TWI652211B - Substrate storage container and holding member - Google Patents

Abstract

The present invention provides a substrate storage container which can be used in a semiconductor factory or the like, and can support the substrate in a substrate storage container that supports and supports a substrate such as a bonded wafer, and can safely be used when the container is subjected to shock and vibration. Support the substrate. In the substrate storage container including the container body and the lid body that can accommodate the substrate, the lid body has a holding member that supports the edge portion of the substrate, and when the lid body closes the container body opening portion of the container body and supports the substrate, The normal direction of the plane (306) of the holding member that abuts the substrate is made downward with respect to the substrate in the thickness direction of the substrate and perpendicular to the thickness direction of the substrate as the substrate in the rearward direction of the substrate storage container. The side is tilted to the specified angle.

Description

Substrate storage container and holding member

The present invention relates to a substrate storage container used for storing, storing, transporting, and transporting a substrate made of a semiconductor wafer or the like, and a holding member for the substrate storage container.

As a substrate storage container for storing a substrate made of a semiconductor wafer in a step of being stored in a factory, a substrate storage container having a structure of a container body and a lid is known in the art.

The container body has a cylindrical wall portion in which the container body opening portion is formed at one end portion and the other end portion is closed. A substrate housing space is formed in the container body. The substrate housing space is formed by being surrounded by the wall portion, and can accommodate a plurality of substrates. The lid body is detachable from the opening of the container body and can close the opening of the container body.

A front holding member is provided in a portion facing the substrate housing space when a part of the lid body is closed to close the container body. The front holding member can support the edge portions of the plurality of substrates when the container body opening portion is closed by the lid body. Further, a substrate supporting plate portion is provided on the wall portion so as to be paired with the front holding member, and the substrate supporting plate portion is provided with a substrate placing portion for placing the substrate. A rear substrate supporting portion is provided on the rear side of the substrate supporting plate portion. The rear substrate supporting portion may be formed not only integrally with the substrate supporting plate portion but also as a separate member. The rear substrate support portion can support The edge portion of a plurality of substrates.

When the lid body is attached to the container body opening portion in order to close the container body opening portion of the container body, the plurality of substrates placed on the substrate placing portion of the substrate supporting plate portion are separated from the substrate placing portion in the upward direction. It is supported by the front holding member and the rear substrate supporting portion. At this time, a V-shaped groove shape is formed in the portion of the front holding member of the support substrate and the rear substrate supporting portion, and the edge portion of the substrate is supported by the V-shaped groove shape. Usually, such a container is used as a delivery container for a substrate (see Patent Document 1).

Further, there is a container in which the substrate is not separated from the substrate placing portion when the lid body is attached to the opening of the container body in order to close the opening of the container body of the container body, and the plurality of the front holding member and the rear substrate supporting portion are supported by the container. Substrate. Such a container is used as a container used in a step of a semiconductor factory or the like. In this case, a container is also studied in which the front portion of the substrate is pressed, the movement of the substrate is suppressed in the container main body, and the substrate having a difference in thickness and thickness corresponding to the manufacturing of the container and the substrate is received. The plane of the holding member is set to a vertical plane having a height of about twice the thickness of the substrate (refer to Patent Document 2).

Prior technical literature

Patent Document 1: Japanese Patent No. 4146718

Patent Document 2: Japanese Patent No. 4153874

As described above, the container that supports the substrate by using the V-groove shape of the former can abut the upper and lower surfaces of the edge portion of the substrate although the substrate can be firmly supported. Thus, a shape called a bonded wafer is supported as a substrate formed by fixing a thin wafer on a base substrate. When a substrate composed of a thin substrate having a base substrate and a device is formed, there is a possibility that a thin wafer on the base substrate is in contact with the V-shaped groove shape. Further, sometimes the shape of the V-shaped groove is in contact with the adhesive layer on which the thin wafer is fixed on the base substrate, which may damage the edge portion of the thin wafer.

Therefore, the latter is used to support the edge of the substrate with the plane, and to hold the substrate in a state where the substrate is not separated from the substrate placement portion. However, since the edge portion of the substrate is supported by the vertical planes of the front holding member and the rear substrate supporting portion, the substrate is not supported at all in the upward direction. Therefore, there is a problem in that the substrate is moved by the impact and vibration in the vertical direction, thereby causing damage to the thin wafer on the upper surface of the substrate and the base substrate. Further, there is a problem that particles due to sliding between the front holding member and the rear substrate supporting portion and the substrate cause defective products and an increase in defective rate.

An object of the present invention is to provide a substrate storage container and a front holding member that pass through a plane of a front holding member in a state in which a substrate is placed on a substrate placement portion in a substrate storage container that accommodates and supports a substrate such as a bonded wafer. The substrate is held in a plane with the rear substrate supporting portion, and the supporting force of the substrate can be improved, and the substrate inside the container can be firmly supported even when the container is subjected to impact and vibration.

The present invention provides a substrate storage container including a container body having a substrate storage space in which a plurality of substrates can be housed, a container body opening portion communicating with the substrate housing space at one end portion, and a lid body capable of closing the substrate a container body opening; a holding member disposed as the cover And a part of the plurality of substrates can be supported on a portion of the container body when the opening of the container body is closed by the cover; and a pair of substrate supporting plate portions The holding member is disposed in pairs on the inner surface of the substrate housing space to position and hold the outer edge portion of the plurality of substrates, the substrate supporting plate portion having: a substrate placing portion for placing the substrate; and a rear substrate supporting portion Abutting the end portion of the substrate and holding the end portion of the substrate, the holding member having: a holding member substrate receiving portion having a holding member substrate abutting surface abutting the substrate; and an arm portion and the holding member When the lid body is in a state in which the lid portion of the container body is closed, the substrate receiving portion is connected to the center of the substrate in the thickness direction and perpendicular to the thickness direction, and the substrate in the rearward direction of the substrate storage container is horizontally rearward. The reference line is inclined at a predetermined angle toward the lower side in the normal direction of the contact surface of the holding member substrate.

Further, preferably, the angle in the normal direction of the abutting surface of the holding member substrate is set as the inclination angle of the holding member and the rotation angle from the reference direction to the downward direction is set based on the horizontal rearward direction of the substrate. When the value is a positive value, the holding member inclination angle in a state in which the container body opening portion is closed by the lid body is larger than the holding member inclination angle in a state in which the container body opening portion is not closed by the lid body.

Further, it is preferable that the substrate abutting position at which the substrate abuts on the abutting surface of the holding member substrate is located lower than a center of a fixed position of the arm portion connecting the holding member substrate receiving portion and the arm portion. The position of the direction.

Moreover, it is preferable that the substrate abutting position at which the substrate abuts on the abutting surface of the holding member substrate is located at a receiving portion of the substrate that is connected to the holding member a height equal to the center of the arm fixing position of the arm or a position higher than the center of the arm fixing position, and when the lid body does not close the opening of the container body, The substrate horizontally rearward direction is a reference, and the normal direction of the holding member substrate abutting surface is inclined downward by a predetermined angle.

Further, the present invention provides a holding member for a substrate storage container including a container body having a substrate storage space in which a plurality of substrates can be accommodated, and having a connection with the substrate storage space at one end portion The container body opening portion and the lid body can close the container body opening portion, and the holding member is disposed as a part of the lid body, and the container body opening portion is opposed to the substrate housing space when the container body opening portion is closed by the lid body The side portion is capable of supporting an end portion of the plurality of substrates, the holding member having: a holding member substrate receiving portion having a holding member substrate abutting surface abutting the substrate; and an arm portion and the holding member substrate receiving portion The substrate abutting position at which the substrate abuts on the contact surface of the holding member substrate is located at a position lower than a center of a fixed position of the arm portion connecting the holding member substrate receiving portion and the arm portion.

Further, the present invention provides a holding member for a substrate storage container including a container body having a substrate storage space in which a plurality of substrates can be accommodated, and having a connection with the substrate storage space at one end portion The container body opening portion and the lid body can close the container body opening portion, and the holding member is disposed as a part of the lid body, and the container body opening portion is opposed to the substrate housing space when the container body opening portion is closed by the lid body On the side portion, the end of the plurality of substrates can be supported, The substrate abutting position on which the substrate abuts on the member substrate abutting surface is located at the same height as the center of the arm fixing position at which the holding member substrate receiving portion and the arm portion are connected, or at a center closer to the arm fixing position. In the upward direction, when the lid body is not closed to the container body opening portion, the substrate which is the rearward direction of the substrate storage container is horizontally rearward by the center of the substrate in the thickness direction and perpendicular to the thickness direction. The direction is the reference, and the normal direction of the abutting surface of the holding member substrate is inclined at a predetermined angle toward the lower side.

According to the present invention, since the holding member and the rear substrate supporting portion can support the substrate so as not to contact the upper surface of the thin wafer bonded to the base substrate, it is possible to provide a formation of the bonded wafer. The inner container of the step of breaking the thin wafer of the device.

Further, since the substrate receiving portion is provided with the height of the plane of the supporting substrate of the holding member and the rear substrate supporting portion sufficiently higher than the thickness of the substrate, it is not limited to the substrate having a specific thickness, and the thickness can be supported at the height of the substrate receiving portion. In the following substrates, a substrate having a different thickness can be accommodated in one substrate storage container.

Further, the particles generated from the contact portions of the substrate and the holding member and the rear substrate supporting portion can be reduced to the limit, and the yield of the device fabricated on the substrate can be improved. Further, since the edge portion of the substrate is received and held by the plane of the holding member and the rear substrate supporting portion, the device can be formed in the vicinity of the outer periphery of the upper surface of the substrate, and the effective area for forming the device can be increased, and the substrate can be formed from one substrate. The sum of the resulting devices increases, helping to reduce the cost of the device.

1‧‧‧Substrate storage container

2‧‧‧Container body

3‧‧‧ cover

4‧‧‧ Sealing members

5‧‧‧Substrate support plate

20‧‧‧ wall

21‧‧‧ container body opening

22‧‧‧ Back wall

23‧‧‧Upper wall

24‧‧‧ Lower wall

25‧‧‧First side wall

26‧‧‧Second side wall

27‧‧‧Substrate storage space

28‧‧‧ rib

29‧‧‧Top flange

30‧‧‧ sealing surface

31‧‧‧ Opening periphery

32A‧‧‧Upper side latching department

32B‧‧‧Upper side latching department

33A‧‧‧Lower side latching department

33B‧‧‧Lower side latching department

34‧‧‧Operation Department

35‧‧‧ Keeping components

36‧‧‧Retaining member snap fit

37‧‧‧ recess

40A‧‧‧Upper latch engagement recess

40B‧‧‧Upper latch engagement recess

41A‧‧‧Lower side latch engagement recess

41B‧‧‧Lower side latch engagement recess

250‧‧‧ Front side being engaged

251‧‧‧The central part of the rear side is engaged

252‧‧‧The rear side is engaged

253‧‧‧The rear side is engaged with the fixing part

300‧‧‧Maintenance frame

301‧‧‧Maintenance component

301A‧‧‧Maintenance component

301B‧‧‧Maintenance component

302‧‧‧arm

303‧‧‧Retaining member substrate receiving part

303A‧‧‧Retaining member substrate receiving part

303B‧‧‧Retaining member substrate receiving part

304‧‧‧Upper flange

305‧‧‧Bottom flange

306‧‧‧Retaining member substrate abutment surface

306A‧‧‧Retaining member substrate abutment surface

307‧‧‧Substrate abutment position

308‧‧‧Center of fixed position of the arm

500‧‧‧Front side engagement

501‧‧‧Substrate placement

502‧‧‧The front side is placed with protrusions

503‧‧‧ Rear side placement

504‧‧‧Back side substrate support

505‧‧‧Back side central engagement

506‧‧‧Back side engagement

507‧‧‧Back side snap-in fixing

801‧‧‧base level

802‧‧‧arm level

803‧‧‧The substrate is horizontally rearward

804‧‧‧ Keep the normal direction of the abutment surface of the member substrate

805‧‧‧ Maintain the initial normal direction of the abutment surface of the component substrate

H1, h2‧‧‧ height

Θ‧‧‧holding member tilt angle

Θ0‧‧‧holding member initial tilt angle

BW‧‧‧ bottom substrate

TW‧‧‧thin wafer

W‧‧‧Substrate

FIG. 1 is an exploded perspective view showing a state in which the substrate W is housed in the substrate storage container 1 according to the first embodiment of the present invention.

FIG. 2 is a top perspective view showing the second side wall 26 and the upper wall 23 omitted in the container body 2 according to the first embodiment of the present invention.

3 is a partial enlarged view showing the substrate supporting plate portion 5 of the container body 2 according to the first embodiment of the present invention.

FIG. 4 is a side perspective view showing the lid body 3 according to the first embodiment of the present invention as seen from the side of the substrate accommodation space 27 .

FIG. 5 is a side perspective view showing a part of the holding member 35 according to the first embodiment of the present invention in an enlarged manner.

FIG. 6 is a view showing a positional relationship between the substrate W, the holding member portion 301, and the substrate supporting plate portion 5 in the substrate storage container 1 according to the first embodiment of the present invention.

7A is a view showing a positional relationship between the substrate W, the holding member portion 301, and the substrate supporting plate portion 5 in the substrate storage container 1 according to the first embodiment of the present invention, and shows that the holding member portion 301 is in contact with the substrate W. status.

FIG. 7B is a view showing a positional relationship between the substrate W, the holding member portion 301, and the substrate supporting plate portion 5 in the substrate storage container 1 according to the first embodiment of the present invention, and shows that the container body 2 is closed by the lid body 3. The state of the container body opening portion 21.

Fig. 8A is an enlarged view of the vicinity of the holding member portion 301 in Fig. 7A.

Fig. 8B is an enlarged view of the vicinity of the holding member portion 301 in Fig. 7B.

FIG. 9 is a view showing a state in which the substrate W is in contact with the holding member portion 301A in the substrate storage container 1 according to the second embodiment of the present invention.

FIG. 10A is a view showing a state in which the substrate W is in contact with the holding member portion 301B in the substrate storage container 1 according to the third embodiment of the present invention.

10B is a view showing a state in which the substrate W is in contact with the holding member portion 301B and the container body opening portion 21 of the container body 2 is closed by the lid body 3 in the substrate storage container 1 according to the third embodiment of the present invention.

[First Embodiment]

Hereinafter, the substrate storage container 1 and the holding member 35 according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a state in which the substrate W is housed in the substrate storage container 1 according to the first embodiment of the present invention. 2 is a top perspective view of the container body 2 according to the first embodiment of the present invention, in which the second side wall 26 and the upper wall 23 are omitted. 3 is a partial enlarged view of the substrate supporting plate portion 5 of the container body 2 according to the first embodiment of the present invention. FIG. 4 is a side perspective view of the lid body 3 according to the first embodiment of the present invention as seen from the side of the substrate housing space 27 . FIG. 5 is a side perspective view showing a part of the holding member 35 according to the first embodiment of the present invention in an enlarged manner.

Here, for convenience of explanation, a direction from the container body 2 to be described later toward the lid body 3 (a direction from the upper right toward the lower left in FIG. 1) is defined as a forward direction, and a direction opposite thereto is defined as a rearward direction. The combination of the two directions is defined as the front and rear direction. Further, a direction (upward direction in FIG. 1) from the lower wall 24 to be described later toward the upper wall 23 is defined as an upward direction, which is opposite thereto. The opposite direction is defined as the downward direction, and the combination of these two directions is defined as the up and down direction. Further, a direction from the second side wall 26 to be described later toward the first side wall 25 (a direction from the lower right to the upper left in FIG. 1) is defined as a leftward direction, and a direction opposite thereto is defined as a rightward direction. Directional merging is defined as the left and right direction.

In addition, the substrate W (see FIG. 1) accommodated in the substrate storage container 1 is a bonded wafer, and is a substrate on which the thin wafer TW is fixed to the upper surface of the base substrate BW (see FIG. 6 and the like). As the base substrate BW, a disk-shaped silicon wafer, a glass wafer, or the like can be used. The base substrate BW in the present embodiment is a glass wafer having a diameter of 300 mm to 450 mm. The thin wafer TW is a wafer in which a device is formed on the surface of the germanium wafer and then back-polished to a prescribed thickness.

As shown in FIG. 1, the substrate storage container 1 is used as a step of storing the substrate W and transporting it in a factory step, or as a transport means for transporting the substrate by means of land transportation means, air transportation means, shipping means, or the like. In the shipping container, the substrate storage container 1 includes a container body 2, a lid body 3, a substrate supporting plate-like portion 5 as a side substrate supporting portion, and a rear substrate supporting portion 504, which will be described later, integrally formed on the substrate supporting plate portion. The rear portion of Fig. 5 (Fig. 3 and the like); and the holding member 35 (Fig. 4 and the like) which will be described later as the lid side substrate supporting portion.

The container body 2 has a cylindrical wall portion 20 in which the container body opening portion 21 is formed at one end portion and the other end portion is closed. A substrate housing space 27 is formed in the container body 2. The substrate housing space 27 is formed by being surrounded by the wall portion 20. The substrate supporting plate-like portion 5 is disposed on a portion of the wall portion 20 where the substrate housing space 27 is formed. As shown in Figure 1, the substrate is empty. A plurality of substrates W can be accommodated in the space 27.

As shown in FIGS. 2 and 3, the substrate supporting plate-like portion 5 is provided on the wall portion 20 in the substrate housing space 27 so as to be paired with the holding member 35. When the container body opening portion 21 is not closed by the lid body 3, the substrate supporting plate portion 5 abuts against the edge portion of the substrate W by the substrate placing portion 501 for placing the substrate and the rear side of the substrate supporting plate portion. The rear substrate support portion 504 can support a plurality of substrates W in a state in which adjacent substrates W are arranged at a predetermined interval. The substrate placement portion 501 is provided with a front side placement protrusion 502, a front side and a rear side placement portion 503 formed on the upper surface of the substrate placement portion 501, and a rear side of the upper surface of the substrate placement portion 501 is formed near the rear side substrate support portion 504. The position of the front side. The substrate W is placed on the front side placement protrusion 502 and the rear side placement portion.

When the container body opening portion 21 is closed by the lid body 3, the rear substrate supporting portion 504 can support the rear portion of the edge portion of the plurality of substrates W by abutting against the edge portions of the plurality of substrates W.

The lid body 3 is detachable with respect to the opening peripheral edge portion 31 (FIG. 1 and the like) that forms the container body opening portion 21, and can close the container body opening portion 21. As shown in FIG. 4, the holding member 35 is provided in a portion which is a part of the lid body 3 and which faces the substrate accommodation space 27 when the container body opening portion 21 is closed by the lid body 3. The holding member 35 is disposed inside the substrate housing space 27 so as to be paired with the substrate supporting plate portion 5 .

When the container body opening portion 21 is closed by the lid body 3, the holding member 35 can support the front portion of the edge portion of the plurality of substrates W by abutting against the edge portions of the plurality of substrates W. When the container body opening portion 21 is closed by the cover body 3 When the holding member 35 supports the plurality of substrates W in cooperation with the substrate supporting plate portion 5, the plurality of substrates W are held in a state in which the adjacent substrates W are arranged at a predetermined interval.

The substrate storage container 1 is made of a resin such as a plastic material. Unless otherwise specified, examples of the resin of the material include polycarbonate, a cycloolefin polymer, a polyether quinone, a polyether ketone, and a polyparaphenylene. A thermoplastic resin such as butylene glycol dicarboxylate, polyether ether ketone or a liquid crystal polymer, or an alloy thereof. When conductivity is imparted to the resin of these molding materials, a conductive material such as carbon fiber, carbon powder, carbon nanotube, or conductive polymer is selectively added. Further, in order to increase the rigidity, glass fibers, carbon fibers, or the like may be added. In particular, since the holding member 35 requires a certain degree of elasticity when holding the substrate W, the resin as the material of the holding member 35 may be made of polybutylene terephthalate, polyester elastomer, polyetheretherketone or the like. .

Hereinafter, each part will be specifically described.

As shown in FIG. 1 and the like, the wall portion 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are formed of the material and integrally formed.

The first side wall 25 and the second side wall 26 are opposed to each other, and the upper wall 23 and the lower wall 24 are opposed to each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 constitute an opening peripheral portion 31 which forms a container body opening portion 21 having the container body opening portion 21 Opposite the rear wall 22 The positional relationship is roughly rectangular.

The opening peripheral portion 31 is provided at one end portion of the container body 2, and the rear wall 22 is located at the other end portion of the container body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is a box shape. The inner surface of the wall portion 20, that is, the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26, are formed to be surrounded by them. The substrate housing space 27 is provided. The container body opening portion 21 formed in the opening peripheral portion 31 communicates with the substrate housing space 27 formed by the wall portion 20 and formed inside the container body 2. A maximum of 26 substrates W can be accommodated in the substrate housing space 27.

As shown in FIG. 1, the upper side latching recessed parts 40A and 40B and the lower side which are recessed toward the outer side of the board|substrate accommodation space 27 are formed in the vicinity of the opening peripheral edge part 31 as a part of the upper wall 23 and the lower wall 24. The latch engages the recesses 41A, 41B. The upper latch engagement recesses 40A and 40B and the lower latch engagement recesses 41A and 41B are formed in the vicinity of the left and right end portions of the upper wall 23 and the lower wall 24, and four in total are formed.

As shown in Fig. 1, on the outer surface of the upper wall 23, the rib 28 and the upper wall 23 are integrally formed. This rib 28 serves to increase the rigidity of the container body.

Further, a top flange 29 is fixed to a central portion of the upper wall 23. When the substrate storage container 1 is suspended on an AMHS (Automatic Wafer Transfer System) or a PGV (Wafer by Substrate Transfer Tray), the top flange 29 is a member that becomes a hanging portion in the substrate storage container 1.

As shown in FIGS. 1 and 2, on the inner surfaces of the first side wall 25 and the second side wall 26 of the substrate housing space 27 of the container body 2, a substrate branch is formed. The plate-like portion 5. As shown in FIG. 3, in the present embodiment, the substrate supporting plate portion 5 is detachably fixed to the first side wall 25 with respect to the first side wall 25. In order to fix the substrate supporting plate portion 5 on the first side wall 25, a cylindrical front side engaged portion 250 is formed on the front side of the first side wall 25, and a rear center engaged portion 251 and a rear side are formed on the rear side. The engaged portion 252 and the rear side are engaged with the fixed portion 253. A front side engaging portion 500 having a hole shape is formed in the substrate supporting plate portion 5, and is engaged with the front side engaged portion 250; the rear center engaging portion 505 is engaged with the rear center receiving portion 251; The rear side engaging portion 506 is engaged with the rear side engaged portion 252, and the rear side engaging fixing portion 507 is engaged with the rear side engaged locking portion 253 to fix the substrate supporting plate portion 5.

A plurality of substantially plate-shaped substrate placing portions 501 are formed on the substrate supporting plate-like portion 5, and these substrate placing portions 501 are connected in the vertical direction. In the present embodiment, 26 substrate placement portions 501 are formed. In the present embodiment, the substrate placement portion 501 is provided every 10 mm. Since this value corresponds to the height of the pitch when the placed substrate W is accommodated in the vertical direction, it can be appropriately changed.

Each of the substrate placement portions 501 has a front side placement protrusion 502 and a rear side placement portion 503 for placing the substrate W. Further, a rear substrate supporting portion 504 is formed on the rear side of the rear side placing portion 503, and the rear substrate supporting portion 504 is a flat surface for supporting the end portion of the substrate W. The height of the plane supporting the substrate W as the rear substrate supporting portion 504 needs to be a height equal to or greater than the thickness of the substrate W placed on the front side placement protrusion 502 and the rear side placement portion 503. In the present embodiment, the height of the plane is set to 5 mm. As this The height of the plane needs to be a height equal to or greater than the thickness of the substrate that may be stored in the substrate storage container 1. When the bonded wafer or the like is accommodated, it is required to be 2.5 mm or more. Further, in the present embodiment, since the placement pitch of the substrate is 10 mm, the height of the plane for supporting the substrate W of the rear substrate supporting portion 504 is 9 mm even if the thickness of the substrate placing portion 501 is considered. .

The substrate supporting plate portion 5 is fixed to the first side wall 25 as described below. The substrate supporting plate-like portion 5 is moved rearward from the container body opening portion 21 side along the first side wall 25, and the front side engaging portion 500 as the engaging portion of the substrate supporting plate-like portion 5 is slidably coupled to the first side wall. The front side of the corresponding engaged portion is engaged by the engaging portion 250, and the rear center engaging portion 505 and the first side wall 25 serving as the engaging portion of the substrate supporting plate portion 5 are slidably operated. The center of the rear side of the corresponding engaged portion is engaged by the engaging portion 251, and the rear side engaging portion 506 as the engaging portion of the substrate supporting plate portion 5 is slidably corresponding to the first side wall 25 The rear side of the engaged portion is engaged by the engaging portion 252. Thereafter, the rear side engagement fixing portion 507 of the substrate supporting plate portion 5 is fixed to the rear side engaged locking portion 253 of the first side wall 25.

On the other hand, when the substrate supporting plate portion 5 is removed from the first side wall 25, the engagement between the rear side engaging and fixing portion 507 and the rear side engaged fixing portion 253 is released, so that the substrate supporting plate portion 5 is oriented. The substrate supporting plate-like portion 5 is moved in a forward sliding manner to release the engagement between the other engaging portions and the engaged portion.

The substrate supporting plate portion 5 formed on the second side wall 26 can also be similarly engaged or fixed to the second side wall 26 or removed from the second side wall 26.

As shown in FIG. 1 and the like, the lid body 3 has a rectangular shape that substantially matches the shape of the opening peripheral edge portion 31 of the container body 2. The lid body 3 is detachable from the opening peripheral edge portion 31 of the container body 2. By attaching the lid body 3 to the opening peripheral portion 31, the lid body 3 can close the container body opening portion 21. As shown in Fig. 4, the surface of the stepped portion (the sealing surface 30) which is the inner surface of the lid body 3 and which is located in the rearward direction of the opening peripheral edge portion 31 when the lid body 3 closes the container body opening portion 21 is formed. On the inner surface of the lid body 3, an annular sealing member 4 is attached. The sealing member 4 is composed of various thermoplastic elastomers such as polyester-based or polyolefin-based which are elastically deformable, a fluororubber product, a ruthenium rubber product, and the like. The sealing member 4 is disposed to surround the outer peripheral edge portion of the lid body 3 one by one.

When the lid body 3 is attached to the opening peripheral edge portion 31, the sealing member 4 is elastically deformed by the sealing surface 30 and the inner surface of the lid body 3, and the lid body 3 closes the container body opening portion 21 in a sealed state. By removing the lid body 3 from the opening peripheral edge portion 31, the substrate W can be moved in and out of the substrate housing space 27 in the container body 2.

A latch mechanism is provided on the cover 3. As shown in FIG. 4, the latch mechanism is provided in the vicinity of the left and right end portions of the lid body 3, and has two upper latch portions 32A and 32B that can protrude upward from the upper side of the lid body 3, and can be oriented from the lower side of the lid body 3. Two lower side latch portions 33A, 33B projecting in the downward direction. The two upper latch portions 32A and 32B are disposed in the vicinity of the left and right ends of the upper side of the lid body 3, and the two lower plug portions 33A and 33B are disposed in the vicinity of the left and right ends of the lower side of the lid body 3.

As shown in FIG. 1, an operation portion 34 is provided on the outer surface of the lid 3. through By operating the operation portion 34 from the front side of the lid body 3, the upper side latch portions 32A and 32B and the lower side latch portions 33A and 33B can be protruded from the upper side and the lower side of the lid body 3, respectively, or the upper side latch portions 32A and 32B can be lowered. The side latch portions 33A and 33B are in a state of not protruding from the upper side and the lower side, respectively. The upper latch portions 32A and 32B are protruded upward from the upper side of the lid body 3 and engaged with the upper latch engagement recesses 40A and 40B of the container body 2, and the lower latch portions 33A and 33B are passed from the lid body 3. The lower side protrudes downward and engages with the lower latch engagement recesses 41A and 41B of the container body 2, and the lid body 3 is fixed to the opening peripheral edge portion 31 of the container body 2.

As shown in FIG. 4, a recessed portion 37 that is recessed toward the outside of the substrate housing space 27 is formed inside the lid body 3. A holding member engaged portion (not shown) that engages with the holding member engagement convex portion 36 of the holding member 35 is provided in a portion of the concave portion 37, and the holding member 35 is detachably fixed to the concave portion of the lid body 3. 37.

As shown in FIG. 5, the plurality of holding member portions 301 of the holding member 35 are arranged in the vertical direction at a predetermined interval so as to be paired left and right. The holding member portion 301 is fixed to the inner side of the rectangular holding member frame 300. The holding member portion 301 has a holding member substrate receiving portion 303 for supporting the front side end of the substrate W, and an elastic arm portion 302 for connecting the holding member substrate receiving portion 303 to the holding member frame 300. Further, the holding member substrate receiving portion 303 has a flat holding member substrate abutting surface 306, an end edge for abutting the edge of the edge portion of the substrate W and supporting the edge portion of the substrate W, and an upper side flange 304 And the lower flange 305 is formed in the holding manner adjacent to the holding member substrate abutting surface 306 The upper and lower sides of the member substrate abutting surface 306. Such a holding member substrate receiving portion 303 is disposed so as to be separated and paired at a predetermined interval in the left-right direction. The pair of holding member substrate receiving portions 303 arranged in pairs are provided in a state of being arranged in the vertical direction. By accommodating the substrate W in the substrate housing space 27 and closing the lid body 3, the holding member substrate receiving portion 303 sandwiches and supports the edge of the edge portion of the substrate W.

In the substrate storage container 1 as described above, the support of the substrate W is performed as follows.

When the substrate storage container 1 is used as a step inner container in the step in the factory, in the container main body 2, the lower wall 24 is located at the lower portion and the upper wall 23 is located at the upper portion. When the substrate W is housed and held in the substrate storage container 1, first, the lid body 3 is removed from the container body 2.

Then, the substrate W is inserted into the substrate housing space 27 from the container body opening portion 21 while maintaining the horizontal state, and the substrate W is placed on the substrate supporting plate portion 5. As shown in FIG. 6, the substrate W used in the present embodiment is a substrate in which a thin substrate TW is fixed to the upper surface of the base substrate BW. The thin substrate TW is a substrate on which the back surface is polished on the upper surface of the germanium wafer substrate to be extremely thin. Since the diameter of the thin substrate TW is smaller by about 1 to 2 mm than the diameter of the base substrate BW, the thin substrate TW does not protrude from the outer shape of the base substrate BW. Such a substrate W is referred to as a bonded wafer. Further, the bonded wafer that can be housed in the present embodiment may be a substrate in which a plurality of thin substrates TW are laminated on the base substrate BW. Of course, the substrate W may be a normal ruthenium wafer that is accommodated in addition to the bonded wafer.

As shown in FIG. 6, the thin substrate TW is housed from the container body opening portion 21. The substrate W fixed to the base substrate BW is placed on the desired substrate placing portion 501 of the substrate supporting plate portion 5. At this time, the front portion of the lower surface of the substrate W (strictly speaking, the base substrate BW) is placed on the front side placement protrusion 502, the rear portion of which is placed on the upper portion of the rear side placement portion 503, and the substrate W (strictly speaking The edge of the edge portion of the rear side (rear side) of the base substrate BW) is in contact with the rear substrate support portion 504. At this time, the edge of the edge portion of the substrate W (strictly speaking, the base substrate BW) may not be in contact with the rear substrate supporting portion 504. In this case, when the container body opening portion 21 of the container body 2 is closed by the lid body 3 described later, the edge of the edge portion of the substrate W (strictly speaking, the base substrate BW) is pressed by the holding member portion 301. On the front side, the edge of the edge portion of the substrate W (strictly speaking, the base substrate BW) is brought into contact with the rear substrate support portion 504.

Next, the state of support of the substrate W when the container body opening portion 21 of the container body 2 is closed by the lid body 3 will be described.

7A and FIG. 8A show a state in which the lid body 3 is attached to the container body 2 in a state where the substrate W is placed on the substrate placing portion 501, and the container body opening portion 21 is closed. Before the lid body 3 completely closes the container body opening portion 21 of the container body 2, the holding member substrate abutting surface 306 abuts against the front side of the edge of the edge portion of the substrate W. In the state of FIGS. 7A and 8A, the substrate W and the holding member substrate abutting surface 306 are only abutted by the elasticity of the arm portion 302, and the substrate W is not pushed in the rear direction. In this case, the portion where the holding member substrate abutting surface 306 abuts against the edge of the edge portion of the front side of the substrate W is the substrate abutting position 307, and the center of the arm portion 302 connected to the holding member substrate receiving portion 303 is defined. It is the center 308 of the fixed position of the arm. Further, a surface that passes through the substrate abutment position 307 and is horizontal to the substrate W is referred to as a substrate horizontal surface 801, and a surface that passes through the center 308 of the arm fixing position and is horizontal to the substrate is defined as an arm horizontal plane 802. The substrate level 801 and the arm level 802 are parallel to each other, and the direction thereof is perpendicular to the central axis direction of the substrate W.

In the present embodiment, the arm horizontal plane 802 is located above the height h1 of the substrate horizontal plane 801. In other words, the substrate abutment position 307 is located below the height h1 of the center 308 of the fixed position of the arm.

Next, by integrally attaching the lid body 3 to the container body 2 and operating the operation portion 34 of the lid body 3, the lid body 3 is detachably fixed to the container body 2, and the container body opening portion of the substrate storage container 1 is attached. 21 was closed. Then, as shown in FIG. 7B and FIG. 8B, the holding member portion 301 pushes the substrate W along the substrate horizontal plane 801 toward the substrate horizontal rearward direction 803 in the backward direction by the elastic force of the arm portion 302. Then, the substrate W is supported by the plane of the holding member substrate abutting surface 306 and the rear substrate supporting portion 504 of the holding member portion 301. The supporting force can be appropriately adjusted according to the material and shape of the arm portion 302.

At this time, since the height of the center 308 of the arm fixing position and the vertical direction of the board contact position 307 are shifted, the holding member substrate receiving portion 303 acts on the torque, and the holding member substrate receiving portion 303 slightly rotates. In other words, in the present embodiment, the normal direction 804 of the holding member substrate abutting surface is inclined by a predetermined angle in the downward direction with respect to the substrate horizontal rearward direction 803. Strictly speaking, the inclination is also inclined in a direction other than the up-and-down direction due to the position at which the holding member substrate abutting surface 306 abuts against the substrate W, but only It is only necessary to consider the tilt component in the direction in which the force of the substrate W is pressed in the present invention. Therefore, as the inclination due to the rotation of the holding member substrate receiving portion 303, only the component in the vertical direction is considered, and the inclination angle means only the inclination component in the vertical direction.

The angle formed by the normal direction 804 of the holding member substrate abutting surface and the substrate horizontal rearward direction 803 is the holding member inclination angle θ . With respect to the holding member inclination angle θ , a clockwise (downward direction) is defined as a positive value with the substrate abutment position 307 of FIG. 8B or the like as a center and a substrate horizontal rearward direction 803 as a reference, and the opposite direction is defined as Negative value. In the case of the present embodiment, in the state shown in FIGS. 7A and 8A in a state where the container body opening portion 21 is not completely closed by the lid body 3, the holding member inclination angle is 0 (zero) degrees. Further, in the state shown in FIGS. 7B and 8B in a state in which the container body opening portion 21 is completely closed by the lid body 3, the holding member inclination angle is about 1 degree. In other words, the inclination angle of the holding member in a state in which the container body opening portion 21 is completely closed by the lid body 3 is larger than the inclination angle of the holding member in a state in which the container body opening portion 21 is not completely closed by the lid body 3.

In FIG. 8B, in order to facilitate the understanding of the rotation (tilt) of the holding member substrate receiving portion 303, the rotation (the amount of tilt) of the holding member substrate receiving portion 303 is emphasized (the same applies to FIG. 10B hereinafter).

As described above, by completely closing the container body opening portion 21 with the lid body 3, the holding member substrate receiving portion 303 is slightly rotated. When the container body opening portion 21 of the container body 2 is closed by the lid body 3, the force acting on the holding member portion 301 pushing the substrate W toward the substrate horizontally rearward direction 803 In part, due to the slight rotation of the holding member substrate receiving portion 303, the force is changed to a force that presses the edge of the edge portion of the substrate W in the downward direction. Therefore, a component of a force that presses the substrate W toward the substrate placement portion 501 acts on the substrate W. Thereby, the substrate W is supported by the substrate abutting position 307 of the holding member portion 301 and the rear substrate supporting portion 504 of the substrate supporting plate portion 5.

According to the substrate storage container 1 of the first embodiment having the above configuration, the following effects can be obtained.

According to the present invention, the plane of the holding member substrate abutting surface of the holding member portion and the planar supporting substrate of the rear substrate supporting portion are used, and the plane of the abutting surface of the holding member substrate is slightly rotated in a downward direction at a predetermined angle. The force that pushes the substrate toward the substrate placement portion acts. Therefore, when the substrate is bonded to the bonded wafer having the thin wafer bonded to the base substrate, the substrate can be held such that the holding member and the rear substrate supporting portion do not contact the upper surface of the substrate.

Further, since the force for pressing the substrate to the substrate placement portion of the substrate acts, even when the substrate storage container vibrates or receives an impact in the vertical direction, the substrate can be prevented from floating from the substrate placement portion, and the substrate can be prevented from being prevented. The contact portions of the holding member and the rear substrate supporting portion rub against each other, so that particles generated by rubbing these contact portions with each other can be reduced to the limit. By reducing the occurrence of particles, the yield and defective rate of devices fabricated on the substrate can be improved.

Further, since the edge portions of the substrate are received and held by the planes of the holding member portion and the rear substrate supporting portion, the supporting portions of the substrates do not come into contact with the upper surface of the substrate, and can reach the vicinity of the outer periphery of the upper surface of the substrate. Forming the device can increase the sum of the effective area of the device and the device obtained from one substrate, thereby helping to reduce the cost of the device.

Further, by making the plane of the holding member substrate abutting surface and the rear substrate supporting portion of the holding member portion higher than the thickness of the substrate, it is not limited to the substrate having a specific thickness, and the thickness can be supported at the height of the holding member substrate abutting surface or later. The substrate having a height equal to or less than the plane of the side substrate support portion can also accommodate substrates having different thicknesses in one substrate storage container.

Here, the holding member substrate abutting surface 306 of the present embodiment is perpendicular to the substrate horizontal rearward direction 803 (a surface that is horizontal with respect to the normal line of the holding member substrate abutting surface 306), but is not limited thereto, and the holding member substrate is abutted. The face 306 may also be slightly inclined toward the upper direction or the downward direction with respect to the horizontal rearward direction of the substrate. In the present embodiment, in a state in which the lid body 3 closes the container body opening portion 21 of the container body 2, the normal line of the holding member substrate abutting surface 306 may be inclined in the downward direction with respect to the horizontal direction of the substrate. In the state in which the container body 3 does not close the container body opening portion 21 of the container body 2, the normal direction of the holding member substrate abutting surface 306 is not limited to the present embodiment.

[Second Embodiment]

Next, a substrate storage container 1 according to a second embodiment of the present invention will be described with reference to Fig. 9 . FIG. 9 shows a state in which the substrate W and the holding member portion 301A are in contact with each other in the substrate storage container 1 according to the second embodiment of the present invention. In the holding member of the substrate storage container 1 according to the second embodiment of the present invention, the mounting position of the arm portion 302 and the holding member substrate receiving portion 303A, and the shape of the holding member substrate receiving portion 303A are the same as those of the first embodiment. Keep the components different. The configuration of the substrate storage container 1 of the first embodiment is the same as that of the first embodiment, and the same components as those of the first embodiment are denoted by the same reference numerals, and their description is omitted.

As shown in FIG. 9 , in the holding member portion 301A of the present embodiment, the center 308 of the arm portion fixing position of the arm portion 302 and the holding member substrate abutting surface 306A of the holding member substrate receiving portion 303A and the edge portion of the substrate W are provided. The substrate abutting position 307 at which the end edge abuts is at the same height in the up and down direction. That is, in the present embodiment, the substrate horizontal surface 801 and the arm horizontal surface 802 are the same plane. Further, in a state where the container body opening portion 21 of the container body 2 is not closed by the lid body 3, the normal line of the holding member substrate abutting surface 306A is not the substrate horizontal rearward direction 803, but is directed downward with respect to the substrate horizontal rearward direction 803. Tilt in direction. The inclination angle of the inclination is extremely small, and in the present embodiment, it is 1 degree in the downward direction. This value allows for proper design changes.

In the present embodiment in which the holding member portion 301A is used, the container body opening portion 21 of the container body 2 is closed by the lid body 3 and the substrate W is closed without closing the container body opening portion 21 of the container body 2 from the lid body 3. When the elastic force of the arm portion 302 is pressed toward the horizontal direction of the substrate, the holding member substrate receiving portion 303A does not rotate as in the first embodiment. However, since the holding member substrate abutting surface 306A of the holding member portion 301A is inclined in the downward direction, that is, inclined with respect to the vertical direction, the plane of the rear substrate supporting portion 504 and the holding member substrate are used as in the first embodiment. When the contact surface 306A supports the substrate W, the component of the force that presses the substrate W toward the substrate placement portion 501 functions.

According to the substrate storage container 1 of the second embodiment having the above configuration, the same effects as those of the first embodiment can be obtained.

[Third embodiment]

Next, a substrate storage container 1 according to a third embodiment of the present invention will be described with reference to FIGS. 10A and 10B. FIG. 10A is a view corresponding to FIG. 8A of the first embodiment, and shows a state in which the substrate W and the holding member portion 301B are in contact with each other in the substrate storage container 1 according to the third embodiment of the present invention. 10B is a view corresponding to FIG. 8B of the first embodiment, in which the substrate W and the holding member portion 301B are in contact with each other, and the container body opening portion of the container body 2 is in the substrate storage container 1 according to the third embodiment of the present invention. 21 is closed by the cover 3.

In the holding member of the substrate storage container 1 according to the third embodiment of the present invention, the mounting position of the arm portion 302 and the holding member substrate receiving portion 303A is different from that of the holding member of the second embodiment. The configuration of the substrate storage container 1 of the second embodiment is the same as that of the first embodiment or the second embodiment, and the same reference numerals will be given to the same components as those of the first embodiment or the second embodiment, and the description thereof will be omitted.

As shown in FIG. 10A, in the holding member portion 301B of the present embodiment, the center 308 of the arm portion fixing position of the arm portion 302 and the holding member substrate abutting surface 306A of the holding member substrate receiving portion 303B and the end portion of the edge portion of the substrate W are provided. The substrate abutting position 307 at which the edge abuts is not at the same height in the up and down direction. Contrary to the case of the first embodiment, the substrate abutment position 307 is located in the upward direction from the center 308 of the arm fixing position in the vertical direction. That is, in the present embodiment, the arm horizontal plane 802 bits It is below the height h2 of the substrate level 801. The shape of the holding member substrate receiving portion 303B is the same as that of the second embodiment.

Next, the state of support of the substrate W when the container body opening portion 21 of the container body 2 is closed by the lid body 3 will be described.

Before the lid body 3 completely closes the container body opening portion 21 of the container body 2, the holding member substrate abutting surface 306A abuts slightly toward the front side of the edge of the edge portion of the substrate W. In the state of FIG. 10A, the substrate W and the holding member substrate abutting surface 306A are only abutted, and the substrate W is not pressed in the rear direction by the elasticity of the arm portion 302.

At this time, the normal direction of the holding member substrate abutting surface 306A is the normal direction 805 of the holding member substrate abutting surface, and the angle formed by the substrate horizontal rearward direction 803 is the holding member initial inclination angle θ 0 . In the present embodiment, the holding member initial inclination angle θ 0 is set to be positive 2 degrees.

Next, the lid body 3 is completely attached to the container body 2, and the lid body 3 is detachably fixed to the container body 2 by operating the operation portion 34 of the lid body 3, whereby the container of the substrate storage container 1 is detachably attached thereto. The main body opening portion 21 is closed. Then, as shown in FIG. 10B, the holding member substrate receiving portion 303B presses the substrate W toward the substrate horizontal plane 801 in the horizontal rearward direction 803 as the rearward direction by the elastic force of the arm portion 302. Then, the substrate W is supported by the plane of the holding member substrate abutting surface 306A and the rear substrate supporting portion 504 of the holding member substrate receiving portion 303B. At this time, since the height of the center 308 of the arm fixing position and the vertical direction of the board contact position 307 are shifted, the torque acts on the holding member substrate receiving portion 303B, and the holding member substrate receiving portion 303B is slightly rotated. The direction of rotation is and embodiment 1 The opposite direction, that is, the upward direction (counterclockwise). In this case, in the present embodiment, the normal direction 804 of the holding member substrate abutting surface of the holding member substrate abutting surface 306A which is rotated in the substrate horizontal rearward direction 803 is also inclined at a predetermined angle in the downward direction. . Specifically, the initial inclination angle of the holding member as the inclination angle of the holding member substrate abutting surface is designed so as to incline the predetermined angle, and the center of the arm fixing position and the substrate abutting position are in the up and down direction. Poor height h2.

The holding member inclination angle θ as an angle formed by the normal direction 804 of the holding member substrate abutting surface after the rotation of the holding member and the substrate horizontal rearward direction 803 is the same as that of the first embodiment, and the holding member inclination angle θ is positive 1 degree. about. In other words, before and after closing the container body opening portion 21 of the container body 2 with the lid body 3, the holding member inclination angle θ after closing is smaller than the initial inclination angle θ 0 of the holding member before closing.

In FIGS. 10A and 10B, in order to facilitate understanding of the rotation (tilt) of the holding member substrate receiving portion 303B, the amount of tilt and the amount of rotation of the holding member substrate receiving portion 303B are emphasized.

As described above, by completely closing the container body opening portion 21 with the lid body 3, the holding member portion 301 is slightly rotated. When the container body opening portion 21 of the container body 2 is closed by the lid body 3, a part of the force acting on the holding member portion 301 to press the substrate W toward the substrate horizontally rearward direction 803 is weaker than the substrate of the second embodiment. The end edge of the edge portion of W is pressed in the downward direction, but the component of the force that presses the substrate W toward the substrate placement portion 501 is caused by the slight rotation of the holding member portion 301B. use. Thereby, the substrate W is supported by the holding member substrate abutting surface 306A of the holding member portion 301B and the rear substrate supporting portion 504 of the substrate supporting plate portion 5.

According to the substrate storage container 1 of the third embodiment having the above configuration, the same effects as those of the first embodiment can be obtained.

The present invention is not limited to the above-described embodiments, and may be modified within the technical scope described in the claims.

For example, the shape of the arm portion of the holding member portion, the holding member substrate receiving portion, and the substrate supporting plate portion is not limited to the shape of the present embodiment. Further, the shape of the container body and the lid body, and the number and size of the substrates W that can be accommodated in the container body are not limited to the shape of the container body and the lid body of the present embodiment, and the number of substrates W that can be accommodated in the container body. And size.

Here, the holding member 35 is detachably fixed to the lid body 3, and the substrate supporting plate-like portion 5 is detachably fixed to the container body 2. Therefore, the holding member and the substrate supporting plate-like portion can be replaced with suitable members in accordance with the purpose of the substrate storage container. Therefore, after the substrate is transported by the shipping container in which the holding member suitable for the application and the substrate supporting plate portion are attached, the holding member and the substrate supporting plate portion of the shipping container are replaced with the holding member and the substrate supporting of the present invention. The plate-shaped portion can easily change the delivery container to the step inner container. In this case, there is an advantage that the container body and the lid of the delivery container can be reused.

Further, in the above-described plural embodiments, the case where the substrate placement portion and the rear substrate support portion are integrally formed is described for the substrate supporting plate portion. However, the present invention is not limited thereto, and the substrate placement portion and the rear substrate support portion may be separately formed as a single member and fixed to the first side wall and the first side, respectively. On the two side walls. Further, the substrate supporting plate-like portion is not limited to a structure detachable with respect to the first side wall and the second side wall, and may be integrally formed with the first side wall and the second side wall.

Claims (6)

A substrate storage container comprising: a container body having a substrate storage space capable of accommodating a plurality of substrates therein; a container body opening portion communicating with the substrate housing space at one end; and a lid body capable of closing the container body opening a holding member disposed at a portion of the cover body that is opposite to the substrate housing space when the container body opening portion is closed by the lid body, and capable of supporting the end portions of the plurality of substrates; a pair of substrate supporting plate-like portions disposed on the inner surface of the substrate housing space so as to be paired with the holding member, and positioning and holding the outer edge portions of the plurality of substrates; the substrate supporting plate portions having: substrate placement And a rear substrate supporting portion that abuts against an end portion of the substrate and holds an end portion of the substrate; the holding member has a holding member substrate receiving portion, and the holding member substrate having the substrate abuts a connecting surface; and an arm portion connected to the holding member substrate receiving portion; and when the cover body closes the opening portion of the container body, The center in the thickness direction of the plate and perpendicular to the thickness direction, a backward direction of the substrate storage container of the substrate as a reference horizontal rearward direction, the holding member of the substrate normal direction of the contact surface inclined at a predetermined angle toward the lower side. The substrate storage container according to claim 1, wherein an angle of a normal direction of the abutting surface of the holding member substrate is a holding member inclination angle and a downward direction from the reference direction with respect to the horizontal rearward direction of the substrate. When the rotation angle of the rotation is set to a positive value, the inclination angle of the holding member in a state in which the opening of the container body is closed by the lid body is larger than the state in which the opening portion of the container body is not closed by the lid body. Member tilt angle. The substrate storage container according to claim 1 or 2, wherein a substrate abutting position at which the substrate abuts on the holding member substrate abutting surface is located at an arm portion that is fixed to an arm portion that connects the holding member substrate receiving portion and the arm portion The center of the position is further down. The substrate storage container according to claim 1, wherein the substrate abutting position at which the substrate abuts on the contact surface of the holding member substrate is located at a fixed position of the arm portion connecting the holding member substrate receiving portion and the arm portion. The same height of the center or a position higher than the center of the fixed position of the arm; when the cover body is not closed with the opening of the container body, the holding member substrate is abutted with respect to the horizontal rearward direction of the substrate The normal direction of the junction is inclined at a predetermined angle toward the lower side. A holding member for a substrate storage container, comprising: a container body having a substrate storage space capable of accommodating a plurality of substrates therein, and a container body opening portion communicating with the substrate storage space at one end; And a cover body capable of closing the opening of the container body; The holding member is disposed on a portion of the cover body that is opposite to the substrate accommodation space when the container body opening portion is closed by the cover body, and is capable of supporting an end portion of the plurality of substrates; the holding member And a holding member substrate receiving portion having a holding member substrate abutting surface on which the substrate abuts; and an arm portion connected to the holding member substrate receiving portion; and a substrate abutting on the holding member substrate abutting surface The contact position is located at a position lower than a center of a fixed position of the arm portion connecting the holding member substrate receiving portion and the arm portion. A holding member for a substrate storage container, comprising: a container body having a substrate storage space capable of accommodating a plurality of substrates therein, and a container body opening portion communicating with the substrate storage space at one end; And a lid body that can close the opening of the container body; the holding member is disposed on a portion of the lid body that is opposite to the substrate storage space when the container body opening portion is closed by the lid body An end portion of the plurality of substrates is supported; and a substrate abutting position at which the substrate abuts on the abutting surface of the holding member substrate is at the same height or located at a center of a fixed position of the arm portion connecting the holding member substrate receiving portion and the arm portion a position higher than the center of the arm fixing position; and when the lid body is not closed to the container body opening portion, the substrate is received through the substrate in the thickness direction of the substrate and perpendicular to the thickness direction. The substrate in the rearward direction of the container is horizontally rearwardly oriented as a base The normal direction of the abutting surface of the holding member substrate is inclined at a predetermined angle toward the lower side.