JP2013181799A - Physical quantity detection device, electronic apparatus - Google Patents

Abstract

Provided is a physical quantity detection device which is not easily destroyed even when an overload is applied.
A physical quantity detection device (1) includes a package base (21), a base part (10) fixed to a step part (23a) provided on the package base (21), and a movable part that is supported by the base part (10) and is displaced according to a change in physical quantity. A flat plate-shaped cantilever 9 having a portion 12, a support frame portion 14 that is continuous with the base portion 10 and extends along the periphery of the movable portion 12, and the base portion 10 and the movable portion 12. With respect to the fixed physical quantity detection element 13, the mass portion 15 arranged on the main surface of the movable portion 12, and the support frame portion 14, the support frame portion 14 overlaps with the support frame portion 14 in plan view. Brake members 40 and 50 provided in the package base 21 with a gap between the side surface and both front and back surfaces.

Description

  The present invention relates to a physical quantity detection device and an electronic apparatus including the physical quantity detection device.

Conventionally, there is an accelerometer that detects a change in resonance frequency of a force detection element to which a load given by vibrational movement along a detection axis is applied. Such an accelerometer has a support and a movable mass connected by the support and the hinge, and is supported across the hinge so that force is applied to the force detection element according to the movement of the movable mass. A device in which a force detection element is bonded and fixed to a body and a movable mass portion with a relatively large surface area is known.
In addition, when a force more than expected acts on the movable mass portion, excessive movement of the movable mass portion is restricted by squeeze, film, gas, and braking (see, for example, Patent Document 1).

JP-A-8-54411

  In the accelerometer according to Patent Document 1, the force detection element is bonded and fixed to the movable mass portion with a relatively large area, and is heated at 180 ° C. to 200 ° C. in the process of bonding and fixing. At this time, even if the linear coefficient of expansion of the force detection element, the support and the movable mass part is the same, the expansion and contraction of the support and the movable mass part having a size larger than that of the force detection element is larger than the expansion and contraction of the force detection element. Since it becomes large, distortion may occur in the force detection element, and the influence of the distortion may appear as acceleration.

  In addition, when a force more than expected is applied to the movable mass unit, the movement of the movable mass unit in the forward and reverse directions is restricted using squeeze, film, gas, and braking. It is very difficult to control the amount of motion in the reverse direction in the same way.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A physical quantity detection device according to this application example includes a package base, a base part fixed to a step part provided in the package base, and a base part supported by the base part, which is displaced according to a change in physical quantity. A flat plate-shaped cantilever having a movable portion that is continuous with the base portion and extending along the periphery of the movable portion, and is fixed by being spanned between the base portion and the movable portion. The physical quantity detection element, the mass part arranged on the main surface of the movable part, and the support frame part overlap the support frame part in plan view, and the side and front and back sides of the support frame part And a braking member provided on the package base with a gap between both surfaces.

  The cantilever is bonded and fixed to the package base in a state where the physical quantity detection element is fixed, but heating at 180 ° C. to 200 ° C. may be performed in the process of bonding and fixing. At this time, even if the linear expansion coefficients of the physical quantity detection element and the cantilever are the same, the expansion and contraction of the cantilever that is larger in size than the physical quantity detection element is larger than the expansion and contraction of the physical quantity detection element. Therefore, the influence of the generated strain on the resonance frequency cannot be ignored. Accordingly, it is desirable that the base portion of the cantilever be a fixed portion and the side opposite to the base portion of the support frame portion be a free end. However, if the support frame is a free end, the cantilever can be destroyed when a load (for example, acceleration) more than expected is applied.

  According to this application example, the braking member for restricting the movement of the support frame portion beyond the assumption is provided. Since the braking member has a gap between the side surface and both front and back surfaces of the support frame portion, it does not hinder expansion and contraction of the support frame portion due to temperature change. Therefore, it is possible to suppress the occurrence of distortion of the physical quantity detection element due to the extension of the support frame when heated at a high temperature, and to eliminate the influence on the resonance frequency caused by this distortion.

Further, when the free end of the support frame part is displaced by a gap in the thickness direction with the brake member, the displacement of the support frame part can be restricted to the range of the gap by contacting the brake member. Destruction can be prevented. Note that a portion of the mass portion and the support frame portion intersect with a gap. Therefore, when the mass portion is displaced by the gap, it comes into contact with the support frame portion. Since the amount of movement of the support frame portion is regulated by the braking member, the amount of movement of the movable portion can be regulated within a range corresponding to the gap between the support frame portion and the braking member.
Therefore, the physical quantity detection device of this application example can avoid the influence on the resonance frequency due to the temperature change and the breakage of the cantilever due to the displacement exceeding the strength limit from the outside.

  Furthermore, compared to the conventional technology that controls the amount of movement using squeeze, film, gas, and braking when a force exceeding the expected force is applied to the mass part, the support frame part results as a result of dimensional management of the support frame part of the braking member. Thus, there is an effect that the amount of movement of the movable part can be easily controlled.

  Application Example 2 In the physical quantity detection device according to the application example described above, the braking members are disposed on the distal end portion of the support frame portion opposite to the base portion, or on both sides in the width direction of the distal end portion. Are preferred.

  As described above, since the braking member is disposed at the distal end portion (that is, the unfixed free end portion) of the support frame portion, the amount of movement of the movable portion is smaller than the case where it is disposed near the base portion. And can be managed with high accuracy.

  Application Example 3 In the physical quantity detection device according to the application example, the braking member includes a fixing portion that fixes the braking member to the package base, and the support frame member that sandwiches the thickness direction of the support frame portion from both front and back surfaces. It is preferable to include a restricting portion made of a slope whose side is open.

  If it does in this way, the clearance gap which does not prevent expansion / contraction of a support frame part by a control part, and the clearance gap of the direction which cross | intersects the main surface of a support frame part are securable. Since the restricting portion is formed by an inclined surface, it is possible to mount the distal end portion of the support frame portion using the inclined surface of the restricting portion after fixing the braking member to the package base.

  Application Example 4 In the physical quantity detection device according to the application example described above, an upper restriction portion and a lower restriction portion projecting so as to sandwich a part of the package base with a gap on both sides in the thickness direction of the support frame portion. It is preferable to consist of

  As described above, if a part of the package base protrudes toward the support frame, the braking member can be configured without increasing the number of components. For example, if the package base is a laminated body of ceramic green sheets, a part of the green sheets may be protruded.

  Application Example 5 In the physical quantity detection device according to the application example described above, the braking member includes a lower regulation portion in which a part of the package base protrudes from a lower portion in the thickness direction of the support frame portion, and the support frame portion And an upper regulating member arranged at the upper part in the thickness direction.

If it does in this way, when a support frame part contacts the lower part regulation part or the upper part regulation part for a predetermined gap, the displacement of a movable part can be regulated to the range of the gap.
In addition, the physical quantity detection device can be easily assembled by fixing the upper restriction member to the package base after placing the support frame part on the lower restriction part with the mass part and the physical quantity detection element attached.

  Application Example 6 In the physical quantity detection device according to the application example described above, the braking member includes a fixing portion that fixes the braking member to the package base, a rising portion that is substantially orthogonal to the fixing portion, and the rising portion. Preferably, the support frame portion includes an upper restricting portion and a lower restricting portion extending substantially in parallel so as to sandwich both sides in the thickness direction with a gap.

Even with such a configuration, when the support frame part is displaced by a gap with the upper restriction part or the lower restriction part, the support frame part comes into contact with the braking member, thereby restricting the displacement of the movable part within the range of the gap. Can do.
In such a configuration, the braking member may be fixed to the package base after temporarily mounting the braking member on the support frame in a state where the mass portion and the physical quantity detection element are attached.

  Application Example 7 In the physical quantity detection device according to the application example described above, a lid for sealing the opening of the package base is further provided, and the braking member includes a part of the package base in the thickness direction of the support frame portion. It is preferable that the lower restricting portion protruded from the lower portion of the upper portion and an upper restricting member protruding from the lid toward the support frame portion.

The application example is a structure in which both sides in the thickness direction of the support frame portion are sandwiched between a lower restricting portion provided on the package base and an upper restricting portion provided on the lid. Even in this case, the displacement of the support frame part can be regulated within the range of the gap by contacting the support frame part with the lower regulation part or the upper regulation part when the support frame part is displaced by a predetermined gap.
In addition, the brake member can be configured by mounting the support frame portion with the mass portion and the physical quantity detection element attached in the package base and then fixing the lid to the package base.

  Application Example 8 An electronic apparatus according to this application example includes the physical quantity detection device according to any one of the application examples described above and at least a physical quantity detection circuit.

  According to this application example, by using the physical quantity detection device described in any of the application examples, it is possible to provide an electronic apparatus that exhibits the effects described in the application example.

The physical quantity detection device which concerns on Embodiment 1 is shown, (a) is a top view, (b) is sectional drawing which shows the AA cut surface of (a). The braking member which concerns on Embodiment 1 is shown, (a) is a perspective view, (b) is the side view which visually recognized the braking member from the braking member side. FIG. 3 is a cross-sectional view schematically illustrating the operation of the physical quantity detection device according to the first embodiment, where (a) illustrates a state in which the movable part is displaced in the −Z direction, and (b) illustrates a displacement of the movable part in the + Z direction. Shows the state. FIG. 6 is a plan view showing a physical quantity detection device according to a modification of the first embodiment. FIG. 6 is a cross-sectional view illustrating a physical quantity detection device according to a second embodiment. The physical quantity detection device which concerns on Embodiment 3 is shown, (a) is sectional drawing which shows Example 1, (b) is a fragmentary sectional view which shows Example 2. FIG. The physical quantity detection element which concerns on Embodiment 4 is shown, (a) is sectional drawing visually recognized from the front end direction of the support frame part, (b) is a perspective view which shows a braking member. FIG. 6 is a cross-sectional view showing a physical quantity detection device according to a fifth embodiment. FIG. 9 is a plan view showing a physical quantity detection device according to a sixth embodiment. The model perspective view which illustrates the inclinometer as an example of an electronic device.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The drawings referred to in the following description are schematic views in which the vertical and horizontal scales of each member or part are different from actual ones in order to make each member a recognizable size.
(Physical quantity detection device)
First, specific embodiments of the physical quantity detection device will be described.
(Embodiment 1)

  1A and 1B show a physical quantity detection device according to a first embodiment, where FIG. 1A is a plan view and FIG. 1B is a cross-sectional view taken along the line AA in FIG. As shown in FIGS. 1A and 1B, the physical quantity detection device 1 of this embodiment is configured by storing a physical quantity detector 2 inside a package 20. The physical quantity detector 2 includes a base part 10, a movable part 12 that extends to the base part 10 via a joint part 11 and is displaced according to a change in physical quantity, a base part 10, and a peripheral part of the movable part 12. A flat plate-shaped cantilever 9 having a support frame portion 14 extending along, a base portion 10 and a movable portion 12, and fixed by an adhesive 16, and resonates according to the displacement of the movable portion 12. The physical quantity detection element 13 whose frequency changes, and a mass part 15 which is arranged so as to partially overlap the first main surface 12a of the movable part 12 with a support frame part 14 and a gap c. Yes. Also on the second main surface 12b facing the first main surface 12a, the mass portion 15 is arranged at a symmetrical position with respect to the mass portion 15 arranged on the first main surface 12a side. Further, each of the mass portion 15 and the first main surface 12a and the second main surface 12b are bonded and fixed by an adhesive 30 having a predetermined thickness.

  For example, the cantilever 9 is integrally formed in a substantially flat plate shape using a quartz substrate cut out at a predetermined angle from a quartz crystal or the like. The outer shapes of the base part 10, the joint part 11, the movable part 12, and the support frame part 14 are accurately formed using techniques such as photolithography and etching. Between the movable part 12 and the support frame part 14, the slit-shaped hole which divides | segments both is provided.

As shown in FIG. 2B, the joint portion 11 separates the base portion 10 and the movable portion 12 by a groove portion along the X direction by half etching from both the first main surface 12a and the second main surface 12b. It is formed as follows. The joint portion 11 has a substantially H-shaped cross section.
By this joint portion 11, the movable portion 12 causes the first main surface to have the joint portion 11 as a fulcrum (rotating shaft) according to a physical quantity (for example, acceleration) applied in a direction (Z direction) intersecting the first main surface 12a. It is displaced in a direction (Z direction) intersecting the surface 12a. Therefore, the joint part 11 has a function of a hinge.

  For the mass portion 15, for example, a material having a relatively large specific gravity represented by a metal such as Cu or Au is used. In the present embodiment, as shown in FIG. 1A, the mass portion 15 has a free end on the opposite side of the joint portion 11 side of the movable portion 12 in order to increase the mass as much as possible within the plane size of the cantilever 9. From the side, it extends to the vicinity of the joint portion 11 within a range that does not overlap the physical quantity detection element 13, and has a substantially U shape in plan view.

  In the region B where the mass portion 15 and the support frame portion 14 indicated by hatching in FIG. 1A overlap, a gap C is provided between the mass portion 15 and the support frame portion 14 as shown in FIG. It has been. In the present embodiment, the gap c is managed by the thickness of the adhesive 30.

As shown in FIG. 1A, the physical quantity detection element 13 extends in a direction connecting the base portion 10 and the movable portion 12 (Y direction), and vibrating beam portions 13a and 13b that bend and vibrate in the X direction. And a first base portion 13d and a second base portion 13e that connect both ends of the vibrating beam portions 13a and 13b. The physical quantity detection element 13 is also called a double tuning fork element (a double tuning fork type vibrating piece) because the two vibrating beam portions 13a and 13b, and the first base portion 13d and the second base portion 13e constitute two sets of tuning forks. It is.
The physical quantity detection element 13 is formed with high accuracy using a technique such as photolithography and etching using a quartz substrate cut out at a predetermined angle from, for example, a quartz crystal or the like.

The material of the physical quantity detection element 13 is not limited to quartz, but lithium tantalate (LiTaO ₃ ), lithium tetraborate (Li ₂ B ₄ O ₇ ), lithium niobate (LiNbO ₃ ), titanate A piezoelectric material such as lead zirconate (PZT), zinc oxide (ZnO), aluminum nitride (AlN), or a semiconductor material such as silicon provided with a piezoelectric material such as zinc oxide (ZnO) or aluminum nitride (AlN) as a film. There may be. However, it is desirable that the physical quantity detection element 13 be the same quality as the cantilever 9 in consideration of reducing the difference in linear expansion coefficient from the cantilever 9 (movable part 12).

  The physical quantity detection element 13 and the cantilever 9 are more preferably formed and arranged so as to be symmetrical with respect to the central axis P.

  As shown in FIG. 1 (a), the physical quantity detection element 13 includes lead electrodes 13f and 13g formed on the second base portion 13e from excitation electrodes (drive electrodes) (not shown) of the vibration beam portions 13a and 13b. Are connected to connection terminals 10c and 10d provided on the first main surface 10a of the base portion 10 by a metal wire 18 such as. Specifically, the extraction electrode 13f is connected to the connection terminal 10d, and the extraction electrode 13g is connected to the connection terminal 10c.

The connection terminals 10c and 10d of the base portion 10 are connected to the connection terminals 10e and 10f on the second main surface 10b of the base portion 10 by wiring (not shown). Specifically, the connection terminal 10d is connected to the connection terminal 10e, and the connection terminal 10c is connected to the connection terminal 10f.
The excitation electrodes, lead electrodes 13f and 13g, and connection terminals 10c, 10d, 10e, and 10f have a structure in which, for example, Cr is used as a base layer and Au is stacked thereon.

Further, as shown in FIG. 1A, the cantilever 9 is fixed to the step portion 23 a of the package base 21 in the base portion 10.
The package base 21 is provided with internal terminals 24 and 25 on a step portion 23a that protrudes from the outer peripheral portion of the inner bottom surface (the bottom surface inside the recess) along the inner wall of the recess.
The internal terminals 24 and 25 are provided at positions facing the connection terminals 10e and 10f provided on the base portion 10 of the cantilever 9 (positions overlapping in plan view). Although illustration is omitted, the connection terminal 10 e is connected to the connection terminal 10 d of the base portion 10, and the connection terminal 10 f is connected to the connection terminal 10 c of the base portion 10.

The package 20 includes a package base 21 having a concave portion having a substantially rectangular planar shape, and a flat lid 22 that seals the concave portion of the package base 21, and has an outer shape of a substantially rectangular parallelepiped shape. In addition, illustration of the lid 22 is abbreviate | omitted in Fig.1 (a).
The package base 21 is made of an aluminum oxide sintered body, quartz, glass, silicon or the like obtained by laminating and firing a plurality of ceramic green sheets.
The lid 22 is made of the same material as the package base 21 or a metal such as Kovar, 42 alloy, or stainless steel.

A pair of external terminals 27 and 28 used for mounting on an external member such as an electronic device are formed on an outer bottom surface (a surface opposite to the inner bottom surface 23, that is, an outer bottom surface) 26 of the package base 21. Yes.
The external terminals 27 and 28 are connected to the internal terminals 24 and 25 by internal wiring (not shown). For example, the external terminal 27 is connected to the internal terminal 24, and the external terminal 28 is connected to the internal terminal 25.
The internal terminals 24 and 25 and the external terminals 27 and 28 are made of a metal film in which films such as Ni and Au are laminated on a metallized layer such as W by a method such as plating.

The package base 21 is provided with a sealing portion 29 that seals the inside of the package 20 at the bottom of the recess.
The sealing portion 29 is formed in a stepped through hole 29a formed in the package base 21 having a hole diameter on the outer bottom surface 26 side larger than the hole diameter on the inner bottom surface 23 side, and a sealing material 29b made of Au / Ge alloy, solder, or the like. The inside of the package 20 is hermetically sealed by charging and solidifying after heating and melting.

  The physical quantity detection device 1 according to the present embodiment includes braking members 40 and 50 that regulate the amount of movement of the distal end portion of the support frame portion 14. The braking member 40 is disposed at the −X direction end of the front end portion of the support frame portion 14, and is fixed to the step portion 23a of the package base 21 by the adhesive 30 in the fixing portion 40a. The upper part 40b extended in the orthogonal direction, and the control part which has the slope which the support frame part 14 side opened so that the thickness direction of the support frame part 14 may be pinched | interposed from both front and back surfaces. Of the restricting portions, the lower slope is referred to as a first restricting portion 40c, and the upper slope is referred to as a second restricting portion 40d.

The braking member 50 is disposed at the + X direction end portion of the front end portion of the support frame portion 14, and is fixed to the step portion 23a of the package base 21 by the adhesive 30 in the fixing portion 50a, and is orthogonal to the fixing portion 50a. And a restricting portion formed of an inclined surface having an opening on the support frame portion 14 side so as to sandwich the thickness direction of the support frame portion 14 from both the front and back surfaces. Among the restricting portions, the lower slope is referred to as a first restricting portion 50c, and the upper slope is referred to as a second restricting portion 50d.
The details of the braking members 40 and 50 will be described with reference to FIG.

  2A and 2B show the braking members 40 and 50 according to the first embodiment, where FIG. 2A is a perspective view and FIG. 2B is a side view of the braking member 40 viewed from the braking member 50 side. As shown in FIG. 2A, the braking member 40 includes a fixed portion 40a, an upright portion 40b, and a restricting portion in which a part of the upright portion 40b is cut out by an inclined surface. The restricting portion includes a first restricting portion 40c on the lower surface side of the support frame portion 14 and a second restricting portion 40d on the upper surface side. The braking member 50 includes a fixed portion 50a, an upright portion 50b, and a restricting portion in which a portion of the upright portion 50b is cut out by an inclined surface. The restricting portion includes a first restricting portion 50c on the lower surface side of the support frame portion 14 and a second restricting portion 50d on the upper surface side. In addition, the braking members 40 and 50 are arrange | positioned so that each control part may become the same position from the central axis P, as shown to Fig.1 (a).

  Next, the relationship between the braking members 40 and 50 and the support frame portion 14 will be described with reference to FIG. The braking member 40 will be described as an example. The braking member 40 includes a first restricting portion 40c and a second restricting portion 40d as restricting portions formed by slopes sandwiching the thickness direction of the support frame portion 14 from both the front and back surfaces. Each of the first restricting portion 40c and the second restricting portion 40d and the support frame portion 14 have a gap d in the Z direction (thickness direction) and a gap e in the Y direction. When the free end of the support frame portion 14 is displaced by the gap d, the gap d comes into contact with the first restricting portion 40c or the second restricting portion 40d, thereby restricting the displacement of the support frame portion 14 to the range corresponding to the gap. . The gap e has a size capable of absorbing the length that the support frame portion 14 extends when heated at a high temperature, and suppresses the occurrence of distortion of the physical quantity detection element 13 due to the extension of the support frame portion 14. To do.

Next, a method for manufacturing the physical quantity detection device 1 of the present embodiment will be described with reference to FIGS.
First, the braking members 40 and 50 are fixed to the stepped portion 23 a on the front end side of the support frame portion 14 of the package base 21 with the adhesive 30. Then, the cantilever 9 in which the physical quantity detection element 13 and the mass unit 15 are fixed is inserted from the obliquely upper side by using the inclined surfaces of the braking members 40 and 50 at the tip end portion of the support frame portion 14. Then, the base portion 10 is bonded and fixed to the package base 21 (step portion 23a). Subsequently, after wiring connection is performed in the configuration as described above, the opening of the package base 21 is sealed with the lid 22 by the bonding member 20a.

In addition, as shown to Fig.2 (a), it is good also as a structure which connects the braking members 40 and 50 by connecting the fixing | fixed part 40a and the fixing | fixed part 50a by the connection part 60. FIG. The brake members 40 and 50 or the integrated brake member can be easily manufactured with high accuracy by metal pressing or the like.
Next, the operation of the physical quantity detection device 1 will be described.

  FIG. 3 is a cross-sectional view schematically illustrating the operation of the physical quantity detection device 1 according to the first embodiment. FIG. 3A illustrates a state in which the movable unit 12 is displaced in the −Z direction, and FIG. The state where the part 12 is displaced in the + Z direction is shown.

  As shown in FIG. 3A, when acceleration in the + Z direction is applied to the physical quantity detector 2, a force acts on the movable part 12 in the -Z direction, and the movable part 12 uses the joint part 11 as a fulcrum. Displacement in the Z direction. Then, a force in a direction in which the first base portion 13d and the second base portion 13e are separated from each other in the Y direction is applied to the physical quantity detection element 13, and tensile stress is generated in the vibrating beam portions 13a and 13b. Therefore, the resonance frequency (vibration frequency) of the vibrating beam portions 13a and 13b is increased.

  On the other hand, as shown in FIG. 3 (b), when acceleration in the −Z direction is applied to the physical quantity detector 2, a force acts in the + Z direction on the movable portion 12, and the movable portion 12 moves the joint portion 11. Displacement in the + Z direction as a fulcrum. Thereby, a force is applied to the physical quantity detection element 13 in the direction in which the first base portion 13d and the second base portion 13e approach each other in the Y direction, and compressive stress is generated in the vibrating beam portions 13a and 13b. Therefore, the resonance frequency of the vibrating beam portions 13a and 13b is lowered.

  The physical quantity detector 2 detects the physical quantity as a change in the resonance frequency of the physical quantity detection element 13 as described above. More specifically, the acceleration applied to the physical quantity detector 2 is derived by converting it into a numerical value determined by a look-up table or the like according to the detected change rate of the resonance frequency.

  When the physical quantity detector 2 is used for an inclinometer, the direction in which the gravitational acceleration is applied to the inclinometer changes according to the change in the inclination posture (inclination angle), and tensile stress is applied to the vibrating beam portions 13a and 13b. And compressive stress occurs. Accordingly, the resonance frequency of the vibrating beam portions 13a and 13b changes.

  In the above example, an example using a so-called double tuning fork element as the physical quantity detection element 13 has been described. However, if the resonance frequency changes according to the displacement of the movable portion 12, the form of the physical quantity detection element 13 is particularly It is not limited.

  As shown in FIG. 3A, when the acceleration applied in the + Z direction is larger than a predetermined magnitude, the physical quantity detector 2 is such that the tip end portion of the support frame portion 14 is the first regulating portions 40c, 50c of the braking members 40, 50. The amount of movement of the support frame portion 14 is regulated by contacting the frame. When the acceleration is larger than a predetermined magnitude, the mass portion 15 fixed to the movable portion 12 may come into contact with the intersecting portion (B region in FIG. 1A) of the support frame portion 14. The physical quantity detection device 1 regulates the amount of movement of the support frame portion 14 that is displaced in the −Z direction by the braking members 40 and 50, and as a result, can regulate the displacement of the movable portion 12 within a predetermined range. .

  On the other hand, as shown in FIG. 3B, when the acceleration applied in the −Z direction is larger than a predetermined magnitude, the physical quantity detector 2 is configured such that the tip of the support frame portion 14 is the second regulating portion of the braking members 40 and 50. The amount of movement of the support frame 14 is regulated by contacting 40d and 50d. In addition, the part (B area | region of Fig.1 (a)) of the support frame part 14 may contact the mass part 15 fixed to the movable part 12 in some cases. The physical quantity detection device 1 regulates the amount of movement of the support frame portion 14 that is displaced in the + Z direction by the braking members 40 and 50, and as a result, the displacement of the movable portion 12 is within a predetermined range (a range corresponding to the gap d). ) Can be regulated.

From the above, it is more preferable that the gap c and the gap d are set to substantially the same size, or the gap c <the gap d.
Further, one of the braking members 40 and 50 may be arranged on the central axis P.

  The physical quantity detection device 1 according to the first embodiment described above includes the braking members 40 and 50 that regulate the amount of movement of the support frame portion 14. Since the braking members 40 and 50 have a gap e that does not hinder the expansion and contraction of the support frame portion 14 due to a temperature change, the distortion of the physical quantity detection element 13 due to the extension of the support frame portion 14 when heated at a high temperature. Generation | occurrence | production can be suppressed and the influence on the resonant frequency resulting from this distortion can be excluded.

Further, when the front end portion (free end) of the support frame portion 14 is displaced by a gap (gap d) in the thickness direction with respect to the braking members 40 and 50, the displacement of the support frame portion 14 is brought into contact with the braking members 40 and 50. Can be regulated within the range corresponding to the gap, and the cantilever 9 can be prevented from being broken. A gap c is also provided between the mass portion 15 and the support frame portion 14, and contacts the support frame portion 14 when the movable portion 12 is displaced by the gap. At this time, the support frame portion 14 is the braking member. By contacting 40 and 50, the amount of movement of the mass part (including the movable part) can be restricted to the gap or the range of the gap between the support frame 14 and the braking members 40 and 50.
Therefore, the physical quantity detection device 1 according to the present embodiment has an influence on the resonance frequency caused by the expansion and contraction of the support frame part 14 due to temperature change, and the damage of the movable part 12 and the physical quantity detection element 13 due to the displacement exceeding the limit of strength from the outside. Can be avoided.

  Further, as in the prior art described above, the brake members 40 and 50 are supported more than the method of controlling the amount of movement using squeeze, film, gas, and braking when a force greater than expected is applied to the mass portion 15. There is an effect that the amount of movement of the support frame portion 14 and the movable portion 12 can be easily controlled by dimensional management for the frame portion 14.

  In addition, since the braking members 40 and 50 are disposed at the distal end portion of the support frame portion 14 on the side opposite to the base portion 10, the mass portion 15 and the support frame are disposed rather than the case where the brake members 40 and 50 are disposed near the base portion 10. The amount of movement of the unit 14 can be small and managed with high accuracy.

Further, since the restricting portion is formed by the first restricting portions 40c and 50c and the second restricting portions 40d and 50d formed of inclined surfaces, the brake members 40 and 50 are supported after being fixed to the step portion 23a of the package base 21. It is possible to easily attach the front end portion of the frame portion 14 using a slope.
Embodiment 1 Modification Example

Note that the positions of the braking members 40 and 50 with respect to the support frame portion 14 are not limited to the distal direction of the support frame portion 14 as described above. For example, you may arrange | position on the width direction both sides of the front-end | tip part of the support frame part 14. FIG.
FIG. 4 is a plan view showing a physical quantity detection device 1 according to a modification of the first embodiment. In FIG. 4, the lid 22 is omitted. In addition, the same code | symbol is attached | subjected to a common part with Embodiment 1, and detailed description is abbreviate | omitted. As shown in FIG. 4, the braking member 40 is arranged in the width direction (+ X direction) of the front end portion of the support frame portion 14, and the braking member 50 is the width of the front end portion of the support frame portion 14 on the side opposite to the braking member 40. It is arranged in the direction (−X direction). The same brake members 40 and 50 as those of the first embodiment (see FIGS. 2A and 2B) can be used.

Also in the modified example, the same effect as in the first embodiment can be obtained only in the arrangement position of the braking members 40 and 50 as compared with the first embodiment. In addition, it is also possible to arrange | position and integrate the control part (1st control part 40c, 50c and 2nd control part 40d, 40e) of each braking member 40,50 so that it may oppose.
(Embodiment 2)

Next, the physical quantity detection device 1 according to the second embodiment will be described. The second embodiment is different from the first embodiment described above in the configuration of the braking member, and the other configurations are the same as those in the first embodiment. In addition, the same code | symbol as Embodiment 1 is attached | subjected to the common part.
FIG. 5 is a cross-sectional view illustrating the physical quantity detection device 1 according to the second embodiment. The present embodiment is characterized in that the braking member is protruded and configured so as to sandwich a part of the package base 21 with a gap on both sides in the thickness direction of the support frame portion 14.
The package base 21 is formed by laminating and firing a plurality of ceramic green sheets. As shown in FIG. 5, a green sheet 21a at a lower position of the support frame portion 14 among the plurality of green sheets is projected toward the support frame portion 14, and the green sheet 21b above the green sheet 21a is supported by the support frame. It protrudes from the tip of the portion 14 with a gap e. The green sheet 21b does not necessarily have to protrude in the direction of the support frame portion 14.

  Further, the green sheet 21 c on the upper side of the green sheet 21 b is projected from the upper position of the support frame portion 14. The protruding amounts of the green sheets 21a and 21c are set as small as possible within a range in which the movement of the support frame portion 14 in the Z direction can be restricted. And the space | interval of each green sheet 21a, 21c and the support frame part 14 is made into the clearance gap d. Here, the green sheet 21a is a lower restricting portion, and the green sheet 21c is an upper restricting portion.

  The physical quantity detection device 1 having such a configuration includes the cantilever 9 in which the physical quantity detection element 13 and the mass unit 15 are fixed, the green sheet 21a serving as the lower regulating unit and the green sheet 21a serving as the upper regulating unit at the tip of the support frame unit 14. The base portion 10 is inserted into the gap formed by the sheet 21c obliquely from above and bonded and fixed to the package base 21 (step portion 23a). Subsequently, after performing wiring connection in the configuration as described above, the lid 22 can be manufactured by sealing the opening of the package base 21 using the bonding member 20a.

  In this way, if two of the green sheets (green sheets 21a and 21c) are protruded so as to sandwich the front and back of the support frame portion 14 with a predetermined gap d, the number of components does not increase. A braking member can be configured.

Even if the formation range of the green sheet 21a as the lower restriction portion and the green sheet 21c as the upper restriction portion is formed over the width of the tip end portion of the support frame portion 14 (the entire X direction), the braking member according to the first embodiment. Like 40 and 50, two places may be sufficient.
(Embodiment 3)

Next, the physical quantity detection device 1 according to the third embodiment will be described. The third embodiment is different from the first embodiment described above in the configuration of the braking member, and the other configurations are the same as those in the first embodiment. Therefore, the differences will be mainly described. In addition, the same code | symbol as Embodiment 1 is attached | subjected to the common part.
6A and 6B show the physical quantity detection device 1 according to the third embodiment, where FIG. 6A is a cross-sectional view showing Example 1, and FIG. 6B is a partial cross-sectional view showing Example 2. First, Example 1 will be described with reference to FIG. As described above, the package base 21 is formed by stacking and firing a plurality of ceramic green sheets. As shown in FIG. 6, the green sheet 21a at the lower position of the support frame portion 14 among the plurality of green sheets is projected toward the support frame portion 14, and the green sheet 21b above the green sheet 21a is supported by the support frame portion. 14 and at least a gap e, and the upper restricting member 51 is protruded to an area that can be fixed.

  The protruding amount of the green sheet 21a and the upper regulating member 51 is set as small as possible within a range in which the movement of the support frame portion 14 in the Z direction can be regulated. And the space | interval of each of the green sheet 21a, the upper control member 51, and the support frame part 14 is made into the clearance gap d. Accordingly, the green sheet 21a corresponds to a lower restricting portion.

  In manufacturing the physical quantity detection device 1 having such a configuration, the cantilever 9 in which the physical quantity detection element 13 and the mass part 15 are fixed is mounted on the green sheet 21a, which is the lower regulating part, with the tip of the support frame part 14 being a base part. 10 is placed on the step portion 23a, and the base portion 10 is bonded and fixed to the package base 21 (step portion 23a). Next, the upper regulating member 51 is bonded and fixed on the green sheet 21b, and after the wiring connection is performed with the configuration as described above, the lid 22 is sealed by the bonding member 20a to seal the opening of the package base 21. Can do. The cantilever 9 in which the upper regulating member 51 is bonded and fixed to the green sheet 21 b in advance and the physical quantity detection element 13 and the mass unit 15 are fixed can be mounted on the package base 21.

  In this way, the support frame portion 14 is brought into contact with the green sheet 21a, which is the lower restricting portion, or the upper restricting member 51 when the support frame portion 14 is displaced by the predetermined gap d. As a result, the amount of movement of the movable part 12 can be restricted.

  In addition, Example 2 shown in FIG.6 (b) has the characteristics in the structure of an upper control member differing from Example 1. FIG. Since other configurations are the same as those of the first embodiment, different points will be described. As shown in FIG. 6B, a green sheet 21a, which is a lower restricting portion, protrudes toward the support frame portion 14, and an upper restricting member 52 is fixed to the upper portion of the green sheet 21a. The upper restricting member 52 has an upright portion 52 a for securing a gap e and a gap d with the support frame portion 14, and an upper restricting portion 52 b that protrudes from the upper portion of the support frame portion 14.

  It is desirable to set the protrusion amounts of the green sheet 21a and the upper restricting portion 52b, which are the lower restricting portions, as small as possible within a range in which the movement of the support frame portion 14 in the Z direction can be restricted.

In addition, the manufacturing method similar to Example 1 mentioned above can be applied to manufacture of the physical quantity detection device 1 by Example 2. FIG.
In the second embodiment, the same effect as that of the first embodiment can be obtained.
(Embodiment 4)

Next, the physical quantity detection device 1 according to the fourth embodiment will be described. The fourth embodiment is different from the first embodiment in the configuration and arrangement of the braking member, and the other configurations are the same as those in the first embodiment. Therefore, the differences will be mainly described. In addition, the same code | symbol as Embodiment 1 is attached | subjected to the common part.
7A and 7B show the physical quantity detection device 1 according to the fourth embodiment, where FIG. 7A is a cross-sectional view viewed from the front end direction of the support frame portion 14, and FIG. 7B is a perspective view showing a braking member. In FIG. 7A, the lid is not shown. As shown in FIG. 7A, in the physical quantity detection device 1, a pair of braking members 70 are disposed on both sides in the X direction of the support frame portion 14.

  The braking member 70 includes a fixing portion that fixes the braking member 70 to the step portion 23a of the package base 21, a rising portion 70c that extends in a direction orthogonal to the fixing portion, and a support frame portion 14 extending from the rising portion 70c. It comprises a lower restricting portion 70a and an upper restricting portion 70b that extend substantially in parallel so as to sandwich the both sides in the thickness direction with a gap d. The lower surface on the step 23a side of the lower restricting portion 70a corresponds to the fixed portion. A gap d is formed between the lower restricting portion 70 a and the support frame portion 14, and between the upper restricting portion 70 b and the support frame portion 14. Further, a gap e is formed between the upright portion 70 c and the support frame portion 14.

  As shown in FIG. 7B, the braking member 70 is provided only at the distal end portion of the support frame portion 14 in the same manner as the positions of the braking members 40 and 50 in the first embodiment (see FIGS. 1A and 4). The shape to arrange | position may be sufficient and the elongate shape (it represents by 70 'in the figure) formed over the length (from front-end | tip part to immediately before base part 10) of the free end of the support frame part 14 may be sufficient.

  The physical quantity detection device 1 having such a configuration is manufactured by the stepped portion 23a of the package base 21 with a pair of braking members 70 temporarily mounted on both sides in the X direction of the cantilever 9 to which the physical quantity detection element 13 and the mass portion 15 are fixed. The base portion 10 is adhesively fixed to the package base 21 (step portion 23 a), and the braking member 70 is adhesively fixed to the package base 21. Subsequently, after wiring connection is performed with the above-described configuration, the lid 22 can be formed by sealing the opening of the package base 21 using the bonding member 20a.

In this way, when the support frame portion 14 is displaced by the gap d between the lower restricting portion 70a or the upper restricting portion 70b, the support frame portion 14 comes into contact with the braking member 70, so that the displacement of the support frame portion 14 is reduced. Can be regulated to a range of
(Embodiment 5)

Next, the physical quantity detection device 1 according to the fifth embodiment will be described. In the first to fourth embodiments described above, the braking member is provided on the package base 21 side, but in the fifth embodiment, a part of the braking member is provided on the lid 22 side. Therefore, the description will be made by attaching the same reference numerals to the portions common to the first embodiment, focusing on the differences.
FIG. 8 is a cross-sectional view illustrating the physical quantity detection device 1 according to the fifth embodiment. In the physical quantity detection device 1, the physical quantity detector 2 is accommodated in the package base 21, and the opening of the package base 21 is sealed with a lid 22.

  As described above, the package base 21 is formed by stacking and firing a plurality of ceramic green sheets. In the present embodiment, the braking member includes a lower restricting portion in which the green sheet 21 a of the package base 21 protrudes from the lower portion in the thickness direction of the support frame portion 14, and an upper portion that protrudes from the lid 22 toward the support frame portion 14. And a restricting member 80. The same shape as the green sheet 21a described in the second embodiment (see FIG. 5) or the third embodiment (see FIG. 6) can be applied to the lower restricting portion made of the green sheet 21a. Further, the upper regulating member 80 is arranged at the distal end portion of the support frame portion 14 and the arrangement position and number thereof are not particularly limited. For example, as in the first embodiment (see FIGS. 1 and 4). It is good also as a structure arrange | positioned as a surface like the structure which provides two places in the same position, Embodiment 2-Embodiment 4 (refer FIG.5, FIG.6, FIG.7). A gap d is provided between the lower end surface 80 a of the upper regulating member 80 and the support frame portion 14.

Even with such a configuration, the same effects as those of the above-described embodiments can be obtained.
Further, the structure in which the upper restricting member 80 protrudes from the lid 22 has an effect of increasing the degree of freedom of the arrangement and number of the upper restricting members.
(Embodiment 6)

Next, the physical quantity detection device according to the sixth embodiment will be described. In the sixth embodiment, the support frame portion of the cantilever is divided into two at the free end side, the divided mass portion is fixed to the movable portion of the cantilever, and the physical quantity detection element is the free end portion of the cantilever. It is characterized by being extended to
FIG. 9 is a plan view showing the physical quantity detection device 3 according to the sixth embodiment. In addition, illustration of wiring and a lid is abbreviate | omitted, and the same code | symbol is attached | subjected to the common part with Embodiment 1 mentioned above.

  In the physical quantity detection device 3 of the present embodiment, the physical quantity detector 4 is accommodated in a container-shaped package base 121. The main configuration of the physical quantity detector 4 is the same as that of each of the embodiments described above, but the physical quantity detection element 113 is fixed to the base portion 110 and the movable portion 112 of the cantilever 109 across the joint portion 111, and the mass portion 115. Are arranged on the + X side and the −X side with the physical quantity detection element 113 interposed therebetween. Note that the mass portion 115 is also disposed on the second main surface 112b side of the movable portion 112 at the same position as the first main surface 112a side.

A portion of the mass portion 115 partially overlaps the protruding portion 114a of the support frame portion 114 (shaded portion in FIG. 9: region B). However, in the region B where the mass portion 115 and the protruding portion 114a overlap, a gap c is provided between the mass portion 115 and the support frame portion 114, as in FIG.
The joining of the cantilever 109 (movable part 112) and the mass part 115 is performed using the adhesive 16 in the same manner as in the first embodiment.
The physical quantity detection element 113 extends from the end of the base part 110 to the free end of the movable part 112.

  In the cantilever 109, in the base portion 110, the connection terminals 10 e and 10 f are connected and fixed to internal terminals 24 and 25 provided on the step portion 123 a of the package base 121. This fixing structure is the same as in the first embodiment. At the distal end portion of the support frame portion 114, the braking member 40 is disposed on the + X side, and the braking member 50 is disposed on the −X side. The brake members 40 and 50 exemplify a modification of the first embodiment (see FIG. 4), but the first embodiment (see FIG. 1), the second embodiment (see FIG. 5), and the third embodiment (see FIG. 4). The configurations of Embodiment 4 (see FIG. 7) and Embodiment 5 (see FIG. 8) are also applicable.

In the physical quantity detection device 3 according to Embodiment 6 described above, the second base 113e of the physical quantity detection element 113 is disposed at the same position as that of the first embodiment, and the first base 113d is moved to the free end of the movable part 112. The vibrating beam portions 113a and 113b are longer than those in the first embodiment. Therefore, the vibration beam portions 113a and 113b are easily expanded and contracted even by a slight displacement of the movable portion 112 due to the application of acceleration, and the configuration aims to increase detection sensitivity.
Even in such a configuration, as in the above-described embodiments, the braking members 40 and 50 are used, and the gap e in the expansion / contraction direction between the braking members 40 and 50 and the support frame portion 114 is appropriately set. Accordingly, it is possible to suppress the occurrence of distortion of the physical quantity detection element 113 due to the extension of the support frame portion 114 when heated at a high temperature, and to eliminate the influence on the resonance frequency caused by this distortion.

Further, by appropriately setting the gap d in the thickness direction between the support frame 114 and the braking members 40 and 50, the support frame portion is brought into contact with the braking members 40 and 50 when the free end is displaced by the gap d. The displacement of 114 can be restricted to the range corresponding to the gap, and the cantilever 109 can be prevented from being broken. A gap c is also provided between the mass part 115 and the support frame part 114, and when the movable part 112 is displaced by the gap, the amount of movement of the movable part 112 is reduced by contacting the support frame part 114. It is possible to regulate the gap or the range corresponding to the gap between the support frame portion 114 and the braking members 40 and 50.
Therefore, the physical quantity detection device 3 according to the present embodiment can avoid damage to the cantilever 109 and the physical quantity detection element 113 due to an influence due to a temperature change or a displacement exceeding the limit of strength from the outside.
(Electronics)

Next, an electronic apparatus including the physical quantity detection device 1 or the physical quantity detection device 3 described in the first to sixth embodiments will be described.
FIG. 10 is a schematic perspective view illustrating an inclinometer as an example of the electronic apparatus. The inclinometer 5 includes the physical quantity detection device 1 or the physical quantity detection device 3 described in any of Embodiments 1 to 6 as an inclination sensor.
The inclinometer 5 is installed at a place to be measured such as a mountain slope, a road slope, or a retaining wall. The inclinometer 5 is supplied with power from the outside via a cable 90 or has a built-in power supply, and a drive signal is sent to the physical quantity detection device 1 or the physical quantity detection device 3 (tilt sensor) by a drive circuit (not shown).
The inclinometer 5 detects a change in the attitude of the inclinometer 5 (change in the direction in which the gravitational acceleration is applied to the inclinometer 5) from a resonance frequency that changes according to the gravitational acceleration applied to the inclinometer by a physical quantity detection circuit (not shown). Then, it is converted into an angle, and data is transferred to the base station by radio, for example. Therefore, the inclinometer 5 can contribute to early detection of an abnormality at the measurement location.

  The physical quantity detection devices 1 and 3 described above are not limited to the inclinometers, but are vibration sensors, seismometers, navigation devices, attitude control devices, game controllers, acceleration sensors used for mobile phones, gravity sensors used for mineral resource surveys, etc. It is suitable for. In any case, it is possible to provide an electronic device that exhibits the effects described in the above-described embodiments.

In each of the above embodiments, the material of the cantilever 9 or the cantilever 109 is not limited to quartz, but may be a semiconductor material such as glass or silicon.
The base material of the physical quantity detection elements 13 and 113 is not limited to quartz, but lithium tantalate (LiTaO ₃ ), lithium tetraborate (Li ₂ B ₄ O ₇ ), lithium niobate (LiNbO ₃ ), Semiconductor such as silicon provided with a piezoelectric material such as lead zirconate titanate (PZT), zinc oxide (ZnO), aluminum nitride (AlN), or a piezoelectric material such as zinc oxide (ZnO), aluminum nitride (AlN) as a coating It may be a material.

  DESCRIPTION OF SYMBOLS 1 ... Physical quantity detection device, 9 ... Cantilever, 10 ... Base part, 11 ... Joint part, 12 ... Movable part, 13 ... Physical quantity detection element, 14 ... Support frame part, 15 ... Mass part, 21 ... Package base, 23a ... Package Base step, 40, 50... Braking member.

Claims (8)

Package base,
A base portion fixed to a step portion provided in the package base; a movable portion supported by the base portion and displaced in accordance with a change in physical quantity; and continuous with the base portion along a periphery of the movable portion. A plate-shaped cantilever having an extended support frame;
A physical quantity detection element that is spanned and fixed between the base portion and the movable portion;
A mass part arranged on the main surface of the movable part,
A brake member that overlaps the support frame portion in plan view with respect to the support frame portion and that is provided on the package base with a gap between the side surface and both front and back surfaces of the support frame portion. A physical quantity detection device characterized by comprising: The braking member is
The tip of the support frame opposite to the base, or disposed on both sides of the tip in the width direction;
The physical quantity detection device according to claim 1. The braking member is
A fixing portion for fixing the braking member to the package base;
A regulation part comprising a slope that opens on the side of the support frame member that sandwiches the thickness direction of the support frame part from both the front and back sides,
The physical quantity detection device according to claim 1, wherein: The braking member is
The upper part and the lower part are provided so as to project a part of the package base with a gap on both sides in the thickness direction of the support frame part;
The physical quantity detection device according to claim 1, wherein: The braking member is
A lower restricting portion projecting a part of the package base at a lower portion in the thickness direction of the support frame portion, and an upper restricting member disposed at an upper portion in the thickness direction of the support frame portion,
The physical quantity detection device according to claim 1, wherein: The braking member is
A fixing portion for fixing the braking member to the package base;
An upright portion that is substantially orthogonal to the fixed portion;
An upper restricting portion and a lower restricting portion extending substantially in parallel so as to sandwich the both sides in the thickness direction of the support frame portion with a gap from the upright portion,
The physical quantity detection device according to claim 1, wherein: A lid for sealing the opening of the package base;
The braking member is
A lower restricting portion projecting a part of the package base at a lower portion in the thickness direction of the support frame portion, and an upper restricting member projecting from the lid toward the support frame portion,
The physical quantity detection device according to claim 1, wherein: The physical quantity detection device according to any one of claims 1 to 7,
At least a physical quantity detection circuit;
An electronic device comprising:

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