JP2017079390A - Vibration element, oscillator, electronic device, mobile object, and base station - Google Patents

Abstract

The present invention provides a vibration element that can reduce oscillation due to secondary vibration, and an oscillator, a base station, an electronic device, and a moving body including the vibration element.
A vibrating element includes an X-axis as an electric axis of crystal, a Y-axis as a mechanical axis, a Z-axis as an optical axis, a positive direction from the X-axis to the Y-axis around the Z-axis. An axis obtained by rotating the X axis around 3 to 30 ° around the axis is defined as an X ′ axis, a direction from the Y ′ axis toward the Z axis around the X ′ axis is positive, and the X ′ axis A crystal substrate 21 that includes the X ′ axis and the Z ′ axis in the in-plane direction with an axis obtained by rotating the Z axis around 33 ° or more and 36 ° or less around the Z ′ axis, and the main surface of the crystal substrate 21. The excitation electrode 221a has a longitudinal shape having a major axis and a minor axis in a plan view, and −40 ° when the angle of the major axis with respect to the Z ′ axis is θ. The relationship <θ <20 ° is satisfied.
[Selection] Figure 4

Description

  The present invention relates to a vibration element, an oscillator, an electronic device, a mobile object, and a base station.

  Conventionally, a configuration described in Patent Document 1 is known as a vibration element that performs thickness shear vibration. The vibration element described in Patent Literature 1 includes a quartz substrate and a pair of excitation electrodes arranged to face each other with the quartz substrate interposed therebetween, and oscillates by applying a drive voltage between the pair of excitation electrodes. It has become. However, when an SC-cut quartz substrate is used as the quartz substrate, the configuration described in Patent Document 1 may oscillate in the B mode that is the secondary vibration (spurious vibration) instead of the C mode that is the main vibration. .

JP 59-176918 A

  An object of the present invention is to provide a vibration element that can reduce oscillation due to a secondary vibration, and further provide an oscillator, a base station, an electronic device, and a moving body including the vibration element.

Such an object is achieved by the present invention described below.
The vibration element according to the present invention has an electric axis of quartz as an X axis, a mechanical axis as a Y axis, an optical axis as a Z axis, a positive direction around the Z axis from the X axis to the Y axis, The X-axis and the Y-axis are axes obtained by rotating the X-axis and the Y-axis around 3 ° or more and 30 ° or less around the X′-axis, and the direction from the Y′-axis to the Z-axis is set around the X′-axis. And the X ′ axis and the Z ′ axis are in-plane with the Z ′ axis and the Y ′ axis rotated around the X ′ axis by 33 ° to 36 ° as the Z ′ axis and the Y ″ axis. A quartz substrate containing in the direction,
An excitation electrode disposed on a main surface of the quartz substrate,
The excitation electrode has a longitudinal shape having a major axis and a minor axis in plan view,
A relationship of −40 ° <θ <20 ° is satisfied, where θ is an angle of the major axis with respect to the Z ′ axis.
As a result, a vibration element that can reduce oscillation due to sub-vibration is obtained.

  In the resonator element according to the aspect of the invention, it is preferable that the relationship of 1.2 <L1 / L2 <4.0 is satisfied, where the length of the major axis is L1 and the length of the minor axis is L2. .

  Thereby, the area of the excitation electrode can be sufficiently ensured. Therefore, an increase in the CI value of the main vibration can be reduced.

In the resonator element according to the aspect of the invention, it is preferable that the outline of the excitation electrode has an oval shape.
Thereby, the secondary vibration is less likely to be oscillated.

In the resonator element according to the aspect of the invention, it is preferable that a contour of the quartz substrate is circular.
Thereby, the secondary vibration is less likely to be oscillated.

In the resonator element according to the aspect of the invention, the excitation electrode includes a first excitation electrode disposed on one main surface of the quartz substrate and a second excitation electrode disposed on the other main surface. ,
Preferably, each of the first excitation electrode and the second excitation electrode has the longitudinal shape.
Thereby, the secondary vibration is less likely to be oscillated.

The oscillator of the present invention includes the vibration element of the present invention,
And an oscillation circuit that oscillates the vibration element.
Thereby, a highly reliable oscillator can be obtained.

  The oscillator according to the aspect of the invention preferably includes a temperature control unit that controls the temperature of the vibration element.

  Thereby, the temperature of the vibration element can be kept substantially constant without being affected by the use environment.

The electronic device of the present invention includes the vibration element of the present invention.
As a result, a highly reliable electronic device can be obtained.

The moving body of the present invention includes the vibration element of the present invention.
Thereby, a mobile body with high reliability is obtained.

A base station according to the present invention includes the vibration element according to the present invention.
Thereby, a highly reliable base station is obtained.

1 is a cross-sectional view of an oscillator according to a first embodiment of the present invention. It is an expanded sectional view of the package which the oscillator shown in FIG. 1 has. FIG. 3 is a top view of the package shown in FIG. 2. It is a top view (top view) of a vibration element. It is a top view (transmission figure) of a vibration element. It is a figure for demonstrating SC cut. It is a graph which shows the relationship between angle (theta) and CI ratio. It is a top view of the oscillator concerning a 2nd embodiment of the present invention. It is a top view of the oscillator concerning a 3rd embodiment of the present invention. 1 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic apparatus of the present invention is applied. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device of this invention is applied. It is a perspective view which shows the structure of the digital still camera to which the electronic device of this invention is applied. It is a perspective view which shows the motor vehicle to which the mobile body of this invention is applied. It is a schematic block diagram which shows the positioning system to which the base station of this invention is applied.

  Hereinafter, a resonator element, an oscillator, an electronic device, a moving object, and a base station of the present invention will be described in detail based on embodiments shown in the accompanying drawings.

<First Embodiment>
FIG. 1 is a cross-sectional view of an oscillator according to a first embodiment of the present invention. FIG. 2 is an enlarged cross-sectional view of a package included in the oscillator shown in FIG. FIG. 3 is a top view of the package shown in FIG. FIG. 4 is a plan view (top view) of the vibration element. FIG. 5 is a plan view (transmission diagram) of the vibration element. FIG. 6 is a diagram for explaining the SC cut. FIG. 7 is a graph showing the relationship between the angle θ and the CI ratio. In the following, for convenience of explanation, the upper side in FIG. 1 is also referred to as “upper” and the lower side is also referred to as “lower”.

  An oscillator 1 shown in FIG. 1 is an OCXO (constant temperature chamber crystal oscillator) having a package 5 that houses a vibration element 2, an IC 3, and a heat generation unit (temperature control unit) 4, and an outer package 6 that covers the package 5. . Hereinafter, each of these components will be described sequentially.

(package)
As shown in FIGS. 2 and 3, the package 5 includes a cavity-shaped base 51 having a recess 511 that opens on the upper surface, and a plate-shaped lid 52 that closes the opening of the recess 511 and is joined to the base 51. Have. Such a package 5 has an internal space S formed by closing the opening of the recess 511 with the lid 52, and the vibration element 2, the IC 3, and the heat generating portion 4 are accommodated in the internal space S. The internal space S is hermetically sealed and is in a reduced pressure state (about 10 Pa or less, preferably vacuum). Thereby, the stable drive (vibration) of the vibration element 2 can be continued. However, the atmosphere of the internal space S is not limited to this, and may be an atmospheric pressure filled with an inert gas such as nitrogen or argon, for example.

  Although it does not specifically limit as a constituent material of the base 51, For example, various ceramics, such as an aluminum oxide, glass material, a metal material, etc. can be used. Further, the constituent material of the lid 52 is not particularly limited, but may be a member whose linear expansion coefficient approximates that of the constituent material of the base 51. For example, when the constituent material of the base 51 is ceramic as described above, an alloy such as Kovar is preferable.

  The base 51 has a plurality of internal terminals 531, 533 and 534 facing the internal space S, and external terminals 535 arranged on the bottom surface. The internal terminal 531 is connected to the internal terminal 533 via an internal wiring (not shown), and the internal terminal 534 is connected to the external terminal 535 via an internal wiring (not shown).

(Heat generation part)
The heat generating unit 4 is accommodated in the internal space S and is fixed to the base 51. The heat generating unit 4 is an electronic component having a so-called “constant temperature function” that heats the vibration element 2 and keeps the temperature of the vibration element 2 substantially constant. By having such a heat generating part 4, the fluctuation | variation of the frequency by the temperature change of use environment can be suppressed, and the oscillator 1 which has the outstanding frequency stability is obtained. In addition, it is preferable that the heat generating part 4 controls the temperature of the vibration element 2 so as to approach the apex temperature (generally about 85 ° C.) indicating the zero temperature coefficient. Thereby, more excellent frequency stability can be exhibited.

  The heat generating part 4 has, for example, a heat generating element composed of a power transistor and a temperature sensor composed of a diode or a thermistor, and the temperature of the heat generating element is controlled by the temperature sensor to maintain a constant temperature. Can be done. Such a heat generating part 4 is electrically connected to the internal terminal 531 via a bonding wire.

  The configuration of the heat generating part 4 is not particularly limited as long as the vibration element 2 can be maintained at a constant temperature.

(Vibration element)
The vibration element 2 is accommodated in the internal space S and joined (supported) to the heat generating portion 4. As shown in FIGS. 4 and 5, the vibration element 2 has a crystal substrate 21 and an electrode 22 disposed on the crystal substrate 21.

  The quartz substrate 21 is obtained by patterning an SC cut quartz substrate into a substantially circular plan view shape by etching or the like. By using the SC cut quartz substrate, it is possible to obtain the vibration element 2 in which frequency jump and resistance increase due to spurious vibrations are small and temperature characteristics are stable.

  Here, the SC cut will be briefly described. Quartz belongs to the trigonal system and has an X axis (electrical axis), a Y axis (mechanical axis), and a Z axis (optical axis) which are crystal axes orthogonal to each other. Then, as shown in FIG. 6, the direction from the X axis to the Y axis around the Z axis is positive, and the X axis and the Y axis around the Z axis are α (however, 3 ° ≦ α ≦ 30 °). The axes set by rotation are the X ′ axis and the Y ′ axis, the direction from the Y ′ axis to the Z axis around the X ′ axis is positive, and the Z axis and the Y ′ axis around the X ′ axis are β ( However, when the axes rotated by 33 ° ≦ β ≦ 36 ° are defined as the Z ′ axis and the Y ″ axis, the X ′ axis and the Z ′ axis are included in the in-plane direction, and the Y ″ axis is the thickness direction. When the quartz plate is cut out, an SC cut quartz substrate is obtained. Then, the crystal substrate 21 is obtained by patterning the SC cut crystal substrate in a circular shape.

  The plan view shape of the quartz substrate 21 is not limited to a circle, and may be a non-linear shape such as an ellipse or an oval, or a linear shape such as a triangle or a rectangle. However, by making the quartz substrate 21 circular as in the present embodiment, the symmetry of the quartz substrate 21 can be improved, and oscillation of secondary vibration (spurious vibration) can be effectively suppressed. In this specification, “circular” means that a part of the outer edge is notched, a protrusion is formed, or a minute unevenness is formed on the outer edge due to manufacturing accuracy, etc. Is included. The quartz substrate 21 may be subjected to mesa processing, reverse mesa processing, convex processing, and the like.

  The electrode 22 includes a first excitation electrode 221a and a first extraction electrode 221b disposed on the upper surface (one main surface) of the quartz substrate 21, and a second excitation disposed on the lower surface (the other principal surface) of the quartz substrate 21. An electrode 222a and a second extraction electrode 222b.

  Further, the outline of the first excitation electrode 221 a has a longitudinal shape (elliptical shape), and is arranged at the center of the upper surface of the quartz substrate 21. The first extraction electrode 221b extends from one end portion of the first excitation electrode 221a in the long axis direction and extends to the outer edge portion of the quartz crystal substrate 21 along the long axis direction.

  Similarly, the outline of the second excitation electrode 222a has a longitudinal shape (elliptical shape) and is arranged at the center of the lower surface of the quartz substrate 21. The second extraction electrode 222b extends from one end of the second excitation electrode 222a in the long axis direction and extends to the outer edge of the quartz substrate 21 along the long axis direction. The second excitation electrode 222a and the second extraction electrode 222b are disposed so as to overlap the first excitation electrode 221a and the first extraction electrode 221b with the quartz crystal substrate 21 interposed therebetween.

  Here, in the SC cut crystal resonator such as the vibration element 2, in addition to the thickness shear vibration mode (C mode) which is the main vibration, the thickness torsional vibration mode (B mode) which is the secondary vibration (spurious) and the thickness longitudinal There is a vibration mode (A mode). Since the value of the equivalent resistance (hereinafter also referred to as “CI”) of the vibration in the A mode is larger than the CI in the C mode, it is difficult for the oscillator to output the signal, and this is not a problem. In contrast, the CI value of B-mode vibration is approximately equal to or less than the CI value of the C-mode. Moreover, the frequency of the B mode is close to the frequency of the C mode. For this reason, the conventional oscillator sometimes oscillates in the B mode, which is a secondary vibration.

  Therefore, in the vibration element 2, by devising the configuration of the first and second excitation electrodes 221a and 222a, the CI of the B mode that is the secondary vibration is made larger than the CI of the C mode that is the main vibration. Is effectively reduced (suppressed). The second excitation electrode 222a is disposed so as to overlap with the first excitation electrode 221a and has substantially the same shape (including size) as the first excitation electrode 221a. Therefore, the first excitation electrode 221a is represented below. Thus, the description of the second excitation electrode 222a is omitted.

  As shown in FIG. 4, the outline of the first excitation electrode 221a has an oval shape having a major axis a and a minor axis. In particular, in the present embodiment, an ellipse is formed in the oval shape. Further, when the angle of the major axis a of the first excitation electrode 221a with respect to the Z ′ axis is θ, the relationship of −40 ° <θ <20 ° is satisfied. By setting the angle θ in such a range, the CI of the B mode can be made sufficiently larger than the CI value of the C mode, and oscillation in the B mode can be effectively reduced (suppressed). In addition, by setting the angle θ within the above range, it is possible to stably manufacture the vibration element 2 having substantially the same characteristics (CI characteristics) even if the angle θ varies somewhat due to manufacturing variations. Hereinafter, this will be described based on simulation results.

  FIG. 7 is a graph showing simulation results, in which the horizontal axis represents the angle (rotation angle) θ and the vertical axis represents the CI ratio (CI [C mode] / CI [B mode]). The vibration element 2 used in this simulation uses an SC-cut quartz substrate having a thickness of 180 μm and a diameter of 8 mm as the quartz substrate 21, and has a major axis length as the first and second excitation electrodes 221 a and 222 a. The configuration was 5 mm, the minor axis length was 1.8 mm, and an Au electrode film was formed on the Cu base film.

  From the graph shown in FIG. 7, CI is within the range of −40 ° <θ <20 ° (in the range of 0 ° ≦ θ <20 ° and 140 ° <θ ≦ 180 ° (= 0 °) in FIG. 7). It can be seen that the value of the ratio is sufficiently small as 86% or less, and the B-mode oscillation is effectively reduced (suppressed). In addition, within the range of −40 ° <θ <20 °, the amount of change in the CI ratio with respect to the change in the angle θ is gentle compared to other angles, so even if the angle θ varies somewhat due to manufacturing variations, It can be seen that the vibration element 2 having substantially the same characteristics (CI characteristics) can be manufactured stably. In the range of −40 ° <θ <20 °, the range of −26 ° <θ <0 ° is preferable, and the range of −20 ° <θ <−10 ° is preferable. More preferably, it is further preferably within the range of −14 ° <θ <−12 °. Thereby, the value of the CI ratio can be lowered to about 83%, and the above-described effect becomes more remarkable.

  In addition, as in the present embodiment, even if both the first and second excitation electrodes 221a and 222a have an oval shape (longitudinal shape), it is possible to more effectively reduce (suppress) B-mode oscillation. it can. However, at least one of the first and second excitation electrodes 221a and 222a may be oval (longitudinal shape). For example, the first excitation electrode 221a may be an oval shape, and the second excitation electrode 222a may be a circle having a size capable of containing the first excitation electrode 221a in plan view.

  Further, the aspect ratio of the first excitation electrode 221a is not particularly limited, but when the major axis length of the first excitation electrode 221a is L1 and the minor axis length is L2, as shown in FIG. 1.2 <L1 / L2 <4.0 is preferably satisfied. By satisfying such a range, it is possible to sufficiently secure the area of the first excitation electrode 221a, and thus it is possible to reduce an increase in the CI value of the C mode that is the main vibration. That is, since the CI value in the B mode can be increased while suppressing an increase in the CI value in the C mode, oscillation in the B mode can be more effectively reduced (suppressed).

The basis of L1 / L2 is as follows. For example, when the first excitation electrode 221a is circular, the diameter of the first excitation electrode 221a is generally about 0.4 to 0.5 times the diameter r of the quartz substrate 21. When the diameter of the first excitation electrode 221a is 0.5r, the area of the first excitation electrode 221a is 0.25πr ² . On the other hand, the area of the first excitation electrode 221a when the first excitation electrode 221a is an ellipse of L1 / L2 = 4.0 and L1 is the maximum value (that is, the diameter of the quartz substrate 21 = r) is 0.25πr ² . Therefore, if L1 / L2 <4.0, the area of the first excitation electrode 221a is unlikely to decrease even when the first excitation electrode 221a is circular, and the C-mode CI value increases. Can be suppressed.

  From the viewpoint of manufacturing variation, it is preferable that the relationship 1.2 <L1 / L2 <3.0 is satisfied within the range 1.2 <L1 / L2 <4.0, and 1.2 <L1 / L2 <3.0. It is preferable to satisfy the relationship of L1 / L2 <2.0. As a result of the simulation, when L1 / L2 = 3.0, the C-mode CI value variation is about 20%, and when L1 / L2 = 2.0, the C-mode CI value variation is about 10%. When L1 / L2 = 1.2, it was found that the CI value variation in the C mode was about 2%. Therefore, by satisfying such a range, the variation in CI value is small, and the vibration element 2 having substantially the same characteristics (CI characteristics) can be manufactured stably.

  The configuration of the first and second excitation electrodes 221a and 222a has been described in detail above. Since the first and second excitation electrodes 221a and 222a have an oval shape (particularly elliptical shape) as in the present embodiment, the contours of the first and second excitation electrodes 221a and 222a become nonlinear. The vibration is less likely to oscillate, and the above-described effect becomes more prominent. However, the shape of the first and second excitation electrodes 221a and 222a is not limited to an elliptical shape, and may be a longitudinal shape. Examples of the longitudinal shape include an oval shape (such as an oval shape) other than an ellipse, a rectangular shape, and the like. However, the first and second excitation electrodes 221a and 222a preferably have no corners (that is, preferably have a non-linear outline). For example, when a rectangular shape is employed, each corner The part should be rounded. In this specification, “oval” means that a part of the outer edge is notched, a protrusion is formed, or a minute unevenness is formed on the outer edge due to manufacturing accuracy. Etc.

  As shown in FIGS. 2 and 3, the vibration element 2 having such a configuration is fixed to the heat generating portion 4 through a conductive fixing member 7 at the outer edge portion. The fixing member 7 joins the heat generating part 4 and the vibration element 2, electrically connects the terminal 43 disposed on the upper surface of the heat generating part 4 and the second extraction electrode 222 b of the vibration element 2, The heat generating part 4 and the vibration element 2 are thermally connected. The terminal 43 is electrically connected to the internal terminal 531 via a bonding wire. On the other hand, the first extraction electrode 221b is electrically connected to the internal terminal 531 via a bonding wire.

  The fixing member 7 is not particularly limited as long as it has both conductivity and bondability. For example, a metal bonding material (for example, a gold bump), an alloy bonding material (for example, a gold-tin alloy, a bump such as solder). A conductive adhesive (for example, a polyimide adhesive in which metal fine particles such as a silver filler are dispersed) can be used.

(IC)
As shown in FIGS. 2 and 3, the IC 3 is accommodated in the internal space S and fixed to the base 51. The IC 3 is electrically connected to the internal terminal 533 via a bonding wire, and is electrically connected to the internal terminal 534 via a bonding wire. Thereby, IC3 and the heat generating part 4 are electrically connected, IC3 and the vibration element 2 are electrically connected, and IC3 and the external terminal 535 are electrically connected. Therefore, the IC 3 can control the heat generating unit 4 and the vibration element 2 and can communicate with the outside via the external terminal 535. Such an IC 3 includes at least an oscillation circuit that drives the vibration element 2 and a heating element control circuit that controls the heating unit 4.

(Outside package)
As shown in FIG. 1, the outer package 6 includes a base substrate 61 made of a printed wiring board and a cap 62 joined to the base substrate 61, and the internal space S <b> 1 formed by these includes the package 5. In addition, circuit components 8 such as capacitors and resistors are accommodated. The package 5 is bonded to the base substrate 61 via the lead frame 63 and is supported in a state of being separated from the base substrate 61. The lead frame 63 fixes the package 5 to the base substrate 61 and electrically connects an external terminal 535 of the package 5 and a terminal (not shown) formed on the base substrate 61. The circuit component 8 is fixed to the base substrate 61.

  The internal space S1 is hermetically sealed and is in a reduced pressure state (about 10 Pa or less, preferably a vacuum). Thereby, the internal space S1 functions as a heat insulating layer, and the vibration element 2 becomes less susceptible to the temperature change of the usage environment. Therefore, the temperature of the vibration element 2 can be more reliably kept constant. However, the environment of the internal space S1 is not limited to this, and may be filled with an inert gas such as nitrogen, argon, or helium, or may be open to the atmosphere.

Second Embodiment
FIG. 8 is a top view of an oscillator according to the second embodiment of the invention.

  Hereinafter, the oscillator according to the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The oscillator of the second embodiment is mainly the same as the oscillator of the first embodiment described above except that the configuration of the vibration element is different. In FIG. 8, the same reference numerals are given to the same components as those in the above-described embodiment.

  In the vibration element 2 of the present embodiment, the first extraction electrode 221b extends from one end portion of the first excitation electrode 221a in the short axis direction and extends to the outer edge portion of the crystal substrate 21 along the short axis direction. . On the other hand, the second extraction electrode 222b extends from one end portion of the second excitation electrode 222a in the short axis direction and extends to the outer edge portion of the quartz substrate 21 along the short axis direction.

  Also according to the second embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Third Embodiment>
FIG. 9 is a top view of an oscillator according to the third embodiment of the invention.

  Hereinafter, the oscillator according to the third embodiment will be described mainly with respect to the differences from the above-described embodiment, and description of similar matters will be omitted.

  The oscillator of the third embodiment is mainly the same as the oscillator of the first embodiment described above except that the configuration of the vibration element is different. In FIG. 9, the same reference numerals are given to the same components as those in the above-described embodiment.

  In the vibration element 2 of the present embodiment, the first extraction electrode 221b and the second extraction electrode 222b are omitted from the first embodiment described above, and both ends of the first and second excitation electrodes 221a and 222a in the major axis direction are omitted. The portion extends to the outer edge of the quartz substrate 21. One end of the second excitation electrode 222 a in the major axis direction is in contact with the fixing member 7. Further, a bonding wire is connected to one end of the first excitation electrode 221a in the long axis direction. According to such a configuration, the first and second excitation electrodes 221a and 222a can be electrically connected without using the first and second extraction electrodes 221b and 222b.

  Also according to the third embodiment, the same effects as those of the first embodiment described above can be exhibited.

[Electronics]
Next, an electronic apparatus provided with the vibration element of the present invention will be described.

  FIG. 10 is a perspective view showing the configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the present invention is applied.

  In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1108. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 has a built-in oscillator 1 (vibrating element 2).

  FIG. 11 is a perspective view showing a configuration of a mobile phone (including PHS) to which the electronic apparatus of the invention is applied.

  In this figure, a cellular phone 1200 includes an antenna (not shown), a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is provided between the operation buttons 1202 and the earpiece 1204. Has been placed. Such a cellular phone 1200 incorporates an oscillator 1 (vibration element 2).

  FIG. 12 is a perspective view showing a configuration of a digital still camera to which the electronic apparatus of the present invention is applied.

  A display unit 1310 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 1310 displays a subject as an electronic image. Function as. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302. When the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. Such a digital still camera 1300 has a built-in oscillator 1 (vibrating element 2).

  Since such an electronic device includes the oscillator 1 (the vibration element 2), it has excellent reliability.

  In addition to the personal computer of FIG. 10, the mobile phone of FIG. 11, and the digital still camera of FIG. 12, the electronic apparatus of the present invention includes, for example, a smartphone, a tablet terminal, a watch (including a smart watch), an inkjet discharge Wearable terminals such as devices (for example, inkjet printers), laptop personal computers, televisions, HMDs (head-mounted displays), video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronics Dictionary, calculator, electronic game device, word processor, workstation, video phone, security TV monitor, electronic binoculars, POS terminal, medical device (eg electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasound diagnostic device, electronic Insight ), A fish finder, various measurement instruments, mobile terminal the base station equipment, instruments (e.g., gages for vehicles, aircraft, and ships), a flight simulator, a network server or the like.

[Moving object]
Next, a moving body provided with the vibration element of the present invention will be described.

FIG. 13 is a perspective view showing an automobile to which the moving body of the present invention is applied.
As shown in FIG. 13, an automobile 1500 includes an oscillator 1 (vibration element 2). The oscillator 1 includes, for example, a keyless entry, an immobilizer, a car navigation system, a car air conditioner, an anti-lock brake system (ABS), an air bag, a tire pressure monitoring system (TPMS), an engine control, and a hybrid vehicle. It can be widely applied to electronic control units (ECUs) such as battery monitors for electric vehicles and vehicle attitude control systems. Thus, by incorporating the oscillator 1 (the vibration element 2) in the automobile 1500, the automobile 1500 with high reliability can be obtained.

[base station]
Next, a base station provided with the vibration element of the present invention will be described.

FIG. 14 is a schematic configuration diagram showing a positioning system to which the base station of the present invention is applied.
A positioning system 1600 shown in FIG. 14 includes a GPS satellite 1610, a base station 1620, and a GPS receiver 1630. The GPS satellite 1610 transmits positioning information (GPS signal). The base station 1620 includes, for example, a receiving device 1622 that receives positioning information from the GPS satellite 1610 with high accuracy via an antenna 1621 installed at an electronic reference point (GPS continuous observation station), and a positioning received by the receiving device 1622. And a transmission device 1624 that transmits information via the antenna 1623. In addition, the positioning information received by the receiving device 1622 is transmitted by the transmitting device 1624 in real time. Such a receiver 1622 incorporates an oscillator 1 (vibration element 2) as a reference frequency oscillation source. The GPS receiver 1630 includes a satellite receiver 1632 that receives positioning information from a GPS satellite 1610 via an antenna 1631, and a base station receiver 1634 that receives positioning information from a base station 1620 via an antenna 1633. I have. Since such a positioning system 1600 includes the oscillator 1, it has excellent reliability.

  As described above, the resonator element, the oscillator, the electronic device, the mobile body, and the base station of the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this, and the configuration of each unit has the same function Can be replaced with any structure having In addition, any other component may be added to the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Oscillator, 2 ... Vibration element, 21 ... Quartz substrate, 22 ... Electrode, 221a ... 1st excitation electrode, 221b ... 1st extraction electrode, 222a ... 2nd excitation electrode, 222b ... 2nd extraction electrode, 3 ... IC, DESCRIPTION OF SYMBOLS 4 ... Heat generating part, 43 ... Terminal, 5 ... Package, 51 ... Base, 511 ... Recess, 52 ... Lid, 531, 533, 534 ... Internal terminal, 535 ... External terminal, 6 ... Outer package, 61 ... Base substrate, 62 ... Cap, 63 ... Lead frame, 7 ... Fixing member, 8 ... Circuit parts, 1100 ... Personal computer, 1102 ... Keyboard, 1104 ... Main body, 1106 ... Display unit, 1108 ... Display unit, 1200 ... Mobile phone, 1202 ... Operation Button, 1204 ... Earpiece, 1206 ... Mouthpiece, 1208 ... Display, 1300 ... Digital still camera, 1302 ... Case, 304 ... Light receiving unit, 1306 ... Shutter button, 1308 ... Memory, 1310 ... Display unit, 1500 ... Car, 1600 ... Positioning system, 1610 ... GPS satellite, 1620 ... Base station, 1621 ... Antenna, 1622 ... Receiver, 1623 ... Antenna , 1624 ... transmitter, 1630 ... GPS receiver, 1631 ... antenna, 1632 ... satellite receiver, 1633 ... antenna, 1634 ... base station receiver, S, S1 ... internal space, θ ... angle

Claims (10)

The electric axis of the crystal is the X axis, the mechanical axis is the Y axis, the optical axis is the Z axis, the direction from the X axis to the Y axis around the Z axis is positive, and the X axis and the Z axis around the Z axis An axis obtained by rotating the Y axis by 3 ° or more and 30 ° or less is defined as an X ′ axis and a Y ′ axis, the direction from the Y ′ axis toward the Z axis is positive around the X ′ axis, and the X ′ axis A quartz substrate that includes the X ′ axis and the Z ′ axis in the in-plane direction, with the Z ′ axis and the Y ″ axis being rotated around the Z axis and the Y ′ axis by 33 ° or more and 36 ° or less.
An excitation electrode disposed on a main surface of the quartz substrate,
The excitation electrode has a longitudinal shape having a major axis and a minor axis in plan view,
A vibration element characterized by satisfying a relationship of −40 ° <θ <20 °, where θ is an angle of the major axis with respect to the Z ′ axis.   2. The vibration element according to claim 1, wherein the relation of 1.2 <L1 / L2 <4.0 is satisfied, where the length of the major axis is L1 and the length of the minor axis is L2.   The resonator element according to claim 1, wherein a contour of the excitation electrode has an oval shape.   The resonator element according to claim 1, wherein a contour of the quartz substrate is circular. The excitation electrode has a first excitation electrode disposed on one main surface of the quartz substrate and a second excitation electrode disposed on the other main surface,
5. The vibration element according to claim 1, wherein at least one of the first excitation electrode and the second excitation electrode has the longitudinal shape. The vibration element according to any one of claims 1 to 5,
And an oscillation circuit configured to oscillate the vibration element.   The oscillator according to claim 6, further comprising a temperature control unit that controls a temperature of the vibration element.   An electronic apparatus comprising the vibration element according to claim 1.   A moving body comprising the vibration element according to claim 1.   A base station comprising the vibration element according to claim 1.

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