JP2015009994A - Method for producing inorganic crystal film laminate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing an inorganic crystal film laminate having a release layer excellent in releasability.SOLUTION: There is provided a method for producing an inorganic crystal film laminate, the method comprising: a step of forming a release layer 12 composed of inorganic fine particles on a support 11; a step of forming an inorganic material film 13A in an amorphous state on the release layer 12; and a step of crystallizing the inorganic material film 13A in an amorphous state by heat treatment. The production method further comprises a step of transferring the inorganic crystal film onto a substrate.

Description

  The present invention relates to a method for producing an inorganic crystal film laminate.

  Inorganic crystal films are used in a wide range of applications by taking advantage of various properties (mechanical properties, optical properties, electrical properties, magnetic properties, chemical properties, biocompatibility, etc.) possessed by inorganic crystals.

  For example, indium tin oxide (ITO), which has semiconducting properties and unique light transmission characteristics, is widely used as a transparent conductive material for display elements for notebook computers and mobile phones, electrodes for solar cells, electrodes for plasma display panels, etc. It is used.

  Further, hydroxyapatite (HAp) having biocompatibility is widely used in the medical field as an implant material including artificial bones and artificial tooth roots. In particular, in recent years, it has been recognized that the application of a hydroxyapatite sheet to a tooth directly has an effect on the treatment of caries (cavities), hypersensitivity, and the like, and the hydroxyapatite sheet is highly expected for dental application.

  Here, an inorganic material such as indium tin oxide or hydroxyapatite needs to be crystallized at a high temperature in order to exhibit a sufficient function, and cannot be directly crystallized on a low heat resistant substrate. Therefore, when these inorganic crystal films are formed on a low heat-resistant substrate, they are formed on the surface of a heat-resistant support such as a glass substrate via a release layer and transferred to the substrate after crystallization. There is a need to. As a method for forming an inorganic crystal film on such a low heat-resistant substrate, a method using polyimide as a release agent is known (Patent Document 1).

JP 2012-161957 A

  However, the above-mentioned method using polyimide as a release agent has a problem that the release property of polyimide is not sufficient. As described in paragraph 0021 of Patent Document 1, an inorganic crystal film is used as a base material. After the transfer, it was necessary to remove the polyimide adhering to the inorganic crystal film using an adhesive tape or the like.

  Therefore, the subject of this invention is providing the manufacturing method of the inorganic crystal film laminated body which has a release layer excellent in the release property.

In the method for producing an inorganic crystal film laminate according to the present invention,
Forming a release layer composed of inorganic fine particles on a support;
Forming an amorphous material film in an amorphous state on the release layer;
Crystallization of the amorphous inorganic material film by heat treatment;
It is characterized by providing.

  Here, the “inorganic crystal film” refers to an amorphous inorganic material film that has been crystallized to such an extent that it can perform its intended function by heat treatment, and is composed of only an inorganic material, Alternatively, other materials may be included as necessary. Further, the “amorphous inorganic material film” means an inorganic material film that is not crystallized, and strictly speaking, includes an inorganic material film that is not in an amorphous state but is close to an amorphous state. The “amorphous inorganic material” does not include an amorphous metal.

  According to such a configuration, since the inorganic fine particles having excellent releasability such as silica fine particles (nano silica, colloidal silica) are used for the release layer, the inorganic crystal film is peeled off from the support or transferred onto the substrate. Inorganic fine particles adhering to the inorganic crystal film can be easily removed.

  Here, “release” refers to peeling the inorganic crystal film formed on the support through the release layer from the support or transferring it to the substrate. "Performance" means the degree of ease with which an inorganic crystal film can be peeled off or transferred to a substrate, and the release layer (inorganic fine particles) attached to the inorganic crystal film after peeling or transfer. The degree of ease of removal is included. “Transfer” means that an inorganic crystal film formed on a support is fixed on a substrate via a release layer and then peeled off from the support.

In the above configuration,
You may further provide the process of transcribe | transferring the said inorganic crystal film on a base material.

  According to such a configuration, since the inorganic crystal film can be transferred to the base material after crystallization on the support, an inexpensive low heat-resistant material can be used for the base material, and the inorganic crystal film with the base material can be used. A laminated body can be manufactured at low cost.

  As described above, according to the method for producing an inorganic crystal film laminate according to the present invention, an inorganic crystal film laminate having a release layer excellent in releasability can be produced.

It is a figure which shows typically the manufacturing process of an inorganic crystal film laminated body. It is a figure which shows typically the transfer process of an inorganic crystal film laminated body. It is a figure which represents typically the cross-section of the laminated body which consists of PET film / adhesion layer / hydroxyapatite crystal film. It is an optical microscope photograph of the laminated body which consists of a PET film / adhesion layer / hydroxyapatite crystal film. It is an X-ray diffraction spectrum of the laminated body which consists of a PET film / adhesion layer / hydroxyapatite crystal film. It is an electron micrograph of silica fine particle sample PL-1. It is an electron micrograph of silica fine particle sample PL-3. It is an electron micrograph of silica fine particle sample PL-5. It is a table | surface which shows a mold release result when the particle size of the silica particle used for a mold release layer is changed.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
(1) Release layer formation process First, as shown to Fig.1 (a), on the support body 11, the mixture of an inorganic fine particle and pure water is apply | coated, and the release layer 12 which consists of inorganic fine particles by heat drying. Form. For example, as inorganic fine particles, silica (SiO ₂ ), titania (TiO ₂ ), magnesium fluoride (MgF ₂ ), aluminum fluoride (AlF ₃ ), lithium fluoride (LiF), sodium fluoride (NaF), alumina ( Fine particles such as Al ₂ O ₃ ), zirconia (ZrO ₂ ), niobium oxide (Nb ₂ O ₅ ), ceria (CeO ₂ ), yttria (Y ₂ O ₃ ), and bismuth oxide (Bi ₂ O ₃ ) may be used. Silica fine particles are particularly preferred in that they are inexpensive and versatile. Further, it is preferable that the primary particle diameter of the inorganic fine particles is 15 nm or less and the secondary particle diameter is 40 nm or less (the reason will be described later).

  An organic solvent may be used instead of pure water. By doing in this way, the inorganic fine particle which melt | dissolves in pure waters, such as a metal fluoride, can also be used for a mold release agent. Alternatively, a mixed solvent containing alcohol or the like may be used instead of pure water, and a wettability improving agent such as a surfactant may be added to pure water, an organic solvent, or a mixed solvent. By doing in this way, the coating property at the time of forming the release layer 12 on the support body 11 can be improved, and the washing | cleaning process of the support body 11 mentioned later may be abbreviate | omitted or simplified.

  Here, “primary particle size” refers to the average particle size of primary particles, and “secondary particle size” refers to the average particle size of aggregates formed by aggregating a plurality of primary particles. To do.

  The support 11 is not limited as long as it has a surface on which the release layer 12 can be formed. Any material having heat resistance and a flat surface capable of crystallizing the amorphous inorganic material film 13A is sufficient, and examples thereof include a glass substrate, a silicon substrate, a titanium substrate, a stainless steel substrate, a quartz substrate, and an alumina substrate.

  In order to impart hydrophilicity to the support 11, it is preferable to wash the support 11 before applying a mixture of inorganic fine particles and pure water on the support 11. Examples of the cleaning method include UV / ozone cleaning and plasma cleaning.

(2) Inorganic Crystal Film Forming Step Next, as shown in FIG. 1B, an amorphous inorganic material film 13 </ b> A is formed on the release layer 12. As a formation method, a laser ablation method, a sputtering method, an ion beam evaporation method, an electron beam evaporation method, a vacuum evaporation method, a molecular beam epitaxy method, a chemical vapor deposition method, or the like can be used. Further, as an inorganic material, hydroxyapatite having biocompatibility, indium tin oxide having conductivity, tin oxide, zinc oxide, titania having a photocatalytic function, zirconia having a high refractive index, and the like can be used. Indium tin oxide is preferred.

  Next, as shown in FIG. 1C, the amorphous inorganic material film 13 </ b> A is crystallized by heat treatment, thereby forming an inorganic crystalline film 13 </ b> B on the release layer 12. Here, although it depends on the inorganic material to be used, the crystallization temperature is generally preferably 300 ° C. or higher. For example, when hydroxyapatite is used, 310 ° C. to 550 ° C. is a preferable range. If it is not 310 degreeC, a hydroxyapatite cannot fully be crystallized, but when it exceeds 550 degreeC, there exists a possibility that a composition of a hydroxyapatite may change.

  Through the above steps, the inorganic crystal film 13B having the release layer 12 according to the first embodiment can be manufactured. According to this embodiment, since inorganic fine particles having excellent releasability such as silica fine particles are used for the release layer 12, the inorganic crystal film 13B is peeled off from the support 11 or transferred onto the base material 14, and then the inorganic crystals The inorganic fine particles adhering to the film 13B can be easily removed, the manufacturing time can be shortened, and the high quality inorganic crystal film 13B with less adhesion of impurities can be manufactured. As a method for removing the inorganic fine particles, a method in which the inorganic crystal film 13B is not dissolved among alkali treatment or hydrofluoric acid treatment can be used.

  The manufacturing method according to this embodiment is characterized in that a release layer 12 made of inorganic fine particles is formed on a support 11. In general, oils and fats, carbon, pigments, fluorine materials, silicone materials, etc. are used as mold release agents. However, fats and oils and silicone materials are vaporized when heated at a high temperature (the crystallization temperature of the amorphous inorganic material film 13A in the present invention), and function as a release layer when the inorganic crystalline film 13B is peeled off or transferred to the base material 14. I can't. In addition, since carbon and pigment develop color, they are not suitable for the production of transparent inorganic crystal films such as indium tin oxide (ITO), and fluorine materials are relatively expensive. In that respect, inorganic fine particles generally have high heat resistance, are colorless, and are relatively inexpensive.

  The inorganic fine particles used in the present embodiment have a heat resistance equal to or higher than the temperature necessary for crystallizing the amorphous inorganic material film 13A, and when the inorganic crystal film 13B is peeled off or transferred onto the substrate 14. There is no limitation as long as it functions as a release layer.

(Second Embodiment)
The second embodiment further includes the following steps in addition to the first embodiment.

(3) Transfer process
First, as shown in FIG. 2D, the inorganic crystal film 13 </ b> B formed on the support 11 is pressed against the surface of the base material 14 through the release layer 12. Thereafter, as shown in FIG. 2E, the inorganic crystal film 13B is transferred to the base material 14 side by separating the inorganic crystal film 13B and the base material 14 with the release layer 12. The transfer process is not particularly limited as long as it is a method that can be peeled off from the support 11 with the inorganic crystal film 13 </ b> B fixed to the substrate 14. For example, in the transfer step, a UV curable resin is applied as an adhesive layer to the base material 14 on the side to which the inorganic crystal film 13B is transferred, and the inorganic crystal film 13B is bonded thereon, and the UV curable resin is cured by a UV lamp. Then, the inorganic crystal film 13 </ b> B may be peeled off from the support 11. In this way, the laminate 10 in which the inorganic crystal film 13B is formed on the base material 14 is completed.

  In the manufacturing method of the inorganic crystal film laminate according to the present embodiment, the inorganic material film 13A in the amorphous state is crystallized on the support 11, and then the inorganic crystal film 13B is transferred to the base material 14. Does not require heat resistance. Therefore, a general-purpose and inexpensive low heat-resistant substrate can be used, and the manufacturing cost can be reduced.

-Experimental example 1-
In this example, a hydroxyapatite crystal film 23B is formed on a polyethylene terephthalate film (hereinafter referred to as PET film) 24 through an adhesive layer 25, and a laminate 20 composed of PET film / adhesive layer / hydroxyapatite crystal film is formed. It is an example of an experiment to manufacture. Silica fine particles (PL-1, manufactured by Fuso Chemical Industry Co., Ltd., primary particle size 15 nm, secondary particle size 40 nm) were used as inorganic fine particles serving as a release agent. The experimental method will be described below.

  First, after performing UV / ozone cleaning for 10 minutes on the surface of a glass substrate having a flat main surface, a rotational speed of 1000 rpm is obtained using a mixture of silica fine particles and pure water (silica concentration 2.4 mass%). A silica fine particle film having a thickness of 150 to 200 nm was formed by spin coating and dried at a temperature of 150 ° C. for 10 minutes.

  Next, an amorphous hydroxyapatite film having a thickness of 2 μm is formed on the silica fine particle film by an RF sputtering method (sputtering power 300 W, film formation rate 0.4 μm / h), and then 10% in an electric furnace at 450 ° C. The amorphous hydroxyapatite film was crystallized by heating for a period of time.

  In the present embodiment, the hydroxyapatite crystal film 13B has flexibility and flexibility and maintains a certain strength, so that the thickness of the hydroxyapatite crystal film 13B is 0.5 to 15 μm. preferable. Furthermore, since it becomes easier to attach to a living tissue such as a bone or a tooth, it is particularly preferably 1 to 4 μm.

  Next, a UV curable resin (acrylic) was applied as a bonding layer 25 to the PET film 24 on the transfer side of the hydroxyapatite crystal film 23B with a bar coater, and the film was bonded onto the hydroxyapatite crystal film 23B. After the UV curable resin 25 was cured by irradiating with a UV lamp (power 1.5 kW) for about 10 seconds, the PET film 24 was peeled off from the glass substrate, whereby the hydroxyapatite crystal film 23B was transferred to the PET film 24.

  FIG. 2 is a diagram schematically showing a cross-sectional structure of the laminate 20 made of the PET film 24 / adhesive layer 25 / hydroxyapatite crystal film 23B manufactured by the above method, and FIG. 3 shows a hydroxyapatite crystal of the laminate 20 It is the optical microscope photograph which observed the film | membrane 23B.

  FIG. 4 shows the result of X-ray diffraction measurement of the laminate 20 composed of the PET film 24 / adhesive layer 25 / hydroxyapatite crystal film 23B produced by the above method. In addition to polyethylene terephthalate, a diffraction peak attributed to hydroxyapatite appeared, and it was confirmed that the hydroxyapatite crystal film 23B was transferred to the PET film 24.

  The effect of this example will be described in comparison with the case where polyimide is used as the release agent.

(1) Since silica fine particles are cheaper than polyimide, the manufacturing cost can be reduced.

(2) When polyimide is used as the mold release agent, polyimide is produced by heating a polyamic acid (polyamic acid) solution, so if the polyamic acid remains without being converted to polyimide, the acid resistance Hydroxyapatite having a low density is dissolved by the polyamic acid, and there is a possibility that the hydroxyapatite crystal film 23B cannot be produced. In this respect, according to the present example, since an acidic substance is not used in the release layer forming step, there is no possibility that hydroxyapatite is dissolved.

(3) When polyimide is used as the release agent, hydroxyapatite has high adsorptivity, and thus it may be difficult to remove the polyimide adhering to the hydroxyapatite crystal film 23B with an adhesive tape or the like. In this respect, according to the present embodiment, the silica fine particles are excellent in releasability, so that the silica fine particles can be easily removed from the hydroxyapatite crystal film 23B by alkali treatment, etc. A high-quality hydroxyapatite crystal film 23B with little adhesion can be produced.

(4) When polyimide is used as the release agent, the polyimide adhered to the hydroxyapatite crystal film 23B may adversely affect the human body. In that respect, according to the present embodiment, since the silica fine particles have little influence on the human body, the hydroxyapatite crystal film 23B that can be directly applied to the human body can be manufactured.

(5) When polyimide is used as a mold release agent, if a sputtering method is used to form an amorphous hydroxyapatite film, the polyimide is exposed to a high temperature for a long time and loses its function as a mold release agent. 23B may not be transferred to the PET film 24. In this respect, according to this example, the silica fine particles are excellent in heat resistance, so that the function as a release layer is not lost even when heat is generated by sputtering, and the hydroxyapatite crystal film formed by sputtering is used. Even 23B can be released.

(6) In addition, in the Example of patent document 1 which used the polyimide for the mold release agent, since the instantaneous adhesive (Aron Alpha 201 by Toagosei Co., Ltd.) is used for the adhesive layer (paragraph 0021), from the PET film 24 It is not suitable for use in which the hydroxyapatite crystal film 23B is peeled off. In this respect, according to the present example, since the silica fine particles are excellent in releasability, it is possible to use a peelable material for the adhesive layer, and it is possible to peel the hydroxyapatite crystal film 23B from the PET film 24. .

  In this embodiment, the hydroxyapatite crystal film 23B includes the resin film 24 only on one side, but may include the resin film 24 on both sides. In this case, since both surfaces of the hydroxyapatite crystal film 23B are protected by the resin film 24, the hydroxyapatite crystal film 23B can be handled more hygienically.

-Experimental example 2-
In this experiment, the correlation between the particle size of the silica fine particles as the release agent and the releasability was confirmed. Three types of silica fine particle samples (PL-1, PL-3, PL-5 manufactured by Fuso Chemical Industry Co., Ltd.) having primary particle sizes of 15 nm, 35 nm, and 55 nm, respectively, were used. Each silica fine particle sample was mixed with pure water so as to have a viscosity enough to be applied to the support. 6-8 are SEM photographs of each silica sample on the support. It can be seen that the silica fine particles cover the support almost uniformly in all the samples.

  FIG. 9 shows the release results when these silica fine particle films are used as a release layer, a hydroxyapatite crystal film 23B is formed in the same manner as in Experimental Example 1, and transfer to the PET film 24 is attempted. Silica fine particle sample PL-1 could be released, and PL-3 and PL-5 could not be released. This is presumably because when the particle size of the silica fine particles is large, the gap between the fine particles becomes large, and the hydroxyapatite enters the gap to form a continuous portion with the support, thereby deteriorating the releasability.

  From the results of this experiment, it is considered that at least the primary particle size must be 15 nm or less and the secondary particle size must be 40 nm or less in order for the silica fine particles to exhibit a desired release function. Further, since it is considered that the smaller the particle size of the silica fine particles, the better the releasability, it is considered that the lower limit value of the particle size range exhibiting a desired release function is naturally determined from the molecular size of silica.

DESCRIPTION OF SYMBOLS 10 Inorganic crystalline film laminated body 11 Support body 12 Release layer 13A Amorphous inorganic material film 13B Inorganic crystalline film 14 Base material 20 Laminated body 23B which consists of PET film / adhesive layer / hydroxyapatite crystalline film 24A Hydroxyapatite crystalline film 24 PET film 25 Adhesive layer (UV curable resin)

Claims (8)

Forming a release layer composed of inorganic fine particles on a support;
Forming an amorphous material film in an amorphous state on the release layer;
Crystallization of the amorphous inorganic material film by heat treatment;
A method for producing an inorganic crystal film, comprising: The method for producing an inorganic crystal film according to claim 1, further comprising a step of transferring the inorganic crystal film onto a substrate.   The method for producing an inorganic crystal film according to claim 1, wherein the temperature of the heat treatment is 310 ° C. or higher.   The method for producing an inorganic crystal film according to claim 1, wherein the inorganic fine particles have a secondary particle size of 40 nm or less.   The method for producing an inorganic crystal film according to any one of claims 1 to 4, wherein the inorganic fine particles are silica fine particles.   The said base material is a resin film, The manufacturing method of the inorganic crystal film of any one of Claims 1-5 characterized by the above-mentioned.   The method for manufacturing an inorganic crystal film according to claim 1, wherein the inorganic material is indium tin oxide (ITO).   The method for producing an inorganic crystal film according to claim 1, wherein the amorphous inorganic material film is formed by a sputtering method.

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