WO2014200088A1 - Fluid control device, and fluid mixer - Google Patents

Abstract

This fluid control device is provided with a base body (2) which has a guide space (α, β(n)) provided with first trench structures (3) which communicate with a mixing area (Sa) through multiple first openings (5b) and communicate with a first inflow unit (3a), and with second trench structures (4) which communicate with the aforementioned mixing area (Sa) through multiple second openings (6b) and communicate with a second inflow unit (4a). Seen from the mixing area (Sa), the first trench structures (3) and the second trench structures (4) are substantially rectangular in shape, and the first trench structures (3) and the second trench structures (4) are arranged in parallel such that the long side of the first trench structures (3) is separated by a prescribed interval from the long side of the second trench structures (4).

Description

Fluid control device and fluid mixer

The present invention relates to a fluid control device that mixes fluid in a minute space, and a fluid mixer.
This application claims priority based on Japanese Patent Application No. 2013-126120 for which it applied on June 14, 2013, and uses the content here.
The fluid control device and the fluid mixer described above are preferably used for, for example, a micromixer and μTAS (also referred to as “Micro-TAS”: Micro Total Analysis Systems).
μTAS is a biochemical analysis device that uses MEMS technology to provide minute flow paths, reaction chambers, and mixing chambers on a chip, and analyzes various liquids and gases including blood and DNA with a single chip or device. means.

Microchemical processes that perform chemical processes such as mixing, reaction, extraction, separation, heating, and cooling in minute channels and in minute spaces have been proposed, and research on micromixers that enable highly efficient mixing in minute spaces has been conducted. ing.

A micromixer is a device that mixes samples in a minute space of several hundred μm or less, and the distance between substrates to be mixed can be shortened, so that the mixing efficiency can be greatly improved. As an example, a microemulsifier and an emulsification method capable of generating an emulsion without using a surfactant are known (Patent Document 1).
Also known is a micromixer that forms a liquid mixture by repeatedly dividing and mixing liquid flowing in from a plurality of inlets in a three-dimensional channel formed by a combination of plates with grooves cut by precision processing. (Non-Patent Document 1).

Further, a micro mixer of Institut fuer Mikrotechnik Mainz GmbH is known (Patent Document 2). In this micromixer, the flow paths are alternately arranged in the mixing section where two flow path groups are mixed, and a slit is provided in the upper part of the micromixer, and fluid flows out of the slit to mix the two liquids. To do.
Further, a micromixer has been proposed that includes a flow path group having a plurality of independent flow paths, and has a structure in which the flow path groups are arranged in a staggered pattern in the mixing unit.
However, in these micromixers, in order to divide the flow into a large number, it is necessary to form a complicated multi-channel using a precision processing technique, and there is a problem that the manufacturing cost increases.

Even in the case of using a multi-channel, the fluid is still laminar in the microchannel formed in a plane, and the fluid is agitated and mixed by diffusion of the fluid. Therefore, there is room for improvement with respect to mixing efficiency. Therefore, when a micromixer with a three-dimensional flow path is created by stacking plates with multi-flow paths, the device configuration becomes complicated, and liquid leaks at the junction interface of the stacked plates. There was a problem that the breakdown voltage could not be increased.
Furthermore, the solid matter generated by the substance derived from the fluid gradually accumulates at the intersections of the flow paths at the junction interface of the stacked plates and partially closes the flow paths. There was also a risk that efficiency would be greatly reduced.

Further, in the micromixer described in Patent Document 2, since the boundary surface of the two liquids to be mixed is two, the fluid mixing performance cannot be enhanced to the limit.

Japanese Unexamined Patent Publication No. 2004-81924 Japanese National Table 2003-500202

The present invention has been made in view of the above-described facts, and provides a fluid control device and a fluid mixer that can mix fluid extremely efficiently, have high processing capacity, and have a high pressure resistance. Objective.

The fluid control device according to the first aspect of the present invention communicates with the mixing portion through the plurality of first openings and through the first trench structure and the plurality of second openings that communicate with the first inflow portion. And a base having an induction space having a second trench structure communicating with the mixing portion and communicating with the second inflow portion, and when viewed from the mixing portion, the first trench structure and the second trench The structure has a substantially rectangular shape, and the first trench structure and the second trench are arranged such that a long side of the first trench structure is separated from a long side of the second trench structure at a predetermined interval. The structures are arranged in parallel.

In the fluid control device, the plurality of first openings and the plurality of second openings may be arranged in a two-dimensional direction on a surface on the base on which the mixing unit is provided.

In the fluid control device, the first opening and the second opening adjacent to each other than the distance between the plurality of first openings adjacent to each other and the distance between the plurality of second openings adjacent to each other. It may be arranged so that the distance of is small.

In the fluid control device, the first trench structure is divided by a first partition wall arranged along a long side direction of the first trench structure,
The second trench structure may be divided by a second partition wall arranged along the long side direction of the second trench structure.

A fluid mixer according to a second aspect of the present invention includes a fluid control device according to the first aspect, a single outflow space communicating with the plurality of first openings and the plurality of second openings, A housing having a first inflow space communicating with the first inflow portion and a second inflow space communicating with the second inflow portion.

According to the present invention, it is possible to provide a fluid control device and a fluid mixer that enable extremely efficient mixing, have high processing capability, and have high pressure resistance.

It is a schematic diagram which shows an example of the fluid control device which concerns on 1st Embodiment (type 1). It is a mimetic diagram showing a fluid control device concerning modification 1A of a 1st embodiment. It is a mimetic diagram showing a fluid control device concerning modification 1B of a 1st embodiment. It is a cross-sectional schematic diagram which shows an example of the fluid mixer provided with the fluid control device of 1st Embodiment. It is a top view which shows arrangement | positioning of the opening part of the flow path with respect to the outflow space in a fluid control device. It is a cross-sectional schematic diagram which shows the shape of the micropore in a fluid control device. It is the perspective view which showed typically the fluid control device provided with the temperature control apparatus. It is a cross-sectional schematic diagram which shows another example of the fluid mixer provided with the fluid control device of 1st Embodiment. It is a schematic diagram which shows an example of the fluid control device which concerns on 2nd Embodiment (type 2). It is a mimetic diagram showing a fluid control device concerning modification 2A of a 2nd embodiment. It is a mimetic diagram showing a fluid control device concerning modification 2B of a 2nd embodiment. It is a cross-sectional schematic diagram which shows an example of the fluid mixer provided with the fluid control device of 2nd Embodiment. It is a schematic diagram for demonstrating the structure of the fluid mixer provided with the fluid control device which can be attached or detached. It is a schematic diagram which shows one structural example of (mu) TAS chip | tip carrying a fluid control device. It is a schematic diagram which shows one structural example of the fluid control device which concerns on a comparative example.

Next, the present invention will be described in more detail with reference to the drawings with reference to embodiments and specific examples. However, the present invention is not limited to these embodiments and examples.
In the following description using the drawings, it should be noted that the drawings are schematic, and the ratio of the length of each member is different from the actual one, for ease of understanding. Illustrations other than those necessary for the explanation are omitted as appropriate.

(1) Configuration of fluid control device (Type 1)
(1-1) First Embodiment (No. E1)
FIG. 1 is a schematic diagram illustrating a configuration example of a fluid control device 1a (1) according to the present embodiment. FIG. 1A is a perspective view schematically showing the fluid control device 1. FIG. 1B is a schematic cross-sectional view taken along arrow X1-X1. FIG. 1C is a schematic cross-sectional view taken along arrow Y1-Y1. FIG.1 (d) is a top view of arrow Z1 (plan view at the time of observing the fluid control device 1a from the direction of Z1).
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

The fluid control device 1a (1) according to the present embodiment communicates with the mixing unit (single mixing space) Sa through the plurality of first openings 5b and communicates with the first inflow unit 3a. A base body having guide spaces α and β (n) including the second trench structure 4 communicating with the second inflow portion 4a while communicating with the mixing portion Sa via the trench structure 3 and the plurality of second openings 6b. Prepare.
In the fluid control device 1a (1) according to the present embodiment, the first trench structure 3 and the second trench structure 4 have a substantially rectangular shape when viewed from the mixing portion Sa, and the first trench structure 3 The first trench structure 3 and the second trench structure 4 are arranged in parallel so that their long sides are separated from the long side of the second trench structure 4 at a predetermined interval.

As shown in FIG. 1, the fluid control device 1 a (1) communicates with the mixing unit (single mixing space) Sa through the plurality of first openings 5 b and communicates with the first inflow unit 3 a. Inductive spaces α and β (n) each having a second trench structure 4 that communicates with the mixing portion Sa and communicates with the second inflow portion 4a through one trench structure 3 and a plurality of second openings 6b. Having a substrate.
In addition, the single mixing space (mixing part) in this embodiment is a surface where several opening part 5b, 6b of fluid control device 1a (1) touches, and shows the space on area | region A (outflow space Sa). ing.
The trench structure is a groove having a substantially rectangular shape as shown by reference numerals 3 and 4 in FIG. 1 and having a depth. Inside the base body 2, a groove having a substantially rectangular shape like the trench structures 3 and 4 and having a depth is formed.
In particular, the fluid control device 1a (1) according to the first embodiment shown in FIG. 1 includes two inflow spaces Sb (see FIG. 4, first inflow space) and Sc (see FIG. 4) in the flat substrate 2. The reference (second inflow space) is disposed at a position (region B and region C) close to two side surfaces (surface on which the first inflow portion 3a and the second inflow portion 4a are provided) facing each other in the base 2 Shows the case. In addition, the fluid control device 1 a (1) according to the present embodiment shows a case where the outflow space (mixing space) Sa is arranged at a position (A) close to the upper surface of the base 2 in the flat base 2. .
A plurality of trench structures 3 and 4 are formed in a single substrate 2. When viewed from the mixed space Sa, the trench structures 3 and 4 have a substantially rectangular shape. As shown in the partially enlarged view of the substantially rectangular trench structure 3, when viewed from the mixed space Sa, the distal end portion 3 </ b> P of the first trench structure 3 (that is, the portion farthest from the inflow space Sb) The portion where the concave portion is formed may be linear (a concave portion having a bottom portion substantially parallel to the side surface of the base when the base is viewed from above), or a rounded shape (for example, an arc shape). It may be. The tip portion 4P of the second trench structure 4 also has the same shape as the tip portion 3P of the first trench structure 3.
Further, the first trench structure 3 and the second trench structure 4 are adjacent to each other in the plurality of induction spaces in the base 2. Further, the long side of the first trench structure 3 and the long side of the second trench structure 4 are arranged in parallel so as to be spaced apart and have a predetermined interval.

A plurality of fine holes 5 and 6 are formed in the base 2 so as to be connected to each of the plurality of trench structures 3 and 4.
When viewed from the mixing space Sa, the first openings 5 b of the plurality of guide spaces are formed from the plurality of first micro holes 5. Further, as viewed from the mixing space Sa, the second openings 6 b of the plurality of guide spaces are formed from the plurality of second micro holes 6.
When viewed from the first inflow space Sb (region B located on the side surface of the base body 2), the third openings of the plurality of guide spaces are provided in the plurality of first trench structures 3, respectively. In addition, when viewed from the second inflow space Sc (region C located on the side surface of the base 2), the fourth openings (second inflow portions) 4a of the plurality of guide spaces have a plurality of second trench structures. 4 is provided.
The plurality of first openings 5b of the plurality of first micro holes 5 in the plurality of first trench structures 3 communicate with the first inflow space Sb (the space formed in the region B in FIG. 1A). is doing. Further, the plurality of second openings 6b of the plurality of second micro holes 6 in the plurality of second trench structures 4 are formed as second inflow spaces Sc (inflow spaces formed in the region C in FIG. 1A). ). The first trench structure 3 and the second trench structure 4 each communicate with different inflow spaces.

A guide space group α (a guide space group formed by the plurality of first trench structures 3) constituting a specific group among the plurality of guide spaces is a region A (surface of the base body 2) on the surface (outer surface) of the base body 2. A plurality of first openings 5b are provided on the upper surface. The guide space group α includes a plurality of third openings (first inflow portions) 3a in a region B (first side surface of the base 2) on the surface (outer surface) of the base 2.
The induction space group β (1) (induction space group formed by the plurality of second trench structures 4) constituting another specific group of the induction spaces is plural in the region A on the surface (outer surface) of the base 2. The second opening 6b is provided. The guide space group β (1) has a plurality of fourth openings (second inflow portions) 4a in the region C (second side surface of the base 2).
Further, in the base 2, the plurality of first micro holes 5 belonging to the guidance space group α and the plurality of second micro holes 6 belonging to β (1) are arranged apart from each other.

As shown in the schematic cross-sectional views of FIG. 1B and FIG. 1C, the plurality of first trench structures 3 and the plurality of first micro holes 5 provided in the single substrate 2 are formed by the substrate. It is formed as a three-dimensional guidance space group α in which the region A and the region B are communicated with each other on the surface (outer surface). Similar to the guide space group α, the plurality of second trench structures 4 and the plurality of second micro holes 6 are three-dimensional guide spaces in which the region A and the region C on the surface (outer surface) of the base 2 are communicated with each other. It is formed as a group β (1).

The plurality of first openings 5b in the plurality of first micro holes 5 of the guide space group α facing the region A and the plurality of second openings of the plurality of second micro holes 6 in the guide space group β (1). 6b are arranged in a two-dimensional direction on the surface facing the region A as shown in FIG. Further, the openings (the first opening 5b and the second opening 6b) are alternately formed so as to have the most adjacent positions.
In the fluid control device 1 of the present embodiment, different materials (fluids) flow from different inflow spaces. For example, the first material (first fluid) flows in from the inflow space Sb and passes through the plurality of first trench structures 3 and the plurality of first micro holes 5 which are induction spaces. Further, the second material (second fluid) flows in from the inflow space Sc and passes through the plurality of second trench structures 4 and the plurality of second micro holes 6 which are induction spaces. Then, the first material flowing out from the plurality of first micro holes 5 and the second material flowing out from the plurality of second micro holes 6 flow out from a common space, for example, the mixing space Sa.
In the fluid control device 1 of the present embodiment, a plurality of micro holes 5 and 6 arranged in connection with the plurality of trench structures 3 and 4 are formed in the base body, so that the induction space formed in the base body is formed only by the trench structure. The flow velocity distribution can be made more uniform than when formed. Furthermore, in the fluid control device 1 according to the first embodiment, by forming the plurality of fine holes 5 and 6 in the base body, the pressure loss in the induction space is minimized, and the boundary surface between the two liquids to be mixed is changed to 4. It can be a surface. For this reason, in the fluid control device 1 of the first embodiment, the mixing speed of the two fluids can be increased.
In addition, in the micromixer described in Patent Document 2, there are two boundary surfaces of the two liquids to be mixed.

(1-2) Modification 1A (No. E2)
FIG. 2 is a schematic view showing a modified example (hereinafter also referred to as modified example 1A) of the fluid control device 1 according to the present embodiment (first embodiment), and is a plan view taken along the arrow Z2. In addition, arrow Z2 is a top view at the time of observing a base | substrate from the upper surface similarly to arrow Z1 in FIG.
By appropriately changing the three-dimensional layout of the trench structure and the microscopic holes shown in FIG. 1, the openings facing the region A of the microscopic holes of the guiding space group α and the guiding space group β (1) are shown in FIG. Like the fluid control device 1b (1) shown in FIG. 2, it can also be arranged on the substrate so as to have a staggered pattern (FIG. 2).
By arranging the plurality of openings 5b and 6b of the plurality of fine holes 5 and 6 connected to the plurality of trench structures 3 and 4 in a staggered pattern, the flow velocity distribution can be adjusted uniformly. . Furthermore, the boundary surface of the two liquids to be mixed can be four. For this reason, in this embodiment, the mixing speed of the fluid can be increased.

In the region A, the width and the side length of the plurality of trench structures 3 and 4 are preferably in the order of micrometer to nanometer, for example.
Moreover, it is preferable that the distance between the openings of the plurality of trench structures 3 and 4 is, for example, on the order of micrometers or nanometers. When a plurality of types of fluids are ejected to the outside of the region A (mixing space Sa) through the plurality of trench structures 3 and 4 and the respective fluids are mixed, the processing capability when mixing the plurality of types of fluids increases. It is.

In the region A, the long diameters of the plurality of fine holes 5 and 6 are preferably in the order of micrometer to nanometer, for example. Moreover, it is preferable that the distance between the openings of the plurality of micropores 5 and 6 is, for example, on the order of micrometer or nanometer. When a plurality of types of fluids are ejected to the outside of the region A (mixing space Sa) through the plurality of fine holes 5 and 6 and the respective fluids are mixed, the processing capability when mixing the plurality of types of fluids increases. It is.
In this embodiment (for example, description of the fluid control device 1b (1) according to this embodiment), “mixing” means mixing, reacting, or emulsifying a plurality of fluids (forming an emulsion). (Hereinafter, the same meaning is used in the description of μTAS).
The number of the trench structures 3 and 4 and the plurality of fine holes 5 and 6 constituting the induction space group α and the induction space group β (1) is not particularly limited, and the type of fluid to be controlled, It can be appropriately selected according to the processing capacity. Further, the region B and the region C may be arranged in different regions on the same substrate surface. Further, the region A, the region B, the region C, etc. may all exist on the same surface.

(1-3) Modification 1B (No. E3)
FIG. 3 is a schematic diagram showing a modified example (hereinafter also referred to as modified example 1B) of the fluid control device 1 according to the present embodiment (first embodiment). FIG. 3A is a perspective view schematically showing the fluid control device 1c (1). FIG. 3B is a schematic cross-sectional view taken along the arrow X3-X3. FIG. 3C is a schematic cross-sectional view taken along arrow Y3-Y3. FIG. 3D is a plan view of the arrow Z3. Similarly to FIG. 1, “Modification 1B” shown in FIG. 3 is also similar to FIG. 1. In the base having a flat plate shape, the two inflow spaces Sb and Sc are close to the two side surfaces facing the base (position close to the region B, The case where it is arranged at a position close to the region C) is shown. Further, “Modification 1B” shown in FIG. 3 represents a case where the outflow space Sa is arranged at a position close to the upper surface of the substrate (position close to the region A).

In the fluid control device 1c (1), the plurality of trench structures 3 and 4 are divided into two or more by a plurality of partition walls 31 and 41 arranged along the long side direction of the plurality of trench structures. In the case of FIG. 3, each of the trench structures 3 is divided into three (3a), and the trench structure 4 is also divided into three (4a). This minimizes the variation in pressure loss in the induction space and enables more uniform fluid mixing.
In the configuration example of FIG. 3 as well, each of the plurality of trench structures 3 and 4 has a substantially rectangular shape when viewed from the mixed space Sa. As shown in the partially enlarged view of FIG. 3C, the tip portion 3P of the trench structure 3 (that is, the portion farthest from the inflow space, a recess is formed in the substantially rectangular trench structure 3 as shown in the partial enlarged view of FIG. May be a straight line (a concave portion having a bottom portion substantially parallel to the side surface of the substrate when the substrate is viewed from above), and has a rounded shape (for example, an arc shape). May be. The tip 4P of the trench structure 4 is the same as the tip 3P of the trench structure 3.

The fluid control device 1 (1a, 1b, 1c) according to the first embodiment described above can be configured in the fluid mixer 10 by being arranged in the housing 20.
(2) Configuration of fluid mixer (Type 1)
FIG. 4 is a schematic cross-sectional view showing a configuration example of the fluid mixer 10A (10), in which the fluid control device disclosed in (1-1) is mounted.
As shown in FIG. 4A, the fluid mixer 10A (10) has the fluid control device 1 and the fluid control device 1 inside, faces the area A of the fluid control device 1, and the fluid control device 1. A single outflow space (single mixing space) Sa that communicates with the plurality of micropores 5 and 6, a region B of the fluid control device 1, and a communication with the first inflow portion 3 a of the fluid control device 1 And a single inflow space Sc that faces the region C and communicates with the second inflow portion 4a of the fluid control device 1. As the case 20, for example, a metal such as stainless steel can be used. The fluid mixer 10A (10) shown in FIG. 4A is configured such that the fluid control device 1 (the outer surface) and the housing 20 (the inner surface) are in direct contact with each other.

The casing 20A (20) includes an upper casing 20a that forms an outflow space Sa so as to face the surface (outer surface) of the region A of the base 2 constituting the fluid control device 1, and the regions B and C of the base 2. The lower housing 20b that forms the inflow space Sb and the inflow space Sc so as to face the surface (outer surface) of Further, the respective surfaces (outer surfaces) of the regions A, B, and C of the fluid control device 1 and the upper casing 20a and the lower casing 20b are joined via a seal member (not shown) as necessary. . The outflow space Sa and the inflow spaces Sb and Sc are formed as independent spaces. An elastic seal member such as an O-ring can be used as the seal member.
In the fluid mixer 10A (10), different materials (fluids) flow from different spaces. For example, the first material (first fluid) flows in from the inflow space Sb and passes through the plurality of first trench structures 3 and the plurality of first micro holes 5 which are induction spaces. Further, the second material (second fluid) flows in from Sc and passes through the plurality of second trench structures 4 and the plurality of second micro holes 6 which are induction spaces. And the 1st material which flowed out from a plurality of 1st minute holes 5 and the 2nd material which flowed out from a plurality of 2nd minute holes 6 are from common space, for example, outflow space (mixing space) Sa. leak.

As shown in FIG. 4, in the fluid mixer 10 </ b> A (10), the fluid control device 1 can be attached and detached by sandwiching and joining the fluid control device 1 between the upper and lower housings 20 a and 20 b. . Therefore, the fluid control device can be appropriately selected or regularly maintained (repaired or replaced) according to the type and nature of the fluid to be mixed.

(3) Other application examples of the fluid control device (a) In such a fluid control device 1 (1a, 1b, 1c), it is preferable that the variation in the pressure loss of the plurality of induction spaces is within ± 10%. .
When it is assumed that a fluid can flow in a plurality of induction spaces at a constant speed, the trench structures 3 and 4 and the fine holes 5 and 6 are designed so that the variation in pressure loss of each induction space is within ± 10%. It is preferable. When the variation in the pressure loss is larger than ± 10%, depending on the processing speed, there is a possibility that a large variation occurs in the mixing property of the fluid.

(B) In the fluid control device 1 (1a, 1b, 1c), it is preferable that the plurality of guide spaces have substantially the same length.
By unifying the lengths of the plurality of trench structures 3 and 4 and the plurality of micro holes 5 and 6 that function as guide spaces, each of the micro holes 5 and 6 in the plane facing the outflow space (mixed space) Sa The flow velocity of the fluid in the openings 5b and 6b can be made uniform. By aligning the flow velocity of the fluid in the plurality of openings 5b and 6b of the plurality of micro holes 5 and 6, which are the outlets of the respective induction spaces, the fluid can flow out uniformly and the fluid can be mixed more uniformly. it can. The flow rate error in the openings 5b and 6b of each fine hole is preferably within an average value ± 100% of the fluid flow rate, and more preferably within an average value ± 50% of the fluid flow rate.

When it can be considered that the width, the length of the short side, or the diameter of each trench structure 3, 4 and each microhole 5, 6 is the same, the length of the long side of each trench structure 3, 4 and each microhole 5, 6 Should be designed to be equal in length. Thereby, the flow velocity of the fluid in each opening 5b, 6b of each micropore 5, 6 can be equalized. On the other hand, when the trenches 3 and 4 and the fine holes 5 and 6 have different widths and short side lengths or diameters, by appropriately changing the lengths according to the widths and short side lengths or diameters, The flow velocity of the fluid in the plurality of openings 5b and 6b can be made more uniform. When changing the lengths of the trench structures 3 and 4 and the fine holes 5 and 6, the pitches of the plurality of first openings 5b and the plurality of second openings 6b serving as outlets are adjusted, or the flow is changed. By adjusting the positions of the plurality of third openings (first inflow portions) 3a and the plurality of fourth openings 4a serving as inlets, the lengths of the trench structures 3 and 4 and the fine holes 5 and 6 are adjusted. You can change that.

(C) In the fluid control device 1 (1a, 1b, 1c), the arrangement of the plurality of openings 5b, 6b of the plurality of micro holes 5, 6 in the plane facing the outflow space Sa faces the outflow space Sa. A plurality of fine holes 5 and 6 may be arranged in the plane so that the pitch is random.
The pitch of the plurality of openings 5b, 6b of the plurality of micro holes 5, 6 which are the outlets of the guide space is disturbed, and the plurality of micro holes 5, 6 are randomly arranged. Thereby, the diffusion length of each fluid passing through the plurality of micropores 5 and 6 differs depending on the location where the plurality of micropores 5 and 6 are provided, and nonuniform (random) mixing can be realized. As a result, a random product can be obtained. For example, when this fluid control device 1, 1a, 1b is used for the production of nanoparticles, not monodisperse particles with uniform particle size but polydisperse particles with a uniform variation in particle size are stabilized at a time. Can be processed.

(D) In the fluid control device 1 (1a, 1b, 1c), in-plane identification of the arrangement of the plurality of openings 5b, 6b of the plurality of micro holes 5, 6 in the plane with respect to the outflow space (mixing space) Sa The plurality of fine holes 5 and 6 may be arranged so that the pitch in the region (first region) and the pitch in the other specific region (second region) are different.
For example, as shown in FIG. 5, with respect to the pitch of the plurality of openings 5b, 6b of the plurality of micro holes 5, 6 that are the outlets of the guide space, the pitch of the first region M in the plane and the second It arrange | positions so that the pitch of the area | region N may differ. As a result, the diffusion length of the fluid changes depending on the in-plane region. For example, when the pitch of the micropores in the first region M is made small (narrow) and the pitch of the micropores in the second region N is made large (wide), the fluid mixing speed becomes faster in the first region M. In the second region N, it becomes slower. Thereby, for example, when this fluid control device is used for the production of nanoparticles, it is possible to simultaneously mold particles having a particle size of two levels, not monodispersed particles having a uniform particle size. For example, two different types of products or products with variations can be obtained.

(E) In the fluid control device 1 (1a, 1b, 1c), the diameter of each micropore is reduced at a position close to the plurality of openings 5b, 6b of the plurality of micropores 5, 6 in the plane with respect to the outflow space Sa. It is good also as the structure (The diameter of the micropore became small).
As shown in FIG. 6, the diameter of each microhole 5, 6 is reduced (designed to reduce the diameter) at a position close to the plurality of openings 5 b, 6 b of the plurality of microholes 5, 6, which is the outlet of the guide space And taper. Thereby, the flow velocity of the fluid at a position close to the outlet is increased, and a vortex is easily generated. Thereby, the mixing property of the fluid is improved. Moreover, since only the micropore diameter at a position close to the outlet is small, it is possible to minimize an increase in pressure loss.
In FIG. 6, only one hole is shown in order to explain the shape of the fine hole.

As a suitable angle for the taper angle, when the outlet diameter of the micropores 3 and 4 is d1 and the internal diameter is d2, the ratio (ΔD (d1−d2)) of the reduction of the guide space width to the taper distance L / L) is preferably in the range of 0.05 to 2, more preferably in the range of 0.1 to 1. When (ΔD / L) is smaller than 0.05, it is difficult to produce a sufficient micropore diameter difference. On the other hand, when (ΔD / L) is greater than 2, depending on the type of fluid, stagnation occurs in the induction space, and deposits are easily formed in the induction space. For example, when the outlet diameter d1 of the micropore is 23 μm and the inner diameter d2 is 25 μm, an increase in flow rate of about 18% can be expected at a position close to the outlet. Therefore, if the difference ΔD in the induction space diameter is 1 μm or less, a sufficient effect can be obtained.

(F) In the fluid control device 1 (1a, 1b, 1c), the diameter of the micropores is close to the plurality of openings 5b, 6b of the plurality of micropores 5, 6 in the plane facing the outflow space Sa. An expanded structure may be used.
It is good also as a structure which expanded the diameter of each micropore 5 and 6 in the position close | similar to several opening part 5b, 6b of several micropores 5 and 6 which is an outflow port of guidance space. By adopting such a structure, it is possible to suppress the separation of the flow generated between the two kinds of fluids flowing out from the plurality of adjacent fine holes 5 and 6. As a result, it is possible to suppress the turbulent flow and the resistance of the fluid that has flowed out of the plurality of micropores 5 and 6, so that the fluid can be pushed out with a larger pressure. As a result, the throughput of the mixture can be increased.

(G) In the fluid control device 1 (1a, 1b, 1c), a coating layer may be provided on the side wall of the guide space.
By providing a coating layer on the side walls of the plurality of trench structures 3 and 4 and the plurality of micro holes 5 and 6, the chemical resistance of the fluid control device can be improved. However, in order to provide chemical resistance, it is necessary to increase the thickness of the coating layer. Therefore, although it is difficult to provide a thick film coating layer at a position close to the substrate 2, it can be provided at a position close to the housing.
In addition, when a highly viscous fluid is allowed to flow through the guide space, there is a concern that deposits accumulate on the side walls and clog the holes. Since the fluororesin coating layer can be applied and formed as a thin film, it can also be formed in the micropores. Therefore, the clogging of the trench structures 3 and 4 and the fine holes 5 and 6 can be suppressed by providing the fluororesin coating layer near the base 2.

(H) In the fluid control device 1 (1a, 1b, 1c), a temperature adjusting device may be provided inside the base body 2.
A separate micro induction space may be provided downstream of the region A, and a temperature adjusting device may be provided so that the temperature of the substance flowing in the induction space can be controlled. Although it does not specifically limit as a temperature control apparatus, The wiring structure which functions as a heater or a heater and a temperature sensor part on the base | substrate 2 can be formed. At this time, an insulating layer may be provided on the substrate 2 in order to keep insulation against the solution. Examples of the wiring for the heater or the temperature sensor include nichrome and ITO. In addition, microwaves may be used to raise the temperature of the fluid control device 1.
For example, as shown in FIG. 7, a substance flowing in the base 2 is provided by providing a conduit or a PWW (post wall waveguide) 90 as a temperature control device on the base 2 and providing a flow path 25 in the base 2. Can be heated. In addition, a flow path is provided as a temperature control device on the base 2, and a fluid (liquid or gas) having an appropriate temperature is flowed through the flow path to raise and cool the substance flowing in the base 2. May be.

(I) In the fluid control device 1 (1a, 1b, 1c), a temperature adjusting device may be provided outside the base body 2.
A temperature adjusting device may be provided outside the base 2 (for example, the housing 20 portion). The temperature adjusting device is not particularly limited, and for example, a thermocouple that is a temperature sensor and a micro heater that is a heater can be used. What is necessary is just to provide the insertion port of these temperature control apparatuses in the outer side of the base | substrate 2. FIG. Alternatively, the temperature of the substance flowing in the base 2 may be raised and cooled by providing a flow path inside the base 2 and flowing a fluid (liquid or gas) having an appropriate temperature in the flow path.

(J) In the fluid control device 1 (1a, 1b, 1c), one of the substrates 2 (first outlet) communicates with the outflow space Sa and the other (second outlet) is on the surface of the substrate 2 You may have the outflow channel 21 connected. Further, the outlet channel 21 may have a structure in which the diameter is narrowed so that the first outlet is wide and the second outlet is narrow.
As shown in FIG. 8, an outlet provided in the housing 20, one (first outlet) communicating with the outflow space (mixing space) Sa and the other (second outlet) communicating with the surface. The channel 21 may have a structure having a restriction on the other side (second outlet) of the outlet channel 21. In the region A, since the plurality of micropores 5 and 6 have a two-dimensional arrangement (because the micropores are arranged in a plane), the opening area of the base 2 in the region A is larger than the area of the region having the guide space group. Need to have a large area. On the other hand, in order to increase the mixing speed of the two types of fluids that have exited the plurality of fine holes 5 and 6, it is preferable to reduce the diameter of the outlet channel and the diffusion distance between the fluids. For this reason, it is preferable that the outlet guide space in the region A has a restriction.

(4) Manufacturing method of fluid control device Next, the manufacturing method of the fluid control device 1 mentioned above is demonstrated. The manufacturing method of each fluid control device according to the modified example of the fluid control device 1 is the same as that of the fluid control device 1.

The manufacturing process of the fluid control device 1 according to the first embodiment is a process of forming a plurality of modified portions by condensing and irradiating a laser beam having a pulse width of a picosecond order or less inside the base 2. And a step of removing the modified portion formed inside the substrate 2 by etching to form a guide space (trench structure and fine holes).

(4-1) Modified Part Formation Step First, laser light irradiation is performed on a region that is a guide space of the base 2. As the light source of the laser light, for example, femtosecond laser light can be used. A femtosecond laser is a laser whose pulse width is on the order of femtoseconds (fs). Because it is an ultra-short pulse of several femtoseconds to several hundred femtoseconds, it has a high peak intensity and induces multiphoton absorption, which is a nonlinear optical phenomenon near the focal point. By changing the physical properties of a certain substrate 2, a fine modified portion can be formed on the substrate 2. At that time, as the substrate 2 which is a material to be processed, a transparent material such as a glass material is preferably used.

For example, the laser beam is applied to the base 2 from a position close to one main surface of the base 2. Further, the condensing portion S of the base is scanned with the laser light so that the guide space to be formed is arranged in at least two layers in the base 2. In addition, with respect to the reforming portion serving as the guide space, the condensing portion S of the reforming portion is scanned with laser light so that the guide space is formed in order from a position far from the position of the laser light source. As a result, a modified portion that becomes a guide space can be formed three-dimensionally inside the base 2.
Further, by appropriately adjusting the output of the laser beam to be irradiated according to the fluid to be mixed, a modified portion having a desired induction space diameter can be formed.

The laser irradiation intensity is preferably a value close to the processing threshold value of the material constituting the substrate 2, or a processing threshold value or more, and ablation threshold value or more. This is to form a modified portion with higher etching selectivity.
The processing threshold is defined as the lower limit value of the laser pulse power for forming the modified portion. The ablation threshold is a lower limit value of laser pulse power for generating ablation, and is different from the processing threshold. In general, the processing threshold is smaller than the ablation threshold.
When the modified portion is formed on the substrate 2, the laser beam is irradiated only from one main surface (first main surface) or the other main surface (second main surface) of the substrate. The substrate may be irradiated with light or may be irradiated from both main surfaces of the substrate.

(4-2) Guidance space forming step The substrate 2 having a modified guiding region formed through the modified portion forming step is dipped in an etching solution (chemical solution), and the modified portion is wet-etched and modified. The mass is removed from the substrate. In the base body 2 from which the modified portion has been removed, a group of induction spaces formed from a trench structure and fine holes are formed three-dimensionally.

In the fluid control device 1 according to the first embodiment, quartz glass is used as the substrate 2, and a solution containing hydrofluoric acid (HF) as a main component is used as an etching solution. Such an etching process is a method that utilizes a phenomenon in which the modified portion irradiated with the laser beam on the substrate 2 is etched at an etching rate several tens of times higher than that of the non-irradiated region of the substrate 2. Therefore, by controlling the etching time, it is possible to selectively etch and remove only the region where the induction space irradiated with the laser light is to be formed in the substrate 2. By utilizing this etching selectivity, a group of guiding spaces having a fixed structure can be formed in the base 2 in a three-dimensional manner.

The etching solution is not particularly limited. For example, in addition to a solution containing hydrofluoric acid (HF) as a main component, a hydrofluoric acid-based mixed acid obtained by adding an appropriate amount of nitric acid or the like to hydrofluoric acid, or an alkali such as KOH can be used. Also, other chemicals can be used depending on the material of the substrate 2.

(5) Action / Effect The fluid control device 1 (1a, 1b, 1c) according to the first embodiment (type 1) has a plurality of guide spaces each having an independent trench structure in a single base body 2. Is formed.
The plurality of guide spaces are a guide space group α constituting a specific group and a guide space group β (n) constituting another specific group, and a region B into which fluid flows on the surface (outer surface) of the base 2 and Each of the region C and the region A through which the fluid flows out has an opening, and is formed as a three-dimensional guide space group that connects the region A, the region B, and the region C. In particular, in this embodiment, the induction space forms a plurality of fine holes arranged in connection with the trench structure.
The openings of the guidance space group α and the guidance space group β (n) facing the region A are arranged in a two-dimensional direction within the plane facing the region A. In addition, the opening portions of the micro holes constituting each of the guiding space group α and the guiding space group β (n) are formed so that the opening portions leading to the region A are alternately adjacent to each other. .

Therefore, in the fluid control device 1 (1a, 1b, 1c) according to the present embodiment (type 1), a plurality of types of fluids flowing from the region B and the region C are mixed before flowing out from the region A. The flow of fluid can be controlled independently. For this reason, there is no possibility that a solid substance or the like generated by mixing a plurality of fluids in the guidance space gradually accumulates in the guidance space and the guidance space is partially blocked.
In addition, since the plurality of guide space groups are three-dimensionally stacked in the base body 2, a large number of guide spaces can be provided in comparison with the two-dimensional guide space. Therefore, processing capacity and productivity can be improved.
Furthermore, since the induction space group in the base body 2 is an integrally formed continuous body, liquid leakage does not occur at the bonding interface, and the pressure resistance performance of the fluid control device can be increased.
In particular, in this embodiment, the flow velocity distribution can be made more uniform by forming a plurality of micro holes arranged by connecting the guide space to the trench structure than when the guide space has only the trench structure. . Furthermore, the pressure loss in the induction space can be minimized, and the boundary surface of the two liquids to be mixed can be four. For this reason, the mixing speed of the fluid can be increased.

(6) Configuration of fluid control device (type 2) (6-1) Second embodiment (No. E4)
FIG. 9 is a schematic diagram illustrating a configuration example of the fluid control device 1d (1) according to the present embodiment. FIG. 9A is a perspective view schematically showing the fluid control device 1d (1). FIG. 9B is a schematic cross-sectional view taken along the arrow X9-X9. FIG. 9C is a schematic cross-sectional view taken along arrow Y9-Y9. FIG. 9D is a partial plan view of the arrow Z9a. FIG. 9E is a partial plan view of the arrow Z9b.
Hereinafter, a second embodiment of the present invention will be described with reference to the drawings.

The fluid control device 1d (1) according to the second embodiment communicates with the mixing unit (single mixing space) Sa through the plurality of first openings 5b and communicates with the first inflow unit 3a. Α, β (n) and the induction space including the second trench structure 4 communicating with the mixing portion Sa and the second inflow portion 4a through the trench structure 3 and the plurality of second openings 6b. Having a substrate.
Similar to the fluid control device 1a (1) according to the first embodiment, the fluid control device 1d (1) according to the second embodiment has the first trench structure 3 and the second trench as viewed from the mixing portion Sa. The structure 4 has a substantially rectangular shape, and the first trench structure 3 and the first trench structure 3 and the first trench structure 3 and the long side of the second trench structure 4 are spaced apart from each other by a predetermined distance. Second trench structures 4 are arranged in parallel.
However, the fluid control device 1 d (1) according to the second embodiment includes two inflow spaces Sb (see FIG. 4, first inflow space) and Sc (see FIG. 4, second) in the flat base 2. Inflow space) are arranged in different regions (region B where the first inflow portion 3a is provided and region C where the second inflow portion 4a is provided) at different positions close to the lower surface of the base body 2. The point which the part (outflow space) Sa is arrange | positioned in the position (area | region A) near the upper surface of a base | substrate differs from the fluid control device 1a (1) which concerns on 1st Embodiment.

As shown in FIG. 9, in the fluid control device 1 d (1), a plurality of trench structures 3 and 4 are formed in a single substrate 2. When viewed from the mixed space Sa (viewed from above the base 2), each of the plurality of trench structures 3 and 4 has a substantially rectangular shape.
As in FIG. 1C, the substantially rectangular shape has a tip portion 3P of the first trench structure 3 (that is, a portion farthest from the inflow space, a portion forming a recess) when viewed from the mixed space Sa. , It may be linear (a concave portion having a bottom portion substantially parallel to the side surface of the base 2 when the base 2 is viewed from the top), or may have a rounded shape (for example, an arc). Means.
The tip portion 4P of the second trench structure 4 also has the same shape as the tip portion 3P of the first trench structure 3.
Further, the first trench structure 3 and the second trench structure 4 are formed so as to have an adjacent positional relationship in the plurality of guide spaces α and β (n) in the base body 2. Further, the long side of the first trench structure 3 and the long side of the second trench structure 4 are arranged in parallel so as to be spaced apart and have a predetermined interval.

A plurality of fine holes 5 and 6 connected to the plurality of trench structures 3 and 4 are formed in the base 2. When viewed from the mixing space Sa, the plurality of first openings 5 b of the plurality of guide spaces are formed from the plurality of first micro holes 5. Further, when viewed from the mixing space Sa, the second openings 6 b of the plurality of guide spaces are formed from the plurality of fine holes 6.
Note that the mixing space Sa in the second embodiment indicates a space (outflow space) on the surface A facing the plurality of openings 5b and 6b of the fluid control device 1d (1).
As viewed from the inflow space (region B located on the lower surface of the base 2), the third openings (first inflow portions) 3 a of the plurality of guide spaces are formed in the respective trench structures 3. In addition, when viewed from the inflow space (region C located on the lower surface of the base 2), the fourth openings (second inflow portions) 4 a of the plurality of guide spaces are respectively formed in the openings of the plurality of trench structures 4. Is formed.
The first opening 5b of the minute hole 5 in the first trench structure 3 communicates with the first inflow space Sb in the region B near the lower surface of the base. Further, the second opening 6b of the fine hole 6 in the second trench structure 4 communicates with the second inflow space Sc in the region C located near the lower surface of the base.

An induction space group α (induction space group constituted by a plurality of first trench structures 3) constituting a specific group among the plurality of induction spaces is a region A (surface of the base body 2) on the surface (outer surface) of the base body 2. A first opening 5b is provided on the upper surface. In addition, the guiding space group α has third openings (first inflow portions) 3 a in the region B on the surface (outer surface) of the base 2.
Inductive space group β (1) (inductive space group constituted by a plurality of second trench structures 4) constituting another specific group of the inductive spaces is plural in region A on the surface (outer surface) of base 2. The second opening 6b is provided. In addition, the guiding space group β (1) has a plurality of fourth openings (second inflow portions) 4a in the region C.
Further, in the base body 2, a plurality of first micro holes 5 belonging to the guidance space group α and a plurality of second micro holes 6 belonging to β (1) are arranged apart from each other.

As shown in the schematic cross-sectional views of FIGS. 9B and 9C, the plurality of first trench structures 3 and the plurality of first micro holes 5 provided in the single substrate 2 are formed by the substrate. It is formed as a three-dimensional guidance space group α in which the region A and the region B are communicated with each other on the surface (outer surface). Similar to the guide space group α, the plurality of second trench structures 4 and the plurality of second micro holes 6 are three-dimensional guide spaces in which the region A and the region C on the surface (outer surface) of the base 2 are communicated with each other. It is formed as a group β (1).

A plurality of first openings 5b in the plurality of first micro holes 5 of the guide space group α facing the region A and a plurality of second openings in the plurality of second micro holes 6 of the guide space group β (1). 6b are arranged in a two-dimensional direction on the surface facing the region A as shown in FIG. Further, the openings (the first opening 5b and the second opening 6b) are alternately formed so as to have the most adjacent positions.
On the other hand, in the region (region B) having a different position near the lower surface of the base, the plurality of third openings (first inflow portions) 3a of the plurality of first trench structures 3 are shown in FIG. As shown in d), it has a substantially rectangular shape reflecting the trench structure, and is arranged in parallel and spaced apart from each other. The plurality of fourth openings (second inflow portions) 4a in the plurality of second trench structures 4 also have the same shape and arrangement as the plurality of third openings 3a in the plurality of first trench structures 3. Have.

In the fluid control device 1d (1) of the second embodiment, different materials (fluids) flow from different inflow spaces. For example, the first material (first fluid) flows in from the inflow space B and passes through the plurality of first trench structures 3 and the plurality of first micro holes 5 which are guide spaces. Further, the second material (second fluid) flows in from the inflow space C and passes through the plurality of second trench structures 4 and the plurality of second micro holes 6 which are guide spaces. Then, the first material flowing out from the plurality of first micro holes 5 and the second material flowing out from the plurality of second micro holes 6 flow out from a common space, for example, the mixing space Sa.
In the fluid control device according to the second embodiment, as shown in FIG. 9 (d), a plurality of openings of the plurality of trench structures 3 and 4 in different regions (region B and region C) at different positions near the lower surface of the substrate. Portions (inflow portions) 3a and 4a are formed. In this way, the guide space is formed in a substantially rectangular shape reflecting the trench structure, and most of the guide space is formed as a trench structure, so that the guide space is compared with the case where the guide space is formed as a fine hole. Can take in a large amount of fluid and flow a large amount of fluid.
Then, a plurality of micro holes 5 and 6 connected to the plurality of trench structures 3 and 4 are formed in the portion immediately before being discharged into the mixed space Sa, so that the induction space is formed only by the trench structure. The flow velocity distribution can be made uniform. Furthermore, the pressure loss in the induction space can be minimized, and the boundary surface of the two liquids to be mixed can be four. For this reason, in the fluid control device of the second embodiment, the mixing speed of the fluid can be increased. In addition, in the micromixer described in Patent Document 2, there are two boundary surfaces of the two liquids to be mixed.

That is, in the fluid control device 1d (1) according to the second embodiment (type 2), in the base having a flat plate shape, the two inflow spaces Sb and Sc have different regions (first inflow) close to the lower surface of the base. The region B is provided in the region B where the portion 3a is provided and the region C where the second inflow portion 4a is provided, and the point where the outflow space Sa is located near the top surface of the substrate (region A). This is different from the fluid control device 1a (1) according to the first embodiment.
However, the fluid control device 1d (1) according to the second embodiment (type 2) is different from the first embodiment (type 1) described above in other points (6a) to (6c) as described below. It is the same.

(6a) When viewed from the mixing portion Sa, the first trench structure 3 and the second trench structure 4 have a substantially rectangular shape, and the long side of the first trench structure 3 is the second trench. The first trench structure 3 and the second trench structure 4 are arranged in parallel so as to be separated from the long side of the structure 4 at a predetermined interval. (6b) A plurality of trench structures 3 and 4 are formed in a single substrate 2. As viewed from the mixed space Sa, the plurality of trench structures 3 and 4 have a substantially rectangular shape. The substantially rectangular trench structure 3 is not clearly shown in the drawing, but when viewed from the mixed space Sa, the tip 3P of the first trench structure 3 (that is, the part farthest from the inflow space, the part forming the recess) ) May be linear (a concave portion having a bottom portion substantially parallel to the side surface of the substrate 2 when the substrate 2 is viewed from above), or may have a rounded shape (for example, an arc shape). . The tip portion 4P of the second trench structure 4 also has the same shape as the tip portion 3P of the first trench structure 3. (6c) The first trench structure 3 and the second trench structure 4 are formed so as to have an adjacent positional relationship in the plurality of guide spaces α, β (n) in the base 2. Further, the long side of the first trench structure 3 and the long side of the second trench structure 4 are arranged in parallel so as to be spaced apart and have a predetermined interval.

Also in the fluid control device according to the second embodiment (type 2), a plurality of first micro holes 5 and 6 connected to each of the plurality of trench structures 3 and 4 are formed. When viewed from the mixing space Sa, the plurality of first openings 5b of the plurality of guide spaces α, β (n) are formed from the plurality of first micro holes 5. In addition, when viewed from the mixing space Sa, the plurality of second openings 6 b of the plurality of guide spaces α and β (n) are formed from the plurality of micro holes 6.
When viewed from the first inflow space Sb (region B located on the lower surface of the base 2), the third openings (first inflow portions) 3a of the plurality of guide spaces α and β (n) are formed of a plurality of trenches. Each of the structures 3 is formed.
Further, when viewed from the second inflow space Sc (region C located on the lower surface of the base 2), the fourth openings (second inflow portions) 4 a of the plurality of guide spaces are respectively provided in the plurality of trench structures 4. Is formed.
The first opening 5b of the minute hole 5 in the first trench structure 3 communicates with the first inflow space Sb in the region B near the lower surface of the base.
Further, the second opening 6b of the fine hole 6 in the second trench structure 4 communicates with the second inflow space Sc in the region C located near the lower surface of the base.

In particular, in the fluid control device according to the second embodiment (type 2) shown in FIG. 9, the region B and the region C at positions close to the lower surface of the base body 2 communicate with two different inflow spaces Sb and Sc, respectively. Opening portions (inflow portions) 3a and 4a are formed so as to form one (single) substantially rectangular shape for each trench structure [FIG. 9 (e)]. Therefore, the fluid control device according to the second embodiment (type 2) shown in FIG. 9 can cope with a large inflow amount as compared with the configuration [FIG. 15] communicating with the inflow space by the openings of the plurality of micro holes. . Furthermore, it is possible to reduce pressure loss.

In the fluid control device 1 shown in FIG. 9, two inflow spaces Sb and Sc are arranged at different positions close to the lower surface of the substrate in a flat substrate. The inflow space Sb communicates with the first inflow portion 3a provided in the region B, and the inflow space Sc communicates with the second inflow portion 4a provided in the region C. Furthermore, the mixing part (outflow space Sa) is disposed at a position close to the upper surface of the base body and communicates with the region A. However, the fluid control device according to the second embodiment (type 2) is not limited to the configuration example of FIG. For example, as long as the conditions for individually arranging the regions A to C without overlapping each other, one or both of the region B and the region C may be provided at a position close to the upper surface of the substrate as the region A. Absent.
When the fluid control device according to the second embodiment (type 2) is created, the above-described high pressure resistance performance can be realized only by arranging the casing so as to sandwich the base from both the upper and lower surfaces of the base.

(6-2) Modification 2A (No. E5)
FIG. 10 is a schematic diagram showing a modified example (hereinafter also referred to as modified example 2A) of the fluid control device according to the present embodiment (second embodiment). FIG. 10A is a perspective view schematically showing the fluid control device 1e (1). FIG. 10B is a schematic cross-sectional view taken along the arrow X10-X10. FIG. 10C is a schematic cross-sectional view taken along arrow Y10-Y10. FIG. 10D is a plan view of the arrow Z10a. FIG. 10E is a plan view of the arrow Z10b.

The fluid control device 1e (1) of Modification 2A is similar to the fluid control device 1d (1) according to the second embodiment described above, with a mixing unit (single mixing space) via a plurality of first openings 5b. ) In communication with the first inflow portion 3a, the first trench structure 3 that communicates with the first inflow portion 3a, and the plurality of second openings 6b, and the second inflow portion 4a that communicates with the mixing portion Sa. A base body 2 having induction spaces α and β (n) including two trench structures 4 is provided. In the fluid control device 1e (1) of FIG. 10 as well, even if belonging to the same guidance space group, the plurality of guidance spaces having the trench structure are arranged separately from each other.

Further, in the fluid control device 1e (1) of the modified example 2A, in the base body having a flat plate shape, the two inflow spaces Sb and Sc are provided in different regions close to the lower surface of the base body (the first inflow portion 3a is provided). As described above, the point where the region B and the region C in which the second inflow portion 4a is provided, and the point where the mixing portion (outflow space) Sa is disposed near the upper surface of the substrate (region A) are also described above. This is the same as in the second embodiment (type 2).

However, in the fluid control device of Modification 2A, a plurality of guide spaces having a trench structure are configured such that a portion α where each of the plurality of guide spaces communicates with two inflow spaces Sb and Sc is divided into a plurality of fine holes 3a and 4a. This is different from the fluid control device 1d (1) according to the second embodiment (type 2) described above [FIG. 10 (e)].

By providing the points different from the second embodiment (type 2) described above, in the fluid control device 1e (1) of the modified example 2A, the fluid control device enters the fluid control device from the two inflow spaces Sb and Sc. The fluid passes through the plurality of micro holes 3a and 4a and is then introduced into the trench structure.
Therefore, according to the fluid control device of Modification 2A, high pressure resistance performance can be realized as in the second embodiment (type 2) described above. Further, regarding the plurality of fine holes 3a and 4a, the number of fine holes provided per unit area, the fine hole opening diameter, the fine hole opening shape, the fine hole inner wall surface shape, and the fine hole length (depth distance) By appropriately adjusting the above and the like, the plurality of fine holes 3a and 4a function as a filter, thereby eliminating the possibility of foreign matter entering the trench structure together with the fluid.

(6-3) Modification 2B (No. E6)
FIG. 11 is a schematic diagram illustrating another modification (hereinafter, also referred to as modification 2B) of the fluid control device 1 according to the present embodiment (second embodiment). FIG. 11A is a perspective view schematically showing the fluid control device 1f (1). FIG. 11B is a schematic cross-sectional view taken along the arrow X11-X11. FIG. 11C is a schematic cross-sectional view taken along arrow Y11-Y11. FIG. 11D is a plan view of the arrow Z11a. FIG. 11E is a plan view of the arrow Z11b.

The fluid control device 1f (1) according to the modified example 2B is similar to the fluid control device 1d (1) according to the second embodiment described above, with a mixing unit (single mixing space) via the plurality of first openings 5b. ) In communication with the first inflow portion 3a, the first trench structure 3 that communicates with the first inflow portion 3a, and the plurality of second openings 6b, and the second inflow portion 4b. A base body 2 having induction spaces α and β (n) including two trench structures 4 is provided.
Further, in the fluid control device 1f (1) of Modification 2B, in the base having a flat plate shape, the two inflow spaces Sb and Sc are arranged in different regions (region B and region C) at positions close to the lower surface of the base. The point and the outflow space Sa are also the same as in the second embodiment (type 2) described above in that the outflow space Sa is disposed at a position (region A) close to the upper surface of the base body.

In the fluid control device 1f (1) of the modified example 2B, a plurality of induction spaces having a trench structure are connected to the trench structures 3 and 4 as viewed from the mixed space Sa even though they belong to the same induction space group. In the portions (first portions) 3c and 4c in which the openings 5b and 6b of the plurality of fine holes are provided, the guide spaces are spaced apart from each other. However, as shown in FIG. 11E, all or a part of the other portions (second portions) 3a, 3b, 4a, 4b of the trench structures 3, 4 belong to the same induction space group. They differ from the second embodiment (type 2) described above in that one large trench structure is formed.

By providing the points different from the second embodiment (type 2) described above, in the fluid control device 1f (1) of the modified example 2B, the fluid enters the fluid control device from the two inflow spaces Sb and Sc. In the other portions (second portions) 3a, 3b, 4a, and 4b, the fluid to flow can travel inside one large trench structure.
Therefore, according to the fluid control device 1f (1) of the modified example 2B, high pressure resistance performance can be realized as in the fluid control device 1d (1) of the second embodiment (type 2) described above. Furthermore, it is possible to reduce the influence of pressure loss compared to the fluid control device 1d (1) of the second embodiment (type 2). By appropriately adjusting the volume ratio of the “large one trench structure” of the “other parts (second parts) 3a, 3b, 4a, 4b”, various conditions of the fluid such as viscosity, flow rate, flow velocity, etc. It is also possible to design according to. For example, by changing the cross-sectional area or cross-sectional shape of the “large one trench structure” in the fluid traveling direction, the eddy current that is generated in the fluid and impedes the ease of fluid flow is eliminated, or It can also be reduced.

(7) Configuration of fluid mixer (Type 2)
FIG. 12 is a schematic cross-sectional view showing another configuration example of the fluid mixer 10B (10), and the fluid control device of the second embodiment (type 2) disclosed in (6-1) above is a fluid mixer. It is a case where it mounts in.
Hereinafter, the fluid mixer 10B (10) according to the second embodiment will be described with reference to the drawings.

As shown in FIG. 12, the fluid mixer 10 </ b> B (10) has the fluid control device 1 and the fluid control device 1 inside, faces the region A of the fluid control device 1, and is inside the fluid control device 1. A single outflow space (mixing space) Sa that communicates, a single inflow space Sb that faces the region B of the fluid control device 1 and communicates with the inside of the fluid control device 1, and a fluid control that faces the region C It is comprised from the housing | casing 20B (20) provided with the single inflow space Sc connected to the inside of the device 1. FIG. As the housing 20B (20), metals such as stainless steel can be used. A fluid mixer 10B (10) shown in FIG. 12 is provided with a seal member to be described later between the fluid control device 1 (outer surface) and the housing 20B (20) (inner surface). The outer surface and the inner surface of the housing 20B (20) are configured to contact each other via a seal member.

The housing 20B (20) includes an upper housing 20a that forms an outflow space (mixing space) Sa so as to face the surface (outer surface) of the region A of the base 2 constituting the fluid control device 1, and the region of the base 2 The lower housing 20b that forms the inflow spaces Sb and Sc so as to face the surfaces (outer surfaces) of B and C. Further, the respective surfaces (outer surfaces) of the regions A, B, and C of the fluid control device 1 are joined to the upper housing 20a and the lower housing 20b through a seal member R. The outflow space Sa is formed as a space independent of the inflow spaces Sb and Sc. By providing the sealing member R between the surface (outer surface) of the fluid control device 1 and the housing 20B (20), the adhesion between the fluid mixer 10B (10) and the housing 20B (20) is improved. Since it increases, the flexibility corresponding to the pressure, flow rate, and flow velocity of the fluid can be improved. As the seal member R, an elastic seal member such as an O-ring can be used.

Also, as shown in FIG. 12, in the fluid mixer 10B (10), the fluid control device 1 can be attached and detached by sandwiching and joining the fluid control device 1 between upper and lower housings 20a and 20b. It is. With the configuration in which the sealing member R is provided between the fluid mixer 10B (10) and the housing 20B (20), the fluid mixer 10B (10) can be appropriately used as a fluid control device depending on the type and nature of the fluid to be mixed. It is superior to the above-described fluid mixer 10A (10) in the function of selecting and the function of performing regular maintenance (repair and replacement). Therefore, it is possible to improve multi-function and long-term reliability.

FIG. 13 is a schematic diagram for explaining the configuration of a fluid mixer including a detachable fluid control device. As shown in FIG. 13, the fluid mixer 10 </ b> B (10) is configured such that the fluid control device 1 is joined by sandwiching the fluid control device 1 between upper and lower housings (upper housing 20 a and lower housing 20 b). The control device 1 is detachable. Therefore, the fluid control device can be appropriately selected according to the type and nature of the fluid to be mixed.

(8) Comparative Example: Fluid Control Device and Fluid Mixer FIG. 15 is a schematic diagram illustrating a configuration example of the fluid control device 101 according to Comparative Example 1. FIG. 15A is a perspective view schematically showing the fluid control device 101. FIG. 15B is a schematic cross-sectional view taken along arrow X101-X101. FIG. 15C is a schematic cross-sectional view taken along arrow Y101-Y101. FIG. 15D is a plan view of the arrow Z101.
Hereinafter, the fluid control device 101 according to the comparative example 1 will be described with reference to the drawings. As will be described later, the fluid control device according to Comparative Example 1 is described as follows: “In the base body 102, a plurality of micro holes 103 and 104 belonging to the respective flow path groups α and β (1) are arranged apart from each other. It is the difference between the fluid control device according to the first embodiment and the second embodiment and the comparative example.

As shown in FIGS. 15A to 15D, the fluid control device 101 has a plurality of fine holes 103 and 104 formed in a single substrate 102. The flow path group α constituting a specific group among the plurality of micropores 103 and 104 has a plurality of openings 103a and 103b in the region A and the region B on the surface (outer surface) of the base 2, respectively. The flow path group β (1) constituting another specific group of the fine holes has a plurality of openings 104a and 104b in the region A and the region C on the surface (outer surface) of the base 2, respectively.
Further, in the base body 2, the micro holes 103 and 104 belonging to the respective flow path groups α and β (1) are arranged apart from each other.

In particular, in the configuration example shown in FIG. 15 (Comparative Example 1), the outflow space Sa is formed so as to face the surface (outer surface) of the region A of the base body 2 constituting the fluid control device 1. Inflow spaces Sb and Sc are formed so as to face the surfaces (outer surfaces) of the regions B and C of the base 2. Region A is disposed on the upper surface of the substrate 2. The region B is disposed on the first side surface of the base body 102. The region C is disposed on a side surface (second side surface) different from the region B of the base body 102.
In the modification (Comparative Example 2) of the configuration example (Comparative Example 1) shown in FIG. 15, the region A is disposed on the upper surface of the base body 102. Further, the region B is disposed on a part of the lower surface of the base. Further, the region C is arranged at a location different from the region B on the lower surface of the base. In the comparative example 2, the above configuration (not shown) can be mentioned. The other points are the same as the configuration example (Comparative Example 1) shown in FIG.

As shown in the schematic cross-sectional views of FIG. 15B and FIG. 15C, the plurality of micro holes 103 provided in the single base 102 are formed by a region A and a region B on the surface (outer surface) of the base 102. Are formed as a three-dimensional flow path group α. Similarly, the plurality of fine holes 104 are formed as a three-dimensional flow path group β (1) in which the region A and the region C on the surface (outer surface) of the base 102 are communicated.

The openings 103b and 104b of the channel group α and the channel group β (1) facing the region A are arranged in a two-dimensional direction on the surface facing the region A as shown in FIG. Has been. Further, the openings are alternately formed so as to be the most adjacent positions.
In FIG. 15D, the symbol S is “space”, which means the distance between the outer peripheral ends of the adjacent opening 3b and the opening 4b. The symbol L is “pitch”, which is the distance between the center (black circle) of the adjacent opening 3b and the center (black circle) of the opening 4b.

(9) Functional comparison between the first embodiment and the second embodiment and a comparative example Based on the above (1) to (8), the problems of the first embodiment and the second embodiment (mixability, processing capability, withstand voltage) Table 1 shows the results summarized in the list centering on. Each item A to F is displayed in five stages, with the most excellent configuration example as the highest evaluation “5”.
Regarding the fluid control device (glass part), the following A to D were evaluated.
A: Mixability means the ease of mixing of two fluids.
B: A processing capacity means the quantity of the liquid mixture produced per unit time. The smaller the pressure loss in the flow path, the higher the throughput.
C: Pressure resistance means the strength of the flow path with respect to the fluid pressure.
D: The filter effect means a high ability to prevent foreign matter from flowing into the substrate. The smaller the opening at the position near the inflow space of the substrate, the higher the filter effect.
Regarding the fluid mixer (relationship between the substrate and the casing), the following E to F were evaluated.
E: Pressure resistance means the total performance of the strength of the flow path with respect to the fluid pressure and the strength of the seal between the base and the casing.
F: The processing capacity means the total performance of the amount of the mixed liquid produced per unit time and the seal strength between the substrate and the casing.

The contents described in the special note T in Table 1 are as follows. In particular, in No. 1 according to the first embodiment and the second embodiment. The characteristics of E1 to E6 with respect to Comparative Example 1 (C1) will be described.
T1: The processing capability of the fluid control device is high.
T2: The processing capability of the fluid control device is high. In addition, since the fluid control device has a plurality of openings in a staggered pattern, the fluid mixing speed can be improved. Further, since the fluid control device has a plurality of openings in a staggered pattern, the fluid flow velocity distribution can be made uniform. Furthermore, since the fluid control device has a plurality of openings in a staggered pattern, the boundary surface of the two liquids to be mixed can be four.
T3: The processing capability of the fluid control device can be secured while increasing the pressure resistance of the fluid control device.
T4: A fluid control device with the best balance of performance can be obtained. The E4 fluid mixer has a configuration in which a housing is disposed so as to sandwich the substrate from both the upper and lower surfaces of the substrate. Further, the E4 fluid control device and the fluid mixer can improve the throughput because the substrate can cope with a large inflow amount. In addition, according to the fluid control device and the fluid mixer of E4, the pressure loss of the substrate can be reduced.
T5: The fluid control device and fluid mixer of E5 have the functions and characteristics of the fluid control device and fluid mixer of E4, and the filter function can be added to the fluid control device and fluid mixer, so it has excellent long-term stability. .
T6: Compared to E1-E5 fluid control devices and fluid mixers, E6 fluid mixers have the highest throughput.

From Table 1, the following became clear.
(1) Regarding the mixing property, there is no difference between the fluid control devices (E1 to E6) and the comparative examples (C1 to C2) according to the first and second embodiments, and all have excellent characteristics.
(2) Regarding the substrate processing capability, all of the fluid control devices (E1 to E6) according to the first embodiment and the second embodiment are higher than the comparative examples (C1 to C2). In particular, E1, E2, and E6 are excellent.
(3) Regarding the pressure resistance, a comparative example in which all the flow paths are composed of fine holes is excellent. However, in the fluid control device according to the first embodiment and the second embodiment, the same pressure resistance as in the comparative example can be obtained by using the fluid control device and the fluid mixer (E3) having a configuration in which the trench structure is divided. Secured.
(4) In the fluid mixer (relationship between the substrate and the casing), in order to obtain excellent pressure resistance, a configuration (E4 to E6) in which an inflow space and an outflow space are provided at positions sandwiching the fluid control device, respectively. It is valid. When this configuration is adopted, it is possible to provide a seal member between the fluid control device and the housing so that the fluid control device and the housing 2 are in contact with each other via the seal member. Therefore, pressure resistance is further improved.
Further, according to the fluid mixers E4 to E6, the fluid control device can be attached and detached, which is effective from the viewpoint of replacement and maintenance.
(E) In the fluid mixer (relationship between the substrate and the casing), in order to obtain excellent processing capability, the combination of the micropores and the trench structure is the minimum part (mixing space Sa) of the induction space. (E6) is effective in that it is limited only to a portion located at a position close to (E6). Since the E6 fluid mixer has the highest processing capacity compared to the E1 to E5 fluid mixers, the pressure resistance of the fluid control device needs to be devised.
Therefore, the first embodiment and the second embodiment contribute to the provision of a fluid control device and a fluid mixer that enable extremely efficient fluid mixing and have high processing capability and high pressure resistance.

(10) Application example of fluid control device (third embodiment)
FIG. 14 is a schematic diagram showing a configuration example of the μTAS chip 100 according to the third embodiment on which the fluid control device 1 (1a and 1b) as described above is mounted. FIG. 14A is a plan view of the μTAS chip 100. FIG. FIG. 14B is an enlarged plan view of the fluid control device portion. FIG. 14C is an enlarged cross-sectional view of the fluid control device portion.

The μTAS chip 100 shown in FIG. 14 includes at least a base body 110 that functions as a μTAS chip body and a fluid control device 1 (1a, 1b) provided so as to be integrated with the base body 110. The μTAS chip 100 further includes a reactor 120, a separator 130, and a detector 140 downstream of the fluid control device 1 (1a, 1b). However, this is a configuration example of the μTAS chip, and the present invention is not limited thereto. Is not to be done. For example, the reactor 120, the separator 130, and the detector 140 may be configured separately from the μTAS chip 100.

The fluid to be analyzed (liquid or gas) and the selected carrier pass from the inflow spaces Sb and Sc through the respective filter function units F, and then flow into the induction space of the fluid control device 1 and the outflow space (mixing space). ) Mixed with Sa. Thereafter, the sample reacted in the reactor 120 is separated from the carrier by the separator 130 as necessary, and desired analysis information is taken out by the detector 140 to an external device or the like.

In addition, as a configuration of μTAS, in addition to a device in which a fluid mixing unit, a reactor, a separator, and the like are integrated on one substrate as in the third embodiment, individual components such as a fluid mixer, a reactor, and a separator are assembled. You can also get a systemized device.

The embodiments of the present invention have been described with specific examples. However, the technical scope of the present invention is not limited to the above-described embodiments, and various modifications are made without departing from the spirit of the present invention. It is possible.

1a, 1b, 1c, 1d, 1e, 1f (1) Fluid control device, 2 substrate, 3rd first trench structure, 4th trench structure, 5th, 6th micropore, 100μTAS chip, Sa outflow space (mixed Space), Sb, Sc inflow space, α, β (n) induction space group.

Claims (5)

1. A fluid control device comprising:
   A first trench structure that communicates with the mixing portion through the plurality of first openings and communicates with the first inflow portion, and a second inflow portion that communicates with the mixing portion through the plurality of second openings. A substrate having a guide space with a second trench structure communicating with
   As viewed from the mixing portion, the first trench structure and the second trench structure have a substantially rectangular shape,
   Fluid in which the first trench structure and the second trench structure are arranged in parallel so that the long side of the first trench structure is separated from the long side of the second trench structure at a predetermined interval Control device.
2. The fluid control device according to claim 1, wherein the plurality of first openings and the plurality of second openings are arranged in a two-dimensional direction on a surface on the base on which the mixing unit is provided.
3. The distance between the first opening and the second opening adjacent to each other is smaller than the distance between the plurality of first openings adjacent to each other and the distance between the plurality of second openings adjacent to each other. The fluid control device according to claim 2, which is arranged.
4. The first trench structure is divided by a first partition arranged along a long side direction of the first trench structure;
   The fluid control according to any one of claims 1 to 3, wherein the second trench structure is divided by a second partition wall arranged along a long side direction of the second trench structure. device.
5. A fluid control device according to any one of claims 1 to 4,
   A single outflow space communicating with the plurality of first openings and the plurality of second openings, a first inflow space communicating with a first inflow portion of the fluid control device, and a second of the fluid control device A housing having a second inflow space communicating with the inflow portion of
   A fluid mixer equipped with.

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