JP2016149492A - Substrate storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container capable of preventing substrate rotation by always bringing a substrate elastically into contact with a circumferential edge part.SOLUTION: The substrate housing container includes: a container body; a lid body 3; and substrate engaging parts 71, 72, 73, 74, and 76. The substrate engaging parts 71, 72, 73, 74, and 76 can be elastically deformed between a wall part or the lid body 3 and an edge part of a substrate W housed in a substrate housing space 27. The substrate engaging parts 71, 72, 73, 74, and 76 can be engaged to a direction recognition section W11, formed on the substrate W, indicating a direction of the substrate W in a circumferential direction of the substrate W.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a substrate storage container used when a substrate made of a semiconductor wafer or the like is stored, stored, transported, transported, or the like.

  As a substrate storage container for storing a substrate made of semiconductor wafers and transporting (shipping) the wafer from a wafer maker to a device maker, a substrate storage container having a container body and a lid is conventionally known. Yes.

  The container body has a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates. The lid can be attached to and detached from the container body opening, and the container body opening can be closed.

  A retainer is provided in a portion of the lid that faces the substrate storage space when the container body opening is closed. The retainer can support the peripheral portions on the front side of the plurality of substrates when the container main body opening is closed by the lid. In addition, a substrate support member provided with a substrate mounting portion for mounting the substrate is provided on the wall portion so as to form a pair with the retainer. A back side substrate support part is provided in the back of the substrate support member. The back side substrate support portion is not limited to being formed integrally with the substrate support member, but may be formed as a separate body. The back side substrate support part can support the peripheral part on the back side of the plurality of substrates.

  When transporting, transporting, etc., with the substrate stored in the substrate storage container, the substrate rotates due to vibration or impact, and members supporting the substrate such as the back substrate support part wear or generate dust due to friction. It is possible to do. Therefore, a configuration is known in which the rotation prevention portion integrally formed with the lid is engaged with a notch portion formed on the substrate to suppress the rotation of the substrate (see Patent Document 1).

JP 2005-5396 A

  However, in the substrate storage container described in the above publication, the rotation prevention part cannot actually be engaged with the notch part at all times, and there is a slight amount between the rotation prevention part and the notch part. A gap is formed. This is because the notch portion of the substrate is a mark in the direction of the crystal of the substrate, and if the rotation preventing portion strongly contacts the notch portion, the notch portion of the substrate will be damaged. .

  SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate storage container that can elastically always contact a peripheral edge of a substrate and prevent the rotation of the substrate.

  The present invention includes a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed, and a plurality of substrates can be accommodated by the inner surface of the wall, and the container body opening is formed in the container body opening. A container body in which a communicating substrate storage space is formed, and can be attached to and detached from the container body opening, the container body opening can be closed, and the container body opening is closed when the container body opening is closed. A substrate that is elastically deformable between a lid facing the substrate storage space, the wall portion or the lid, and an edge of the substrate stored in the substrate storage space, and formed on the substrate. And a substrate engaging portion engageable with a direction recognizing portion indicating the direction of the substrate in the circumferential direction.

  Further, the substrate engaging portion is elastically deformable and is disposed in a portion of the lid that faces the substrate storage space when the container body opening is closed by the lid. A lid-side substrate support portion that can support edges of the plurality of substrates when the container body opening is closed by the lid, and the lid-side substrate support. And a substrate positioning contact portion that engages with the direction recognition portion.

  The lid-side substrate support portion supports the peripheral portion of the substrate in at least two locations of the peripheral portion of the substrate in the peripheral direction of the substrate, and the substrate positioning contact portion is in the peripheral direction of the substrate. It is preferable that it exists in the center part position between the said cover body side board | substrate support parts which support two places of the peripheral part of the said board | substrate.

  Further, the lid body is disposed at a portion facing the substrate storage space when the container body opening is closed by the lid, and the container body opening is closed by the lid. A lid-side substrate support portion capable of supporting edges of the plurality of substrates, wherein the substrate engaging portion is elastically deformable and is opposed to the lid-side substrate support portion in the substrate storage space. The plurality of substrates can be supported, and when the container body opening is closed by the lid, the plurality of the substrates are supported in cooperation with the lid-side substrate support. A back side substrate support part that supports the plurality of substrates in a state where the plurality of substrates are arranged in parallel, and a substrate positioning contact part that is present in the back side substrate support part and engages with the direction recognition part. It is preferable.

  Further, the back side substrate support portion supports the peripheral portion of the substrate in at least two locations of the peripheral portion of the substrate in the circumferential direction of the substrate, and the substrate positioning contact portion is in the circumferential direction of the substrate. It is preferable that it exists in the center part position between the said back side board | substrate support parts which support two places of the peripheral part of the said board | substrate.

  Moreover, it is preferable that the said board | substrate engaging part has a board | substrate positioning contact part which is elastically deformable and is fixed to the said wall part, and engages with the said direction recognition part.

  Moreover, it is preferable that the said direction recognition part is comprised by the notch part formed in a part of periphery of the said board | substrate, and the said board | substrate positioning contact part is comprised by the convex part engaged with the said notch part. .

  In addition, the direction recognition unit is configured by a linear edge configured by linearly forming a part of the peripheral edge of the substrate, and the substrate positioning contact unit is engaged with the linear edge. It is preferable that it is comprised by the linear edge contact part.

  An object of the present invention is to provide a substrate storage container that can elastically always contact the peripheral edge of a substrate and prevent the substrate from rotating.

It is a disassembled perspective view which shows a mode that the board | substrate W was accommodated in the substrate storage container 1 which concerns on 1st Embodiment of this invention. It is a perspective view which shows the retainer 7 of the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. It is a front view which shows the retainer 7 of the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. It is sectional drawing which shows a mode that the plate-shaped convex part 76 of the retainer 7 of the board | substrate storage container 1 which concerns on 1st Embodiment of this invention is engaging with the notch part W11. It is sectional drawing which shows a mode that the rectangular parallelepiped convex part 76A of the retainer 7A of the board | substrate storage container which concerns on 2nd Embodiment of this invention contact | abuts to the orientation flat part W11A. It is a schematic sectional drawing which shows a mode that the back wall convex part 221B of the substrate storage container which concerns on 3rd Embodiment of this invention is engaging with the notch part W11. It is a front view which shows a mode that the plate-shaped convex part 86 of the retainer 8 of the substrate storage container 1C which concerns on 4th Embodiment of this invention is engaging with the notch part W11.

  Hereinafter, a substrate storage container 1 according to the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a state in which a substrate W is stored in a substrate storage container 1 according to the first embodiment of the present invention. FIG. 2 is a perspective view showing the retainer 7 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 3 is a front view showing the retainer 7 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 4 is a cross-sectional view showing a state where the plate-like convex portion 76 of the retainer 7 of the substrate storage container 1 according to the first embodiment of the present invention is engaged with the notch portion W11.

  Here, for convenience of explanation, a direction (from the upper right to the lower left in FIG. 1) from the container body 2 described later toward the lid 3 is defined as a front direction D11, and the opposite direction is a rear direction (back direction) D12. These are collectively defined as the front-rear direction D1. Further, a direction (upward direction in FIG. 1) from the lower wall 24 to the upper wall 23 to be described later is defined as an upward direction D21, and the opposite direction is defined as a downward direction D22. Define. Further, a direction from the second side wall 26 to be described later to the first side wall 25 (a direction from the lower right to the upper left in FIG. 1) is defined as the left direction D31, and the opposite direction is defined as the right direction D32. Is also defined as a left-right direction D3.

  The substrate W (see FIG. 1) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, or the like, and is a thin one used in the industry. The substrate W in the present embodiment is a silicon wafer having a diameter of 300 mm to 450 mm. The substrate W has a notch W11 formed at a part of the periphery of the substrate W as a direction recognition portion, which is a mark of the crystal direction of the substrate W.

  As shown in FIG. 1, the substrate storage container 1 is used as an in-process container for storing a substrate W and transporting it in a process in a factory, or by a transportation means such as a land transportation means, an air transportation means, a sea transportation means or the like. Is used as a shipping substrate storage container for transporting the container, and is integrated with the container main body 2, the lid body 3, the side substrate support member 5, and the back side of the side substrate support member 5. It has a formed substrate back side edge portion support portion (not shown) and a retainer 7 (FIG. 4 and the like) as a lid side substrate support portion and a substrate engaging portion.

  The container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is formed so as to be surrounded by the wall portion 20. The side substrate support member 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, a plurality of substrates W can be stored in the substrate storage space 27.

  The side substrate support member 5 is provided on the wall portion 20 so as to be paired with the retainer 7 (see FIG. 4) in the substrate storage space 27. The side substrate support member 5 is formed on the back side of the substrate platform 501 for placing the substrate W and the substrate platform 501 when the container body opening 21 is not closed by the lid 3. A plurality of substrates W in a state where adjacent substrates W are separated from each other by a predetermined interval and arranged in parallel by a substrate rear side edge support portion (not shown) that contacts the peripheral edge of the substrate W. It can be supported. The substrate platform 501 includes a front placement projection (not shown) formed on the front side of the top surface of the substrate platform 501 and a back edge support portion on the back side of the top surface of the substrate platform 501. A back side mounting portion (not shown) formed in the vicinity of the front side (not shown) is provided. The substrate W is placed on and supported by the front placement protrusion and the back placement portion.

  When the container body opening 21 is closed by the lid 3, the substrate back side edge portion support portion (not shown) abuts the periphery of the plurality of substrates W, so that the periphery of the plurality of substrates W The rear part of the part can be supported.

  The lid 3 can be attached to and detached from the opening peripheral edge 28 that forms the container main body opening 21, and can close the container main body opening 21 while facing the substrate storage space 27. The retainer 7 is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3 (the back side of the lid 3 shown in FIG. 1). ing. The retainer 7 is disposed so as to make a pair with the side substrate support member 5 inside the substrate storage space 27.

  The retainer 7 can support the front portions of the peripheral portions of the plurality of substrates W by contacting the peripheral portions of the plurality of substrates W when the container body opening 21 is closed by the lid 3. When the container main body opening 21 is closed by the lid 3, the retainer 7 cooperates with the substrate back side edge portion support portion (not shown) of the side substrate support member 5 to hold the plurality of substrates W. By supporting, the plurality of substrates W are held in a state where the adjacent substrates W are separated from each other at a predetermined interval and are arranged in parallel.

  The substrate storage container 1 is made of a resin such as a plastic material. Unless otherwise specified, examples of the resin of the material include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, and polybutylene. Examples thereof include thermoplastic resins such as terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof. In particular, since the retainer 7 needs a certain degree of elasticity when holding the substrate W, polybutylene terephthalate, polyester elastomer, polyether ether ketone, or the like can be used. When imparting electrical conductivity to these molding material resins, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added.

Hereinafter, each part will be described in detail.
As shown in FIG. 1 and the like, the wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-described materials and are integrally formed.

  The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The back end of the upper wall 23, the back end of the lower wall 24, the back end of the first side wall 25, and the back end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. Opening peripheral edge portion 28 is formed.

  The opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

  As shown in FIG. 1, upper latch engagement recesses 40 </ b> A and 40 </ b> B that are recessed in the upward direction D <b> 21 are formed in the upper wall 23 and in the vicinity of the opening peripheral edge 28. In addition, lower latch engagement recesses 41A and 41B that are recessed in the downward direction D22 are formed in the lower wall 24 and in the vicinity of the opening peripheral edge 28. The upper latch engagement recesses 40A and 40B are formed one by one near the left and right ends of the upper wall 23, and the lower latch engagement recesses 41A and 41B are formed one by one near the left and right ends of the lower wall 24. Is formed. Accordingly, a total of four upper latch engagement recesses 40A and 40B and lower latch engagement recesses 41A and 41B are formed.

  As shown in FIG. 1, ribs 231 are integrally formed with the upper wall 23 on the outer surface of the upper wall 23. The rib 231 is provided to increase the rigidity of the container body 2.

  A top flange 232 is fixed to the central portion of the upper wall 23. The top flange 232 is a member that becomes a portion that is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer conveyance system), a PGV (wafer substrate conveyance carriage), or the like.

  As shown in FIG. 1 and the like, the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge 28 of the container body 2. The lid 3 can be attached to and detached from the opening peripheral edge 28 of the container main body 2, and the lid 3 can close the container main body opening 21 by attaching the lid 3 to the opening peripheral edge 28. . On the inner surface of the lid 3 on the surface of the step (sealing surface 201) formed at a position immediately behind the opening peripheral edge 28 when the lid 3 closes the container body opening 21. An annular seal member 4 is attached to the opposing surface. The seal member 4 is made of various types of thermoplastic elastomers such as polyester and polyolefin that can be elastically deformed, fluorine rubber, and silicon rubber. The seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.

  When the lid 3 is attached to the opening peripheral edge 28, the seal member 4 is sandwiched between the seal surface 201 and the inner surface of the lid 3 and elastically deformed, and the lid 3 seals the container body opening 21. Shuts down in a closed state. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.

  The lid body 3 is provided with a latch mechanism. The latch mechanism is provided in the vicinity of both left and right end portions of the lid 3, and as shown in FIG. 1, two upper latch portions 32 </ b> A and 32 </ b> B that can project upward from the upper side of the lid 3, and the lid 3. And two lower latch portions (not shown) that can project downward from the lower side of the upper side. The two upper latch portions 32 </ b> A and 32 </ b> B are disposed in the vicinity of the left and right ends of the upper side of the lid 3, and the two lower latch portions are disposed in the vicinity of the left and right ends of the lower side of the lid 3.

  As shown in FIG. 1, an operation unit 34 is provided on the outer surface of the lid 3. By operating the operating portion 34 from the front side of the lid 3, the upper latch portions 32A and 32B and the lower latch portion (not shown) can be projected from the upper and lower sides of the lid 3, and the upper side, It can be set as the state which does not protrude from a lower side. The upper latch portions 32A and 32B protrude upward from the upper side of the lid body 3, engage with the upper latch engagement recess portions 40A and 40B of the container body 2, and the lower latch portion (not shown) is the lid body. The lid 3 is fixed to the opening peripheral edge 28 of the container body 2 by projecting downward from the lower side of the container 3 and engaging with the lower latch engaging recesses 41 </ b> A and 41 </ b> B of the container body 2.

  On the inner side of the lid 3 (the back side of the lid 3 shown in FIG. 1), a recess (not shown) that is recessed outward (front direction D11) of the substrate storage space 27 is formed. A retainer engaged portion 351 (see FIG. 4) that engages with the vertical frame 71 of the retainer 7 exists in the recessed portion, and the retainer 7 can be removed from the recessed portion (not shown) of the lid 3. It is fixed to.

  As shown in FIGS. 2 to 4, the retainer 7 as the substrate engaging portion includes a vertical frame 71, a retainer leg portion 72, a retainer substrate receiving portion 73, a connecting portion 74, and a substrate positioning contact portion. The plate-like convex part 76 is provided. The vertical frame 71, the retainer leg 72, the retainer board receiving part 73, and the connection part 74 constitute a lid side substrate support part.

  The lid side substrate support part (vertical frame 71, retainer leg part 72, retainer board receiving part 73, and connection part 74) is elastically deformable, and is a part of the lid 3 and the container body by the lid 3 When the opening 21 is closed, the opening 21 is disposed at a portion facing the substrate storage space 27. The lid-side substrate support portion (vertical frame 71, retainer leg 72, retainer substrate receiving portion 73, and connecting portion 74) has a plurality of substrates when the container body opening 21 is closed by the lid 3. The edge of W can be supported. Further, the plate-like convex portion 76 as the substrate positioning contact portion exists in the connection portion 74 as the lid side substrate support portion, and engages with the notch portion W11 as the direction recognition portion.

  Specifically, the retainer 7 has a shape as shown in FIG. 4 when viewed in the vertical direction D2, and the vertical frame 71, the retainer leg 72, and the retainer substrate receiving portion 73 are elastically deformable. The resin is integrally molded and connected to each other. That is, the vertical frame 71 extends in parallel along the vertical direction D2 at the end of the retainer 7 on the left direction D31 side and the end of the retainer 7 on the right direction D32 side.

  The retainer leg 72 on the left direction D31 side extends slightly in the rear direction D12 from the vertical frame 71 on the left direction D31 side along the right direction D32. Subsequently, the retainer leg 72 on the left direction D31 side is curved in the middle and extends substantially along the rear direction D12. Subsequently, the retainer leg 72 on the left direction D31 side bends in the right direction D32 at the end on the rear direction D12 side. The retainer leg portion 72 on the left direction D31 side is connected to the end portion on the left direction D31 side of the retainer substrate receiving portion 73 on the left direction D31 side at the tip portion.

  The retainer leg portion 72 on the left direction D31 side constitutes an elastic deformation portion 721, particularly in the middle curved portion. When the retainer substrate receiving portion 73 receives an external force in a direction in which the retainer substrate receiving portion 73 approaches the inner surface of the lid 3 (front direction D11), the elastic deformable portion 721 is elastically deformed according to the external force to thereby retain the retainer substrate. It is possible to displace the receiving portion 73 and a plate-like convex portion 76 described later.

  On the other hand, the retainer leg 72 on the right direction D32 side extends slightly in the rear direction D12 along the left direction D31 from the vertical frame 71 on the right direction D32 side. Subsequently, the retainer leg portion 72 on the right direction D32 side is curved in the middle and extends substantially along the rear direction D12. Subsequently, the retainer leg portion 72 on the right direction D32 side bends in the left direction D31 at the end portion on the rear direction D12 side. The retainer leg portion 72 on the right direction D32 side is connected to the end portion on the right direction D32 side of the retainer substrate receiving portion 73 on the right direction D32 side at the tip portion.

The retainer leg portion 72 on the right direction D32 side constitutes an elastic deformation portion 721, particularly in the middle curved portion, similarly to the middle middle curved portion in the left direction D31 side retainer leg portion 72. When the retainer substrate receiving portion 73 receives an external force in a direction in which the retainer substrate receiving portion 73 approaches the inner surface of the lid 3 (front direction D11), the elastic deformable portion 721 is elastically deformed according to the external force, thereby retaining the retainer substrate It is possible to displace the receiving portion 73 and a plate-like convex portion 76 described later.
Accordingly, the retainer substrate receiving portion 73 as the lid-side substrate support portion is disposed at a position spaced a predetermined distance from the inner surface of the lid 3 in the rearward direction D12, and the substrate W in the circumferential direction of the substrate W is disposed. The peripheral portion of the substrate W is supported at two locations on the peripheral portion.

An end portion on the right direction D32 side of the retainer substrate receiving portion 73 on the left direction D31 side and an end portion on the left direction D31 side of the retainer substrate receiving portion 73 on the right direction D32 side are connected to each other by a connecting portion 74. .
The connecting portion 74 is immediately bent in the front direction D11 from the end portion on the left direction D31 side connected to the end portion on the right direction D32 side of the retainer substrate receiving portion 73 on the left direction D31 side so as to be almost in the front direction D11. Extend along. Subsequently, the connecting portion 74 is bent at a position still spaced in the rear direction D12 from the inner surface of the lid 3 and extends substantially along the right direction D32. Subsequently, the connecting portion 74 is bent again and extends substantially along the rear direction D12. The connecting portion 74 is bent substantially in the right direction D32 at the distal end thereof, and is connected to the end portion on the left direction D31 side of the retainer substrate receiving portion 73 on the right direction D32 side.

  At the center of the connecting portion 74 in the left-right direction D3, there is a plate-like convex portion 76 as a substrate positioning contact portion. The plate-like convex portion 76 exists at the center position between the retainer substrate receiving portions 73 that support the two peripheral portions of the substrate W in the circumferential direction of the substrate W.

  Specifically, the plate-like convex portion 76 is made of the same material as the vertical frame body 71, the retainer leg portion 72, the retainer substrate receiving portion 73, and the connection portion 74, and has a substantially wedge shape. And is integrally formed with the connecting portion 74. As shown in FIG. 4, the plate-like convex portion 76 extends from the connection portion 74 toward the center of the substrate W supported by the retainer substrate receiving portion 73, and the extended end portion of the plate-like convex portion 76. The (tip portion) is located closer to the center of the substrate W than the periphery of the substrate W. For this reason, the extending end portion (tip portion) of the plate-like convex portion 76 can be engaged with the notch portion W11 having a shape that is recessed from the periphery of the substrate W toward the center of the substrate W.

  The connection part 74 constitutes an elastic deformation part 741. That is, the connecting portion 74 is guided in a state in which the connecting portion 74 is in contact with a pair of guide walls 302 extending in the rearward direction D12 from the inner surface of the lid 3 on both sides of the connecting portion 74 in the left-right direction D3. Displaceable. And when the connection part 74 receives external force in the direction (front direction D11) in which the retainer board receiving part 73 approaches the inner surface of the lid 3, the retainer board is elastically deformed according to the external force. The receiving part 73 and the plate-like convex part 76 can be displaced.

  Accordingly, the board engaging portions (the vertical frame 71, the retainer leg 72, the retainer board receiving portion 73, the connecting portion 74, and the plate-like convex portion 76) are accommodated in the lid 3 and the substrate accommodating space 27. It can be elastically deformed between the edge portion of the substrate W and can be engaged with a notch portion W11 as a direction recognition portion formed on the substrate W and indicating the direction of the substrate W in the circumferential direction of the substrate W.

  According to the substrate storage container 1 according to the present embodiment having the above configuration, the following effects can be obtained. As described above, the substrate storage container 1 includes the container body 2, the lid 3, and the retainer 7 as the substrate engaging portion. The container main body 2 includes a cylindrical wall portion 20 in which a container main body opening 21 is formed at one end and the other end is closed. In the container main body 2, a substrate storage space 27 that can store a plurality of substrates W and communicate with the container main body opening 21 is formed by the inner surface of the wall portion 20. The lid 3 is detachable from the container body opening 21 and can close the container body opening 21, and faces the substrate storage space 27 when the container body opening 21 is closed. The retainer 7 as the substrate engaging portion is elastically deformable between the lid 3 and the edge of the substrate W stored in the substrate storage space 27, and is formed on the substrate W in the circumferential direction of the substrate W. It is possible to engage with a notch W11 as a direction recognition unit indicating the direction of the substrate W.

  With this configuration, the substrate engaging portion is configured in a state in which the retainer 7 as the substrate engaging portion is elastically deformed between the lid 3 and the edge portion of the substrate W stored in the substrate storage space 27. The plate-like convex part 76 can be engaged with a notch part W11 as a direction recognition part. That is, the board engaging portion constituted by the plate-like convex portion 76 and the like has elasticity with respect to the lid 3 and the wall portion 20 that are hardly deformed, and is elastically engaged with the notch portion W11. It is possible to suppress the plate-like convex portion 76 from coming into contact with the notch portion W11 with a strong force. As a result, the rotation of the substrate W can be reliably prevented without damaging the notch W11 of the substrate W.

  Further, the board engaging portion includes a vertical frame 71 as a lid side substrate support portion, a retainer leg portion 72, a retainer substrate receiving portion 73, a connection portion 74, and a plate-like convex portion 76 as a substrate positioning contact portion. And having. The lid-side substrate support portion is elastically deformable and is disposed in a portion of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. The lid-side substrate support portion can support the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3. The substrate positioning contact portion is present at the connection portion 74 of the lid side substrate support portion, and engages with a notch portion W11 as a direction recognition portion.

  With this configuration, the vertical frame 71, the retainer leg 72, the retainer substrate receiving portion 73, and the connection portion 74 as the lid-side substrate support portion are elastically deformed to support the peripheral portion of the substrate W and the connection portion. 74 can elastically support the plate-like convex portion 76. For this reason, the plate-like convex part 76 can be engaged with the notch part W11 of the substrate W so as to be displaceable with respect to the lid 3. For this reason, the rotation of the substrate W can be reliably prevented without damaging the notch W11 of the substrate W.

  Further, the retainer substrate receiving portion 73 of the retainer 7 as the lid-side substrate support portion supports the peripheral portion of the substrate W at least at two peripheral portions of the substrate W in the circumferential direction of the substrate W. The plate-like convex portion 76 as the substrate positioning contact portion is a central portion between the retainer substrate receiving portions 73 constituting the lid-side substrate support portion that supports the two peripheral portions of the substrate W in the circumferential direction of the substrate W. Exists in position.

  With this configuration, since the retainer substrate receiving portion 73 of the retainer 7 supports the peripheral portion of the substrate W at two locations on the peripheral portion of the substrate W, the plate-like convex portion 76 is strongly engaged with the notch portion W11 of the substrate W. You can relax. In addition, since the retainer substrate receiving portion 73 of the retainer 7 can evenly support the peripheral portion of the substrate W at two locations on the peripheral portion of the substrate W, the force that the substrate W tries to rotate can be suppressed. .

  In addition, the direction recognition unit includes a notch W11 formed at a part of the periphery of the substrate W. The substrate positioning contact portion is configured by a plate-like convex portion 76 that engages with the notch portion W11. With this configuration, the plate-like convex portion 76 is always reliably engaged with the plate-like convex portion 76 engaged with the notched portion W11 that is relatively easily damaged, and the rotation of the substrate W can be prevented.

  Next, a substrate storage container according to a second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a cross-sectional view showing a state in which the rectangular parallelepiped convex portion 76A of the retainer 7A of the substrate storage container according to the second embodiment of the present invention is engaged with the orientation flat portion W11A.

  In the substrate storage container according to the second embodiment, the configuration of the substrate positioning contact portion is different from the plate-like convex portion 76 as the substrate positioning contact portion of the substrate storage container 1 according to the first embodiment. In addition, the substrate W has an orientation flat portion W11A as a linear edge portion that is configured by forming a part of the periphery of the substrate W in a straight line as a direction recognition portion. Since the configuration other than this is the same as the configuration of the substrate storage container 1 according to the first embodiment, the same configuration as each configuration in the first embodiment is denoted by the same reference numeral and description thereof is omitted.

  As shown in FIG. 5, the substrate positioning contact portion is constituted by a rectangular parallelepiped convex portion 76 </ b> A having a rectangular parallelepiped shape as a linear edge contact portion. The rectangular parallelepiped convex portion 76A has a rectangular cross section perpendicular to the vertical direction D2. The rectangular parallelepiped convex portion 76A is made of the same material as the vertical frame 71, the retainer leg portion 72, the retainer substrate receiving portion 73, and the connecting portion 74, and the bottom surface of the rectangular parallelepiped convex portion 76A is the retainer in the left-right direction D3. It is connected by being integrally formed with the central portion of the connecting portion 74 of 7A. The rectangular parallelepiped convex portion 76A extends from the connection portion 74 of the retainer 7A toward the center of the substrate W supported by the retainer substrate receiving portion 73, and constitutes an extended end portion (tip portion) of the rectangular parallelepiped convex portion 76A. The distance from the leading end surface 77A to the center of the substrate W supported by the retainer substrate receiving portion 73 is the periphery of the substrate W and is shorter than the radius of the substrate W at the periphery other than the orientation flat portion W11A. For this reason, when the substrate W is supported by the retainer substrate receiving portion 73, the distal end surface 77A of the rectangular parallelepiped convex portion 76A comes into contact with and engages with the orientation flat portion W11A.

  According to the substrate storage container according to the present embodiment having the above configuration, the following effects can be obtained. As described above, the direction recognition unit is configured by the orientation flat portion W11A as a linear edge configured by forming a part of the periphery of the substrate W in a linear shape. The substrate positioning contact portion is configured by a rectangular parallelepiped convex portion 76A as a linear edge contact portion that engages with an orientation flat portion W11A as a linear edge.

  With this configuration, the distal end surface 77A of the rectangular parallelepiped convex portion 76A is aligned with the orientation flat portion W11A as a linear edge portion in which a part of the peripheral edge portion of the substrate W is cut out in a direction orthogonal to the radial direction of the substrate W. Can be engaged by abutting on the surface. This engagement can reliably prevent the rotation of the substrate W.

  Next, a substrate storage container according to a third embodiment of the present invention will be described with reference to FIG. FIG. 6 is a schematic cross-sectional view showing a state where the back wall convex portion 221B of the substrate storage container according to the third embodiment of the present invention is engaged with the notch portion W11.

  In the substrate storage container according to the third embodiment, the configuration of the substrate engagement portion is different from the configuration of the substrate engagement portion (retainer 7) of the substrate storage container 1 according to the first embodiment. Since the configuration other than this is the same as the configuration of the substrate storage container 1 according to the first embodiment, the same configuration as each configuration in the first embodiment is denoted by the same reference numeral and description thereof is omitted.

  The board engaging part has a board positioning contact part that is elastically deformable and is fixed to the back wall 22 of the wall part 20 and engages with a notch part W11 as a direction recognition part. Specifically, the substrate positioning contact portion constituting the substrate engaging portion has a back wall convex portion 221B made of elastically deformable rubber or the like. The back wall convex portion 221B is integrally formed and connected to the back wall 22, protrudes from the inner surface of the back wall 22 forming the substrate storage space 27 toward the front direction D11, and in the left-right direction D3. In the center of the back wall 22, it extends from the vicinity of the upper end of the back wall 22 to the vicinity of the lower end along the vertical direction D2.

  According to the substrate storage container according to the present embodiment having the above configuration, the following effects can be obtained. As described above, the board engaging part is elastically deformable and is fixed to the back wall 22 of the wall part 20 and engages with the notch part W11 as the direction recognition part. 221B. With this configuration, the notched portion W11 having a shape that is recessed from the peripheral edge of the substrate W toward the center of the substrate W has an extended end portion (front end) of the back wall convex portion 221B that exists on the back wall 22 constituting the wall portion 20. Part) can be engaged, and the rotation of the substrate W can be prevented.

  Next, a substrate storage container according to a fourth embodiment of the present invention will be described with reference to FIG. FIG. 7 is a cross-sectional view showing a state where the plate-like convex portion 86 of the retainer 8 of the substrate storage container 1C according to the fourth embodiment of the present invention is engaged with the notch portion W11.

  In the substrate storage container 1C according to the fourth embodiment, the retainer 8 is present on the back wall 22, and the retainer 8 has a plate-like convex portion 86 that engages with the notch portion W11, and thus the substrate storage container according to the first embodiment. This is different from the first configuration. Since the configuration other than this is the same as the configuration of the substrate storage container 1 according to the first embodiment, the same configuration as each configuration in the first embodiment is denoted by the same reference numeral and description thereof is omitted.

  As shown in FIG. 7, the retainer 8 as the board engaging portion includes a vertical frame body 81, a retainer leg portion 82, a retainer substrate receiving portion 83, a connection portion 84, and a plate shape as a substrate positioning contact portion. And a convex portion 86. The vertical frame body 81, the retainer leg portion 82, the retainer substrate receiving portion 83, and the connection portion 84 constitute a back side substrate support portion.

  The back side substrate support portion (vertical frame body 81, retainer leg portion 82, retainer substrate receiving portion 83, and connection portion 84) can be elastically deformed, and in the substrate storage space 27, the lid side substrate support portion (vertical frame). The body 71, the retainer leg 72, the retainer substrate receiving portion 73, and the connecting portion 74) are arranged to make a pair. The back side substrate support portion can support the edges of a plurality of substrates W, and when the container body opening 21 is closed by the lid 3, the lid side substrate support portion (vertical frame 71, retainer leg portion) 72, the retainer substrate receiving portion 73, and the connecting portion 74) support the plurality of substrates W in a state where the plurality of substrates W are arranged in parallel. The plate-like convex portion 86 as the substrate positioning contact portion exists in the connection portion 84 constituting the back side substrate support portion, and engages with the notch portion W11 as the direction recognition portion.

  Specifically, the vertical frame body 81, the retainer leg portion 82, and the retainer substrate receiving portion 83 are integrally formed of an elastically deformable resin and are connected to each other. The retainer 8 has a shape as shown in FIG. 7 when viewed in the vertical direction D2. That is, like the vertical frame 71, the vertical frame 81 extends in parallel along the vertical direction D2 at the end of the retainer 8 on the left direction D31 side and the end of the retainer 8 on the right direction D32 side. .

  The retainer leg portion 82 on the left direction D31 side extends substantially along the front direction D11 from the vertical frame body 81 on the left direction D31 side. Subsequently, the retainer leg portion 82 on the left direction D31 side bends in the right direction D32 at the end portion on the front direction D11 side. The retainer leg portion 82 on the left direction D31 side is connected to the end portion on the left direction D31 side of the retainer substrate receiving portion 83 on the left direction D31 side at the tip portion.

  On the other hand, the retainer leg portion 82 on the right direction D32 side extends substantially along the front direction D11 from the vertical frame body 81 on the right direction D32 side. Subsequently, the retainer leg portion 82 on the right direction D32 side bends in the left direction D31 at the end portion on the front direction D11 side. The retainer leg portion 82 on the right direction D32 side is connected to the end portion on the right direction D32 side of the retainer substrate receiving portion 83 on the right direction D32 side at the tip portion.

  The retainer substrate receiving portion 83 is disposed at a position spaced a predetermined distance from the inner surface of the back wall 22 in the front direction D11. The retainer substrate receiving portion 83 is located at two positions on the peripheral edge of the substrate W in the circumferential direction of the substrate W. Support the periphery.

An end portion on the right direction D32 side of the retainer substrate receiving portion 83 on the left direction D31 side and an end portion on the left direction D31 side of the retainer substrate receiving portion 83 on the right direction D32 side are connected to each other by a connecting portion 84. .
The connecting portion 84 immediately bends in the rear direction D12 from the end portion on the left direction D31 side connected to the end portion on the right direction D32 side of the retainer substrate receiving portion 83 on the left direction D31 side, and substantially in the rear direction D12. Extend along. Subsequently, the connecting portion 84 is bent at a position still spaced in the front direction D11 from the inner surface of the back wall 22 and extends substantially along the right direction D32. Subsequently, the connecting portion 84 is bent again and extends substantially along the front direction D11. The connecting portion 84 is bent substantially in the right direction D32 at the tip portion and connected to the end portion on the left direction D31 side of the retainer substrate receiving portion 83 on the right direction D32 side.

  In the center of the connecting portion 84 in the left-right direction D3, there is a plate-like convex portion 86 as a substrate positioning contact portion. The plate-like convex portion 86 exists at the center position between the retainer substrate receiving portions 83 that support the two peripheral portions of the substrate W in the circumferential direction of the substrate W.

  Specifically, the plate-like convex portion 86 is made of the same material as the vertical frame body 81, the retainer leg portion 82, the retainer substrate receiving portion 83, and the connection portion 84, and has a substantially wedge shape. And is integrally formed with the connecting portion 84. As shown in FIG. 7, the plate-like convex portion 86 extends from the connecting portion 84 toward the center of the substrate W supported by the retainer substrate receiving portion 83, and the extended end portion of the plate-like convex portion 86. The (tip portion) is located closer to the center of the substrate W than the periphery of the substrate W. For this reason, the extending end portion (tip portion) of the plate-like convex portion 86 can be engaged with the notch portion W11 having a shape that is recessed from the periphery of the substrate W toward the center of the substrate W.

  The connection part 84 constitutes an elastic deformation part 841. That is, the connecting portion 84 is guided in a state in which the connecting portion 84 is in contact with a pair of guide walls 222C extending in the front direction D11 from the inner surface of the back wall 22 on both sides of the connecting portion 84 in the left-right direction D3, and moves in the front-rear direction D1. Displaceable. The connecting portion 84 is elastically deformed according to the external force when the retainer substrate receiving portion 83 receives an external force in a direction approaching the inner surface of the back wall 22 (rear direction D12). The receiving part 83 and the plate-like convex part 86 can be displaced.

  Accordingly, the substrate engaging portion (the vertical frame 81, the retainer leg portion 82, the retainer substrate receiving portion 83, the connecting portion 84, and the plate-like convex portion 86) is connected to the back wall 22 constituting the wall portion 20 and the substrate storage. It is elastically deformable between the edge of the substrate W accommodated in the space 27 and is engaged with a notch W11 as a direction recognition portion formed on the substrate W and indicating the direction of the substrate W in the circumferential direction of the substrate W. Is possible.

According to the substrate storage container according to the present embodiment having the above configuration, the following effects can be obtained. As described above, the substrate storage container 1 </ b> C is disposed in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. A retainer substrate receiving portion 73 is provided as a lid-side substrate support portion capable of supporting the edges of the plurality of substrates W when the container main body opening portion 21 is closed.
The substrate engaging portion includes a back side substrate support portion (vertical frame body 81, retainer leg portion 82, retainer substrate receiving portion 83, and connection portion 84), a substrate positioning contact portion (plate-like convex portion 86), Have The back side substrate support portion is elastically deformable and forms a pair with the lid side substrate support portion (the vertical frame body 71, the retainer leg portion 72, the retainer substrate receiving portion 73, and the connection portion 74) in the substrate storage space 27. The plurality of substrates W can be supported in cooperation with the lid-side substrate support portion when the container body opening 21 is closed by the lid 3. A plurality of substrates W are supported in a state where they are arranged in parallel. The plate-like convex portion 86 constituting the substrate positioning contact portion is present in the connection portion 84 constituting the back side substrate support portion, and engages with the notch portion W11 as the direction recognition portion. The retainer substrate receiving portion 83 constituting the back substrate support portion supports the peripheral portion of the substrate W at least at two positions in the peripheral portion of the substrate W in the circumferential direction of the substrate W. The plate-like convex portion 86 constituting the substrate positioning contact portion is a central portion between the back side substrate support portions (retainer substrate receiving portions 83) that support the two peripheral portions of the substrate W in the circumferential direction of the substrate W. Exists in position.

  With this configuration, the vertical frame 81, the retainer leg 82, the retainer substrate receiving portion 83, and the connection portion 84 as the back side substrate support portion are elastically deformed to support the peripheral portion of the substrate W, and the connection portion. 84 can elastically support the plate-like convex portion 86. For this reason, the plate-shaped convex part 86 can be engaged with the notch part W11 of the board | substrate W so that it can displace with respect to the back wall 22 which comprises the wall part 20. FIG. For this reason, the rotation of the substrate W can be reliably prevented without damaging the notch W11 of the substrate W.

  The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims. For example, the configuration of the board engaging portion is not limited to the configuration of the above-described embodiment. For example, in the first embodiment and the second embodiment, the rectangular parallelepiped convex portion 76A and the plate-like convex portion 76 as the substrate positioning abutment portion that engages the notch portion W11 as the direction recognition portion and the orientation flat portion W11A are provided on the lid side. Although it exists in the connection part 74 as a board | substrate support part, it is not limited to this structure.

  Further, in the above-described embodiment, the rectangular parallelepiped convex portion 76A and the plate-like convex portion 76 constituting the substrate positioning contact portion are integrally formed and connected to the connection portion 74 as the lid-side substrate support portion. The wall convex portion 221B is integrally formed and connected to the back wall 22, but is not limited to this configuration. For example, the substrate positioning contact portion may be configured to be detachable from the lid-side substrate support portion or the wall portion.

  Moreover, although the retainer board | substrate receiving part 73 as a cover body side board | substrate support part has supported the peripheral part of the board | substrate W in two places of the peripheral part of the board | substrate W in the circumferential direction of the board | substrate W, it is not limited to this structure. The lid-side substrate support portion may support the peripheral portion of the substrate W at least at two locations in the peripheral portion of the substrate W in the circumferential direction of the substrate W.

  Moreover, in 3rd Embodiment, although the back wall convex part 221B as a board | substrate engaging part existed in the back wall 22, it is not limited to this structure. A portion of the wall portion other than the back wall 22, for example, the board engaging portion may be present on the first side wall or the like. Further, the back wall convex portion 221B extends from the vicinity of the upper end portion of the back wall 22 to the vicinity of the lower end portion along the vertical direction D2 at the center of the back wall 22 in the left-right direction D3, but is not limited to this configuration. . For example, the back wall convex portions may be individually formed one by one in a one-to-one correspondence with the notch portions W11 of the respective substrates W at positions where they can be engaged with the notch portions W11 of the respective substrates W.

  Further, the rectangular parallelepiped convex portion 76A and the plate-like convex portion 76 that constitute the substrate positioning contact portion are the vertical frame body 71, the retainer leg portion 72, the retainer substrate receiving portion 73, and the connection portion that constitute the lid side substrate support portion. However, the present invention is not limited to this configuration. For example, the lid-side substrate support portion may be configured by a spring or the like and support the substrate positioning contact portion with respect to the lid 3.

  Further, the rectangular parallelepiped convex portion 76A and the plate-like convex portion 76 are integrally molded and connected by the same material as the vertical frame 71, the retainer leg portion 72, the retainer substrate receiving portion 73, and the connecting portion 74. The configuration is not limited to this. For example, the rectangular parallelepiped convex portion 76A and the plate-like convex portion 76 are made of rubber or the like, and the vertical frame body 71, the retainer leg portion 72, the retainer substrate receiving portion 73, and the connection portion 74 are made of different materials. May be.

  In addition, the shape of the container body and the lid, the number of the substrates W that can be stored in the container body, and the dimensions thereof are the shape of the container body 2 and the lid 3 in the present embodiment, and the substrate W that can be stored in the container body 2. It is not limited to the number of sheets and dimensions.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container main body 3 Lid body 20 Wall part 21 Container main body opening part 27 Substrate storage space 71 Vertical frame (board | substrate engaging part, cover body side board | substrate support part)
72 Retainer legs (substrate engagement portion, lid side substrate support portion)
73 Retainer board receiving part (board engaging part, lid side substrate support part)
74 Connection part (board engagement part, lid side board support part)
76 Plate-shaped convex part (board engagement part, board positioning contact part)
76A rectangular parallelepiped convex portion (substrate engagement portion, substrate positioning contact portion)
81 Vertical frame (board engagement part, back side board support part)
82 Retainer legs (board engagement part, back side board support part)
83 Retainer board receiving part (board engagement part, back side board support part)
84 Connection part (board engagement part, back side board support part)
86 Plate-shaped convex part (board engagement part, board positioning contact part)
221B Back wall convex part (board engaging part, board positioning contact part)
W substrate W11 notch W11A orientation flat

Claims (8)

A substrate housing that includes a cylindrical wall portion that is formed with a container body opening at one end and is closed at the other end, and can accommodate a plurality of substrates by the inner surface of the wall and communicate with the container body opening. A container body in which a space is formed;
A lid that is detachable from the container body opening, can close the container body opening, and faces the substrate storage space when the container body opening is closed;
It is elastically deformable between the wall portion or the lid and the edge portion of the substrate housed in the substrate housing space, and indicates the direction of the substrate in the circumferential direction of the substrate formed on the substrate. A substrate storage container comprising: a substrate engaging portion engageable with the direction recognition portion. The board engaging portion is
A lid-side substrate support that is elastically deformable and is disposed in a portion of the lid that is opposed to the substrate storage space when the container body opening is closed by the lid; A lid-side substrate support portion capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid;
The substrate storage container according to claim 1, further comprising: a substrate positioning contact portion that is present in the lid-side substrate support portion and engages with the direction recognition portion. The lid side substrate support part supports the peripheral part of the substrate in at least two positions of the peripheral part of the substrate in the circumferential direction of the substrate,
3. The substrate storage container according to claim 2, wherein the substrate positioning contact portion is present at a central position between the lid-side substrate support portions that support two peripheral portions of the substrate in the circumferential direction of the substrate. . The lid body is disposed in a portion facing the substrate storage space when the container body opening is closed by the lid, and the container body opening is closed by the lid. Sometimes, provided with a lid-side substrate support portion capable of supporting the edges of the plurality of substrates,
The board engaging portion is
It is elastically deformable and is disposed so as to be paired with the lid-side substrate support in the substrate storage space, and can support the edges of the plurality of substrates, and the container body opening is closed by the lid. In cooperation with the lid-side substrate support portion when the plurality of substrates are arranged in parallel, a back side substrate support portion that supports the plurality of substrates,
The substrate storage container according to claim 1, further comprising: a substrate positioning contact portion that is present in the back side substrate support portion and engages with the direction recognition portion. The back side substrate support part supports the peripheral part of the substrate in at least two positions of the peripheral part of the substrate in the circumferential direction of the substrate,
5. The substrate storage container according to claim 4, wherein the substrate positioning contact portion is present at a central position between the back side substrate support portions that support two peripheral portions of the substrate in the circumferential direction of the substrate. .   The substrate storage container according to claim 1, wherein the substrate engaging portion includes a substrate positioning contact portion that is elastically deformable and is fixed to the wall portion and engages with the direction recognition portion. The direction recognizing part is constituted by a notch part formed in a part of the peripheral edge of the substrate,
The said substrate positioning contact part is a board | substrate storage container in any one of Claims 2-6 comprised by the convex part engaged with the said notch part. The direction recognizing unit is configured by a linear edge portion formed by forming a part of the peripheral edge of the substrate in a linear shape,
The said substrate positioning contact part is a substrate storage container in any one of Claims 2-6 comprised by the linear edge part contact part engaged with the said linear edge part.

Images