JP2944127B2 - Optical memory - Google Patents
Optical memoryInfo
- Publication number
- JP2944127B2 JP2944127B2 JP2046174A JP4617490A JP2944127B2 JP 2944127 B2 JP2944127 B2 JP 2944127B2 JP 2046174 A JP2046174 A JP 2046174A JP 4617490 A JP4617490 A JP 4617490A JP 2944127 B2 JP2944127 B2 JP 2944127B2
- Authority
- JP
- Japan
- Prior art keywords
- gold
- coated
- optical memory
- adhesion layer
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Optical Record Carriers And Manufacture Thereof (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は音響機器などに用いられる光記憶体に関す
る。Description: TECHNICAL FIELD The present invention relates to an optical memory used for audio equipment and the like.
（従来の技術） 従来、光記憶体の一つであるコンパクトディスク（以
下、CDと略す。）の反射膜の材料として、アルミニウム
や金が使用されている。しかし、近年、CDにコンピュー
タデータを記録したCD−ROMが普及し、従来にも増し
て、高温・高湿下での保存性の高いものが望まれてい
る。(Prior Art) Conventionally, aluminum or gold has been used as a material of a reflection film of a compact disk (hereinafter abbreviated as CD), which is one of optical storage media. However, in recent years, CD-ROMs in which computer data is recorded on CDs have become widespread, and there has been a demand for a CD-ROM having high storage stability under high temperature and high humidity.
（発明が解決しようとする課題） 従来の反射膜を使用した光記憶体は、かかる過酷な環
境下において、蒸着された反射膜がアルミニウムの場合
は腐食、金の場合は下地体から剥離し、信号読み取りの
指標とされるエラーレートが増加し、上記に記したニー
ズに適応できないという問題があった。また、金より密
着性を向上させた金とタンタルを含む反射膜を使用した
光記憶体が提案されている（特願平１−115413号）が、
長期にわたるかかる過酷な環境下においては、金とタン
タルを含む反射膜が下地体から剥離する。(Problems to be Solved by the Invention) In such a harsh environment, an optical memory body using a conventional reflective film is corroded when the deposited reflective film is aluminum, and peeled off from the base when gold is deposited, There has been a problem that the error rate, which is used as an index for signal reading, has increased, and the needs described above cannot be met. Also, an optical memory using a reflective film containing gold and tantalum with improved adhesion than gold has been proposed (Japanese Patent Application No. 1-115413).
Under such a severe environment for a long period of time, the reflection film containing gold and tantalum peels off from the base body.
本発明は、光記憶体の耐候性、特に少なくとも金を含
む反射膜の密着性の向上を図った光記憶体を提供するこ
とにある。It is an object of the present invention to provide an optical storage medium in which the weather resistance of the optical storage medium, particularly the adhesion of a reflective film containing at least gold is improved.
（課題を解決するための手段） 本発明によれば、光記憶体は、下地体と、前記下地体
上に被覆される少なくとも酸化タンタル密着層と、前記
密着層上に被覆される少なくとも金を含む反射膜と、前
記反射膜上に被覆される保護膜とを具備し、構成され
る。この下地体の材質としては、ゾル−ゲル法によるセ
ラミックス薄膜、二酸化珪素等のセラミックス薄膜、強
化ガラス、石英ガラス、ポリカーボナート樹脂、ポレオ
レフィン樹脂などが挙げられる。(Means for Solving the Problems) According to the present invention, an optical storage element includes a base body, at least a tantalum oxide adhesion layer coated on the base body, and at least gold coated on the adhesion layer. And a protective film coated on the reflective film. Examples of the material of the base include a ceramic thin film formed by a sol-gel method, a ceramic thin film such as silicon dioxide, tempered glass, quartz glass, polycarbonate resin, and polyolefin resin.
次に、上記下地体の上に、密着層として、酸化タンタ
ルを高周波マグネトロンスパッタ法、イオンプレーティ
ング法、クラスターイオンビーム法、CVD法等により２
〜200nmの膜厚で被覆する。Next, a tantalum oxide as an adhesion layer is formed on the substrate by a high-frequency magnetron sputtering method, an ion plating method, a cluster ion beam method, a CVD method, or the like.
Coat with a thickness of ~ 200 nm.
次に、上記下地体の上に、反射膜として、少なくとも
金を含む金属を高周波マグネトロンスパッタ法、イオン
プレーティング法、クラスターイオンビーム法、CVD法
等により10〜200nmの膜厚で被覆する。Next, a metal containing at least gold is coated as a reflective film to a thickness of 10 to 200 nm on the base body by a high-frequency magnetron sputtering method, an ion plating method, a cluster ion beam method, a CVD method, or the like.
次に、上記反射膜上に被覆される保護膜は、従来と同
じく樹脂を被覆する。Next, the protective film coated on the reflective film is coated with a resin as in the related art.
（作用） このように作製した本発明の光記憶体は、反射膜と密
着層、密着層と下地体との密着性に優れ、かつ耐腐食性
に優れた酸化タンタルを使用しているために、従来の少
なくとも金を含む反射膜を直接下地体に被覆したものよ
りはるかに優れた信頼性を有することになる。(Function) The optical memory body of the present invention produced in this manner uses tantalum oxide which has excellent adhesion between the reflection film and the adhesion layer and between the adhesion layer and the base body and has excellent corrosion resistance. Therefore, the reliability is far superior to that of the conventional case in which at least the reflecting film containing at least gold is directly coated on the base.
（実施例） 以下に、図面を参照して本発明を詳細に説明する。(Example) Hereinafter, the present invention will be described in detail with reference to the drawings.
第１図は本発明の光記憶体の一実施例を示す部分断面
図である。ここで、下地体１、酸化タンタル密着層２、
反射膜３、保護膜４がそれぞれ第１表に示す材質及び膜
厚で被覆された13個の試料が準備された。FIG. 1 is a partial cross-sectional view showing one embodiment of the optical storage body of the present invention. Here, the base body 1, the tantalum oxide adhesion layer 2,
Thirteen samples in which the reflective film 3 and the protective film 4 were coated with the materials and film thicknesses shown in Table 1 respectively were prepared.
次に、これらの試料とアルミニウム、金、金とタンタ
ルを反射膜とする従来品について、温度90℃、相対温度
90％の耐食性試験を３ヶ月行ない、信号の良否の指標と
なるエラーレートを測定した。第２表に示すように、初
期においていずれの試料もエラーレートは５×10-5であ
るが、３ヶ月の耐食性試験後、本発明の試料のエラーレ
ートは多少の劣化が見られるものの従来品とは比較にな
らないほど良好であった。Next, these samples and a conventional product with a reflective film of aluminum, gold, and gold and tantalum were used at a temperature of 90 ° C and a relative temperature of 90 ° C.
A 90% corrosion resistance test was performed for three months, and an error rate as an indicator of the quality of the signal was measured. As shown in Table 2, the error rate of each sample was 5 × 10 -5 at the initial stage , but after the corrosion resistance test for 3 months, the error rate of the sample of the present invention was slightly deteriorated, but the conventional product Was inferior to comparison.
（発明の効果） 以上、詳細に述べたように、本発明の光記憶体は少な
くとも金を含む反射膜及び下地体との密着性に優れ、耐
食性に優れた密着層として酸化タンタルを使用している
ために、アルミニウムや金や金とタンタルの反射膜を使
用した従来品よりはるかに信頼性を向上させることがで
きる。 (Effects of the Invention) As described above in detail, the optical memory body of the present invention has excellent adhesion to at least the reflection film containing gold and the underlying body, and uses tantalum oxide as an adhesion layer excellent in corrosion resistance. Therefore, the reliability can be improved much more than the conventional product using a reflection film of aluminum, gold, or gold and tantalum.
第１図は本発明の光記憶体の一実施例を示す部分断面図
である。 １……下地体、２……密着層、３……反射膜、４……保
護膜。FIG. 1 is a partial cross-sectional view showing one embodiment of the optical storage body of the present invention. 1 ... underlying body, 2 ... adhesion layer, 3 ... reflective film, 4 ... protective film.
Claims (1)
くとも酸化タンタルからなる密着層と、前記密着層上に
被覆される少なくとも金を含む反射膜と、前記反射膜上
に被覆される保護膜とを具備することを特徴とする光記
憶体。1. A base body, an adhesion layer made of at least tantalum oxide coated on the base body, a reflection film containing at least gold coated on the adhesion layer, and coated on the reflection film. An optical memory comprising a protective film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2046174A JP2944127B2 (en) | 1990-02-26 | 1990-02-26 | Optical memory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2046174A JP2944127B2 (en) | 1990-02-26 | 1990-02-26 | Optical memory |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03248343A JPH03248343A (en) | 1991-11-06 |
| JP2944127B2 true JP2944127B2 (en) | 1999-08-30 |
Family
ID=12739665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2046174A Expired - Fee Related JP2944127B2 (en) | 1990-02-26 | 1990-02-26 | Optical memory |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2944127B2 (en) |
-
1990
- 1990-02-26 JP JP2046174A patent/JP2944127B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03248343A (en) | 1991-11-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |