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JP2689429B2 - Optical recording medium - Google Patents

Optical recording medium

Info

Publication number
JP2689429B2
JP2689429B2 JP62169223A JP16922387A JP2689429B2 JP 2689429 B2 JP2689429 B2 JP 2689429B2 JP 62169223 A JP62169223 A JP 62169223A JP 16922387 A JP16922387 A JP 16922387A JP 2689429 B2 JP2689429 B2 JP 2689429B2
Authority
JP
Japan
Prior art keywords
optical recording
recording medium
recording
substrate
selenium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62169223A
Other languages
Japanese (ja)
Other versions
JPS6414084A (en
Inventor
雅樹 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62169223A priority Critical patent/JP2689429B2/en
Publication of JPS6414084A publication Critical patent/JPS6414084A/en
Application granted granted Critical
Publication of JP2689429B2 publication Critical patent/JP2689429B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24306Metals or metalloids transition metal elements of groups 3-10
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24316Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24318Non-metallic elements
    • G11B2007/24322Nitrogen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はレーザ光によって情報を記録再生することの
できる光記録媒体に関するものである。 〔従来の技術〕 レーザ光によって情報を媒体に記録し,かつ再生する
光ディスクメモリは,記録密度が高いことから大容量記
録装置として優れた特徴を有している。この光記録媒体
材料としては,最初にタンタルと鉛が使用された{サイ
エンス(Science)154,1550,1966参照}。それ以来種々
の材料が使用されている。例えばテルル等のカルコゲン
元素又はこれらの化合物が光記録媒体材料としてよく使
用されている(特公昭47−26897号公報参照)。とくに
テルル−セレン系合金が光記録媒体材料としてよく使用
されている(特公昭54−41902号公報,特公昭57−7919
号公報,特公昭57−56068号公報参照)。 近年,記録装置を小型化するため,レーザ光源として
は半導体レーザが使用されてきている。半導体レーザは
発振波長帯が8000Å前後である。テルル−セレン系合金
はこの波長帯にも比較的よく適合し,適度な反射率と適
度な吸収率が得られる{フィジカステイタスソリダ
イ,,189,1964(phys.stat.sol.,189,1964)参
照}。 第1図はこのテルル−セレン系合金を光記録層として
用いた光記録媒体の一例を示している。基板1に隣接し
てテルル−セレン系合金よりなる記録層21が設けられて
いる。記録用レーザ光は基板1を通して記録層21に集光
照射され,ピット22が形成される。基板1としてはポリ
カーボネート,ポリオレフィン,ポリメチルペンテン,
アクリル,エポキシ樹脂等の合金樹脂やガラスが使用さ
れる。基板1には,ピットが同心円状あるいはスパイラ
ル状に一定間隔で精度よく記録されるように,通常,案
内溝が設けられている。 レーザビーム径程度の幅の溝に光が入射すると光は回
折され,ビーム中心が溝からずれるにつれて回折光強度
の空間分布が変化する。この変化を検出してレーザビー
ムを溝の中心に入射させるようにサーボ系が構成されて
いる。溝の幅は通常0.3〜1.3μmであり,溝の深さは使
用するレーザ波長の1/20から1/4の範囲に設定される。
集光に関しても同様にサーボ系が構成されている。 情報の読み出しは,記録のときよりも弱いパワーのレ
ーザ光をピット上を通過するように照射することによ
り,ピットの有無に起因する反射率の変化を検出して行
なう。 〔発明が解決しようとする問題点〕 しかしながら,テルル−セレン合金膜では良好な品質
の記録再生信号を安定に得られなかった。 一方,本発明者は記録層をテルルとセレンと窒素とを
主成分とすることにより,信号品質が良好となることを
見出し,すでに提案している。本発明はこれをさらに改
善したものであり,耐候性がよくかつ高感度で良好な品
質の信号を安定に得ることのできる光記録媒体を提供す
ることを目的とする。 〔問題点を解決するための手段〕 本発明の光記録媒体は,基板と,前記基板上に形成さ
れ,レーザ光によって一部が選択的に除去されることで
情報を記録する記録層とを有する光記録媒体において,
前記記録層はテルルと,セレンと,窒素と,ルテニウ
ム,ロジウム,オスミウム,イリジウム,及び白金から
なる群から選ばれた少なくとも1種の元素とからなるこ
とを特徴とする。 〔作用〕 記録層をテルルとセレンと窒素とを主成分とにするこ
とにより耐候性がよくかつ高感度でかつ良好な品質の信
号の光記録媒体が得られる。この媒体が高感度でかつ良
好な品質の信号が得られる理由は,膜中に窒素とカルコ
ゲン元素との化合物が生成されることにより,孔形成記
録の初期段階である小穴の形成が比較的弱いパワーのレ
ーザ光の照射で行なわれ得ることにある。さらにテルル
とセレンと窒素とに,ルテニウム,ロジウム,オスミウ
ム,イリジウム,白金からなる群から選ばれた少なくと
も1種の元素を添加することにより,ピットが大きく拡
がらずに形成されるようになるため,良好な記録再生特
性が安定に得られるようになる。 〔実施例〕 以下本発明の実施例について説明する。 100℃で2時間アニール処理した内径15mm,外径130mm,
厚さ1.2mmの案内溝付きポリカーボネート樹脂ディスク
基板上に,テルルとセレンとルテニウムとからなる複合
ターゲットをアルゴンと窒素との混合ガスでマグネトロ
ンスパッタして,テルルとセレンと窒素とルテニウムを
原子数パーセントでおよそ74対19対4対3である250Å
厚の層を作製した。しかる後,温度85℃,相対湿度80%
の環境に12時間保存して光記録媒体を作製した。 この光ディスクの基板入射における波長8300Åの反射
率を測定したところ,約27%であった。波長8300Åの半
導体レーザ光を基板を通して入射し,記録層上で1.6μ
mφ程度に絞り,媒体線速度5.65m/sec,記録周波数3.77
MHz,記録パルス幅70nsec,記録パワー8.0mWの条件で記録
し,0.7mWで再生した。バンド幅30kHzのキャリアーとノ
イズとの比(C/N)は47dBと良好であった。又,多数枚
の光記録媒体を作製しても上記記録再生特性は安定に得
られた。又,記録再生装置を他のものに変更しても上記
特性は安定に得られた。これらの光記録媒体を70℃,80
%の高温高湿度の環境に60時間保存した後,上記特性を
調べたが変化はなく,耐候性に優れた光記録媒体である
ことが確認された。 同様の方法で,ロジウム,オスミウム,イリジウム,
白金を添加したところ,ルテニウムと同様に効果のある
ことがわかった。ただし添加量は原子数パーセントで20
パーセント未満が記録再生特性,耐候性の観点から望ま
しい。 記録層の厚さは100Åから1000Åの範囲が記録再生特
性の観点から望ましく,セレンの含有量は原子数パーセ
ントで2パーセント以上40パーセント未満の範囲が記録
再生特性,耐候性の観点から望ましく,窒素の含有量は
原子数パーセントで2パーセント以上20パーセント未満
が記録再生特性,耐候性の観点から望ましい。 成膜方法は,スパッタリング法の他に,反応性蒸着
法,イオンプレーティング法,イオンビームデポジショ
ン法等でもよい。 本記録層と基板との間に,酸化物,窒化物,フッ化
物,炭化物,硫化物またはホウ化物で形成された層を少
なくとも1層設けてもよい。この場合,記録パワー変動
に対する余裕度が大きくなり,トラッキングやフォーカ
スのサーボが安定になることがある。 〔発明の効果〕 以上説明したように本発明の光記録媒体は,耐候性が
よくかつ高感度で良好な品質の信号を安定に得ることが
できる。
Description: TECHNICAL FIELD The present invention relates to an optical recording medium on which information can be recorded and reproduced by a laser beam. [Prior Art] An optical disk memory, which records and reproduces information on a medium with a laser beam, has an excellent feature as a large-capacity recording device because of its high recording density. For this optical recording medium material, tantalum and lead were first used (see Science, 154, 1550, 1966). Since then, various materials have been used. For example, a chalcogen element such as tellurium or a compound thereof is often used as an optical recording medium material (see Japanese Patent Publication No. 47-26897). In particular, tellurium-selenium alloys are often used as materials for optical recording media (Japanese Patent Publication No. 54-41902 and Japanese Patent Publication No. 57-7919).
(See Japanese Patent Publication No. 57-56068). In recent years, semiconductor lasers have been used as laser light sources in order to reduce the size of recording devices. A semiconductor laser has an oscillation wavelength band of about 8000 °. Tellurium -. Selenium alloys also relatively well suited to this wavelength band, appropriate reflectance and moderate absorption rate is obtained {Physica status warp die, 7, 189,1964 (phys.stat.sol 7, 189 , 1964)}. FIG. 1 shows an example of an optical recording medium using this tellurium-selenium alloy as an optical recording layer. A recording layer 21 made of a tellurium-selenium alloy is provided adjacent to the substrate 1. The recording laser light is condensed and irradiated on the recording layer 21 through the substrate 1 to form pits 22. As the substrate 1, polycarbonate, polyolefin, polymethylpentene,
Alloy resins such as acrylic and epoxy resins and glass are used. The substrate 1 is usually provided with a guide groove so that pits are recorded concentrically or spirally at a constant interval with high accuracy. When light is incident on a groove having a width of about the laser beam diameter, the light is diffracted, and the spatial distribution of the intensity of the diffracted light changes as the beam center shifts from the groove. A servo system is configured to detect this change and cause the laser beam to enter the center of the groove. The width of the groove is usually 0.3 to 1.3 μm, and the depth of the groove is set in the range of 1/20 to 1/4 of the laser wavelength to be used.
A servo system is similarly configured for focusing. Information is read by irradiating a laser beam having a weaker power than that at the time of recording so as to pass through the pit, and detecting a change in reflectance due to the presence or absence of the pit. [Problems to be Solved by the Invention] However, the tellurium-selenium alloy film could not stably obtain a recording / reproducing signal of good quality. On the other hand, the present inventors have found that the signal quality is improved by using tellurium, selenium, and nitrogen as main components of the recording layer, and have already proposed the same. An object of the present invention is to further improve the above, and an object of the present invention is to provide an optical recording medium having good weather resistance, high sensitivity, and capable of stably obtaining a signal of good quality. [Means for Solving Problems] An optical recording medium of the present invention comprises a substrate and a recording layer formed on the substrate and recording information by selectively removing a part of the substrate by laser light. In the optical recording medium having
The recording layer is characterized by containing tellurium, selenium, nitrogen, and at least one element selected from the group consisting of ruthenium, rhodium, osmium, iridium, and platinum. [Operation] By using the tellurium, selenium, and nitrogen as the main components in the recording layer, an optical recording medium with good weather resistance, high sensitivity, and good quality can be obtained. The reason that this medium has high sensitivity and good signal quality is that the formation of a compound of nitrogen and a chalcogen element in the film makes the formation of small holes, which is the initial stage of pore formation recording, relatively weak. That is, it can be performed by irradiating a high power laser beam. Furthermore, by adding at least one element selected from the group consisting of ruthenium, rhodium, osmium, iridium, and platinum to tellurium, selenium, and nitrogen, pits can be formed without greatly expanding. Good recording and reproducing characteristics can be obtained stably. [Examples] Examples of the present invention will be described below. Inner diameter 15mm, outer diameter 130mm, annealed at 100 ℃ for 2 hours,
A composite target consisting of tellurium, selenium, and ruthenium was magnetron sputtered with a mixed gas of argon and nitrogen on a polycarbonate resin disk substrate with a guide groove having a thickness of 1.2 mm, and tellurium, selenium, nitrogen, and ruthenium were contained in atomic percentages of several percent. Is about 74: 19: 4: 3, which is 250Å
A thick layer was made. After that, temperature 85 ℃, relative humidity 80%
An optical recording medium was prepared by storing it in the environment for 12 hours. The reflectance of this optical disk at the wavelength of 8300Å when it was incident on the substrate was measured to be about 27%. A semiconductor laser beam with a wavelength of 8300Å is incident through the substrate, and a 1.6μ
Aperture to about mφ, medium linear velocity 5.65m / sec, recording frequency 3.77
Recording was performed under the conditions of MHz, recording pulse width of 70 nsec, and recording power of 8.0 mW, and reproduction was performed at 0.7 mW. The carrier-to-noise ratio (C / N) with a bandwidth of 30 kHz was as good as 47 dB. Further, even when a large number of optical recording media were manufactured, the above-mentioned recording / reproducing characteristics were stably obtained. Further, even if the recording / reproducing device was changed to another device, the above characteristics were stably obtained. These optical recording media are kept at 70 ° C, 80
% After storage in an environment of high temperature and high humidity of 60%, the above characteristics were examined, but there was no change, and it was confirmed that the optical recording medium was excellent in weather resistance. In the same way, rhodium, osmium, iridium,
When platinum was added, it was found to be as effective as ruthenium. However, the amount added is 20 in terms of the number of atoms.
Less than percent is desirable from the viewpoint of recording / reproducing characteristics and weather resistance. The thickness of the recording layer is desirably in the range of 100 to 1000 mm from the viewpoint of recording / reproducing characteristics. The selenium content is preferably in the range of 2% to less than 40% by atom number in terms of recording / reproducing characteristics and weather resistance. Is preferably 2% or more and less than 20% in terms of atomic percent from the viewpoint of recording / reproducing characteristics and weather resistance. The film formation method may be a reactive evaporation method, an ion plating method, an ion beam deposition method, or the like, in addition to the sputtering method. At least one layer made of oxide, nitride, fluoride, carbide, sulfide, or boride may be provided between the recording layer and the substrate. In this case, the margin for the fluctuation of the recording power becomes large, and the servo of the tracking and the focus may become stable. [Advantages of the Invention] As described above, the optical recording medium of the present invention has stable weather resistance, high sensitivity, and good quality signals.

【図面の簡単な説明】 第1図は光記録媒体の一例を示す部分断面図である。 1……基板,21……記録層,22……ピット。[Brief description of the drawings] FIG. 1 is a partial sectional view showing an example of an optical recording medium. 1 ... substrate, 21 ... recording layer, 22 ... pits.

Claims (1)

(57)【特許請求の範囲】 1.基板と,前記基板上に形成され,レーザ光によって
一部が選択的に除去されることで情報を記録する記録層
とを有する光記録媒体において,前記記録層はテルル
と,セレンと,窒素と,ルテニウム,ロジウム,オスミ
ウム,イリジウム,及び白金からなる群から選ばれた少
なくとも1種の元素とからなることを特徴とする光記録
媒体。
(57) [Claims] In an optical recording medium having a substrate and a recording layer which is formed on the substrate and selectively records a part of the laser beam to record information, the recording layer comprises tellurium, selenium, and nitrogen. , Ruthenium, rhodium, osmium, iridium, and platinum, and at least one element selected from the group consisting of the optical recording medium.
JP62169223A 1987-07-07 1987-07-07 Optical recording medium Expired - Fee Related JP2689429B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62169223A JP2689429B2 (en) 1987-07-07 1987-07-07 Optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62169223A JP2689429B2 (en) 1987-07-07 1987-07-07 Optical recording medium

Publications (2)

Publication Number Publication Date
JPS6414084A JPS6414084A (en) 1989-01-18
JP2689429B2 true JP2689429B2 (en) 1997-12-10

Family

ID=15882502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62169223A Expired - Fee Related JP2689429B2 (en) 1987-07-07 1987-07-07 Optical recording medium

Country Status (1)

Country Link
JP (1) JP2689429B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5183800A (en) * 1987-07-15 1993-02-02 Sharp Kabushiki Kaisha Interconnection method for semiconductor device comprising a high-temperature superconductive material
US8176648B2 (en) * 2008-10-08 2012-05-15 Bret Bradley Construction bracket

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH051747A (en) * 1991-06-25 1993-01-08 Nissan Motor Co Ltd Transmission belt

Also Published As

Publication number Publication date
JPS6414084A (en) 1989-01-18

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