JP2012061424A5 - - Google Patents
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- JP2012061424A5 JP2012061424A5 JP2010207775A JP2010207775A JP2012061424A5 JP 2012061424 A5 JP2012061424 A5 JP 2012061424A5 JP 2010207775 A JP2010207775 A JP 2010207775A JP 2010207775 A JP2010207775 A JP 2010207775A JP 2012061424 A5 JP2012061424 A5 JP 2012061424A5
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- JP
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- Prior art keywords
- receiving
- port
- liquid material
- supply
- supplying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011344 liquid material Substances 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 10
- 238000001514 detection method Methods 0.000 description 1
Description
すなわち、第１の発明は、液体材料を貯留する液体貯留部と、液体貯留部に貯留された液体材料を供給する供給口を有する供給部と、供給部から排出される液体材料を受ける受給口および気泡除去機構を有する受給部と、受給部を移動させる受給部駆動装置とを備え、受給部が受給口が供給口の直下に位置する受給位置に移動して供給口と受給口を接続することなく、離れた位置から液体材料の滴下供給を受け、気泡除去機構により気泡が除去された液体材料を吐出装置に供給することを特徴とする液体自動供給機構に関する。
第２の発明は、第１の発明において、気泡除去機構が、液体材料を貯留する気泡除去用容器と、一端が気泡除去用容器に貯留された液体内に浸漬され、他端が受給口と連通される流入管と、一端が気泡除去用容器に貯留された液体内に浸漬され、他端が吐出装置と連通される流出管とを備えてなることを特徴とする。
第３の発明は、第２の発明において、気泡除去機構が、気泡除去用容器を減圧するポンプ装置と、一端がポンプ装置に接続され、他端が気泡除去用容器内の空間に配置される作動気体供給管とを備えてなることを特徴とする。
第４の発明は、第２または３の発明において、液体貯留部および／または気泡除去用容器内の液体材料の量を検知する検知装置を備えることを特徴とする。
第５の発明は、第１ないし４のいずれかの発明において、受給口が、拡径された開口を有し、一定量の液体材料を一時的に貯留できる形状であることを特徴とする。
第６の発明は、第１ないし５のいずれかの発明において、供給口の直下である第１の位置と、第１の位置と異なる第２の位置を進退動する液体材料受け部材を備えることを特徴とする。
第７の発明は、第１ないし６のいずれかの発明において、液体貯留部から供給部への液体材料の供給量を制御するピンチバルブおよび／または受給部から吐出装置への液体材料の供給量を制御するピンチバルブを備えることを特徴とする。
That is, the first invention is a liquid storage unit that stores liquid material, a supply unit that has a supply port that supplies the liquid material stored in the liquid storage unit, and a receiving port that receives the liquid material discharged from the supply unit And a receiving unit having a bubble removing mechanism and a receiving unit driving device that moves the receiving unit, and the receiving unit moves to a receiving position where the receiving port is located immediately below the supplying port to connect the supplying port and the receiving port The present invention relates to an automatic liquid supply mechanism that receives a drop supply of a liquid material from a remote position and supplies the liquid material from which bubbles have been removed by a bubble removal mechanism to a discharge device.
According to a second invention, in the first invention, the bubble removal mechanism includes a bubble removal container that stores the liquid material, one end immersed in the liquid stored in the bubble removal container, and the other end that is a receiving port. It is characterized by comprising an inflow pipe communicated with and an outflow pipe having one end immersed in a liquid stored in a bubble removing container and the other end communicated with a discharge device.
According to a third invention, in the second invention, the bubble removing mechanism has a pump device that depressurizes the bubble removing container, one end connected to the pump device, and the other end arranged in a space in the bubble removing container. And a working gas supply pipe.
According to a fourth invention, in the second or third invention, a detection device for detecting the amount of the liquid material in the liquid storage section and / or the bubble removing container is provided.
A fifth invention is characterized in that, in any one of the first to fourth inventions, the receiving port has an opening having an enlarged diameter and is capable of temporarily storing a certain amount of liquid material.
According to a sixth invention, in any one of the first to fifth inventions, a liquid material receiving member that moves forward and backward between a first position immediately below the supply port and a second position different from the first position is provided. It is characterized by.
According to a seventh invention, in any one of the first to sixth inventions, a pinch valve for controlling a supply amount of the liquid material from the liquid storage unit to the supply unit and / or a supply amount of the liquid material from the receiving unit to the discharge device It is characterized by comprising a pinch valve for controlling the above.
Claims (1)
液体貯留部に貯留された液体材料を供給する供給口を有する供給部と、
供給部から排出される液体材料を受ける受給口および気泡除去機構を有する受給部と、
受給部を移動させる受給部駆動装置とを備え、
受給部が受給口が供給口の直下に位置する受給位置に移動して供給口と受給口を接続することなく、離れた位置から液体材料の滴下供給を受け、気泡除去機構により気泡が除去された液体材料を吐出装置に供給することを特徴とする液体自動供給機構。 A liquid reservoir for storing liquid material;
A supply unit having a supply port for supplying the liquid material stored in the liquid storage unit;
A receiving port having a receiving port for receiving the liquid material discharged from the supplying unit and a bubble removing mechanism;
A receiving unit driving device for moving the receiving unit;
The receiving part moves to the receiving position where the receiving port is located directly below the supplying port, and receives the drop supply of the liquid material from a remote position without connecting the supplying port and the receiving port, and the bubbles are removed by the bubble removing mechanism. An automatic liquid supply mechanism for supplying a liquid material to a discharge device.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010207775A JP5566829B2 (en) | 2010-09-16 | 2010-09-16 | Liquid automatic supply mechanism and coating apparatus provided with the same |
| CN201180042922.3A CN103118802B (en) | 2010-09-16 | 2011-09-14 | Automated liquid supply mechanism and coater provided with same |
| PCT/JP2011/070920 WO2012036179A1 (en) | 2010-09-16 | 2011-09-14 | Automated liquid supply mechanism and coater provided with same |
| KR1020137006402A KR101795612B1 (en) | 2010-09-16 | 2011-09-14 | Automated liquid supply mechanism and coater provided with same |
| TW100133333A TWI573628B (en) | 2010-09-16 | 2011-09-16 | A liquid automatic supply mechanism and a coating device provided with the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010207775A JP5566829B2 (en) | 2010-09-16 | 2010-09-16 | Liquid automatic supply mechanism and coating apparatus provided with the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012061424A JP2012061424A (en) | 2012-03-29 |
| JP2012061424A5 true JP2012061424A5 (en) | 2013-11-14 |
| JP5566829B2 JP5566829B2 (en) | 2014-08-06 |
Family
ID=45831636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010207775A Active JP5566829B2 (en) | 2010-09-16 | 2010-09-16 | Liquid automatic supply mechanism and coating apparatus provided with the same |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5566829B2 (en) |
| KR (1) | KR101795612B1 (en) |
| CN (1) | CN103118802B (en) |
| TW (1) | TWI573628B (en) |
| WO (1) | WO2012036179A1 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6218219B2 (en) * | 2013-07-12 | 2017-10-25 | 東レエンジニアリング株式会社 | Air vent system |
| JP2015182039A (en) * | 2014-03-25 | 2015-10-22 | 株式会社Ｓｃｒｅｅｎホールディングス | Coating applicator and defoaming method |
| PL2954958T3 (en) * | 2014-06-11 | 2018-07-31 | Umicore Ag & Co. Kg | Apparatus for coating a substrate |
| JP6244421B1 (en) | 2016-07-27 | 2017-12-06 | 株式会社キャタラー | Exhaust gas purification catalyst manufacturing method and manufacturing apparatus |
| JP6993276B2 (en) * | 2018-03-27 | 2022-01-13 | 株式会社Ｉｈｉ回転機械エンジニアリング | Liquid material supply device |
| JP7277127B2 (en) * | 2018-04-11 | 2023-05-18 | キヤノン株式会社 | Ejection Material Filling Method, Ejection Material Ejection Apparatus, and Imprint Apparatus |
| CN111036442B (en) * | 2019-10-08 | 2023-04-11 | 吉林大学 | Cotton swab processor for animal experiment unhairing process |
| CN111290178B (en) * | 2020-02-25 | 2022-08-05 | 深圳市华星光电半导体显示技术有限公司 | Liquid crystal dripping device |
| CN113198643B (en) * | 2021-04-25 | 2022-04-22 | 浙江中聚材料有限公司 | Solar backboard coating device |
| CN116273729B (en) * | 2023-01-28 | 2023-10-20 | 中山市美速光电技术有限公司 | Adhesive dispensing device for ultra-fine pitch optical fiber array |
| JP2024126892A (en) * | 2023-03-08 | 2024-09-20 | 東レエンジニアリング株式会社 | Vent Tank |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3259309B2 (en) * | 1992-01-23 | 2002-02-25 | カシオ計算機株式会社 | Method and apparatus for defoaming liquid resin |
| US6431670B1 (en) * | 2000-02-14 | 2002-08-13 | Hewlett-Packard Company | Ink level sensing method and apparatus |
| JP2001267399A (en) * | 2000-03-14 | 2001-09-28 | Canon Inc | Method for detecting of substrate and substrate storing equipment |
| JP2001267339A (en) * | 2000-03-15 | 2001-09-28 | Sanyu Rec Co Ltd | Apparatus and method of manufacturing electronic component |
| JP4330295B2 (en) * | 2001-09-10 | 2009-09-16 | 大日本印刷株式会社 | Paste application method |
| JP2005209778A (en) * | 2004-01-21 | 2005-08-04 | Hitachi Maxell Ltd | Resist coating apparatus, photoresist coating method, and optical disk manufacturing method |
| US7344230B2 (en) * | 2004-09-07 | 2008-03-18 | Fujifilm Dimatix, Inc. | Fluid drop ejection system capable of removing dissolved gas from fluid |
| EP1656863B1 (en) * | 2004-11-11 | 2011-03-02 | Nestec S.A. | Self-cleaning mixing head for producing a milk-based mixture and beverage production machines comprising such a mixing head |
| JP4985191B2 (en) * | 2006-08-15 | 2012-07-25 | 東京エレクトロン株式会社 | Buffer tank, intermediate storage device, liquid processing apparatus, and method for supplying processing liquid |
| JP4607919B2 (en) * | 2007-05-23 | 2011-01-05 | 武蔵エンジニアリング株式会社 | Gantry type work equipment |
-
2010
- 2010-09-16 JP JP2010207775A patent/JP5566829B2/en active Active
-
2011
- 2011-09-14 KR KR1020137006402A patent/KR101795612B1/en active Active
- 2011-09-14 WO PCT/JP2011/070920 patent/WO2012036179A1/en active Application Filing
- 2011-09-14 CN CN201180042922.3A patent/CN103118802B/en active Active
- 2011-09-16 TW TW100133333A patent/TWI573628B/en active
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