JP2024160460A - Linear motor, positioning device, processing device, and device manufacturing method - Google Patents

Abstract

To provide a linear motor or the like that can effectively suppress deformation of a container due to force in the expansion direction from the refrigerant.SOLUTION: A linear motor has a coil section having a plurality of coils that generate power in response to the current flowing through them, a container for housing the coil section, a refrigerant distribution section where refrigerant flows into a refrigerant space 6 between the outer circumference of the coil section and the inner circumference of the container, and fixing sections 73, 74 extending between the outer circumference of the coil section and the inner circumference of the container in the refrigerant space 6 and securing the inner circumference of the container to the outer circumference of the coil section. Fixing sections 73, 74 connect between the outer circumference of the coil section and the inner circumference of the container. The coil section has coated insulating members 42 that cover and insulate a plurality of coils, and a portion of the coated insulating member 42 protrudes from the outer circumference of the coil section, and its tip is fixed to the inner circumference of the container to form the fixing sections 73 and 74.SELECTED DRAWING: Figure 5

Description

This disclosure relates to linear motors, etc.

Patent Document 1 and Patent Document 2 disclose a linear motor that allows a refrigerant to flow in the space between a coil section and a container. In Patent Document 1, a spacer (adjustment member 73) is provided to achieve a desired gap between the outer peripheral surface of the coil section and the inner peripheral surface of the container. In Patent Document 2, a flow path restrictor (projections 11a, 11b) is provided to form a desired refrigerant flow path between the outer peripheral surface of the coil section and the inner peripheral surface of the container. A seal member 12 is provided at the tip of each projection 11a, 11b to ensure the airtightness (or liquidtightness) of each refrigerant flow path.

JP 2004-180361 A JP 2010-166705 A

Thus, Patent Document 1 and Patent Document 2 disclose a structure (adjustment member 73, protrusions 11a, 11b/sealing member 12) extending between the outer peripheral surface of the coil portion and the inner peripheral surface of the container. These structures can suppress deformation of the container in the direction in which the inner peripheral surface of the container approaches the outer peripheral surface of the coil portion (hereinafter, for convenience, also referred to as the contraction direction), but cannot suppress deformation of the container in the direction in which the inner peripheral surface of the container moves away from the outer peripheral surface of the coil portion (hereinafter, for convenience, also referred to as the expansion direction). In recent linear motors used in product manufacturing, there is a demand for reducing the tact time (the time required to manufacture one product), and it may be necessary to increase the amount and pressure of the refrigerant to suppress the temperature rise caused by frequent acceleration and deceleration. In such a case, the container may be deformed by the force in the expansion direction from the internal refrigerant.

This disclosure has been made in light of these circumstances, and aims to provide a linear motor and the like that can effectively suppress deformation of the container due to the expansion force from the refrigerant.

To solve the above problems, a linear motor according to one embodiment of the present disclosure includes a coil section having multiple coils that generate power in response to a current flowing therethrough, a container that houses the coil section, a refrigerant flow section that flows a refrigerant in a refrigerant space between the outer circumferential surface of the coil section and the inner circumferential surface of the container, and a fixing section that extends between the outer circumferential surface of the coil section and the inner circumferential surface of the container in the refrigerant space and fixes the inner circumferential surface of the container to the outer circumferential surface of the coil section.

In this embodiment, the fixing portion that fixes the inner peripheral surface of the container to the outer peripheral surface of the coil portion can effectively suppress deformation of the container due to the force from the refrigerant in the expansion direction.

Yet another aspect of the present disclosure is a positioning device. This device is powered by the linear motor described above.

Yet another aspect of the present disclosure is a processing device. This device processes the workpiece positioned by the positioning device described above.

Yet another aspect of the present disclosure is a device manufacturing method. This method manufactures a device by processing a workpiece using the processing apparatus described above.

In addition, any combination of the above components, or expressions of these converted into methods, devices, systems, recording media, computer programs, etc., are also included in the present disclosure.

According to the present disclosure, deformation of the container caused by the expansion force from the refrigerant can be effectively suppressed.

FIG. 2 is a plan view showing a schematic diagram of a stage device. FIG. 2 is a plan view showing an armature of a linear motor. This is a cross-sectional view taken along line AA in FIG. 1 shows a coil array formed by a saddle-shaped coil. An example of a fixing portion that can also be applied to the coil array shown in FIG. 4 will be described. 13 shows an example of a fixing part that also functions as a flow former.

In the following, the form for carrying out the present disclosure (hereinafter also referred to as the embodiment) will be described in detail with reference to the drawings. In the description and/or drawings, the same or equivalent components, members, processes, etc. will be given the same reference numerals, and duplicate descriptions will be omitted. The scale and shape of each part shown in the figures are set for convenience in order to simplify the description, and are not to be interpreted as being limiting unless otherwise specified. The embodiment is an example, and does not limit the scope of the present disclosure in any way. All features and their combinations presented in the embodiment are not necessarily essential to the present disclosure. The embodiment is presented for convenience, broken down into components for each function and/or each group of functions that realize it. However, one component in the embodiment may actually be realized by a combination of multiple components that are separate, and multiple components in the embodiment may actually be realized by one component that is integrated.

1 is a plan view showing a stage device 100 as a positioning device or driving device to which the linear motor according to the present disclosure can be applied. The stage device 100 is an XY stage that positions a table as a driven body on which a workpiece such as a semiconductor wafer is placed in the X-axis direction (left-right direction in FIG. 1) and the Y-axis direction (up-down direction in FIG. 1). The stage device 100 includes a pair of Y stages 120 that extend in the Y-axis direction and drive the table in the Y-axis direction, an X stage 130 that extends in the X-axis direction and drives the table in the X-axis direction and is integrated with the table, and a base plate 140. The pair of Y stages 120 are connected to both ends of the X stage 130 in the X-axis direction via sliders 124. The Y stage 120 and the X stage 130 form an H shape when viewed from above.

Among the components of the stage device 100, at least the table, the Y stage 120, and the X stage 130 may be housed in a vacuum chamber whose interior is kept in a vacuum state. In this specification, "vacuum" refers to a state of a space filled with gas at a pressure lower than normal atmospheric pressure. Vacuum is classified into low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), high vacuum (0.1 Pa to 10 ^-5 Pa), ultra-high vacuum (10 ^-5 Pa to 10 ^-8 Pa), extremely high vacuum (10 ^-8 Pa or less), etc., depending on the pressure range. The stage device 100 of this embodiment may be used in any of the above vacuum environments. Also, the stage device 100 of this embodiment may be used in a non-vacuum environment that does not fall into any of the above categories.

The X stage 130 and the Y stage 120 are provided with linear motors 2X and 2Y, respectively, which will be described later. The linear power in the X-axis direction or the Y-axis direction generated by each linear motor 2X and 2Y linearly drives the table as the driven body in the X-axis direction or the Y-axis direction. The linear motor 2X, which is responsible for linear driving in the X-axis direction, is equipped with a stator and a field magnet 3 that forms a track in the X-axis direction, and a movable element 20 that can move in the X-axis direction along the field magnet 3. The table as the driven body is fixed to this movable element 20 and moves integrally therewith. The pair of linear motors 2Y, which are responsible for linear driving in the Y-axis direction, are equipped with a stator and a field magnet 3 that forms a track in the Y-axis direction, and a movable element 20 that can move in the Y-axis direction along the field magnet 3. The movable element 20 is fixed with a slider 124 and moves integrally therewith. Here, since the pair of sliders 124 are connected to both ends of the field magnet 3 of the linear motor 2X, the pair of linear motors 2Y linearly drive the field magnet 3 of the linear motor 2X together with the pair of sliders 124 in the Y-axis direction. And because there is a table on the field 3 (orbit) of the linear motor 2X, the pair of linear motors 2Y drive the table linearly in the Y-axis direction.

As described above, the stage device 100 (positioning device powered by a linear motor) of this embodiment, which can achieve high-precision positioning or driving regardless of whether it is in a vacuum environment or a non-vacuum environment, is suitable for applications such as positioning or driving a table on which a non-processed object such as a semiconductor wafer is placed as a driven object in semiconductor manufacturing equipment such as exposure equipment, ion implantation equipment, heat treatment equipment, ashing equipment, sputtering equipment, dicing equipment, inspection equipment, and cleaning equipment, and device manufacturing equipment such as FPD (Flat Panel Display) manufacturing equipment. Note that the processing equipment to which the stage device 100 of this embodiment can be applied may be any equipment that positions any processed object for processing using the stage device 100 or positioning device, and may be, for example, any manufacturing equipment, any processing equipment (e.g., machine tool), or any inspection equipment.

Figure 2 is a plan view showing the armatures 2 of linear motors 2X and 2Y provided on the X-stage 130 and Y-stage 120, respectively. Figure 3 is a cross-sectional view taken along the line A-A in Figure 2. In explaining these figures, terms indicating directions such as "up," "down," "left," and "right" are used, but these are merely used to conveniently indicate relative directions in each figure, and do not necessarily indicate absolute directions such as the vertical or horizontal direction. In other words, the armature 2 can be positioned in any direction or posture.

The linear motor includes a field 3 (FIG. 1) formed of a permanent magnet or an electromagnet, and an armature 2 formed of a coil section 4 including a plurality of coils 41 (hereinafter collectively referred to as coil array 41) as shown in FIG. 2. The armature 2 is a long, approximately rectangular plate, and the coil array 41 is formed along its longitudinal direction (the left-right direction in FIG. 2). The coil array 41 is formed of a plurality of coils 41 arranged at approximately equal intervals with almost no gaps along the longitudinal direction of the armature 2. In the example of FIG. 2, the coil array 41 includes 12 coils 41, so that when a three-phase AC is applied to the coil array 41, the 12 coils 41 are divided into four sets of three-phase coils. A plurality of coil arrays 41 may be arranged side by side along the direction perpendicular to the paper surface of FIG. 2 (i.e., the left-right direction in FIG. 3).

The coil array 41 faces the field 3 (FIG. 1) composed of a permanent magnet or an electromagnet. Specifically, the field 3 is provided at a position facing the end faces or coil faces of the multiple coils 41 on the front side (right side in FIG. 3) and/or the back side (left side in FIG. 3) of the paper surface of FIG. 2. The coil array 41 through which a driving current such as three-phase AC flows exerts a linear force on the field 3 facing the coil array 41 and/or on the coil array 41 itself. The direction of this linear force is approximately the same as the arrangement direction of the coil array 41 (i.e., the longitudinal direction of the armature 2 or the left-right direction in FIG. 2), and the field 3 and the armature 2 move linearly relative to each other in that direction. Either the field 3 or the armature 2 may be a mover or a stator. That is, the field magnet 3 may be the mover and the armature 2 may be the stator, or as shown in FIG. 1, the field magnet 3 may be the stator and the armature 2 may be the mover 20, or both the field magnet 3 and the armature 2 may be movers.

The coil section 4 includes a coil array 41 (multiple coils 41) that generates power in response to the current flowing therethrough as described above, and a coating insulating member 42 that covers and insulates the coil array 41. The coating insulating member 42 is, for example, a molding or mold formed from an insulating resin material such as epoxy resin. As shown in FIG. 3, the coating insulating member 42 constitutes the outer peripheral surface or outer surface of the coil section 4, and the coil array 41 that is solidified from the outside by the coating insulating member 42 is not exposed on the outer peripheral surface of the coil section 4. Note that the coil section 4 according to this embodiment does not have a magnetic member (generally called a core) for winding each coil 41. Therefore, the linear motor according to this embodiment is a so-called coreless linear motor. However, the technology according to the present disclosure is also applicable to a linear motor in which each coil 41 is wound around a core.

The coil portion 4 is housed inside the container 5. As shown in FIG. 3, the container 5 includes a cap-shaped shell 51 that is placed over the coil portion 4 from above, a holder 52 that is joined to the lower portion of the shell 51 by welding or the like, and a pedestal-shaped sub-holder 53 that is fixed onto the holder 52 inside the container 5. The coil portion 4 is fixed onto the sub-holder 53. In this manner, the shell 51 is placed over the coil portion 4, sub-holder 53, and holder 52 in an integrated state. Then, welding or the like is applied to the joint between the shell 51 and the holder 52, forming the illustrated structure in which the coil portion 4 is fixed inside the container 5.

A refrigerant space 6 through which a refrigerant such as cooling water flows is formed between the outer peripheral surface of the coil portion 4 (i.e., the outer peripheral surface of the insulating coating member 42) and the inner peripheral surface of the container 5 (particularly, the inner peripheral surface of the shell 51). In other words, a space or gap is formed between the outer peripheral surface of the coil portion 4 and the inner peripheral surface of the container 5, so that a refrigerant for cooling the coil portion 4 (particularly, the coil array 41) can flow therein.

As shown in FIG. 2, end ribs 61 and 62 are provided at each end of the longitudinal direction of the container 5. The end ribs 61 and 62 may be block-shaped and may function to increase the rigidity of the armature 2. The first end rib 61 at one end of the longitudinal direction of the armature 2 is provided with a refrigerant supply port 611 for supplying the refrigerant for cooling the coil array 41. The second end rib 62 at the other end of the longitudinal direction of the armature 2 is provided with a refrigerant discharge port 621 for discharging the refrigerant for cooling the coil array 41. The refrigerant supply port 611 and the refrigerant discharge port 621 constitute a refrigerant flow section that flows the refrigerant in the refrigerant space 6 between the outer circumferential surface of the coil portion 4 (i.e., the outer circumferential surface of the insulating coating member 42) and the inner circumferential surface of the container 5 (particularly, the inner circumferential surface of the shell 51). The refrigerant supply port 611 and/or the refrigerant discharge port 621 may be located at any position as long as the refrigerant can be supplied and discharged between the refrigerant space 6 and the refrigerant space 6, and may be provided, for example, in the holder 52 described above.

The refrigerant supplied from the refrigerant supply port 611 into the refrigerant space 6 flows from one end (right side in FIG. 2) of the armature 2 in the longitudinal direction to the other end (left side in FIG. 2), cooling the coil array 41, and is discharged from the refrigerant discharge port 621 to the outside of the refrigerant space 6. For this reason, the one end of the armature 2 in the longitudinal direction where the refrigerant supply port 611 is provided is also referred to as the upstream side (of the refrigerant), and the other end of the armature 2 in the longitudinal direction where the refrigerant discharge port 621 is provided is also referred to as the downstream side (of the refrigerant).

As shown in FIG. 3, the coil array 41 is molded with an insulating covering material 42, so that insulation between the refrigerant in the refrigerant space 6 and each coil 41 can be ensured. For this reason, the refrigerant may be a conductive one such as water, but an insulating refrigerant may be used to further improve insulation. Furthermore, it is preferable to use a non-magnetic refrigerant so as not to interfere with the action of the electromagnet formed by the coil array 41 or the action of the field magnet 3 facing the electromagnet.

As shown in FIG. 3, a fixing portion 71 is provided that extends between the outer peripheral surface of the coil portion 4 (i.e., the outer peripheral surface of the insulating coating member 42) and the inner peripheral surface of the container 5 (particularly, the inner peripheral surface of the shell 51) in the refrigerant space 6 and fixes the inner peripheral surface of the container 5 to the outer peripheral surface of the coil portion 4. As also shown in FIG. 2, the fixing portion 71 in the example of FIG. 3 penetrates the inside of the coil 41 in the coil portion 4 and connects the inner peripheral surfaces on both the left and right sides of the shell 51 that face each other across the coil portion 4. This fixing portion 71 is formed, for example, from a metal material such as SUS (stainless steel) or a resin material.

The insulating coating member 42 has a through hole that penetrates in the axial direction of the coil 41 (left and right direction in FIG. 3) inside the coil 41 (for example, at the center of the coil 41 (coil surface)) so that such a columnar or pin-shaped fixing portion 71 can pass through. The fixing portion 71 may be fixed to the insulating coating member 42 by adhesive or the like in the illustrated state inserted into the insulating coating member 42. In addition, the inner peripheral surface of the shell 51 that receives the tip of the convex fixing portion 71 is preferably formed into a concave shape by embossing or the like.

Both ends of the fixing portion 71 (the left end and the right end in FIG. 3) are fixed or connected to the inner circumferential surface of the shell 51. In the illustrated example, screws 72 as connecting members penetrate the shell 51 from the outer circumferential side of the shell 51 and are inserted into threaded holes at both ends of the fixing portion 71, thereby firmly fixing both ends of the fixing portion 71 to the inner circumferential surface on both the left and right sides of the shell 51. The fixing portion 71 and the shell 51 may be fixed by welding such as spot welding or by adhesive.

The fixing portion 71, which is firmly fixed to the inner peripheral surface of the shell 51 in this manner, limits the movement of the inner peripheral surface of the container 5 (particularly the inner peripheral surface of the shell 51) in a direction away from the outer peripheral surface of the coil portion 4 (i.e., the outer peripheral surface of the insulating coating member 42). In other words, the fixing portion 71, which connects and supports the inner peripheral surfaces on both the left and right sides of the shell 51, effectively suppresses deformation of the shell 51 in the expansion direction.

In recent years, linear motors used in product manufacturing have been required to reduce tact time, and it may be necessary to increase the amount and pressure of refrigerant flowing through refrigerant space 6 to suppress temperature increases associated with frequent acceleration and deceleration. In such cases, shell 51 receives a large force in the expansion direction from the refrigerant in refrigerant space 6. However, according to this embodiment, the fixing part 71 that fixes the inner circumferential surface of container 5 to the outer circumferential surface of coil section 4 can effectively suppress deformation of container 5 due to the force in the expansion direction from the refrigerant. The fixing part 71 can also effectively suppress deformation of shell 51 in the contraction direction.

As described above, the shell 51 in this embodiment is strong against the force from the refrigerant in the expansion direction, so the shell 51 can be made thinner (thickness can be reduced) than before. By thinning the shell 51 between the coil section 4 and the field magnet 3 (Figure 1) in this way, the coil section 4 and the field magnet 3 can be arranged close to each other (the expansion of the shell 51 is suppressed by the fixing section 71, so the shell 51 is less likely to expand and come into contact with the field magnet 3), and magnetic loss in the shell 51 can be reduced, so the strength and controllability of the linear power generated by the coil section 4 and the field magnet 3 can be increased.

As illustrated in FIG. 2, the fixing portion 71 is provided at a position corresponding to the end face of some (preferably multiple) or all of the coils 41 included in the coil array 41 in order to effectively suppress the expansion and deformation of the container 5. Here, the end face of the coil 41 refers to the area surrounded by the coil 41 in a plane parallel to the paper surface in FIG. 2 (in other words, the area where the coil 41 (winding) does not exist). The fixing portion 71 may be provided at a position corresponding to the center of the coil 41 as in the example of FIG. 3, or may be provided on the peripheral side of the center on the end face of the coil 41 (upper and/or lower side in FIG. 2) as illustrated in FIG. 2. Also, multiple fixing portions 71 may be provided for one coil 41.

In the above embodiment, the multiple coils 41 constituting one coil array 41 are arranged in line in the longitudinal direction of the armature 2 as shown in FIG. 2, so that a fixed portion 71 penetrating the end face of each coil 41 can be formed. On the other hand, in a coil array 41 formed by so-called saddle-shaped coils 41 as shown in FIG. 4, the end face of each coil 41 is blocked by other adjacent coils 41, so that a fixed portion 71 penetrating the end face of each coil 41 cannot be formed. FIG. 5 shows examples of fixed portions 73, 74 that can also be applied to the coil array 41 shown in FIG. 4.

As shown in FIG. 5, fixing parts 73 and 74 are provided in the refrigerant space 6, which extend between the outer peripheral surface of the coil part 4 (coil 41 is not shown) (i.e., the outer peripheral surface of the coating insulating member 42) and the inner peripheral surface of the container 5 (particularly, the inner peripheral surface of the shell 51), and fix the inner peripheral surface of the container 5 to the outer peripheral surface of the coil part 4. The fixing parts 73 and 74 in the example of FIG. 5 connect between the outer peripheral surface of the coating insulating member 42 and the inner peripheral surface of the shell 51.

Specifically, the fixing parts 73 and 74 are configured by a part of the insulating coating 42 protruding from the outer peripheral surface and its tip being fixed to the inner peripheral surface of the shell 51. That is, the fixing parts 73 and 74 are part of the insulating coating 42. Conversely, the fixing parts 73 and 74 may be configured by a part of the shell 51 protruding from the inner peripheral surface by embossing or the like and its tip being fixed to the outer peripheral surface of the insulating coating 42. In this case, the fixing parts 73 and 74 are part of the shell 51. In either case, it is preferable that the inner peripheral surface of the shell 51 or the outer peripheral surface of the insulating coating 42 that receives the tip of the convex fixing parts 73 and 74 is formed into a concave shape by embossing or the like. In this way, the fixing parts 73 and 74 in FIG. 5 do not need to penetrate the end face of the coil 41 like the fixing part 71 in FIG. 3, so they can also be applied to the saddle-shaped coil 41 without a gap as in FIG. 4.

The tips of the fixing parts 73, 74 are fixed or connected to the inner circumferential surface of the shell 51. In the illustrated example, a screw 72 as a connecting member penetrates the shell 51 from the outer circumferential side of the shell 51 and is inserted into a threaded hole in the tip of the fixing parts 73, 74, thereby firmly fixing the tip of the fixing parts 73, 74 (coating insulating member 42) to the inner circumferential surface of the shell 51. The fixing parts 73, 74 and the shell 51 may be fixed by welding such as spot welding or by adhesive.

The fixing parts 73, 74, which are firmly fixed to the inner peripheral surface of the shell 51 in this manner, limit the movement of the inner peripheral surface of the container 5 (particularly, the inner peripheral surface of the shell 51) in a direction away from the outer peripheral surface of the coil section 4 (i.e., the outer peripheral surface of the coating insulating member 42). In other words, the fixing parts 73, 74, which connect and support the outer peripheral surface of the coating insulating member 42 and the inner peripheral surface of the shell 51, effectively suppress deformation of the shell 51 in the expansion direction.

5 is provided at a position corresponding to the center of the coil 41 (not shown in FIG. 5). The fixed portion 74 in FIG. 5 is provided at a position corresponding to the periphery (upper portion in FIG. 5) of the coil 41 or the coil portion 4. The fixed portions 73 and 74 in FIG. 5 do not need to penetrate the end face of the coil 41 like the fixed portion 71 in FIG. 3, and there are few restrictions from the arrangement of each coil array 41, so there is a high degree of freedom in arrangement. Therefore, as shown in FIG. 6, which is a plan view of the armature 2 similar to FIG. 2, a fixed portion 73 having an arbitrary shape for forming a desired flow of the refrigerant in the refrigerant space 6 may be provided. In other words, this fixed portion 73 also functions as a flow forming portion. In addition, this fixed portion 73 may be formed across multiple coils 41 (not shown in FIG. 6).

The present disclosure has been described above based on the embodiments. Various modifications are possible to the combinations of the components and processes in the exemplary embodiments, and it will be obvious to those skilled in the art that such modifications are included within the scope of the present disclosure.

The configuration, action, and function of each device and method described in the embodiments can be realized by hardware resources or software resources, or by the cooperation of hardware resources and software resources. For example, a processor, ROM, RAM, and various integrated circuits can be used as hardware resources. For example, an operating system, an application, and other programs can be used as software resources.

2 Armature, 3 Field magnet, 4 Coil portion, 5 Container, 6 Coolant space, 41 Coil, 42 Covering insulating member, 51 Shell, 71, 73, 74 Fixed portion, 100 Stage device, 120 Y stage, 130 X stage.

Claims (11)

A coil unit including a plurality of coils that generate power in response to a current flowing therethrough;
A container that accommodates the coil portion;
a refrigerant flow section that flows a refrigerant in a refrigerant space between an outer circumferential surface of the coil section and an inner circumferential surface of the container;
a fixing portion that extends between an outer circumferential surface of the coil portion and an inner circumferential surface of the container in the refrigerant space and fixes the inner circumferential surface of the container to the outer circumferential surface of the coil portion;
A linear motor comprising: The linear motor of claim 1, wherein the fixing portion connects the outer peripheral surface of the coil portion and the inner peripheral surface of the container. The coil portion includes a coating/insulating member that coats and insulates the coils,
A part of the covering insulating member protrudes from the outer circumferential surface of the coil portion, and a tip end of the protruding part is fixed to the inner circumferential surface of the container, thereby forming the fixing part.
3. The linear motor according to claim 2. The linear motor according to claim 1, wherein the fixing portion penetrates the inside of the coil in the coil portion and connects the inner circumferential surfaces of the containers facing each other across the coil portion. A linear motor according to any one of claims 1 to 4, wherein the fixed portion is provided at a position corresponding to at least the end face of the coil. The linear motor according to claim 5, wherein the fixed portion is provided at a position corresponding to at least the center of the coil. A linear motor according to any one of claims 1 to 4, wherein the fixed portion is provided at a position corresponding to at least the periphery of the coil. A linear motor according to any one of claims 1 to 4, wherein the fixed portion limits movement of the inner circumferential surface of the container in a direction away from the outer circumferential surface of the coil portion. A positioning device powered by a linear motor according to any one of claims 1 to 4. A processing device that processes a workpiece positioned by the positioning device according to claim 9. A device manufacturing method for manufacturing a device by processing the workpiece with the processing device according to claim 10.

Images