JP2010052135A - Micropump device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micropump device exhibiting good controllability of the quantity of gas generated from a gas generating material and the pumping quantity of a micropump. <P>SOLUTION: The micropump device comprises the micropump 10 and a controller 50. The micropump 10 comprises a microchannel 22 that is a liquid channel, the gas generating material 34 for generating gas by receiving irradiation of light and supplying the gas to the microchannel 22, and a light source 42 for irradiating the gas generating material 34 with light 44. The controller 50 supplies the light source 42 with a control pulse signal CS for blinking the light source 42 in a binary state by repeating a pulse sequence pattern consisting of a plurality of bits of a fixed number, each bit of which takes two states of a first level for turning on the light source 42 and a second level for turning off the light source 42. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a micropump that generates light by irradiating light to a gas generating material that generates gas upon receiving light irradiation, and transports a liquid such as a specimen, a reagent, or a diluent by the gas, and its control The present invention relates to a micropump device including the device.

  A micropump that generates light by irradiating light to a gas generating material that generates gas upon receiving light irradiation, supplies the gas to the microchannel, and transports the liquid in the microchannel by the gas. Conventionally, it has been proposed (see, for example, Patent Documents 1 and 2).

  In short, the gas is generated from the gas generating material because a decomposition reaction (a kind of chemical reaction) of the gas generating material occurs upon receiving light irradiation, thereby generating a gas.

  In using the micropump, it is important to control the amount of gas generated from the gas generating material, and thus the amount of liquid delivered by the micropump. However, the control means is described in Patent Documents 1 and 2 above. Not.

As the above control means, the following means are usually considered.
(1) Change the intensity of light applied to the gas generating material to be strong or weak.
(2) Change the irradiation time of light applied to the gas generating material to be longer or shorter.

  However, these have the following problems.

  In the case of the above (1), since the decomposition rate characteristic of the gas generating material with respect to the irradiation light intensity is not necessarily linear like the characteristic B, such as the characteristics A and C in FIG. It is difficult to control the amount of gas generated with strength. That is, when the irradiation light intensity is slightly increased, the decomposition rate of the gas generating material increases rapidly, and the gas generation amount may increase rapidly. If the irradiation light intensity is slightly increased, the decomposition rate of the gas generating material does not increase easily, and the gas generation amount may not increase easily. Therefore, it is difficult to control the amount of gas generated and thus the amount of liquid delivered.

  In the case of the above (2), it is difficult to realize the gas generation amount at an intermediate stage with high accuracy if the light irradiation time is simply long or short. This is because a slight error in the light irradiation time greatly affects the gas generation amount. Accordingly, in this case as well, it is difficult to control the amount of gas generated, and hence the amount of liquid delivered.

  In view of this, the main object of the present invention is to provide a micropump device with good controllability of the amount of gas generated from the gas generating material, and hence the amount of liquid delivered by the micropump.

  One of the micropump devices according to the present invention includes: (a) a microchannel that is a liquid channel; and a gas generating material that generates a gas upon receiving light irradiation and supplies the gas to the microchannel. And a micropump having a light source that irradiates light to the gas generating material, and (b) a certain number of bits that can take two states: a first level at which the light source is turned on and a second level at which the light source is turned off. And a control device for supplying the light source with a control pulse signal for blinking the light source in a binary state by repeating a pulse train pattern composed of a plurality of bits.

  In this micropump device, at the time of the first level bit of the control pulse signal supplied from the control device to the light source, the light source is turned on, the decomposition reaction of the gas generating material starts, and gas is generated. At the time of the second level bit of the control pulse signal, the light source is turned off, the decomposition reaction of the gas generating material is stopped, and the gas generation is stopped. That is, the duration of the decomposition reaction of the gas generating material is determined according to the number of first level bits included in the control pulse signal.

  Therefore, the total amount of decomposition of the gas generating material within a predetermined time (hereinafter referred to as “gas generating material apparent decomposition rate”) by combining the first level bits and the second level bits constituting the pulse train pattern of the control pulse signal. Can be controlled). The gas generated by the decomposition reaction diffuses in the gas generating material and flows out to the microchannel. The liquid in the microchannel is transported by the volume of the gas that flows into the microchannel.

  By the above-described operation, the combination of the first level bit and the second level bit constituting the pulse train pattern of the control pulse signal allows the amount of gas generated from the gas generating material, and hence the amount of liquid delivered by the micropump, to be intermediate. It is possible to accurately control a plurality of stages including stages.

  In addition, since the control pulse signal blinks the light source in a binary state, a constant operating point on the decomposition rate characteristic with respect to the irradiation light intensity of the gas generating material can be used. Therefore, even if the decomposition rate characteristic is not linear, the apparent decomposition rate of the gas generating material can be controlled almost linearly. As a result, the control of the gas generation amount becomes easy and the controllability of the gas generation amount is improved.

  The micropump device according to the present invention includes a plurality of the micropumps, and the control device supplies a plurality of the control pulse signals to each light source of the plurality of micropumps separately. May be adopted.

  According to the first to fifth aspects of the present invention, the control pulse signal supplied from the control device to the light source causes the light source to blink in a binary state, whereby the decomposition rate characteristic with respect to the irradiation light intensity of the gas generating material. Thus, the controllability of the gas generation amount from the gas generating material is improved, and the controllability of the liquid feed amount of the micropump is improved.

  In addition, the combination of the first level bit and the second level bit constituting the pulse train pattern of the control pulse signal allows the amount of gas generated from the gas generating material and hence the amount of liquid delivered by the micropump to include a plurality of intermediate stages. It can be accurately controlled in stages. Therefore, controllability is also good from this viewpoint.

  According to invention of Claim 3, there exists the following further effect. That is, since the micropump functions as a pump without a gas generation chamber, the micropump can be made smaller and thinner. As a result, for example, it becomes easier to configure a micropump device in which a plurality of micropumps are integrated on a large scale.

  According to invention of Claim 4, there exists the following further effect. In other words, since the control pulse signal repeats a fixed-length pulse train pattern at a fixed period, it is much easier to generate a control pulse signal than when a pulse train pattern whose length and period are arbitrarily changed is repeated. Become. As a result, the configuration of the control device can be simplified. This effect becomes more prominent as the number of micropumps increases.

  According to invention of Claim 5, there exists the following further effect. That is, a plurality of micropumps are provided, and the control device separately supplies control pulse signals to the respective light sources of the plurality of micropumps. Therefore, a single control device controls a plurality of micropumps separately. can do. Therefore, it becomes easy to configure a micropump device having a large number of micropumps.

It is a figure which shows the schematic example of the decomposition rate characteristic with respect to the irradiation light intensity of a gas generating material. It is a figure which shows one Embodiment of the micropump apparatus which concerns on this invention. It is a figure which shows the example of the blink pattern of a control pulse signal and a light source. It is a figure which shows an example of the correspondence of a pump output command value, a bit pattern, and irradiation energy. It is a figure which shows an example of the result of having measured the control characteristic of the micropump. It is the schematic which shows an example of the responsiveness of the decomposition reaction of a gas generating material. It is the schematic which shows the other example of the responsiveness of the decomposition reaction of a gas generating material. It is a figure which shows other embodiment of the micro pump apparatus which concerns on this invention. It is a figure which shows other embodiment of the micropump apparatus which concerns on this invention. It is a figure which shows other embodiment of the micropump apparatus which concerns on this invention. It is a figure which shows other embodiment of the micropump apparatus which concerns on this invention. It is a figure which shows other embodiment of the micropump apparatus which concerns on this invention. It is a figure which shows an example of the structure (A) of one event information, and an event information sequence (B) which consists of several event information. FIG. 5 is a diagram in which a plurality of bit patterns are arranged with the digits aligned for convenience. It is a figure which shows the other example of a micropump.

(1) First Embodiment FIG. 2 is a diagram showing an embodiment of a micropump device according to the present invention.

  The micropump device includes a microchannel 22 that is a liquid channel, a gas generating material 34 that receives gas irradiation to generate a gas and supplies the gas to the microchannel 22, and a gas generating material 34. A micropump 10 having a light source 42 for irradiating light 44 is provided. In addition, the light source 42 of the micropump 10 is provided with a control device 50 that supplies a control pulse signal CS that causes the light source 42 to blink (that is, turn on and off) in a binary state.

  The micropump 10 can transport the liquid in the microchannel 22 by the volume of the supplied gas by supplying the gas generated from the gas generating material 34 to the microchannel 22. That is, it works as a pump.

  In this embodiment, the micropump 10 further includes a gas generation chamber 32 that communicates with the microchannel 22, and the gas generation material 34 is disposed in the gas generation chamber 32. Therefore, the gas generating material 34 causes the gas generated by the irradiation of the light 44 to flow out from the gas generating chamber 32 to the micro flow path 22.

  An example of the control pulse signal CS supplied from the control device 50 to the light source 42 is shown in FIG. As shown in FIG. 3A, the control pulse signal CS has a substantially constant first level (for example, a high level) H at which each bit turns on the light source 42 and a substantially constant value at which the light source 42 is turned off. By repeating a pulse train pattern PP composed of a fixed number of a plurality of bits (e.g., 8 bits in the example of FIG. 3) that can take two states of the second level (for example, 0 level or low level) L, FIG. As shown, the light source 42 blinks in a binary state. Therefore, the control pulse signal CS and the blinking pattern of the light source 42 are synchronized with each other and become the same pattern. Note that 1 in FIG. 3B indicates a lighting state, and 0 indicates a light-off state (the same applies to FIGS. 6 and 7).

  Each pulse width τ of the control pulse signal CS is, for example, 10 ms (milliseconds). Therefore, the light source 42 repeats blinking at high speed.

  The configuration of the control device 50 will be described later. First, the configuration of the micropump 10 will be described in detail.

  As shown in FIG. 2, in this embodiment, the micro flow path 22 constituting the micro pump 10 is formed in the flow path substrate 20, and the gas generation chamber 32 is formed in the pump substrate 30. The two substrates 20 and 30 are bonded to each other by, for example, heat sealing or an adhesive layer (not shown). However, the microchannel 22 and the gas generation chamber 32 may be formed in the same substrate.

  The micro channel 22 is a minute channel having a width of about 50 μm to 2 mm, for example. The structure, length, etc. of the microchannel 22 are arbitrary. For example, one microchannel 22 may exist alone, may be branched into a plurality, or may communicate with another microchannel 22 or the like.

  A liquid (not shown) flows through the microchannel 22. The liquid is, for example, water, oil, biochemical buffer, blood, lymph, urine, soil extraction water, hydroponic water or the like. Since the microchannel 22 is very small as described above, the liquid is, for example, a droplet.

  The microchannel 22 has a communication portion 24 that communicates with the gas generation chamber 32. The communication part 24 is, for example, one or more fine channels having a width of about 0.2 μm to 20 μm, a porous body having a maximum pore size of about 5 μm, or a water-repellent channel having a width of about 50 μm or less. .

The size of the gas generation chamber 32 is, for example, about 1 cm ³ or less in total volume. The gas generation chamber 32 may be, for example, a single cylindrical space or a polyhedral space, or may be an assembly of short flow paths branched into a plurality of portions. The inner wall of the gas generation chamber 32 may be provided with irregularities such as pillar shapes, groove shapes, and lattice shapes.

  The gas generating material 34 is, for example, a material in which a compound that generates a gas upon light irradiation is dispersed or compatible with a binder resin. A compound that generates a gas when irradiated with light serves to generate a gas when irradiated with light. The binder resin serves to fix a compound that generates a gas upon irradiation with light and to add various functions to the gas generating material.

  The compound that generates a gas upon irradiation with light is not particularly limited as long as it generates light upon receiving light 44 from the light source 42.

  Examples of the compound that generates a gas upon photoirradiation include a compound (A) that generates a gas by a photolysis reaction, a mixture (B) of a photoacid generator and an acid-stimulated gas generator, a photobase generator and a base proliferating agent. A mixture (C) etc. can be mentioned. More specific examples of these will be described later.

  Various modes can be adopted for arranging the gas generating material 34 in the gas generating chamber 32. For example, as shown in the figure, a translucent plate 36 that covers the gas generating chamber 32 may be provided, and the gas generating material 34 may be attached to the inner surface thereof.

  The translucent plate 36 transmits light 44 and is made of, for example, (meth) acrylic resin, polyethylene terephthalate (abbreviated as PET), cycloolefin polymer (abbreviated as COP), glass or the like. The pump substrate 30 and the translucent plate 36 may be integrally formed using the pump substrate 30 as the translucent substrate.

  Alternatively, the gas generating material 34 may be placed in the gas generating chamber 32 as a tablet, or may be applied to or attached to the inner wall of the gas generating chamber 32. A gas generating material 34 impregnated with a non-woven fabric, a woven fabric or other porous material may be fitted into the gas generating chamber 32. Further, a member constituting the wall surface of the gas generation chamber 32 may also serve as the gas generation material 34.

  Various light sources 42 can be used. The light source 42 may be directly controlled by the control pulse signal CS, or may be controlled via a light source control circuit (see a light source control circuit 45 described later) or the like. Which one should be selected may be determined according to the characteristics of the light source 42 and the like.

  The wavelength of the light 44 emitted from the light source 42 is not limited to a specific wavelength as long as it can cause a decomposition reaction (that is, a gas generation reaction) of the gas generating material 34. Ultraviolet light or near ultraviolet light may be used. Moreover, a single wavelength may be sufficient and it may have a wide light emission bandwidth. However, it is preferable that the half-width around the wavelength that is convenient for causing the decomposition reaction of the gas generating material 34 to be about 10 nm, and that the efficiency is higher.

  In this embodiment, the light source 42 is a light emitting diode (abbreviated as LED), and is provided on the light source substrate 40. A light source control circuit 45 having a transistor 46, a diode 48, and the like is also provided on the light source substrate 40. The light source substrate 40 is disposed substantially facing the pump substrate 30. An optical system such as a lens or an optical waveguide may be interposed between the light source substrate 40 and the pump substrate 30.

  The light source 42 is controlled by the control pulse signal CS via the light source control circuit 45 and repeats blinking at a high speed in a binary state. That is, when the control pulse signal CS is at the first level H, a forward current flows through the diode 48 to generate a substantially constant forward voltage across the diode 48, which turns on the transistor 46. As a result, a substantially constant current flows from the power source Vcc to the light source 42, and the light source 42 emits light with a substantially constant intensity. When the control pulse signal CS is at the second level L, the transistor 46 is turned off and the light source 42 is turned off. Such an operation is repeated. Accordingly, as described above, the light source 42 repeats blinking in the same pattern as the control pulse signal CS.

  The light source control circuit 45 is provided when necessary according to the characteristics of the light source 42 as described above, and constitutes a part of the light source 42 in terms of function.

  The power source Vcc is preferably controlled at a constant current, and by doing so, the light emission intensity of the light source 42 can be made more constant. In order to increase the voltage applied to the base of the transistor 46, a plurality of diodes 48 may be connected in series.

  The light emitting diode has advantages such as high response speed, high efficiency, low power consumption, little heat generation, small size and high density mounting, and is suitable for the light source 42.

  More specifically, as the light emitting diode for the light source 42, for example, an ultraviolet light emitting diode that emits purple light 44 from ultraviolet light having a wavelength of about 330 nm to 410 nm and having a light emission output of about 10 mW to 400 mW may be selected. . The light 44 having such characteristics can hardly increase the temperature of the gas generating material 34.

  The light source 42 is not limited to a light emitting diode, and may be any other light source as long as the above blinking can be repeated. For example, an electroluminescence element (abbreviation EL element), a plasma light emitting element, or the like may be used. Further, the light source 42 includes (a) a light source capable of blinking light to be extracted by a combination of a continuous light source such as an external electrode fluorescent lamp (EEFL) and a micro halogen lamp and an optical shutter, and (b) continuous light emission. It is also possible to use a light source capable of blinking light to be extracted by a combination of the light source, the optical fiber, and the optical selector. The optical shutter and optical selector may be controlled by the control pulse signal CS.

  Next, the control device 50 will be described.

  In the embodiment shown in FIG. 2, the control device 50 includes a pump output command value storage unit 52 that stores a pump output command value that commands the output level of the micropump 10, and a pump output in the pump output command value storage unit 52. A bit pattern conversion unit 54 that converts a command value into a bit pattern corresponding to the pulse train pattern PP of the control pulse signal CS and outputs the bit pattern, and the control pulse signal CS based on the bit pattern from the bit pattern conversion unit 54 And a control pulse signal generation unit 56 for generation. The control pulse signal generation unit 56 has storage means (for example, a memory, a register, etc.) that stores the bit pattern supplied from the bit pattern conversion unit 54.

  FIG. 4 shows an example of the correspondence relationship between the pump output command value, the bit pattern, and the irradiation energy of the light 44. FIG. 3 shows an example in which the pulse train pattern PP is 8 bits for simplification of illustration, but in this example of FIG. 4, the bit pattern is 20 bits, so the corresponding pulse train pattern PP is also 20 bits. Become. That is, a bit having a logical value 1 in the bit pattern corresponds to a bit having a first level H in the pulse train pattern PP, and a bit having a logical value 0 corresponds to a bit having a second level L. In other words, the pulse train pattern PP has a structure in which 1 of this bit pattern is read as H and 0 as L.

  The pump output command value commands the output level of the micropump 10 to a plurality of levels (stages) from 0 to the maximum. In the example shown in FIG. 4, there are 16 steps from 0 to 15.

  Each pump output command value is converted into each bit pattern by the bit pattern converter 54, each bit pattern is converted into a pulse train pattern PP by the control pulse signal generator 56, and the pulse train pattern PP is repeatedly output. A control pulse signal CS is generated. By supplying the control pulse signal CS to the light source 42, the light source 42 is caused to blink as described above, and each irradiation energy of the light 44 applied to the gas generating material 34 can be realized.

  More specifically, each bit pattern corresponds to each pump output command value, and as the pump output command value increases, the number of bits of logical value 1 increases. The control pulse signal generation unit 56 converts 1 in the bit pattern into the first level H pulse with a predetermined pulse width τ (see FIG. 3), and 0 with the predetermined pulse width τ. The pulse train pattern PP is generated by converting into the above-described pulses, and the pulse train pattern PP is repeatedly output to generate and output the control pulse signal CS.

  In this embodiment, the pulse width τ of each bit of the control pulse signal CS is equal and constant, and the pulse train pattern PP is repeated at a constant period. That is, the control pulse signal CS repeats a fixed-length pulse train pattern PP at a constant period. The pulse width τ is, for example, 10 ms (milliseconds), and thus the light source 42 repeats blinking at high speed. However, the pulse width τ is not limited to 10 ms, and may be 10 ms or less, or 10 ms or more. For example, it may be about 100 ms.

The irradiation energy is that the irradiation energy per unit time, the dimension of the unit is W / m ^2, in this embodiment is mW / cm ² (see also FIG. 5).

  Between the pump output command value, the irradiation energy, and the output of the micro pump 10 (that is, the flow rate or the liquid delivery amount), as shown in the example shown in FIG. Thus, there is a substantially constant correspondence. Each of these correspondences is not necessarily linear. It is sufficient if there is a substantially constant relationship. By utilizing this correspondence, a desired flow rate can be realized by the pump output command value.

  The number of bits of the bit pattern and the pulse train pattern PP is not limited to the above 8 bits or 20 bits, and may be other than the above example as long as it is a fixed number of bits. For example, 4 bits, 16 bits, 32 bits, etc. may be used. When the number of bits is larger, the amount of gas generated from the gas generating material 34 and thus the amount of liquid fed by the micropump 10 can be controlled in more stages.

  All or part of the control device 50 may be realized by a microcomputer or a personal computer, for example. The same applies to control devices 50 in other embodiments described later.

  In the micropump device of this embodiment, at the time of the first level H bit of the control pulse signal CS supplied from the control device 50 to the light source 42, the light source 42 is turned on to start the decomposition reaction of the gas generating material 34, and the gas is appear. At the time of the second level L bit of the control pulse signal CS, the light source 42 is turned off, the decomposition reaction of the gas generating material 34 is stopped, and the gas generation is stopped. That is, the duration of the decomposition reaction of the gas generating material 34 is determined according to the number of bits of the first level H included in the control pulse signal CS.

  Therefore, the combination of the first level H bit and the second level L bit constituting the pulse train pattern PP of the control pulse signal CS, the total amount of decomposition of the gas generating material 34 within a predetermined time, that is, the gas generation described above. The material apparent degradation rate can be controlled. The gas generated by the decomposition reaction diffuses in the gas generating material 34 and flows out to the microchannel 22 as described above. The liquid in the microchannel 22 is transported by the volume of the gas that flows into the microchannel 22.

  By the above-described action, the amount of gas generated from the gas generating material 34 and the micropump 10 is a combination of the first level H bit and the second level bit constituting the pulse train pattern PP of the control pulse signal CS. The liquid feeding amount can be accurately controlled in a plurality of stages including an intermediate stage.

  Moreover, since the control pulse signal CS blinks the light source 42 in a binary state, the above-described (see FIG. 1) uses a constant operating point on the decomposition rate characteristic with respect to the irradiation light intensity of the gas generating material 34. be able to. For example, the operating point at the intersection with the line 12 in FIG. 1 can be used. Therefore, even if the decomposition rate characteristic is not linear, the apparent decomposition rate of the gas generating material can be controlled almost linearly. As a result, the control of the gas generation amount becomes easy and the controllability of the gas generation amount is improved.

  In the above bit pattern, as shown in the example of FIG. 4, when the pump output command value is other than 0, that is, when the output of the micropump 10 is set to 0, the bit of 0 does not continue for 4 bits or more. You may do it. In terms of the pulse train pattern PP, the bits of the second level L may not be continued for 4 bits or more except when the output of the micropump 10 is set to zero. By doing so, the ripple of gas generated from the gas generating material 34 can be reduced.

  FIG. 5 shows an example of the result of measuring the characteristics when the micropump 10 (more specifically, the light source 42) is controlled by the control pulse signal CS generated based on the bit pattern shown in FIG. It is.

  In the micropump 10 used for this measurement, the gas generating material 34 using the compound (A) -based compound that generates gas by the photolysis reaction is disposed in the gas generating chamber 32 having a diameter of 8 mm and a depth of 2 mm. Of structure. As the light source 42, an ultraviolet light emitting diode having a peak wavelength of 365 nm, a light emission output of 100 mW, and a directivity of 100 degrees was used.

  The irradiation energy of the light 44 emitted from the light source 42 is a value measured by placing an optical power meter in place of the gas generating material 34. The flow rate was obtained from analysis of a video image by introducing water droplets into a linear microchannel 22 having a rectangular cross section having a depth of 50 μm and a width of 200 μm, and feeding the solution with the micropump 10.

  As can be seen from FIG. 5, according to the pump output command value, the flow rate of the micropump 10 can be accurately controlled in multiple stages including an intermediate stage.

  As described above, the control pulse signal CS is preferably a signal having a fixed-length pulse train pattern PP that repeats at a constant cycle, so that the control pulse signal CS can be compared with a case in which a pulse train pattern whose length and cycle are arbitrarily changed is repeated. The generation of the signal CS is much easier. As a result, the configuration of the control device 50 can be simplified. This effect becomes more prominent as the number of micropumps 10 increases.

  For example, when the number of micropumps 10 is increased, if the length and period of the pulse train pattern PP are arbitrarily allowed, the generation of the control pulse signal CS for each micropump becomes troublesome and the control device 50 becomes complicated. Such inconvenience can be prevented by using the control pulse signal CS as described above. Therefore, it is advantageous when a micro pump device integrated on a large scale is constructed.

  In addition, the gas generating material 34 has a decomposition reaction of the gas generating material 34 started by light irradiation by turning on the light source 42 within a time equal to or less than the pulse width τ of each bit of the control pulse signal CS from when the light source 42 is turned off. Those ending in are preferred. An example of such a gas generating material 34 will be described later. When such a so-called responsive gas generating material 34 is used, the decomposition reaction of the gas generating material 34 can be stopped quickly when the light source 42 is extinguished. It becomes easy to accurately realize a desired gas generation amount. As a result, it becomes easy to accurately realize a desired liquid feeding amount of the micropump 10.

  FIG. 6 shows an example of the response of the gas generating material 34 in which the decomposition reaction quickly stops when the light source 42 is turned off, and FIG. 7 shows an example of the response less than that. Both figures are schematic diagrams, and in order to simplify the illustration, one cycle of the blinking pattern of the light source 42 is set to 3 bits (see FIGS. 6A and 7A).

As shown in FIG. 6B, when the decomposition reaction of the gas generating material 34 is completed within the time of the pulse width τ or less after the light source 42 is extinguished, the gas is generated even if the blinking pattern of the light source 42 is repeated. Since an undesired accumulation of the decomposition reaction of the material 34 can be suppressed, it is easy to accurately realize the desired gas generation amount G ₁ (see FIG. 6C).

On the other hand, as shown in FIG. 7B, when the decomposition reaction of the gas generating material 34 does not end within the time equal to or shorter than the pulse width τ from when the light source 42 is turned off, if the blinking pattern of the light source 42 is repeated, Since the decomposition reaction of the generated material 34 is gradually accumulated, and the gas generation amount gradually increases accordingly, it is difficult to accurately realize the desired gas generation amount G ₁ (see FIG. 7C).

  The pump output command value storage unit 52 of the control device 50 may be capable of rewriting the pump output command value stored therein during or before the operation of the micropump 10. This rewriting may be performed by direct means such as a dip switch, or may be performed by software.

By making the pump output command value storage unit 52 rewritable as described above, the change of the pump output command value is quickly reflected in the output level of the micropump 10, and the output of the micropump 10 is promptly changed. Can be changed.

(2) Examples of the gas generating material 34 As described above, the gas generating material 34 is a material in which a compound that generates a gas by, for example, light irradiation is dispersed or compatible with a binder resin. A compound that generates a gas when irradiated with light serves to generate a gas when irradiated with light. The binder resin serves to fix a compound that generates a gas upon irradiation with light and to add various functions to the gas generating material.

  Compounds that generate gas upon photoirradiation include compounds (A) that generate gas by photolysis reaction, mixtures of photoacid generators and acid-stimulated gas generators (B), and mixtures of photobase generators and base proliferators. (C) etc. can be mentioned.

  Specific examples of the compound (A) that generates gas by a photolysis reaction include, for example, azo compounds such as 2,2′-azobis- (N-butyl-2-methylpropionamide), 3-azidomethyl-3- Examples thereof include azide compounds such as methyl oxetane, and polyoxyalkylene resins having an oxygen atom content of 15 to 55% by weight.

  Specific examples of the mixture (B) of the photoacid generator and the acid stimulating gas generator include (a) a conventionally known photoacid generator that decomposes efficiently by light irradiation and generates a strong acid, such as a quinonediazide compound, At least one selected from the group consisting of onium salts, sulfonic acid esters and organic halogen compounds, more preferably selected from the group consisting of sulfonic acid onium salts, benzyl sulfonic acid esters, halogenated isocyanurates and bisarylsulfonyldiazomethanes. And (b) an acid stimulating gas generating agent that generates gas by the action of an acid, that is, the action of an acid, such as sodium bicarbonate, sodium carbonate, sodium sesquicarbonate, magnesium carbonate, potassium carbonate, potassium bicarbonate , Calcium carbonate, sodium borohydride, etc. It is.

  Specific examples of the mixture (C) of the photobase generator and the base proliferator include (a) a photobase generator that decomposes by light irradiation to generate a gaseous base, such as a cobaltamine complex, carbamate o -A combination of a nitrobenzene, oxinium ester, carbamoyloxyimino group-containing compound and (b) a base proliferating agent that generates a base gas by reacting with the base gas, for example, a 9-fluorenyl carbamate derivative. .

  The binder resin is added to fix a compound that generates a gas upon light irradiation or to add various functions to the gas generating material 34.

  As a binder resin for fixing a compound that generates a gas upon irradiation with light, an acrylic resin or an epoxy resin is preferably used. However, it is not limited to these as long as it meets the purpose of dispersing or compatibilizing a compound that generates a gas upon irradiation with light. The binder resin itself may have a gas generating ability by light stimulation. For example, a polyoxyalkylene resin containing 15 to 55% by weight of oxygen atoms generates gas while being decomposed by light irradiation.

  The gas generating material 34 may be attached to the support member. The support member is made of, for example, a nonwoven fabric. By using the gas generating material attached to the surface of the nonwoven fabric, the surface area per unit volume of the gas generating material is increased as compared with the case where only the gas generating material 34 is filled in the gas generating chamber 32, Thereby, the gas generation efficiency can be increased. That is, in the nonwoven fabric which is a fibrous member, a large number of fibers are gathered and intertwined, and the gas generated from the gap between the fibers is quickly released to the outside. The gas generating material is impregnated and attached to the nonwoven fabric so that the gas generating material is attached to the surface of each fiber of the nonwoven fabric. In this case, even when the gas generating material adheres to the nonwoven fabric constituting the support member, the gas generating material is adhered to such an extent that a gap between the fibers of the nonwoven fabric remains. Therefore, when gas is generated by light irradiation, the gas is promptly released to the outside through the gap.

  For example, a nonwoven fabric is used as the support member, but other fibrous members other than the nonwoven fabric may be used. That is, an appropriate fibrous member in which synthetic fibers such as cotton, glass fiber, polyethylene terephthalate and acrylic, pulp fiber, and metal fiber are gathered and intertwined can be used as the support member.

  In addition to the fibrous member, various porous members including not only the fibrous member but also the fibrous member can be used as the support member as long as the generated gas can be quickly released to the outside. Here, the porous member widely includes a member having a large number of holes connected to the outer surface, and a member having a gap between fibers connected to the outside, such as the above-mentioned nonwoven fabric, is also included in the porous member. I will do it.

  Therefore, in addition to the above fibrous member, a large number of holes are formed from the inside to the outer surface. For example, sponges, foam-breaking foams, porous gels, particle fusion bodies, gas pressure-assisted thickening moldings Porous materials such as honeycomb structures, cylindrical beads, and folded chips can also be suitably used as the porous member constituting the support member. Moreover, the device which enlarges surface areas, such as a pillar, is also preferably given.

  The material of the support member is not particularly limited, and various inorganic materials or organic materials can be used. As such an inorganic material, glass, ceramic, metal, or metal oxide, and as an organic material, polyolefin, polyurethane, polyester, nylon, cellulose, acetal resin, acrylic, polyethylene terephthalate, polyamide, polyimide, or the like is used. Can do.

  By containing the binder resin, the gas generating material 34 can be easily processed into a desired shape. For example, a solid gas generating material 34 such as a film can be easily obtained. Therefore, it is also suitable for the case where a thin gas generating material 34 such as a film or tape is used as in the micropump 10 described later with reference to FIG.

  The binder resin may include, for example, an adhesive resin in order to impart tackiness. By making the gas generating material 34 contain an adhesive resin as a binder, it is possible to improve the adhesiveness and adhesiveness between the gas generating material 34 and a substrate (for example, the substrate 21 in FIG. 15).

  In addition, as said adhesive agent resin, what does not reduce adhesiveness by light irradiation is preferable. This is because high adhesiveness between the gas generating material 34 and the substrate can be maintained even after the light irradiation to the gas generating material 34 is started. Moreover, it is preferable that the said adhesive agent resin is what is not bridge | crosslinked by light irradiation, for example.

  Specific examples of the above adhesive resin include, for example, rubber-based adhesive resin, (meth) acrylic adhesive resin, silicone-based adhesive resin, urethane-based adhesive resin, and styrene. -Isoprene-styrene copolymer-based adhesive resin, styrene-butadiene-styrene copolymer adhesive resin, epoxy-based adhesive resin, isocyanate-based adhesive resin, and the like.

  A photosensitizer may be added to the gas generating material 34 in addition to the compound that generates gas upon light irradiation and the binder resin. Specific examples of the photosensitizer include known sensitizers such as thioxanthone, benzophenone, acetophenones, and porphyrin.

  The gas generating material 34 may further contain various conventionally known additives, if necessary, in addition to the compound that generates gas upon light irradiation and the binder resin. Examples of such additives include coupling agents, plasticizers, surfactants, stabilizers, and the like. Further, it may be combined with a porous body, filler, metal foil, microcapsule or other particles. Porous materials, fillers, metal foils, microcapsules and other particles dispersed in the gas generating material 34 help to make the gas diffusion look faster.

  In any of the gas generating materials 34 listed above, the gas generating reaction stops promptly as the light source 42 is turned off. That is, it is suitable as the gas generating material 34 having a good response described above.

  If necessary, the gas generating material 34 may further contain a chain reaction inhibitor.

  Examples of the chain reaction inhibitor include known radical scavengers such as t-butylcatechol, hydroquinone, methyl ether, catalase, glutathione peroxidase, superoxide dismutase enzyme vitamin C, vitamin E, polyphenols, and linolenic acid. However, the present invention is not limited to this, and may be anything as long as it has an effect of suppressing the chain reaction.

The chain reaction inhibitor partially suppresses the chain growth stage in the chain reaction and does not suppress the chain initiation stage.

(3) Description Common to Other Embodiments of Micropump Device In the description of each embodiment shown in FIGS. 8 to 12, it is the same as or corresponds to the above-described embodiment (for example, the embodiment shown in FIG. 2). The same reference numerals are given to the portions, and differences from the above-described embodiment will be mainly described.

  Each of the micropump devices shown in FIGS. 8 to 12 includes a plurality of micropumps 10 as described above. However, illustration of each micropump 10 etc. is simplified. For details of each micropump 10 and the like, refer to the description of the embodiment before each drawing, for example, the description of the embodiment shown in FIG.

  Each micro flow path 22 constituting each of the plurality of micro pumps 10 may be provided on one flow path substrate 20 or may be provided on separate members. Each gas generation chamber 32 may also be provided on one pump substrate 30 or may be provided on a separate member. Each light source 42 may also be provided on one light source substrate 40 or may be provided separately.

  In the example shown in FIGS. 8 to 12, the number of the micropumps 10 is illustrated with a relatively small number for simplification of illustration, but is not limited to these examples. The micro flow paths 22 (see FIG. 2) of the plurality of micro pumps 10 may be independent from each other, or some or all may be in communication with each other. The plurality of micropumps 10 may be arranged one-dimensionally or two-dimensionally.

Each of the control devices 50 shown in FIGS. 8 to 12 supplies a plurality of control pulse signals CS _{1 to} CS ₄ (or CS _{1 to} CS _8, etc.) separately to the light sources 42 of the plurality of micropumps 10. Is. Each control pulse signal CS _{1 to} CS ₄ (or CS _{1 to} CS ₈ or the like) is the same as the control pulse signal CS. Therefore, a plurality of micropumps 10 can be controlled separately by one control device 50. As a result, it becomes easy to configure a micropump device having a large number of micropumps.

(4) Second Embodiment In the embodiment shown in FIG. 8, the control device 50 includes a pump output command value storage unit 52 a that stores a plurality of pump output command values that respectively command the output levels of the micropumps 10; Each pump output command value in the pump output command value storage unit 52a is converted into a plurality of bit patterns respectively corresponding to the pulse train patterns PP of the control pulse signals CS _{1 to} CS ₄ for each micro pump 10 and output. a bit pattern conversion section 54a, a control pulse signal CS ₁ to CS ₄ for the micropumps 10 based on the bit pattern from the bit pattern conversion section 54a generates respectively, the control pulse signal CS ₁ to CS ₄ Are provided in parallel with a control pulse signal generator 56a. The control pulse signals CS _{1 to} CS ₄ are supplied to the light sources 42, respectively.

  The control pulse signal generation unit 56a has storage means (for example, a memory, a register, etc.) that stores a plurality of bit patterns supplied from the bit pattern conversion unit 54a.

  In order to stop the desired micropump 10, the pump output command value for the micropump 10 may be set to zero. The same applies to other embodiments described later.

The pump output command value storage unit 52a may be capable of rewriting a plurality of pump output command values stored therein during or before the operation of the micropump 10. By making the pump output command value storage unit 52a rewritable as described above, the change of the pump output command value is quickly reflected in the output level of the corresponding micropump 10, and the corresponding micropump 10 Can be quickly changed. The above is also true for the pump output command value storage unit 52a shown in FIGS.

(5) Third Embodiment In the embodiment shown in FIG. 9, the control device 50 includes a pump output command value storage unit 52a and a bit pattern conversion unit 54a as described in FIG. 8, and the bit pattern conversion unit 54a. A serial data generator 58 for serially outputting bit information constituting each bit pattern for each micropump 10, and a control pulse signal for each micropump 10 based on the bit information from the serial data generator 58. CS _{1 to} CS ₄ ... Are generated in parallel, and the control pulse signal generator 56 b is provided to output the control pulse signals CS _{1 to} CS ₄ . The control pulse signals CS _{1 to} CS ₄ ... Are supplied to the light sources 42, respectively.

  A signal from the serial data generation unit 58 to the control pulse signal generation unit 56 b is transmitted using the transmission path 64. For example, the transmission path 64 may be wired, wireless, infrared, or the like, or via the Internet.

The control pulse signal generator 56b is mounted on the light source substrate 40 in this embodiment. This is to shorten the signal lines of the control pulse signals CS _{1 to} CS ₄ . Although the control pulse signal generation unit 56b is separated from the serial data generation unit 58 and the like in arrangement, it constitutes a part of the control device 50 in function. The same applies to the control pulse signal generator 56c shown in FIG.

  The serial data generation unit 58 includes, for example, a bit pattern storage unit (for example, a memory, a register, etc.) that stores a plurality of bit patterns supplied from the bit pattern conversion unit 54a, and bit information extracted in parallel from the bit pattern storage unit And a serial-to-serial data converter for serially outputting bit by bit. This parallel-serial data converter is, for example, a shift register.

  The control pulse signal generation unit 56b has a serial / parallel data converter that rearranges bit information serially sent from the serial data generation unit 58 into bit patterns for each micropump 10 and outputs them in parallel. . This serial-parallel data converter is, for example, a shift register.

  In order to simplify the following description, a circuit including the bit pattern conversion unit 54 a and the serial data generation unit 58 will be referred to as a conversion circuit 60.

  In this embodiment, since the bit information constituting each bit pattern for the plurality of micropumps 10 can be serially transmitted from the serial data generation unit 58 to the control pulse signal generation unit 56b, the number of transmission lines 64 is reduced. Can be reduced. Moreover, the required number of transmission lines 64 does not change no matter how many micropumps 10 are increased.

  For example, only one transmission path 64 for transmitting bit information is required. In addition to this, even if auxiliary signals (for example, signals corresponding to the clock signal CLK and the latch signal LCH shown in FIG. 10) are transmitted, the number of transmission lines 64 is only about three. Moreover, no matter how many micropumps 10 are increased, the number of transmission paths 64 does not change with the above number.

  As a result, the control pulse signal generation unit 56b is arranged close to the light sources 42 of the plurality of micropumps 10, separated from them, and the remaining components of the control device 50 (that is, the pump output command value storage unit 52a and the conversion circuit) 60) can be easily arranged, wiring processing is simplified, and the degree of freedom of the device configuration is greatly increased. The above effects become more prominent as the number of micropumps increases.

  For example, as in this embodiment, the control pulse signal generator 56b is mounted on the same light source substrate 40 as the light source 42, and the remaining components of the control device 50 can be arranged at an arbitrary position apart from the light source substrate 40. .

Moreover, it is possible to easily cope with an increase in the number of micropumps. For example, the number of about 40 to 200 micro-pump 10, or when more than the increase, in the embodiment shown in FIG. 8, the control pulse signal CS ₁ · · · of the signal between the control unit 50 and the light source substrate 40 The number of lines is the same as that of the micropump 10, so that the wiring process becomes troublesome. On the other hand, in this embodiment, since the control pulse signal generation unit 56b can be arranged close to each light source 42, for example, the control pulse signal generation unit 56b can be mounted on the same light source substrate 40 as the light source 42. Therefore, the wiring of the signal lines of the control pulse signals CS ₁ ... Can be made very short, so that the wiring process becomes easy. No matter how much the number of micropumps 10 increases, the number of transmission lines 60 does not change as described above. Accordingly, since it is possible to easily cope with an increase in the number of micropumps, it becomes easy to configure a micropump device integrated on a large scale.

(6) Fourth Embodiment In the embodiment shown in FIG. 10, the control device 50 includes a pump output command value storage unit 52 a that stores a plurality of pump output command values that respectively command the output levels of the micropumps 10; A clock signal generation unit 76 that generates a clock signal CLK that synchronizes transmission of serial bit information, and a latch signal generation unit 78 that generates the latch signal LCH by counting the clock signal CLK by the number of the micropumps 10 are provided. ing.

  The pump output command value storage unit 52a is, for example, the same as the pump output command value storage unit 52a shown in FIGS. However, in this embodiment, pump output command values are taken out one by one from the pump output command value storage unit 52a by the bit pattern conversion unit 54b described below.

  The clock signal generator 76 outputs the clock signal CLK at a predetermined cycle, for example, at a cycle of 0.25 ms.

  The latch signal generator 78 outputs one pulse each time the clock signal CLK is counted by the number of the micropumps 10. This is the latch signal LCH. For example, when the cycle of the clock signal CLK is 0.25 ms and the number of micropumps 10 is 40, one pulse is output every 0.25 × 40 = 10 ms. That is, the period of the latch signal LCH is 10 ms in this example.

  The control device 50 further sequentially extracts each pump output command value in the pump output command value storage unit 52a by one pump output command value at the timing of the clock signal CLK, and controls the control pulse signal CS for the micro pump 10. A bit pattern conversion unit 54b that converts and outputs a bit pattern corresponding to the pulse train pattern PP, and a bit pattern register 72 that stores a bit pattern of one pump output command value output from the bit pattern conversion unit 54b; By extracting one bit of bit information from the bit pattern in the bit pattern register 72 for each timing of the clock signal CLK and shifting the position for extracting the bit information one by one according to the latch signal LCH, a plurality of micropumps are obtained. Multiple bit buffers for 10 And a bit selector 74 for outputting the same digit bit information over in as a serial bit pattern SB.

  In this embodiment, the bit pattern conversion unit 54b sequentially takes out and outputs each pump output command value in the pump output command value storage unit 52a while circulating through each pump output command value at the timing of the clock signal CLK. A selector 70 and a conversion unit 71 that converts a pump output command value from the cyclic selector 70 into a bit pattern each time it is output are provided. For example, the conversion unit 71 has substantially the same function as the bit pattern conversion unit 54 shown in FIG.

  The bit pattern register 72 stores the latest one bit pattern each time one bit pattern is output from the conversion unit 71.

  The operation of the bit selector 74 will be described with reference to FIG. For ease of understanding, FIG. 14 shows a plurality of bit patterns arranged for alignment for convenience. The plurality of bit patterns are actually arranged in a matrix as shown in FIG. I don't mean. Further, in FIG. 14, in order to simplify the description, a case where there are four pumps and each bit pattern is 8 bits is illustrated, but the present invention is not limited to this.

  In the bit pattern register 72, for each timing of the clock signal CLK (for example, 0.25 ms), for example, a bit pattern of pump number 1 first, a bit pattern of pump number 2 next, and so on. Bit patterns are overwritten sequentially. Only one bit pattern is stored in the bit pattern register 72.

  The bit selector 74 extracts 1-bit bit information from the bit pattern in the bit pattern register 72 for each timing of the clock signal CLK. However, since the bit pattern in the bit pattern register 72 is overwritten at every timing of the clock signal CLK as described above, the bit selector 74 eventually converts the bit information of the first digit shown in FIG. One bit is sequentially extracted and output at every CLK timing. This is to output the bit information of the same digit of the plurality of bit patterns described above as the serial bit pattern SB. Then, the bit selector 74 shifts the digit from which the bit information is extracted one by one at each change timing (for example, falling, the same applies hereinafter) of the latch signal LCH. For example, the second digit, the third digit, and so on are shifted.

  By the operation as described above, the bit selector 74 outputs, for example, a serial bit pattern SB in which each 1 bit of the first digit of the pump numbers 1 to 4 is serialized (in other words, in time series). Next, the second digit serial bit pattern SB of pump numbers 1 to 4 is output, and thereafter the eighth digit serial bit pattern SB of pump numbers 1 to 4 is output. Thereafter, the same operation as above is performed. Repeated.

The control device 50 further includes three transmission lines 65 to 65 for transmitting the serial bit pattern SB from the bit selector 74, the clock signal CLK from the clock signal generation unit 76, and the latch signal LCH from the latch signal generation unit 78, respectively. 67 and a shift register 57 for taking in the serial bit pattern SB, the clock signal CLK and the latch signal LCH from the transmission paths 65 to 67, and the control for each micropump 10 based on the serial bit pattern SB. and it generates a pulse signal CS ₁ to CS ₈ in parallel, and a control pulse signal generation section 56c for outputting the control pulse signals CS ₁ to CS ₈ in parallel. The control pulse signals CS _{1 to} CS ₈ are supplied to the light sources 42, respectively.

  For example, the transmission paths 65 to 67 may be wired, wireless, infrared, or the like, or may be via the Internet.

  In the example shown in FIG. 10, the control pulse signal generator 56c has two shift registers 57 connected in series with each other. However, the present invention is not limited to this, and the number of shift registers 57 is the number of bits. What is necessary is just to determine by the relationship between (the number of output terminals) and the number of micropumps 10. That is, if the number of bits of one shift register 57 is insufficient for the number of micropumps 10, the number of shift registers 57 that can eliminate the shortage may be connected in series. In FIG. 10, the code SBI is an input terminal for the serial bit pattern SB, and the code SBO is an output terminal for the overflowing serial bit pattern SB.

Each shift register 57 is a known shift register, and the bit information of the captured serial bit pattern SB is obtained for each micropump 10 at each timing of the clock signal CLK by an operation almost opposite to the operation in the bit selector 74. Distribution and output in parallel for each timing of the latch signal LCH. The previous state is maintained during the timing of the latch signal LCH (for example, 10 ms). By such an operation, the control pulse signals CS _{1 to} CS ₈ can be output in parallel from the two shift registers 57, that is, from the control pulse signal generation unit 56c.

  In order to simplify the following description, a circuit including the bit pattern conversion unit 54b, the bit pattern register 72, the bit selector 74, the clock signal generation unit 76, and the latch signal generation unit 78 will be referred to as a conversion circuit 60a. .

  In this embodiment, the bit pattern register 72 only needs to be able to store the bit pattern of one pump output command value. Therefore, even if the number of micropumps 10 is increased, the capacity of the bit pattern register 72 is increased. There is no need to increase it. That is, the capacity of the storage unit required for the control device 50 can be reduced. Therefore, it is possible to reduce the size and cost of the control device 50, and it is easier to configure a large-scale micropump device having a large number of micropumps.

  In addition, since the bit information constituting the bit pattern for each micropump 10 is transmitted serially, the same effect as that of the embodiment shown in FIG. 9 can be obtained.

That is, the number of transmission lines 65 to 67 can be three without depending on the number of micropumps 10. In addition, the control pulse signal generation unit 56c is arranged close to the light sources 42 of the plurality of micropumps 10 and mounted on the light source substrate 40, for example, and separated from it, and the remaining components of the control device 50 can be easily arranged. Therefore, the wiring process is simplified and the degree of freedom of the device configuration is increased. Accordingly, since it is possible to easily cope with an increase in the number of micropumps, it becomes easy to configure a micropump device integrated on a large scale.

(7) Fifth Embodiment In the embodiment shown in FIG. 11, the control device 50 interprets a command sequence COM given from the outside in addition to the pump output command value storage unit 52a and the conversion circuit 60a shown in FIG. Then, a command interpreter 86 for rewriting a plurality of pump output command values in the pump output command value storage unit 52a during or before the operation of the micropump 10 is provided. Unlike the command interpreter 86a shown in FIG. 12, the command interpreter 86 immediately executes an operation of rewriting the pump output command value in the pump output command value storage unit 52a in response to the command sequence COM.

  Since the configuration of the light source substrate 40 is the same as that of the embodiment shown in FIG. 10, the illustration is simplified here. The same applies to the embodiment shown in FIG.

  The command sequence COM includes, for example, commands for instructing pump numbers, pump output command values, pump activation, pump stop, and the like of the plurality of micropumps 10.

  The command sequence COM is, for example, an interactive command sequence using ASCII (ASCII, abbreviation for American Standard Code for Information Interchange) characters.

  For example, the command sequence COM is given to the command interpreter 86 from the external device 80 via the communication units 82 and 84. The external device 80 is, for example, a personal computer. As means for transmitting the command string COM, known means such as a wired system, a wireless system, an infrared system, and the Internet can be adopted.

In this embodiment, since the control device 50 includes the command interpreter 86 as described above, the operation and output of each micro pump 10 are dynamically controlled at an arbitrary timing by a command sequence COM given from the outside. can do. Therefore, the control of each micropump 10 becomes more flexible and easy.

(8) Sixth Embodiment In the embodiment shown in FIG. 12, the control device 50 includes a command interpreter 86 a, an event information storage unit 88, a timer 90, a prefetch unit 92, and the command interpreter 86 shown in FIG. 11. It has an event management unit 94.

  The command interpreter 86a interprets a command sequence COM given from the outside, and generates a plurality of pieces of event information (also referred to as event closures) that include a pump number, a pump output command value, and an execution reservation time.

  An example of the configuration of one piece of event information is shown in FIG. Scheduled execution time, pump number, and pump output command value are a set. FIG. 13B shows an example of an event information sequence composed of such a plurality of event information. In this example, the execution reservation time, pump number, and pump output command value are all expressed as integers. However, it is not limited to this.

  In this embodiment, the command sequence COM given to the command interpreter 86a includes a command for instructing the execution reservation time.

  The event information storage unit 88 stores a plurality of the event information from the command interpreter 86a. Specifically, an event information sequence illustrated in FIG. 13B is stored.

  The timer 90 keeps a reference time.

  The prefetch unit 92 extracts a plurality of pieces of event information from the event information storage unit 88 prior to their execution. More specifically, event information is extracted from the event information sequence in the order of execution reservation time.

  The event management unit 94 compares the execution reservation time in the event information extracted in the prefetch unit 92 with the time of the timer 90, and if there is event information whose time has reached the execution reservation time, the event information The pump output command value of the pump number is given to the pump output command value storage unit 52a, and the pump output command value of the corresponding pump number is rewritten. As a result, the output of the corresponding micropump 10 is changed.

  In this embodiment, since the control device 50 includes the command interpreter 86a, the event information storage unit 88, the event management unit 94, and the like as described above, event information based on a command sequence COM given from the outside is stored. Thus, the individual micropumps 10 can be controlled at their reserved execution times. That is, the individual micropumps 10 can be controlled autonomously apart from the control of the external device 80. In addition, since the control device 50 stores event information based on the command sequence COM given from the outside, there is no need to always give a command sequence to the control device 50, and thus there is no restriction on the communication speed of the command sequence COM. As a result, it is possible to cope with a micro pump device integrated on a larger scale.

  The event information storage unit 88 may be configured by using a non-volatile storage unit. In such a case, after the command sequence COM is given from the external device 80, the control device 50 is turned off and restarted. Also, the output of each micro pump 10 can be controlled autonomously.

The technical idea using the command interpreter 86 shown in FIG. 11 and the technical idea using the command interpreter 86a, the event management unit 94, etc. shown in FIG. 12 are applied to the control device 50 shown in FIG. 1, FIG. 8, and FIG. You may do it.

(9) Other examples of the micropump 10 The micropump 10 may not have the gas generation chamber 32. The point is that the gas generated from the gas generating material 34 upon irradiation with the light 44 from the light source 42 may be supplied to the micro flow path 22, thereby functioning as the pump described above. That is, by supplying the gas generated from the gas generating material 34 to the micro flow path 22, the liquid in the micro flow path 22 can be transported by the volume of the supplied gas, which functions as a pump.

  An example of the micropump 10 that does not have the gas generation chamber 32 is shown in FIG.

  The micropump 10 includes a microchannel 22 formed in the substrate 21 and having an opening 25 opened in the main surface of the substrate 21, and an opening of the microchannel 22 in the main surface of the substrate 21. 25, and a light source 42 that irradiates light 44 to a region of the gas generating material 34 that covers the opening 25 of the microchannel 22.

  The substrate 21 and the gas generating material 34 are bonded by, for example, an adhesive layer (not shown).

The control pulse signal CS is supplied to the light source 42 from, for example, the control device 50 shown in FIG. The micropump device may have a plurality of the micropumps 10, and in that case, a plurality of the control pulse signals from the control device 50 shown in FIGS. 8 to 12, for example, to each light source 42 of each micropump 10. CS ₁ , CS ₂ ,... Are supplied separately.

  For the description of the micro flow path 22, the gas generating material 34, the light source 42, the control device 50, and the like, refer to the description of the previous embodiment, and redundant description is omitted here.

  A light-transmitting gas barrier layer 37 may be disposed on the surface of the gas generating material 34 to prevent gas. By doing so, the gas generated in the gas generating material 34 can be supplied to the micro flow path 22 more efficiently, and it becomes easy to obtain a high gas pressure in the micro flow path 22.

  The substrate 21, the gas generating material 34, and the gas barrier layer 37 may have a film shape, a tape shape, or the like, for example.

  According to the micropump 10 as described above, the micropump 10 can be made smaller and thinner. As a result, for example, it becomes easy to configure a micropump array in which a large number of micropumps 10 are integrated on a large scale.

DESCRIPTION OF SYMBOLS 10 Micropump 20 Flow path board | substrate 21 Substrate 22 Micro flow path 25 Opening 30 Pump board 32 Gas generation chamber 34 Gas generation material 40 Light source board 42 Light source 44 Light 50 Controller 52 Pump output command value memory | storage part 52a Pump output command value memory | storage part 54, 54a, 54b Bit pattern conversion unit 56, 56a, 56b, 56c Control pulse signal generation unit 58 Serial data generation unit 64-67 Transmission path 70 Cyclic selector 71 Conversion unit 72 Bit pattern register 74 Bit selector 76 Clock signal generation unit 78 Latch signal generation unit 80 External device 86, 86a Command interpreter 88 Event information storage unit 90 Timer 92 Prefetch unit 94 Event management unit CS Control pulse signal PP Pulse train pattern SB Serial bit pattern Emissions CLK clock signal LCH latch signal COM command sequence

JP-A-2005-297102 JP 2007-279068 A

Claims (5)

(A) a micro-channel that is a liquid channel, a gas generating material that receives light irradiation to generate a gas and supplies the gas to the micro-channel, and a light source that irradiates the gas generating material with light A micropump having:
(B) The light source is blinked in a binary state by repeating a pulse train pattern composed of a fixed number of a plurality of bits each bit can take two states of a first level for turning on the light source and a second level for turning off the light source. And a control device that supplies a control pulse signal to the light source. (A) a micro flow channel that is a liquid flow channel, a gas generation chamber that communicates with the micro flow channel, and a gas generation chamber that is disposed in the gas generation chamber and is irradiated with light to generate gas. A micropump having a gas generating material for causing a gas to flow from the gas generating chamber to the micro flow path, and a light source for irradiating the gas generating material with light;
(B) The light source is blinked in a binary state by repeating a pulse train pattern composed of a fixed number of a plurality of bits each bit can take two states of a first level for turning on the light source and a second level for turning off the light source. And a control device that supplies a control pulse signal to the light source. (A) a liquid channel, a micro channel formed in the substrate and having an opening opened in the main surface of the substrate; and the micro channel in the main surface of the substrate A micro-pump having a gas generating material disposed so as to cover the opening of the gas source, and a light source that irradiates light to a region of the gas generating material that covers the opening of the micro-channel,
(B) The light source is blinked in a binary state by repeating a pulse train pattern composed of a fixed number of a plurality of bits each bit can take two states of a first level for turning on the light source and a second level for turning off the light source. And a control device that supplies a control pulse signal to the light source.   4. The micropump device according to claim 1, wherein the pulse width of each bit of the control pulse signal is equal to and constant with each other, and the pulse train pattern of the control pulse signal is repeated at a constant period. The micropump device includes a plurality of the micropumps,
5. The micropump device according to claim 1, wherein the control device separately supplies a plurality of the control pulse signals to each light source of the plurality of micropumps. 6.

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