JP2013167542A - Resin cured state monitoring device and resin cured state monitoring method - Google Patents

Abstract

A resin cured state monitoring device and a resin cured state monitoring method capable of detecting a cured state of a resin with high accuracy regardless of the thickness of the resin are provided.
A resin curing state monitoring apparatus includes a light source 12, a polarizer 22, an analyzer 25, a camera 16, a control unit 10, and the like. The polarizer 22 and the analyzer 25 are rotated in synchronization by the driving devices 23 and 26. The light emitted from the light source 12 is polarized by the polarizer 22, is reflected by the dichroic mirror 13, and irradiates the photocurable resin 29. Thereby, the photocurable resin 29 is cured, and fluorescence corresponding to the degree of curing is generated. The fluorescence generated in the photocurable resin 29 passes through the dichroic mirror 13 and the analyzer 25 and enters the camera 16. The control unit 10 calculates the degree of cure of the photocurable resin 29 from the image captured by the camera 16.
[Selection] Figure 1

Description

  The present invention relates to a resin cured state monitoring apparatus and a resin cured state monitoring method.

  In recent years, photocurable resins have been used in many industrial fields. Compared to thermosetting resins, photocurable resins have many advantages such as not diffusing harmful substances into the atmosphere, having a short curing time, and being applicable to heat-sensitive products.

  A general photocurable resin is in a liquid state before being irradiated with light, and changes to a solid when irradiated with light. The photocurable resin contains a photopolymerization initiator. The photopolymerization initiator generates radicals and cations by light irradiation, and is cured by the polymerization reaction of the generated radicals and cations with the main agent. Accordingly, the cured state (the degree of curing) of the photocurable resin is determined according to the degree of polymerization.

  Usually, it is difficult for a photocurable resin to determine a cured state visually. Therefore, a method has been proposed in which light (ultraviolet light) is irradiated to the resin and the cured state of the photocurable resin is estimated from the intensity of fluorescence emitted from the resin. It has also been proposed to determine the degree of cure by detecting the light transmitted through the polarizer out of the fluorescence emitted from the resin, utilizing the fact that the degree of polarization changes according to the cured state of the resin.

JP 2007-248244 A Japanese Examined Patent Publication No. 6-10655 (WO86 / 07456) Japanese Patent Laid-Open No. 7-151647

  An object of the present invention is to provide a resin curing state monitoring device and a resin curing state monitoring method that can detect the cured state of the resin with high accuracy regardless of the thickness of the resin.

  According to one aspect of the disclosed technology, a linearly polarized light irradiation unit that irradiates a photocurable resin with linearly polarized light, a camera that captures fluorescence generated by the photocurable resin, the photocurable resin, and the An analyzer disposed between the camera, a driving device for rotating at least one of a polarization direction of linearly polarized light irradiated to the photocurable resin and the analyzer, and the photocuring from an image photographed by the camera A resin curing state monitoring device is provided that includes a control unit that calculates the degree of curing of the functional resin.

  According to another aspect of the disclosed technology, the step of irradiating the photocurable resin with linearly polarized light, and the light emitted to the photocurable resin among the fluorescence generated by the photocurable resin A step of alternately photographing light polarized in the same direction and light polarized in a direction orthogonal to the camera, and calculating a degree of curing of the photocurable resin from an image photographed by the camera, There is provided a resin curing state monitoring method in which an analyzer is disposed between the photocurable resin and a camera, and the imaging is performed while rotating the analyzer.

  According to the cured resin state monitoring apparatus and the cured resin state monitoring method according to the above aspect, the cured state of the resin can be detected with high accuracy regardless of the thickness of the resin.

FIG. 1 is a block diagram showing a resin curing state monitoring apparatus according to the first embodiment. FIG. 2 is a diagram showing the change over time of the angles of the transmission axes of the polarizer and the analyzer. FIG. 3 is a diagram showing a change with time of the relative angle between the transmission axis of the polarizer and the transmission axis of the analyzer. FIG. 4 is a flowchart for explaining the operation of the cured resin state monitoring apparatus according to the first embodiment. FIG. 5 is a diagram showing the change over time in the degree of polarization of fluorescence emitted from the photocurable resin. FIG. 6 is a block diagram showing a resin curing state monitoring apparatus according to the second embodiment. FIG. 7 is a diagram showing temporal changes in the angle of the slow axis of the λ / 2 plate, the angle of the transmission axis of the polarizer, and the angle of the polarization direction of the excitation light. FIG. 8 is a diagram showing a change with time of the relative angle between the transmission axis of the analyzer and the polarization direction of the excitation light.

  As described above, a method has been proposed in which a photocurable resin is irradiated with light (ultraviolet rays) and the cured state of the resin is estimated from the intensity of fluorescence emitted from the resin. However, the intensity of fluorescence is related not only to the cured state of the resin, but also to the thickness of the resin. Even if the resin is applied to the substrate under the same conditions, the thickness of the resin may vary. For this reason, it is not possible to accurately detect the cured state of the resin simply by examining the intensity of fluorescence.

  In the conventional method for determining the degree of curing using polarized light, a photomultiplier tube is used. For this reason, in order to measure the two-dimensional distribution of the cured state, it is necessary to move (scan) the optical system or the observation object in the two-dimensional direction, and there is a problem that the structure of the apparatus becomes complicated.

  In the following embodiments, a resin cured state monitoring device and a resin cured state monitoring method that can detect the cured state of the resin with high accuracy regardless of the thickness of the resin are disclosed.

(First embodiment)
FIG. 1 is a block diagram showing a resin curing state monitoring apparatus according to the first embodiment.

  As shown in FIG. 1, the resin curing state monitoring apparatus according to the present embodiment includes a stage 11, a light source 12, a dichroic mirror 13, an objective lens 14, an imaging lens 15, a camera 16, and a control unit 10. And have.

  A filter 21 and a polarizer (polarizing plate) 22 are disposed between the light source 12 and the dichroic mirror 13, and a filter 24 and an analyzer (polarizing plate) 25 are disposed between the dichroic mirror 13 and the imaging lens 15. Is arranged. In addition, the observation object 28 to which the photocurable resin 29 is attached is placed on the stage 11.

  The light source 12 is turned on by a signal output from the control unit 10. The light source 12 has a role for curing the photocurable resin 29 and a role as excitation light for generating fluorescence in the photocurable resin 29. For this reason, it is important that the light emitted from the light source 12 contains a large amount of ultraviolet rays. In the present embodiment, a mercury lamp, a laser diode, an LED (Light Emitting Diode), or the like is used as the light source 12.

  The filter 21 cuts off light with an extra wavelength included in the light emitted from the light source 12. The polarizer 22 is rotated at a constant speed in one direction by the driving device 23 controlled by the control unit 10. The polarizer 22 transmits only light having a vibration component parallel to the transmission axis of the polarizer 22 out of the light transmitted through the filter 21.

  The light transmitted through the polarizer 22 is reflected by the dichroic mirror 13 and travels toward the observation object 28 on the stage 11. Then, the photocurable resin 29 that is condensed by the objective lens 14 and attached to the observation object 28 is irradiated. This light irradiation causes the photocurable resin 29 to undergo a polymerization reaction, and fluorescence is generated from the photocurable resin 29.

  When the photocurable resin 29 is uncured, the fluorescence generated from the photocurable resin 29 becomes randomly polarized light. However, as the photocurable resin 29 is cured, the proportion of light polarized in the same direction as the excitation light increases. For this reason, the curing of the photocurable resin 29 is performed by taking the ratio of the amount of light polarized in the same direction as the polarization direction of the excitation light and the amount of light polarized in the direction orthogonal to the polarization direction of the excitation light. The state can be determined.

  The fluorescence generated in the photo-curable resin 29 passes through the dichroic mirror 13 and reaches the analyzer 25 after light having an excessive wavelength is cut by the filter 24.

  The analyzer 25 is rotated by a driving device 26 controlled by the control unit 10. However, while the polarizer 22 rotates at a constant speed in one direction, the analyzer 25 repeats normal rotation and reverse rotation as described later. The analyzer 25 transmits only light having a vibration component parallel to the transmission axis of the analyzer 25 among the light that has reached the analyzer 25.

  The light transmitted through the analyzer 25 reaches the imaging surface of the camera 16 through the imaging lens 15. The camera 16 has a large number of pixels (light receiving units) arranged in a two-dimensional direction, and takes a fluorescent image of the photocurable resin 29 by a signal from the control unit 10. As the camera 16, a general CMOS image sensor or a camera incorporating a CCD image sensor can be used. An image captured by the camera 16 is sent to the control unit 10.

  The control unit 10 performs image processing on the image sent from the camera 16 to calculate the degree of cure for each pixel, and obtains a two-dimensional distribution of the cured state of the photocurable resin 29. And the control part 10 determines whether hardening of the photocurable resin 29 was completed based on the cure degree.

  In FIG. 2, the horizontal axis represents time, the vertical axis represents the angle of the transmission axis of the polarizer 22 and the analyzer 25 (angle from the reference position), and the angle of the transmission axis of the polarizer 22 and the analyzer 25. It is a figure which shows a time-dependent change. In FIG. 3, the horizontal axis represents time, and the vertical axis represents the angle formed between the transmission axis of the polarizer 22 and the transmission axis of the analyzer 25 (hereinafter referred to as “relative angle”). It is a figure which shows the time-dependent change of the relative angle of the transmission axis and the transmission axis of the analyzer 25. The operation of the polarizer 22 and the analyzer 25 will be described with reference to FIGS.

  The control unit 10 controls the driving device 23 to rotate the polarizer 22 in one direction at a constant speed as shown in FIG. Further, the control unit 10 controls the driving device 26 so that the analyzer 25 is moved in the same direction at the same speed as the polarizer 22 until the analyzer 25 reaches a preset first angle (about 80 degrees in this example). Rotate to At this time, the relative angle between the transmission axis of the polarizer 22 and the transmission axis of the analyzer 25 is 0 degree. If the light transmitted through the polarizer 22 reaches the analyzer 25, the light passes through the analyzer 25. To do. Hereinafter, this state is referred to as a parallel Nicol state.

  When the angle of the polarizer 22 reaches the first angle, the control unit 10 controls the driving device 26 to reverse the analyzer 25 so that the relative angle between the transmission axis of the polarizer 22 and the transmission axis of the analyzer 25 is 90. To the degree. Then, this state is maintained until the rotation angle of the polarizer 22 reaches a preset second angle (about 170 degrees in this example). In this state, even if the light transmitted through the polarizer 22 reaches the analyzer 25, it cannot be transmitted through the analyzer 25. Hereinafter, this state is referred to as an orthogonal Nicol state.

  When the angle of the polarizer 22 reaches the second angle, the control unit 10 controls the driving device 26 to reverse the analyzer 25 so that the relative angle between the transmission axis of the polarizer 22 and the transmission axis of the analyzer 25 is 0. To the degree.

  As described above, the control unit 10 controls the rotation of the polarizer 22 and the analyzer 25 to alternately generate the parallel Nicol state and the orthogonal Nicol state.

  FIG. 4 is a flowchart for explaining the operation of the resin curing state monitoring apparatus according to the present embodiment.

  First, in step S <b> 11, the control unit 10 turns on the light source 12 and controls the driving devices 23 and 26 to start rotation of the polarizer 22 and the analyzer 25. The light emitted from the light source 12 is polarized by passing through the polarizer 22 and is irradiated with the photocurable resin 29. As a result, the curing of the photocurable resin 29 proceeds, and the intensity of fluorescence emitted as the photocurable resin 29 is cured increases.

  Next, when the parallel Nicol state is reached in step S12, the process proceeds to step S13, and the control unit 10 starts capturing a fluorescent image of the photocurable resin 29 by the camera 16.

  Thereafter, the process proceeds to step S14, and the control unit 10 waits until the angle of the polarizer 22 reaches the first angle (about 80 degrees). Then, when the angle of the polarizer 22 reaches the first angle, the process proceeds to step S15, and photographing by the camera 16 is stopped. Thereafter, the process proceeds to step S16, and the control unit 10 stores the image in the parallel Nicol state in association with the time. Here, an image during the parallel Nicol state is assumed to be Ip (t, x, y). t is a parameter indicating time, and x and y are parameters indicating pixel positions.

  Next, the process proceeds to step S17, where the control unit 10 controls the driving device 26 to reverse the analyzer 25 to be in a crossed Nicols state. Thereafter, the process proceeds to step S18, and the control unit 10 starts photographing with the camera 16.

  Next, the process proceeds to step S19, and the control unit 10 waits until the angle of the polarizer 22 reaches the second angle (about 170 degrees). Then, when the angle of the polarizer 22 reaches the second angle, the process proceeds to step S20, and photographing by the camera 16 is stopped. Thereafter, the process proceeds to step S21, and the control unit 10 stores the image in the orthogonal Nicole state in association with the time. Here, the image during the orthogonal Nicol state is assumed to be Ic (t, x, y).

  When the fluorescence image emitted from the photocurable resin 29 is acquired in the parallel Nicol state and the orthogonal Nicol state in this way, the process proceeds to Step S22, and the control unit 10 calculates the pixel by the following equation (1). Calculate the degree of fluorescence polarization ρ every time

  In FIG. 5, the horizontal axis represents time (curing time) after the start of ultraviolet irradiation, and the vertical axis represents the degree of polarization ρ, and the temporal change in the degree of polarization of the fluorescence emitted from the photocurable resin 29. FIG. As shown in FIG. 5, the value of the degree of polarization ρ increases as the photocurable resin 29 is cured, but when the curing is completed to some extent, the value of the degree of polarization ρ becomes substantially constant. The value of the degree of polarization ρ when the photocurable resin 29 is sufficiently cured is examined in advance, and a threshold value used for determining whether the photocurable resin 29 has been cured is determined.

  Next, in step S <b> 23, the control unit 10 determines whether or not the photocurable resin 29 has been cured. For example, when the number of pixels in which the degree of polarization ρ has not reached a preset threshold value exceeds a certain ratio, it is determined that the curing of the photocurable resin 29 has not been completed. And it returns to step S12 and repeats the process mentioned above. On the other hand, when the degree of polarization ρ reaches a preset threshold value, the control unit 10 determines that the curing of the photocurable resin 29 is completed and ends the process.

  According to this embodiment, the two-dimensional distribution of the cured state can be easily acquired, and the cured state of the resin can be detected with high accuracy regardless of the thickness of the photocurable resin. In addition, since it is not necessary to move the stage and the optical system, there is an advantage that the structure of the apparatus is relatively simple and the time required for measurement is short.

  By the way, it is thought that hardening is not enough only by irradiation of the light polarized in one direction depending on resin. However, since the polarizer 22 is rotated in this embodiment, the light curable resin 29 is irradiated with light polarized in various directions. For this reason, the photocurable resin 29 can be cured under the same conditions as when natural light (random polarized light) is irradiated.

  In this embodiment, both the polarizer 21 and the analyzer 25 are rotationally controlled. However, only one of the polarizer 21 and the analyzer 25 is rotationally controlled and the other is fixed. Thus, a parallel Nicol state and an orthogonal Nicol state may be generated.

(Second Embodiment)
FIG. 6 is a block diagram showing a resin curing state monitoring apparatus according to the second embodiment.

  The resin curing state monitoring apparatus according to the present embodiment includes a stage 11, a light source 32, a dichroic mirror 33, an objective lens 34, an imaging lens 35, a camera 36, and a control unit 30.

  Between the light source 32 and the dichroic mirror 33, a filter 41, a polarization beam splitter 42, a switching mirror 43, reflection mirrors 44 and 45, and a λ / 2 plate 47 are arranged. A filter 49 and an analyzer (polarizing plate) 50 are arranged between the dichroic mirror 33 and the imaging lens 35. The observation object 28 to which the photocurable resin 29 is attached is disposed on the stage 11.

  The light source 32 is turned on by a signal output from the control unit 30. Also in this embodiment, a mercury lamp, a laser diode, an LED, or the like is used as the light source 32.

  The filter 41 cuts off light with an extra wavelength included in the light emitted from the light source 32. The polarization beam splitter 42 transmits P-polarized light among the light transmitted through the filter 41 and reflects S-polarized light. The P-polarized light that has passed through the polarizing beam splitter 42 reaches the switching mirror 43 directly, and the S-polarized light reflected by the polarizing beam splitter 42 is reflected by the reflecting mirrors 44 and 45 and reaches the switching mirror 43.

  The switching mirror 43 is driven by a driving device 46 controlled by the control unit 30 and moves between a position indicated by a solid line and a position indicated by a broken line in FIG. 6 at a timing synchronized with the rotation of the λ / 2 plate 47. . As a result, P-polarized light and S-polarized light can be alternately transmitted to the λ / 2 plate 47.

  The λ / 2 plate 47 is rotated at a constant speed in one direction by a driving device 48 controlled by the control unit 30. The light transmitted through the λ / 2 plate 47 is reflected by the dichroic mirror 33 and travels toward the observation object 28 on the stage 11. Then, the photocurable resin 29 that is condensed by the objective lens 34 and attached to the observation object 28 is irradiated. The photocurable resin 29 is cured by this light irradiation, and fluorescence is generated from the photocurable resin 29.

  Fluorescence generated in the photocurable resin 29 passes through the dichroic mirror 33 and reaches the analyzer 50 after light having an extra wavelength is cut by the filter 49.

  The analyzer 50 is rotated at a constant speed in one direction by a driving device 51 controlled by the control unit 30. The analyzer 50 transmits only light having a vibration component parallel to the transmission axis of the analyzer 50 among the light that has reached the analyzer 50.

  The light transmitted through the analyzer 50 reaches the imaging surface of the camera 36 through the imaging lens 35. Also in this embodiment, as the camera 36, a camera having a built-in image sensor in which a large number of pixels (light receiving portions) are arranged in a two-dimensional direction can be used. A fluorescent image of the photocurable resin 29 photographed by the camera 36 is sent to the control unit 30.

  The control unit 30 calculates the degree of cure for each pixel from the image sent from the camera 36 as in the first embodiment, and acquires the two-dimensional distribution of the cured state of the photocurable resin 29. And the control part 30 determines whether hardening of the photocurable resin 29 was completed based on the cure degree.

  In FIG. 7, the horizontal axis represents time, and the vertical axis represents the angle of the λ / 2 plate 47 and the analyzer 50 (the slow axis or the angle of the transmission axis from the reference position). It is a figure which shows the time-dependent change of the angle of a phase axis, the angle of the transmission axis of the analyzer 50, and the angle of the polarization direction of excitation light. In FIG. 8, the horizontal axis represents time, and the vertical axis represents the angle between the slow axis of the λ / 2 plate 47 and the polarization axis of the analyzer 50 (hereinafter referred to as “relative angle”). It is a figure which shows the time-dependent change of the relative angle of the transmission axis of photon 50 and the polarization direction of excitation light. The operations of the λ / 2 plate 47 and the analyzer 50 will be described with reference to FIGS.

  The control unit 30 turns on the light source 32 and controls the driving devices 48 and 50 to start the rotation of the λ / 2 plate 47 and the analyzer 50. As shown in FIG. 7, the λ / 2 plate 47 and the analyzer 50 rotate synchronously, but the analyzer 50 rotates twice while the λ / 2 plate 47 makes one rotation. Further, the control unit 30 switches the position of the switching mirror 43 at a timing when the angle of the slow axis of the λ / 2 plate 47 becomes 0 degrees, 90 degrees, 180 degrees, and 270 degrees.

  By switching the switching mirror 43, as shown in FIGS. 7 and 8, the polarization direction of the excitation light is detected when the angle of the λ / 2 plate 47 is between 0 ° and 90 ° and between 180 ° and 270 °. The relative angle of the photon 50 to the transmission axis is 0 degree. During this time, the control unit 30 takes a fluorescent image of the photocurable resin 29 with the camera 36 and stores it as an image Ip (t, x, y) in a parallel Nicol state.

  Further, when the angle of the λ / 2 plate 47 is between 90 degrees and 180 degrees and between 270 degrees and 360 degrees, the relative angle between the polarization direction of the excitation light and the transmission axis of the analyzer 50 is 90 degrees. During this time, the control unit 30 takes a fluorescent image of the photocurable resin 29 by the camera 36 and stores it as an image Ic (t, x, y) in the crossed Nicols state.

  Then, similarly to the first embodiment, the degree of polarization ρ is calculated by the above-described equation (1), and it is determined whether the curing of the photocurable resin 29 is completed based on the result.

  In this embodiment as well, as in the first embodiment, the two-dimensional distribution of the cured state can be easily obtained, and the cured state of the resin can be detected with high accuracy regardless of the thickness of the photocurable resin. can do. In addition, since it is not necessary to move the stage and the optical system, there is an advantage that the structure of the apparatus is relatively simple and the time required for measurement is short.

  The following additional notes are disclosed with respect to the above embodiments.

(Appendix 1) A linearly polarized light irradiation unit that irradiates a photocurable resin with linearly polarized light;
A camera for photographing the fluorescence generated by the photocurable resin;
An analyzer disposed between the photocurable resin and the camera;
A driving device for rotating at least one of a polarization direction of linearly polarized light irradiated to the photocurable resin and the analyzer;
And a controller for calculating a degree of curing of the photocurable resin from an image photographed by the camera.

  (Additional remark 2) The said camera has a some pixel arranged in the two-dimensional direction, The resin hardening state monitoring apparatus of Additional remark 1 characterized by the above-mentioned.

(Supplementary Note 3) The linearly polarized light irradiation unit is
A light source;
A polarizer disposed between the light source and the photocurable resin;
A dichroic mirror that reflects the light transmitted through the polarizer toward the photocurable resin;
The resin curing state monitoring device according to appendix 1 or 2, wherein the fluorescence generated in the photocurable resin passes through the dichroic mirror and reaches the analyzer.

  (Supplementary note 4) The resin curing state monitoring apparatus according to supplementary note 3, wherein the polarizer and the analyzer rotate in synchronization.

  (Supplementary note 5) The resin cured state monitoring device according to supplementary note 4, wherein the polarizer rotates in one direction at a constant speed, and the analyzer rotates forward and backward.

(Appendix 6) The linearly polarized light irradiation unit is
A light source;
a λ / 2 plate;
A polarizing beam splitter disposed between the light source and the λ / 2 plate;
A switching mirror that alternately transmits P-polarized light and S-polarized light separated by the polarizing beam splitter to the λ / 2 plate;
A dichroic mirror that reflects the light transmitted through the λ / 2 plate toward the photocurable resin;
The resin curing state monitoring device according to appendix 1 or 2, wherein the fluorescence generated in the photocurable resin passes through the dichroic mirror and reaches the analyzer.

  (Supplementary note 7) The resin cured state monitoring device according to supplementary note 6, wherein the λ / 2 plate and the analyzer rotate synchronously.

(Appendix 8) A step of irradiating the photocurable resin with linearly polarized light;
The step of alternately photographing with the camera the light polarized in the direction orthogonal to the light polarized in the same direction as the light irradiated to the photocurable resin among the fluorescence generated in the photocurable resin,
A step of calculating the degree of curing of the photocurable resin from an image photographed by the camera,
A resin curing state monitoring method, wherein an analyzer is disposed between the photocurable resin and a camera, and the imaging is performed while rotating the analyzer.

  (Additional remark 9) The said camera has a some pixel arranged in the two-dimensional direction, The resin hardening state monitoring method of Additional remark 8 characterized by the above-mentioned.

  DESCRIPTION OF SYMBOLS 10,30 ... Control part, 11 ... Stage, 12, 32 ... Light source, 13, 33 ... Dichroic mirror, 14, 34 ... Objective lens, 15, 35 ... Imaging lens, 16, 36 ... Camera, 21, 24, 41 , 49 ... Filter, 22 ... Polarizer, 23, 26, 48, 51 ... Driving device, 25, 50 ... Analyzer, 28 ... Observation object, 29 ... Photocurable resin, 42 ... Polarizing beam splitter, 43 ... Switching Mirror, 44, 45 ... reflective mirror, 47 ... λ / 2 plate.

Claims (5)

A linearly polarized light irradiation unit that irradiates the photocurable resin with linearly polarized light; and
A camera for photographing the fluorescence generated by the photocurable resin;
An analyzer disposed between the photocurable resin and the camera;
A driving device for rotating at least one of a polarization direction of linearly polarized light irradiated to the photocurable resin and the analyzer;
And a controller for calculating a degree of curing of the photocurable resin from an image photographed by the camera.   The resin curing state monitoring apparatus according to claim 1, wherein the camera has a plurality of pixels arranged in a two-dimensional direction. The linearly polarized light irradiation unit is
A light source;
A polarizer disposed between the light source and the photocurable resin;
A dichroic mirror that reflects the light transmitted through the polarizer toward the photocurable resin;
The resin curing state monitoring apparatus according to claim 1 or 2, wherein the fluorescence generated in the photocurable resin passes through the dichroic mirror and reaches the analyzer. The linearly polarized light irradiation unit is
A light source;
a λ / 2 plate;
A polarizing beam splitter disposed between the light source and the λ / 2 plate;
A switching mirror that alternately transmits P-polarized light and S-polarized light separated by the polarizing beam splitter to the λ / 2 plate;
A dichroic mirror that reflects the light transmitted through the λ / 2 plate toward the photocurable resin;
The resin curing state monitoring apparatus according to claim 1 or 2, wherein the fluorescence generated in the photocurable resin passes through the dichroic mirror and reaches the analyzer. Irradiating photo-curing resin with linearly polarized light;
Steps of alternately photographing light polarized in the direction orthogonal to light polarized in the same direction as the light emitted to the photocurable resin among the fluorescence generated in the photocurable resin; and
A step of calculating the degree of curing of the photocurable resin from an image photographed by the camera,
A resin curing state monitoring method, wherein an analyzer is disposed between the photocurable resin and a camera, and the imaging is performed while rotating the analyzer.

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