JP2865888B2 - マルチターボ型真空ポンプ - Google Patents

マルチターボ型真空ポンプ

Info

Publication number: JP2865888B2
Authority: JP; Japan
Prior art keywords: turbo; sub; rotor; vacuum pump; blade
Prior art date: 1991-03-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP3854491A

Other languages

English (en)

Japanese (ja)

Other versions

JPH04276197A (ja

Inventor

哲也阿部

義夫村上

貴新井

晴繁大澤

聰秦

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NIPPON GENSHIRYOKU KENKYUSHO

Mitsubishi Heavy Industries Ltd

Original Assignee

NIPPON GENSHIRYOKU KENKYUSHO

Mitsubishi Heavy Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-03-05

Filing date

1991-03-05

Publication date

1999-03-08

1991-03-05 Application filed by NIPPON GENSHIRYOKU KENKYUSHO, Mitsubishi Heavy Industries Ltd filed Critical NIPPON GENSHIRYOKU KENKYUSHO

1991-03-05 Priority to JP3854491A priority Critical patent/JP2865888B2/ja

1992-03-05 Priority to DE19924206972 priority patent/DE4206972A1/de

1992-10-01 Publication of JPH04276197A publication Critical patent/JPH04276197A/ja

1999-03-08 Application granted granted Critical

1999-03-08 Publication of JP2865888B2 publication Critical patent/JP2865888B2/ja

2014-03-08 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

JP3854491A 1991-03-05 1991-03-05 マルチターボ型真空ポンプ Expired - Fee Related JP2865888B2 (ja)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
JP3854491A JP2865888B2 (ja)	1991-03-05	1991-03-05	マルチターボ型真空ポンプ
DE19924206972 DE4206972A1 (de)	1991-03-05	1992-03-05	Mehrturbinen-vakuumpumpe

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP3854491A JP2865888B2 (ja)	1991-03-05	1991-03-05	マルチターボ型真空ポンプ

Publications (2)

Publication Number	Publication Date
JPH04276197A JPH04276197A (ja)	1992-10-01
JP2865888B2 true JP2865888B2 (ja)	1999-03-08

Family

ID=12528229

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP3854491A Expired - Fee Related JP2865888B2 (ja)	1991-03-05	1991-03-05	マルチターボ型真空ポンプ

Country Status (2)

Country	Link
JP (1)	JP2865888B2 (de)
DE (1)	DE4206972A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE29715035U1 (de) *	1997-08-22	1997-10-30	Leybold Vakuum GmbH, 50968 Köln	Reibungsvakuumpumpe
DE10149366A1 (de) *	2001-10-06	2003-04-17	Leybold Vakuum Gmbh	Axial fördernde Reibungsvakuumpumpe
DE10354204B4 (de) *	2003-11-20	2016-03-10	Leybold Vakuum Gmbh	Molekularpumpe
DE102004012713A1 (de) *	2004-03-16	2005-10-06	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
CN111637069A (zh) *	2020-07-07	2020-09-08	中国空气动力研究与发展中心超高速空气动力研究所	一种多入口高速离心真空泵组

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3826710A1 (de) *	1987-08-07	1989-02-16	Japan Atomic Energy Res Inst	Vakuumpumpe
JPH01277698A (ja) *	1988-04-30	1989-11-08	Nippon Ferrofluidics Kk	複合型真空ポンプ

1991
- 1991-03-05 JP JP3854491A patent/JP2865888B2/ja not_active Expired - Fee Related
1992
- 1992-03-05 DE DE19924206972 patent/DE4206972A1/de active Granted

Also Published As

Publication number	Publication date
JPH04276197A (ja)	1992-10-01
DE4206972A1 (de)	1992-09-10
DE4206972C2 (de)	1993-08-12

Publication	Publication Date	Title
JP4395210B2 (ja)	2010-01-06	真空ポンプの改良
JP4173637B2 (ja)	2008-10-29	ステータとロータを備えた摩擦真空ポンプ
EP0775829A1 (de)	1997-05-28	Turbomolekular-Vakuumpumpen
KR20000062974A (ko)	2000-10-25	터보 분자 펌프
US6698929B2 (en)	2004-03-02	Turbo compressor
JP2003515037A5 (de)	2011-03-03
JP2005180438A (ja)	2005-07-07	第一段のターボファンと第二段の軸流分子ポンプとを備えた超高速真空ポンプ装置
JP2003515037A (ja)	2003-04-22	半径方向流ターボ分子真空ポンプ
JP4086470B2 (ja)	2008-05-14	ターボ分子ポンプ
JPS62113887A (ja)	1987-05-25	真空ポンプ
JP2865888B2 (ja)	1999-03-08	マルチターボ型真空ポンプ
CN108105121A (zh)	2018-06-01	一种多级复合高真空干泵
WO1995028571A1 (fr)	1995-10-26	Pompe moleculaire
US6220824B1 (en)	2001-04-24	Self-propelled vacuum pump
JPH0219694A (ja)	1990-01-23	オイルフリー型真空ポンプ
JPS60182394A (ja)	1985-09-17	タ−ボ分子ポンプ
JPS6355396A (ja)	1988-03-09	タ−ボ真空ポンプ
JPH0419393B2 (de)	1992-03-30
JP3978001B2 (ja)	2007-09-19	ターボ分子ポンプ
JP2574810B2 (ja)	1997-01-22	真空ポンプ
JPS61283794A (ja)	1986-12-13	タ−ボ分子ポンプ
JP2530526B2 (ja)	1996-09-04	２つの流体を同時に圧縮するためのタ―ボポンプ
KR100379497B1 (ko)	2003-04-10	터보 압축기의 구동축
JP2628351B2 (ja)	1997-07-09	複合分子ポンプ
JPS6385287A (ja)	1988-04-15	真空ポンプ

Legal Events

Date	Code	Title	Description
1998-11-18	A01	Written decision to grant a patent or to grant a registration (utility model)	Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19981117
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