JP2531434B2 - Wire bonding apparatus and method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire bonding apparatus and method, and more particularly to a wire bonding apparatus and method corresponding to wire bonding using a covered wire.

With the increase in the density of semiconductor elements, a coated wire in which an insulating coating is applied to the gold wire has been developed in place of the gold wire used in the conventional wire bonding. Bonding using a covered wire can avoid short-circuit defects between adjacent wires, and thus can be applied to long wires, overleads, low loops, etc., and is advantageous for high-density mounting.

[0003]

2. Description of the Related Art FIG. 3 is a side view showing an example of a conventional wire bonding apparatus. The wire bonding apparatus shown in FIG. 3 includes a bonding tool 4, a horn 5, a swinging mechanism 6 for moving the horn 5, a bonding head portion including a wire cut clamper 7 and a torch rod 9, and a bonding head portion in a flat plane. X to exercise
The Y stage 10 is provided.

4 (1) to 4 (6) are wire bonding process diagrams for explaining the operation of wire bonding using a gold wire by the wire bonding apparatus shown in FIG.

First, as shown in FIG. 4A, electric sparks are blown from the torch rod 9 to the tip of the gold wire 1 sent to the tip of the bonding tool 4 to form a ball. Next, as shown in FIG. 4 (2), after opening the wire cut clamper 7, the bonding tool 4 is lowered by the horn swinging mechanism 6 to bond the ball formed at the tip of the gold wire 1 to the work 3. . This is called 1st bonding.

Next, as shown in FIG. 4C, the bonding tool 4 is moved up to the horn swinging mechanism 6 and further moved to the next bonding point by the XY stage 10. Next, as shown in FIG. 4 (4), the bonding tool 4 is lowered by the horn swinging mechanism 6 to bond the gold wire 1 to the work 3. This is called 2nd bonding. Next, FIG.
As shown in (5), the wire cutting clamper 7 is closed when the bonding tool 4 is moved up to the wire feeding amount by the horn swinging mechanism 6. Finally, Fig. 4 (6)
As shown in FIG. 5, the bonding tool 4 is further raised by the horn swinging mechanism 6 to cut the gold wire 1 from the bonded portion, and the gold wire 1 is sent to the tip of the bonding tool 4.

Wire bonding is performed by repeating the above operation.

[0008]

However, in the case of performing wire bonding using a coated wire by the above-described conventional wire bonding apparatus, the coating is sandwiched between the bonding surface of the wire and the work in the second bonding, so that electrical and mechanical There is a problem that the dynamic bonding strength is impaired.

Further, if an excessive bonding load is applied to secure the bonding strength, the wire strength at the bonding portion is impaired and the wire cutting becomes inaccurate, which results in ball formation failure due to unstable wire feeding amount. There is also a problem that it causes defective bonding.

[0010]

In order to solve the above-mentioned problems, the wire bonding apparatus of the present invention has a bonding tool provided with a through hole through which a bonding wire is inserted, and the bonding tool is attached and vibrated.
A vibrating means and a hand for forming a ball at the tip of the bonding wire protruding at the tip of the bonding tool.
A step , a clamper for gripping and releasing the bonding wire above the bonding tool, and the vibrating hand.
The moving said bonding tool up and down with the stages
The swinging mechanism of No. 1 and the clamper are connected to the bonding tool.
Le and Bei a second swinging mechanism for moving up and down independently
The second moving mechanism is the bonding wire.
Temporarily join the work with the bonding tool
After that, the clamper is moved upward to move the bonder
Cutting the wire and the bonding tool
Left on the work after the bonding wire is cut
The bonding wires are joined together.

In the wire bonding method of the present invention, the ball formed at the tip of the bonding wire protruding from the lower end of the bonding tool is bonded to one point on the work, and then the bonding tool is moved to another point on the work. Temporarily bonding the bonding wire with the bonding tool at a low load, then pulling the bonding wire upward on the upper side of the bonding tool to cut it from the bonding part of the other point of the work, and then to the other point of the work. It is characterized in that the remaining bonding wire is bonded with a high load by the bonding tool.

[0012]

Embodiments of the present invention will now be described in detail with reference to the drawings.

FIG. 1 is a side view showing a wire bonding apparatus according to an embodiment of the present invention.

The wire bonding apparatus shown in FIG. 1 includes a bonding tool 4, a horn 5, a horn swinging mechanism 6 for moving the horn 5, and a wire cut clamper 7.
A clamper swinging mechanism 8 for swinging the wire cut clamper 7, a bonding head portion including a torch rod 9, and an XY stage 10 for moving the bonding head portion in a plane. The clamper swinging mechanism 8 is moved together with the horn 5 by the horn swinging mechanism 6, and when the horn 5 is moved up and down by the horn swinging mechanism 6, the wire cut clamper 7 also moves up and down by the same amount.

FIGS. 2 (1) to 2 (8) are process diagrams for explaining the operation of wire bonding using the covered wire by the wire bonding apparatus shown in FIG.

First, as shown in FIG. 2A, electric sparks are blown by the torch rod 9 to the tip of the covered wire 2 delivered to the tip of the bonding tool 4 to form a ball. Next, as shown in FIG. 2B, after opening the wire cut clamper 7, the bonding tool 4 is lowered by the horn swinging mechanism 6 to bond the formed ball to the work 3. Next, as shown in FIG. 2C, the bonding tool 4 is raised by the horn swinging mechanism 6 and further moved by the XY stage 10 to the next bonding point.

Next, as shown in FIG. 2 (4), the bonding tool 4 is lowered by the horn swinging mechanism 6 to temporarily bond the covered wire 2 to the work 3 with a low load. Next, FIG.
As shown in (5), the wire feed amount of the wire cut clamper 7 (the length of the coating wire 2 which is projected from the tip of the bonding tool 4 at the time of ball formation, the coating which is projected from the tip of the bonding tool 4 shown in FIG. Wire 2
The wire-cut clamper 7 is closed when it is lifted by the clamper swinging mechanism 8 by the length (. As shown in FIG. 2 (6), the wire cut clamper 7 is further raised by the swinging mechanism 8 to cut the covered wire 2 from the joined portion.

Next, as shown in FIG. 2 (7), the covered wire 2 is permanently bonded to the work 3 with a high load by the bonding tool 4. Finally, as shown in FIG. 2 (8), the bonding tool 4 is raised by the horn swinging mechanism 6 to move the bonding tool 4 to the wire cut clamper 7 (close to the wire cut clamper 7 within a mechanically possible range). At the same time, so that the absolute position of the wire cut clamper 7 does not change, the wire cut clamper 7 is supported by the clamp tool swinging mechanism 8 to lower the wire cut clamper 7 relative to the bonding tool 4 so that the covered wire 2 projects from the tip of the bonding tool 4.

By repeating the above operation, wire bonding using a covered wire is performed.

[0020]

As described above, in the wire bonding apparatus and method of the present invention, when performing wire bonding using a covered wire, 2nd bonding is divided into two steps, temporary bonding and main bonding. By cutting, it is possible to stabilize the wire feed amount and prevent defective bonding due to poor ball formation, and at the time of main bonding, sufficient electrical and mechanical power is required to bond the bonding wire to the workpiece with a high bonding load. This has the effect of ensuring the reliability of dynamic joining.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing the operation of the embodiment shown in FIG.

FIG. 3 is a side view showing a conventional wire bonding apparatus.

FIG. 4 is an explanatory view showing the operation of the wire bonding apparatus shown in FIG.

[Explanation of symbols]

 1 Gold Wire 2 Coated Wire 3 Work 4 Bonding Tool 5 Horn 6 Horn Swing Mechanism 7 Wire Cut Clamper 8 Clamper Swing Mechanism 9 Torch Rod 10 XY Stage

Claims (2)

(57) [Claims] 1. A bonding tool having a through hole through which a bonding wire is inserted, and a vibrating hand to which the bonding tool is attached to vibrate.
A step , a means for forming a ball on the tip of the bonding wire protruding to the tip of the bonding tool, a clamper for gripping and releasing the bonding wire on the upper side of the bonding tool, and a vertical movement of the bonding tool together with the vibrating means. a first swinging mechanism for moving the, and a second rocking mechanism for moving up or down <br/> the clamper independently of the said bonding tool, the second as dynamic mechanisms, In front of the bonding wire
Temporary joining was performed on the workpiece with the bonding tool.
After that, the clamper is moved upward to perform the bonding.
Cut the wire and the bonding tool
The bondins remaining on the workpiece after being cut
Wire bonding apparatus characterized by joining Guwaiya. 2. A ball formed at the tip of a bonding wire protruding from the lower end of the bonding tool is bonded to one point on the work, and then the bonding tool is moved to another point on the work to move the bonding wire to the bonding tool. Temporary bonding with a low load by, and then pulling the bonding wire upward on the upper side of the bonding tool to cut from the bonding portion at another point of the work, and the tip of the cut bonding wire.
The bonding tool retraction inside, a wire bonding method characterized by joining the bonding wire remaining in other points of the workpiece after the at a high load by the Bonn down loading tool.