JP2025102476A - Processing System - Google Patents

Abstract

To provide a processing system capable of enhancing the efficiency of operation for replenishing and repairing cassettes in a stocker in which cassettes for a first workpiece and a second workpiece are placed.SOLUTION: A processing system 1 includes a stocker 50, a processing device, a transport path 10, and a transport vehicle 20. The stocker 50 includes a first mounting section 54 for mounting a first cassette 54-2 for accommodating a first workpiece that is not fixed to a frame, a second mounting section 55 for mounting a second cassette 55-2 for accommodating a second workpiece that is fixed to a frame, an opening portion 52 through which a tray 23 moving up and down from the transport vehicle 20 passes, a landing section 53 on which the tray 23 lands, and a transport device 56 that transports the first workpiece between the first cassette 54-2 and the tray 23 that has landed on the landing section 53, and transports the second workpiece between the second cassette 55-2 and the tray 23 that has landed on the landing section 53.SELECTED DRAWING: Figure 4

Description

The present invention relates to a processing system for processing workpieces.

A processing system is known in which a transport vehicle (automated transport vehicle) transports items such as workpieces, processing tools, and consumables used in processing to a processing device that processes multiple workpieces, and processes the workpieces (see, for example, Patent Document 1).

JP 2021-163920 A

In such a processing system, in a series of processes in which workpieces are processed using multiple processing devices, there are times when the workpiece is processed as a first workpiece that is not fixed to a frame, and as a second workpiece that is fixed to a frame via tape.

The first workpiece and the second workpiece are housed in separate, dedicated cassettes. In a series of processes for processing the workpieces, different processing devices are used for the first workpiece and the second workpiece. The stockers in which the cassettes for the first workpiece and the second workpiece are housed are installed near the processing devices used for the respective processes in order to shorten the distance that the operator must travel to carry the cassettes from the stockers housing the first workpiece and the second workpiece to the processing devices used for the respective processes. Normally, for layout reasons, the processing devices used for the respective processes are installed apart from each other, and therefore the stockers in which the cassettes for the respective processes are installed are installed apart from each other. However, because the stockers housing the respective works are installed apart in this way, there is a problem in that the work efficiency decreases when the operator refills or repairs the respective cassettes in the respective stockers.

The present invention was made in consideration of these problems, and its purpose is to provide a processing system that can improve the work efficiency of replenishing and repairing cassettes in the stockers in which cassettes for the first workpiece and the second workpiece are placed.

In order to solve the above problems and achieve the object, the processing system of the present invention is a processing system having a processing device for processing workpieces, a conveying path installed above the processing device, and a transport vehicle having a tray for accommodating workpieces to be supplied to the processing device and traveling on the conveying path, the transport vehicle including a lifting mechanism for raising and lowering the tray relative to the processing device, the processing system including a stocker in which a first cassette for accommodating a first workpiece not fixed to a frame and a second cassette for accommodating a second workpiece fixed to a frame are installed, the stocker including a first installation section for installing the first cassette, a second installation section for installing the second cassette, an opening through which the tray passes as it is raised and lowered from the transport vehicle, a landing section on which the tray lands, and a transport device for transporting the first workpiece between the first cassette and the tray that has landed on the landing section, and transporting the second workpiece between the second cassette and the tray that has landed on the landing section.

The transport device may include a first transport arm for transporting the first workpiece and a second transport arm for transporting the second workpiece.

The first installation section and the second installation section may be disposed on either side of the transport device.

The processing device may include a processing device that processes at least one of the first workpiece and the second workpiece.

The present invention employs a configuration in which the workpieces are transported by a transport vehicle running on a transport path installed above, thereby eliminating the need to install the processing device for processing the first workpiece and the stocker having a first installation section for installing the first cassette for storing the first workpiece close to each other, and also eliminating the need to install the processing device for processing the second workpiece and the stocker having a second installation section for installing the second cassette for storing the second workpiece close to each other, making it possible to place the stocker having the first installation section for installing the first cassette and the stocker having the second installation section for installing the second cassette close to each other. By placing them even closer to each other, both can be integrated together in one location. As a result, the present invention can improve the work efficiency of replenishing and repairing cassettes in the stockers in which the cassettes for the first workpieces and the second workpieces are installed.

FIG. 1 is a schematic diagram illustrating an example of the configuration of a processing system according to an embodiment. FIG. 2 is a perspective view showing an example of a first workpiece, which is one state of a workpiece to be processed by the processing system of FIG. FIG. 3 is a perspective view showing an example of a second workpiece which is one state of the workpiece to be processed by the processing system of FIG. FIG. 4 is a side cross-sectional view showing a stocker of the processing system of FIG. FIG. 5 is a perspective view showing a first transport arm of the stocker of FIG. 6 is a side cross-sectional view showing the second transfer arm of the stocker of FIG. FIG. 7 is a perspective view of a portion of the processing system of FIG. FIG. 8 is a perspective view showing a transport vehicle of the processing system of FIG. 9 is a side cross-sectional view showing the lifting mechanism of the transport vehicle of FIG.

The following describes in detail the form (embodiment) for carrying out the present invention with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. The components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Various omissions, substitutions, or modifications of the configuration can be made without departing from the spirit of the present invention.

[Embodiment]
A processing system 1 according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram (top view) showing an example of the configuration of the processing system 1 according to the embodiment. In the drawings, some components are omitted as appropriate, or some components are simply shown by outlines, etc. As shown in FIG. 1, the processing system 1 according to the embodiment has a plurality of processing devices 100 for processing workpieces 200, a stocker 50, a conveying path 10 installed above the plurality of processing devices 100 and the stocker 50, a conveying vehicle 20 having a tray 23 (see FIG. 4, etc.) for accommodating the workpieces 200 (see FIG. 2 and FIG. 3) to be supplied to the plurality of processing devices 100 and traveling on the conveying path 10, and a control unit 30 for controlling and managing the entire processing system 1 in an integrated manner.

In the example of this embodiment shown in FIG. 1, seven processing devices 100 are installed in the processing system 1, but the present invention is not limited to this. Any number of processing devices 100 may be installed as long as they include at least one or more first processing devices 110 that process the workpiece 200 when it is in the state of a first workpiece 210 (see FIG. 2) that is not fixed to the frame 206 (see FIG. 3), and one or more second processing devices 120 that process the workpiece 200 when it is in the state of a second workpiece 220 (see FIG. 3) that is fixed to the frame 206, and any combination of processing devices 100 may be used.

The multiple processing devices 100 preferably include a processing device that processes at least one of the first workpiece 210 and the second workpiece 220, and more preferably include a first processing device that processes the first workpiece 210 and a second processing device that processes the second workpiece 220. In this case, the processing system 1 makes it possible to more efficiently transport both the first workpiece 210 and the second workpiece 220 and perform processing using the processing devices (the first processing device and the second processing device).

In the example of this embodiment shown in FIG. 1, the processing system 1 includes one stocker 50, but the present invention is not limited to this and multiple (two or more) stockers may be installed. In the example of this embodiment shown in FIG. 1, the processing system 1 includes multiple transport vehicles 20 (four in the example shown in FIG. 1), but the present invention is not limited to this and the number may be one to three, or five or more.

Figure 2 is a perspective view showing an example of a first workpiece 210, which is one state of the workpiece 200 to be processed by the processing system 1 in Figure 1. Figure 3 is a perspective view showing an example of a second workpiece 220, which is one state of the workpiece 200 to be processed by the processing system 1 in Figure 1. We will explain the workpiece 200, which is an example of an item 250 (see Figure 7) to be processed by the processing device 100 included in the processing system 1 and transported by the transport vehicle 20.

In this embodiment, the workpiece 200 is, for example, a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, or the like, as shown in Figs. 2 and 3. The workpiece 200 has a flat surface 201, and chip-shaped devices 203 are formed in each area partitioned by a plurality of planned division lines 202 that intersect with each other. The workpiece 200 is processed by the processing device 100 of the processing system 1 and divided along the planned division lines 202 to manufacture chips (device chips) of a plurality of devices 203. The device chips manufactured from the workpiece 200 are included in the goods 250 to be transported by the transport vehicle 20. Note that the workpiece 200 is not limited to the above-mentioned wafer in the present invention, and may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

The first workpiece 210 refers to a state in which the workpiece 200 is not fixed to the frame 206 (see FIG. 3). That is, in this embodiment, the first workpiece 210 refers to a state in which only the workpiece 200 is present, as shown in FIG. 2, or a state in which a protective tape (not shown) of the same size and shape as the workpiece 200 is attached to the surface 201 of the workpiece 200 or the back surface 204 behind the surface 201. The second workpiece 220 refers to a state in which the workpiece 200 is fixed to the frame 206. In this embodiment, the second workpiece 220 refers to a state in which the support tape 205 is attached to the back surface 204 of the workpiece 200 and the annular frame 206 is attached to the outer edge of the support tape 205, that is, the workpiece 200 is supported and fixed to the opening of the annular frame 206 via the support tape 205. In this embodiment, the first workpiece 210 becomes the second workpiece 220 by being supported and fixed to the opening of the annular frame 206 via the support tape 205. The second workpiece 220 becomes the first workpiece 210 by removing the support tape 205 and the annular frame 206.

The items 250 to be transported by the transport vehicle 20 include the workpiece 200 (including the first workpiece 210 and the second workpiece 220) and the device chips manufactured from the workpiece 200, as well as processing tools used to process the workpiece 200, consumables used to inspect the state of the processing tools, cleaning tools for cleaning the processing device 100, and maintenance parts for maintaining the processing device 100. The processing tools used to process the workpiece 200 and process the workpiece 200 are, for example, cutting blades, grinding wheels, etc. Other consumables used to process the workpiece 200 are, for example, dressing boards, precut boards, dummy workpieces, dummy workpieces, adhesive tapes, carbon pieces, etc. The cleaning tools are cleaning supplies such as cleaning stones for cleaning the support surface on which the processing tools are attached. The maintenance parts are maintenance tools for maintaining any mechanism provided in the other processing device 100. In this embodiment, as with the second workpiece 220, the workpiece 200 and the item 250 other than the device chip manufactured from the workpiece 200 have a support tape 205 (adhesive tape) attached to the back surface and a frame 206 attached to the outer edge of the support tape 205 (see FIG. 7), but the present invention is not limited to this, and the frame 206 may not be attached and the support tape 205 may not be attached.

The item 250 is provided with a barcode, ID (IDentification), RFID (Radio Frequency IDentification) tag, or the like (all not shown) that indicates the type of the item 250. Here, the type of the item 250 refers to the type of the item 250, the specifications of the item 250, and information that distinguishes each item 250. The type of the item 250 is, for example, the workpiece 200 (or a device chip manufactured from the workpiece 200), a substrate, a cutting blade, a grinding wheel, a dressing board, a precut board, a dummy work, a dummy workpiece, an adhesive tape, a piece of carbon, a cleaning tool, a maintenance tool, and the like. For example, when the item 250 is the workpiece 200, the specifications of the item 250 include the diameter, thickness, composition and configuration of the base material, type and specifications of the device 203, the interval (index width), width and number of the planned division lines 202, the material, configuration, type and specifications of the attached support tape 205, and the material, configuration, type and specifications of the frame 206. Even when the item 250 is something other than the workpiece 200, the specification items of the item 250 are appropriately determined according to the type of the item 250. The information for distinguishing each item 250 is, for example, an identification number provided for each item 250. Furthermore, when the item 250 is the workpiece 200, the information for distinguishing each item 250 may include the lot number of the workpiece 200.

Figure 4 is a side cross-sectional view showing the stocker 50 of the processing system 1 of Figure 1. Figure 5 is a perspective view showing the first transport arm 56-1 of the stocker 50 of Figure 4. Figure 6 is a side cross-sectional view showing the second transport arm 56-2 of the stocker 50 of Figure 4. As shown in Figure 4, the stocker 50 includes a housing 51, an opening 52, a landing section 53, a first installation section 54, a second installation section 55, a transport device 56, a receiving unit 57, a transmitting unit 58, and a control unit 59.

As shown in FIG. 4, the housing 51 houses each component of the stocker 50 except for the housing 51, the first installation section 54, and the second installation section 55. In the ceiling 51-1 above the housing 51, a plurality of openings 52 are formed with a size and shape that allows the tray 23 of the transport vehicle 20, which carries the article 250 (workpiece 200) and ascends and descends from the transport vehicle 20, to pass through in the vertical direction (Z-axis direction in FIG. 4). In the example of this embodiment shown in FIG. 4, the plurality of openings 52 include a first opening 52-1 and a second opening 52-2 formed at different positions on the ceiling 51-1 of the housing 51. Note that the present invention is not limited to a form in which two openings 52 are formed, and only one opening 52 may be formed on the ceiling 51-1 of the housing 51, or three or more openings 52 may be formed.

A first side opening 54-1 having a size and shape that allows the first workpiece 210 to pass through along the horizontal direction (a direction parallel to the XY plane in FIG. 4) is formed on one side of the housing 51. In this embodiment, the first side opening 54-1 is formed to have a size and shape similar to the first cassette opening 54-3 of the first cassette 54-2 described later. In addition to the first side opening 54-1, a second side opening 55-1 having a size and shape that allows the second workpiece 220 to pass through along the horizontal direction is formed on one side of the housing 51. In this embodiment, the second side opening 55-1 is formed to have a size and shape similar to the second cassette opening 55-3 of the second cassette 55-2 described later. The first side opening 54-1 and the second side opening 55-1 are each provided so as to be switchable between an open state and a closed state by an opening and closing door not shown. In the example of this embodiment shown in FIG. 4, the first side opening 54-1 is formed at a position closer to the first opening 52-1 than the second side opening 55-1, and the second side opening 55-1 is formed at a position closer to the second opening 52-2 than the first side opening 54-1. In the example of this embodiment shown in FIG. 4, the first side opening 54-1 and the second side opening 55-1 are formed on a pair of side surfaces that face each other in the X-axis direction parallel to the horizontal direction of the housing 51, but the present invention is not limited to this and they may be formed on any side surface of the housing 51 or inside the housing 51.

As shown in FIG. 4, the landing section 53 is a platform on which the tray 23 descended from the transport vehicle 20 by the lifting mechanism 24 lands and is placed. The landing section 53 supports the tray 23 that has landed and been placed upward. In the example of this embodiment shown in FIG. 4, the landing section 53 has a first landing section 53-1 and a second landing section 53-2. The first landing section 53-1 is a platform on which the tray 23 descended from the transport vehicle 20 through the first opening 52-1 by the lifting mechanism 24 lands and is placed, and is provided at a position vertically below the first opening 52-1. The second landing section 53-2 is a platform on which the tray 23 descended from the transport vehicle 20 through the second opening 52-2 by the lifting mechanism 24 lands and is placed, and is provided at a position vertically below the second opening 52-2.

In the example of this embodiment shown in FIG. 4, the landing portion 53 has two landing portions 53, a first landing portion 53-1 and a second landing portion 53-2. As described below, the two landing portions 53 can serve different functions, as the first landing portion 53-1 to which the first workpiece 210 is transported from the first cassette 54-2 and the second landing portion 53-2 to which the second workpiece 220 is transported from the second cassette 55-2, and this is a preferred embodiment. However, the present invention is not limited to this, and the landing portion 53 may have only one landing portion 53, or may have three or more landing portions 53.

As shown in FIG. 4, the first installation section 54 is provided with a first cassette 54-2, which is a container for accommodating the first workpiece 210. The first installation section 54 is adjacent to the outside of the housing 51 and is provided at a position facing the first side opening 54-1 in a direction perpendicular to the opening surface of the first side opening 54-1 (in the X-axis direction in the example shown in FIG. 4). In this embodiment, the first cassette 54-2 is a sealed container called a FOUP (Front Opening Unified Pod) cassette for preventing contamination handled by device manufacturers, and is formed into a rectangular box shape having a pair of opposing side walls, a bottom plate formed in a flat plate shape and connecting the lower ends of the pair of side walls, a top plate connecting the upper ends of the pair of side walls, and a back plate connecting the ends of one side (rear side) of the pair of side walls, the bottom plate, and the top plate. The pair of side walls, the bottom plate, the top plate, and the back plate are all formed in a flat plate shape. The first cassette 54-2 is surrounded by a pair of side walls, a bottom plate, and the other (front) end of the top plate, and a first cassette opening 54-3 of a size and shape that allows the first workpiece 210 to pass through is formed on the opposite side facing the back plate. The first cassette 54-2 is installed in the first installation section 54 at a position where the first cassette opening 54-3 of the first cassette 54-2 faces and is adjacent to the first side opening 54-1 in a direction perpendicular to the opening surface of the first side opening 54-1.

The pair of side walls of the first cassette 54-2 form a pair with each other, and multiple guide rails are formed on the inside, extending along the direction in which the back plate and the first cassette opening 54-3 face each other. The pair of guide rails (pair of guide rails) are formed such that one side is formed convex from one side wall toward the other side wall, and the other side is formed convex from the other side wall toward the one side wall, and are formed at a position with the same vertical height. The multiple pairs of guide rails are arranged at equal intervals in the vertical direction at a predetermined interval that is sufficiently larger than the thickness of the first workpiece 210. The first cassette 54-2 accommodates the first workpiece 210 by placing the end of the first workpiece 210 on the pair of guide rails, or by placing the end of the first workpiece 210 on a support plate installed on the pair of guide rails. The first cassette 54-2 accommodates multiple first workpieces 210 in the same number as the number of pairs of guide rails.

As shown in FIG. 4, the second installation section 55 is provided with a second cassette 55-2, which is a container for accommodating the second workpiece 220. The second installation section 55 is adjacent to the outside of the housing 51 and is provided at a position facing the second side opening 55-1 in a direction perpendicular to the opening surface of the second side opening 55-1 (in the X-axis direction in the example shown in FIG. 4). In this embodiment, the second cassette 55-2 is a sealed container called a FOUP cassette for preventing contamination handled by device manufacturers, similar to the first cassette 54-2. The second cassette 55-2 is surrounded by a pair of side walls, a bottom plate, and the other side (front) end of the top plate, and a second cassette opening 55-3 of a size and shape that allows the second workpiece 220 to pass through is formed on the opposite side facing the back plate. In the second installation section 55, the second cassette 55-2 is installed at a position where the second cassette opening 55-3 of the second cassette 55-2 faces and is adjacent to the second side opening 55-1 in a direction perpendicular to the opening surface of the second side opening 55-1.

A pair of side walls of the second cassette 55-2 are paired with each other, and a plurality of guide rails extending along the direction in which the rear plate and the second cassette opening 55-3 face each other are formed on the inside. The pair of guide rails (pair of guide rails) are formed such that one side is formed convexly from one side wall toward the other side wall, and the other side is formed convexly from the other side wall toward the one side wall, and are formed at a position where the vertical height is uniform. The multiple pairs of guide rails are arranged at equal intervals in the vertical direction at a predetermined interval that is sufficiently larger than the thickness of the second workpiece 220. The second cassette 55-2 accommodates the second workpiece 220 by placing the end of the second workpiece 220 (the part of the frame 206 attached) on the pair of guide rails, or by placing the end of the second workpiece 220 (the part of the frame 206 attached) on a support plate installed on the pair of guide rails. The second cassette 55-2 contains multiple second workpieces 220, the same number as the number of pairs of guide rails.

In this embodiment, the first cassette 54-2 and the second cassette 55-2 are both FOUP cassettes, but the present invention is not limited to this, and an open container (cassette) may be used instead.

In this manner, the stocker 50 has a first cassette 54-2 installed in the first installation section 54 and a second cassette 55-2 installed in the second installation section 55, whereby the first cassette 54-2 that contains the first workpiece 210 that is not fixed to the frame 206 and the second cassette 55-2 that contains the second workpiece 220 that is fixed to the frame 206 are installed.

In the example of this embodiment shown in FIG. 4, the first installation section 54 is formed at a position closer to the first opening 52-1 than the second installation section 55, and the second installation section 55 is formed at a position closer to the second opening 52-2 than the first installation section 54. In the example of this embodiment shown in FIG. 4, the first installation section 54 and the second installation section 55 are formed on the outside of a pair of side surfaces that face each other in the X-axis direction parallel to the horizontal direction of the housing 51, but this is not limited to this in the present invention, and they may be formed on the outside of any side surface of the housing 51. In addition, in the example of this embodiment shown in FIG. 4, the first installation section 54 and the second installation section 55 are each provided one at the same height, but this is not limited to this in the present invention, and they may be provided at different heights, or may be provided in multiple locations at multiple heights, or may be provided in the same number or different numbers.

In the example of this embodiment shown in FIG. 4, the first installation section 54 and the second installation section 55 are arranged on either side of the transport device 56, so that the first installation section 54 and the second installation section 55 can be provided in positions outside the housing 51 of the stocker 50 where it is easy to install the first cassette 54-2 and the second cassette 55-2, respectively, and the space required for transport by the transport device 56 can be efficiently formed within the housing 51 of the stocker 50.

In this embodiment, the second cassette 55-2 may store, instead of the second workpiece 220, a workpiece 200 and an item 250 other than a device chip manufactured from the workpiece 200, to which a frame 206 is attached.

In this embodiment, the transport device 56 includes a first transport arm 56-1 and a second transport arm 56-2, as shown in FIG. 4. The first transport arm 56-1 transports the first workpiece 210 between the first cassette 54-2 installed in the first installation section 54 and the tray 23 that has landed on the first landing section 53-1 of the landing section 53. The second transport arm 56-2 transports the second workpiece 220 between the second cassette 55-2 installed in the second installation section 55 and the tray 23 that has landed on the second landing section 53-2 of the landing section 53.

As shown in FIG. 5, the first transport arm 56-1 includes a holding part 61, a support part 62, and a drive part 63. The holding part 61 holds the first workpiece 210. In this embodiment, the holding part 61 is made of a thin plate material and is formed into a U-shape with the tip side branching into two at a distance slightly smaller than the diameter of the first workpiece 210, and the top surface of the tip side of the holding part 61 holds the end of the first workpiece 210 from below toward above. The holding part 61 is attached to the support part 62 and moves via the support part 62 in response to the drive of the drive part 63.

The support section 62 is connected to the holding section 61 and the driving section 63, and supports the holding section 61 so that it can move horizontally and vertically by the driving section 63. In this embodiment, the support section 62 is formed of multiple arm members arranged in parallel in the horizontal direction and an axis member extending along the vertical direction, and the holding section 61 is provided at the tip portion of the arm member provided at the tip side, and the driving section 63 is provided at the base end portion of the axis member provided between the arm members and on the base end side. The axis member moves in the vertical direction and horizontal direction according to the drive of the driving section 63, and the multiple arm members rotate around the vertical direction relative to the axis member and arm member, thereby moving the holding section 61 in the horizontal direction and vertical direction. The driving section 63 is driven according to the control of the control unit 59, and moves each part of the support section 62, thereby moving the holding section 61 movably supported by the support section 62 in the horizontal direction and vertical direction. In this embodiment, the driving section 63 is, for example, a cylinder or a ball screw mechanism having a ball screw and a guide.

The first transport arm 56-1 uses the drive unit 63 to move the holding unit 61 into the first cassette 54-2 installed in the first installation unit 54, holds the first workpiece 210 contained in the first cassette 54-2, and uses the drive unit 63 to move the holding unit 61 into the tray 23 landed on the first landing unit 53-1, and releases the hold on the first workpiece 210 within the tray 23, thereby transporting the first workpiece 210 contained in the first cassette 54-2 installed in the first installation unit 54 into the tray 23 landed on the first landing unit 53-1. In addition, the first transport arm 56-1 uses the drive unit 63 to move the holding unit 61 into the tray 23 that has landed on the first landing unit 53-1, holds the first workpiece 210 contained in the tray 23, and uses the drive unit 63 to move the holding unit 61 into the first cassette 54-2 that has been placed in the first installation unit 54, and releases the holding of the first workpiece 210 within the first cassette 54-2, thereby transporting the first workpiece 210 contained in the tray 23 that has landed on the first landing unit 53-1 to the first cassette 54-2 that has been placed in the first installation unit 54.

As shown in FIG. 6, the second transport arm 56-2 includes a holding portion 71, a support portion 72, and a moving mechanism 73. The holding portion 71 holds the second workpiece 220. In this embodiment, the holding portion 71 includes a main body portion 74, a clamp claw 75, and a sensor 76. The main body portion 74 is provided with a pair of two clamp claws 75 protruding from one side parallel to the horizontal direction. The clamp claws 75 are provided in a pair of two arranged vertically on that one side of the main body portion 74, and are provided so as to be freely movable in the vertical direction relative to the main body portion 74 by a drive mechanism (not shown). The sensor 76 is provided on the main body portion 74, and detects the vertical distance between the pair of clamp claws 75. The holding unit 71 has one surface of the main body 74 abutting against the end of the frame 206 of the second workpiece 220, and while checking the vertical spacing between the pair of clamp claws 75 based on the detection value of the sensor 76, moves the pair of clamp claws 75 in a direction narrowing the vertical spacing between the pair of clamp claws 75 using a drive mechanism (not shown), thereby clamping and holding the end of the frame 206 of the second workpiece 220. The holding unit 71 is attached to the support unit 72 on the other side of the main body 74, and moves via the support unit 72 in response to the drive of the movement mechanism 73.

The support part 72 is connected to the holding part 71 and the moving mechanism 73, and supports the holding part 71 so that it can be moved horizontally and vertically by the moving mechanism 73. In this embodiment, the support part 72 is formed of an arm member arranged parallel to the horizontal direction, the holding part 71 is provided at the tip part of the support part 72, and the moving mechanism 73 is provided at the base part of the support part 72. The support part 72 moves along the horizontal and vertical directions in accordance with the driving of the moving mechanism 73, thereby moving the holding part 71 in the horizontal and vertical directions. The moving mechanism 73 is driven under the control of the control unit 59, and moves the support part 72, thereby moving the holding part 71, which is movably supported by the support part 72, in the horizontal and vertical directions. In this embodiment, the moving mechanism 73 is, for example, a cylinder or a ball screw mechanism having a ball screw and a guide.

The second transport arm 56-2 uses the moving mechanism 73 to move the holding portion 71 into the second cassette 55-2 installed in the second installation section 55, holds the second workpiece 220 contained in the second cassette 55-2, and uses the moving mechanism 73 to move the holding portion 71 into the tray 23 that has landed on the second landing section 53-2, and releases the hold on the second workpiece 220 within the tray 23, thereby transporting the second workpiece 220 contained in the second cassette 55-2 installed in the second installation section 55 into the tray 23 that has landed on the second landing section 53-2. In addition, the second transport arm 56-2 uses the movement mechanism 73 to move the holding part 71 into the tray 23 that has landed on the second landing part 53-2, holds the second workpiece 220 contained in the tray 23, and uses the movement mechanism 73 to move the holding part 71 into the second cassette 55-2 that has been placed in the second installation part 55, and releases the holding of the second workpiece 220 in the second cassette 55-2, thereby transporting the second workpiece 220 contained in the tray 23 that has landed on the second landing part 53-2 to the second cassette 55-2 that has been placed in the second installation part 55.

The transport device 56 is equipped with a reader that reads the barcode or ID of the item 250 (workpiece 200) when the first transport arm 56-1 and the second transport arm 56-2 transport the item 250 (workpiece 200) out of the first cassette 54-2, the second cassette 55-2, and the tray 23, and when the item 250 (workpiece 200) is transported into the first cassette 54-2, the second cassette 55-2, and the tray 23, and that obtains information on the type of the item 250 (workpiece 200) and outputs the information to the control unit 59.

In this way, the stocker 50 places the first cassette 54-2 and the second cassette 55-2 on the first installation section 54 and the second installation section 55, respectively, and the first workpiece 210 is transported between the first cassette 54-2 and the tray 23 landed on the first landing section 53-1 by the first transport arm 56-1, and the second workpiece 220 is transported between the second cassette 55-2 and the tray 23 landed on the second landing section 53-2 by the second transport arm 56-2, thereby transporting the item 250 (workpiece 200) from the first cassette 54-2 and the second cassette 55-2 to the transport vehicle 20 through the opening 52 (first opening 52-1, second opening 52-2) in the ceiling 51-1 above the housing 51.

In this embodiment of the transport device 56, the drive unit 63 of the first transport arm 56-1 and the movement mechanism 73 of the second transport arm 56-2 are provided separately from each other, but the present invention is not limited to this. At least one of the mechanism for moving in the vertical direction of the drive unit 63 and the mechanism for moving in the vertical direction and the horizontal direction (X, Y) of the movement mechanism 73 may be shared, in which case more efficient transport can be achieved.

The receiving unit 57 is connected to the control unit 30 of the processing system 1 so as to be able to communicate with the control unit 30, receives information transmitted from the control unit 30, and outputs the received information to the control unit 59. In this embodiment, the receiving unit 57 is connected to the control unit 30 so as to be able to communicate with the control unit 30 wirelessly, but the present invention is not limited to this, and the receiving unit 57 may be connected to the control unit 30 so as to be able to communicate with the control unit 30 by wire. In this embodiment, the information received by the receiving unit 57 from the control unit 30 is, for example, command information for operations related to the transport process (unloading process and loading process) of the stocker 50, request information for prompting the transmission of information such as the transport status and transport history of the item 250 (workpiece 200) in the stocker 50, and information on the position of the item 250 (workpiece 200).

The transmitting unit 58 is connected to the control unit 30 so as to be able to communicate with the control unit 30, and transmits information output from the control unit 59 to the control unit 30. In this embodiment, the transmitting unit 58 is connected to the control unit 30 so as to be able to communicate with the control unit 30 wirelessly, but the present invention is not limited to this, and the transmitting unit 58 may be connected to the control unit 30 so as to be able to communicate with the control unit 30 via a wire. In this embodiment, the information transmitted by the transmitting unit 58 to the control unit 30 is, for example, information on the transport status and transport history of the item 250 (workpiece 200) in the stocker 50, information on the position of the item 250 (workpiece 200), etc.

The control unit 59 controls the operation of each component of the stocker 50 to cause the stocker 50 to perform various transport processing operations for the item 250 (workpiece 200). The control unit 59 controls the opening and closing doors (not shown) provided in the first side opening 54-1 and the second side opening 55-1, respectively, to switch the first side opening 54-1 and the second side opening 55-1 between an open state and a closed state. The control unit 59 controls the first transport arm 56-1 to control the transport of the first workpiece 210 between the first cassette 54-2 installed in the first installation section 54 and the tray 23 landed on the first landing section 53-1 of the landing section 53 by the first transport arm 56-1, and obtains information such as the transport status and transport history of the first workpiece 210 and the position of the first workpiece 210 by the first transport arm 56-1. The control unit 59 controls the second transport arm 56-2 to control the transport of the second workpiece 220 (item 250) between the second cassette 55-2 installed in the second installation section 55 and the tray 23 landed on the second landing section 53-2 of the landing section 53 by the second transport arm 56-2, and also acquires the transport status and transport history of the second workpiece 220 (item 250), information on the position of the second workpiece 220 (item 250), etc., by the second transport arm 56-2. In this way, the control unit 59 acquires information on the transport status and transport history of the item 250 (workpiece 200) in the stocker 50, and the position of the item 250 (workpiece 200) from the first transport arm 56-1 and the second transport arm 56-2.

The control unit 59 acquires information received by the receiving unit 57 from the control unit 30, and outputs information to be transmitted to the control unit 30 to the transmitting unit 58. The control unit 59 causes the stocker 50 to perform an operation according to the command information received by the receiving unit 57 from the control unit 30. The control unit 59 causes the transmitting unit 58 to transmit information such as the transport status and transport history of the item 250 (workpiece 200) in the stocker 50, and the position of the item 250 (workpiece 200) to the control unit 30 in response to the request information received by the receiving unit 57 from the control unit 30. Even if the control unit 59 does not receive request information from the control unit 30, it can also cause the transmitting unit 58 to transmit information such as the transport status and transport history, processing status and processing history, and the position of the item 250 (workpiece 200) in the stocker 50 to the control unit 30.

The information on the transport status and transport history of the item 250 (workpiece 200) and the position of the item 250 (workpiece 200) obtained from the first transport arm 56-1 and the second transport arm 56-2 is linked to the type of the item 250 (workpiece 200) and the type of stocker 50 into which the item 250 (workpiece 200) was transported, and the date and time at which the item was transported into and out of the stocker 50. The type of stocker 50 refers to information that distinguishes each stocker 50, such as the type of processing performed by the stocker 50 or an identification number assigned to each stocker 50.

In this embodiment, the control unit 59 includes a computer system. The computer system included in the control unit 59 is a computer having an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input/output interface device. The arithmetic processing device of the control unit 59 performs arithmetic processing according to a computer program stored in the storage device of the control unit 59, and outputs control signals for controlling the stocker 50 to each component of the stocker 50 via the input/output interface device of the control unit 59.

Figure 7 is a perspective view showing a portion of the processing system 1 of Figure 1. Figure 7 shows a second processing device 120, which is an example of the processing device 100 of the processing system 1 of Figure 1, a portion of the transport path 10, and a portion of the transport vehicle 20. As shown in Figure 7, the processing device 100 of the processing system 1 includes a housing 310, a landing section 320, a transport unit 330, a processing unit 340, a receiving unit 350, a transmitting unit 360, and a control unit 370.

The first processing device 110 is a second processing device 120 in which the object to be transported and processed is changed to the first workpiece 210 of the workpieces 200, and the components are appropriately modified in response to the change. The other components are the same as those of the second processing device 120 described below. In the following description, components and items that are similar (generally common) between the first processing device 110 and the second processing device 120 will be described using the second processing device 120 shown in FIG. 7 as an example of the components and items of the processing device 100.

As shown in FIG. 7, the housing 310 houses each of the components of the processing device 100 except for the housing 310. An opening 312 is formed in the ceiling 311 above the housing 310, the size and shape of which allows the tray 23 of the transport vehicle 20, which carries the article 250 (workpiece 200), to pass through in the vertical direction as it ascends and descends from the transport vehicle 20. The landing section 320 is a platform on which the tray 23 descended by the elevating mechanism 24 from the transport vehicle 20 lands and is placed. The landing section 320 supports the tray 23 that has landed and been placed thereon, facing upward.

The transport unit 330 is installed adjacent to the landing section 320, as shown in FIG. 7. The transport unit 330 carries out the item 250 (workpiece 200) contained in the tray 23 that has landed on the landing section 320 and places it at a predetermined position relative to the processing unit 340, and also carries the item 250 (workpiece 200) placed at a predetermined position around the processing unit 340 into the tray 23 that has landed on the landing section 320. Here, the predetermined position relative to the processing unit 340, in the example of this embodiment shown in FIG. 7, is on the holding table (chuck table) around the processing unit 340-1 (cutting unit) and processing unit 340-3 (imaging unit, inspection unit), or on the spinner table of the processing unit 340-2 (cleaning unit).

In this embodiment, the transport unit 330 includes, for example, a transport arm 331, a transport arm 332, and a pair of rails 333. The transport arm 331 transports the item 250 (workpiece 200) between the tray 23 landed on the landing section 320 and the pair of rails 333. The transport arm 332 transports the item 250 (workpiece 200) between the pair of rails 333 and a predetermined position around the processing unit 340. The pair of rails 333 can approach or move away from each other while maintaining a parallel state, and the item 250 (workpiece 200) can be held between the pair of rails 333 via the frame 206. The transport unit 330 also includes a reader that reads the barcode or ID of the item 250 (workpiece 200) when the item 250 (workpiece 200) is transported out of or into the tray 23, to obtain information on the type of the item 250 (workpiece 200) and outputs the information to the control unit 370.

The processing unit 340 processes the workpiece 200. In this embodiment, the processing unit 340 is, for example, a processing unit that processes the workpiece 200, a cleaning unit that cleans the workpiece 200, an imaging unit that images the workpiece 200, an inspection unit that inspects the workpiece 200, a tape application unit that applies or removes the support tape 205 or the like to the workpiece 200, a film formation unit that forms a film on the workpiece 200, etc. That is, the processing device 100 equipped with the processing unit 340 can perform at least one of processing, cleaning, inspection, imaging, application of the support tape 205 or the like, removal of the support tape 205 or the like, and film formation on the workpiece 200.

When the processing unit 340 is a processing unit, it may be, for example, a cutting processing unit having a spindle on which a cutting blade is rotatably mounted and cutting the workpiece 200 with the cutting blade, a grinding processing unit having a spindle on which a grinding wheel with a grinding wheel disposed thereon is rotatably mounted and grinding the workpiece 200 with the grinding wheel, a polishing processing unit having a spindle on which a mounter with a polishing pad fixed thereto is rotatably mounted and polishing the workpiece 200 with the polishing pad fixed to the mounter, or a byte cutting processing unit having a spindle on which a mounter with a byte tool fixed thereto is rotatably mounted and cutting the workpiece 200 with the byte tool fixed to the mounter. , a laser processing unit equipped with a laser beam irradiator that irradiates the workpiece 200 with a laser beam and performs laser processing of the workpiece 200 with the laser beam, a plasma processing unit that supplies plasmatized gas to the workpiece 200 and performs etching, an ultraviolet processing unit equipped with an ultraviolet irradiator that irradiates ultraviolet rays to the workpiece 200 and performs ultraviolet irradiation processing of the workpiece 200, a tape expansion unit that expands the support tape 205 attached to the workpiece 200, divides the workpiece 200 based on the division starting point to manufacture device chips and widens the spacing between the device chips, or performs tape expansion processing to widen the spacing between device chips manufactured by dividing the workpiece 200, etc. When the processing unit 340 is a processing unit, the processing device 100 is a processing device that processes the workpiece 200.

When the processing unit 340 is a cleaning unit, it is equipped with a nozzle that supplies cleaning liquid, cleaning gas, etc. to the workpiece 200, and cleans the workpiece 200. When the processing unit 340 is a cleaning unit, the processing device 100 is a cleaning device that cleans the workpiece 200.

When the processing unit 340 is an imaging unit, it includes an imaging device that images the workpiece 200, and a work mover that moves the workpiece 200 to change and adjust the position and orientation of the workpiece 200 relative to the imaging device, and performs imaging processing of the workpiece 200. When the processing unit 340 is an imaging unit, the processing device 100 is an imaging device that performs imaging processing of the workpiece 200.

When the processing unit 340 is an inspection unit, it is equipped with a laser beam irradiator that irradiates the workpiece 200 with an inspection laser beam, an electromagnetic wave irradiator that irradiates the workpiece 200 with inspection electromagnetic waves, an ultraviolet irradiator that irradiates the workpiece 200 with inspection ultraviolet rays, an imager that captures an inspection image of the workpiece 200, and an inspection and judgment section that inspects and judges the workpiece 200 based on the results of the irradiation and imaging, and inspects and processes the workpiece 200. When the processing unit 340 is an inspection unit, the processing device 100 is an inspection device that inspects and processes the workpiece 200.

When the processing unit 340 is a tape application unit, it includes a support tape etc. supply section that supplies the support tape 205 etc. to the workpiece 200, an application section that applies the supplied support tape 205 etc. to the workpiece 200, and a peeling section that peels off the support tape 205 etc. applied to the workpiece 200, and performs an application process or a peeling process on the workpiece 200. When the processing unit 340 is a tape application unit, the processing device 100 is a tape application device that performs an application process or a peeling process on the workpiece 200.

When the processing unit 340 is a film forming unit, it has a film forming section that forms a film on the workpiece 200 and performs a film formation process on the workpiece 200. When the processing unit 340 is a film forming unit, the processing device 100 is a film forming device that performs a film formation process on the workpiece 200.

In the processing device 100 (second processing device 120) shown in FIG. 7, the processing unit 340 includes a processing unit 340-1, a processing unit 340-2, and a processing unit 340-3. The processing device 100 (second processing device 120) shown in FIG. 7 is a processing device (cutting device) in which one processing unit 340, 340-1, is a cutting processing unit, and can perform cutting processing on the workpiece 200 (second workpiece 220). The processing device 100 (second processing device 120) shown in FIG. 7 is also a cleaning device in which one processing unit 340, 340-3, is a cleaning unit, and can perform cleaning processing on the workpiece 200 (second workpiece 220). The processing device 100 (second processing device 120) shown in FIG. 7 is also an imaging device in which one processing unit 340, 340-2, is an imaging unit, and can perform imaging processing on the workpiece 200 (second workpiece 220). The processing device 100 (second processing device 120) shown in FIG. 7 is essentially an inspection device equipped with an inspection unit, since the processing unit 340-2 has the function of an imager and the control unit 370 has the function of an inspection and determination unit, and can perform inspection processes such as a so-called kerf check that automatically checks whether the cutting process has been performed within a normal range on the workpiece 200 (second workpiece 220).

The processing device 100 may be provided with an exchange unit (not shown) corresponding to the processing unit 340. The exchange unit performs an exchange process in the processing unit 340 to exchange items 250 other than the workpiece 200, such as consumables including processing tools used to process the workpiece 200, cleaning tools for cleaning the processing device 100, maintenance parts for maintaining the processing device 100, etc. The exchange unit performs the exchange process by collecting used processing tools, consumables, etc. from the processing unit 340 and replenishing and mounting new processing tools, consumables, etc. in the processing unit 340.

After the replacement process is performed, the replacement unit recovers the used processing tools and consumables from the processing unit 340 and transfers them to the tray 23 that lands on the landing section 320 and is then transported out of the processing device 100 through the opening 312, and new processing tools and consumables are brought in from outside the processing device 100 through the opening 312 and replenished to the replacement unit from the tray 23 that lands on the landing section 320. In the processing device 100 (second processing device 120) that is the cutting device shown in FIG. 7, the replacement unit is, for example, a cutting blade replacement unit that replaces the cutting blade attached to the processing unit 340 that is the cutting processing unit.

The receiving unit 350 is connected to the control unit 30 of the processing system 1 so as to be able to communicate with the information, receives information transmitted from the control unit 30, and outputs the received information to the control unit 370. In this embodiment, the receiving unit 350 is connected to the control unit 30 so as to be able to communicate with the information wirelessly, but the present invention is not limited to this, and the receiving unit 350 may be connected to the control unit 30 so as to be able to communicate with the information wired. In this embodiment, the information received by the receiving unit 350 from the control unit 30 is, for example, command information for an operation related to the processing of the processing device 100, request information for prompting the transmission of information such as the transport status and transport history of the item 250 (workpiece 200) in the processing device 100, the processing status and processing history, and information on the position of the item 250 (workpiece 200).

The transmission unit 360 is connected to the control unit 30 so as to be able to communicate information, and transmits information output from the control unit 370 to the control unit 30. In this embodiment, the transmission unit 360 is connected to the control unit 30 so as to be able to communicate information wirelessly, but the present invention is not limited to this, and the transmission unit 360 may be connected to the control unit 30 so as to be able to communicate information wired. In this embodiment, the information transmitted by the transmission unit 360 to the control unit 30 is, for example, information on the transport status and transport history of the item 250 (workpiece 200) in the processing device 100, the processing status and processing history, and information on the position of the item 250 (workpiece 200).

The control unit 370 controls the operation of each component of the processing device 100 to cause the processing device 100 to perform various processing operations on the item 250 (workpiece 200). The control unit 370 controls the transport unit 330 to control the transport of the item 250 (workpiece 200) between the tray 23 placed on the landing section 320 and a predetermined position of the processing unit 340, and obtains the transport status and transport history of the item 250 (workpiece 200), information on the position of the item 250 (workpiece 200), etc. from the transport unit 330. The control unit 370 controls the processing unit 340 to control the processing of the item 250 (workpiece 200) by the processing unit 340, and obtains the processing status and processing history of the item 250 (workpiece 200), information on the position of the item 250 (workpiece 200), etc. from the processing unit 340. In this way, the control unit 370 acquires information from the transport unit 330 and the processing unit 340 regarding the transport status and transport history of the item 250 (workpiece 200) in the processing device 100, the processing status and processing history, and the position of the item 250 (workpiece 200).

The control unit 370 acquires information received by the receiving unit 350 from the control unit 30, and outputs information to be transmitted to the control unit 30 to the transmitting unit 360. The control unit 370 causes the processing device 100 to perform an operation according to the command information received by the receiving unit 350 from the control unit 30. In response to the request information received by the receiving unit 350 from the control unit 30, the control unit 370 causes the transmitting unit 360 to transmit information such as the transport status and transport history, processing status and processing history, and position information of the item 250 (workpiece 200) in the processing device 100 to the control unit 30. Even if the control unit 370 does not receive request information from the control unit 30, it can also spontaneously cause the transmitting unit 360 to transmit information such as the transport status and transport history, processing status and processing history, and position information of the item 250 (workpiece 200) in the processing device 100 to the control unit 30.

Here, the information on the transport status and transport history of the item 250 (workpiece 200) and the position of the item 250 (workpiece 200) acquired from the transport unit 330 is the type of the item 250 (workpiece 200) and the type of processing device 100 into which the item 250 (workpiece 200) of that type was transported, linked to the date and time (time) at which the item was transported into and out of the processing device 100. The type of processing device 100 refers to information that distinguishes each processing device 100, such as the type of processing performed by the processing device 100 and an identification number assigned to each processing device 100.

The processing status of the processing device 100 may be, for example, the type of processing device 100 being processed, the transport status including the item 250 (workpiece 200) brought into the housing 310 of the processing device 100, the positional information of the item 250 (workpiece 200) inside the housing 310 of the processing device 100, the processing status of the workpiece 200 by the processing unit 340, an error status regarding errors that have occurred in the processing unit 340 during processing or in the workpiece 200 during and after processing, and the replacement processing status by the replacement unit.

The processing history of the processing device 100 is the type of processing device 100, the transport history, processing history, error history, and exchange processing history of the item 250 (workpiece 200) carried into the housing 310 of the processing device 100 for each item 250 (workpiece 200) brought into the housing 310 of the processing device 100. Specifically, for each item 250 (workpiece 200), information on the transport processing within the housing 310 of the processing device 100 and the history of position information when the transport processing was performed, information on the processing, the processing conditions at the time of processing, and the history of processing data obtained during processing, error history regarding errors that occurred in the processing unit 340 during processing and in the workpiece 200 during and after processing, information on the replacement processing, the replacement processing conditions at the time of replacement processing, and the history of replacement processing data obtained during replacement processing are linked to the date and time (time) when these processes were performed and the type of the item 250 (workpiece 200).

In this embodiment, the control unit 370 includes a computer system similar to the control unit 59 described above. The arithmetic processing device of the control unit 370 performs arithmetic processing according to a computer program stored in the storage device of the control unit 370, and outputs control signals for controlling the processing device 100 to each component of the processing device 100 via the input/output interface device of the control unit 370.

As shown in FIG. 7, the transport path 10 of the processing system 1 includes a passage area 11, a transfer area 12, and a guide section 13. The passage area 11 is disposed above the housing 51 of the stocker 50 and above the housings 310 of the multiple processing devices 100. Two transfer areas 12 (two in the example shown in FIG. 4) are disposed adjacent to the passage area 11 above the housing 51 for each stocker 50, and one transfer area 12 (one in the example shown in FIG. 7) is disposed adjacent to the passage area 11 above the housing 310 for each processing device 100. The passage area 11 and the transfer area 12 are provided with vertical and horizontal lines (not shown) that can be detected by sensors 21-3 and 21-4 of the transport vehicle 20 described later.

In the transfer area 12 provided for each stocker 50, as shown in FIG. 4, an opening 14 is formed directly above each opening 52 (first opening 52-1 and second opening 52-2) of the housing 51, which is of a size and shape that the body 21 of the transport vehicle 20 cannot pass through, but which allows the tray 23 of the transport vehicle 20 to pass through. In the transfer area 12 provided for each processing device 100, as shown in FIG. 7, an opening 14 is formed directly above the opening 312 of the housing 310, which is of a size and shape that the body 21 of the transport vehicle 20 cannot pass through, but which allows the tray 23 of the transport vehicle 20 to pass through.

The guide parts 13 are disposed on both widthwise ends of the passage area 11 and the transfer area 12. The guide parts 13 are formed higher than the wheels 22 of the transport vehicle 20, thereby preventing the transport vehicle 20 from climbing over the guide parts 13 and falling off the passage area 11 and the transfer area 12.

Figure 8 is a perspective view showing the transport vehicle 20 of the processing system 1 of Figure 1. Figure 9 is a side cross-sectional view showing the lifting mechanism 24 of the transport vehicle 20 of Figure 8. The transport vehicle 20 is an automated guided vehicle (AGV) that runs unmanned, and as shown in Figure 8, has a vehicle body 21, wheels 22, a tray 23, a lifting mechanism 24, a receiving unit 27, a transmitting unit 28, and a control unit 29.

The vehicle body 21 includes a flat first frame 21-1 and a flat second frame 21-2 arranged above the first frame 21-1 at a distance from the first frame 21-1. The transport vehicle 20 is provided with sensors 21-3 (only the rear end is shown in FIG. 8) at the front end (the end on the left rear side in FIG. 8) and rear end (the end on the right front side in FIG. 8) of the first frame 21-1, and a pair of sensors 21-4 (only the left end is shown in FIG. 8) at both side ends of the first frame 21-1. The sensors 21-3 and 21-4 are mounted so as to face the passage area 11 and the transfer area 12 of the transport path 10 along which the transport vehicle 20 travels, respectively, and detect vertical and horizontal lines (not shown) provided in the passage area 11 and the transfer area 12. The sensors 21-3 and 21-4 output the detection results to the control unit 29.

The transport vehicle 20 is also provided with a collision sensor 21-5 at the front end of the first frame 21-1, which detects when the transport vehicle 20 collides with an obstacle. For example, a push button switch is used as the collision sensor 21-5. When the front end of the transport vehicle 20 collides with an obstacle, the collision sensor 21-5 detects the collision of the transport vehicle 20 and outputs the detection result to the control unit 29.

The transport vehicle 20 also has a cover 21-6 on the underside of the rear end of the first frame 21-1. The cover 21-6 covers the opening 23-1 of the tray 23 when the tray 23 is positioned in a storage position between the front wheels 22 and the rear wheels 22 on the underside of the first frame 21-1. By covering the opening 23-1, the cover 21-6 prevents foreign objects from entering the tray 23 while the transport vehicle 20 is traveling, prevents foreign objects from adhering to the item 250 (workpiece 200), and prevents the item 250 (workpiece 200) from falling out of the tray 23.

The wheels 22 include a pair of front wheels 22 provided at both ends of the front side of the lower surface of the first frame 21-1, and a pair of rear wheels 22 provided at both ends of the rear side of the lower surface of the first frame 21-1. The wheels 22 are provided to be rotatable independently of each other around the axis, and the orientation of the rotation axis and the rotation direction are controlled independently of each other. The outer circumferential surface of the wheels 22 contacts the passage area 11 or the transfer area 12 of the conveying path 10. Each of the wheels 22 is connected to a motor 22-1, and the wheels 22 run on the passage area 11 or the transfer area 12 of the conveying path 10 by applying a rotational motion around the axis by the motor 22-1. The motor 22-1 is connected to a battery 22-2, and is driven by power supplied from the battery 22-2. In this embodiment, the wheels 22 are, for example, mecanum wheels having multiple inclined barrel-shaped (cylindrical) rotating bodies attached to the outer circumferential surface.

The tray 23 stores at least one of the workpiece 200 or the item 250 used in the processing device 100. The tray 23 is provided on the underside of the first frame 21-1, and is formed in a flat box shape capable of storing the item 250 (workpiece 200) inside. The tray 23 has an opening 23-1 on the rear side of the transport vehicle 20 through which the item 250 (workpiece 200) can be freely inserted and removed. The tray 23 has guide rails on the inside that hold the end of the stored item 250 (workpiece 200) or the end of the frame 206 that supports the stored item 250 (workpiece 200).

The lifting mechanism 24 raises and lowers the tray 23 relative to the first frame 21-1 of the vehicle body 21. The lifting mechanism 24 raises and lowers the tray 23 between a storage position, which is located between the front wheels 22 and the rear wheels 22 on the underside of the first frame 21-1, and a lowered position, which is located below the wheels 22. In the storage position, the underside of the tray 23 is located above the lower ends of the wheels 22 that run on the transport path 10. Therefore, the tray 23 does not come into contact with the transport path 10 while the transport vehicle 20 is traveling on the transport path 10.

Each component of the lifting mechanism 24, except for the hanging member 89 whose lower end is attached and connected to the tray 23, is disposed in the space between the first frame 21-1 and the second frame 21-2. When the transport vehicle 20 is positioned over the opening 14 of the transfer area 12, the lifting mechanism 24 lowers the tray 23 positioned in the storage position, and positions the tray 23 on the landing part 53 of the stocker 50 or the landing part 320 of the processing device 100. The lifting mechanism 24 also raises the tray 23 positioned on the landing part 53 of the stocker 50 or the landing part 320 of the processing device 100, and positions the tray 23 in the storage position.

As shown in FIG. 9, the lifting mechanism 24 includes a motor 82 having a rotating shaft 81, which is fixed to the upper surface of the first frame 21-1; a first rotating shaft 83 and a second rotating shaft 84 that are rotatably supported on the upper surface of the first frame 21-1 and are parallel to each other; a pulley 86 fixed to one end of the first rotating shaft 83 and around which an endless connecting member 85 such as a belt or chain is hung from the rotating shaft 81 of the motor 82; pulleys (not shown) fixed to the other ends of the first rotating shaft 83 and the second rotating shaft 84 and around which an endless connecting member such as a belt or chain is hung; cylindrical reels 87 fixed to both ends of the first rotating shaft 83 and around which a hanging member 89 is wound; cylindrical reels 88 fixed to both ends of the second rotating shaft 84 and around which a hanging member 89 is wound; and a hanging member 89.

The lifting mechanism 24 rotates the first rotating shaft 83 and the second rotating shaft 84 around their respective axes using the motor 82, and rotates the reels 87 and 88 around their respective axes, thereby winding up the hanging member 89 onto the reels 87 and 88 and feeding out the hanging member 89 from the reels 87 and 88.

When the lifting mechanism 24 winds the hanging member 89 onto the reels 87 and 88, it positions the tray 23 in the storage position. When the lifting mechanism 24 unloads the hanging member 89 from the reels 87 and 88, it positions the tray 23 in the lowered position.

In this embodiment, four hanging members 89 are provided. For example, a belt having a predetermined width is used as the hanging members 89. The lower ends of the four hanging members 89 are attached to the upper surface of the tray 23 at intervals from each other. In addition to a belt, a wire rope that can be wound up and let out may be used as the hanging member 89 in the present invention.

When the transport vehicle 20 is first set on the transport path 10 of the processing system 1, the location where it is set and the type of the transport vehicle 20 are registered in the control unit 29 and the control unit 30. After the transport vehicle 20 is set, in this embodiment, as described above, the position of the transport vehicle 20 on the transport path 10 is detected by the sensors 21-3 and 21-4. Note that the transport vehicle 20 is not limited to this configuration in the present invention, and may be configured to detect a mark (not shown) by a line sensor instead of this configuration, or to detect the position of the transport vehicle 20 by multiple sensors installed on the transport path 10, or to wirelessly connect the transport vehicle 20 to a GPS (Global Positioning System) so that information can be communicated, and the position of the transport vehicle 20 may be obtained using the GPS. Any configuration that can obtain the position of the transport vehicle 20 may be used.

The receiving unit 27 is connected to the control unit 30 so as to be able to communicate with it, receives information transmitted from the control unit 30, and outputs the received information to the control unit 29. In this embodiment, the receiving unit 27 is connected to the control unit 30 so as to be able to communicate with it wirelessly, but the present invention is not limited to this, and the receiving unit 27 may be connected to the control unit 30 so as to be able to communicate with it via a wire. In this embodiment, the information that the receiving unit 27 receives from the control unit 30 is, for example, command information regarding the operation of the transport vehicle 20 and the raising and lowering of the tray 23, and request information prompting the transmission of the transport status and transport history of the transport vehicle 20, including the position of the transport vehicle 20 and the position of the tray 23.

The transmission unit 28 is connected to the control unit 30 so as to be able to communicate information, and transmits information output from the control unit 29 to the control unit 30. In this embodiment, the transmission unit 28 is connected to the control unit 30 so as to be able to communicate information wirelessly, but the present invention is not limited to this, and the transmission unit 28 may be connected to the control unit 30 so as to be able to communicate information wired. In this embodiment, the information transmitted by the transmission unit 28 to the control unit 30 is, for example, information on the transportation status and transportation history of the transport vehicle 20.

The control unit 29 controls the operation of each component of the transport vehicle 20, causing the transport vehicle 20 to perform operations related to the travel of the transport vehicle 20 and the lifting and lowering of the tray 23. The control unit 29 controls the travel of the transport vehicle 20 by controlling the motor 22-1 connected to the wheels 22 and the angle of the wheels 22, etc. The control unit 29 controls the lifting and lowering movement of the tray 23 by controlling the motor 82 of the lifting mechanism 24.

The control unit 29 controls the sensors 21-3 and 21-4 to obtain the position of the transport vehicle 20 on the transport path 10. The control unit 29 generates information on the transport status and transport history of the transport vehicle 20 based on information on the position of the transport vehicle 20 on the transport path 10 and information on the type of item 250 (workpiece 200) transported by the transport vehicle 20.

The control unit 29 acquires information received by the receiving unit 27 from the control unit 30, and outputs information to be transmitted to the control unit 30 to the transmitting unit 28. The control unit 29 causes the transport vehicle 20 to perform an operation according to the command information received by the receiving unit 27 from the control unit 30. The control unit 29 causes the transmitting unit 28 to transmit information on the transport status and transport history of the transport vehicle 20 to the control unit 30 according to the request information received by the receiving unit 27 from the control unit 30. Even if the control unit 29 does not receive request information from the control unit 30, it can also cause the transmitting unit 28 to transmit information on the transport status and transport history of the transport vehicle 20 to the control unit 30 on its own initiative.

Here, the transport status of the transport vehicle 20 includes, for example, the item 250 (workpiece 200) being transported, the type of transport vehicle 20 being transported, the type of transport path 10 the transport vehicle 20 is transporting and the position on the transport path 10, the transport speed, and error status related to errors that occurred in the transport vehicle 20 being transported and the workpiece 200 during and after transport. In addition, the transport history of the transport vehicle 20 includes, for each transported item 250 (workpiece 200), the type of transport vehicle 20 that transported the item, the history of the type of transport path 10 that the transport vehicle 20 transported, the passing history of the position on the transport path 10, the transport speed history, and the error history related to errors that occurred in the transport vehicle 20 being transported and the workpiece 200 during and after transport, all of which are associated with the time when the transport was performed and the type of the item 250 (workpiece 200).

In this embodiment, the control unit 29 includes a computer system similar to the control unit 370 described above. The arithmetic processing device of the control unit 29 performs arithmetic processing according to a computer program stored in the storage device of the control unit 29, and outputs control signals for controlling the transport vehicle 20 to each component of the transport vehicle 20 via the input/output interface device of the control unit 29.

The control unit 30 centrally manages the overall control of the processing system 1. The control unit 30 is communicatively connected to the receiving unit 57 and transmitting unit 58 of the stocker 50, communicatively connected to the receiving unit 350 and transmitting unit 360 of each processing device 100, and communicatively connected to the receiving unit 27 and transmitting unit 28 of each transport vehicle 20. The control unit 30 transmits command information to each receiving unit 57, 350, 27, thereby remotely controlling and operating the stocker 50, each processing device 100, and each transport vehicle 20 via each control unit 59, 370, 29.

The control unit 30 can receive and grasp the transport status and transport history of the stocker 50, the position information of the item 250 (workpiece 200) in the stocker 50, etc. from the transmission unit 58, and can receive and grasp the transport status and transport history of the item 250 (workpiece 200) in each processing device 100, the processing status and processing history of each processing device 100, the position information of the item 250 (workpiece 200) in each processing device 100, etc. from the transmission unit 360, and can receive and grasp the transport status and transport history information of each transport vehicle 20 from the transmission unit 28. In this way, the control unit 30 can comprehensively control and operate the stocker 50, each processing device 100, and each transport vehicle 20, which are components of the processing system 1. The control unit 30 also functions as a server that collectively manages various information (data) received from the stocker 50, various information (data) received from each processing device 100, and various information (data) received from each transport vehicle 20.

In this embodiment, the control unit 30 includes a computer system similar to the control units 59, 370, and 29. The arithmetic processing device of the control unit 30 performs arithmetic processing according to a computer program stored in the storage device of the control unit 30, and outputs control signals for controlling the processing system 1 to each component of the processing system 1 via the input/output interface device of the control unit 30.

The processing system 1 according to the embodiment having the above-mentioned configuration moves the transport vehicle 20 onto the stocker 50 under the control of the control unit 30, has the stocker 50 load the first workpiece 210 from the first cassette 54-2 onto the transport vehicle 20, moves the transport vehicle 20 onto the first processing device 110 so that the transport vehicle 20 transports the first workpiece 210 onto the first processing device 110, loads the first workpiece 210 from the transport vehicle 20 into the first processing device 110, and processes the first workpiece 210 by the first processing device 110. In addition, the processing system 1 of the embodiment moves the transport vehicle 20 onto the first processing device 110, loads the first workpiece 210 processed by the first processing device 110 from the first processing device 110 onto the transport vehicle 20, and moves the transport vehicle 20 onto another first processing device 110, so that the transport vehicle 20 transports the first workpiece 210 after the previous processing onto the other first processing device 110, loads the first workpiece 210 after the previous processing from the transport vehicle 20 into the other first processing device 110, and further processes the first workpiece 210 after the previous processing by the other first processing device 110. In addition, the processing system 1 according to the embodiment moves the transport vehicle 20 onto the first processing device 110, loads the first workpiece 210 processed by the first processing device 110 from the first processing device 110 onto the transport vehicle 20, moves the transport vehicle 20 onto the stocker 50, and transports the first workpiece 210 after the previous processing onto the stocker 50 using the transport vehicle 20, loads the first workpiece 210 from the transport vehicle 20 into the stocker 50, and loads the first workpiece 210 after the previous processing into the first cassette 54-2 using the stocker 50.

In addition, the processing system 1 according to the embodiment, under the control of the control unit 30, moves the transport vehicle 20 onto the stocker 50, has the stocker 50 load the second workpiece 220 from the second cassette 55-2 onto the transport vehicle 20, moves the transport vehicle 20 onto the second processing device 120, transports the second workpiece 220 onto the second processing device 120 using the transport vehicle 20, loads the second workpiece 220 from the transport vehicle 20 into the second processing device 120, and processes the second workpiece 220 using the second processing device 120. In addition, the processing system 1 according to the embodiment moves the transport vehicle 20 onto the second processing device 120, loads the second workpiece 220 processed by the second processing device 120 from the second processing device 120 onto the transport vehicle 20, and moves the transport vehicle 20 onto another second processing device 120, thereby transporting the second workpiece 220 after the previous processing onto the other second processing device 120 by the transport vehicle 20, loads the second workpiece 220 after the previous processing from the transport vehicle 20 into the other second processing device 120, and further processes the second workpiece 220 after the previous processing by the other second processing device 120. In addition, the processing system 1 according to the embodiment moves the transport vehicle 20 onto the second processing device 120, loads the second workpiece 220 processed by the second processing device 120 from the second processing device 120 onto the transport vehicle 20, moves the transport vehicle 20 onto the stocker 50, transports the previously processed second workpiece 220 onto the stocker 50 using the transport vehicle 20, loads the second workpiece 220 from the transport vehicle 20 into the stocker 50, and loads the previously processed second workpiece 220 into the second cassette 55-2 using the stocker 50.

Conventionally, the stockers in which the cassettes for the first workpiece and the second workpiece are stored are installed near the processing equipment used for each process in order to shorten the distance that the operator has to carry the cassettes from the stockers that store them to the processing equipment used for each process. However, since the processing equipment used for each process is installed far away from each other, the stockers in which the cassettes that store them are installed are also installed far away from each other, which creates a problem of reduced work efficiency when the operator refills or repairs the cassettes in each stocker.

In contrast, in the processing system 1 according to the embodiment having the above-mentioned configuration, the stocker 50 is provided with a first installation section 54 in which a first cassette 54-2 containing a first workpiece 210 is installed, and a second installation section 55 in which a second cassette 55-2 containing a second workpiece 220 is installed, and the first workpiece 210 is transported between the stocker 50 and the first processing device 110, and the second workpiece 220 is transported between the stocker 50 and the second processing device 120, by a transport vehicle 20 running on a transport path 10 installed above the stocker 50, the first processing device 110 which processes the first workpiece 210, and the second processing device 120 which processes the second workpiece 220. In other words, the processing system 1 according to the embodiment adopts a configuration of a transport system in which transport is performed by a transport vehicle 20 running on a transport path 10 installed above, thereby eliminating the need to install the first processing device 110 and a stocker 50 having a first installation section 54 in which a first cassette 54-2 for accommodating a first workpiece 210 in close proximity to each other, and further eliminating the need to install the second processing device 120 and a stocker 50 having a second installation section 55 in which a second cassette 55-2 for accommodating a second workpiece 220 in close proximity to each other. Therefore, not only is it possible to place the stocker 50 having the first installation section 54 in which the first cassette 54-2 for accommodating a first workpiece 210 is installed and the stocker 50 having the second installation section 55 in which the second cassette 55-2 for accommodating a second workpiece 220 in close proximity to each other, but it is also possible to integrate both of them together in one location. Therefore, the processing system 1 according to the embodiment has the effect of improving the work efficiency of replenishing and repairing the cassettes (first cassette 54-2 and second cassette 55-2) in the stocker 50 in which the cassettes (first cassette 54-2 and second cassette 55-2) for the first workpiece 210 and the second workpiece 220 are placed.

In addition, the processing system 1 according to the embodiment includes a first transport arm 56-1 for transporting the first workpiece 210 between the first cassette 54-2 installed in the first installation section 54 and the tray 23 landed on the first landing section 53-1 of the landing section 53, and a second transport arm 56-2 for transporting the second workpiece 220 between the second cassette 55-2 installed in the second installation section 55 and the tray 23 landed on the second landing section 53-2 of the landing section 53. In this way, the processing system 1 according to the embodiment has both the first transport arm 56-1 suitable for transporting the first workpiece 210 and the second transport arm 56-2 suitable for transporting the second workpiece 220, so that both the first workpiece 210 and the second workpiece 220 can be transported suitably.

In addition, in the processing system 1 according to the embodiment, the first installation section 54 and the second installation section 55 are arranged on either side of the transport device 56, sandwiching the transport device 56 therebetween. Therefore, in the processing system 1 according to the embodiment, the first installation section 54 and the second installation section 55 can be provided in positions outside the housing 51 of the stocker 50 where it is easy to install the first cassette 54-2 and the second cassette 55-2, respectively, and the space required for transport by the transport device 56 can be efficiently formed within the housing 51 of the stocker 50.

Furthermore, in the processing system 1 according to the embodiment, the multiple processing devices 100 include a processing device that processes at least one of the first workpiece 210 and the second workpiece 220, and include a first processing device that processes the first workpiece 210 and a second processing device that processes the second workpiece 220. Therefore, the processing system 1 according to the embodiment makes it possible to more efficiently transport both the first workpiece 210 and the second workpiece 220 and perform processing using the processing devices (the first processing device and the second processing device).

The present invention is not limited to the above embodiment. In other words, the present invention can be implemented in various modifications without departing from the gist of the invention.

REFERENCE SIGNS LIST 1 Processing system 10 Transport path 20 Transport vehicle 23 Tray 24 Lifting mechanism 50 Stocker 52 Opening 52-1 First opening 52-2 Second opening 53 Landing section 53-1 First landing section 53-2 Second landing section 54 First installation section 54-2 First cassette 55 Second installation section 55-2 Second cassette 56 Transport device 56-1 First transport arm 56-2 Second transport arm 100 Processing device 110 First processing device 120 Second processing device 200 Workpiece 210 First workpiece 220 Second workpiece

Claims (4)

A processing device for processing a workpiece;
A conveying path installed above the processing device;
a transport vehicle having a tray for accommodating workpieces to be supplied to the processing device and traveling along the transport path;
1. A processing system comprising:
the transport vehicle includes a lifting mechanism that lifts and lowers the tray relative to the processing device;
The processing system includes:
a stocker in which a first cassette for accommodating a first workpiece not fixed to a frame and a second cassette for accommodating a second workpiece fixed to the frame are installed;
The stocker is
a first installation section for installing the first cassette;
a second installation section for installing the second cassette;
an opening through which the tray passes as it ascends and descends from the transport vehicle;
A landing portion on which the tray lands;
a conveying device that conveys the first workpiece between the first cassette and the tray that has landed on the landing portion, and conveys the second workpiece between the second cassette and the tray that has landed on the landing portion;
A processing system comprising: The conveying device is
a first transfer arm that transfers the first workpiece;
The processing system according to claim 1 , further comprising: a second transfer arm configured to transfer the second workpiece. The first installation section and the second installation section are
3. The processing system according to claim 1, wherein the processing system is disposed on both sides of the transport device with the transport device in between. The processing device comprises:
The processing system according to claim 1 or 2, further comprising a processing device for processing at least one of the first workpiece and the second workpiece.

Images