JP2513894B2 - Moisture sensitive element - Google Patents
Moisture sensitive elementInfo
- Publication number
- JP2513894B2 JP2513894B2 JP2080398A JP8039890A JP2513894B2 JP 2513894 B2 JP2513894 B2 JP 2513894B2 JP 2080398 A JP2080398 A JP 2080398A JP 8039890 A JP8039890 A JP 8039890A JP 2513894 B2 JP2513894 B2 JP 2513894B2
- Authority
- JP
- Japan
- Prior art keywords
- sensitive element
- capacitance
- moisture
- ladder
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- -1 polysiloxane Polymers 0.000 claims description 8
- 229920001296 polysiloxane Polymers 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 description 6
- 238000007791 dehumidification Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
【発明の詳細な説明】 ＜産業上の利用分野＞ 本発明はキャパシタンスの変化を利用して雰囲気中に
存在する水分量を感知するようにした感湿素子に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION <Industrial field of application> The present invention relates to a humidity sensitive element that senses the amount of water present in an atmosphere by utilizing a change in capacitance.
＜従来の技術＞ 従来広く使用されている感湿素子は大別して２種あ
る。１つは、雰囲気中に存在する水分量に応じて素子の
電気抵抗が変化することを利用したものであり、もう１
つは水分量に応じて静電容量が変化することを利用した
ものである。後者の感湿素子の材料としはセルロース誘
導体が多く用いられている。<Prior Art> There are roughly two types of moisture-sensitive elements that have been widely used in the past. One is that the electric resistance of the element changes according to the amount of water present in the atmosphere.
One is that the capacitance changes depending on the amount of water. A cellulose derivative is often used as the material of the latter moisture-sensitive element.
＜発明が解決しようとする課題＞ しかしながら、上記従来の静電容量形素子は、静電容
量が雰囲気の温度によって変化し、また種々の溶剤のミ
ストにさらすことにより劣化すると言う欠点を有してい
た。<Problems to be Solved by the Invention> However, the above-mentioned conventional capacitance type element has the drawback that the capacitance changes depending on the temperature of the atmosphere and deteriorates when exposed to mist of various solvents. It was
そこで、本発明は、上記従来例の特性の改善を図り、
より安定した感湿素子を提供しようとするものである。Therefore, the present invention aims to improve the characteristics of the above conventional example,
It is intended to provide a more stable moisture sensitive element.
＜課題を解決する為の手段＞ 本発明の感湿素子は、ラダー形ポリシロキサン膜の両
面に金属電極を設けたことを特徴とするものであり、そ
のことにより上記目的が達成される。<Means for Solving the Problems> The moisture-sensitive element of the present invention is characterized in that metal electrodes are provided on both sides of a ladder-type polysiloxane film, and thereby the above object is achieved.
＜作用＞ 本発明の感湿素子は、ラダー形ポリシロキサン膜が一
対の金属電極間に設けられた電気容量形の感湿素子にな
っており、ラダー形ポリシロキサン膜の吸湿度によって
静電容量が変化し、それを電極間電位差に変換して湿度
に置き換えるようになっている。ラダー形ポリシロキサ
ン膜は、温度による誘電率の変化が非常に小さいため
に、このラダー形ポリシロキサン膜を電極間に配置した
電気容量形の感湿素子は、加湿過程と減湿過程との間の
ヒステリシスがほとんどなく、しかも、温度変化による
キャパシスタンスの変化が非常に小さくなる。<Operation> The moisture-sensitive element of the present invention is a capacitance-type moisture-sensitive element in which a ladder-type polysiloxane film is provided between a pair of metal electrodes, and the capacitance is changed by moisture absorption of the ladder-type polysiloxane film. Change, it is converted into a potential difference between electrodes and replaced with humidity. Since the ladder-type polysiloxane film has a very small change in the dielectric constant with temperature, a capacitance-type moisture-sensitive element in which the ladder-type polysiloxane film is arranged between electrodes is used between the humidification process and the dehumidification process. Has almost no hysteresis, and the change in capacity due to temperature change is extremely small.
＜実施例＞ 以下本発明について構造式及び実施例を用いて説明す
ると、ラダー形ポリシロキサンを感湿膜として用いるこ
とにより、静電容量の温度依存性がきわめて小さく、指
示値に対して温度補正を必要としない程度の信頼度が得
られる。<Examples> The present invention will be described below with reference to structural formulas and examples. By using a ladder-type polysiloxane as a moisture-sensitive film, the temperature dependency of capacitance is extremely small, and temperature correction is performed on the indicated value. The degree of reliability that does not require is obtained.
そしてこのポリマーはラダー形構造のため、分子鎖の
回転が束縛されて分子構造が安定する。Since this polymer has a ladder structure, the rotation of the molecular chain is restricted and the molecular structure is stabilized.
こゝでＲをメチル基又はフェニル基とすると、 となり、その結果、ダイポールモーメントの温度依存性
が小さくなる、つまり誘電率の温度による変化が非常に
小さくなる。この点が従来の温度センサ材料に見られな
い特徴である。Here, when R is a methyl group or a phenyl group, As a result, the temperature dependence of the dipole moment becomes small, that is, the change in the dielectric constant with temperature becomes very small. This is a feature not found in conventional temperature sensor materials.
例えばガラス基板１上に２（mm）×４（mm）の長方形
の金属電極２を蒸着し、その上にラダー形ポリシロキサ
ンのポリマー膜３をスピンコートし、加熱して固い膜を
形成する。更にこの膜上に２（mm）×４（mm）の上部金
属電極４を蒸着し、コンデンサー形の素子Ａを構成す
る。For example, a 2 (mm) × 4 (mm) rectangular metal electrode 2 is vapor-deposited on a glass substrate 1, and a ladder-type polysiloxane polymer film 3 is spin-coated thereon and heated to form a hard film. Further, a 2 (mm) × 4 (mm) upper metal electrode 4 is vapor-deposited on this film to form a capacitor type device A.
該素子Ａのキャパシタンスを種々の相対湿度と夫々の
温度30,35,40,45（℃）で測定した結果を第１図に示
す。又、特に図示しないが加湿過程と減湿過程間のヒス
テリシスはほとんどなく、更にまた測定温度を変えた時
のキャパシタンスの変化もきわめて小さいことが判明し
た。FIG. 1 shows the results of measuring the capacitance of the element A at various relative humidities and respective temperatures of 30, 35, 40 and 45 (° C.). Further, although not shown in particular, it was found that there was almost no hysteresis between the humidification process and the dehumidification process, and the change in capacitance when the measurement temperature was changed was extremely small.
＜発明の効果＞ 本発明は上述のように構成され、その結果従来例では
見られない程に温度の変化に対するキャパシタンスの変
化が極めて小さい。<Effect of the Invention> The present invention is configured as described above, and as a result, the change in capacitance with respect to the change in temperature is extremely small, which is not seen in the conventional example.
又加湿過程と減湿過程間のヒステリシスも極めて小さ
く再現性に優れているなど多くの本発明特有の効果を有
する。In addition, the hysteresis between the humidification process and the dehumidification process is extremely small, and the reproducibility is excellent.
第１図及び第２図は本発明の実施例を示す。 第１図は、感湿素子の一部切欠斜視図、 第２図は、相対湿度対キャパシタンス特性図である。 ３……ポリマー膜、2,4……金属電極 1 and 2 show an embodiment of the present invention. FIG. 1 is a partially cutaway perspective view of the humidity sensing element, and FIG. 2 is a relative humidity vs. capacitance characteristic diagram. 3 ... Polymer film, 2, 4 ... Metal electrode
Claims (1)
極を設けたことを特徴とする感湿素子。1. A moisture-sensitive element, comprising metal electrodes provided on both sides of a ladder-type polysiloxane film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2080398A JP2513894B2 (en) | 1990-03-27 | 1990-03-27 | Moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2080398A JP2513894B2 (en) | 1990-03-27 | 1990-03-27 | Moisture sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03277954A JPH03277954A (en) | 1991-12-09 |
| JP2513894B2 true JP2513894B2 (en) | 1996-07-03 |
Family
ID=13717184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2080398A Expired - Fee Related JP2513894B2 (en) | 1990-03-27 | 1990-03-27 | Moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2513894B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0718832B2 (en) * | 1986-04-19 | 1995-03-06 | 神栄株式会社 | Moisture sensitive element |
-
1990
- 1990-03-27 JP JP2080398A patent/JP2513894B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03277954A (en) | 1991-12-09 |
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