JP2533339Y2 - Substrate rotation processing equipment - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION This invention relates to a thin substrate to be processed such as a semiconductor substrate or a glass substrate for liquid crystal (hereinafter simply referred to as a substrate).
And a rotary processing apparatus used for performing surface treatment by holding the substrate with a spin chuck.

[0002]

2. Description of the Related Art As this kind of surface treatment apparatus, for example, the apparatus shown in FIG. 6 (Japanese Utility Model Publication No. 63-50847, entitled "Semiconductor Device Manufacturing Apparatus") has been known. It is a spin chuck 101 that holds and rotates a substrate W, and a processing liquid discharge nozzle 100a that supplies a plurality of types of processing liquids to the substrate W held by the spin chuck 101.
100b, a chuck drive motor 105 for rotationally driving the spin chuck 101, an inner container 110 having a drain port 111 on the bottom and surrounding the periphery of the spin chuck 101, and a plurality of drain ports 121a. 121b
And an outer container 12 provided so as to surround the inner container 110.
0 and the inner container 110 is connected to the spindle 10 of the spin chuck 101.
3 through the protection cylinder 104, and the drain port 111 is connected to one of the drain ports 121a and 121b of the outer container 120.
And a rotating means 125 for selecting and facing the position, and configured to separate and collect a plurality of types of processing wastewater.

[0003]

In the above-mentioned prior art, the rotating means 125 is used to separate and collect a plurality of types of processing wastewater.
To rotate the inner container 110 horizontally, and set the single drain port 111 to one of the drain ports 121a and 121b of the outer container 120.
In this structure, there is the following inconvenience. I. Since there is only one drain port 111 and its opening area is small, it is not possible to quickly collect drain liquid. B. When the processing liquid discharge nozzle and the cleaning liquid supply nozzle are attached to the inner container 110 itself, the inner container 110 and the outer container 12
A deformable tube or the like that communicates with the nozzle must be provided between the nozzles, and this requires a considerable extra space. Also, the number of nozzles that can be attached is limited. C. Due to the structure of rotating the inner container 110, piping such as a tube is easily damaged by the rotation of the inner container 110, and it is difficult to connect and connect the exhaust duct to the inner container 110 itself. The exhaust of the car cannot be done smoothly. Also, even if an exhaust port is provided in the outer container 120, the inner container 1
Only indirect evacuation can be performed in the interior 10, and it is difficult to exhaust sufficiently quickly. The present invention has been made to solve such difficulties, without rotating the inner container,
Another object of the present invention is to make it possible to quickly separate and collect a plurality of types of wastewater.

[0004]

The present invention is configured as follows to solve the above-mentioned problems. That is, a spin chuck that holds and rotates the substrate, a chuck drive motor that rotates the spin chuck, a processing liquid discharge nozzle that supplies a plurality of types of processing liquid to the substrate held by the spin chuck, and a drain port at the bottom. Having an inner container provided to surround the periphery of the spin chuck, and an outer container having a plurality of drain ports at the bottom and provided to surround the inner container. In a substrate rotation processing apparatus configured to separate and collect a liquid, an inner container and an outer container are fixedly arranged, and a plurality of or arc-shaped or ring-shaped drain ports are provided at the bottom of the inner container to support a spin chuck. An opening is formed on a concentric circle around the axis, and a drainage flow gutter member is provided between the inner container and the outer container so as to be horizontally rotatable around the support shaft 3 of the spin chuck, and the drainage is performed. Gutter 1 for distribution
5 has a ring-shaped gutter groove 17 facing the liquid outlet 11 of the inner container on the upper surface thereof, and has a single drain flow outlet 18 communicating with the gutter groove 17 on the lower surface thereof. Rotation means is provided for selectively selecting the position of the drainage outlet of the gutter member to face the drain port of the outer container.

[0005]

[Operation] In the present invention, a plurality of or arc-shaped or ring-shaped drain ports are formed in a concentric circle centered on the spindle of the spin chuck at the bottom of the inner container. The area is sufficiently large. On the other hand, a ring-shaped gutter groove facing the drainage port of the inner container is formed in the upper surface of the drainage flow gutter member provided between the inner container and the outer container. The drainage flowing down from the drainage outlet having a large area is collected by this gutter without leakage. Therefore, if the drainage outlet of the gutter member is selected and faced to any of the drain ports of the outer container by rotating the gutter member in advance by the rotating means, the drainage flowing down from the inner container is provided. Is collected via a gutter member and flows down to a drain port selected from the drain flow port. Thus, the drainage can be quickly collected without rotating the inner container.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view of a rotation processing device according to a first embodiment of the present invention. The apparatus of this embodiment includes a spin chuck 1 that holds and rotates a substrate, a chuck driving motor 5 that rotates the spin chuck 1, and a plurality of types of processing liquids Q ₁ and Q ₂ on a substrate W held by the spin chuck 1. and the cleaning liquid discharge nozzle 8c-8d for supplying a plurality of processing liquid discharge nozzle 8a-8b and washings Q _3, Q ₄ supplies, a plurality of drain port 11, 11 at the bottom, around the spin chuck 1 An inner container 10 provided to surround the inner container 10, an outer container 20 having a plurality of drain ports 21a to 21d (21c and 21d are not shown) at the bottom and provided to surround the inner container 10, and an inner container 10; The drainage gutter member 15 interposed between the outer container 20 and the drainage outlet 18 of the drainage gutter member 15 is positioned at any of the drain ports 21 a to 21 d of the outer container 20. And turning means 25 Made by Bei it is composed plural kinds of processing liquid discharge Q ₁ · Q _2, and the cleaning liquid Q ₃ · Q ₄ and to separate and recover, respectively.

The spin chuck 1 is horizontally rotatably supported by a support shaft 3 which communicatively connects the boss 2 to a drive shaft of a drive motor 5, and is configured to rotate while sucking and holding the substrate W on its upper surface. I have.

The inner container 10 comprises a lower cup 10A fixed to the protective cylinder 4 of the support shaft 3 and an upper cup 10B which is configured to be separable from the lower cup 10A.
OB is separated and raised from the lower cup 10A, and the substrate W is attached to and detached from the spin chuck 1 during that time.

On the other hand, a cleaning liquid discharge nozzle 8 for spraying cleaning liquids Q ₃ and Q ₄ onto the lower surface of the substrate W to clean the lower cup 10A.
c · 8d is provided, and a plurality of drain ports 11 ·
11 is opened, and an exhaust port 14 is opened on the side. Each drain port 11 is formed in a long hole arc shape on a concentric circle centered on the support shaft 3 of the spin chuck 1 in order to secure a sufficiently large opening area and quickly discharge the processing drain liquid. Each drain port 11 has a mesh filter 1
2 is installed. The air flow F is caused to flow down from the upper opening 13 of the inner container 10, and the processing liquid mist is discharged from the exhaust port 14.

The drainage flow gutter member 15 supports a circular base frame 16 having a circular shape in a plan view on the protective cylinder 4 via a bearing 7 so as to be horizontally rotatable. Ring-shaped gutter groove 17 facing the long-hole arc-shaped drain port 11 of the vessel 10
To form a composed and projectingly provided a single drainage falling port 18 which communicates with the Toimizo 17 on the lower surface of Kaidomotowaku 16, each drainage Q ₁ ~ flowing down from a large drain port 11 opening area Q ₄ is collected without being leaked in the gutter groove 17 and is caused to flow down from the drainage flow outlet 18.

The rotation means 25 includes a drive motor 26 fixedly mounted on the lower surface of the outer container 20 via a fixture 23 and a bearing 24, a drive gear 27 fixedly mounted on a drive shaft of the drive motor 26, And a ring gear 28 fixedly mounted on the outer periphery of the rotation base frame 16. The drainage flow gutter member 15 is rotated so that the drainage flow-down port 18 is connected to one of the drain ports 21 a of the outer container 20. To 21b (21c and 21d are not shown). Outer container 2
In addition to the drain ports 21a to 21d, a drain port 21 for collecting drainage collected in the outer container 20 itself due to liquid leakage or the like is provided at the bottom of 0.

FIG. 2 is a fragmentary vertical sectional view of a rotary processing apparatus according to a second embodiment of the present invention. This embodiment device is
The upper opening 13 of the inner container 10 is opened and closed by an open / close lid 13A, and a gas discharge nozzle 9 for inert nitrogen gas N ₂ is attached to the open / close lid 13A, and a plurality of processing liquids are discharged to an upper cup 10B of the inner container 10. made by attaching a nozzle 8a · 8b, exhaust put the processing liquid mist flow down stream of inert nitrogen gas N ₂ inlet 1
4 so as to be discharged. In other respects, the configuration is the same as that of the first embodiment.

FIG. 3 is a longitudinal sectional view of a rotary processing apparatus according to a third embodiment of the present invention, and FIG. 4 is a plan view taken along line IV-IV of FIG. Hereinafter, differences between this embodiment and the previous embodiment will be described. The opening / closing lid 13A is provided on the upper side of the outer container 20 so as to be freely opened and closed. This is the opening and closing lid 13A 2 in the same manner as in gas discharge nozzle 9 is attached, the gas discharge by discharging the inert nitrogen gas N ₂ from the nozzle 9, and is configured to form a downflow F.

The spin chuck that rotates while holding the substrate W is a so-called mechanical spin chuck 31. This mechanical spin chuck 31 radially extends a plurality of horizontal arms 33 from an upper end boss portion 32 of the support shaft 3,
A pair of substrate supports 34 are erected at the distal ends of the opposed horizontal arms 33, and one of the substrate supports is fixed to the fixed support 3.
4a, the other substrate support is a movable support 34b, and the movable support 34b is
The substrate W is configured to rotate while holding the substrate W at the stepped portions of 4a and 34b. This mechanical spin chuck 31
According to this, the cleaning liquid discharged from the cleaning liquid discharge nozzles 8c and 8d is sufficiently supplied to the lower surface of the substrate W, and the lower surface of the substrate can be easily cleaned.

The inner container 40 includes a lower cup 4 fixed to the upper end of the protective cylinder 4 of the support shaft 3 via a frusto-conical fixing member 38.
0A and an upper cup 40B that is configured to be lowered and capable of being fitted into the lower cup 40A, and the upper cup 40B is fitted into the lower cup 40A as shown by the phantom line. W is mounted on the mechanical spin chuck 31, and the processing liquid is supplied to the substrate W from the processing liquid discharge nozzle 8 at a position indicated by a solid line to perform the surface treatment of the substrate.

On the bottom wall of the lower cup 40A, there are formed four elongated arc-shaped drain ports 11 concentrically with respect to the axis Z of the spin chuck 31, and an inner surface of the bottom wall is formed as follows. The processing liquid is formed so as to have a downward slope toward the arc-shaped liquid discharge port 11, and is configured to quickly flow down and discharge the processing liquid. Also, as shown in FIGS.
A ring-shaped exhaust chamber 41 is formed integrally with the peripheral wall of A. The exhaust chamber 41 communicates with the inside of the inner container 40 via a plurality of communication holes 42 equally spaced in plan view on the chamber inner wall 41a, and a forced exhaust duct 45 is connected to the exhaust chamber 41. . The communication hole 42 is formed along the inner surface of the bottom wall formed with a downward slope in order to facilitate the discharge of the processing liquid or the processing liquid mist. It may be formed on the inner wall 41a.

The inner container 40 is provided through the exhaust chamber 41.
The downflow F that has flowed down into the inner container 40 by exhausting the inside flows down uniformly after flowing down in the radial direction after coming into contact with the surface of the substrate W, so that each communication hole 42 and the ring-shaped exhaust chamber 41 Are sequentially discharged from the forced exhaust duct 45. As a result, the downflow F
1 is formed directly on the side wall of FIG.
The surface treatment quality of the substrate W is further improved as compared with the one having the openings 4. Further, the processing liquid contained in the downflow F is separated from the exhaust gas by sequentially passing the downflow F through the communication hole 42 and the exhaust chamber 41 formed along the inner surface of the bottom wall of the downward slope, Prevents removal of processing liquid. Thereby, useless consumption of the processing liquid can be suppressed.

The processing liquid discharge nozzle 8 is provided so as to be able to ascend and descend obliquely between a standby position indicated by a virtual line in FIG. 3 and a liquid supply position indicated by a solid line. For surface treatment of the substrate. The processing liquid discharge nozzle 8 is configured to supply a plurality of types of surface processing liquids by appropriately switching.
On the other hand, on the bottom wall of the lower cup 10A, as shown in FIG.
Two types of cleaning liquid discharge nozzles 8c and 8d are additionally provided. These form two cleaning systems each with four cleaning liquid discharge nozzles 8c and two cleaning liquid discharge nozzles 8d. Alternatively, the four nozzles 8c may be divided into two sets of two nozzles, and a total of three types of cleaning liquids may be used.
In that case, it is necessary to further increase the number of drain ports 21a to 21d of the outer container 20. Further, if one type of cleaning liquid is used for one nozzle, the number of drain ports can be increased by four, and a total of six types of cleaning systems can be configured. Thereby, it is constituted so that it can respond to a plurality of types of surface treatments. In addition, other drainage flow gutter members 15
And its rotating means 25 are configured in the same manner as in FIG.

FIG. 5 is a longitudinal sectional view showing a modification of the inner container. In the inner container 50, a ring-shaped exhaust chamber 51 is integrally formed on a peripheral wall portion, and a plurality of communication holes 52 are opened and opened at a height of the substrate W held by the spin chuck 1 on a chamber inner wall 51a. After the down flow F touches the surface of the substrate W, the down flow F spreads uniformly in the radial direction and flows into the exhaust chamber 51. Also,
A discharge hole 53 for the processing liquid is formed in the lower edge of the chamber inner wall 51a, and the processing liquid contained in the downflow F is separated in the exhaust chamber 51 and flows down from the discharge hole 53. Have been. In this case, the spin chuck 1 is provided so as to be able to move up and down, and the other points are configured similarly to FIG.

In the above embodiment, the drain port 11 of the inner container 10
Are formed, each drain port 11 is formed in the shape of a long hole arc having the support shaft 3 as the center of an arc, and each drain port 11 is provided with a mesh filter 12. However, the present invention is not limited to the above-described embodiment, and any device can be used as long as the drainage port 11 can be secured with a sufficiently large opening cross-sectional area and the treated wastewater can be quickly discharged while the inner container 10 is fixed. , One provided with two or more drain outlets, one provided with a long arc-shaped drain outlet, one provided with a ring-shaped drain outlet, etc. The means, the shape of the inner container, the arrangement and number of the processing liquid discharge nozzles, the shape of the outer container, the number of the drain ports, and the like can be variously modified within the scope of the present invention.

[0021]

[Effects of the invention] As is clear from the above description, in the present invention, a drain port with a sufficiently large opening area is provided at the bottom of the inner container.
A drainage flow gutter member having a ring-shaped gutter groove formed in a concentric circle centered on a spindle of the spin chuck and having a ring-shaped gutter groove facing the drainage port of the inner container is provided with an inner container and an outer container. Thus, the following effects can be obtained. I. The drainage liquid flowing down from the inner container can be separated for each of a plurality of types of drainage liquid and can be promptly collected without leakage. B. Since there is no need to rotate the inner container, even if a processing liquid discharge nozzle or cleaning liquid supply nozzle is fixed to the inner container itself, a deformable tube that communicates with the nozzle is piped between the inner container and the outer container. No extra space is needed to do so. Further, more nozzles can be provided than before. C. Since there is no need to rotate the inner container, there is no danger of damaging the piping of the nozzle, and it is easy to connect and connect the exhaust duct to the inner container itself. it can. D. When an exhaust chamber is provided on the peripheral wall of the inner container and air is exhausted through a communication hole or a communication slit formed in the inner wall of the chamber and the exhaust chamber, the downflow in the inner container becomes uniform, and the surface treatment quality of the substrate is improved. Improve further. In addition, useless consumption of the processing liquid can be suppressed.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a rotation processing device according to a first embodiment of the present invention.

FIG. 2 is a fragmentary vertical sectional view of a main part of a rotation processing device showing a second embodiment of the present invention.

FIG. 3 is a vertical sectional view of a rotation processing device according to a third embodiment of the present invention.

FIG. 4 is a cross-sectional plan view of a rotation processing device according to a third embodiment of the present invention.

FIG. 5 is a longitudinal sectional view showing a modified example of the inner container according to the present invention.

FIG. 6 is a longitudinal sectional view of a rotation processing device according to a conventional example.

[Explanation of symbols]

1, 31: Spin chuck, 3: Spindle spindle, 5: Chuck drive motor, 8
a to 8d: processing liquid discharge nozzle, 10/40: inner container,
Reference numeral 11: drainage outlet, 15: drainage gutter member, 17: ring-shaped gutter groove, 18: drainage outlet, 20: outer container, 21a / 21b ...
Drain port, 25: rotating means, 41, 51: exhaust chamber, 41a, 51a: chamber inner wall, 42: communication hole or slit, W: substrate.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hideyuki Taniguchi 1 480 Takamiyacho, Hikone City, Shiga Prefecture Dainippon Screen Manufacturing Co., Ltd.

Claims (2)

(57) [Scope of request for utility model registration] 1. A spin chuck that holds and rotates a substrate, a chuck drive motor that rotationally drives the spin chuck, a processing liquid discharge nozzle that supplies a plurality of types of processing liquid to the substrate held by the spin chuck, An inner container having a drain port and provided so as to surround the periphery of the spin chuck; and an outer container having a plurality of drain ports at the bottom and provided so as to surround the inner container. In the substrate rotation processing apparatus configured to separate and collect the processing wastewater, the inner container and the outer container are fixedly arranged, and a plurality of or arc-shaped or ring-shaped drainage ports are provided at the bottom of the inner container by a spin chuck. An opening is formed on a concentric circle centered on the support shaft of the spin chuck, and a drainage flow gutter member about the support shaft of the spin chuck is provided between the inner container and the outer container so as to be horizontally rotatable. The gutter member for liquid distribution is A ring-shaped gutter groove facing the drainage outlet of the inner container is recessed on the upper surface of the inner container, and a single drainage flow outlet communicating with the gutter groove is formed on the lower surface. A substrate rotation processing device provided with a rotating means for selecting a position of the substrate to a drain port of an outer container so as to face the drain port. 2. A method according to claim 1, wherein a ring-shaped exhaust chamber is provided on a peripheral wall of the inner container, and a plurality of communication holes or communication slits are formed in the inner wall of the chamber to communicate the exhaust chamber with the inner container. A substrate rotation processing apparatus according to any one of the preceding claims.