JP2893822B2 - Manufacturing method of thin blade whetstone with hub - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to ultra-precision such as cutting and dividing and grooving of electronic and magnetic materials such as a silicon wafer used for a semiconductor element and ferrite used for a magnetic head. The present invention relates to a method of manufacturing a thin blade whetstone with a hub used for processing.

[Prior art] In ultra-precision processing such as cutting and dividing a silicon wafer used for a semiconductor element at regular intervals or grooving a ferrite magnetic head at regular intervals, these are processed with a single blade. In this case, productivity is poor, so that a so-called multi-blade type thin blade grindstone combined with a thin annular electroformed grindstone as shown in FIG. 7 is sometimes used.

This is achieved by inserting an annular spacer 2 having a thickness corresponding to a processing pitch into a rotating shaft 1, disposing thin annular electroformed grinding wheels 3 on both sides of the spacer 2, and further from both sides thereof. It has a structure in which annular flanges 4 and 4 are fitted, and these are fixed to the rotating shaft 1. By rotating the rotating shaft 1, the workpiece is cut at a predetermined interval or grooving is performed. Or to give.

Here, in the ultraprecision machining as described above, the machining pitch is generally 1 mm or less, and high machining accuracy is required. However, in the above-mentioned prior art, since the roughness of the joint surface between the spacer and the grindstone has a great effect on the processing accuracy, lapping must be performed on both side surfaces of the spacer.
In addition, since the spacer is thin, lapping itself is difficult, and it has been difficult to obtain a highly accurate spacer. In addition, when the thickness of the grindstone is as thin as about 10 to 60 μm, the adjustment of the degree of tightening of the grindstone when assembling the multi-blade is very delicate, and there is a disadvantage that distortion, distortion, and damage are easily caused. There has been a problem that the blade is damaged at the time of cutting processing starting from a damaged portion or the like.

For this reason, assembling requires specialized skills and a high degree of skill, and it has been difficult to perform assembling work at a processing site.

Further, when changing the processing pitch, the spacer must be replaced, and the above-mentioned work must be performed each time, so that the work efficiency is inevitably reduced.

In order to solve such a problem, the inventors of the present invention have developed an annular hub having an annular plate-shaped spacer portion on both sides formed on the outer periphery thereof, and an annular side surface of the spacer portion. The present inventors have devised a hub-equipped thin blade grinding wheel provided with a pair of electroformed abrasive grain layers forming a thin annular shape having a larger outer diameter than a spacer portion which is coaxially fixed.

However, in the hub-equipped thin blade grinding wheel having such a configuration, the interval between the two electroformed abrasive grain layers is strictly determined by the thickness of the spacer portion, so that the thickness is made equal to the processing pitch, High-precision parallel grooving or cutting can be performed at a predetermined pitch. In addition, since each electroformed abrasive grain layer is pre-integrated in the spacer portion, and no stress is applied to the electroformed abrasive grain layer by assembly, it is not necessary to adjust the fine delicate state as in the past, It can be used easily at the processing site. Furthermore, by preparing several types of such thin bladed grindstones with hubs having different thicknesses of the spacer portions, it is possible to immediately respond to a change in the processing pitch.

[Problems to be Solved by the Invention] By the way, in general, when manufacturing a hub-equipped thin blade grindstone having an electroformed abrasive grain layer having a larger outer diameter than the hub on one side surface of the hub, an electroformed A hub having an outer diameter equal to that of the grain layer was prepared, and the hub was masked except for a portion on one side of which the electroformed abrasive layer was formed, and then an electroformed abrasive layer was electrodeposited on this portion. Later, the cutting edge portion of the electroformed abrasive grain layer is exposed by melting the outer peripheral portion of the hub.

However, when an attempt is made to produce a hub-equipped thin blade grindstone having the electroformed abrasive layer on both side surfaces of the spacer portion by such a manufacturing method, electroformed abrasive particles are formed on both side surfaces of the spacer portion. When each layer is formed, masking must also be performed on the outer peripheral surface of the spacer portion, which causes a new problem that the operation is inevitably complicated. In particular, when using a mask jig for covering a portion to be masked at the time of this masking, in order to cover the outer peripheral surface of the spacer portion as described above,
This mask jig has to be pressed against the outer peripheral surface toward the radially inner peripheral side of the hub, which may result in a complicated structure of the mask jig or insufficient masking.

Means for Solving the Problems The present invention has been made to solve such problems, and an annular hub in which annular plate-shaped spacer portions whose both side surfaces are parallel to each other is formed on the outer periphery. On both side surfaces and the outer peripheral surface of the spacer portion, after electroforming each of the electroformed abrasive grain layers formed by dispersing superabrasive grains in a metal plating phase in a thin annular shape,
The outer periphery of the spacer portion and the electroformed abrasive layer is formed into a predetermined outer diameter, the electroformed abrasive layer on the outer peripheral surface of the spacer portion is removed, and the outer peripheral portion of the spacer portion is melted to remove both side surfaces of the spacer portion. Characterized in that the cutting edge portion of the electroformed abrasive grain layer is exposed.

[Operation] However, in the method of manufacturing a hub-mounted thin blade grindstone having such a configuration, the electroformed abrasive grain layer formed on the outer peripheral surface of the spacer portion when the electroformed abrasive grain layer is formed includes the spacer portion and both sides. It is removed at the same time when the electroformed abrasive grain layer on the surface is formed into a predetermined outer diameter dimension, so that it is not necessary to mask the outer peripheral surface of the spacer portion at the time of forming this electroformed abrasive grain layer. Can be simplified. In particular, when the mask jig as described above is used for this masking, the mask jig can perform masking only by pressing the hub in the axial direction, so that the operation can be further simplified. it can.

Embodiment FIG. 1 is a longitudinal sectional view showing an example of a hub-mounted thin blade grinding wheel manufactured according to the present invention. This thin blade whetstone 11 with hub is
Annular plate-shaped spacer part 12c whose both sides 12a, 12b are parallel to each other
Annular aluminum alloy hub 12 with outer periphery formed
And, a pair of thin-walled annular electroformed abrasive grain layers 13A, which are coaxially fixed to the both side surfaces 12a and 12b, respectively, and are formed by dispersing superabrasive grains such as diamond abrasive grains and CBN abrasive grains in a metal plating phase. 13B
It is composed of

The outer diameter of the spacer portion 12c is smaller than the outer diameter of the electroformed abrasive grain layers 13A and 13B, and the thickness in the axial direction is smaller than that of the electroformed abrasive grain layers 13A and 13B.
The distance of the center in the axial direction of B is set to be equal to the processing pitch. At the center of the hub 12, there is provided a mounting hole 12d to be inserted into the rotation shaft.

Next, an embodiment of the manufacturing method of the present invention for manufacturing the hub-equipped thin blade whetstone 11 having such a configuration will be described with reference to FIG.

First, a hub 12 having a spacer portion 12c having the same outer diameter as the outer diameter of the electroformed abrasive grain layers 13A and 13B to be formed is formed by cutting, and one side surface 12a and the outer peripheral surface 12 of the spacer portion 12c are formed.
Mask the hub 12 except for e. For this masking, a mask jig 15 for covering the hub 12 via O-rings 14 is used. As shown in FIG. 2, the mask jig 15 includes a lower jig having an outer diameter substantially equal to the outer diameter of the spacer portion 12c of the hub 12, and an upper jig having an inner diameter substantially equal to the inner diameter of the spacer portion 12c. , And a tightening screw. The tightening screw sandwiches and presses the hub 12 in its axial direction, and presses the O-rings 14 and 14 against the hub 12, thereby forming an electroformed abrasive layer on the hub 12. Only the portion to be exposed is exposed, and all other portions are liquid-tightly shielded.

The hub 12 thus masked is degreased and activated, and a base plating layer is formed. The formation of the base plating layer can be obtained by performing Zn alloy substitution plating, Cu-Sn substitution plating, or Ni plating after anodic oxidation. Next, the hub 12 on which the underlayer is formed is immersed in the plating solution M in the plating tank 16. This plating solution M is obtained by adding superabrasive grains such as diamond abrasive grains and CBN abrasive grains to a nickel plating solution, and is agitated by an ultrasonic stirrer or the like so that the superabrasive grains are uniformly dispersed. . Then, the immersed hub 12 is connected to the cathode of the power supply, and electricity is supplied between the hub 12 and the anode plate 17 so that one side surface 12a of the spacer portion 12c of the hub 12 and the outer peripheral surface 12c.
In e, superabrasive grains are dispersed in the metal plating phase to form an electroformed abrasive grain layer 13A having a predetermined thickness. Thereafter, the hub 12 is taken out together with the mask jig 15, turned over, and set again on the mask jig 15, and this time the other side surface 12 b of the spacer portion 12 c and the outer peripheral surface are set.
Exposing 12e, it is immersed again in the plating solution M to form the electroformed abrasive grain layer 13B.

After forming the first electroformed abrasive grain layer on the spacer portion 12c of the hub 12, after removing the electroformed abrasive grain layer on the spacer outer peripheral surface 12e, a series of steps for forming the next electroformed abrasive grain layer is performed. It is preferable to carry out the second electroforming to make the electroformed abrasive grain layer uniform.

The spacer portion 12c of the hub 12 plated in this manner
Has an electroformed abrasive layer 13A formed on one side surface 12a, an electroformed abrasive layer 13B formed on the other side surface 12b, and an outer peripheral surface.
The electroformed abrasive grain layer formed on 12e is integrated. Therefore, the electroformed abrasive grain layer formed on the outer peripheral surface 12e of the spacer portion 12c is removed by grinding or the like, and the electroformed abrasive grain layer 13 is removed.
A and 13B are formed to predetermined dimensions. Then, electroformed abrasive grain layer 13
After masking the hub 12 while exposing only the outer surfaces A, 13B and the outer peripheral surface 12e of the hub 12, only the outer peripheral surface 12e of the spacer portion 12c is dissolved with a strong alkaline solution, for example, a 10% NaOH aqueous solution or the like. By reducing the outer diameter of the portion 12c to a predetermined size and exposing the cutting edge portions of the electroformed abrasive grain layers 13A and 13B, the hub-equipped thin blade grindstone 11 shown in FIG. 1 can be obtained. In this case, the electroformed abrasive layer is
Also serves as masks on both sides of c.

In the hub-mounted thin blade grinding wheel 11 having such a configuration, the electroformed abrasive grain layer is provided.
By setting the thickness of the spacer portion 13c so that the distance between the axial centers of 13A and 13B is equal to a predetermined processing pitch, ultra-precision cutting and grooving at constant intervals on the workpiece Processing can be performed.

Further, according to this whetstone, the electroformed abrasive grain layers 13A and 13B are integrated with the hub 12 in advance, and it is not necessary to position each of the abrasive grain layers each time it is used. 13A and 13B are not subjected to stress due to assembly, and there is no possibility of distortion, distortion, or damage. This eliminates the need for subtle adjustments when fixing the grindstone, and the multi-blade grindstone, which required specialized skills and a high degree of skill in assembly, can be easily used by anyone at the work site. Be able to handle.

In addition, by integrating the electroformed abrasive grain layers 13A and 13B with the hub 12, rigidity as a grindstone is improved, and the electroformed abrasive grain layers are formed.
It is possible to prevent a reduction in processing accuracy due to runout of 13A and 13B.

Further, when the grinding wheel is replaced by changing the processing pitch, etc., according to the thin blade grinding wheel with hub having the above-described configuration, the entire thin blade grinding wheel with hub may be replaced, and the mounting can be completed in a short time. Work stoppage time can be greatly reduced, and work efficiency can be improved.

On the other hand, in the method of manufacturing the hub-equipped thin blade whetstone 11 of the present embodiment described above, both side surfaces 12a, 12b of the spacer portion 12c of the hub 12 are provided.
When forming the electroformed abrasive layers 13A, 13B on the outer surface, an electroformed abrasive layer is also formed on the outer peripheral surface 12e of the spacer portion 12c, but the electroformed abrasive layer on the outer peripheral surface 12e is Electroformed abrasive grain layer 13A, 13B
When molded into a predetermined outer diameter, it is simultaneously removed by grinding or the like. Therefore, when masking the hub 12 prior to the electroformed abrasive grain layers 13A and 13B,
There is no need to perform masking on the outer peripheral surface 12e of the mask 12, so that the masking operation can be simplified. In particular, this hub
When masking 12, mask jig as described above
In the case of using the spacer 15, if the masking is performed to the outer peripheral surface 12 e of the spacer portion 12, the lower jig is
The mask jig 15 must be configured so that the O-ring 14 is pressed against the radially inner peripheral side of the hub 12 so as to cover the outer peripheral surface 12e of c, and the structure of the mask jig 15 becomes complicated, Although there is a possibility that the masking becomes insufficient, such an inconvenience does not occur in the present embodiment.

Next, FIG. 3 is a cross-sectional view showing another example of the thin blade whetstone with a hub manufactured by the present invention, and the same parts as those in FIG. 1 are denoted by the same reference numerals.

The hub-mounted thin blade grindstone 21 is characterized in that a groove 12f having a V-shaped cross section is formed along the circumferential direction on the outer peripheral portion of the spacer portion 12c.

In order to form such a V-shaped groove 12f, a V-shaped groove having the same shape as the groove 12f to be formed is formed at a spacer portion by a manufacturing method shown in FIG. What is necessary is just to form in the outer peripheral part of 12c. By doing so, when the outer peripheral portion of the hub 12 is dissolved in a strong alkaline solution or the like and molded into a predetermined size, it is dissolved in a V-shaped cross-sectional shape. The thin blade 21 can be obtained.

The basic configuration of the hub-mounted thin blade grinding wheel 21 is the same as that of the hub-mounted thin blade grinding wheel 11 shown in FIG. 1, and the same effect can be obtained.

By the way, when grooving the magnetic head, the fourth
As shown in the drawing, first, grooves 22a having a V-shaped cross section are formed in a workpiece 22 to be a magnetic head, and then grooves 22b are dug. However, when such processing is performed with the hub-mounted thin blade grinding wheel 11 shown in FIG. 1, the V-shaped cross-section groove 22a
The protrusion of the cutting edge of the whetstone had to be increased by the depth of the grinding wheel.

However, in the thin blade whetstone 21 with a hub of the other example, the hub 12
By making the inclination of the V-shaped groove 12f formed on the outer periphery of the spacer portion 12c smaller than the inclination of the V-shaped groove 22a of the workpiece 22, the V-shaped groove 12f of the outer periphery of the spacer portion 12c is It is possible to make the front end portion into the V-shaped grooves 22a. For this reason, the tip of the grindstone can be reduced, and the tip of the V-shaped groove 12f on the outer periphery of the spacer 12c reinforces the rigidity of the electroformed abrasive grain layers 13A and 13B.
The run-out of the cutting edge can be suppressed, and deep cutting and high-speed machining can be performed while maintaining machining accuracy.

Next, FIG. 5 is a longitudinal sectional view showing another example of the thin blade grinding wheel with a hub manufactured according to the present invention, and the same reference numerals are assigned to the same parts as in FIG.

The thin blade whetstone 23 with a hub is provided at the inner edges of both sides of the hub 12,
A wide annular grip portion 12g, 12g is formed axially outward.

The basic structure of the hub-equipped thin blade grinding wheel 23 is the same as that of the example shown in FIG. 1, and the same effect can be obtained.

Further, in the thin blade grinding wheel with hub 23 of this example, by providing the gripping portions 12g, 12g on both side surfaces of the hub 12, the mounting of the thin blade grinding wheel with hub 23 on a spindle or the like can be performed more easily. Having.

FIG. 6 is a longitudinal sectional view showing another example of the thin blade whetstone with a hub manufactured according to the present invention, and the same reference numerals are assigned to the same parts as in FIG.

The hub-equipped thin blade grindstone 24 is characterized in that a plurality of through holes 12h... In addition, the position and inner diameter of these through holes 12h ...
The setting is such that the strength and function of the thin blade whetstone 24 with a hub are not hindered.

The basic configuration of the hub-equipped thin blade grindstone 24 is the same as that of the example shown in FIG. 1, and the same effect can be obtained.

Further, in the hub-mounted thin blade grinding wheel 24 of this example, the through hole
By inserting a handling jig etc. into 12h…
There is an advantage that handling and operation of the hub-equipped thin blade grindstone 24 can be performed easily.

In the example of FIGS. 1, 3 to 6, the hub 12
As a material of which, while ensuring a light weight and sufficient rigidity, in manufacturing, since it must be a substance that dissolves in a strong alkaline solution, etc., an aluminum alloy was used, but it is a material that performs the above-described action. Then, it is not limited to this.

And also about the manufacturing method of the present invention for manufacturing such a hub-equipped thin blade whetstone, the requirements of the present invention are satisfied,
The present invention is not limited to the embodiment shown in FIG. 2 as long as sufficient processing accuracy and strength are maintained as a grindstone.

[Effects of the Invention] As described above, according to the method of manufacturing a thin blade whetstone with a hub of the present invention, it is not necessary to mask the outer peripheral surface of the spacer portion when forming the electroformed abrasive grain layer, For this reason, when masking is performed using a mask jig, the masking operation can be greatly simplified.

[Brief description of the drawings]

FIG. 1 and FIGS. 3 to 6 are longitudinal sectional views each showing an example of a thin blade whetstone with a hub manufactured by the present invention, and FIG. 2 is a view showing an example of a manufacturing method of the present invention. is there. FIG. 7 is a longitudinal sectional view showing an example of a conventional multi-blade. 11,21,23,24 ... thin blade whetstone with hub, 12 ... hub, 12a, 12b ... side surface of spacer, 12c ... spacer, 12d ... mounting hole, 12e ... outer periphery of spacer, 13A, 13B ... electroformed abrasive layer, 14 ... O-ring, 15 ... mask jig, 16 ... plating bath, 17 ... anode plate, M ... plating solution.

Continuation of front page (56) References JP-A-1-159175 (JP, A) JP-A-1-159176 (JP, A) JP-A-63-318269 (JP, A) JP-A-58-15674 (JP, A) JP-A-60-114467 (JP, A) JP-A-62-72056 (JP, U) (58) Fields investigated (Int. Cl. ⁶ , DB name) B24D 3/00 B24D 5/12

Claims (1)

(57) [Claims] 1. Super-abrasive grains are dispersed in a metal plating phase on both side surfaces and an outer peripheral surface of an annular hub having annular annular plate-shaped spacer portions formed on an outer periphery thereof, both sides of which are parallel to each other. The electroformed abrasive grain layer thus formed is electrodeposited in a thin annular shape, and then the outer periphery of the spacer portion and the electroformed abrasive grain layer is formed into a predetermined outer diameter. A method for manufacturing a thin blade grinding wheel with a hub, comprising: removing a grain layer; and then dissolving an outer peripheral portion of the spacer portion to expose a cutting edge portion of each electroformed abrasive grain layer on both side surfaces of the spacer portion.