度な接続が可能で
ある。By miniaturizing the size of the conductive member, the connection portion of the electric circuit component can be reduced in size, the number of connection points can be increased, and high-density connection between the electric circuit components is possible.
厚みが異なる電気回路部品であっても、電気的接続
部材の厚みを変更することにより、電気回路部品の高さ
を常に一定にすることが可能であり、多層接続が容易に
行え、より高密度な実装が可能である。Even if the electric circuit components have different thicknesses, the height of the electric circuit components can be kept constant by changing the thickness of the electric connection member, so that multi-layer connection can be easily performed and higher density can be achieved. Implementation is possible.
電気回路部品の接続部と接続される導電部材の突出
高さを高くすることにより、電気回路部品の接続部が表
面から落ち込んだものであっても、安定した接続を行う
ことが可能であり、複雑な形状を持つ電気回路部品であ
っても容易に接続することが可能である。By increasing the protruding height of the conductive member connected to the connection portion of the electric circuit component, even if the connection portion of the electric circuit component is dropped from the surface, it is possible to perform stable connection, Even an electric circuit component having a complicated shape can be easily connected.
電気的接続部材に使用する導電部材の量は少ないの
で、高価な金属を使用した場合にあっても低コストであ
る。Since the amount of the conductive member used for the electrical connection member is small, the cost is low even when expensive metal is used.
ところで、ICチップを樹脂にて封止してなるICパッケ
ージにおいて、封止後に樹脂外に露出するリード部分で
あるアウタリードとプリント配線基板の導体との接続
は、はんだ付けによりなされることが一般的である。両
者をはんだ付けにより接続させる方法として、プリント
配線基板に形成されたスルーホールにアウタリードを差
し込んだ後、手動または自動はんだ付けによってアウタ
リードをプリント配線基板の導体に接続する方法、また
は配線基板上の接続部(配線パッド)に予めはんだペー
ストを印刷しておき、この上にリードに接続されたICを
搭載し、加熱してはんだペーストをリフローさせてアウ
タリードと配線パッドとを接続する方法等が知られてい
る。By the way, in an IC package in which an IC chip is sealed with resin, the connection between the outer lead, which is the lead portion exposed outside the resin after sealing, and the conductor of the printed wiring board is generally made by soldering. It is. As a method of connecting both by soldering, after inserting the outer lead into the through hole formed in the printed wiring board, connecting the outer lead to the conductor of the printed wiring board by manual or automatic soldering, or connecting on the wiring board A method is known in which solder paste is pre-printed on the part (wiring pad), an IC connected to the lead is mounted on this part, and the solder paste is reflowed by heating to connect the outer lead to the wiring pad. ing.
ところが、このような接続方法にあっては、隣合うア
ウタリードの間隔に限界があり、多ピン構成のICチップ
には対応できないとう問題点があった。However, such a connection method has a problem in that there is a limit in the interval between adjacent outer leads, and it is not possible to cope with an IC chip having a multi-pin configuration.
本発明はかかる事情に鑑みてなされたものであり、先
に出願した電気的接続部材の製造方法の改良に関するも
のであり、例えばICパッケージの短ピッチであるアウタ
リードとプリント配線基板の導体との接続を容易に行な
える電気的接続部材の製造方法を提供することを目的と
する。The present invention has been made in view of such circumstances, and relates to an improvement in a method for manufacturing an electrical connection member, which has been previously filed, for example, connection between an outer lead having a short pitch of an IC package and a conductor of a printed wiring board. It is an object of the present invention to provide a method of manufacturing an electrical connection member that can easily perform the above.
本発明に係る電気的接続部材の製造方法は、電気的絶
縁材からなるシート状の保持体と、該保持体を厚さ方向
に貫通し、互いに絶縁状態にして装備された棒状をなす
複数の導電部材とを有し、前記各導電部材の一端が前記
保持体の一方の面において突出しており、前記各導電部
材の他端が前記保持体の他方の面において突出している
電気的接続部材の製造方法において、前記保持体となす
べき樹脂層を金属板上に設け、設けられた樹脂層を厚さ
方向に貫通する複数の穴を形成し、これらの穴の夫々に
連通する凹所を前記金属板に設けて、前記凹所を底とす
る前記複数の穴内に、はんだ、導電部材となすべき金
属、はんだの順にメッキを施し、各穴内に埋設された前
記金属により棒状の導電部材を構成し、該導電部材の前
記樹脂層の両面への突出部をはんだにより被覆すること
を特徴とする。The method for manufacturing an electrical connection member according to the present invention includes a sheet-like holding member made of an electrically insulating material, and a plurality of rod-like members that penetrate the holding member in a thickness direction and are insulated from each other. A conductive member, wherein one end of each of the conductive members protrudes on one surface of the holder, and the other end of each of the conductive members protrudes on the other surface of the holder. In the manufacturing method, a resin layer to be the holder is provided on a metal plate, a plurality of holes penetrating the provided resin layer in a thickness direction are formed, and the recesses communicating with each of these holes are formed. A bar-shaped conductive member is formed by plating a solder, a metal to be a conductive member, and a solder in this order on the plurality of holes having the recess as a bottom, provided in a metal plate, and embedded in each hole. And projecting the conductive member to both sides of the resin layer. Parts, characterized in that the coating by solder.
本発明においては、金属板上に設けた樹脂層に複数の
穴を形成し、各穴の底部に連通する凹部を金属板に形成
した後、これらの穴内に、はんだ、導電部材とする金
属、はんだの順にメッキを施す一連のメッキ処理によ
り、前記樹脂層からなるシート状の保持体と、該保持体
を厚さ方向に貫通し互いに絶縁状態にして保持された前
記金属からなる複数の導電部材とを備え、夫々の導電部
材の両端部が前記保持体の両面に突出し、これらの突出
部がはんだにより覆われた電気的接続部材を簡易に製造
することができる。このようにして製造された電気的接
続部材を用いて、電気回路部品同士を接続させる場合に
は、両電気回路部品の接続部に導電部材が対応するよう
に、両電気回路部品間に電気的接続部材を挟み込ませ、
加熱してはんだをリフローさせて電気回路部品同士を接
続する。そうすると、電気的接続部材における導電部材
のピッチを小さくすることにより、はんだペースト印刷
では不可能であるような微細なはんだ付けが可能とな
る。In the present invention, a plurality of holes are formed in a resin layer provided on a metal plate, and a concave portion communicating with the bottom of each hole is formed in the metal plate, and then, in these holes, solder, a metal to be a conductive member, By a series of plating processes of plating in the order of solder, a sheet-like holding member made of the resin layer, and a plurality of conductive members made of the metal held through the holding member in a thickness direction and insulated from each other The electrical connection member in which both ends of each conductive member protrude from both sides of the holder and these protrusions are covered with solder can be easily manufactured. When electric circuit components are connected to each other using the electric connection member manufactured in this manner, an electric connection is established between the electric circuit components so that the conductive member corresponds to the connection portion between the electric circuit components. Insert the connecting member,
Heat is applied to reflow the solder to connect the electric circuit components. Then, by reducing the pitch of the conductive members in the electrical connection member, fine soldering that cannot be performed by solder paste printing becomes possible.
第1図は本発明に係る電気的接続部材の製造方法によ
って製造される電気的接続部材1の断面図である。電気
的接続部材1は、例えば金からなり、短寸の棒状をなす
複数の導電部材2を、夫々の導電部材2同士が電気的絶
縁状態になるようにポリイミド樹脂からなる保持体3中
に装備して構成されている。夫々の導電部材2の両端面
2a,2bは、図示の如く、保持体3の両面に突出させてあ
り、このように突出せしめられた導電部材2の両端面2
a,2bは、はんだ4により被覆されている。FIG. 1 is a cross-sectional view of an electrical connection member 1 manufactured by a method for manufacturing an electrical connection member according to the present invention. The electrical connection member 1 is provided with a plurality of short conductive rods 2 made of, for example, gold in a holding body 3 made of a polyimide resin such that the conductive members 2 are electrically insulated from each other. It is configured. Both end surfaces of each conductive member 2
As shown in the drawing, 2a and 2b are projected on both surfaces of the holder 3, and both end surfaces 2a of the conductive member 2 projected in this manner.
a, 2b are covered with the solder 4.
次に、このような電気的接続部材を製造するための本
発明に係る製造方法の一例について、その工程を示す第
2図に基づき説明する。Next, an example of a manufacturing method according to the present invention for manufacturing such an electrical connection member will be described with reference to FIG.
まず、準備した銅板11上に保持体となるポリイミド樹
脂12を、スピンナにより接着補助剤と共に塗布する(第
2図(a))。ここで硬化に伴う膜厚の減少を考慮して
塗布するポリイミド樹脂12の膜厚は、製造される電気的
接続部材における保持体の所望の膜厚よりも厚くする。
次いで、所定パターンをなしたネガ型のフォトマスク
(図示せず)を介して光をポリイミド樹脂12に照射した
(露光した)後、現像を行う。本例では、露光された部
分にはポリイミド樹脂12が残存し、露光されない部分は
現像処理によりポリイミド樹脂12が除去されて穴13が形
成される。その後、温度を上げてポリイミド樹脂12の硬
化を行う(第2図(b))。First, a polyimide resin 12 serving as a holding body is applied on a prepared copper plate 11 together with an adhesion aid using a spinner (FIG. 2A). Here, the film thickness of the polyimide resin 12 applied in consideration of the decrease in film thickness due to curing is set to be larger than the desired film thickness of the holder in the manufactured electrical connection member.
Next, the polyimide resin 12 is irradiated (exposed) with light through a negative photomask (not shown) having a predetermined pattern, and then developed. In this example, the polyimide resin 12 remains in the exposed portion, and the unexposed portion removes the polyimide resin 12 by a development process to form a hole 13. Thereafter, the temperature is increased to cure the polyimide resin 12 (FIG. 2 (b)).
次に、このような処理がなされた銅板11をエッチング
液中に浸漬させてエッチングを行う。これにより、各穴
13の底部に露出する銅板11の表面がエッチング除去さ
れ、穴13に連通する凹部14が銅板11に形成される(第2
図(c))。銅板11を共通電極として用いて、はんだ,
金,はんだの順に電気メッキを施し、穴13,凹部14には
んだ16,金15,はんだ16をこの順に埋設する(第2図
(d))。最後に、金属エッチングにより銅板11を除去
して、第1図に示すような電気的接続部材1を製造す
る。Next, the copper plate 11 thus treated is immersed in an etching solution to perform etching. This allows each hole
The surface of the copper plate 11 exposed at the bottom of the copper plate 11 is removed by etching, and a concave portion 14 communicating with the hole 13 is formed in the copper plate 11 (second
Figure (c). Using the copper plate 11 as a common electrode,
Electroplating is performed in the order of gold and solder, and solder 16, gold 15, and solder 16 are buried in the hole 13 and the recess 14 in this order (FIG. 2 (d)). Finally, the copper plate 11 is removed by metal etching to manufacture the electrical connection member 1 as shown in FIG.
本実施例にあっては、製造された電気的接続部材1に
おいて、導電部材2,保持体3は夫々、金,ポリイミド樹
脂から構成されており、保持体3の両面に突出せしめら
れた導電部材2の両端面2a,2bは、はんだ4により被覆
されている。In this embodiment, in the manufactured electrical connection member 1, the conductive member 2 and the holder 3 are made of gold and polyimide resin, respectively, and the conductive members protruding from both surfaces of the holder 3 are provided. The two end faces 2a, 2b of the second 2 are covered with the solder 4.
第3図は、本発明の電気的接続部材の使用例を示す模
式図である。図において21は多数のアウタリード22を備
えたICパッケージを示し、また23は多数の導体24がプリ
ントされたプリント配線基板である。接続されるべきア
ウタリード22と導体24との間には、電気的接続部材1の
導電部材2が位置決めされており、リフロー加熱による
はんだ付けによってアウタリード22と導体24とを接続す
る。このように、本発明の方法により製造された電気的
接続部材を用いる場合には、狭小ピッチのアウタリード
を有するICパッケージにおいても、プリント配線基板と
の接続が容易となり、多ピン構成のICチップの実装が可
能となる。なお、従来法ではアウタリードのピッチは0.
4mmが限界であったが、本発明の電気的接続部材では、
アウタリードのピッチが0.4mm以下であるICパッケージ
のプリント配線基板への実装も可能である。FIG. 3 is a schematic view showing an example of use of the electrical connection member of the present invention. In the figure, reference numeral 21 denotes an IC package having a number of outer leads 22, and reference numeral 23 denotes a printed wiring board on which a number of conductors 24 are printed. The conductive member 2 of the electrical connection member 1 is positioned between the outer lead 22 to be connected and the conductor 24, and connects the outer lead 22 and the conductor 24 by soldering by reflow heating. As described above, when the electrical connection member manufactured by the method of the present invention is used, even in an IC package having outer leads with a narrow pitch, connection with a printed wiring board becomes easy, and an IC chip having a multi-pin configuration is used. Implementation becomes possible. In the conventional method, the outer lead pitch is 0.
Although 4 mm was the limit, in the electrical connection member of the present invention,
It is also possible to mount IC packages with outer lead pitches of 0.4 mm or less to printed wiring boards.
以上詳述した如く本発明に係る電気的接続部材の製造
方法においては、金属板上に設けた樹脂層に複数の穴を
形成した後、各穴の底部に連通する凹部を金属板に形成
し、各穴及び凹部内に、はんだ、導電部材とする金属、
はんだの順にメッキを施す一連の手順により、シート状
の保持体に複数の導電部材を保持させてあり、しかも保
持体の両面に突出する各導電部材の端部がはんだにより
覆われた電気的接続部材を簡易に製造することができ、
このように製造された電気的接続部材を用いることによ
り、従来よりもアウタリードが狭小ピッチであるような
ICパッケージについても、プリント配線基板への実装が
可能となる。As described in detail above, in the method for manufacturing an electrical connection member according to the present invention, after forming a plurality of holes in a resin layer provided on a metal plate, a concave portion communicating with the bottom of each hole is formed in the metal plate. , In each hole and recess, solder, metal as a conductive member,
A plurality of conductive members are held on a sheet-shaped holding body by a series of steps of plating in the order of solder, and the ends of each conductive member protruding on both surfaces of the holding body are covered with solder. The members can be easily manufactured,
By using the electric connection member manufactured in this manner, the outer leads have a narrower pitch than before.
IC packages can also be mounted on printed wiring boards.
第1図は本発明に係る電気的接続部材の製造方法によっ
て製造される電気的接続部材の断面図、第2図は本発明
に係る電気的接続部材の製造方法の一例を示す断面図、
第3図,第4図は電気的接続部材の使用例を示す模式図
である。 1……電気的接続部材、2……導電部材、3……保持
体、4……はんだFIG. 1 is a cross-sectional view of an electrical connection member manufactured by a method for manufacturing an electrical connection member according to the present invention, FIG. 2 is a cross-sectional view illustrating an example of a method for manufacturing an electrical connection member according to the present invention,
FIG. 3 and FIG. 4 are schematic views showing examples of use of the electrical connection member. DESCRIPTION OF SYMBOLS 1 ... Electrical connection member, 2 ... Conductive member, 3 ... Holder, 4 ... Solder
───────────────────────────────────────────────────── フロントページの続き (72)発明者 岡林 高弘 東京都千代田区大手町1丁目1番3号 住友金属工業株式会社内 (72)発明者 近藤 和夫 東京都千代田区大手町1丁目1番3号 住友金属工業株式会社内 (72)発明者 中塚 康雄 東京都千代田区大手町1丁目1番3号 住友金属工業株式会社内 (72)発明者 吉沢 徹夫 東京都大田区下丸子3丁目30番2号 キ ヤノン株式会社内 (72)発明者 宮崎 豊秀 東京都大田区下丸子3丁目30番2号 キ ヤノン株式会社内 (72)発明者 近藤 浩史 東京都大田区下丸子3丁目30番2号 キ ヤノン株式会社内 (72)発明者 榊 隆 東京都大田区下丸子3丁目30番2号 キ ヤノン株式会社内 (72)発明者 寺山 芳実 東京都大田区下丸子3丁目30番2号 キ ヤノン株式会社内 (56)参考文献 特開 昭62−234804(JP,A) 特開 平2−68812(JP,A) 特開 平2−49370(JP,A) 特開 昭63−96811(JP,A) 米国特許4902857(US,A) (58)調査した分野(Int.Cl.7,DB名) H01R 11/01 H01L 21/60 311 H01R 12/06 H01R 43/00 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Takahiro Okabayashi, Inventor, 1-3-1, Otemachi, Chiyoda-ku, Tokyo Sumitomo Metal Industries, Ltd. (72) Kazuo Kondo, 1-3-1, Otemachi, Chiyoda-ku, Tokyo No. Sumitomo Metal Industries, Ltd. (72) Inventor Yasuo Nakatsuka 1-3-1, Otemachi, Chiyoda-ku, Tokyo Sumitomo Metal Industries, Ltd. (72) Inventor Tetsuo Yoshizawa 3-30-2 Shimomaruko, Ota-ku, Tokyo Within Canon Inc. (72) Inventor Toyohide Miyazaki 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Hiroshi Kondo 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Takashi Sakaki 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Yoshimi Terayama Shimomaru, Ota-ku, Tokyo 3-30-2 Canon Inc. (56) References JP-A-62-234804 (JP, A) JP-A-2-68812 (JP, A) JP-A-2-49370 (JP, A) 63-96811 (JP, A) US Patent 4,902,857 (US, A) (58) Fields investigated (Int. Cl. 7 , DB name) H01R 11/01 H01L 21/60 311 H01R 12/06 H01R 43 / 00
Claims (1)
と、該保持体を厚さ方向に貫通し、互いに絶縁状態にし
て装備された棒状をなす複数の導電部材とを有し、前記
各導電部材の一端が前記保持体の一方の面において突出
しており、前記各導電部材の他端が前記保持体の他方の
面において突出している電気的接続部材の製造方法にお
いて、 前記保持体となすべき樹脂層を金属板上に設け、設けら
れた樹脂層を厚さ方向に貫通する複数の穴を形成し、こ
れらの穴の夫々に連通する凹所を前記金属板に設けて、
前記凹所を底とする前記複数の穴内に、はんだ、導電部
材となすべき金属、はんだの順にメッキを施し、各穴内
に埋設された前記金属により棒状の導電部材を構成し、
該導電部材の前記樹脂層の両面への突出部をはんだによ
り被覆することを特徴とする電気的接続部材の製造方
法。1. A sheet-like holding member made of an electrically insulating material, and a plurality of rod-shaped conductive members penetrating the holding member in a thickness direction and insulated from each other. One end of each conductive member protrudes on one surface of the holder, and the other end of each conductive member protrudes on the other surface of the holder. A resin layer to be provided is provided on a metal plate, a plurality of holes penetrating the provided resin layer in the thickness direction are formed, and a recess communicating with each of these holes is provided in the metal plate,
In the plurality of holes with the recesses as the bottom, solder, metal to be a conductive member, plating in the order of the solder, forming a rod-shaped conductive member by the metal buried in each hole,
A method for manufacturing an electrical connection member, comprising: projecting portions of the conductive member on both surfaces of the resin layer with solder.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02067811A JP3096816B2 (en) | 1990-03-16 | 1990-03-16 | Manufacturing method of electrical connection member |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02067811A JP3096816B2 (en) | 1990-03-16 | 1990-03-16 | Manufacturing method of electrical connection member |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03269962A JPH03269962A (en) | 1991-12-02 |
JP3096816B2 true JP3096816B2 (en) | 2000-10-10 |
Family
ID=13355705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP02067811A Expired - Lifetime JP3096816B2 (en) | 1990-03-16 | 1990-03-16 | Manufacturing method of electrical connection member |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3096816B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3264147B2 (en) * | 1995-07-18 | 2002-03-11 | 日立電線株式会社 | Semiconductor device, interposer for semiconductor device, and method of manufacturing the same |
KR100528014B1 (en) * | 1998-02-11 | 2006-03-22 | 삼성전자주식회사 | Connector and liquid crystal display device having the same |
-
1990
- 1990-03-16 JP JP02067811A patent/JP3096816B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH03269962A (en) | 1991-12-02 |
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