JP2010172803A - Micro-reactor module and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a plate-laminated type micro-reactor module where plates can be mutually bonded with proper strength by diffusion bonding even if a channel area that is a channel of fluid is increased in this module. <P>SOLUTION: A heat transfer medium circulation unit 100 is configured by bonding a lower plate 10 and an upper plate 20. A recess 13 is formed in a region inside an outer circumferential section 12 on the upper surface of the lower plate 10 and a plurality of ribs 11 are erected from the bottom of the recess 13. A recess 23 is formed in a region inside an outer circumferential section 22 on a lower surface of the upper plate 20 and a plurality of ribs 21 are erected from the bottom of the recess 23. The lower plate 10 and upper plate 20 are diffusively bonded such that the outer circumferential section 12 and the outer circumferential section 22 contact, and ceiling faces of the plurality of the ribs 11 and those of the plurality of the ribs 21 are laminated with both the faces contacted, and contacted portions are diffusively bonded. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a microreactor module and a manufacturing method thereof, and more particularly to a microreactor module manufactured by stacking a plurality of plates and performing diffusion bonding.

A microreactor has a minute flow channel with a flow channel width on the order of several μm to 1 mm, and a plurality of kinds of fluids guided to this flow channel are brought into contact with each other to be mixed or chemically reacted in a microscale space. Is a device that performs biomixing, chemical reaction, separation, and the like, and has many advantages compared to a conventional batch system using a reaction kettle (flask).
For example, if multiple fluids can be mixed and chemical reaction can be done in a short time with a small amount of sample, the equipment is small, and if the production technology of the product can be established at the laboratory level, it can be easily used for mass production by numbering up. Can be applied to reactions involving dangers such as explosions, can be quickly adapted to the production of compounds that require high-mix low-volume production, and production volume can be easily adjusted to meet demand It can be done.

For this reason, microreactors have been attracting attention as suitable devices for developing and producing materials and products by mixing or reacting fluids in the chemical and pharmaceutical industries, and their research and development have been actively conducted in recent years. Yes.
In general, when the application is mixing, it is called a micromixer, when it is a chemical reaction, it is called a microreactor, and a heat exchanger is called a micro heat exchanger. In this application, they are collectively referred to as a microreactor.

  As one of the structures of such a microreactor, a plate type has been favorably developed. An example is disclosed in Patent Document 1. In brief, a reactor module having an intended internal flow path structure is constructed by laminating several thin plates and joining them together. A structure in which a reaction space and a heat medium flow space are stacked vertically is realized, and a plate stacked reactor module with a heat exchanger that can perform heat exchange in parallel with mixing and reaction is provided.

US6537506B1

However, the plate laminated reactor module as in the conventional example has several problems.
First, so-called brazing can be mentioned as a method for simply joining the plates, but this method exposes the brazing material on the surface of the microchannel, and the original material characteristics are not utilized. This can result in quality problems. In this method, since wax (silver or the like) is melted by applying temperature, the melted silver may block the inside of the microchannel, and reproducibility is not ensured as a manufacturing method.

Diffusion bonding is an example of a bonding technique that overcomes such problems. In this method, the stacked plates are placed in a high-temperature furnace, the surface portions of the plates are melted in an inert gas atmosphere, and the plates are directly joined to each other. Therefore, the problem as in the case of brazing does not occur.
However, it is confirmed that the channel pattern to be formed causes a portion where the plates are not sufficiently joined to each other and the liquid to be circulated leaks. Particularly, in the unit for the heat medium, since the opening area of the channel is large, it is difficult to ensure the bonding strength between the plates.

  Accordingly, an object of the present invention is to provide a plate stacked microreactor module that can bond plates with high strength by diffusion bonding even when the channel area serving as a fluid flow path is increased.

In order to achieve the above object, a microreactor module according to the present invention has the following configuration.
(1) A first plate in which a first concave portion is provided in a region excluding the outer peripheral portion of the main surface, and a second plate in which a second concave portion is provided in a region other than the outer peripheral portion of the main surface are first The concave portion and the second concave portion are stacked so as to face each other, and includes a fluid unit that circulates fluid into an internal space formed by the first concave portion and the second concave portion, and a plurality of first ribs are provided from the bottom surface of the first concave portion. A plurality of second ribs are erected from the bottom surface of the second recess in accordance with the standing positions of the plurality of first ribs, and the first rib and the second rib are brought into contact with each other on the top surface. And diffusion bonding is performed at the contact surface.

(2) The plurality of first ribs and the plurality of second ribs are formed in a columnar shape, and are two-dimensionally distributed along the bottom surface of the first recess and the bottom surface of the second recess. Is preferred. In particular, the plurality of first ribs and the plurality of second ribs are preferably arranged in a matrix.
(3) The fluid unit is provided with an introduction port for introducing a fluid into the internal space and a discharge port for deriving the fluid from the internal space, and an inlet region in the internal space near the introduction port and an outlet region in the vicinity of the discharge port Then, it is preferable to set the density at which the first ribs and the second ribs are arranged to be lower than that of the central region sandwiched between the inlet region and the outlet region.

(4) Preferably, the plurality of first ribs and the plurality of second ribs define an interval between adjacent ribs on each plate to be equal to or larger than a diameter of each rib.
(5) In the microreactor module, the fluid unit is used as a heat medium unit for circulating a heat medium, and further provided with a reaction unit having a micro flow path for allowing a reaction liquid to flow therein, and the heat medium unit and the reaction unit are provided. They may be diffusion bonded together.

In order to achieve the above object, a method for manufacturing a microreactor module according to the present invention has the following configuration.
(6) When producing a fluid unit for circulating fluid, a first recess is provided in a region excluding the outer peripheral portion of the main surface, and a plurality of first ribs are provided upright from the bottom surface of the first recess. A first plate manufacturing step for manufacturing one plate, a second recess is formed in a region excluding the outer peripheral portion of the main surface, and a plurality of second recesses are formed from the bottom surface of the second recess according to the standing position of the plurality of first ribs. A plurality of first ribs, wherein the first plate and the second plate are opposed to each other so that the first concave portion and the second concave portion face each other. And a second step of laminating the second ribs so as to be in contact with each other, and a bonding step of bonding the contact surfaces of the first ribs and the second ribs by a diffusion bonding method.

(7) In the manufacturing method of the microreactor module, in the first plate manufacturing step, the plate material is subjected to a process of scraping a region corresponding to the first recess except for a region where the first rib is provided, and the second plate In the manufacturing process, the plate material may be subjected to a process of scraping off a region corresponding to the second recess except for a region where the second rib is provided.
(8) In the first plate manufacturing step and the second plate manufacturing step, it is preferable to perform the above processing on the plate material using a photoresist method.

  (9) In the laminating step, in addition to the first plate and the second plate, a plurality of reaction unit plates including a plate having an opening corresponding to the microchannel are laminated, and in the joining step, the first rib In addition to the diffusion bonding between the first and second ribs, the plurality of reaction unit plates may be diffusion bonded together.

According to the invention of (1) above, the first plate and the second plate are stacked so that the first recess and the second recess face each other, and the internal space is formed by the first recess and the second recess. A plurality of first ribs that are erected from the bottom surface of the first recess and a plurality of second ribs that are erected from the bottom surface of the second recess. Diffusion bonding.
Thus, since the 1st plate and 2nd plate which comprise a fluid unit are joined via a plurality of 1st ribs and 2nd ribs, joining between plates is reinforced. Therefore, a high-quality and high-performance stacked microreactor module that does not easily cause liquid leakage in the fluid unit is realized.

Further, in this fluid unit, the plurality of joined first ribs and second ribs penetrate the inner space in the stacking direction and support the support between the concave bottom surface of the first plate and the concave bottom surface of the second plate. Therefore, even if an external force is applied to the first plate and the second plate, it is difficult to bend and deform (stiffness is improved).
Therefore, the joint strength of the plate in the fluid unit and the strength against deformation are improved.

In such a fluid unit, the gap between the ribs serves as a fluid flow path, but heat exchange is also performed between the fluid and the ribs, so that heat exchange is excellent when used as a micro heat exchanger. Become.
Here, (2) each of the plurality of first ribs and the plurality of second ribs is formed in a columnar shape, and is two-dimensionally distributed along the bottom surface of the first recess and the bottom surface of the second recess. For example, the fluid can be circulated over the entire internal space, and the effect of improving the bonding strength and rigidity of the first plate and the second plate is great. In particular, if the plurality of first ribs and the plurality of second ribs are arranged in a matrix, the pressure loss when fluid flows through the gaps between the ribs can be reduced, and the bonding strength between the plates can be improved.

  (3) The fluid unit is provided with an introduction port for introducing a fluid into the internal space and a lead-out port for deriving the fluid from the internal space, and close to an inlet region and a lead-out port close to the introduction port in the internal space. In the outlet region, if the density at which the first ribs and the second ribs are arranged is set lower than that in the central region sandwiched between the inlet region and the outlet region, the fluid can be circulated uniformly throughout the internal space. Can do.

Further, (4) the plurality of first ribs and the plurality of second ribs are defined when the distance between adjacent ribs on each plate is defined to be equal to or larger than the diameter of each rib. Pressure loss can be reduced and fluid can be circulated more smoothly.
In the microreactor module, (5) the fluid unit is used as a heat medium unit for circulating a heat medium, and further provided with a reaction unit having a micro flow path for allowing a reaction liquid to circulate therein, and the heat medium unit and the reaction unit are provided. If they are diffusion-bonded to each other, a high-quality microreactor module in which the reaction unit and the heat exchanger are integrated and the bonding strength is excellent can be realized.

Also in the microreactor module manufactured by the invention of (6) regarding the manufacturing method, the first plate and the second plate constituting the fluid unit are interposed via the plurality of first ribs and second ribs as in (1). Therefore, the bonding strength of the plate in the fluid unit and the strength against deformation are improved.
In this method of manufacturing the microreactor module, (7) in the first plate manufacturing step, the plate material is subjected to a process of scraping off the region corresponding to the first recess except the region where the first rib is provided, and the second plate In the manufacturing process, the recess formation and the rib formation can be performed at the same time in one step by subjecting the plate material to a process of scraping off the region corresponding to the second recess except for the region where the second rib is provided. .

  Here, (8) in the first plate manufacturing step and the second plate manufacturing step, if the plate material is processed using a fat resist method, the first concave portion, the second concave portion, the first rib, The two ribs can be patterned easily and quickly with high accuracy. In the next lamination process, the first rib and the second rib can be aligned and brought into contact with each other with high accuracy, and the joining process can be performed quickly.

Therefore, it contributes to the simplification of the manufacturing process and also contributes to the reduction of the manufacturing cost.
In the microreactor module manufacturing method, (9) in the stacking step, in addition to the first plate and the second plate, a plurality of reaction unit plates including a plate having an opening corresponding to the microchannel are stacked, In the joining step, in addition to diffusion bonding of the first rib and the second rib, if the plurality of reaction unit plates are diffusion bonded to each other, the reaction unit and the heat exchanger are integrated as in (5). Thus, a high-quality microreactor module with excellent bonding strength can be realized.

It is a disassembled perspective view of the microreactor module concerning embodiment of this invention. It is a top view which shows the structure of the plate used for the said micro reactor module. It is sectional drawing which shows the structure of the plate used for the said micro reactor module.

FIG. 1 is an exploded perspective view showing the structure of the microreactor module according to the present embodiment.
A microreactor module 1 according to this embodiment is a stacked module in which a plurality of plates are stacked as shown in FIG. 1, and includes a reaction unit 300 and a heat medium circulation arranged so as to sandwich the reaction unit 300. The unit 100 and the heat medium circulation unit 200 are configured.

The heat medium circulation unit 100 is configured by joining a pair of plates 10 and 20, and the heat medium circulation unit 200 is configured by joining a pair of plates 60 and plates 70.
The reaction unit 300 is configured by joining three plates 30, 40, and 50.
(Reaction unit 300)
First, the reaction unit 300 will be described with reference to FIG.

The reaction unit 300 is configured such that the plate 40 is sandwiched between the plate 30 and the plate 50 from above and below.
The plate 40 located at the center is formed with meandering openings 41, 42, 43 serving as flow paths through which the reaction solution flows.
That is, the openings 41 and 42 serving as preheating passages are formed to meander from the start points 41S and 42S to reach the end points 41E and 42E, and the openings 41 and 42 join at the end points 41E and 42E. is doing. And the opening part 43 used as the channel | path of a reaction liquid is opened in the meandering form until it reaches the end point part 43E from the said junction point.

The plate 30 is opened with the reaction solution openings 31 and 32 so as to be aligned with the start points 41S and 42S of the preheating passage, and the plate 50 is aligned with the end point 43E of the opening 43. An opening 51 for deriving the reaction liquid is opened at a position where the reaction liquid is to be discharged.
In such a reaction unit 300, the reaction solution passage openings 41, 42 and 43 formed in the central plate 40 and the walls of the plates 30 and 50 facing the openings are the reaction solution passages. Create a space.

In the reaction unit 300, in order to form a path through which the heat medium flows in the stacking direction, the plate 40 is provided with openings 44 and 45 for heat medium through which the heat medium flows at both left and right ends. Openings 33 and 34 for the heat medium are also opened at the left and right ends of the plate 30 and the plate 50 at the aligned positions.
(Heat medium circulation unit 100, 200)
Here, the heat medium circulation unit 100 will be mainly described.

As shown in FIG. 1, the heat medium circulation unit 100 is configured by joining a lower plate 10 and an upper plate 20. 2A and 2B are plan views of the upper plate 20 and the lower plate 10 constituting the heat medium circulation unit 100. FIG. 2A shows the lower surface side of the upper plate 20, and FIG. 2B shows the upper surface side of the lower plate 10. Show.
On the upper surface of the lower plate 10, a recess 13 is formed at a certain depth in a region inside the outer peripheral portion 12, and a plurality of minute ribs 11 are erected from the bottom surface of the recess 13.

The height of each rib 11 is the same height as the outer peripheral part 12 (the top surface of the rib 11 is on the same plane as the outer peripheral part 12).
On the other hand, as shown in FIG. 2, a recess 23 is formed at a certain depth on the lower surface of the upper plate 20 in a region inside the outer peripheral portion 22, and a plurality of minute portions are formed from the bottom surface of the recess 23. Ribs 21 are erected. The height of each rib 21 is the same height as the outer peripheral portion 22 (the top surface of the rib 21 is on the same plane as the outer peripheral portion 22).

  Here, the concave portion 23 is formed in a mirror-symmetric shape with the concave portion 13 formed in the lower plate 10, and the plurality of ribs 21 are also in a mirror-symmetric shape with the plurality of ribs 11 provided in the lower plate 10. When the lower plate 10 and the upper plate 20 are stacked, the concave portion 13 and the concave portion 23 are aligned, and the plurality of ribs 11 and the plurality of ribs 21 are aligned (when projected in the stacking direction). In addition, the recess 13 and the recess 23 overlap each other, and the plurality of ribs 11 also overlap the plurality of ribs 21).

In this way, the lower plate 10 and the upper plate 20 are laminated in a state where the outer peripheral portion 12 and the outer peripheral portion 22 are in contact with each other, and the top surfaces of the plurality of ribs 11 and the top surfaces of the plurality of ribs 21 are in contact. Diffusion bonding is performed at the contact point.
In the heat medium circulation unit 100, in order to form a path for introducing and deriving the heat medium, the lower plate 10 is provided with an opening 16 for introducing a heat medium at the left end of the recess 13, and the upper plate 20, a heat medium opening 26 is formed at the left end of the recess 23, and a heat medium opening 27 is formed at the right end.

In addition, in order to form a path for the reaction solution, the lower plate 10 is provided with conduit portions 14 and 15 at a position aligned with the starting point portions 41S and 42S of the reaction unit 300, and the upper plate 20 also has a conduit. Portions 24 and 25 are erected.
The heat medium circulation unit 200 has substantially the same configuration as the heat medium circulation unit 100.

  That is, as shown in FIG. 1, the heat medium circulation unit 200 includes a lower plate 60 and an upper plate 70, and the upper surface of the lower plate 60 has a certain depth in a region inside the outer peripheral portion 62. A recess 63 is formed, and a plurality of minute ribs 61 are erected from the bottom surface of the recess 63, and the lower surface of the upper plate 70 is recessed at a certain depth in a region inside the outer peripheral portion. 73 is formed, and a plurality of minute ribs 71 are erected from the bottom surface of the recess 73 (see FIG. 3).

In the heat medium circulation unit 200, in order to form a path for introducing and deriving the heat medium, the lower plate 60 has a heat medium introduction opening 65 at the left end of the recess 63 and a heat medium at the right end. The upper plate 70 has an opening 75 for leading out the heat medium at the right end of the recess 73.
Further, in order to form a path for the reaction solution, a conduit portion 64 is erected on the lower plate 60 and a conduit portion 74 is also erected on the upper plate 70 at a position aligned with the end point portion 43E of the reaction unit 300. It is installed.
(Function of micro reactor module)
In this microreactor module, as indicated by an arrow in FIG. 1, the reaction solution A is introduced from the conduit portion 14 and then flows through the preheating opening 41 via the conduit portion 24 and the opening 31. On the other hand, the reaction liquid B is introduced from the conduit portion 15 as indicated by an arrow in FIG. 1, and then flows through the opening portion 42 for preheating via the opening portion 32 of the conduit portion 25. Then, after being mixed at the Y-shaped merging portion, the mixed reaction liquid C circulates in a serpentine shape through the opening 43 and passes through the opening 51 and the conduit portion 64 as indicated by arrows in the figure. And led out from the conduit portion 74.

  As shown by an arrow in FIG. 1, the heat medium D is introduced from the opening 16 at the lower left end, and a part of the heat medium D flows through the internal space of the heat medium circulation unit 100, and the openings 27, 34, 45, 53, 66 is led out from the opening 75 at the upper right end via 66, and the rest flows from the opening 65 through the opening 65, 33, 44, 52 through the internal space of the heat medium circulation unit 200 to the opening. Derived from the unit 75.

As described above, the heat medium D exchanges heat while flowing through the internal spaces of the heat medium circulation unit 100 and the heat medium circulation unit 200 that sandwich the reaction unit 300 from above and below.
(Plate material, opening formation method)
The plate material for producing each of the plates 10, 20, 30, 40, 50, 60, 70 is a material capable of forming a recess and opening, and the surface is heated at a predetermined temperature. Any material that can be in a molten state can be used. Examples include stainless steel, nickel alloy including Hastelloy (registered trademark of Haynes), glass, resin, ceramic material, etc. Among them, stainless steel, hastelloy, glass, and resin are preferable.

The opening for the plate material can be formed by using, for example, a method (laser method) of cutting the plate material with a predetermined size and pattern using a laser.
(Patterning of recesses and ribs)
A method of forming the recesses and ribs when the plates 10, 20, 60, 70 are produced will be described.

Forming recesses and ribs at the same time by applying a known pattern to the plate material on the main surface of the plate material, leaving a plurality of ribs and the outer periphery. Can do.
An example is a photoresist method using a photosensitizer.
A resist film is applied to the plate surface and exposed with a mask applied to the upper surface, so that the resist film is patterned only in the areas where the ribs and the outer peripheral part are formed, and the plate in the area where the resist film is not formed This is a technique for scraping off the material by etching or the like. Either the positive method or the negative method is possible.

Here, it is important to form the ribs on the upper and lower plates to be bonded to each other so that they are aligned at the same position when they are bonded together, but if they are formed by the photoresist method using the same shape mask, That is possible.
(Plate stacking and diffusion bonding)
The plates 10, 20, 30, 40, 50, 60, 70 are stacked on each other so as to be aligned and subjected to diffusion bonding.

That is, in the reaction unit 300, the conduit portions 31, 32 and the start point portions 41S, 42S are aligned so that the conduit portion 51 and the end point portion 43E are aligned.
In the heat medium circulation units 100 and 200, the ribs, the remaining surface portions (outer peripheral surfaces), the conduit portions are aligned with each other, and the surface portions facing each other are laminated. 3A and 3B, when the lower plate 60 and the upper plate 70 constituting the heat medium circulation unit 200 are stacked, the plurality of aligned ribs 61 and the plurality of ribs 71 are brought into contact with each other. The state in which the top surface 61a and the top surface 71a are in contact with each other, the state in which the outer peripheral portion 62 and the outer peripheral portion 72 in position alignment are in contact with each other, and the state in which the conduit portion 64 and the conduit portion 74 are in contact with each other are shown.

Then, when the plates laminated in this way are pressed and brought into close contact with each other and heated, mutual diffusion occurs at the contact portion, and diffusion bonding is performed. Thus, the units 100, 200, and 300 are formed, and the units 100, 200, and 300 are also joined to each other in a state in which the conduit portions are aligned with each other.
(Effects of ribs)
As described above, since the top surfaces of the ribs of the heat medium circulation units 100 and 200 are bonded to each other, high bonding strength is ensured even if the recesses formed in each plate have a large area.

Further, it should be noted that this contributes to the improvement of the joint strength between the plates 30, 40, 50 constituting the reaction unit 300 stacked not only on the heat medium circulation units 100, 200 but also on the upper part (lower part) thereof. It is.
That is, since the heat medium circulation units 100 and 200 are provided with ribs, when the diffusion bonding is performed, the plate 10, 20, 30, 40, 50, 60, 70 is pressed from above and below. Of course, the pressing force of the heat medium circulation units 100 and 200 is reliably transmitted to the reaction unit 300, and the plates constituting the reaction unit 300 are in close contact with each other, so that the diffusion bonding reaction is performed. The joint strength between them is also improved.

As a result, a high-quality and high-performance reactor module that is excellent in pressure resistance and hardly leaks in both the heat medium flow path of the heat medium circulation units 100 and 200 and the reaction liquid flow path of the reaction unit 300 is realized. The
(Rib arrangement form)
The arrangement form of the ribs in the heat medium circulation units 100 and 200 will be described in detail.

In each plate 10, 20, 60, 70, the shape of each rib standing on the bottom surface of the recess is preferably a columnar shape such as a columnar shape or a prismatic shape.
In addition, in order to diffusely join the top surfaces of the opposing ribs, it is desirable that the top surface of each rib be flat.
In order to increase the bonding strength between the plates, it is preferable to set a large number of ribs to be erected from the bottom surface of the recess. However, if the area occupied by the rib with respect to the bottom surface of the recess is increased, the flow area of the heat medium is secured. Hard to do. Therefore, as shown in FIG. 2, it is desirable that each rib is formed in a minute dot shape when seen in a plan view, and a large number of these are distributed and arranged on the bottom surface of the recess. As a result, it is possible to realize a module having excellent bonding strength while ensuring the flow path area of the heat medium.

Here, considering the pressure loss when the heat medium is circulated, it is desirable to secure the interval between the ribs to be equal to or greater than the rib diameter.
The pattern in which the dot-shaped ribs are arranged may be regularly (matrix-like) or irregularly arranged, but the dot-shaped ribs are arranged in a regular pattern. The flow of the fluid can be adjusted more smoothly than the irregular arrangement.

  The presence of ribs in the internal space also contributes to improvement in heat exchange efficiency. In other words, the presence of the rib in the internal space through which the heat medium flows increases the contact area between the heat medium and the inner space wall surface, so that heat transfer is rapidly performed between the heat medium and the reaction liquid. And this heat exchange property improves, so that the number of ribs increases. Accordingly, the heat exchange performance is dramatically improved by forming the plurality of ribs in the form of fine dots.

  Further, in order to reduce the pressure loss while securing the bonding strength to a certain degree or more, ribs 61L and 71L having a ceiling area larger than the ribs 61 and 71 are formed at the center of the plates 60 and 70 as shown in FIG. These top surfaces can be joined together. If it does so, the joint strength in a center part will improve. Accordingly, if the number of ribs 61 and 71 is reduced, the circulation pressure loss of the heat medium can be reduced.

The rib diameter (the diameter of the bottom surface when the rib is cylindrical, the diameter of the circle circumscribing the bottom surface when the rib is prismatic), and the rib interval (interval between adjacent ribs) are rib diameters of 100 μm to 1500 μm, the rib interval A range of 500 μm to 1500 μm is preferable, and a more preferable range is a rib diameter of 500 μm to 1000 μm and a rib interval of 500 μm to 1000 μm.
Here, as shown in FIG. 2, a tube portion 17 is formed in the central portion of the lower plate 10, and a through-hole for inserting a sensor (thermocouple) is provided in the tube portion 17 during assembly. Alternatively, the hole portion P into which the tube portion 17 is fitted can be formed at a position aligned with the tube portion 17.

In this way, the temperature sensor can be inserted so that the tip of the sensor is positioned in the vicinity of the flow path through which the reaction solution flows, so that the temperature of the reaction solution at that portion can be accurately measured.
Next, the density distribution in which the ribs are arranged in the internal space in the heat medium circulation units 100 and 200 will be described.

  As shown in FIG. 2B, in the lower plate 10, the ribs 11 are relatively rough in the recesses 13 in the regions F and G (that is, in the vicinity of the opening 16 and the outlet) near the both ends in the left-right direction. (Low density), and in the central region H in the left-right direction, it is relatively dense (high density). In addition, in the central region H in the left-right direction of the recess 13, the ribs 11 are relatively coarsely arranged at the peripheral edge (I and J in the drawing).

The arrangement pattern of the ribs 21 in the upper plate 20 is the same as shown in FIG.
The flow of the heat medium in the internal space is indicated by an arrow E in FIG.
Most of the heat medium introduced into the internal space from the opening 16 is distributed so as to spread in the regions F and I where the ribs are formed at low density, and the distributed heat medium is a rib in the central region H. Passing through the regions arranged in high density in parallel, the ribs reach the regions J and G on the outlet side where the ribs are formed in low density.

In this way, the heat medium flows uniformly over the entire recess 13 and a smooth flow is formed.
Next, the point that the heat medium circulation units 100 and 200 are formed by bonding two upper and lower plates respectively will be described.
It is also possible to form a heat medium circulation unit by laminating only one plate having a recess and a rib on each of the lower surface of the plate 30 and the upper surface of the plate 50 constituting the reaction unit 300. In order to secure the heat medium circulation passage, the thickness of the plate must be increased and the depth of the recess must be set deep. Therefore, it is difficult to ensure the strength of the plate. On the other hand, if two plates with recesses and ribs are bonded together as in this embodiment, the equivalent heat medium circulation passage space is ensured even if the recesses formed in each plate are half as deep. can do. Therefore, it is desirable in that the strength of the plate can be secured and the recesses can be easily formed.

(Variations, etc.)
In the above description, the plate for the heat medium is formed by bonding the plate provided with the rib in the concave portion, but the reaction unit can be formed by bonding the plate provided with the rib in the concave portion. In other words, the reaction unit may have the same structure as the heat medium circulation unit 100, and the mixed reaction solution may be circulated in the internal space.

  ADVANTAGE OF THE INVENTION According to this invention, what was excellent in the joint strength of each plate is realizable in the lamination | stacking type micro reactor module formed by laminating | stacking a some plate.

DESCRIPTION OF SYMBOLS 1 Microreactor module 100,200 Heat medium circulation unit 300 Reaction unit 10,20 Plate which comprises heat medium circulation unit 100 30,40,50 Plate which comprises reaction unit 300 60,70 Plate which comprises heat medium circulation unit 200 11 , 21, 61, 71 Rib 61a, 71a Top surface of rib
13, 23, 63, 73 Recess 63b, 73b Bottom of the recess

Claims (9)

The first plate in which the first concave portion is recessed in the region excluding the outer peripheral portion of the main surface and the second plate in which the second concave portion is provided in the region excluding the outer peripheral portion of the main surface are the first concave portion and the first plate. A fluid unit that is laminated so that the two recesses face each other, and circulates fluid in an internal space formed by the first recess and the second recess,
The fluid unit is
A plurality of first ribs are erected from the bottom surface of the first recess, and a plurality of second ribs are erected from the bottom surface of the second recess according to the erection position of the plurality of first ribs, A microreactor module, wherein the first rib and the second rib are in contact with each other at the top surfaces and are diffusion-bonded at the contact surfaces. Each of the plurality of first ribs and the plurality of second ribs is columnar,
2. The microreactor module according to claim 1, wherein the microreactor module is two-dimensionally distributed along the bottom surface of the first recess and the bottom surface of the second recess. The fluid unit includes
An introduction port for introducing fluid into the internal space, and a lead-out port for deriving fluid from the internal space are provided,
In the inlet area near the inlet and the outlet area near the outlet in the internal space, compared to the central area sandwiched between the inlet area and the outlet area,
The microreactor module according to claim 2, wherein the density at which the first rib and the second rib are disposed is set low. The plurality of first ribs and the plurality of second ribs are:
The microreactor module according to claim 2, wherein an interval between adjacent ribs on each plate is defined to be equal to or larger than a diameter of each rib. The fluid unit is a heat medium unit for circulating a heat medium as the fluid,
The microreactor module further comprises:
Equipped with a reaction unit having a micro flow channel for circulating the reaction solution inside,
The microreactor module according to claim 1, wherein the heat medium unit and the reaction unit are diffusion-bonded to each other. A method of manufacturing a microreactor module including a fluid unit for circulating a fluid,
A first plate manufacturing step of forming a first plate by forming a first recess in the region excluding the outer peripheral portion of the main surface and by standing a plurality of first ribs from the bottom surface of the first recess;
A second recess is formed in a region excluding the outer peripheral portion of the main surface, and a plurality of second ribs are erected from the bottom surface of the second recess in accordance with the standing positions of the plurality of first ribs to produce a second plate. A second plate making process,
The first plate and the second plate are stacked such that the first recess and the second recess face each other, and the plurality of first ribs and second ribs are in contact with each other on the top surfaces. Lamination process;
A method of manufacturing a microreactor module, wherein the fluid unit is manufactured through a bonding step of bonding contact surfaces of the first rib and the second rib by a diffusion bonding method. In the first plate manufacturing process,
Except for the region where the first rib is provided, the plate material is subjected to a process of scraping the region corresponding to the first recess,
In the second plate manufacturing step,
The method for manufacturing a microreactor module according to claim 6, wherein the plate material is subjected to a process of scraping an area corresponding to the second recess except for an area where the second rib is provided. In the first plate manufacturing step and the second plate manufacturing step,
8. The method of manufacturing a microreactor module according to claim 7, wherein the plate material is subjected to the processing using a fat resist method. In the lamination step,
In addition to the first plate and the second plate,
Laminating a plurality of reaction unit plates including a plate having an opening corresponding to a microchannel,
In the joining step,
The method for manufacturing a microreactor module according to any one of claims 6 to 8, wherein the plurality of reaction unit plates are diffusion bonded together in addition to the diffusion bonding of the first rib and the second rib.

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