JP2526738Y2 - Cleaning equipment for dicing machine - Google Patents

Description

[Detailed description of the invention] [Industrial applications]

This invention is a dicing machine for cutting and cutting hard brittle materials such as semiconductors, wafers, quartz, ceramics, etc., and a flange holding part for safely holding an outer blade rotating at ultra high speed. The cleaning device according to the above.

[Prior art]

In FIGS. 1 and 2, the outer peripheral blade which rotates at a high speed of about 30,000 rpm is attached to the shaft 2 and the shaft is a motor 3.
Is rotated by being supported by an air bearing inside. The outer peripheral blade 1 is attached to the shaft 2 by being sandwiched between the flanges 4 and 5 from front and rear. The lower flange 4 in FIG. 1 is an outer flange, and the upper motor-side flange 5 is an inner flange. Then, a nozzle 7 for spraying cutting water toward a point where the outer peripheral blade 1 comes into contact with the object 6 to be cut is provided, and thereby the cutting powder (sludge) flows roughly. Here, if the cutting operation is continuously performed using the conventional apparatus, the rotating body (mainly the flange) is contaminated with sludge, the rotational balance is lost, and vibration occurs, and high-precision cutting cannot be performed. In some cases, the outer peripheral blade is damaged. There is a risk of splashing. Therefore, it was necessary to detect the rotation balance collapse, disassemble and clean the blade mounting mechanism before the accident occurred, and readjust the balance. This work is very difficult because it is an ultra-high-speed rotation and precision cutting, and a special engineer spends time and effort to make adjustments, which is considered to be a loss of the cutting work, and a solution has been desired. However, it was not clear why the stain was partially generated.

[Problem solving method of the present invention]

By carefully observing the occurrence of this problem many times, it was found that the surface of the inner flange 5 was particularly partially contaminated, and that the outer flange 4 was less contaminated. Therefore, the reason is considered. In FIG. 1, an air bearing is employed for the motor 3, and high-pressure air passes through a narrow space between the motors and is ejected from a gap between the motor outer peripheral body and the rotating shaft 2 in a direction of an arrow 8. The discharged air is dry air heated by the high-speed rotation of the motor, which forms a flow of an air film toward the outside of the inner flange 5, and the cutting water blown from the nozzle 7 is discharged from the surface of the inner flange 5. Obstructs and blocks direct hits. Then, it is considered that this air film flow forms a vortex, entrains the sludge fine powder scattered from the cutting portion, and causes a part thereof to adhere to the surface of the inner flange 5 to generate dirt. It has been found that this stain mainly occurs on the inner flange 5 and less on the outer flange. Therefore, it was determined that the problem would be solved if the cleaning water was sprayed toward the surface of the inner flange 5 by breaking through the exhaust flow film of the air bearing.

【Example】

In FIG. 3, apart from the conventional cleaning water nozzle 7,
A nozzle 9 for injecting the flange cleaning water toward the surface of the inner flange 5 is provided. Then, the pressure of the jet flow breaks through the flow film of the discharged air from the air bearing, and the cleaning water has such a strength that the cleaning water directly hits the flange surface.

【effect】

By using the above-described cleaning water jet dedicated to the inner flange surface, a long-time safe cutting operation can be performed, and the operation rate can be improved.

[Brief description of the drawings]

FIG. 1 is a plan view of a cutting portion of a conventional dicing machine to which the present invention is applied, FIG. 2 is a side view thereof, and FIG. 3 is a plan view showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1 ... Circular blade 2 ... Rotating shaft 3 ... Motor 4 ... Outer flange 5 ... Inner flange 7 ... Cutting water nozzle 8 ... Exhaust flow direction 9 ... Washing water nozzle

Claims (1)

(57) [Scope of request for utility model registration] 1. A dicing machine for cutting a brittle material with an outer peripheral blade fixed to both sides of an outer peripheral blade on a rotating shaft supported by an air bearing and contacting the blade with an object to be cut. A cleaning device for a dicing machine, comprising: a nozzle for spraying cutting water toward the nozzle; and a nozzle for injecting cleaning water to the inner flange surface on the motor side of the flange.