JP2013170865A - Physical quantity detection device, physical quantity detector, and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide: an acceleration detection device capable of avoiding damage on a movable part and an acceleration detection element caused by collision of the part and the element with an inner surface of a package and displacement beyond the strength limit; and an acceleration detector and an electronic apparatus including the acceleration detection device.SOLUTION: An acceleration detection device comprises: a base part 10; a movable part 12; a physical quantity detection element 13; a support part 14 including a portion extending from the base part along the movable part in plan view; and a mass part 15 arranged on the movable part. The support part has a free end at an opposite side to the base part side in plan view. A part of the mass part overlaps with the support part respectively in plan view and in front view. The movable part is displaceable in a direction crossing with a principal plane around a joint as fulcrum in accordance with acceleration applied in the direction crossing with the principal plane or gravitational acceleration. A gap is provided between the mass part and the support part respectively in each area where the mass part and the support part overlap with each other.

Description

  The present invention relates to a physical quantity detection device, a physical quantity detector including the physical quantity detection device, and an electronic apparatus.

Patent Document 1 includes a base, a pendulum-type rotating mass that is connected to the base by a hinge joint and can rotate about the hinge joint as a rotation axis, and sensor means that bridges the rotating mass to the base. A pendulum accelerometer (hereinafter referred to as an acceleration detection device) is disclosed.
In the acceleration detecting device, a rotating mass (hereinafter referred to as a movable portion) rotates (hereinafter referred to as a displacement) in accordance with an applied acceleration, whereby a tensile stress or a compressive stress is applied to the sensor means (hereinafter referred to as an acceleration detecting element). The acceleration is detected by the change in the resonance frequency of the acceleration detecting element due to the addition of.
Further, the base of the acceleration detection device includes a base portion that supports one end of the acceleration detection element, two arms that extend in parallel from both longitudinal ends of the base portion along both sides of the movable portion, and extend in parallel. It is a rectangular frame comprising a connecting piece that connects the ends of the two arms.
In this acceleration detection device, the displacement of the movable part is regulated by a container (hereinafter referred to as a package) that houses the acceleration detection device. In other words, the acceleration detection device itself has no component that regulates the displacement of the movable part, so that it can be displaced until the movable part or the acceleration detection element collides with the inner surface of the package.
The U-shaped frame portion composed of the two arms and the connecting piece in Patent Document 1 is effectively used to maintain the mounting accuracy and levelness when the acceleration detecting device is housed in the package. The That is, by providing a U-shaped support step projecting on the inner wall of the box-shaped package, placing a U-shaped frame on this support step and bonding any part, the mounting accuracy, horizontal The degree can be maintained at a high level.

Next, in Patent Document 2, the same cut angle as a beam is formed on a pair of protrusions provided on both surfaces or one surface of a beam made of a quartz plate having one end fixed to a base and a metal weight disposed on the other end. An acceleration sensor in which both ends of a double tuning fork vibrator having a bridge are fixed to each other is disclosed.
By attaching a weight to the quartz plate as in Patent Document 2, it is possible to increase the sensitivity of the acceleration sensor. However, when a quartz plate having no U-shaped frame portion is stored in the package, one end of the quartz plate is stored. When the portion is fixed to the package, the crystal plate is curved and deformed by the weight fixed to the other end, and the defective rate of the product obtained after the adhesive is solidified increases. For this reason, it is necessary to lift the other end with the weight fixed until the adhesive is solidified. As a result, the number of manufacturing steps increased and productivity decreased.

In the acceleration detection device of Patent Document 1, even if a metal weight is fixed to the end of the movable part, the U-shaped frame part is placed on a support step provided in the package and then bonded. Therefore, the mounting accuracy and levelness can be ensured without lifting the end of the movable part with the weight fixed until the adhesive is solidified.
By the way, when attaching a weight to the movable part of the acceleration detection device of patent document 1, like patent document 2, the edge of a movable part cannot be inserted in the groove | channel provided in the end surface of one weight. That is, since the connecting piece, which is a part of the U-shaped frame body part, is arranged opposite to the end of the edge of the movable part, this becomes an obstacle and the weight groove cannot be inserted.
For this reason, when attaching a weight such as copper to the movable part of the acceleration detecting device provided with the U-shaped frame body part, it is necessary to individually bond the weight pieces divided in advance to both surfaces of the movable part. There is. That is, after attaching one weight piece to one surface of the movable part, it is necessary to turn the acceleration detection device over and attach the other weight piece to the other surface of the movable part, which causes an increase in labor. .

In addition, when positioning each weight piece on each surface of the movable part and then bonding it, the position accuracy of the weight piece and displacement in the mounting direction, etc. cause the weight piece to be attached in a non-constant state. It causes the mode to be generated.
Also, in order to avoid the influence of the adhesive on the detection sensitivity by suppressing the thermal stress, there is a limit to the amount of adhesive used, and so-called scoring is performed using the minimum amount of adhesive. There is a need to do. If so-called sticking to fix using a large amount of adhesive, if the ambient temperature of the acceleration sensor using this acceleration detection device changes, due to the difference in linear expansion coefficient between the metal weight and the quartz plate, A large stress is applied to the quartz plate from the weight, and the quartz plate is distorted due to a temperature change, resulting in a variation in temperature characteristics that adversely affects the sensitivity of the acceleration detecting element. Even if each weight piece is attached to the moving part with high accuracy, the weight swings with the solid adhesive as a fulcrum due to the effect of temperature change, generating an unnecessary spurious vibration mode and ideal The characteristic deviates from the typical temperature characteristic. In particular, since the distance between the weight and the acceleration detection element is short, the influence of the weight is so large that it cannot be ignored.
In addition, since the acceleration detection device depends on the package that is an external member because the displacement amount of the movable part depends on the package as an external member, a number of dimensional tolerance factors related to the gap between the movable part (acceleration detection element) and the inner surface of the package (for example There is a possibility that the gap between the movable part and the inner surface of the package varies greatly with respect to the set value due to variations in dimensions of components constituting the package and variations in the position where the acceleration detection device is fixed to the package.

Therefore, when the gap between the movable part and the inner surface of the package is larger than the set value, the acceleration detecting device may be damaged due to the collision of the movable part or the acceleration detecting element with the inner surface of the package depending on the magnitude of the applied acceleration. There is a fear.
Also, if the gap between the movable part and the inner surface of the package is larger than the set value, depending on the magnitude of the applied acceleration, even if the movable part and the acceleration detection element do not collide with the inner surface of the package, the displacement exceeds the limit of strength. May cause damage.
On the other hand, if the gap between the movable part and the inner surface of the package is smaller than the set value, the displacement range of the movable part is smaller than the set value, and therefore the set acceleration detection range may not be satisfied.
It is clear that such a problem becomes more serious when weight pieces are fixed on both surfaces of the movable part.
Further, when a weight is fixed to the movable part of the acceleration detection device of Patent Document 1, means for regulating this against a lateral displacement when vibration in a plane direction perpendicular to the thickness direction of the movable part is applied. Since it does not exist at all, the movable part may be damaged by excessive lateral deformation.

JP-A-1-302166 Japanese Patent Laid-Open No. 02-248866

  The present invention has been made in view of the above, and includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, and an acceleration detection element spanned between the base portion and the movable portion. And a physical quantity detector provided with a part extending along the movable part from the base part in a plan view, without being disturbed by the support part and using a small amount of adhesive. An acceleration detecting element capable of fixing one weight to the edge of the movable portion with high positioning accuracy and capable of regulating not only the displacement in the thickness direction but also the lateral displacement of the movable portion having the weight; An object of the present invention is to provide a physical quantity detection device and an electronic apparatus including the same.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A physical quantity detection device according to this application example includes a base part, a plate-like movable part having one end edge connected to the base part via a joint part, the base part, and the movable part. The physical quantity detection element spanned, the support part having a portion extending along the movable part from the base part in plan view, and the other end edge of the movable part and the both main surfaces are arranged. An end portion on the opposite side of the base portion side in the plan view is a free end portion, and the mass portion is supported in the plan view and the front view. The mass portion and the support portion are configured such that the movable portion can be displaced in a direction intersecting the main surface with the joint portion as a fulcrum according to a physical quantity applied in a direction intersecting the main surface. In each region where the Wherein the gap is provided.

According to this, a single mass part disposed across both main surfaces of the movable part is a gap between the displacement in the thickness direction and the displacement in the plane direction of the movable part that is displaced according to physical quantities such as acceleration and gravitational acceleration. When it is displaced by a minute amount, it can be regulated within a predetermined range by contacting the support portion. Since the support portion which is a component that restricts the displacement of the movable portion is provided in itself, the displacement of the movable portion can be restricted by itself without depending on the package which is an external member. Therefore, for example, the gap between the inner surface of the package and the physical quantity detection device (thickness direction and gap in the surface direction) can be set sufficiently larger than the gap between the mass portion and the support portion. In addition, it is possible to avoid damage to the movable part and the physical quantity detection element due to collision with the inner surface of the package and displacement exceeding the limit of strength.
For example, dimensional variation (dimensional tolerance) of an external member such as a package is not added as a variation factor to variation in the gap between the mass portion and the support portion. From this, it is possible to make the variation in the gap between the mass portion and the support portion smaller than the variation in the gap between the inner surface of the conventional package and the physical quantity detection device. Thereby, the trouble that the displacement in the thickness direction and the surface direction of the movable part is restricted to a range narrower than the setting and the set physical quantity detection range cannot be satisfied can be avoided.
In addition, since the support portion functioning as a stopper for restricting the displacement of the movable portion is provided in itself, the displacement restriction of the movable portion, which is impossible in the conventional configuration, is accommodated in an external member such as a package. You can check before you do. Thereby, compared with the past, the non-defective product rate can be remarkably improved, and problems such as breakage during actual use can be reduced.

  Application Example 2 The center of gravity of the movable part, the physical quantity detecting element, and the mass part is within the thickness range of the movable part.

  The shape of the mass portion can be variously modified depending on the direction (pattern) in which the physical quantity is applied, the number of support portions, and the like, and the vertical cross-sectional shape does not necessarily have to be symmetric. The center of gravity of the mass part only needs to be within the range of the thickness of the movable part, and the function for increasing the detection sensitivity can be sufficiently exhibited.

  Application Example 3 The mass unit includes a fixed portion that fixes the movable portion on one side surface, and the support portion is provided on at least one side surface of the other two side surfaces that do not face the one side surface. And a controlled part that is regulated by the support part when the movable part is deformed in the thickness direction and the surface direction.

  Since at least one side surface of the mass portion has a positional relationship corresponding to the tip portion of the support portion, the support portion tip portion can function as a stopper by providing the regulated portion on the side surface.

  Application Example 4 The restriction portion is a loose fitting groove formed on the at least one side surface.

  By positioning a part of the support portion in the loose fitting groove in a loose fit (non-contact) state, the movable portion is prevented from being excessively deformed not only in the thickness direction but also in the surface direction due to the restriction by the support portion. be able to.

  Application Example 5 In the physical quantity detection device according to any one of Application Examples 1 to 4, the physical quantity detection element includes at least one vibrating beam extending along a direction connecting the base portion and the movable portion. And a pair of bases connected to both ends of the physical quantity detection unit, wherein one of the bases is fixed to the base unit and the other of the bases is fixed to the movable unit. It is characterized by.

  For example, the vibrating beam expands and contracts in accordance with the displacement of the movable part due to applied acceleration or the like, and a configuration in which a change in the vibration frequency of the vibrating beam due to the tensile stress or compressive stress generated at this time is converted into acceleration (physical quantity) is possible. . This configuration that regulates the displacement of the movable part of the physical quantity detector by itself is more effective in terms of alleviating the impact on the physical quantity detection element including the vibrating beam and avoiding damage to the physical quantity detection element. I can say that.

  Application Example 6 A physical quantity detector includes the physical quantity detection device according to any one of Application Examples 1 to 5 and a package that accommodates the physical quantity detection device.

  According to this, since the physical quantity detection device according to any one of the application examples described above and the package that accommodates the physical quantity detection device are provided, the effect according to any one of the application examples is achieved. A physical quantity detector can be provided.

  Application Example 7 An electronic apparatus according to this application example includes the physical quantity detector described in Application Example 6.

  According to this, since the electronic apparatus includes the physical quantity detector described in Application Example 6, it is possible to provide an electronic apparatus that exhibits the effect described in any one of the above application examples.

(A) And (b) is the external appearance perspective view of the acceleration detection device (physical quantity detection device) of 1st Embodiment, and an exploded perspective view. (A), (b), and (c) are the top view of this acceleration detection device, AA sectional drawing (front longitudinal sectional view), and a left side view. (A) (b) And (c) is the right side perspective view, left side perspective view, and front view which show the structure of an example of a mass part. It is a schematic cross section explaining the operation of the acceleration detection device, (a) is a diagram showing a state in which the movable part is displaced downward (−Z direction) in the figure, (b) is the upper part in the figure (b) It is a figure which shows the state displaced to (+ Z direction). (A) And (b) is a left view which shows the modification of a mass part. (A) And (b) is a left view which shows the other modification of a mass part. (A) is a principal part cross-sectional view which shows the state where the acceleration to a X-axis direction is not added, (b) is acceleration to a X-axis direction,-(c) is an acceleration to a X-axis direction. It is a principal part cross-sectional view which shows the case where + a is added. (A) And (b) is a principal part top view which shows the structure of the device board | substrate which concerns on the modification of this invention. (A) And (b) is the top view which shows the other structural example of the acceleration detection device (physical quantity detection device) of this invention, and a front longitudinal cross-sectional view (CC sectional drawing). (A) (b) And (c) is the perspective view, front view, and right view which show the other structural example of the mass part used for an acceleration detection device. (A) thru | or (d) are the exploded perspective views which show the structure of the acceleration detection device (physical quantity detection device) which concerns on other embodiment of this invention, the perspective view which shows the assembled state, the top view of the assembled state, and It is a perspective view which shows the structure of a mass part. (A) And (b) is a principal part top view which shows the structure of the acceleration detector (physical quantity detector) which accommodated the acceleration detection device of this invention in the package, and DD longitudinal cross-sectional view. It is a model perspective view which shows the inclinometer which concerns on one Embodiment of this invention.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments of the invention will be described with reference to the drawings.
First, an acceleration detection device as an example of the physical quantity detection device of the present invention will be described. FIGS. 1A and 1B are an external perspective view and an exploded perspective view of an acceleration detection device (physical quantity detection device) according to an embodiment of the present invention, and FIGS. ) Is a plan view, AA cross-sectional view (front vertical cross-sectional view), and left side view of the acceleration detecting device, and FIGS. 3A, 3B, and 3C show an example of a configuration of a mass part. They are a right side perspective view, a left side perspective view, and a front view.
In addition, each wiring is abbreviate | omitted and the dimension ratio of each component differs from actual. In addition, the physical quantity detection element of the present invention can be used for detecting various physical quantities such as acceleration, gravitational acceleration, speed, force, and distance, but in the following embodiments, acceleration detection that mainly detects acceleration as an example of a physical quantity. Describe devices.
As shown in FIGS. 1 and 2, the acceleration detection device (physical quantity detection device) 1 includes a flat base portion 10, and a base end portion (drawing, right end) via a joint portion 11 at an inner end edge of the base portion 10. Part), a movable part 12 having a rectangular flat plate shape, an acceleration detection element (physical quantity detection element) 13 spanned between the base part 10 and the movable part 12, and both ends in the width direction of the base part 10 in plan view. Two support portions 14 that extend in parallel with each other along the edges in the width direction of the movable portion 12 from the edge, and a single mass portion (weight portion) 15 that is fixed to the distal end portion of the movable portion, It is equipped with. The base part 10, the joint part 11, the movable part 12, and the support part 14 constitute a device substrate made of the same material (in this example, crystal).

  The acceleration detection device 1 of the present invention is characterized by a base portion 10, a plate-like movable portion 12 having one end edge (base end edge) connected to the base portion via a joint portion 11, the base portion 10 and the movable portion. 12, an acceleration detecting element or a gravitational acceleration detecting element (physical quantity detecting element) 13 straddling the support part 14, a support part 14 having a portion extending from the base part along the movable part 12 in a plan view, and a movable part The support portion 14 has a free end portion on the opposite side to the base portion 10 side in a plan view (tip portion). The mass portion 15 is partially supported by the support portion 14 (supported) in a plan view (direction when viewed along the Z axis) and a front view (direction when viewed along the X axis). 14B), the movable part 12 intersects the main surfaces 12a and 12b. Can be displaced in the direction intersecting the main surface with the joint as a fulcrum according to the acceleration applied in the direction or gravity acceleration (physical quantity), and in each region where the mass part and the support part overlap, the mass part and support There is a configuration in which a gap is provided between each portion.

  Furthermore, another feature is that the position of the center of gravity of the total weight of the mass unit 15, the movable unit 12, and the acceleration detection element 13 when no acceleration is applied is located within the thickness range of the movable unit 12. .

This will be described in more detail below.
The base portion 10, the joint portion 11, the movable portion 12, and the support portion 14 (device substrate) are integrally formed in a substantially flat plate shape using a quartz substrate cut out from a rough crystal or the like at a predetermined angle, for example. . In addition, between the movable part 12 and each support part 14, the slit-shaped hole which divides | segments both is provided. The outer shapes of the base portion 10, the joint portion 11, the movable portion 12, and the support portion 14 are accurately formed using techniques such as photolithography and etching.

The joint portion 11 is orthogonal to the direction connecting the base portion 10 and the movable portion 12 (Y-axis direction) so as to divide the base portion 10 and the movable portion 12 by half-etching from both the main surfaces 12a and 12b. It is comprised from the groove part 11a formed along the direction (X-axis direction). The cross-sectional shape (shape of FIG. 2B) along the Y-axis direction of the joint portion 11 is formed in a substantially H shape by the groove portion 11a. By this joint portion 11, the movable portion 12 causes the principal surface 12a to have the joint portion 11 as a fulcrum (rotation axis) according to the acceleration (physical quantity) applied in the direction (Z-axis direction) intersecting the principal surface 12a (12b). Can be displaced (rotated) in a direction (Z-axis direction) intersecting with.
The two support portions 14 have a base end portion 14A integrated with both end portions of the base portion 10, and a free end-shaped tip portion 14B is a bent portion bent in an L shape inward. That is, the front end portions of the two support portions 14 are arranged so as to face each other without being connected. A space S is formed between the front end edges of each of the front end portions 14B. As described later, the mass portion 15 can be inserted from the outside using this space S and fixed to the front end edge of the movable portion. It becomes possible.

The support portion 14 is disposed (separated) through the slit with respect to the outer peripheral edge (side edges in the width direction) of the movable portion 12, and the distal end portion 14B is disposed at the distal end edge of the movable portion 12 (FIG. 1, FIG. It extends beyond the left edge of FIG.
Each support portion 14 has a plurality (four places here) of fixing portions 14a, 14b, 14c, and 14d that are portions fixed to an external member such as a package and a substrate, and the adjacent fixing portions are adjacent to each other in plan view. (For example, within a range surrounded by lines that do not cross each other, as in the range surrounded by the two-dot chain line in FIG. 2A). The fixing portions 14a to 14d are arranged so that the center of gravity G of the acceleration detection device 1 is located. In addition, when there are two fixing portions, it is only necessary that the two fixing portions are arranged so that the center of gravity G is positioned on a straight line connecting the fixing portions.

The mass portion 15 is a non-divided single body, and a part of the mass portion 15 and the distal end portion 14B of at least one support portion 14 in plan view so as to sandwich both main surfaces 12a and 12b between the distal end edges of the movable portion. It is fixed via an adhesive so as to overlap.
For the mass portion 15, for example, a material having a relatively large specific gravity represented by a metal such as Cu or Au is used. As shown in FIG. 3, the mass portion 15 has a substantially rectangular parallelepiped shape with a substantially H-shaped side surface, and supports the distal end edge of the movable portion 12 by inserting the distal end edge of the movable portion 12 opposite to the distal end edge. For this purpose, a slit-like fixing groove (fixing portion) 30 extending in the lateral direction is formed over the entire lateral width of the end face. The vertical width of the fixed groove 30 is set slightly larger than the thickness of the leading edge of the movable part to such an extent that it can be bonded and fixed by the adhesive 16 with the leading edge of the movable part inserted. In this example, although the width direction dimension of the mass part 15 is set to be equal to the width direction dimension of the distal end of the movable part 12, it may be slightly narrower or wider. That is, the width direction dimension W3 of the side surface of the mass part 15 may be equal to the width direction dimension W4 of the device substrate (10, 11, 12, 14), may be short, or may be long.

On both side surfaces of the mass portion 15 in the width direction, there are loose fitting grooves (restricted portions) 32 for receiving the bent tip portions (free end portions) 14B of the two support portions in a non-contact state. It is formed over the entire length. The loose fitting groove 32 is formed in the middle portion in the thickness direction on both side surfaces in the width direction of the mass portion 15 so as to have a vertical width exceeding the thickness of the support portion front end portion 14B. In other words, the loose fitting groove 32 is formed between the upper and lower overhanging portions (restricted portions) 33 and 34 projecting from both end surfaces in the width direction of the mass portion. The width direction dimension W1 of the intermediate part (controlled part) 35 located between the two loose fitting grooves 32 is set to be sufficiently smaller than the dimension W2 of the space S between the inner end edges of the two support part front end parts 14B. Has been. Further, the width direction dimension W3 of the mass portion 15 is set larger than the space S.
Accordingly, as shown in FIG. 1B, by moving the fixed groove 30 closer to the distal end edge of the movable part while inserting each loose fitting groove 32 of the mass part 15 into the space S from the outside of the both support parts 14, As shown in FIG. 1A, the leading edge of the movable part can be inserted into the fixed groove 30. In the fixed groove (fixed portion) 30 of the mass portion 15, each support portion is fixed in a state where the movable portion tip edge is inserted and positioned and fixed so that the center portion c1 of the movable portion tip edge coincides with the center portion c2 of the mass portion. The loose fitting grooves 32 (the overhanging portions 33 and 34 so that the inner end edges of the front end portions 14B enter the respective loose fitting grooves 32 in a loosely fitted state and are not in contact with the inner surfaces of the loose fitting grooves. The shape and dimensions of the intermediate part 35) are set.

Of course, the shape of the fixed groove 30 is set so that the leading edge of the movable part and the left and right side surfaces of the mass part are parallel when the leading edge of the movable part and the inner back part of the fixed groove 30 come into contact with each other.
In the state where the mass portion is correctly positioned and fixed to the movable portion as shown in FIGS. 1A and 2, the inner surface of the loose fitting groove 32 (the lower surface of the overhang portion 33, the upper surface of the overhang portion 34, and both side surfaces of the intermediate portion 35). When the movable part 12 is not displaced in the Z-axis direction (thickness direction) and the X-axis direction (plane direction), the movable part 12 is not in contact with the tip part 14B, while the movable part is in the thickness direction. Only when it is displaced by a predetermined distance or more in the surface direction (lateral direction), the tip portion 14B functioning as a stopper is brought into contact with the upper and lower surfaces or the inner wall of the loose fitting groove, so that the displacement in each direction is restricted. The shape and dimensions are set so that

As shown in FIGS. 2B and 2C, a gap S1 is formed between the upper and lower surfaces of the distal end portion 14B and the upper and lower surfaces of the loose fitting groove 32, and the inner edge of the distal end portion 14B and the loose fitting groove 32 are formed. A gap S2 is formed between the inner wall (the front and rear walls of the intermediate portion 35). The vertical gap S1 is easy to manage by inserting and fixing the fixed groove 30 of the mass part into the distal end edge of the movable part, and the gap S2 in the surface direction is the lateral position of the mass part with respect to the distal end edge of the movable part. It can be managed accurately by determining with high accuracy.
For this reason, it is not necessary to avoid a collision with the movable part or to prevent the movable part from being excessively deformed in relation to the shape and size of the package inner wall as in the prior art.

  In addition, a space S is formed between the front end portions 14B of the two support portions, and the loose fitting grooves (regulated portions) 32 formed on both side surfaces of the mass portion 15 have inner surfaces (projected portions 33, 34 and the intermediate portion 35) are set and shaped so as not to contact the two tip portions 14B, so that the mass portion 15 is inserted from the outside of the space S as shown in FIG. Thus, the fixing is completed simply by inserting the leading edge of the movable portion 12 into the fixing groove 30 and adhering with the adhesive 16. The adhesive is fixed in advance to either (or both) the fixed groove 30 or the leading edge of the movable part, and the adhesive is straddled across both members with the movable part leading edge inserted into the fixed groove 30. Configure to be applied.

Since the mass portion 15 of the present invention is composed of a single member, productivity is reduced because the weight pieces divided in advance are individually bonded to both surfaces of the movable portion, respectively, as in the past. In addition, since the positional accuracy and the mounting direction are likely to be shifted, the mounting state of each weight piece is not constant, which can solve the problem of generating an unnecessary spurious vibration mode.
The mass portion 15 extends from the distal end side (free end side) opposite to the joint portion 11 side of the movable portion 12 to the front side of the acceleration detection element (physical quantity detection element) 13 in order to increase the planar size as much as possible. Yes. As will be described later, the mass portion 15 may be extended to the vicinity of the joint portion 11 in a bifurcated manner while avoiding the acceleration detecting element 13, and may be formed in a substantially U shape in plan view.

Since the mass portion 15 is a solid unit manufactured by, for example, machining, the resonance point is high, and the mass portion 15 is less susceptible to spurious effects than when the mass portion is divided into two. Yes.
For the adhesive 16, for example, a silicone resin thermosetting adhesive is used. The adhesive 16 is applied in advance to either the mass part 15 or the leading edge of the movable part. From the viewpoint of suppressing thermal stress, the adhesive is preferably applied so as to adhere a narrow range of a part of the movable portion 12 and the mass portion 15. Compared to the conventional example in which the mass portion is composed of two divided pieces, by making the mass portion 15 as an integral body, the bonding operation is completed at one time, and the number of manufacturing steps is reduced.

  The acceleration detection element (physical quantity detection element) 13 has at least one (two in this case) prismatic shape extending in the direction connecting the base portion 10 and the movable portion 12 (Y-axis direction), and has an X-axis. An acceleration detector 13c having vibrating beams 13a and 13b that flexurally vibrate in a direction, and a pair of bases 13d and 13e connected to both ends of the acceleration detector (physical quantity detector) 13c are provided. The acceleration detecting element 13 is also called a double tuning fork element (double tuning fork type vibrating piece) because the two vibrating beams 13a and 13b and the pair of base portions 13d and 13e constitute two sets of tuning forks. For example, the acceleration detection element 13 is formed of a quartz substrate cut out from a quartz crystal or the like at a predetermined angle, and the acceleration detection unit 13c and the bases 13d and 13e are integrally formed in a substantially flat plate shape. Further, the outer shape of the acceleration detecting element 13 is accurately formed by using techniques such as photolithography and etching.

  In the acceleration detecting element 13, one base portion 13d is fixed to the main surface 12a side of the movable portion 12 via, for example, a bonding member 17 such as a low melting point glass or an Au / Sn alloy coating capable of eutectic bonding. The base portion 13 e is fixed to the main surface 10 a side of the base portion 10 (the same side as the main surface 12 a of the movable portion 12) via the joining member 17. In addition, between the acceleration detection element 13 and the main surface 10a of the base part 10 and the main surface 12a of the movable part 12, when the movable part 12 is displaced, the acceleration detection element 13, the base part 10 and the movable part 12 are mutually connected. A predetermined gap is provided to prevent contact. This gap is managed by the thickness of the joining member 17 in this embodiment.

  The acceleration detecting element 13 includes lead electrodes 13f and 13g drawn out from excitation electrodes (drive electrodes) (not shown) of the vibrating beams 13a and 13b to the base portion 13e by metal wires 18 such as Au and Al. It is connected to connection terminals 10b and 10c provided on the main surface 10a. Specifically, the lead electrode 13f is connected to the connection terminal 10b, and the lead electrode 13g is connected to the connection terminal 10c. The connection terminals 10b and 10c of the base part 10 are connected to the external connection terminals 14e and 14f of the support part 14 by wiring not shown. Specifically, the connection terminal 10b is connected to the external connection terminal 14e, and the connection terminal 10c is connected to the external connection terminal 14f. The excitation electrodes, lead electrodes 13f and 13g, connection terminals 10b and 10c, and external connection terminals 14e and 14f have a structure in which, for example, Cr is used as a base layer and Au is stacked thereon.

Next, the operation of the acceleration detection device 1 will be described.
FIG. 4 is a schematic cross-sectional view for explaining the operation of the acceleration detection device. 4A shows a state in which the movable part is displaced downward (−Z direction) in the figure, and FIG. 4B shows a state in which the movable part is displaced upward in the figure (+ Z direction).
As shown in FIG. 4A, the acceleration detecting device 1 detects the acceleration when the movable portion 12 is displaced in the −Z direction with the joint portion 11 as a fulcrum according to the acceleration −g applied in the Z-axis direction. A tensile force is applied to the element 13 in a direction in which the base portion 13d and the base portion 13e are separated from each other in the Y-axis direction, and tensile stress is generated in the vibration beams 13a and 13b of the acceleration detection portion 13c. Thereby, the acceleration detection device 1 changes to the one where the vibration frequency (henceforth a resonance frequency) of the vibration beams 13a and 13b of the acceleration detection part 13c becomes high like the string of the wound stringed instrument, for example.

On the other hand, as shown in FIG. 4B, the acceleration detection device 1 detects the acceleration when the movable part 12 is displaced in the + Z direction with the joint part 11 as a fulcrum according to the acceleration + g applied in the Z-axis direction. A compressive force is applied to the element 13 in a direction in which the base 13d and the base 13e approach each other in the Y-axis direction, and compressive stress is generated in the vibrating beams 13a and 13b of the acceleration detector 13c. Thereby, the acceleration detection device 1 changes so that the resonant frequency of the vibration beams 13a and 13b of the acceleration detection part 13c becomes low like the string of the rewinded stringed instrument, for example.
The acceleration detection device 1 detects this change in resonance frequency. The acceleration (+ g, -g) applied in the Z-axis direction is derived by converting it into a numerical value determined by a look-up table or the like according to the detected change rate of the resonance frequency.

Here, as shown in FIG. 4A, the acceleration detecting device 1 is provided on both side surfaces of the mass portion 15 fixed to the movable portion 12 when the acceleration −g applied in the Z-axis direction is larger than a predetermined size. The upper surface of the tip portion 14 </ b> B comes into contact with the ceiling surface of the formed loose fitting groove (restricted portion) 32. Thereby, the acceleration detection device 1 regulates the displacement of the movable part 12 that is displaced in the −Z direction according to the acceleration −g within a predetermined range (corresponding to the gap S1).
On the other hand, as shown in FIG. 4B, the acceleration detection device 1 is formed on both side surfaces of the mass portion 15 fixed to the movable portion 12 when the acceleration + g applied in the Z-axis direction is larger than a predetermined size. The bottom surface of the distal end portion 14B contacts the bottom surface of the loose fitting groove 32. Thereby, the acceleration detection device 1 regulates the displacement of the movable portion 12 that is displaced in the + Z direction according to the acceleration + g within a predetermined range (corresponding to the gap S1).

  As described above, the acceleration detection device 1 of the present embodiment has a mass so that the leading end portions 14B of the respective support portions are loosely fitted across the main surfaces 12a and 12b of the movable portion 12 and in the loose fitting grooves 32. The portion 15 is disposed and can be displaced in the Z-axis direction with the joint portion 11 as a fulcrum according to the acceleration (+ g, −g) applied to the movable portion 12 in the Z-axis direction. And a front end portion 14B of the support portion is provided with a vertical gap S1. From this, the acceleration detection device 1 is configured such that the mass portion 15 fixed across the two principal surfaces 12a and 12b of the movable portion 12 has a clearance S1 as the displacement of the movable portion 12 that is displaced in the Z-axis direction according to the acceleration. By being displaced and coming into contact with the support portion 14, it can be regulated within a predetermined range.

  As a result, since the acceleration detection device 1 is provided with the tip end portion 14B of the support portion 14 serving as a stopper for restricting the displacement of the movable portion 12, the movable portion 12 does not depend on, for example, a package that is an external member. It becomes possible to regulate the displacement of itself. Therefore, in the acceleration detection device 1, for example, the gap between the inner surface of the package, which is an external member, and the acceleration detection device 1 is set to be sufficiently larger than the vertical gap S1 between the loose fitting groove 32 of the mass portion 15 and the support portion 14. This makes it possible to avoid damage to the movable portion 12 and the acceleration detecting element 13 due to a collision with the inner surface of the package and a displacement exceeding the limit of the strength as in the prior art.

In addition, in the acceleration detection device 1, the variation in the gap S1 between the inner wall of the loose fitting groove 32 of the mass portion 15 and the tip end portion 14B of the support portion is caused by, for example, the dimensional variation (dimensional tolerance) of an external member such as a package. It is not added as a variation factor. Therefore, the acceleration detection device 1 has a smaller variation in the gap S1 between the upper and lower inner walls of the loose fitting groove 32 and the tip end portion 14B of the support portion than the variation in the gap between the conventional package inner surface and the acceleration detection device. It becomes possible to do. Thereby, the acceleration detection device 1 can avoid the trouble that the displacement of the movable portion 12 is restricted to a range narrower than the setting and cannot satisfy the set acceleration detection range, as in the prior art.
Further, since the acceleration detection device 1 is provided with the support portion distal end portion 14B for restricting the displacement of the movable portion 12, the acceleration detection device 1 can regulate the displacement of the movable portion 12, which is impossible with the conventional configuration. For example, it can be confirmed before being housed in an external member such as a package. Thereby, compared with the past, the acceleration detection device 1 can improve a non-defective product rate markedly, and can reduce problems, such as breakage at the time of actual use.

Further, the acceleration detection device 1 does not have a U-shape when the tip portion of the support portion 14 is continuous in a plan view, and is a substantially rectangular annular shape surrounding the movable portion 12 by the support portion and the base portion 10. It is not. For this reason, when an external stress is applied to the acceleration detection device, the support portion 14 can be flexibly deformed with respect to the base portion 10 to reduce spurious due to the external stress, and the adverse effect is applied to the acceleration detection element 13. Can be prevented.
Further, the acceleration detection device 1 has four support portions 14 a to 14 d in the support portion 14, and the center of gravity G of the acceleration detection device is located within a range surrounded by connecting the adjacent fixed portions in plan view. Thus, the fixing portions 14a to 14d are arranged. From this, the acceleration detection device 1 can be fixed to an external member such as a package in a stable posture without inclining in any direction. In the case where the acceleration detecting device 1 has two fixing portions, the same effect can be obtained if the two fixing portions are arranged so that the center of gravity G is positioned on a straight line connecting the fixing portions. Can play.

  The acceleration detection element 13 includes an acceleration detection unit 13c having two vibrating beams 13a and 13b extending along the Y-axis direction, and a pair of bases 13d and 13e connected to both ends of the acceleration detection unit 13c. Provided, one base portion 13 d is fixed to the movable portion 12, and the other base portion 13 e is fixed to the base portion 10. As a result, in the acceleration detection device 1, the vibrating beams 13a and 13b expand and contract in the Y-axis direction according to the displacement in the Z-axis direction of the movable portion 12 due to the acceleration applied in the Z-axis direction. Therefore, it is possible to realize a configuration with high detection sensitivity that converts a change in the resonance frequency due to the above to acceleration. The present configuration that regulates the displacement in the Z-axis direction of the movable portion 12 of the acceleration detection device 1 by itself reduces the impact on the acceleration detection element 13 including the vibrating beams 13a and 13b, and avoids damage to the acceleration detection element 13. It can be said that it is more effective from the viewpoint of doing.

The acceleration detecting element 13 may be provided on the main surface 12b side instead of the main surface 12a side of the movable portion 12, or may be provided on both the main surface 12a side and the main surface 12b side. Further, in the acceleration detection device 1, the lead electrodes 13 f and 13 g of the acceleration detection element 13 may be connected to the connection terminals 10 b and 10 c of the base portion 10 by a conductive adhesive instead of the metal wire 18. . These incidental items can also be applied to the following modifications.
In the acceleration detecting device 1, when the acceleration applied in the Z-axis direction is only in one direction (only + g or only -g), the loose fitting groove 32 of the mass portion that does not contact the support portion distal end portion 14B. You may make it remove any one of the overhang | projection parts 33 and 34 located up and down.

5 (a) and 5 (b) are side views (left side view in FIG. 2) showing a modification of the mass part, and in the modification shown in FIG. 5 (a), the lower overhang is shown. The portion (the restricted portion) 34 is removed. That is, when the acceleration applied to the acceleration detection device 1 in the Z-axis direction is only in the −g direction, the lower overhanging portion 34 is unnecessary, and it is sufficient to provide only the upper overhanging portion 33. Conversely, although not shown, when the acceleration applied to the acceleration detection device 1 in the Z-axis direction is only in the + g direction, the upper overhang portion 33 is unnecessary, and only the lower overhang portion 34 is provided. It ’s enough.
Or you may provide the overhang | projection part 33 (or overhang | projection part 34) only in the side corresponding to one support part 14 (front-end | tip part 14B) like FIG.5 (b).
That is, the mass part 15 does not need to be symmetrical, and the center of gravity position of the total weight of the mass part 15, the movable part 12, and the acceleration detection element 13 when no acceleration is applied is within the thickness range of the movable part 12. As long as it is located in

Next, FIGS. 6A and 6B are left side views showing other modified examples of the mass part, and the mass part 15 in FIG. This is a configuration example in which only the lower protruding portion 34 is provided on the other side surface in the width direction, and the mass portion 15 in (b) is a loose fitting groove 32 as a restricted portion only on one side surface in the width direction. This is a configuration example in which (overhang portions 33 and 34) are provided.
Thus, even when the acceleration applied in the Z-axis direction is only in the −g direction or the + g direction, it is not always necessary to provide the upper and lower projecting portions 33 and 34 on both side surfaces of the mass portion 15.

Next, since the mass part 15 of the present invention is provided with an intermediate part (controlled part) 35 that faces the inner edge of the support part tip part 14B, the movable part 12 moves in the + X direction or the -X direction. At the time of displacement, any one of the support portion tip portions 14B comes into contact with the intermediate portion 35, and displacement exceeding a predetermined amount is restricted (blocked).
7A is a cross-sectional view of the main part showing a state in which no acceleration is applied in the X-axis direction, and FIG. 7B is a case where acceleration −a is applied in the X-axis direction. It is a principal part cross-sectional view which shows the case where acceleration + a is added to the axial direction. FIG. 7 corresponds to the BB cross-sectional view of FIG.
As shown in FIG. 7B, the acceleration detection device 1 is formed on one side surface of the mass portion 15 fixed to the movable portion 12 when the acceleration −a applied in the X-axis direction is larger than a predetermined value. The inner edge of one tip portion 14 </ b> B comes into contact with the intermediate portion (controlled portion) 35 that is the inner wall of the loose fitting groove 32. Thereby, the acceleration detection device 1 regulates the displacement of the movable portion 12 that is displaced in the −X direction according to the acceleration −a within a predetermined range (corresponding to the gap S2).

On the other hand, as shown in FIG. 7B, when the acceleration + a applied in the X-axis direction is larger than a predetermined value, the loose fitting groove 32 formed on the other side surface of the mass portion 15 fixed to the movable portion 12. The inner edge of the other tip portion 14B comes into contact with an intermediate portion (controlled portion) 35 that is an inner wall. Thereby, the acceleration detection device 1 restricts the displacement of the movable portion 12 that is displaced in the + X-axis direction according to the acceleration + a within a predetermined range (corresponding to the gap S2).
Since the excessive displacement of the movable portion in the X-axis direction is restricted by the support portion coming into contact with the intermediate portion 35, the movable portion and the acceleration caused by the collision with the inner surface of the package or the displacement exceeding the limit of the strength. Damage to the detection element can be avoided.

Next, for example, the configuration shown in FIG. 8 is effective for fixing the mass portion 15 with good positioning with respect to the leading edge of the movable portion.
8A and 8B are main part plan views showing the configuration of a device substrate (base portion 10, joint portion 11, movable portion 12) according to a modification of the present invention, and this device substrate is movable. By providing the small protrusions 12c having the same shape at both ends in the width direction of the front end edge of the portion 12, the mass part using the two small protrusions 12c and the intermediate front end edge 12d positioned between the small protrusions 15 can be attached accurately.

That is, in this example, in order to uniquely determine the position at which the fixed groove 30 of the mass part is inserted into the distal end edge of the movable portion 12, small bumps are formed at both ends excluding the intermediate distal end edge 12b to which the fixed groove 30 is fitted. A piece 12c is provided. When the mass portion 15 is assembled to the distal end edge of the movable portion, the fixed groove 30 avoids the small protruding piece 12c, in other words, by inserting the fixed groove into the intermediate distal end edge 12b using the small protruding piece 12c as a guide, Assembly can be completed in a state where the center part c1 of the movable part front end edge and the center part c2 of the mass part coincide.
For this reason, assembly workability | operativity can be improved and a defective product generation rate can be reduced.

  Next, FIGS. 9A and 9B are a plan view and a front longitudinal sectional view (CC sectional view) showing another configuration example of the acceleration detecting device (physical quantity detecting device) of the present invention. 10 (a), (b), and (c) are a perspective view, a front view, and a right side view showing a configuration of a mass part used in this acceleration detection device. The same parts as those of the acceleration detection device according to the embodiment will be described with the same reference numerals.

  The acceleration detecting device 1 according to the present embodiment has the configuration in which the protruding protrusions 36 project from the one end surface of the mass portion 15, that is, the both end portions in the width direction of the end surface where the fixing groove 30 is formed, toward the base portion 10. It is different from the form. Since an intermediate space 37 serving as a path for inserting the end edge of the movable portion 12 into the fixed groove 30 is formed in the intermediate portion in the thickness direction of each overhang projection 36, each overhang projection 36 is The upper protrusion 36a is opposed to the first main surface 12a of the movable part, and the lower protrusion 36b is opposed to the second main surface 12b.

In this embodiment, the amount of change in the frequency of the acceleration detection element 13 can be increased by adding the overhanging protrusion 36 to increase the mass of the mass portion 15, thereby increasing the sensitivity of the acceleration detection device.
Next, FIGS. 11A to 11D are an exploded perspective view showing a configuration of an acceleration detection device (physical quantity detection device) according to another embodiment of the present invention, a perspective view showing an assembled state, and a plan view. It is a perspective view which shows the structure of a mass part.

In the acceleration detection device 1 according to the above-described embodiment, a total of two support portions 14 are protruded one by one from both ends of the base portion 10 in the width direction, but the support portion 14 of this embodiment is one. is there. When the number of the support parts 14 is one, the shape of the mass part 15 is also changed accordingly. Although the mass portion 15 does not have a symmetrical shape, the mass portion 15 can function as an acceleration detection device by being configured so that the center of gravity of the mass portion is within the thickness range of the movable portion 12.
Next, an acceleration detector configured by housing the acceleration detection device according to the embodiment shown in FIGS. 1 to 3 in a package will be described.

FIG. 12 is a schematic plan sectional view showing a schematic configuration of an acceleration detector as an example of a physical quantity detector according to one embodiment. 12A is a plan view seen from the lid (lid body) side, and FIG. 12B is a cross-sectional view taken along the line DD of FIG. 12A. In the plan view, the lid is omitted. Each wiring is omitted. In addition, the same code | symbol is attached | subjected to a common part with the acceleration detection device which concerns on the said embodiment, detailed description is abbreviate | omitted, and it demonstrates centering on a different part from the said embodiment.
As illustrated in FIG. 12, the acceleration detector (physical quantity detector) 40 includes the acceleration detection device 1 described in the above embodiment, and a package 50 that houses the acceleration detection device 1. The package 50 includes a package base 51 having a substantially rectangular planar shape and a recess, and a lid 52 having a substantially rectangular and flat shape covering the recess of the package base 51, and is formed in a substantially rectangular parallelepiped shape. Yes. The package base 51 is made of an aluminum oxide sintered body, crystal, glass, silicone or the like obtained by forming, laminating and firing ceramic green sheets. The lid 52 is made of the same material as the package base 51 or a metal such as Kovar, 42 alloy, stainless steel.

The package base 51 is provided with internal terminals 54 and 55 at two stepped portions 53a protruding from the outer peripheral portion of the inner bottom surface (the bottom surface inside the recess) 53 along the inner wall of the recess. The internal terminals 54 and 55 are provided at positions facing the external connection terminals 14e and 14f provided on the support portion 14 of the acceleration detection device 1 (positions overlapping in plan view). The external connection terminal 14e is connected to the connection terminal 10b of the base portion 10, and the external connection terminal 14f is connected to the connection terminal 10c of the base portion 10. In addition, it is preferable that the external connection terminals 14e and 14f are provided at positions that overlap with the fixing portions 14b and 14c of the support portion 14 in plan view.
A pair of external terminals 57 and 58 used for mounting on an external member such as an electronic device is formed on the outer bottom surface (the surface opposite to the inner bottom surface 53, the outer bottom surface) 56 of the package base 51. . The external terminals 57 and 58 are connected to the internal terminals 54 and 55 by an internal wiring (not shown). For example, the internal terminals 54 and 55 and the external terminals 57 and 58 are made of a metal film in which a film such as Ni or Au is laminated on a metallized layer such as W by a method such as plating.

  The package base 51 is provided with a sealing portion 59 that seals the inside of the package 50 at the bottom of the recess. The sealing portion 59 is formed in a stepped through hole 59a formed in the package base 51, the hole diameter on the outer bottom surface 56 side being larger than the hole diameter on the inner bottom surface 53 side, and a sealing material 59b made of Au / Ge alloy, solder, or the like. The inside of the package 50 is hermetically sealed by charging and solidifying after heating and melting.

In the acceleration detector 40, the fixing portions 14 a, 14 b, 14 c, 14 d of the support portion 14 of the acceleration detection device 1 are fixed to the stepped portion 53 a of the package base 51 through the adhesive 60. Here, since the fixing portions 14b and 14c are portions connecting the external connection terminals 14e and 14f and the internal terminals 54 and 55, the adhesive 60 is mixed with a conductive material such as a metal filler, for example. Silicone resin-based conductive adhesives are used. In addition, you may use the silicone resin type adhesive agent which does not contain electroconductive substances, such as a metal filler, for fixation of the fixing | fixed part 14a, 14d.
In the acceleration detector 40, the recess of the package base 51 is covered with the lid 52 in a state where the acceleration detection device 1 is connected to the internal terminals 54 and 55 of the package base 51, and the package base 51 and the lid 52 are seamed. It joins with joining members 50a, such as low melting glass and an adhesive agent. In the acceleration detector 40, after the lid 52 is joined, the sealing material 59b is put into the through hole 59a of the sealing portion 59 in a state where the inside of the package 50 is decompressed (high vacuum state), and after heating and melting By solidifying, the inside of the package 50 is hermetically sealed. Note that the inside of the package 50 may be filled with an inert gas such as nitrogen, helium, or argon. The package may have a recess in both the package base and the lid.

The acceleration detector 40 is driven by a drive signal applied to the excitation electrode of the acceleration detection device 1 via the external terminals 57 and 58, the internal terminals 54 and 55, the external connection terminals 14e and 14f, the connection terminals 10b and 10c, and the like. The vibrating beams 13a and 13b of the acceleration detecting device 1 oscillate (resonate) at a predetermined frequency. And the acceleration detector 40 outputs the resonant frequency of the acceleration detection device 1 which changes according to the applied acceleration as an output signal.
As described above, according to the acceleration detector 40 of the present embodiment, since the acceleration detection device that achieves the effects described in the above embodiment is used, for example, the collision with the inner surface of the package 50 and the limit of strength are limited. The acceleration detection device 1 can be prevented from being damaged due to the displacement exceeding it.

Next, an inclinometer as an electronic apparatus including the physical quantity detection device and the acceleration detector described in the embodiment and the modification will be described. FIG. 13 is a schematic perspective view showing an inclinometer according to an embodiment of the present invention. An inclinometer 70 shown in FIG. 13 uses the physical quantity detection device (gravity acceleration detection device) 1 described in the above embodiment as an inclination sensor. The inclinometer 70 is installed at a place to be measured such as a mountain slope, road slope, embankment retaining wall, or the like. The inclinometer 70 is supplied with power from the outside via a cable 71 or has a built-in power supply, and a drive signal is sent to the acceleration detection device 1 by a drive circuit (not shown). Then, the inclinometer 70 changes the attitude of the inclinometer 70 (change in the direction in which the gravitational acceleration is applied to the inclinometer 70) from a resonance frequency that changes according to the gravitational acceleration applied to the acceleration detection device 1 by a detection circuit (not shown). Is converted into an angle, and data is transferred to the base station by radio, for example. Thereby, the inclinometer 70 can contribute to the early detection of abnormality.
The physical quantity detection device and the acceleration detector described above are not limited to the inclinometer, but can be suitably used as an acceleration sensor, an inclination sensor, and the like used for a seismometer, a navigation device, an attitude control device, a game controller, a mobile phone, and the like. In any case, it is possible to provide an electronic device that exhibits the effects described in the embodiment and the modification.
In the physical quantity detection device 1 according to each of the above embodiments, the material of the base part, the joint part, the movable part, and the support part is not limited to quartz, but may be a semiconductor material such as glass or silicone. . Further, the substrate of the acceleration detecting element is not limited to quartz, but lithium tantalate (LiTaO3), lithium tetraborate (Li2B4O7), lithium niobate (LiNbO3), lead zirconate titanate (PZT), oxidation It may be a piezoelectric material such as zinc (ZnO) or aluminum nitride (AlN), or a semiconductor material such as silicone provided with a piezoelectric material such as zinc oxide (ZnO) or aluminum nitride (AlN) as a coating.

  The configurations of the detection devices and detectors shown in the above embodiments can also be applied to detection devices and detectors that detect physical quantities other than acceleration, such as gravitational acceleration, speed, force, and distance. That is, all the above-described configurations of the acceleration detection device or the acceleration detector can be replaced with other physical quantity detection means such as a gravity acceleration detection device or a gravity acceleration detector.

According to the present invention, when the movable part vibrates in the plane direction orthogonal to the thickness direction of the movable part, the weight fixed to the movable part comes into contact with the tip of the support part, so that the lateral displacement of the movable part is reduced. It is possible to prevent the movable part from being excessively damaged.
In addition, according to the present invention, since one weight can be accurately attached to the movable part of the acceleration detection device with a small amount of adhesive, members having different linear expansion coefficients are joined via the adhesive. Therefore, the influence of the adhesive on the detection sensitivity can be reduced by suppressing the thermal stress generated.

  DESCRIPTION OF SYMBOLS 1 ... Acceleration detector, 10 ... Base part, 10a ... Main surface, 10b, 10c ... Connection terminal, 11 ... Joint part, 11a ... Groove part, 12 ... Movable part, 12a, 12b ... Main surface, 13 ... Acceleration detection element, 13a, 13b ... vibrating beam, 13c ... acceleration detector, 13d, 13e ... base, 13f, 13g ... extraction electrode, 14 ... support, 14A ... base end, 14B ... tip, 14a, 14b, 14c, 14d ... Fixing part, 14e, 14f ... external connection terminal, 15 ... mass part, 16 ... adhesive, 17 ... joining member, 18 ... metal wire, 30 ... fixing groove (fixing part), 32 ... loose fitting groove (regulated part) , 33, 34 ... overhanging part (restricted part), 35 ... intermediate part (restricted part), 36 ... overhanging protrusion, 37 ... intermediate void, 40 ... acceleration detecting device, 50 ... package, 50 a ... joining member, 51 ... Package, 5 ... outer bottom surface, 57, 58 ... external terminal, 59 ... seal unit, 59a ... through holes, 59b ... sealing material, 60 ... adhesive, 70 ... inclinometer as an electronic device, 71 ... cable.

Claims (7)

A base part, a plate-like movable part having one edge connected to the base part via a joint part, a physical quantity detection element spanned between the base part and the movable part, and the base in plan view A support part provided with a portion extending along the movable part from the part, and a mass part arranged across the other end edge and both main surfaces of the movable part,
In the plan view, the support portion has a free end portion on the side opposite to the base portion side,
The mass part overlaps the support part in a plan view and a front view,
The movable portion overlaps the mass portion and the support portion so that the movable portion can be displaced in a direction intersecting the main surface with the joint portion as a fulcrum according to a physical quantity applied in a direction intersecting the main surface. In the region, a physical quantity detection device is characterized in that a gap is provided between the mass portion and the support portion.   The physical quantity detection device according to claim 1, wherein a center of gravity of the movable part, the physical quantity detection element, and the mass part is within a thickness range of the movable part.   The mass portion has a fixed portion that fixes the movable portion on one side surface, and is not in contact with the support portion on at least one of the other two side surfaces that do not face the one side surface. The physical quantity detection device according to claim 1, further comprising a regulated portion that is regulated by the support portion when the movable portion is deformed in the thickness direction and the surface direction.   The physical quantity detection device according to claim 3, wherein the regulated portion is a loose fitting groove formed on the at least one side surface.   5. The physical quantity detection device according to claim 1, wherein the physical quantity detection element includes at least one vibration beam extending along a direction connecting the base portion and the movable portion. 6. And a pair of base parts connected to both ends of the physical quantity detection unit, wherein one of the base parts is fixed to the base part, and the other of the base parts is fixed to the movable part Detection device.   A physical quantity detector comprising: the physical quantity detection device according to claim 1; and a package that accommodates the physical quantity detection device.   An electronic apparatus comprising the physical quantity detector according to claim 6.

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