JP2523340Y2 - Auxiliary target for laser measuring device - Google Patents

Description

[Detailed description of the invention]

[0001]

The present invention relates to a method for positioning an interferometer and a target prism with respect to a laser head.
The present invention relates to an auxiliary target for a laser measuring device used by attaching to an interferometer or a target prism.

[0002]

2. Description of the Related Art Conventionally, a laser length measuring device has been used as a device for measuring a measured length object very accurately. The distance accuracy of this laser length measuring machine is about 1 μm for an optical scale and a magnetic scale, but is 0.1 μm.
Of the degree. And the laser length measuring device S is shown in FIG.
As shown by, the interferometer 52 is arranged between the laser head 51 and the measuring target prism 53 attached to the object to be measured, and the relative position between the position of the measuring target prism 53 and the position of the interferometer 52 is measured. The laser beam L1 emitted from the laser beam transmitter 51a of the laser head 51 enters the interferometer 52, enters the beam splitter 54 in the interferometer 52, and Is divided into a reference laser beam L2 and a measurement laser beam L3. Then, the reference laser light L2 is reflected by a reference reflecting mirror 55 incorporated in the interferometer 52, returns to the beam splitter 54, and is received by the laser light receiving unit 51b of the laser head 51.
On the other hand, the measurement laser beam L3 is emitted outward from the interferometer 52, and the target prism 53 attached to the object on the length measurement side.
The laser beam is returned to the beam splitter 54, and is further received by the laser light receiving unit 51b of the laser head 51. In this way, the reference laser beam L2 and the measurement laser beam L3, which are reflected and returned, respectively, are combined again by the beam spiriter 2, and become an interference laser beam L4 including an interference wave. Here, if the target prism 53 moves, the relative distance to the beam splitter 54 changes, and an interference signal corresponding to the movement distance is included in the interference laser light L4. As described above, the length of the laser beam is measured by detecting the interference signal included in the interference laser beam L4 by the laser beam receiving unit 51b in the laser head 51. The laser beam receiving section includes a beam splitter, a polarizing plate, a light receiving sensor, a 波長 wavelength plate, and the like, so that the laser beam can be detected.

[0003] As an example of the length measurement using the laser length measuring device S, for example, a case of measuring whether or not the scale of the staff 61 is correctly attached as an object to be measured will be described with reference to FIG. In the laser length measuring device S, an interferometer 52 and a target prism 53 are arranged in the emission direction X of the laser light L1 of the laser head 51, and the staff 61, which is the measured object, is also arranged in the emission direction X of the laser light L1. . The target prism 53 is provided so as to be slidable in the X direction. That is, in FIG. 6, reference numeral 62 denotes a slider that runs on a rail 63, and a target prism 53 is integrated with the slider 62, and a microscope 64 is mounted thereon. And from the microscope 64, the staff 6
It is arranged so that one scale can be read. Reference numeral 62a in FIG. 6 denotes a feeding roller.

In order to measure the length by the laser length measuring device S having the above configuration, first, the slider 62 is moved,
The target prism 53 is positioned at the reference point 0, and this position is set as a zero point on the laser head 51 side. Next, the slider 62 is moved along the rail 63 to measure whether or not the display of the scale of the staff 61 read by the microscope 64 and the display calculated by the laser head 61 are within a predetermined allowable error range. It is what you do.

In the above-described length measurement, generally, an interferometer 52 is used.
Is fixed (in the case of this example) and the measuring target prism 53 is moved (or the interferometer 52 is moved while the measuring target prism 53 is fixed). Therefore, when measuring, the laser light L1 from the laser head 51, the measuring laser light L3,
The interference laser beam L4, the interferometer 52, and the measurement-side target prism 53 need to be arranged on a common optical axis. For this reason, in order to align the optical axes of the above three, they are used by being attached to auxiliary targets 71 (71a, 71b, 71c, 71d). The auxiliary target 71 (71a, 71b,
Reference numerals 71c and 71d) denote rectangular plate bodies which are used by being attached to the interferometer 52 and the target prism 53. As shown in FIG. The hole 72 and the index 73 are drawn on the surface at a span h equal to the gap (hereinafter referred to as “span”) h between the light transmitting unit 51b. A magnetic rubber 74 is integrated on the back side and can be mounted on the interferometer 52 or the target prism 53.

The auxiliary target 71 (71a, 71)
In order to position the interferometer 52 and the target prism 53 using the b, 71c, 71d), first, the interferometer 52 is placed at a predetermined position in front of the laser head 51, and the interferometer 52 is positioned.
An auxiliary target 71a is attached to the front surface (the side of the laser head 51) with the index 73 below the hole 72 (FIG. 7), and the interferometer 52 is moved up, down, left, and right so that the laser beam hits the center of the index 73. Shift and adjust the position. Next, the target prism 53 is placed at the reference point 0 position, the auxiliary target 71a is removed, and the auxiliary target 71b with the index 73 above the hole 72 (the reverse of FIG. 7) is attached to the back side of the interferometer 52. At the same time, an auxiliary target (in the state of FIG. 7) 71 c is attached to the front side of the target prism 53, and the position of the target prism 53 is adjusted so that the laser beam irradiating part is located at the center of the index 73. Next, the auxiliary target 71c is removed, and the position of the interferometer 52 is adjusted so that the reflected light from the target prism 53 hits the index 73 of the auxiliary target 71b on the back side of the interferometer 52. Then, the auxiliary target 71b is removed, and the target prism 5
It is confirmed that the reflected light from No. 3 hits the light receiving section via the interferometer 52. If the reflected light does not hit the light receiving section, one of the laser head 51, the interferometer 52, and the target prism 53 is not at the correct position. The position is adjusted so that the laser light is reflected by the target prism 53 and received by the laser light receiving unit 51b. Next, the target prism 53 is shifted to the longest position (the chain line in FIG. 6) where measurement is desired, and the target prism 5 is moved.
An auxiliary target 71d is attached to the front surface of 3 and the position of the rail 63 is adjusted so that the index 73 is irradiated with laser light. Then, the auxiliary target 71d is removed, and the light receiving unit 51b is removed.
Check that the laser beam is received with. Also, the light receiving section 5
If the laser beam is not received in 1b, the position is adjusted until the laser beam is received.

[0007]

The laser light transmitting portion 51a and the laser light receiving portion 51 of the conventional laser head 51 are described.
The interval (span) h of b is different for each product of the maker. For example, in some manufacturers, h = 10 mm as shown in FIG. 8, and in other manufacturers, h = 11 mm as shown in FIG. For this reason, the conventional auxiliary target 7
No. 1 requires an auxiliary target having the same span h for each product of each manufacturer, and has a problem that it cannot be used for positioning a laser length measuring device having a different span. Further, since the conventional auxiliary target 71 has only one hole 72 through which the laser beam can pass, the auxiliary target 71 must be repeatedly attached and detached for positioning, and there is a problem in workability.

The object of the present invention is to be able to use even if the span between the laser light transmitting part and the laser light receiving part is different,
An object of the present invention is to provide an auxiliary target for a laser length measuring device which is versatile and has improved workability.

[0009]

An auxiliary target for a laser measuring device according to the present invention includes a laser head having a built-in laser light transmitting unit and a light receiving unit, and reflects a part of the laser light to the light receiving unit. Used for a laser length measuring device including an interferometer that partially transmits light and a target prism that reflects laser light, and an index and a laser light transmitting unit for setting a laser optical axis emitted from the laser head. And an auxiliary target used by being attached to the interferometer and the target prism, the auxiliary target having a size including a light transmitting part and a light receiving part of the laser head, and a laser transmitting part of the auxiliary target. Is formed of a thin sheet material through which the laser beam can be transmitted and the transmission of the laser beam can be visually recognized. It is characterized in that the crosshairs attached graduated as an index which is an irradiation criteria Heather light is displayed.

[0010]

According to the auxiliary target for the laser length measuring device of the present invention, the auxiliary target has a size including the light transmitting part (that is, the laser light transmitting part) and the light receiving part (that is, the laser light receiving part) of the laser head. Since the laser transmission part of the target is formed of a thin sheet material that transmits the laser light and allows the laser light to be visually recognized, even if the span between the laser light transmission part and the laser light reception part of the laser head is different, It can be used and there is no need to use an auxiliary target for each model (product). In addition, since the thin sheet material is formed of a sheet body on which a cross line with a scale as an index which is an irradiation reference of the emitted laser light is displayed, the position corresponding to the index can be specified from the scale of the cross line, and the laser It can be used even if the light transmitting part and the laser light receiving part have different spans. Further, since the laser head has a size including the light transmitting part and the light receiving part, the laser head can be used even when the diameter of the laser light is switched between the size in the measurement state and the size at the time of positioning on the laser head side. Therefore, it is possible to perform the operation while checking the state of the laser beam at the time of measurement with the device attached, and it is possible to improve workability.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. The members, arrangements, and the like described below do not limit the present invention, but can be variously modified within the scope of the present invention. The laser length measuring apparatus in the present embodiment is the same in configuration as the laser length measuring apparatus shown in FIGS. 5 and 6, and will be described with reference to FIGS.

As shown in FIGS. 1 to 3, the auxiliary target 10 of this embodiment has a rectangular shape, and a metal auxiliary plate having a large circular opening 12 formed in the center of the rectangular shape. 11 and a magnetic rubber plate 13 having the same shape, a semi-transparent film 14 as a thin sheet material is sandwiched and integrally formed. The size of the opening 12 has a size including the laser light transmitting portion 51a and the laser light receiving portion 51b of the laser head 51. A cross line 16 with a scale 15 is printed on the translucent film 14 exposed at the opening 12 of the auxiliary plate 11 and the magnetic rubber plate 13. The cross line 16 with the scale 15 is an index as an irradiation reference of the laser light emitted from the laser head 51. The semi-transmissive film 14 of the present example may be formed of a material that can transmit laser light and has a size of transmitted laser light, that is, a material from which transmission of laser light can be visually recognized.
It may be made of strong paper. In this example,
Although the opening 12 of the auxiliary target 10 is circular, it is needless to say that the opening 12 is not limited to the circular shape.

Next, the auxiliary target 10 having the above configuration
Will be described with reference to FIGS. 4 to 6. As shown in FIG. 6, an interferometer 52 and a target prism 53 are arranged at predetermined positions in front of a laser head 51,
First, the auxiliary target 10 is disposed on the front surface (the laser head 51 side) of the interferometer 52. At this time, the interferometer 52 and the auxiliary target 10 can be easily mounted by the magnetic rubber plate 13. Then, the auxiliary prisms 10 are sequentially arranged as described with reference to FIG. At this time, in the auxiliary target 10 of this example, the opening 12 has the laser light transmitting portion 51 a of the laser head 51 and the laser light receiving portion 5.
1b, for example, during the alignment of the optical system, the input / output range of the laser light transmitting unit 51a and the laser light receiving unit 51b, the input / output diameter of the interferometer 52, and the prism diameter of the target prism 53 Do not coincide with each other, for example, it is immediately known that the laser beam has deviated from the opening 12 of the auxiliary target and has been displaced in the vertical and horizontal directions, so that the correction of the interferometer 52 and the target prism 53 is extremely easy. Become.

As shown in FIG. 4A, the translucent film 14 (for example, a film having a small milky white circle on the film) can transmit laser light.
Laser light L1 emitted from laser light transmitting section 51a
And the laser beam L2 (L3) reflected by the interferometer 52 (or the target prism 53)
2 (that is, the semi-transmissive film 14), and the opening 12 has a cross line 16 with a scale 15 as an index as an irradiation reference of the laser light emitted from the laser head 51. In the state shown in FIG. 4C, the interferometer 52 (or the target prism 53) is appropriately moved up, down, left, and right so that the positioning can be determined from the same side and easily corrected in accordance with the index. Can be. In addition, since the semi-transmissive film 14 allows the laser light on the emission side and the reflection side to be visually recognized, the target prism 53 can be adjusted by easily confirming it.

As shown in FIGS. 4A and 4B, when the laser beam emitted from the laser head 51 is located, the diameter of the laser beam L1 (L2, L3) is increased as shown in FIG. In order to facilitate positioning, the laser beam L1 (L2, L2,
The size is such that the opening 12 can cope with the case where the size of the measurement state and the size at the time of positioning are switched on the laser head side so as to perform measurement by reducing the diameter of L3).

As described above, the auxiliary target 10 is used similarly to the conventional auxiliary target 71. However, since the auxiliary target 10 does not need to be used upside down as in the conventional case, the interferometer 52 and the target prism can be used. Since it can be used with it attached to 53, it is very convenient and the positioning work is greatly improved. Further, unlike the related art, there is no possibility that the light transmitting unit and the light receiving unit cannot be used because the spans do not match.

[0017]

As described above, according to the auxiliary target according to the present invention, it is possible to use the auxiliary target even when the span between the light transmitting unit and the light receiving unit is different, thereby improving versatility and workability. .

[Brief description of the drawings]

FIG. 1 is a perspective view of an auxiliary target for a laser measuring device according to the present invention.

FIG. 2 is a front view of an auxiliary target for a laser measuring device according to the present invention.

FIG. 3 is a sectional view taken along line AA of FIG. 1;

FIG. 4 is a diagram illustrating the use of an auxiliary target for a laser length measuring device according to the present invention.

FIG. 5 is an optical system layout diagram of the laser length measuring device.

FIG. 6 is a schematic configuration diagram illustrating an example of measuring a scale of a staff staff as a measured object with a laser measuring device.

FIG. 7 is a perspective view of a conventional auxiliary target for a laser length measuring device.

FIG. 8 is an explanatory diagram showing a span between a laser transmitting unit and a laser receiving unit of the laser measuring device.

FIG. 9 is an explanatory diagram illustrating a span between another laser length measuring device racer light transmitting unit and a laser light receiving unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Auxiliary target 12 Opening part (laser light transmission part) 15 Index (scale) 16 Index (crosshair) 51 Laser head 51a Light transmission part (laser light transmission part) 51b Light reception part (laser light reception part) 52 Interferometer 53 Target prism L1, L2, L3, L4 Laser beam S Laser length measuring device

Claims (1)

(57) [Scope of request for utility model registration] 1. A laser head having a laser light transmitting part and a light receiving part built therein, an interferometer that reflects a part of the laser light to the light receiving part and transmits a part thereof, and a target that reflects the laser light It is used in a laser measuring device having a prism, and an index for setting the optical axis of a laser beam emitted from the laser head and a laser beam transmitting portion are formed, and used by being attached to the interferometer and the target prism. In the auxiliary target, the auxiliary target has a size including a light transmitting part and a light receiving part of the laser head, and the laser transmitting part of the auxiliary target transmits the laser light and is thin enough to visually recognize the transmission of the laser light. It is formed of a sheet material, and the thin sheet material has a graduated crosshair as an index which is an irradiation reference of the emitted laser light. An auxiliary target for a laser length measuring device, characterized in that it is indicated.