JP2921399B2 - Manufacturing method of backing stamper - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a backing stamper, and more particularly to a method for manufacturing a backing stamper for simplifying a backing operation.

[0002]

2. Description of the Related Art A conventional method for manufacturing a backing stamper is as follows.
As shown in FIG. 3, when a conductive film 52 is coated on a glass master 51 on which a pattern has been exposed and developed, and is mounted on an electroforming jig,
After accommodating the glass master 51 in the concave electrode 53, a contact ring 54 for electrically connecting the conductive film 52 and the concave electrode 53 is placed thereon, and then a lid 55 is put thereon. A method of mounting 51 on an electroforming jig has been adopted.

Here, reference numeral 60 denotes a cover disposed inside the lid 55 so as to surround the concave electrode 53, and reference numeral 61 denotes a stopper plate for fixing the set screw 56.

[0004]

In the above-mentioned conventional method of manufacturing a backing stamper, in the electroforming step, which is one of the manufacturing processes, as shown in FIG. An electroformed film 57 is provided at a portion corresponding to the opening of
Is electrodeposited. Therefore, after lining, the stamper 58
It is necessary to machine the inner and outer diameters to required dimensions using a lathe or the like.

However, when foreign matter such as cutting debris is caught in the sputtered film side (information surface) in the inner and outer diameter machining operation using the lathe or the like, the stamper is damaged. Had to be processed. For this reason, there has been a disadvantage that the work requires a lot of time and labor.

For example, a diameter of 350 [mm] and a thickness of 250
[Μm] nickel stamper with an inner diameter of 100 [m
m], when processing with a lathe to an outer diameter of 310 [mm],
It took about 5 hours.

[0007]

SUMMARY OF THE INVENTION The object of the present invention is to provide a method of manufacturing a backing stamper capable of improving the disadvantages of the prior art and, in particular, rapidly setting the inner and outer diameters of the stamper to predetermined dimensions without damaging the stamper. That is its purpose.

[0008]

In order to achieve the above object, according to the present invention, after a conductive film is coated on a glass master disk on which a pattern has been exposed and developed, it is mounted on an electroforming jig to cover a sputtered film. In the method of manufacturing a stamper for use, when mounting on an electroforming jig, first, an inner diameter mask having the same outer dimensions as the inner diameter finishing dimensions is attached to the center of the glass master, and at the same time, For example, an outer diameter mask having an inner diameter and having a function of locking the above-mentioned glass master is attached.

[0009]

[Operation] In the stamper manufactured in the present invention, the portion masked by the inner diameter mask and the outer diameter mask is only the conductive film. For this reason, it is possible to easily perform the inner diameter processing and the outer diameter processing with scissors or the like, so that the finishing process time, which conventionally took 5 to 6 hours, can be reduced to about 15 minutes, and rapid processing without damaging the stamper. We were able to.

[0010]

An embodiment of the present invention will be described below with reference to FIG.

In the embodiment shown in FIG. 1, in manufacturing a stamper, first, a conductive film 2 is coated on a glass master 1 on which a pattern is exposed and developed, and then a holder 3A is mounted on an electroforming jig 3.
After bolting through, a sputtered film (electroformed film) 4
Is coated.

At the time of mounting on the electroforming jig 3, an inner diameter mask 5 having the same outer dimensions as the inner diameter finishing dimensions is mounted at the center of the glass master 1, and at the same time, having the same inner diameter as the outer finishing dimensions. An outer diameter mask is attached.

In the present embodiment, the inner diameter portion of the holder 3A, that is, the portion for locking the glass master 1 in this embodiment can function as the outer diameter mask.

In this embodiment, the inner diameter mask 5 is formed in a mushroom shape. A through hole 1A is formed in the center of the glass master 1 in advance, and the shaft center 5A of the inner diameter mask 5 is formed in the through hole 1A.
The part is to be inserted.

In the stamper (film composed of the conductive film 2 and the sputtered film 4) 11 manufactured in this embodiment, a portion masked by the inner diameter mask 5 and the outer diameter mask (the inner diameter portion of the holder 3A). Is only the conductive film 2,
Inner diameter processing and outer diameter processing can be easily performed with scissors or the like. For example, diameter 350 [mm], thickness 25
In the case of the nickel stamper 11 of 0 [μm], when the inner diameter was cut into 100 [mm] and the outer diameter was 310 [mm], it could be processed in only 15 minutes without damaging the stamper 11.

Next, another embodiment will be described with reference to FIG.

In the other embodiment shown in FIG. 2, similarly to the above-described embodiment of FIG. 1, first, a conductive film 2 is coated on a glass master 1 on which a pattern has been exposed and developed. Then, when mounting the glass master 1 in the cover 10 and the lid 15 forming part of the electroforming jig, the glass master 1 is housed in the concave electrode 13 and then the conductive film 2 and the concave electrode 13 are electrically connected. A contact ring 13A for connection is placed, and then a lid 15 is put on via a contour mask 15A. Thereafter, the glass screw 1 is fixed by tightening the set screw 16, and thereafter, the sputtered film (electroformed film) 14 is covered.

At the time of coating the sputtered film (electroformed film) 14, the through hole 1 formed in advance is formed in the center of the glass master 1.
At A, an inner diameter mask 5 having the same outer dimensions as the inner diameter finishing dimensions is mounted. The inner diameter mask 5 used is formed in a mushroom shape. Reference numeral 5A indicates an axial center portion of the inner diameter mask 5.

The inner diameter mask 5 has a ring-shaped protruding portion 5a on the outer peripheral side of the portion that comes into contact with the glass master 1.
Is provided. Then, this ring-shaped protrusion 5a
The inner peripheral portion of the glass master 1 by to contact the glass master disk 1 is adapted to be masked from the outside.
In FIG. 2, reference numeral 2 denotes a conductive film.

In this case, the outer shape mask 15A is formed of an annular disk, and a ring-shaped protrusion 15a is provided at a portion of the inner diameter side of the outer shape mask 15A in contact with the glass master 1 described above. Then, this ring-shaped protrusion 15a
By to contact the glass master 1 is around the glass master 1 is adapted to be masked from the outside. Other configurations are the same as those of the above-described conventional example.

In this manner, a device having the same function and effect as the embodiment of FIG. 1 can be obtained.

[0022]

The present invention is constructed and functions as described above. According to this, in the electroforming step which is one of the stamper manufacturing processes, the portion to be processed for the inner and outer diameters is masked in advance, so that the electroforming can be performed. The subsequent mask portion is only a conductive film, and therefore can be easily processed with a cutter knife or scissors or the like after the backing. For this reason, the backing work can be performed quickly and easily. A method for manufacturing a stamper can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing one embodiment of the present invention.

FIG. 2 is a schematic sectional view showing another embodiment of the present invention.

FIG. 3 is a sectional view of a conventional method for manufacturing a backing stamper.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Glass master 1A Through-hole 2 Conductive film 3 Electroforming jig 3A Holder functioning as an outer diameter mask 4, 14 Sputtering film (electroforming film) 5 Inner diameter mask 5a Ring-shaped protrusion 13A Contact ring 15A Outer diameter mask 15a Ring shape Protrusion

Continuation of front page (58) Field surveyed (Int.Cl. ⁶ , DB name) C25D 1/00 G11B 7/26 511

Claims (3)

(57) [Claims] 1. A method of manufacturing a backing stamper for coating a conductive film on a glass master disk on which a pattern has been exposed and developed, and then mounting the same on an electroforming jig. At the time, a central part of the glass master is equipped with an inner diameter mask having an outer dimension equal to the inner diameter finish dimension, and at the same time, has a function of locking the glass master having an inner diameter equal to the outer diameter finish dimension. A method of manufacturing a stamper for lining, characterized by mounting an outer diameter mask. 2. The inner diameter mask is formed in a mushroom shape, a through hole is formed in the center of the glass master in advance, and an axis portion of the inner diameter mask is inserted into the through hole portion.
2. The method for manufacturing a backing stamper according to claim 1, wherein: 3. The method for producing a backing stamper according to claim 1 or 2, characterized in that so as to mount the outer diameter mask through a contact ring.