JP2627393B2 - Display panel prober - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a prober for a display panel, and more particularly to a prober used for inspecting a large liquid crystal display panel.

[0002]

2. Description of the Related Art As a prober for a display panel, Japanese Patent Laid-Open Publication No.
One disclosed in Japanese Patent Publication No. 218472 is known.
FIG. 5 is a plan view schematically showing the display panel prober. The display panel prober includes a plurality of probe assemblies 10, which are fixed to a mounting plate 12. Each probe assembly 10 has a probe needle support 14 on which the base ends of a plurality of probe needles 16 are fixed. Probe needle 1
Reference numerals 6 are arranged so as to match the electrodes to be measured of the liquid crystal display panel 18. Each probe assembly 10 is equipped with a manipulator 20 that enables adjustment of the tip position of the probe needle 16. The manipulator 20 enables the probe needle support 14 to be finely moved in the X, Y, and Z directions (perpendicular to the plane of the paper), and also adjusts the θ rotation (rotation about the Y axis). I have to.

This display panel prober has an advantage that it can cope with an increase in the number of electrodes due to an increase in the screen size of the display panel by a combination of a probe assembly having a relatively small number of probe needles. For example, in a large-sized liquid crystal display panel, the number of electrodes arranged on one side of the display panel may be several hundred to several thousand, but each side is divided into a plurality of probe assemblies as described above. By doing so, the positioning of the probe needle can be performed easily and accurately.

The operation of the display panel prober will be briefly described. First, before starting the inspection of the liquid crystal display panel, the position of the probe needle is adjusted in each probe assembly 10. That is, after the liquid crystal display panel 18 is placed at the inspection position, the probe needle support 14 is finely adjusted in the XYZ direction and the θ rotation direction using the manipulators 20 of the respective probe assemblies 10. Thereby, the probe needle 1 of each probe assembly 10
6 is correctly positioned with respect to the electrode to be measured of the liquid crystal display panel 18. When such an adjustment operation is completed, all the probe assemblies can simultaneously contact the electrodes to be measured of the liquid crystal display panel. Thereafter, the liquid crystal display panel is moved in the Z direction to apply a predetermined overdrive amount to the probe needle, and then a predetermined test (for example, a full lighting test of the liquid crystal display panel) is performed. Note that the same type of liquid crystal display panel can be inspected one after another without performing the above-described adjustment work again.

[0005]

The substrate of the liquid crystal display panel has variations in thickness and undulation.
This is absorbed by the deflection of the probe needle. At that time, it is necessary to set the deflection amounts of all the probe needles within a range of a predetermined overdrive amount. However, in recent years,
As the size of the liquid crystal display panel increases, the variation in the thickness and undulation of the substrate tends to increase. As a result, when continuously inspecting a large number of liquid crystal display panels, even when the above-described conventional display panel prober is used, an overdrive amount greater than a set value may be applied to a probe needle of a specific probe assembly. If this happens, the probe needle will be subjected to a load exceeding the limit, causing problems such as deformation beyond the elastic limit, reduced durability, and extreme damage, resulting in extremely high contact reliability. descend.

[0006] With respect to a normal inspection apparatus using a probe needle, a technique for making the load applied to the probe needle constant is known as follows. JP-A-62-2
According to the technology disclosed in Japanese Patent No. 57743, a constant load is applied to the probe needle of the probe card using the pressure sensor and the fluid insulator. In addition, Japanese Unexamined Patent Publication No.
According to the technology disclosed in JP-A-212744, a constant load is applied to the probe needle by moving the probe needle support by detecting the load acting on the probe needle by the piezoelectric element. Further, Japanese Unexamined Patent Application Publication No. 3-273
According to the technology disclosed in Japanese Patent Application Publication No. 168 and Japanese Patent Application Laid-Open No. 4-262263, a constant load is applied to the probe needle by supporting the probe needle support with a spring.

An object of the present invention is to provide a prober for a display panel having a plurality of probe assemblies on which a manipulator is mounted, so that unnecessary load is not applied to the probe needles.

[0008]

According to a first aspect of the present invention, a plurality of probe assemblies each having a plurality of probe needles arranged so as to be compatible with electrodes to be measured on a display panel, and the plurality of probe assemblies are attached. A mounting plate which allows the probe needles of each probe assembly to simultaneously contact the electrodes to be measured of the display panel,
A display panel prober including a manipulator mounted on each probe assembly and capable of adjusting the tip position of the probe needle, wherein a load absorbing device is provided between the probe needle support supporting the probe needle and the manipulator. Things.

The manipulator mounted on each probe assembly is for adjusting the tip position of the probe needle, and can move and adjust the probe needle support at least two-dimensionally in a plane parallel to the display panel. Things. Preferably, the probe needle support can be three-dimensionally moved and adjusted or rotated. The load absorbing device according to the present invention is for preventing an excessive load from being applied to the probe needle, and various forms can be considered as a mechanism for absorbing the load.

According to a second aspect of the present invention, the load absorbing device according to the first aspect of the present invention comprises a compression spring which is compressed in advance by a desired set load. A preload is applied to the manipulator to the probe needle support by the compression spring in the direction opposite to the direction of the load received from the electrodes of the display panel by the compression spring.

According to a third aspect of the present invention, the load absorbing device according to the first aspect of the present invention is constituted by two elastic plates arranged in parallel with each other at intervals in the direction of the load applied to the probe needle. The probe needle support is connected to the manipulator via the elastic plate.

According to a fourth aspect of the present invention, there is provided the load absorbing device according to the first aspect of the present invention, wherein a sensor for detecting the contact of the probe needle with the electrode to be measured and a display for relatively moving the display panel toward the mounting plate. It comprises a panel relative moving device and a support moving device for moving the probe needle support in the direction of load with respect to the manipulator. Then, the probe needle support is moved in a direction in which the load of the probe needle is reduced in synchronization with the relative movement of the display panel from the point of contact detection by the sensor. Here, as a display panel relative moving device that relatively moves the display panel toward the mounting plate, a mechanism that moves the liquid crystal panel in the direction of the mounting plate while keeping the mounting plate stationary may be used, Conversely, a mechanism may be used in which the liquid crystal panel is stationary and the mounting plate is moved in the direction of the liquid crystal panel.

According to a fifth aspect of the present invention, in the load absorbing device according to the first aspect of the present invention, the sensor for detecting that the probe needle has contacted the electrode to be measured and the probe needle support are moved in the direction of the load with respect to the manipulator. And a support moving device. Then, in each probe assembly, from the point of contact detection by the sensor,
The probe needle support is moved by a predetermined overdrive amount in the direction of the display panel.

[0014]

When a probe having a plurality of probe assemblies is pressed against a large number of electrodes of a large display panel,
It is expected that the load applied to the probe needle from the electrode differs depending on the probe assembly. When an excessive load is applied to the probe needle of the specific probe assembly, an excessive load is applied to the probe needle because the load absorbing device provided between the probe needle support and the manipulator absorbs this. Can be prevented.

[0015]

1A and 1B show one probe assembly constituting a prober for a display panel according to a first embodiment of the present invention, wherein FIG. 1A is a plan view of the probe assembly, and FIG. 1B is a side view thereof. It is. FIG. 2A is a front view of the probe assembly, and FIG. 2B is a perspective view of the load absorbing device. The overall configuration of the display panel prober is the same as that of the prior art shown in FIG. 5, and the difference between the prior art and the present invention lies in the structure of each probe assembly.

The probe assembly shown in FIGS. 1 and 2 uses a compression coil spring as a load absorbing device. In FIG. 1B, the manipulator base 22
Is fixed to the mounting plate 26 by screws 24 (see FIG. 1A), and at this time, the probe needle support 28 is positioned in the Y direction. The X frame 30 is slidably mounted on the manipulator base 22 via an X slide 32. When the X cam 34 eccentric with respect to the rotation center is rotated, the X frame 30
Move in the direction. The X frame 30 has a long hole in the X direction, and a screw 36 passes through the long hole, and the tip of the screw 36 meshes with the manipulator base 22. X
When the positioning of the frame 30 in the X direction is completed, the screws 3
The X frame 30 is fixed to the manipulator base 22 by tightening 6.

The Z frame 42 is attached to the X frame 30 so as to be vertically slidable via a Z slide 40. One end of a tension coil spring 37 is fixed to the end of the X frame 30 in the Y direction. The spring 37 passes through the inside of the through hole of the Z frame 42, and the other end is fixed to the upper surface of the intermediate block 27. The Z frame 42 is pulled upward by the tension coil spring 37 via the intermediate block 27. On the other hand, a steel ball is embedded in the upper surface of the Z frame 42, and the steel ball is in contact with the lower end of the Z adjustment screw 38. Therefore, when the Z adjustment screw 38 is rotated, the Z frame 42 moves in the Z direction. Thus, the origin of the probe needle support 28 in the Z direction is adjusted.

In FIG. 2A, an upper protruding portion 25 is provided on the upper surface of the intermediate block 27, and the upper protruding portion 25 is rotatably supported by a hinge shaft 39. The shaft 39 is fixed to the Z frame 42. Therefore, the intermediate block 27 is rotatable around the hinge axis 39 by θ. A steel ball is embedded in the upper surface of the intermediate block 27, and the steel ball is in contact with the lower end of the hinge adjustment screw 44 (see FIG. 1B). Therefore, when the hinge adjustment screw 44 is rotated, the intermediate block 27 rotates around the hinge shaft 39. Thereby, the alignment of the tip of the probe needle and the liquid crystal substrate is adjusted in parallel.

In this specification, the XYZ directions and the θ rotation are defined as follows. The X direction refers to a direction in which the probe needles are arranged in a plane parallel to the liquid crystal display panel. The Y direction refers to a direction perpendicular to the X direction in a plane parallel to the liquid crystal display panel. The Z direction refers to a direction perpendicular to the liquid crystal display panel. θ rotation refers to rotation about the Y axis.

Returning to FIG. 1B, in this embodiment, the manipulator mounted on the probe assembly includes a manipulator base 22, an X frame 30, an X slide 32, a Z slide 40, a Z frame 42, an intermediate block 27, and the like. It is composed of As described above, this manipulator can perform position adjustment in the X-axis direction and Z-axis direction and adjustment in the θ rotation direction. Note that the Y-axis position adjustment mechanism is not particularly mounted. Because the Y-axis direction is
This is because they are aligned with the longitudinal direction of the electrodes of the liquid crystal display panel, and even if the probe needle is shifted to some extent in the Y-axis direction, there is no problem in contacting the electrodes. Of course, a position adjustment mechanism in the Y-axis direction may be mounted as needed.

A printed board 46 and a needle holder 50 are fixed to the lower surface of the probe needle support 28 with an adhesive. An intermediate portion of the probe needle 48 is fixed to a needle holder 50 with an adhesive, and a base end of the probe needle 48 is soldered to a wiring pattern of the printed circuit board 46. A flexible wiring board 52 is connected to the wiring pattern of the printed board 46 by crimping.

Next, a description will be given of a load absorbing device which is a characteristic part of this embodiment. The intermediate block 27 is attached to the Z frame 42 so as to be rotatable by θ as described above. A probe needle support 28 is elastically attached to the intermediate block 27 with a predetermined preload. That is, the probe needle support 28 includes two screw shafts 5 having compression coil springs 54.
6 and one thick guide shaft 58 are connected to the intermediate block 27. The screw shaft 56 is fixed to the upper surface of the probe needle support 28, and its tip is threaded and meshes with the nut 60. A recess is formed in the lower surface of the intermediate block 27, and the upper end of the compression coil spring 54 is housed in the recess. The other end of the compression coil spring 54 is connected to the probe needle support 28.
Is in contact with the upper surface of the When the nut 60 is tightened to a certain extent, the compression coil spring 54 is in an appropriately compressed state, and a load is applied to the probe needle support 28 downward by the compression coil spring 54. The preload on the probe needle support 28 is
It can be adjusted by the degree of tightening. FIG. 2B is a perspective view of the load absorbing device.

In FIG. 1B, when the probe needles 48 are pressed against the electrodes of the liquid crystal display panel, each probe needle 48 receives a load from the electrodes. As a result, the total load applied to the plurality of probe needles 48 attached to the probe assembly acts upward on the probe needle support 28. When the total load is smaller than the preload, the probe needle support 28 does not move with respect to the intermediate block 27. When the total load becomes larger than the preload, the probe needle support 28 moves upward against the compression coil spring 54. As a result, it is possible to prevent a load greater than the preload from acting on the probe needle support 28. Here, the limit load that one probe needle 48 can safely receive is F, and the probe needle support 2
Assuming that the number of probe needles 48 fixed to 8 is N,
If the preload of the probe needle support 28 is set to N × F, each probe needle 48 will not receive a load exceeding the limit load.

A thick guide shaft 58 is fixed to the upper surface of the probe needle support 28, and can slide vertically through a through hole formed in the intermediate block 27. Thanks to the guide shaft 58, the probe needle support 28 can move in the vertical direction without shifting in the XY directions.

The dimension of the probe assembly in the X direction is 2
It is about 0 to 40 mm, and the arrangement pitch of the probe needles 48 is, for example, 0.1 mm. When probe needles are arranged at a pitch of 0.1 mm on a probe assembly having a width of 20 mm, 200 probe needles can be attached to one probe assembly. In this case, 1
Assuming that the limit load applied to these probe needles is 15 g, the limit load of the probe needle support 28 is about 3 kg. Therefore, the above-mentioned preload may be set to about 3 kg. In practice, a slightly smaller preload may be used in consideration of safety.

Next, a second embodiment of the present invention will be described.
FIG. 3A is a side view of the probe assembly according to the second embodiment, and FIG. 3B is a perspective view of the load absorbing device. The load absorbing device of this embodiment has two elastic plates 62,
64. In the intermediate block 27a, the first
The elastic plate support block 66 is fixed, the second elastic plate support block 68 is fixed to the probe needle support 28a, and two elastic plates 62, 64 are provided between the two elastic plate support blocks 66, 68. Are combined. These elastic plates 62 and 64 are arranged in parallel with each other at intervals in the direction of the load applied to the probe needle 48a (that is, the Z direction). These elastic plates 62 and 64 are formed of thin plates having spring properties.

In this embodiment, the probe needle 48a
Receives a load from the electrodes of the liquid crystal display panel, the probe needle support 28a moves upward by the action of the elastic plate according to the total load. As a result, the load received by the probe needle 48a depends on the deflection of the probe needle itself and the elastic plates 62 and 64.
Dispersed with the deflection. By the way, if only one elastic plate is used, the probe needle support 28a rotates about the connecting point between the first elastic plate support block 66 and the elastic plate, but in this embodiment, two probe needle supports 28a rotate. , The probe needle support 28a moves substantially parallel upward. When the probe needle support 28 moves upward, the elasticity of the elastic plate causes the probe needle support 28 to move upward.
a retracts slightly in the direction of arrow 70. Due to such retreat, the tip of the probe needle 48a slightly slides on the electrode to self-clean the contact portion between the probe needle and the electrode,
A clean contact surface is obtained. Therefore, such a slight retreat is rather preferred. Other structures of the embodiment shown in FIG. 3 are the same as those of the embodiment shown in FIG.

Next, a third embodiment of the present invention will be described.
FIG. 4 is a side view of the probe assembly according to the third embodiment. The load absorbing device of this embodiment includes a sensor for detecting that the probe needle has come into contact with the electrode, and a pulse motor for moving the probe needle support.
A pulse motor 72 is mounted on the upper surface of the X frame 30b, and its output shaft is connected to a screw shaft 76 via a coupling 74. The Z frame 42b has a screw shaft 76
, And can move up and down in the Z direction along the Z slide 40b with the rotation of the screw shaft 76. The intermediate block 27b is rotatably attached to the Z frame 42b as in the embodiment of FIG. However, unlike the embodiment of FIG. 1, the upper end of the tension coil spring 37b is fixed near the upper end of the Z frame 42b. The probe needle support 28b is fixed to the intermediate block 27b. Of the probe needles 48b, the two probe needles at both ends in the X direction also serve as sensors for detecting contact with the electrodes. That is, when one of these two probe needles at both ends comes into contact with the electrode of the liquid crystal display panel, the contact signal is sent to the control device.

Next, the operation of this embodiment will be described. Initially, probe needles 48b of all probe assemblies
Are separated from the electrodes of the liquid crystal display panel. The mounting plate 26b on which the probe assembly is mounted is always in a stationary state. On the other hand, when the liquid crystal display panel is slowly lifted, the probe needle 48b of one of the probe assemblies first contacts the electrode of the liquid crystal display panel. At this time, a contact signal is sent from the probe needle 48b serving as a sensor to the control device. Then, from this point on, a drive signal is sent to the pulse motor 72 of the probe assembly, and the probe needle support 28b of the probe assembly is synchronized with the upward movement of the liquid crystal display panel.
Is increased so that the pulse motor 72 rotates. That is, as the liquid crystal display panel rises, the probe needle support 28b also rises, and as a result, almost no load acts on the probe needle 48b. Similar operations occur one after another in each probe assembly. When the contact signal is obtained in the last probe assembly, the drive of the pulse motors 72 of all the probe assemblies is stopped. At this point, the probe needles 48b of all the probe assemblies are in light contact with the electrodes of the liquid crystal display panel. That is, a large load is not applied only to the probe needle of the specific probe assembly. By further raising the liquid crystal display panel by a predetermined overdrive amount from this state, a predetermined contact pressure is applied between the probe needle 48b of each probe assembly and the electrode.

In the embodiment shown in FIG. 4, instead of raising the liquid crystal display panel, the liquid crystal display panel may be stopped and the mounting plate 26b may be lowered. Other structures of the embodiment shown in FIG. 4 are the same as those of the embodiment shown in FIG.

Next, a fourth embodiment of the present invention will be described.
The mechanical structure of the fourth embodiment is the same as that shown in FIG. However, the control method of the pulse motor is different.
Therefore, the operation of the fourth embodiment will be described with reference to FIG. In this embodiment, both the mounting plate 26b and the liquid crystal display panel are kept stationary. In each probe assembly, the pulse motor 72 is driven to slowly lower the probe needle support 28b. When a contact signal is obtained from the probe needle 48b serving also as a sensor, the pulse motor 72 is driven by a predetermined number of pulses from that point on to drive the probe needle support 28 by a predetermined overdrive amount.
b is lowered and stopped there. As a result, a predetermined contact pressure is applied between the probe needle 48b of the probe assembly and the electrode. The same operation occurs for other probe assemblies, and a predetermined contact pressure is obtained in all probe assemblies.

As another embodiment, a configuration may be adopted in which the load applied to the probe needle is detected by a piezoelectric element, and when the load exceeds a predetermined load, the pulse motor is driven to raise the probe needle support. .

In the above description of the embodiment, the case where the liquid crystal display panel is inspected has been described as an example. However, the display panel prober of the present invention can be applied to display panels other than the liquid crystal panel. For example, a plasma display panel,
It can also be applied to electroluminescent panels.

[0034]

According to the display panel prober of the present invention, since a load absorbing device is provided between the manipulator of each probe assembly and the probe needle support, an excessive load is applied to the probe needle in each of the plurality of probe assemblies. This can be prevented.

[Brief description of the drawings]

FIG. 1 is a plan view and a side view of a probe assembly according to a first embodiment of the present invention.

FIG. 2 is a front view of the probe assembly of the first embodiment and a perspective view of a load absorbing device.

FIG. 3 is a side view of a probe assembly according to a second embodiment and a perspective view of a load absorbing device.

FIG. 4 is a side view of a probe assembly according to a third embodiment.

FIG. 5 is a plan view of a conventional display panel prober.

[Explanation of symbols]

 Reference Signs List 22 manipulator base 26 mounting plate 27 intermediate block 28 probe needle support 30 X frame 32 X slide 40 Z slide 42 Z frame 48 Probe needle 54 Compression coil spring 56 Screw shaft 58 Guide Shaft 60 ... nut

Claims (3)

(57) [Claims] 1. A plurality of probe assemblies each having a plurality of probe needles arranged so as to match an electrode to be measured of a display panel, and a plurality of probe assemblies to which the plurality of probe assemblies can be attached, and A probe plate for a display panel, comprising: a mounting plate for simultaneously bringing the probe needles of each probe assembly into contact with each other; and a manipulator mounted on each probe assembly to adjust the tip position of the probe needle. only set the load absorbing device between a supporting probe needle support and the manipulator, the load absorbing device, the probe needle into contact with the measuring electrode
And a display panel attached to the mounting plate.
Display panel relative movement device that relatively moves toward
And the probe needle support is loaded against the manipulator.
And a support moving device for moving the display panel in the direction.
Direction in which the load on the probe needle is reduced in synchronization with the relative movement
A prober for a display panel , wherein a probe needle support is moved . 2. A plurality of probes supported by a probe needle support.
The two probe needles at both ends of the lobe needle are the sensors
2. The display panel according to claim 1, wherein the display panel also serves as
Prober. 3. The support moving device according to claim 1 , wherein
Features a pulse motor mounted on the motor
The display panel display according to claim 1 or 2,
Ba.