JP2015097365A - Vibration element, vibrator, oscillator, electronic device and mobile object - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration element which is reduced in vibration leak and superior in impact resistance, and a reliable vibrator, a reliable oscillator, a reliable electronic device and a reliable mobile object, each having such a vibration element.SOLUTION: A vibration element 2 comprises a crystal vibration piece 3. The crystal vibration piece includes: a base part 31; vibration arms 32 and 33; a connection part 34; and a joint 35. Supposing the thickness of the crystal vibration piece 3 is T, the width of the base part 31 is W1, and the width of the joint 35 is W2, the thickness T and the widths W1 and W2 satisfy the following relations: 110 μm≤T≤210 μm; and 0.134≤W2/W1≤0.335. Further, supposing that the width of arm parts 321 and 331 of the vibration arms 32 and 33 is W3, and the width of hammerheads 322 and 332 is W4, the widths W3 and W4 satisfy the following relation: W4≥2.8xW3.

Description

  The present invention relates to a vibration element, a vibrator, an oscillator, an electronic device, and a moving body.

Conventionally, a vibration element using quartz is known. Such a vibration element is widely used as a reference frequency source, a transmission source, and the like of various electronic devices because of excellent frequency temperature characteristics.
The vibration element described in Patent Literature 1 has a tuning fork shape, and includes a base, a pair of vibrating arms extending from one end of the base, a connection located on the other end of the base, a base, and a connection. And a resonating piece including a connecting portion for connecting them and a support arm extending from the connecting portion.

  In Patent Document 1, e / r, which is a ratio between the width r of the connecting portion and the width e of the base portion, is preferably 40% or less, and more preferably 23% to 40%. Is described. And as an effect by satisfying such a range, it describes that impact resistance can be maintained, suppressing vibration leakage. However, even if the thickness and e / r satisfy the above relationship, depending on the design conditions (for example, the thickness of the vibrating piece), vibration leakage and impact resistance cannot be maintained, and vibration characteristics are In some cases, the vibration element may be bad or fragile. In addition, Patent Document 1 describes that the thickness of the resonator element is preferably 70 μm to 130 μm (see paragraph 0042 of Cited Document 1). The relationship is unknown.

JP 2008-72705 A

  An object of the present invention is to provide a vibration element with reduced vibration leakage and excellent impact resistance, and a highly reliable vibrator, oscillator, electronic device, and moving body including the vibration element.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples.
[Application Example 1]
The vibration element of this application example includes a base,
A vibrating arm extending from one end side of the base portion in plan view;
A connecting portion disposed on the other end side of the base portion in plan view;
A connecting portion that is disposed between the base portion and the connecting portion and connects the base portion and the connecting portion;
Including a vibrating piece with
The vibrating arm is
A weight part;
An arm portion disposed between the base portion and the weight portion;
Including
The thickness of the vibrating piece is T,
The width along the direction intersecting the extending direction of the base is W1,
When the width along the intersecting direction of the connecting portion is W2,
110 μm ≦ T ≦ 210 μm
And satisfying the relationship
0.134 ≦ W2 / W1 ≦ 0.335
Satisfying the relationship
The width along the intersecting direction of the arms is W3,
When the width of the weight portion along the intersecting direction is W4,
W4 ≧ 2.8 × W3
It is characterized by satisfying the following relationship.
Thereby, a vibration element with reduced vibration leakage and excellent impact resistance can be provided.

[Application Example 2]
The vibration element of this application example includes a base,
A vibrating arm extending from one end side of the base portion in plan view;
A connecting portion disposed on the other end side of the base portion in plan view;
A connecting portion that is disposed between the base portion and the connecting portion and connects the base portion and the connecting portion;
Including a vibrating piece with
The vibrating arm is
A weight part;
An arm portion disposed between the base portion and the weight portion;
Including
The thickness of the vibrating piece is T,
The width along the direction intersecting the extending direction of the base is W1,
When the width along the intersecting direction of the connecting portion is W2,
150 μm ≦ T ≦ 210 μm
While satisfying the relationship
0.067 ≦ W2 / W1 ≦ 0.871
Satisfying the relationship
The width of the arm portion in the width direction of the vibrating piece is W3,
When the width that is the dimension in the width direction of the vibrating piece of the wide portion is W4,
W4 ≧ 2.8 × W3
It is characterized by satisfying the following relationship.
Thereby, a vibration element with reduced vibration leakage and excellent impact resistance can be provided.

[Application Example 3]
In the resonator element according to this application example, the connection portion extends along the intersecting direction,
It is preferable to include a support arm connected to the connection portion and extending along the extending direction of the vibrating arm.
Thereby, for example, the vibration element can be fixed to the base via the support arm, and the separation distance (vibration propagation distance) between the fixing portion and the vibration arm can be increased. Therefore, vibration leakage of the vibration element can be effectively reduced.
[Application Example 4]
In the vibration element according to this application example, it is preferable that a groove is provided on at least one of the pair of main surfaces of the arm portion that are in a front-back relationship.
Thereby, vibration characteristics can be improved.

[Application Example 5]
The vibrator of this application example includes the vibration element of this application example,
A package in which the vibration element is mounted;
It is characterized by having.
Thereby, a highly reliable vibrator is obtained.

[Application Example 6]
The oscillator of this application example includes the vibration element of this application example,
Circuit,
It is characterized by having.
Thereby, a highly reliable oscillator can be obtained.

[Application Example 7]
An electronic apparatus according to this application example includes the vibration element according to this application example.
As a result, a highly reliable electronic device can be obtained.
[Application Example 8]
The moving body of this application example includes the vibration element of this application example.
Thereby, a mobile body with high reliability is obtained.

FIG. 3 is a plan view of a vibrator according to a preferred embodiment of the present invention. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. It is sectional drawing which shows the vibrating arm formed by wet etching. It is sectional drawing of the vibrating arm explaining the heat conduction at the time of bending vibration. It is a graph which shows the relationship between Q value and f / fm. It is a perspective view which shows thickness T and width W1, W2. It is a top view which shows the dimension of the quartz crystal vibrating piece used for simulation. It is a perspective view for demonstrating the simulation method. It is a table | surface which shows the simulation result regarding impact resistance. It is a table | surface which shows the simulation result regarding impact resistance. It is a table | surface which shows the simulation result regarding impact resistance. It is a table | surface which shows the simulation result regarding impact resistance. It is a graph which shows the relationship between W2 / W1 and logF. It is a graph which shows the relationship between W2 / W1 and an impact resistance index. It is a table | surface which shows the simulation result regarding a vibration leak. It is a table | surface which shows the simulation result regarding a vibration leak. It is a table | surface which shows the simulation result regarding a vibration leak. It is a table | surface which shows the simulation result regarding a vibration leak. It is a graph which shows the relationship between W2 / W1 and _QLeak . It is a graph which shows the relationship between W2 / W1 and a leak difficulty index. It is a table | surface which shows the result of having combined the simulation result regarding impact resistance, and the simulation result regarding vibration leakage. It is a table | surface which shows the result of having combined the simulation result regarding impact resistance, and the simulation result regarding vibration leakage. It is a table | surface which shows the result of having combined the simulation result regarding impact resistance, and the simulation result regarding vibration leakage. It is a table | surface which shows the result of having combined the simulation result regarding impact resistance, and the simulation result regarding vibration leakage. It is a graph which shows the relationship between W2 / W1 and a high performance index. It is a graph which shows the relationship between W2 / W1 and a standardized high performance index. It is sectional drawing which shows suitable embodiment of the oscillator of this invention. 1 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic apparatus of the present invention is applied. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device of this invention is applied. It is a perspective view which shows the structure of the digital still camera to which the electronic device of this invention is applied. It is a perspective view which shows the motor vehicle to which the mobile body of this invention is applied.

Hereinafter, a resonator element, a vibrator, an oscillator, an electronic device, and a moving body of the present invention will be described in detail based on preferred embodiments shown in the drawings.
1. First, the vibrator according to the present invention will be described.
FIG. 1 is a plan view of a vibrator according to a preferred embodiment of the present invention. 2 is a cross-sectional view taken along line AA in FIG. 3 is a cross-sectional view taken along line BB in FIG. FIG. 4 is a cross-sectional view showing a vibrating arm formed by wet etching. FIG. 5 is a cross-sectional view of a vibrating arm for explaining heat conduction during bending vibration. FIG. 6 is a graph showing the relationship between the Q value and f / fm. FIG. 7 is a perspective view showing the thickness T and the widths W1 and W2. FIG. 8 is a plan view showing dimensions of the quartz crystal vibrating piece used in the simulation. FIG. 9 is a perspective view for explaining the simulation method. 10 to 13 are tables showing simulation results related to impact resistance, respectively. FIG. 14 is a graph showing the relationship between W2 / W1 and logF. FIG. 15 is a graph showing the relationship between W2 / W1 and the impact resistance index. 16 to 19 are tables showing simulation results related to vibration leakage, respectively. FIG. 20 is a graph showing the relationship between W2 / W1 and Q _Leak . FIG. 21 is a graph showing the relationship between W2 / W1 and the leakage difficulty index. 22 to 25 are tables showing the results of combining the simulation results related to impact resistance and the simulation results related to vibration leakage, respectively. FIG. 26 is a graph showing the relationship between W2 / W1 and the high performance index. FIG. 27 is a graph showing the relationship between W2 / W1 and the normalized high performance index. In the following, for convenience of explanation, the upper side in FIG. 2 is “upper” and the lower side is “lower”. Further, the upper side in FIG. 1 is referred to as “tip”, and the lower side is referred to as “base end”.
As shown in FIG. 1, the vibrator 1 includes a vibration element 2 and a package 9 that houses the vibration element 2.

≪Package≫
As shown in FIG. 1 and FIG. 2, the package 9 includes a box-shaped base 91 having a recess 911 that opens on the upper surface, and a plate-shaped lid 92 that closes the opening of the recess 911 and is joined to the base 91. Have. The package 9 has an accommodation space S formed by closing the recess 911 with the lid 92, and the vibration element 2 is accommodated in the accommodation space S in an airtight manner. The atmosphere in the accommodation space S is not particularly limited, but is preferably in a reduced pressure state (vacuum state). Thereby, since the air resistance with respect to the drive of the vibration element 2 is reduced, excellent vibration characteristics can be exhibited. The degree of vacuum in the accommodation space S is not particularly limited, but is preferably about 100 Pa or less, and more preferably about 10 Pa or less. Further, in the accommodation space S, an inert gas such as nitrogen, helium, or argon may be sealed.

  The constituent material of the base 91 is not particularly limited, but various ceramics such as aluminum oxide can be used. The constituent material of the lid 92 is not particularly limited, but may be a member whose linear expansion coefficient approximates that of the constituent material of the base 91. For example, when the constituent material of the base 91 is ceramic as described above, an alloy such as Kovar is preferable. The joining of the base 91 and the lid 92 is not particularly limited, and for example, the base 91 and the lid 92 can be joined via a metallized layer.

  In addition, connection terminals 951 and 961 are formed on the bottom surface of the recess 911 of the base 91. In addition, conductive adhesives 11 and 12 are provided on the connection terminal 951, and conductive adhesives 13 and 14 are provided on the connection terminal 961. The vibration element 2 is attached to the base 91 by the conductive adhesives 11 to 14, the connection terminal 951 is electrically connected to a first drive electrode 84 described later, and the connection terminal 961 is a second drive described later. The electrode 85 is electrically connected.

  The conductive adhesives 11 to 14 are not particularly limited as long as they have electrical conductivity and adhesiveness, for example, epoxy-based, acrylic-based, silicon-based, polyimide-based, bismaleimide-based, polyester-based, for example. Further, a conductive adhesive in which a conductive filler such as silver particles is mixed with polyurethane resin can be used. Thus, by using a relatively soft adhesive, for example, the thermal stress generated from the difference in thermal expansion coefficient between the base 91 and the vibration element 2 can be absorbed and relaxed by the conductive adhesives 11 to 14. A reduction or change in the vibration characteristics of the vibration element 2 can be reduced. As long as the vibration element 2 can be attached to the base 91, gold bumps, solder, or the like may be used instead of the conductive adhesives 11-14.

  The connection terminal 951 is electrically connected to an external terminal 953 provided on the lower surface of the base 91 through a through electrode 952 that penetrates the bottom of the base 91. Similarly, the connection terminal 961 is connected to the bottom of the base 91. Is electrically connected to an external terminal 963 provided on the lower surface of the base 91 through a through electrode 962 penetrating through the base 91. The configurations of the connection terminals 951 and 961, the through electrodes 952 and 963, and the external terminals 953 and 963 are not particularly limited as long as they have electrical conductivity. For example, Cr (chromium), Ni (nickel), A plating layer such as Au (gold), Ag (silver), or Cu (copper) may be formed on a base layer such as W (tungsten) or molybdenum (Mo).

≪Vibration element≫
As shown in FIGS. 1 to 3, the vibration element 2 includes a crystal vibrating piece (vibrating piece) 3 and first and second driving electrodes 84 and 85 formed on the crystal vibrating piece 3. ing. In FIG. 1 and FIG. 2, the first and second driving electrodes 84 and 85 are not shown for convenience of explanation.
The crystal vibrating piece 3 is composed of a Z-cut crystal plate. A Z-cut quartz plate is a quartz substrate whose Z-axis is approximately the thickness direction. In addition, although the thickness direction of the quartz crystal vibrating piece 3 may coincide with the Z axis, the Z axis is slightly inclined with respect to the thickness direction from the viewpoint of reducing the frequency temperature change in the vicinity of normal temperature. . That is, when the angle of inclination is θ degrees (−5 ° ≦ θ ≦ 15 °), an orthogonal coordinate system comprising the X axis as the electrical axis of the crystal, the Y axis as the mechanical axis, and the Z axis as the optical axis. Using the X axis as a rotation axis, the Z axis is tilted by θ degrees so that the + Z side rotates in the −Y direction of the Y axis, the Z ′ axis, and the Y axis rotates in the + Z direction of the Z axis. Thus, when the axis tilted by θ degrees is the Y ′ axis, the thickness along the Z ′ axis is the thickness, and the crystal vibrating piece 3 has a surface including the X axis and the Y ′ axis as the main surface. In each figure, these X axis, Y ′ axis and Z ′ axis are shown.

  The crystal vibrating piece 3 has the Y′-axis direction in the length direction, the X-axis direction in the width direction, and the Z′-axis direction in the thickness direction. Further, the crystal vibrating piece 3 has substantially the same thickness over almost the entire region (except for a region where grooves 323, 324, 333, and 334 described later are formed). The thickness T of the crystal vibrating piece 3 is not particularly limited, but is preferably about 110 μm or more and 210 μm or less. If it is less than the above lower limit value, the mechanical strength is insufficient and the crystal vibrating piece 3 may be damaged. If the upper limit value is exceeded, it becomes difficult to form a fine shape by wet etching, and the vibration element 2 is excessively damaged. It will lead to an increase in size.

  Such a crystal vibrating piece 3 includes a base 31, a pair of vibrating arms 32 and 33 extending in the −Y′-axis direction from the −Y′-axis end of the base 31, and a + Y′-axis side of the base 31. A connecting portion 34 that is disposed and extends in the X-axis direction; a connecting portion 35 that is located between the base portion 31 and the connecting portion 34 and connects the base portion 31 and the connecting portion 34; and the connecting portion 34. And a pair of support arms 36 and 37 extending in the −Y′-axis direction from both ends of each of the two. The base 31, the vibrating arms 32 and 33, the connecting portion 34, the connecting portion 35, and the supporting arms 36 and 37 are integrally formed.

  The base 31 has a plate shape having a spread in the XY ′ plane and having a thickness in the Z′-axis direction. The connecting portion 35 extends in the + Y′-axis direction from the end of the base portion 31 on the + Y′-axis side. A connecting portion 34 is connected to an end of the connecting portion 35 on the + Y′-axis side, and the connecting portion 34 extends from the connecting portion 35 to both sides in the X-axis direction. Further, the support arm 36 extends in the −Y′-axis direction from the end of the connection portion 34 on the −X-axis side, and the support arm 37 extends in the −Y′-axis direction from the end on the + X-axis side. It is extended. The support arms 36 and 37 are located outside the vibration arms 32 and 33, and the vibration arms 32 and 33 are disposed between the support arms 36 and 37. Note that the tips (ends on the −Y′-axis side) of the support arms 36 and 37 are located on the + Y′-axis side with respect to the tips (ends on the −Y′-axis side) of the vibrating arms 32 and 33.

  The support arm 36 is attached to the base 91 by the conductive adhesives 11 and 12, and the support arm 37 is attached to the base 91 by the conductive adhesives 13 and 14. The conductive adhesives 11 and 12 are spaced apart in the extending direction of the support arm 36, and the conductive adhesives 13 and 14 are spaced apart in the extending direction of the support arm 37. As described above, the vibration element 2 can be attached to the base 91 in a more stable state by using the four conductive adhesives 11 to 14. Further, at least a part of the conductive adhesives 11 and 13 on the distal end side is located on the distal end side with respect to the center of gravity G ′ of the vibration element 2, and the conductive adhesives 12 and 14 on the proximal end side are at least It is preferable that a part thereof is located on the base end side with respect to the center of gravity G ′. Thereby, the vibration element 2 can be attached to the base 91 in a more stable state.

  Here, the connecting portion 35 is smaller in width than the base portion 31. In other words, the connecting portion 35 is contracted with respect to the base portion 31. In addition, the connecting portion 35 is a notch portion 31a formed by partially reducing the widthwise dimension of the base portion 31 at both side edges at positions sufficiently away from the end portions of the base portion 31 on the vibrating arms 32 and 33 side. , 31b can be said to be formed. By providing such a connecting portion 35, it is possible to suppress vibration leakage from propagating to the support arms 36 and 37 when the vibrating arms 32 and 33 bend and vibrate, and to reduce the CI value. That is, by providing the connecting portion 35, the vibration element 2 having excellent vibration characteristics is obtained.

  The vibrating arms 32 and 33 extend in the −Y′-axis direction from the −Y′-axis side end of the base 31 so as to be aligned in the X-axis direction and in parallel with each other. Each of the vibrating arms 32 and 33 has a longitudinal shape, and a base end (end on the + Y′-axis side) is a fixed end and a tip end (end on the −Y′-axis side) is a free end. In addition, the vibrating arms 32 and 33 are provided at the ends of the arm portions 321 and 331 extending from the base portion 31 and the arm portions 321 and 331, respectively, and are hammers as weight portions that are wider than the arm portions 321 and 331. And heads (wide portions) 322 and 332. As described above, by providing the hammer heads 322 and 332 at the distal ends of the vibrating arms 32 and 33, the vibrating arms 32 and 33 can be shortened, and the vibration element 2 can be downsized. In addition, since the vibration arms 32 and 33 can be shortened, the vibration speed of the vibration arms 32 and 33 when the vibration arms 32 and 33 are vibrated at the same frequency can be reduced as compared with the conventional case. The air resistance when 32 and 33 vibrate can be reduced, the Q value is increased correspondingly, and the vibration characteristics can be improved.

Hereinafter, the vibrating arms 32 and 33 will be described in detail. Since the vibrating arms 32 and 33 have the same configuration, the vibrating arm 32 will be described below as a representative, and the vibrating arm 33 will be described. Omitted.
As shown in FIG. 3, the arm portion 321 is composed of a pair of main surfaces 32a, 32b and a Y'Z 'plane which are configured in an XY ′ plane and have a front-back relationship with each other, and a pair of main surfaces 32a, 32b. And a pair of side surfaces 32c and 32d. The arm portion 321 includes a bottomed groove 323 that opens to the main surface 32a and a bottomed groove 324 that opens to the main surface 32b. Thus, by forming the grooves 323 and 324 in the vibrating arm 32, it is possible to reduce the thermoelastic loss and to exhibit excellent vibration characteristics. The lengths of the grooves 323 and 324 are not particularly limited, and the distal ends may extend to the hammer head 322, and the proximal ends may extend to the base 31. With such a configuration, the stress concentration on the boundary between the arm 321 and the hammer head 322 and the boundary between the arm 321 and the base 31 is alleviated, and there is a risk of bending or chipping that occurs when an impact is applied. Decrease. In addition, the groove | channel may be provided only in either one of main surface 32a, 32b, and may be abbreviate | omitted.

  The depth t of the grooves 323 and 324 preferably satisfies the relationship 0.292 ≦ t / T ≦ 0.483. By satisfying such a relationship, the heat transfer path becomes long, so that the thermoelastic loss can be more effectively reduced in the adiabatic region described later. The depth t more preferably satisfies the relationship of 0.455 ≦ t / T ≦ 0.483. By satisfying such a relationship, it is possible to reduce the thermoelastic loss by further increasing the heat transfer path. Therefore, the Q value is improved and the CI value is reduced accordingly. The CI value can be reduced by making the electrode area for applying an electric field larger.

  When the quartz crystal vibrating piece 3 is manufactured by patterning the quartz substrate by wet etching, the cross-sectional shape of the arm portion 321 is such that the crystal plane of the quartz is exposed as shown in FIG. Specifically, since the etching rate in the −X-axis direction is lower than the etching rate in the + X-axis direction, the side surface in the −X-axis direction has a relatively gentle slope, and the side surface in the + X-axis direction has a slope that is nearly vertical. . In this case, the depth t of the grooves 323 and 324 is the depth at the deepest position as shown in FIG.

  The grooves 323 and 324 are preferably formed by adjusting the position in the X-axis direction with respect to the vibrating arm 32 so that the cross-sectional center of gravity of the vibrating arm 32 coincides with the center of the cross-sectional shape of the vibrating arm 32. By doing so, unnecessary vibration of the vibrating arm 32 (specifically, vibration having an out-of-plane direction component) is reduced, so that vibration leakage can be reduced. Further, in this case, since driving of extra vibration is reduced, the driving area is relatively increased and the CI value can be reduced.

  The width (length in the X-axis direction) W3 of the arm portion 321 is not particularly limited, but is preferably about 16 μm to 300 μm, and more preferably about 45 μm to 60 μm. If the width W3 is less than the lower limit value, it may be difficult to form the grooves 323 and 324 in the arm portion 321 depending on the manufacturing technique, and the vibrating arm 32 may not be able to be an adiabatic region. On the other hand, if the width W3 exceeds the upper limit, depending on the thickness of the quartz crystal resonator element 3, the rigidity of the arm portion 321 may become too high, and the bending vibration of the arm portion 321 may not be performed smoothly. The width W3 referred to here refers to the width of the portion located at the central portion of the arm portion 321 and extending with a substantially constant width, and not the width of the tapered portions located at both ends.

  Further, when the total length (the length in the Y′-axis direction) of the vibrating arm 32 is L and the total length (the length in the Y′-axis direction) of the hammer head 322 is H, 0.183 ≦ H / L ≦ 0. It is preferable to satisfy the relationship of 597, and it is more preferable to satisfy the relationship of 0.238 ≦ H / L ≦ 0.531. Thereby, the vibration element 2 that achieves both miniaturization and improvement of vibration characteristics is obtained. The hammer head 322 is a region having a width of 1.5 times or more the width of the arm portion 321 (the length in the X-axis direction). In addition, the base end of the vibrating arm 32 is an end point of a tapered portion located outside the base end portion of the vibrating arm 32.

The width (length in the X-axis direction) W4 of the hammer head 322 is not particularly limited, but is preferably 2.8 times or more the width W3 of the arm portion 321. That is, it is preferable to satisfy the relationship of W4 ≧ 2.8W3. Thereby, the mass effect of the hammer head 322 can be sufficiently exhibited, and the above-described effect (both miniaturization and improvement of vibration characteristics) can be more effectively exhibited. The hammer head 322 of the present embodiment has a proximal end portion 322a located on the proximal end side and a distal end portion 322b located on the distal end side of the proximal end portion 322a and wider than the proximal end portion 322a. However, the width W4 refers to the width of the tip 322b.
The shape of the crystal vibrating piece 3 has been described above.

  As shown in FIG. 3, a pair of first driving electrodes 84 and a pair of second driving electrodes 85 are formed on the vibrating arm 32 of the crystal vibrating piece 3. One of the first drive electrodes 84 is formed on the inner surface of the groove 323, and the other is formed on the inner surface of the groove 324. One of the second drive electrodes 85 is formed on the side surface 32c, and the other is formed on the side surface 32d. Similarly, a pair of first drive electrodes 84 and a pair of second drive electrodes 85 are also formed on the vibrating arm 33. One of the first drive electrodes 84 is formed on the side surface 33c, and the other is formed on the side surface 33d. One of the second drive electrodes 85 is formed on the inner surface of the groove 333, and the other is formed on the inner surface of the groove 334. Each first drive electrode 84 is drawn to the support arm 36 by a wiring (not shown), and is electrically connected to the connection terminal 951 through the conductive adhesives 11 and 12. Similarly, each second driving electrode 85 is drawn out to the support arm 37 by a wiring (not shown), and is electrically connected to the connection terminal 961 through the conductive adhesives 13 and 14. When an alternating voltage is applied between the first and second driving electrodes 84 and 85, the vibrating arms 32 and 33 vibrate at a predetermined frequency in the X-axis direction (in-plane direction) so as to repeatedly approach and separate from each other.

The constituent material of the first and second driving electrodes 84 and 85 is not particularly limited as long as it has conductivity. For example, Cr (chromium), Ni (nickel), W (tungsten), molybdenum ( A coating layer of Au (gold), Ag (silver), Cu (copper), or the like can be formed on a base layer such as Mo).
As a specific configuration of the first and second driving electrodes 84 and 85, for example, a configuration in which an Au layer of 700 mm or less is formed on a Cr layer of 700 mm or less can be used. In particular, since Cr and Au have a large thermoelastic loss, the Cr layer and the Au layer are preferably 200 mm or less. In order to increase the dielectric breakdown resistance, the Cr layer and the Au layer are preferably 1000 mm or more. Furthermore, since Ni has a thermal expansion coefficient close to that of quartz, by using a Ni layer as a base instead of a Cr layer, a thermal element caused by an electrode can be reduced, and a vibration element with good long-term reliability (aging characteristics) can be obtained. Can be obtained.
The configuration of the vibration element 2 has been described above. As described above, by forming the grooves 323, 324, 333, and 334 in the respective vibrating arms 32 and 33 of the vibration element 2, it is possible to reduce the thermoelastic loss and exhibit excellent vibration characteristics. it can. Hereinafter, this will be specifically described by taking the vibrating arm 32 as an example.

  As described above, the vibrating arm 32 bends and vibrates in the in-plane direction by applying an alternating voltage between the first and second driving electrodes 84 and 85. As shown in FIG. 5, during this bending vibration, when the side surface 32c of the arm portion 321 contracts, the side surface 32d expands. Conversely, when the side surface 32c expands, the side surface 32d contracts. When the vibrating arm 32 does not generate the Gough-Joule effect (the energy elasticity is dominant to the entropy elasticity), the temperature of the contracting surface side of the side surfaces 32c and 32d rises, and the temperature of the expanding surface side is Descend. Therefore, a temperature difference occurs between the side surface 32c and the side surface 32d, that is, inside the arm portion 321. Loss of vibration energy occurs due to heat conduction resulting from this temperature difference, and thereby the Q value of the vibration element 2 is lowered. Such a loss of energy associated with a decrease in the Q value is also referred to as a thermoelastic loss.

In a vibration element that vibrates in the bending vibration mode configured as the vibration element 2, when the bending vibration frequency (mechanical bending vibration frequency) f of the vibrating arm 32 changes, the bending vibration frequency of the vibrating arm 32 changes to the thermal relaxation frequency fm. The Q value is the smallest when The thermal relaxation frequency fm can be obtained by the following formula (1). However, in equation (1), π is a circular ratio, and if e is the Napier number, τ is a relaxation time required for the temperature difference to be e ⁻¹ times due to heat conduction).

  Further, if the thermal relaxation frequency of the flat plate structure (structure having a rectangular cross-sectional shape) is fm0, fm0 can be obtained by the following formula (2). In the equation (2), π is the circumference, k is the thermal conductivity of the vibrating arm 32 in the vibration direction, ρ is the mass density of the vibrating arm 32, Cp is the heat capacity of the vibrating arm 32, and a is the vibration arm 32. The width in the vibration direction. When constants of the material of the vibrating arm 32 itself (that is, crystal) are input to the thermal conductivity k, the mass density ρ, and the heat capacity Cp in the formula (2), the obtained thermal relaxation frequency fm0 It is the value when not provided.

  In the vibrating arm 32, grooves 323 and 324 are formed so as to be positioned between the side surfaces 32c and 32d. Therefore, a heat transfer path for balancing the temperature difference between the side surfaces 32c and 32d generated during bending vibration of the vibrating arm 32 by heat conduction is formed so as to bypass the grooves 323 and 324, and the heat transfer path is formed on the side surfaces 32c and 32d. It becomes longer than the straight line distance (shortest distance) between them. Therefore, the relaxation time τ becomes longer and the thermal relaxation frequency fm becomes lower than when the grooves 323 and 324 are not provided in the vibrating arm 32.

  FIG. 6 is a graph showing the f / fm dependency of the Q value of the vibration element in the bending vibration mode. In the figure, a curved line F1 indicated by a dotted line indicates a case where a groove is formed in the vibrating arm like the vibrating element 2, and a curved line F2 indicated by a solid line indicates that the groove is formed in the vibrating arm. It shows a case that is not. As shown in the figure, the shapes of the curves F1 and F2 are not changed, but the curve F1 shifts in the frequency lowering direction with respect to the curve F2 as the thermal relaxation frequency fm is reduced as described above. Therefore, if the thermal relaxation frequency when the groove is formed in the vibrating arm like the vibration element 2 is fm1, the vibration in which the groove is always formed in the vibrating arm by satisfying the following formula (3). The Q value of the element is higher than the Q value of the vibration element in which no groove is formed in the vibration arm.

  Furthermore, if it restricts to the relationship of following formula (4), a higher Q value can be obtained.

In FIG. 6, a region where f / fm <1 is also referred to as an isothermal region. In this isothermal region, the Q value increases as f / fm decreases. This is because the temperature difference in the vibrating arm as described above is less likely to occur as the mechanical frequency of the vibrating arm becomes lower (the vibration of the vibrating arm becomes slower). Therefore, in the limit when f / fm is brought close to 0 (zero) as much as possible, the operation becomes an isothermal quasi-static operation, and the thermoelastic loss approaches 0 (zero) as much as possible. On the other hand, a region where f / fm> 1 is also referred to as an adiabatic region. In this adiabatic region, the Q value increases as f / fm increases. This is because, as the mechanical frequency of the vibrating arm increases, the temperature increase / decrease switching on each side surface becomes faster, and there is no time for heat conduction as described above. Therefore, in the limit when f / fm is increased as much as possible, the operation becomes adiabatic, and the thermoelastic loss approaches 0 (zero) as much as possible. From this, satisfying the relationship of f / fm> 1 can be rephrased as f / fm being in the adiabatic region.
The thermoelastic loss has been described above.

  In such a vibration element 2, the thickness (length in the Z′-axis direction) T of the crystal vibrating piece 3 shown in FIG. 7, the width (length in the X-axis direction) W 1 of the base portion 31, and the connection portion 35 By setting the relationship with the width (length in the X-axis direction) W2 to any one of the following patterns 1 and 2, vibration leakage is reduced and the vibration element 2 having excellent impact resistance can be obtained. it can. In addition, the width W2 of the connection part 35 says the width | variety in the part where the width is the narrowest. Moreover, both the width W1 of the base 31 and the width W2 of the connection part 35 shall be prescribed | regulated by the outline part of a front and back main surface.

<< Pattern 1 >>
In the pattern 1, the thickness T satisfies the relationship of 110 μm ≦ T ≦ 210 μm, and the widths W1 and W2 satisfy the relationship of 0.134 ≦ W2 / W1 ≦ 0.335.
<< Pattern 2 >>
In the pattern 2, the thickness T satisfies the relationship of 150 μm ≦ T ≦ 210 μm, and the widths W1 and W2 satisfy the relationship of 0.067 ≦ W2 / W1 ≦ 0.871.

  Hereinafter, it will be proved that the vibration element 2 with reduced vibration leakage and excellent impact resistance can be obtained by satisfying any one of the patterns 1 and 2 based on the simulation result performed by the inventor. The crystal vibrating piece 3A used in this simulation is obtained by patterning a Z-cut crystal plate by wet etching and has the dimensions shown in FIG. Each of the grooves 323A, 324A, 333A, 334A has a depth of 45% of the thickness T of the crystal vibrating piece 3A.

  In this simulation, since the crystal vibrating piece 3A patterned by wet etching is used, the grooves 323A, 324A, 333A, and 334A formed in the vibrating arms 32A and 33A are formed as shown in FIG. The crystal plane appears. Further, the first and second drive electrodes 84 and 85 and other wirings are not formed on the quartz crystal vibrating piece 3A used in this simulation. Further, it has been confirmed by the discoverer that there is almost no difference from the simulation result even if the dimensions of each part are different (having a similar tendency).

In addition, as shown in FIG. 9, the simulation has a thickness T of 50 μm to 210 μm (T = 50 μm, 60 μm, 70 μm, 80 μm, 100 μm, 110 μm, 120 μm, 130 μm, 140 μm, 150 μm, 190 μm, 210 μm). The crystal vibrating piece 3A having a width W2 of 20 μm to 260 μm (20 μm, 40 μm, 60 μm, 80 μm, 100 μm, 140 μm, 180 μm, 220 μm, 260 μm) is electrically conductive at two positions of the support arms 36A and 37A. Adhesives 11A, 12A, 13A, and 14A (however, 13A and 14A are not shown) were attached to the base. The conductive adhesives 11A to 14A are assumed to be bismaleimide adhesives each having a thickness = 20 μm, Young's modulus = 3.4 GPa, Poisson's ratio = 0.33, and mass density = 4070 kg / m ^3. did. As the base, a ceramic base with Young's modulus = 320 GPa, Poisson's ratio = 0.23, and mass density = 3800 kg / m ³ was assumed.

≪Simulation on impact resistance≫
In this simulation, as shown in FIG. 9, a 1G acceleration G is applied to the crystal vibrating piece 3A in the −Z′-axis direction, and when the acceleration G is applied, a portion indicated by a point P in FIG. The first principal stress F applied to the end portion of the narrowest portion of 35 was calculated. A portion indicated by a point P is a portion where the stress is most concentrated in the connecting portion 35A when the acceleration G is applied. In addition, even when acceleration greater than 1G is applied, the inventor has confirmed that the magnitude relationship of the first principal stress F is unchanged and has the same tendency as the simulation result.

  The simulation results are shown in FIGS. 10 to 13 are tables showing the simulation results, and FIG. 14 is a graph in which the numerical values shown in FIGS. 10 to 13 are plotted. The vertical axis in FIG. 14 is the logarithm (log F) of the first principal stress F, and the horizontal axis is W2 / W1. As can be seen from FIGS. 10 to 14, in all thicknesses T, W2 / W1 is added to the point P as it approaches 1.0 (that is, as the width of the connecting portion 35A increases). 1 Main stress F tends to decrease. That is, as W2 / W1 approaches 1.0, the impact resistance (mechanical strength) of the crystal vibrating piece 3A tends to improve. Next, FIG. 15 shows a graph plotting the impact resistance index obtained by taking the reciprocal of each log F and standardizing the maximum value of the reciprocal as “1”. The vertical axis in FIG. 15 is the impact resistance index, and the horizontal axis is W2 / W1. FIG. 15 shows that the impact resistance is higher as the impact resistance index approaches 1.0.

≪Simulation on vibration leakage≫
This simulation was performed by calculating vibration leakage when the vibrating arms 32 and 33 were driven to vibrate at a driving frequency of 32.768 kHz. The vibration leakage was calculated on the assumption that the energy that reached the back surfaces of the conductive adhesives 11A to 14A leaked to the base. In addition, it is confirmed by the discoverer that there is almost no difference in simulation results (having the same tendency) even if the drive frequency is different (for example, a frequency of 32.768 kHz ± 1 kHz).

The simulation results are shown in FIGS. 16 to 19 are tables showing the results of this simulation, and FIG. 20 is a graph in which the numerical values shown in FIGS. 16 to 20 are plotted. The vertical axis in FIG. 20 is the Q value “Q _Leak ” considering only vibration leakage, and the horizontal axis is W2 / W1. In addition, it has shown that vibration leak is so small that the value of _QLeak is high. Next, FIG. 21 shows a graph in which the “leakage difficulty index”, in which the logarithm of each Q _Leak is taken and the maximum value is standardized as “1” for each plate thickness, is plotted. The vertical axis in FIG. 21 is the leakage difficulty index, and the horizontal axis is W2 / W1. As the leakage difficulty index approaches 1.0, vibration leakage can be reduced.

≪Integration of simulation results≫
Next, the result of the simulation regarding impact resistance and the result of the simulation regarding vibration leakage were combined. Specifically, for a crystal resonator 3A having the same conditions (that is, the same thickness T and the same constriction rate W2 / W2), a high performance index is obtained by integrating the impact resistance index and the leak difficulty index. It was. That is, [high performance index] = [impact resistance index] × [leakage index]. The results are shown in FIGS. 22 to 25 are tables showing the integration results, and FIG. 26 is a graph in which the numerical values shown in FIGS. 22 to 26 are plotted. Next, FIG. 27 shows a graph in which the standardized high-performance index plotted with the maximum value of each high-performance index as “1” is plotted. The vertical axis in FIG. 27 is the normalized high performance index, and the horizontal axis is W2 / W1. FIG. 27 shows that as the normalized high performance index approaches 1.0, the vibration leakage is reduced and the impact resistance is excellent. Here, if the normalized high performance index is 0.9 or more, the vibration element 2 having sufficiently reduced vibration leakage and sufficiently excellent impact resistance can be obtained.

  From FIG. 22 to FIG. 25 and FIG. 27, when 110 μm ≦ T ≦ 210 μm, the normalized high performance index is 0.9 or more in the range of 0.134 ≦ W2 / W1 ≦ 0.335. I understand. Therefore, as in the above-described pattern 1, if the relationship of 110 μm ≦ T ≦ 210 μm is satisfied and the relationship of 0.134 ≦ W2 / W1 ≦ 0.335 is satisfied, vibration leakage is sufficiently reduced, and impact resistance It was proved that the crystal vibrating piece 3 (vibrating element 2) having sufficiently excellent properties can be obtained. Note that even if the thickness T is less than 110 μm, the normalized high performance index may exceed 0.9. However, when the thickness T is less than 110 μm, it is formed on the side surfaces of the vibrating arms 32 and 33. In some cases, the height (area) of the first electrodes (first and second drive electrodes 84 and 85) cannot be sufficiently obtained, and the CI value cannot be reduced. Therefore, in the pattern 1, by setting the thickness T to 110 μm or more and effectively reducing the CI value in addition to the above effects, the vibration element 2 having more excellent vibration characteristics can be obtained. On the other hand, even if the thickness T exceeds 210 μm, the normalized high performance index may exceed 0.9. However, if the thickness T exceeds 210 μm, it becomes difficult to create a fine shape by wet etching. This leads to an excessive increase in size of the resonator element 3 (the vibration element 2). Therefore, in the pattern 1, the thickness T is set to 210 μm or less to prevent the vibration element 2 from being excessively large while exhibiting the above-described effect.

Also, from FIG. 22 to FIG. 25 and FIG. 27, when 150 μm ≦ T ≦ 210 μm, the normalized high performance index is 0.9 or more in the range of 0.067 ≦ W2 / W1 ≦ 0.871. I understand that there is. Therefore, as in the above-described pattern 2, if the relationship of 150 μm ≦ T ≦ 210 μm is satisfied and the relationship of 0.067 ≦ W2 / W1 ≦ 0.871 is satisfied, vibration leakage is sufficiently reduced, and impact resistance It was proved that the crystal vibrating piece 3 (vibrating element 2) having sufficiently excellent properties can be obtained. Note that even if the thickness T is less than 150 μm, the normalized high performance index may exceed 0.9, but the CI value can be further reduced than the pattern 1 by setting the thickness T to 150 μm or more. Can be effectively achieved. The reason why the thickness T is 210 μm or less is the same as the reason described in the pattern 1.
As described above, by satisfying any one of the patterns 1 and 2, the vibration element 2 is sufficiently reduced in vibration leakage and sufficiently excellent in impact resistance.

2. Oscillator Next, an oscillator including the vibration element of the present invention will be described.
FIG. 28 is a cross-sectional view showing a preferred embodiment of the oscillator of the present invention.
An oscillator 100 illustrated in FIG. 28 includes a vibrator 1 and an IC chip 110 for driving the vibration element 2. Hereinafter, the oscillator 100 will be described with a focus on differences from the above-described vibrator, and description of similar matters will be omitted.

  As shown in FIG. 28, in the oscillator 100, the IC chip 110 is fixed to the recess 911 of the base 91. The IC chip 110 is electrically connected to a plurality of internal terminals 120 formed on the bottom surface of the recess 911. The plurality of internal terminals 120 include those connected to the connection terminals 951 and 961 and those connected to the external terminals 953 and 963. The IC chip 110 has an oscillation circuit (circuit) for controlling the driving of the vibration element 2. When the vibration element 2 is driven by the IC chip 110, a signal having a predetermined frequency can be extracted.

3. Next, an electronic apparatus provided with the vibration element of the present invention will be described.
FIG. 29 is a perspective view showing a configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the present invention is applied. In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1108. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 has a built-in vibrator 1 (vibrating element 2) that functions as a filter, a resonator, a reference clock, and the like.

  FIG. 30 is a perspective view showing a configuration of a mobile phone (including PHS) to which the electronic apparatus of the invention is applied. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates a vibrator 1 (vibrating element 2) that functions as a filter, a resonator, a reference clock, and the like.

  FIG. 31 is a perspective view showing the configuration of a digital still camera to which the electronic apparatus of the present invention is applied. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit 1310 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit displays a subject as an electronic image. Function as. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 incorporates a vibrator 1 (vibrating element 2) that functions as a filter, a resonator, a reference clock, and the like.

  In addition to the personal computer (mobile personal computer) shown in FIG. 29, the mobile phone shown in FIG. 30, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments Class (eg, vehicle, aircraft) Gauges of a ship), can be applied to a flight simulator or the like.

4). Next, a moving body provided with the vibration element of the present invention will be described.
FIG. 32 is a perspective view showing an automobile to which the moving body of the present invention is applied. The automobile 1500 is equipped with a vibrator 1 (vibration element 2). The vibrator 1 includes, for example, a keyless entry, an immobilizer, a car navigation system, a car air conditioner, an antilock brake system (ABS), an air bag, a tire pressure monitoring system (TPMS), an engine control, and a hybrid. The present invention can be widely applied to electronic control units (ECUs) such as battery monitors for automobiles and electric vehicles, and vehicle body attitude control systems.

  As described above, the resonator element, the vibrator, the oscillator, the electronic device, and the moving body of the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this, and the configuration of each part is the same. Any structure having a function can be substituted. In addition, any other component may be added to the present invention. Moreover, you may combine each embodiment suitably.

  DESCRIPTION OF SYMBOLS 1 ... Vibrator 11, 11A, 12, 12A, 13, 13A, 14, 14A ... Conductive adhesive 2 ... Vibrating element 3 ... Quartz vibrating piece 3A ... Quartz vibrating piece 31 ... Base 31a, 31b ...... Notches 32, 32A, 33, 33A ... Vibrating arms 32a, 32b ... Main surfaces 32c, 32d, 33c, 33d ... Side surfaces 321, 331 ... Arms 322, 332 ... Hammer head 322a ... Base End 322b …… Tip 323, 323A, 324, 324A, 333, 333A, 334, 334A …… Groove 34 …… Connector 35 …… Connector 35A …… Connector 36, 36A, 37, 37A …… Support Arm 84 …… First drive electrode 85 …… Second drive electrode 9 …… Package 91 …… Base 911 …… Recess 92… Lids 951, 961 …… Connection terminal 952, 962 …… Penetration electrode 953,963 ... External terminal 100 …… Oscillator 110 …… IC chip 120 …… Internal terminal 1100 …… Personal computer 1102 …… Keyboard 1104 …… Main body 1106 …… Display unit 1108 …… Display unit 1200 …… Cellular phone 1202 …… Operation buttons 1204 …… Earpiece 1206 …… Speaker 1208 …… Display unit 1300 …… Digital still camera 1302 …… Case 1304 …… Light receiving unit 1306 …… Shutter button 1308 …… Memory 1310 …… Display 1312 …… Video signal output terminal 1314 …… Input / output terminal 1430 …… TV monitor 1440 …… Personal computer 1500 …… Automobile G …… Acceleration S …… Containment space T …… Thickness W1, W2 …… Width W3, W4 …… Width fm …… Thermal relaxation frequency fm0 …… Thermal relaxation frequency G ′ …… The center of gravity

Claims (8)

The base,
A vibrating arm extending from one end side of the base portion in plan view;
A connecting portion disposed on the other end side of the base portion in plan view;
A connecting portion that is disposed between the base portion and the connecting portion and connects the base portion and the connecting portion;
Including a vibrating piece with
The vibrating arm is
A weight part;
An arm portion disposed between the base portion and the weight portion;
Including
The thickness of the vibrating piece is T,
The width along the direction intersecting the extending direction of the base is W1,
When the width along the intersecting direction of the connecting portion is W2,
110 μm ≦ T ≦ 210 μm
And satisfying the relationship
0.134 ≦ W2 / W1 ≦ 0.335
Satisfying the relationship
The width along the intersecting direction of the arms is W3,
When the width of the weight portion along the intersecting direction is W4,
W4 ≧ 2.8 × W3
A vibration element characterized by satisfying the following relationship: The base,
A vibrating arm extending from one end side of the base portion in plan view;
A connecting portion disposed on the other end side of the base portion in plan view;
A connecting portion that is disposed between the base portion and the connecting portion and connects the base portion and the connecting portion;
Including a vibrating piece with
The vibrating arm is
A weight part;
An arm portion disposed between the base portion and the weight portion;
Including
The thickness of the vibrating piece is T,
The width along the direction intersecting the extending direction of the base is W1,
When the width along the intersecting direction of the connecting portion is W2,
150 μm ≦ T ≦ 210 μm
While satisfying the relationship
0.067 ≦ W2 / W1 ≦ 0.871
Satisfying the relationship
The width of the arm portion in the width direction of the vibrating piece is W3,
When the width that is the dimension in the width direction of the vibrating piece of the wide portion is W4,
W4 ≧ 2.8 × W3
A vibration element characterized by satisfying the following relationship: The connecting portion extends along the intersecting direction,
The vibration element according to claim 1, further comprising a support arm connected to the connection portion and extending along an extending direction of the vibration arm.   The vibration element according to any one of claims 1 to 3, wherein a groove is provided in at least one of the pair of main surfaces of the arm portion that are in a front-to-back relationship. The vibration element according to any one of claims 1 to 4,
A package in which the vibration element is mounted;
A vibrator characterized by comprising: The vibration element according to any one of claims 1 to 4,
Circuit,
An oscillator comprising:   An electronic apparatus comprising the vibration element according to claim 1.   A moving body comprising the vibration element according to claim 1.

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