JP2770843B2 - Method for manufacturing optical disc substrate and support member used for the same - Google Patents
Method for manufacturing optical disc substrate and support member used for the sameInfo
- Publication number
- JP2770843B2 JP2770843B2 JP6088353A JP8835394A JP2770843B2 JP 2770843 B2 JP2770843 B2 JP 2770843B2 JP 6088353 A JP6088353 A JP 6088353A JP 8835394 A JP8835394 A JP 8835394A JP 2770843 B2 JP2770843 B2 JP 2770843B2
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- substrate
- stamper
- photocurable resin
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Moulding By Coating Moulds (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、光ディスク用基板の製
造方法に関し、特に、スタンパとガラス基板との間に光
硬化性樹脂を展開し、その後、紫外線を照射することに
よって製造する光ディスク用基板の製造方法及びこれに
用いる支持部材に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an optical disk substrate, and more particularly, to a method for manufacturing an optical disk substrate by developing a photocurable resin between a stamper and a glass substrate and then irradiating ultraviolet rays. And a supporting member used for the method.
【0002】[0002]
【従来の技術】従来の光ディスク用基板の製造方法は、
大口径、高速回転に対応できるガラス基板を用いた光デ
ィスクの製造に用いられている。図3(a)〜図3
(g)は従来の光ディスク用基板の製造方法における製
造工程の一例を示し、正面図及びこの正面図に対応した
平面図を1組として示した各段階の製造工程図である。2. Description of the Related Art A conventional method for manufacturing a substrate for an optical disk is as follows.
It is used in the manufacture of optical discs using glass substrates that can cope with large diameter and high speed rotation. 3 (a) to 3
(G) shows an example of a manufacturing process in a conventional method for manufacturing a substrate for an optical disk, and is a manufacturing process diagram of each stage in which a front view and a plan view corresponding to the front view are shown as one set.
【0003】従来の光ディスク用基板の製造方法では、
まず、図3(a)に示すように、プリピット、プリグル
ーブなどの情報パターンを有するスタンパ31の表面に
光硬化性樹脂32をリング状に塗布する。スタンパ31
は、例えばキッケルのような金属材によって作られてい
る。In a conventional method of manufacturing a substrate for an optical disk,
First, as shown in FIG. 3A, a photocurable resin 32 is applied in a ring shape on the surface of a stamper 31 having an information pattern such as prepits and pregrooves. Stamper 31
Is made of a metal material such as Kickel.
【0004】次に、図3(b)に示すように、スタンパ
31の表面上、かつ光硬化性樹脂32上に4つの爪33
を相互に離間して個々に配し、これらの爪33上に円板
形状のガラス基板34を載せる。この状態から、図3
(c)に示すように、ガラス基板34の中央部分に形成
されているセンターホール(中央貫通穴)34aに治具
35を押し当てて、ガラス基板34をスタンパ31の表
面側に押し込むような方向に負荷をかけ、ガラス基板3
4を湾曲させる。ガラス基板34を湾曲させる際には、
ガラス基板34の外周端を4か所の爪33により局部的
に支持する。Next, as shown in FIG. 3B, four claws 33 are placed on the surface of the stamper 31 and on the photo-curable resin 32.
Are arranged separately from each other, and a disk-shaped glass substrate 34 is placed on these claws 33. From this state, FIG.
As shown in (c), a direction in which the jig 35 is pressed against a center hole (central through hole) 34 a formed in the central portion of the glass substrate 34 to push the glass substrate 34 into the surface of the stamper 31. Load on the glass substrate 3
Curve 4 When bending the glass substrate 34,
The outer peripheral edge of the glass substrate 34 is locally supported by four claws 33.
【0005】ガラス基板34を湾曲させた後、図3
(d)に示すように、爪33をガラス基板34の外周方
向にゆっくり開いていき、ガラス基板34と光硬化性樹
脂32とを接触させる。ここで、ガラス基板34と光硬
化性樹脂32とを接触させるにあたり、ガラス基板34
を湾曲させる理由は、光硬化性樹脂32内への気泡の巻
き込みをなくすことにある。ガラス基板34を湾曲させ
ることにより、ガラス基板34及び光硬化性樹脂32の
相互接触が、ガラス基板34の傾斜した表面で行われ
る。このため、湾曲させないで接触させたときに比較し
て最初の接触面積が小さくできる。経験的に接触面積が
小さい程、気泡の巻き込みは抑止される。After the glass substrate 34 is curved, FIG.
As shown in (d), the nail 33 is slowly opened in the outer peripheral direction of the glass substrate 34 to bring the glass substrate 34 into contact with the photocurable resin 32. Here, when the glass substrate 34 is brought into contact with the photocurable resin 32, the glass substrate 34
The reason for curving is to eliminate entrapment of air bubbles in the photocurable resin 32. By making the glass substrate 34 curved, mutual contact between the glass substrate 34 and the photocurable resin 32 is performed on the inclined surface of the glass substrate 34. For this reason, the initial contact area can be made smaller than when the contact is made without bending. Empirically, the smaller the contact area, the more the entrapment of air bubbles is suppressed.
【0006】爪33がスタンパ31の外周端を越えて完
全に開ききった後、図3(e)に示すように、光硬化性
樹脂32を展開させる。光硬化性樹脂32の展開が完了
したら、図3(f)に示すように、ガラス基板34の上
方から紫外線36を照射して光硬化性樹脂32を硬化さ
せる。最後に、図3(g)に示すように、スタンパ31
から光硬化性樹脂32付きガラス基板34を離型する
と、光ディスク用基板37が得られる。After the pawl 33 has completely opened beyond the outer peripheral end of the stamper 31, the photo-curable resin 32 is developed as shown in FIG. When the development of the photo-curable resin 32 is completed, the photo-curable resin 32 is cured by irradiating ultraviolet rays 36 from above the glass substrate 34 as shown in FIG. Finally, as shown in FIG.
When the glass substrate 34 with the photocurable resin 32 is released from the mold, an optical disk substrate 37 is obtained.
【0007】なお、この種の光ディスク用基板を製造す
るための従来技術(従来技術1)としては、特開平2−
58745号公報に開示されているように、樹脂注入途
中で成形空間の外周部のみを光照射して外周の樹脂を硬
化して樹脂の流動性を抑制し、成形空間からの樹脂あふ
れ、即ちバリの発生を低減する光ディスク基板の製造方
法が周知である。The prior art (prior art 1) for manufacturing this type of optical disc substrate is disclosed in Japanese Unexamined Patent Publication No.
As disclosed in Japanese Patent No. 58745, during the resin injection, only the outer peripheral portion of the molding space is irradiated with light to cure the resin at the outer periphery to suppress the fluidity of the resin, and the resin overflows from the molding space, that is, burrs. A method for manufacturing an optical disk substrate that reduces the occurrence of blemishes is well known.
【0008】さらに、他の従来技術(従来技術2)とし
ては、特開昭62−293533号公報に開示されてい
るように、光ディスク基板の周囲に段差を有するマスク
を配置し、この段差部分に光ディスク基板に外周を当て
マスクと基板との相対位置ずれをなくし、光ディスク基
板の周囲にバリがでないようにした光ディスクの製造方
法が周知である。Further, as another prior art (prior art 2), as disclosed in Japanese Patent Application Laid-Open No. 62-293533, a mask having a step is arranged around an optical disk substrate, and 2. Description of the Related Art A method of manufacturing an optical disk is known in which an outer periphery of an optical disk substrate is applied to eliminate a relative displacement between a mask and a substrate so that burrs are not formed around the optical disk substrate.
【0009】[0009]
【発明が解決しようとする課題】しかしながら、従来の
光ディスク用基板の製造方法では、ガラス基板34を湾
曲させる際に、ガラス基板34の外周端を4を所の爪3
3により局部的に支持するため、支持された位置では湾
曲量が大きく、ガラス基板34の外周端のうち支持され
ていない位置では湾曲量が小さくなってしまうという問
題がある。However, in the conventional method for manufacturing an optical disk substrate, when the glass substrate 34 is curved, the outer peripheral end of the glass substrate 34 is
3, there is a problem that the amount of bending is large at the supported position, and the amount of bending is small at the unsupported position on the outer peripheral edge of the glass substrate 34.
【0010】即ち、ガラス基板34の外周端に支持され
ている位置では、湾曲量が大きく、ガラス基板34と光
硬化性樹脂32との間の距離も大きくなり、爪33をゆ
っくりと開いてもなかなかガラス基板34と光硬化性樹
脂32との接触が開始しない。これに対し、ガラス基板
34の湾曲量が小さい位置では、ガラス基板34と光硬
化性樹脂32との間の距離も小さくなり、爪33を開く
とすぐにガラス基板34と光硬化性樹脂32との接触が
始まる。That is, at the position supported by the outer peripheral edge of the glass substrate 34, the amount of bending is large, the distance between the glass substrate 34 and the photocurable resin 32 is large, and even if the nail 33 is slowly opened, The contact between the glass substrate 34 and the photocurable resin 32 does not readily start. On the other hand, at a position where the amount of curvature of the glass substrate 34 is small, the distance between the glass substrate 34 and the photocurable resin 32 is also small. Contact begins.
【0011】このように、ガラス基板34と光硬化性樹
脂32との接触のタイミングが、場所によって異なる
と、光硬化性樹脂32の展開速度も不均一となってしま
い、接触が早く始まる場所では展開速度が早く、遅く始
まる場所では展開速度が遅くなる。展開が早い場所で
は、全体の展開が完了するまでに、ガラス基板34の外
周端まで展開が達してしまう。さらには、全体の展開が
完了するまでに、ガラス基板34に外周端から光硬化性
樹脂32がはみ出してしまう。はみ出した光硬化性樹脂
32は、紫外線による硬化処理の後に、バリとなってガ
ラス基板34に残ってしまう。As described above, if the timing of contact between the glass substrate 34 and the photo-curable resin 32 differs depending on the location, the developing speed of the photo-curable resin 32 becomes uneven, and in a location where contact starts early. The unfolding speed is slow in places where the unfolding speed is fast and starts slowly. In a place where the development is early, the development reaches the outer peripheral end of the glass substrate 34 before the entire development is completed. Furthermore, the photocurable resin 32 protrudes from the outer peripheral edge of the glass substrate 34 before the entire development is completed. The protruding photocurable resin 32 becomes burrs and remains on the glass substrate 34 after the curing process using ultraviolet rays.
【0012】したがって、従来の光ディスク用基板の製
造方法では、展開速度の不均一になることによるガラス
基板34の外周端にバリを発生しやすく、歩留まりが低
下してしまうという問題がある。Therefore, in the conventional method of manufacturing a substrate for an optical disk, there is a problem that burrs are easily generated on the outer peripheral end of the glass substrate 34 due to uneven development speed, and the yield is reduced.
【0013】また、従来技術1及び2で開示されている
製造方法は、バリの発生を防ぐ点では目的を同じにして
いるが、複数の爪33を開きながら製造する方法とは異
なる製造方法を採用しているものである。Further, the manufacturing methods disclosed in the prior arts 1 and 2 have the same purpose in terms of preventing generation of burrs, but a manufacturing method different from the manufacturing method in which a plurality of claws 33 are opened is used. It is what we have adopted.
【0014】それ故に本発明の課題は、光硬化性樹脂の
展開速度を均一にし、ガラス基板を湾曲させながら光デ
ィスク用基板を製造する方法において、避けることがで
きなかった光硬化性樹脂のバリの発生を抑止するととも
に、歩留まりの向上を図る光ディスク用基板の製造方法
を提供することにある。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method of manufacturing a substrate for an optical disk while making the developing speed of the photocurable resin uniform and curving the glass substrate, and the burrs of the photocurable resin which cannot be avoided. An object of the present invention is to provide a method for manufacturing an optical disc substrate that suppresses occurrence and improves the yield.
【0015】[0015]
【課題を解決するための手段】本発明によれば、情報パ
ターンを有するスタンパの表面に光硬化性樹脂を塗布
し、ガラス基板を前記スタンパの表面側に移動可能に支
持する支持部材により前記ガラス基板を前記光硬化性樹
脂上に配し、前記ガラス基板に負荷をかけて前記スタン
パの表面側に突出すように湾曲させつつ、前記支持部材
を前記ガラス基板の径方向外側に開いて行くことによっ
て前記ガラス基板を降下させて前記ガラス基板と前記光
硬化性樹脂とを接触させ、さらに、前記光硬化性樹脂を
前記スタンパと前記ガラス基板との間に層状に展開さ
せ、展開が完了した後、前記ガラス基板側から紫外線を
照射することによって前記光硬化性樹脂を硬化させ、最
後に前記スタンパと前記ガラス基板とを離型して光ディ
スク用基板を得る光ディスク用基板の製造方法におい
て、前記支持部材は、前記径方向に移動可能な環状体形
状を呈する複数の支持部を有し、該支持部のそれぞれを
前記ガラス基板の外径と同じ径としかつ前記ガラス基板
の外周端に接するよう円弧状の斜面を形成し、前記支持
部の半径が前記斜面のどの高さをとっても前記ガラス基
板の半径に等しく、前記支持部を前記ガラス基板の外周
端に接しつつ前記ガラス基板を均一に湾曲させ、前記ガ
ラス基板と前記光硬化性樹脂とを接触させることを特徴
とする光ディスク用基板の製造方法が得られる。According to the present invention, a photocurable resin is applied to the surface of a stamper having an information pattern, and the glass member is supported by a supporting member which movably supports the glass substrate on the surface side of the stamper. Disposing a substrate on the photocurable resin, and opening the support member outward in the radial direction of the glass substrate while applying a load to the glass substrate and curving the glass substrate so as to protrude toward the surface side of the stamper. The glass substrate is lowered by contacting the glass substrate with the photocurable resin, and further, the photocurable resin is developed in a layer between the stamper and the glass substrate, and after the development is completed. An optical disk for curing the photocurable resin by irradiating ultraviolet rays from the glass substrate side, and finally releasing the stamper and the glass substrate to obtain an optical disc substrate. In the method for manufacturing a disk substrate, the support member has a plurality of support portions having an annular shape movable in the radial direction, each of the support portions having the same diameter as the outer diameter of the glass substrate, and wherein forming an arcuate slope to contact with the peripheral edge of the glass substrate, the supporting
No matter what height the radius of the part takes on the slope,
The radius of a plate, the glass substrate is uniformly curved while the supporting portion is in contact with the outer peripheral edge of the glass substrate, and the glass substrate and the photocurable resin are brought into contact with each other. A manufacturing method is obtained.
【0016】また、本発明によれば、光ディスク用基板
の製造方法に用いる前記支持部材において、前記支持部
のそれぞれは、前記ガラス基板の外径と同じ径をもち、
かつ前記ガラス基板の外周端に接する円弧状の斜面を有
していることを特徴とする光ディスク用基板の製造方法
に用いる支持部材が得られる。According to the present invention, in the support member used in the method for manufacturing an optical disk substrate, each of the support portions has the same diameter as the outer diameter of the glass substrate,
In addition, a support member used in a method for manufacturing an optical disc substrate, which has an arc-shaped slope contacting the outer peripheral end of the glass substrate, is obtained.
【0017】[0017]
【実施例】以下、図1(a)〜図1(g)、及び図2に
基づき本発明の光ディスク用基板の製造方法の一実施例
を説明する。なお、図1(a)〜図1(g)は正面図及
びこの正面図に対応した平面図を1組として各製造段階
を示した製造工程図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method for manufacturing an optical disk substrate according to the present invention will be described below with reference to FIGS. 1 (a) to 1 (g) and FIG. 1 (a) to 1 (g) are manufacturing process diagrams showing each manufacturing step as a set of a front view and a plan view corresponding to this front view.
【0018】図1を参照して、光ディスク用基板の製造
方法は、まず、図1(a)に示すように、情報パターン
を有するスタンパ1の表面に光硬化性樹脂2をリング状
に塗布する。次に、図1(b)に示すように、スタンパ
1の上に支持部材3を配し、スタンパ1の表面上、及び
光硬化性樹脂2上に配した支持部材3にガラス基板4を
載せる。ここで、支持部材3は、図2にも示すように、
4つの円弧形状の支持部3aによって互いに組み合わさ
れて1つの環状体形状を呈している。これらの支持部3
aは径方向に移動することによって互いに接離するもの
である。支持部3aは環状体形状を呈し、これらの内周
面となる内側面が円弧状であり、かつ斜面3bとなって
いる。支持部3aの半径は,斜面3bのどの高さをとっ
ても、ガラス基板4の半径Rに等しいことが重要であ
る。即ち、支持部3aは、互いに接するか、接近して環
状体形状を呈している状態から径方向外側に開いていく
状態において、ガラス基板4の外周端が斜面3bに接し
ているものである。ただし、支持部材3がスタンパ1の
外周端の外側に完全に開ききった後には、ガラス基板4
の外周端が斜面3bから外れる。Referring to FIG. 1, in the method for manufacturing an optical disk substrate, first, as shown in FIG. 1A, a photocurable resin 2 is applied in a ring shape on the surface of a stamper 1 having an information pattern. . Next, as shown in FIG. 1B, a support member 3 is arranged on the stamper 1, and the glass substrate 4 is placed on the surface of the stamper 1 and the support member 3 arranged on the photocurable resin 2. . Here, as shown in FIG.
The four arc-shaped support parts 3a are combined with each other to form one annular body. These support parts 3
“a” comes into contact with and separates from each other by moving in the radial direction. The support portion 3a has an annular shape, and an inner surface serving as an inner peripheral surface thereof has an arc shape and is a slope 3b. It is important that the radius of the support portion 3a is equal to the radius R of the glass substrate 4 at any height of the slope 3b. That is, the outer peripheral edge of the glass substrate 4 is in contact with the inclined surface 3b in a state in which the support portions 3a are in contact with each other or approach each other, and open radially outward from a state of having an annular shape. However, after the support member 3 has completely opened outside the outer peripheral end of the stamper 1, the glass substrate 4
Is removed from the slope 3b.
【0019】なお、実施例では、4つの支持部3aで環
状体形状形状を構成しているが、4つ限らず、支持部3
aの数を増減して組み合わせても、本発明の目的を達成
できるものである。また、支持部3aそのものは円弧形
であり断面形状が台形であるが、これに限定されるもの
ではない。ようするに、ガラス基板4の外周に接する円
弧状の斜面3bを形成できればどのような形状でもよ
い。In the embodiment, the annular shape is formed by the four support portions 3a. However, the present invention is not limited to the four support portions 3a.
The object of the present invention can be achieved by increasing or decreasing the number of a. In addition, the support portion 3a itself has an arc shape and a trapezoidal cross-sectional shape, but is not limited thereto. In this way, any shape may be used as long as the arc-shaped inclined surface 3b in contact with the outer periphery of the glass substrate 4 can be formed.
【0020】支持部材3にガラス基板4を載せた状態か
ら、図1(c)に示すように、ガラス基板4の中央部分
に形成されているセンターホール(中央貫通穴)4a
に、テーパ状の外周面を有する治具5を用いてガラス基
板4をスタンパ1側に押し込むような方向に負荷をかけ
てガラス基板4を湾曲させる。ガラス基板4を湾曲させ
る際には、ガラス基板4の外周端を環状体形状を呈して
いる4つの支持部材3により支持する。このとき、支持
部材3を用いてガラス基板4を支持すると、ガラス基板
4は外周端を支持部材3の各支持部3aの円弧の斜面3
bの長さ分だけ広い範囲にわたって支持されているため
円周上の位置による湾曲量の違いが全く生じない。From the state where the glass substrate 4 is placed on the support member 3, as shown in FIG. 1C, a center hole (central through hole) 4a formed in the center of the glass substrate 4 is formed.
Then, the glass substrate 4 is bent by applying a load in a direction such that the glass substrate 4 is pushed into the stamper 1 using a jig 5 having a tapered outer peripheral surface. When the glass substrate 4 is curved, the outer peripheral end of the glass substrate 4 is supported by four support members 3 having an annular shape. At this time, when the glass substrate 4 is supported by using the support member 3, the glass substrate 4 has its outer peripheral end formed by the inclined surface 3 of the arc of each support portion 3 a of the support member 3.
Since it is supported over a wide range by the length of b, there is no difference in the amount of bending depending on the position on the circumference.
【0021】ガラス基板4を治具5によって湾曲させた
後、図1(d)に示すように、支持部材3をスタンパ1
の外周方向、即ち、径方向外側にゆっくり開いていき、
支持部3aの斜面3bにガラス基板4の外周端を接しつ
つ、ガラス基板4と光硬化性樹脂2とを接触させる。こ
こで、ガラス基板4の湾曲状態が前述したように、支持
部3aの斜面3bに支持されており、円周方向で均一に
湾曲しているため、ガラス基板4と光硬化性樹脂2との
相互接触が全周でほぼ同時に開始される。After the glass substrate 4 is bent by the jig 5, as shown in FIG.
Slowly open outward, that is, radially outward,
The glass substrate 4 and the photocurable resin 2 are brought into contact with each other while the outer peripheral end of the glass substrate 4 is in contact with the slope 3b of the support portion 3a. Here, as described above, the curved state of the glass substrate 4 is supported by the inclined surface 3b of the support portion 3a and is uniformly curved in the circumferential direction. Mutual contact is initiated almost simultaneously around the entire circumference.
【0022】支持部材3がスタンパ1の外周を越えて外
側に完全に開ききった後、図3(e)に示すように、光
硬化性樹脂2がスタンパ1とガラス基板4との間で、所
定の領域まで展開するのを待つ。この際、前述したよう
に、光硬化性樹脂2とガラス基板4との接触が全周で同
時に開始されるため展開速度も場所による差がほとんど
生じない。After the support member 3 has completely opened outward beyond the outer periphery of the stamper 1, as shown in FIG. 3 (e), the photocurable resin 2 moves between the stamper 1 and the glass substrate 4. Wait for expansion to a predetermined area. At this time, as described above, since the contact between the photocurable resin 2 and the glass substrate 4 is started simultaneously over the entire circumference, there is almost no difference in deployment speed between locations.
【0023】したがって、光硬化性樹脂2は、スタンパ
1とガラス基板4との間の全領域でほぼ同時に展開が完
了する。このため、光硬化性樹脂2は、ガラス基板4の
外周端からはみ出すことはない。Therefore, the development of the photocurable resin 2 is completed almost simultaneously in the entire region between the stamper 1 and the glass substrate 4. Therefore, the photocurable resin 2 does not protrude from the outer peripheral edge of the glass substrate 4.
【0024】光硬化性樹脂2の展開が完了したら、図3
(f)に示すように、ガラス基板4の上方から光源によ
って紫外線6を全面照射して光硬化性樹脂2を硬化させ
る。最後に、図1(g)に示すように、スタンパ1から
光硬化性樹脂2付きのガラス基板4を離型して光ディス
ク用基板7を得る。このようにして製造された光ディス
ク用基板7は、光硬化性樹脂2の展開時に光硬化性樹脂
2がスタンパ1とガラス基板4との外にはみ出さないた
め、光硬化性樹脂2のバリが全く生じない。When the development of the photocurable resin 2 is completed, FIG.
As shown in (f), the entire surface is irradiated with ultraviolet rays 6 from above the glass substrate 4 by a light source to cure the photocurable resin 2. Finally, as shown in FIG. 1 (g), the glass substrate 4 with the photocurable resin 2 is released from the stamper 1 to obtain the optical disk substrate 7. In the optical disk substrate 7 manufactured in this manner, since the photocurable resin 2 does not protrude outside the stamper 1 and the glass substrate 4 when the photocurable resin 2 is developed, burrs of the photocurable resin 2 are removed. Not at all.
【0025】[0025]
【発明の効果】以上述べたように、本発明の光ディスク
用基板の製造方法によれば、ガラス基板を湾曲させると
きに、これを支持する支持部材の形状をガラス基板の外
径と同じ径をもつ円弧状の斜面とし、ガラス基板を円周
方向で均一に湾曲させ、ガラス基板と光硬化性樹脂との
接触するタイミングの場所による差をなくし、光硬化性
樹脂の展開速度を均一にすることによって、バリの発生
を抑止するという効果を奏する。As described above, according to the method for manufacturing an optical disk substrate of the present invention, when the glass substrate is bent, the shape of the supporting member for supporting the glass substrate is the same as the outer diameter of the glass substrate. The curved surface of the glass substrate should be uniformly curved in the circumferential direction to eliminate differences in timing of contact between the glass substrate and the photocurable resin, and to make the development speed of the photocurable resin uniform. Thus, the effect of suppressing the occurrence of burrs is achieved.
【0026】また、バリの発生を抑止することができる
ため、光ディスク用基板の製造における歩留まりも向上
させることができる。Further, since the occurrence of burrs can be suppressed, the yield in the manufacture of an optical disc substrate can be improved.
【図面の簡単な説明】[Brief description of the drawings]
【図1】本発明の光ディスク用基板の製造方法の一実施
例を示し、(a),(b),(c),(d),(e),
(f)及び(g)は各製造工程段階を示し、正面図及び
この正面図に対応した平面図を1組とした各製造工程図
である。FIG. 1 shows an embodiment of a method of manufacturing a substrate for an optical disk according to the present invention, wherein (a), (b), (c), (d), (e),
(F) and (g) show each manufacturing process step, and are a set of a front view and a plan view corresponding to the front view, each of which is a manufacturing process diagram.
【図2】本発明の光ディスク用基板の製造方法で用いる
支持部材の実施例を示す一部断面斜視図である。FIG. 2 is a partially sectional perspective view showing an embodiment of a support member used in the method for manufacturing an optical disc substrate of the present invention.
【図3】従来の光ディスク用基板の製造方法の一実施例
を示し、(a),(b),(c)(d),(e),
(f)及び(g)は各製造工程段階を示し、正面図及び
この正面図に対応した平面図を1組とした各製造工程図
である。FIG. 3 shows an embodiment of a conventional method for manufacturing a substrate for an optical disk, wherein (a), (b), (c), (d), (e),
(F) and (g) show each manufacturing process step, and are a set of a front view and a plan view corresponding to the front view, each of which is a manufacturing process diagram.
1,31 スタンパ 2,32 光硬化性樹脂 3 支持部材 3a 支持部 3b 斜面 4,34 ガラス基板 4a,34a センターホール 5,35 治具 6,36 紫外線 7,37 光ディスク用基板 33 爪 DESCRIPTION OF SYMBOLS 1, 31 Stamper 2, 32 Photocurable resin 3 Support member 3a Support part 3b Slope 4,34 Glass substrate 4a, 34a Center hole 5,35 Jig 6,36 Ultraviolet light 7,37 Optical disk substrate 33 Nail
Claims (2)
光硬化性樹脂を塗布し、ガラス基板を前記スタンパの表
面側に移動可能に支持する支持部材により前記ガラス基
板を前記光硬化性樹脂上に配し、前記ガラス基板に負荷
をかけて前記スタンパの表面側に突出すように湾曲させ
つつ、前記支持部材を前記ガラス基板の径方向外側に開
いて行くことによって前記ガラス基板を降下させて前記
ガラス基板と前記光硬化性樹脂とを接触させ、さらに、
前記光硬化性樹脂を前記スタンパと前記ガラス基板との
間に層状に展開させ、展開が完了した後、前記ガラス基
板側から紫外線を照射することによって前記光硬化性樹
脂を硬化させ、最後に前記スタンパと前記ガラス基板と
を離型して光ディスク用基板を得る光ディスク用基板の
製造方法において、 前記支持部材は、前記径方向に移動可能な環状体形状を
呈する複数の支持部を有し、該支持部のそれぞれを前記
ガラス基板の外径と同じ径としかつ前記ガラス基板の外
周端に接するよう円弧状の斜面を形成し、前記支持部の
半径が前記斜面のどの高さをとっても前記ガラス基板の
半径に等しく、前記支持部を前記ガラス基板の外周端に
接しつつ前記ガラス基板を均一に湾曲させ、前記ガラス
基板と前記光硬化性樹脂とを接触させることを特徴とす
る光ディスク用基板の製造方法。1. A photo-curable resin is applied to the surface of a stamper having an information pattern, and the glass substrate is disposed on the photo-curable resin by a supporting member that movably supports the glass substrate on the surface side of the stamper. Then, while applying a load to the glass substrate and bending the glass substrate so as to protrude toward the surface side of the stamper, the support member is opened radially outward of the glass substrate to lower the glass substrate. And the glass substrate and the photocurable resin are brought into contact with each other,
The photocurable resin is developed into a layer between the stamper and the glass substrate, and after the development is completed, the photocurable resin is cured by irradiating ultraviolet rays from the glass substrate side, and finally the In a method for manufacturing an optical disc substrate, wherein a stamper and the glass substrate are separated from each other to obtain an optical disc substrate, the support member has a plurality of support portions having an annular shape movable in the radial direction. Each of the supporting portions has the same diameter as the outer diameter of the glass substrate, and forms an arc-shaped slope so as to be in contact with the outer peripheral end of the glass substrate .
No matter what height the radius takes on the slope, the glass substrate
A method of manufacturing a substrate for an optical disk, wherein the glass substrate is uniformly curved while the support portion is in contact with an outer peripheral end of the glass substrate, and the glass substrate is brought into contact with the photocurable resin. .
方法に用いる前記支持部材において、前記支持部のそれ
ぞれは、前記ガラス基板の外径と同じ径をもち、かつ前
記ガラス基板の外周端に接する円弧状の斜面を有してい
ることを特徴とする光ディスク用基板の製造方法に用い
る支持部材。2. The support member used in the method for manufacturing an optical disc substrate according to claim 1, wherein each of the support portions has the same diameter as an outer diameter of the glass substrate, and is provided at an outer peripheral end of the glass substrate. A support member for use in a method for manufacturing an optical disk substrate, characterized in that the support member has an arcuate slope that is in contact therewith.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6088353A JP2770843B2 (en) | 1994-04-26 | 1994-04-26 | Method for manufacturing optical disc substrate and support member used for the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6088353A JP2770843B2 (en) | 1994-04-26 | 1994-04-26 | Method for manufacturing optical disc substrate and support member used for the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH07296428A JPH07296428A (en) | 1995-11-10 |
JP2770843B2 true JP2770843B2 (en) | 1998-07-02 |
Family
ID=13940463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6088353A Expired - Lifetime JP2770843B2 (en) | 1994-04-26 | 1994-04-26 | Method for manufacturing optical disc substrate and support member used for the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2770843B2 (en) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2638224B2 (en) * | 1989-10-25 | 1997-08-06 | 日本電気株式会社 | Method and apparatus for duplicating optical record carrier |
-
1994
- 1994-04-26 JP JP6088353A patent/JP2770843B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH07296428A (en) | 1995-11-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3916677B2 (en) | Assembly line for temporary hardening of compact discs | |
JP2770843B2 (en) | Method for manufacturing optical disc substrate and support member used for the same | |
JPS6312778B2 (en) | ||
JPH02126434A (en) | Optical disk substrate molding method | |
JPH02113456A (en) | Disk substrate manufacturing device | |
JP3592678B2 (en) | Manufacturing method of blank board and manufacturing method of direct stamper | |
JPH02166645A (en) | Manufacture of substrate for optical recording medium | |
JP2638224B2 (en) | Method and apparatus for duplicating optical record carrier | |
JP2679454B2 (en) | Resin stamper manufacturing method and pattern transfer method using the resin stamper | |
JP2004039151A (en) | Method of manufacturing intermediate product for optical recording medium and optical recording medium | |
JP3596543B2 (en) | Stamper, method of manufacturing the same, optical disk and blanks | |
JP2001338444A (en) | Method for manufacturing original disk, stamper and information recording medium | |
JP3483539B2 (en) | Stamper, mold system, recording medium substrate, stamper manufacturing method | |
TW200401284A (en) | Optical recording medium, production method and production device for optical recording medium | |
JP2003123329A (en) | Stamper and production method therefor | |
JPH10193400A (en) | Mold for molding disc board and disk board | |
JPH0210539A (en) | Manufacture of optical disk substrate | |
JP4061909B2 (en) | Manufacturing method of optical disc master | |
JPH04255927A (en) | Optical recording disk and its manufacture | |
JPH039835A (en) | Manufacture of optical disc board | |
JP2000339779A (en) | Master disk for information recording medium, its manufacture and exposure device for manufacturing the master disk | |
JP2004062982A (en) | Manufacturing method of blank base for stamper | |
JP2001155386A (en) | Contraction mother, contraction father and manufacturing method therefor | |
JPH01312749A (en) | Production of optical disk | |
JP2003203396A5 (en) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19980318 |