JP2008238280A - Abrasive particle transfer sheet and precision grinding tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an abrasive particle transfer sheet with excellent low-scratching property, precision grinding property, and grinding chip discharging property. <P>SOLUTION: This abrasive particle transfer sheet transfers abrasive particles on a grinding face of a grinding tool, and comprises a support, an adhesive layer formed on a surface of the support, and abrasive particles adhered on a surface of the adhesive layer. In this sheet, the abrasive particles are aligned so that an average particle interval between the adjacent abrasive particles becomes 0.5-10 times of an average particle size of the abrasive particles. The abrasive particles are transferred and fixed on the support using the sheet, so as to obtain a precision grinding tool having a structure that the abrasive particles are aligned. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an abrasive grain transfer sheet excellent in precision grindability and a precision grinding tool.

  Until now, the abrasive particles have been attached and fixed to the outer surface of the grinding tool by various methods, or embedded and fixed inside the grinding plate. Regardless of the fixing method, usually, the abrasive grains have been arranged in a random distribution. On the other hand, in recent years, in semiconductor processing and the like, demands for precise grinding have increased, and attempts have been made to improve the quality of the ground surface by arranging abrasive grains.

  For example, a method of patterning abrasive grain positions by providing a non-conductive layer on a grinding plate surface, forming a pattern by laser beam or etching, and plating the pattern with metal and abrasive grains (Patent Document 1). reference). A method of inserting abrasive particles into a thin plate-like array member having a plurality of regularly arranged through holes, and then fixing the abrasive particles (see Patent Document 2) Grinding using a template having a plurality of holes A method in which a brazing paste is patterned on a plate, an abrasive grain layer is disposed on the pattern, and brazing is performed (see Patent Document 3). A method of forming a concavo-convex grinding surface made of a polycrystalline diamond thin film on a working surface of a base metal having a convex portion by a vapor phase synthesis method is known (see Patent Document 4).

However, in the known arrangement method, only rough patterning is achieved, and sufficient precision grindability is not satisfied. In addition, in the method of fine patterning according to the abrasive grains in advance, there is a problem in mass productivity, and when the abrasive grains are minute, there is a limit to reducing the thickness of the array member, and the array formation It was difficult, and the smoothness of the polished surface and the exclusion of polishing waste were insufficient. The method of forming convex portions in advance and forming a polycrystalline diamond thin film by a vapor phase method has difficulty in patterning the grinding plate, and sufficient precision grindability cannot be obtained.
JP 2004-130499 A JP 2002-187065 A JP 2004-1232 A JP-A-10-71559

  The present invention effectively suppresses grinding unevenness due to uneven density of abrasive grains, suppresses scratches on the grinding surface due to grinding scraps, makes it possible to form a ground portion in which abrasive grains are uniformly arranged, and is excellent. It is an object of the present invention to provide an abrasive grain transfer sheet that realizes high precision grindability, a manufacturing method thereof, a manufacturing method of a precision grinding tool using the same, and a precision grinding tool using the same.

  As a result of intensive studies in order to solve the above problems, the present inventor is characterized in that abrasive grains are arranged at a specific abrasive grain interval on a support on which an adhesive layer is formed. It has been found that the above problems can be solved by using the abrasive grain transfer sheet.

That is, the present invention is as follows.
[1] A step of forming a laminate by using a biaxially stretchable film as a support and forming an adhesive layer on the biaxially stretchable film, and attaching abrasive particles to the surface of the adhesive layer of the laminate Making the abrasive particle-adhered film, the average particle interval between adjacent abrasive particles in the abrasive particle-adhering film is 0.5 to 10 times the average particle size of the abrasive particles A method of producing an abrasive grain transfer sheet, comprising the step of biaxially stretching and holding the same.
[2] An abrasive grain transfer sheet for transferring abrasive grains to the grinding surface of a grinding tool, produced by the method of [1].
[3] The abrasive particle according to [2], wherein the thickness of the adhesive layer in the abrasive particle transfer sheet is in the range of 0.05 to 0.7 times the average particle size of the abrasive particle. Transfer sheet.
[4] The abrasive particle transfer sheet according to [2] or [3], wherein the abrasive particles have an average particle diameter of 1 μm to 250 μm.
[5] The abrasive grain transfer sheet according to any one of [2] to [4], wherein the major axis / minor axis of the abrasive grain is in the range of 1.0 to 1.5.
[6] The above-mentioned [2], wherein the abrasive particles are at least one abrasive particle selected from the group consisting of diamond, metal oxide, and carbide in a range of 5 to 10 in Mohs hardness. ] The abrasive grain transfer sheet according to any one of [5] to [5].
[7] The abrasive grain transfer sheet produced by the method for producing an abrasive grain transfer sheet according to [1] is brought into close contact with the grinding surface of the support plate to transfer the abrasive grains, and then the abrasive grains are transferred. A method of manufacturing a precision grinding tool characterized by being fixed on a support plate.
[8] A precision grinding tool manufactured by the method for manufacturing a precision grinding tool according to [7].

  The abrasive grain transfer sheet and precision grinding tool of the present invention can form an abrasive grain layer uniformly arranged in a single layer, and can effectively suppress grinding irregularities due to abrasive grain density irregularities. Further, the spacing between the abrasive grains can be kept constant, grinding scraps can be effectively discharged, and scratches on the ground surface due to aggregation of grinding scraps can be suppressed. Furthermore, a pattern in which abrasive grains are uniformly arranged can be transferred and formed at an arbitrary position of a grinding tool. That is, by using the abrasive particle transfer sheet of the present invention, the abrasive particles can be arranged at specific intervals on the surface of the grinding tool while ensuring the height uniformity of the abrasive particles. Thereby, the space | interval which can exclude grinding waste effectively can be ensured in the surface direction. Further, by suppressing the variation in the height of the abrasive grains, it is possible to suppress uneven grinding and obtain stable precision grindability.

  Hereinafter, the present invention will be specifically described.

  First, the abrasive grain in the manufacturing method of the abrasive grain transfer sheet of this invention is demonstrated.

  As the abrasive particles, it is preferable to use at least one abrasive particle selected from the group consisting of diamond, metal oxide, and carbide.

  Any abrasive grains that are harder than the object to be ground can be used, but the hardness of the abrasive grains is preferably 5 to 10 in terms of Mohs hardness.

  As the metal oxide, alpha alumina, sapphire, or zirconia oxide can be used. It is preferable to use silicon carbide or boron carbide as the carbide. From the point of hardness, it is preferable to use diamond.

  The average particle diameter of the abrasive grains is preferably 1 to 250 μm, and more preferably 2 to 150 μm. In the case of precision polishing, the thickness is preferably 1 to 50 μm, more preferably 2 to 10 μm. 150 μm or less is preferable from the viewpoint of smoothness of the ground surface, and 1 μm or more is preferable from the viewpoint of grindability. In the case of precision grinding, 50 μm or less is preferable, and 10 μm or less is preferable. From the viewpoint of grinding efficiency, it is preferably 1 μm or more, and more preferably 2 μm or more.

  The average particle size and particle size distribution of the abrasive particles can be measured using a known method and apparatus, and a wet particle size distribution meter, a laser type particle size distribution meter and the like can be used. Alternatively, the average particle size and particle size distribution may be calculated by observing the particles with an electron microscope or the like. The average particle size and particle size distribution of the present invention can be determined by a laser particle size distribution meter.

  The ratio of the average particle size to the maximum particle size of the abrasive particles is preferably 2 or less, and more preferably 1.5 or less. A narrower particle size distribution of the abrasive grains is preferred. The more uniform the particle size, the more effectively the abrasive particles function and precision grinding becomes possible.

  The major axis / minor axis of the abrasive grains is preferably in the range of 1.0 to 1.5, more preferably in the range of 1.0 to 1.2. When the major axis / minor axis is smaller than 1.5, the manner in which the abrasive grains strike the surface to be ground during grinding becomes uniform, and precision grinding becomes possible.

  Subsequently, the manufacturing method of the abrasive grain transfer sheet of this invention is demonstrated.

  The abrasive grain transfer sheet comprises a support, an adhesive layer, and abrasive grains. The abrasive grain transfer sheet is for making a grinding tool. That is, the abrasive grain transfer sheet is a sheet for transferring the abrasive grains to the grinding surface of the grinding tool.

  A known biaxially stretchable film can be used as the support used in the abrasive particle transfer sheet of the present invention. The biaxially stretchable film will be described later.

  The thickness of the support is preferably 10 μm or more and 400 μm or less, and more preferably 50 μm or more and 200 μm or less. The thickness is preferably 10 μm or more from the viewpoint of mechanical connection strength, and is preferably 400 μm or less from the viewpoint of ensuring smoothness during transfer of the abrasive grains.

  For the adhesive layer in the abrasive grain transfer sheet, an adhesive such as non-crosslinkable acrylic modified natural rubber can be used. A preferable pressure-sensitive adhesive in the case of producing an abrasive grain transfer sheet by biaxially stretching the support will be described later.

  The thickness of the adhesive layer in the abrasive grain transfer sheet is preferably in the range of 0.05 to 0.7 times the average grain diameter of the abrasive grains. It is preferably 0.05 times or more from the viewpoint of holding abrasive grains, and preferably 0.7 times or less from the viewpoint of ease of transfer.

  In the abrasive grain transfer sheet, the abrasive grains are arranged so that the average interval between adjacent abrasive grains is 0.5 to 10 times the average grain diameter of the abrasive grains.

  Adjacent abrasive grains refers to six abrasive grains closest to the selected abrasive grains.

  The average particle spacing between adjacent abrasive grains is determined as follows.

  First, a photograph of the abrasive grain transfer sheet of the present invention is taken with an optical microscope from the surface side where the abrasive grains are present. Next, 20 arbitrary abrasive grains are selected, the distance to the 6 abrasive grains closest to each of the abrasive grains is measured, the average value of the whole is obtained, and the average particle interval is obtained. . At the same time, the standard deviation of the particle interval can be obtained.

  The average particle interval is preferably 0.5 to 10 times the average particle size of the abrasive particles. More preferably, it is 1 to 5 times. More preferably, it is 2 times or more and 3 times or less. From the viewpoint of eliminating grinding debris of a grinding tool produced by transferring abrasive grains, the average particle diameter is preferably 0.5 times or more, and from the viewpoint of grindability, it is preferably 10 times or less of the average particle diameter.

  The term “array” in the present invention means that the abrasive grains are present with a standard deviation of an average grain interval of 0.5 times or less, more preferably 0.3 times or less.

  Next, the manufacturing method of the abrasive grain transfer sheet of this invention is demonstrated.

  As a method for producing an abrasive grain transfer sheet, a biaxially stretchable film is used as a support, and an adhesive layer is provided on the biaxially stretchable film to form a laminate, on the laminate The process of producing an abrasive grain-adhered film by adhering abrasive grains, the average grain interval between adjacent abrasive grains in the abrasive grain-adhered film is 1 to 10 times the average grain diameter of the abrasive grains A step of biaxially stretching so as to hold.

  As the biaxially stretchable film, a known resin film or the like can be used. A polyethylene resin, a polypropylene resin, a polyester resin, a polyvinyl butyral resin, a polyvinyl alcohol resin, a polyvinylidene chloride resin or the like can be used alone or as a copolymer. Or a flexible and stretchable resin film such as a rubber sheet such as nitrile rubber, butadiene rubber, or silicone rubber. Polypropylene resin and polyester resin are particularly preferable. A film having a shrinkage ratio of 10% or less after stretching is preferred.

  As the pressure-sensitive adhesive used for the pressure-sensitive adhesive layer, a known one can be used, but when biaxial stretching is performed while heating, it is preferable to use a non-thermal crosslinkable pressure-sensitive adhesive. Specifically, natural rubber latex adhesive, synthetic rubber latex adhesive, synthetic resin emulsion adhesive, silicone adhesive, ethylene-vinyl acetate copolymer adhesive, acrylic adhesive, etc. Or they can be used in combination. Further, it is preferable to use an acrylic pressure-sensitive adhesive that can be reduced in viscosity by ultraviolet irradiation.

  The thickness of the pressure-sensitive adhesive layer is preferably in the range of 1/50 to 10 times the average particle diameter of the abrasive grains used, and more preferably in the range of 1/10 to 5 times. From the viewpoint of holding the abrasive grains during adhesion and stretching, the thickness of the adhesive layer is preferably 1/50 or more of the average particle diameter of the abrasive grains, and the particle transfer to the abrasive grain transfer sheet after stretching In view of the above, 10 times or less is preferable. As the method for forming the adhesive layer, a method in which a dispersion or solution in a solvent or water is applied and dried by a known method such as a gravure coater, a die coater, a knife coater, a bar coater, or a spray coat can be used. When a hot-melt type pressure-sensitive adhesive is used, it can be roll-coated without a solvent.

  In the step of producing an abrasive particle-adhered film by adhering abrasive particles on the laminate, it is preferable to produce a film in which the abrasive particles are arranged in a single layer (closely packed) with almost no gap. In addition, close packing means filling so that the average particle | grain space | interval between the filled particles may be 1/2 or less of an average particle diameter. More preferably, the average particle interval between the filled particles is 1/5 or less of the average particle size.

  A known method can be used as a method for closely packing the abrasive grains. For example, a method in which an adhesive layer containing at least a thermoplastic resin is formed on the biaxially stretchable film, and abrasive particles are brought into contact therewith to be adhered, and a load is applied with a rubber roll or the like and disposed in a single layer. Can be taken. In this case, a method of repeating the adhesion-roll operation several times is preferable for filling without gaps. Use a method such as applying a pressure-sensitive adhesive on the biaxially stretchable film to form an adhesive layer, adhering abrasive grains on it, repeating the adhesion several times if necessary, and dispersing and arranging in a single layer Can do.

  As a method of biaxially stretching the obtained abrasive particle-adhered film, a known method can be used, but it is preferable to use a biaxial stretching device in terms of uniform dispersion arrangement. From the viewpoint of particle spacing, the degree of stretching is preferably 50% or more and 1000% or less, and more preferably 100% or more and 500% or less.

  In addition, 100% stretching means that the length of the portion stretched along the stretching direction is 100% of the length before stretching. The stretching direction is arbitrary, but biaxial stretching with a stretching angle of 90 ° is preferable, and simultaneous stretching is preferable. In the case of biaxial stretching, the degree of stretching in each direction may be the same or different.

  When the average particle interval between adjacent abrasive particles is 10 times or less the average particle size of the abrasive particles, a sufficient grinding speed can be obtained. When the average particle size is 0.5 times or more of the abrasive grains, grinding waste can be eliminated and scratching can be prevented.

  In order for the average particle interval between adjacent abrasive particles to be 0.5 to 10 times the average particle size of the abrasive particles, the degree of stretching may be 50% to 1000%.

  As the biaxial stretching apparatus, a simultaneous biaxial continuous stretching apparatus is preferable.

  As the simultaneous biaxial continuous stretching apparatus, a known apparatus can be used, but a tenter type stretching machine that continuously stretches by fixing the long side with a chuck fitting and simultaneously stretching the distance between the longitudinal and lateral directions is preferable. As a method for adjusting the degree of stretching, a screw method or a pantograph method can be used, but a pantograph method is more preferable from the viewpoint of accuracy of adjustment. When stretching while heating, it is preferable to provide a preheating zone before the stretched portion and a heat setting zone behind the stretched portion.

  It is preferable to hold the stretched abrasive grain transfer film so that the abrasive grain spacing does not change. As the holding method, a method of adhering and fixing the abrasive particle transfer film to a metal or resin frame, a method of adhering and fixing to a support plate such as glass or metal having good smoothness, and the like can be used. .

  Next, a manufacturing method of a precision grinding tool in which the abrasive grain transfer sheet is brought into close contact with the grinding surface of the support plate to transfer the abrasive grains and then the abrasive grains are fixed will be described.

  As a method for transferring the abrasive grains by closely contacting the grinding surface of the support plate using the abrasive grain transfer sheet of the present invention, the abrasive grain transfer sheet is fixed on a smooth plate, A method in which a support plate on which an adhesive layer has been previously formed is brought into contact with the abrasive grains and transferred and fixed is preferred.

  As a method for fixing after the transfer, a known method can be used. As a method for transferring, a method in which a support having an adhesive layer provided on an abrasive grain transfer sheet fixed on a flat plate is pressed and further cured can be used. When transferring the abrasive grains, it is possible to transfer the abrasive grains to the entire support, but it is also preferable to pattern the adhesive layer on the support and pattern the abrasive grain transfer locations. It is also preferable to pattern the convex portions on the support and transfer the abrasive grains only to the convex portions. It is also preferable to use a method of laminating the abrasive grain transfer sheet on a support on which an adhesive layer is formed. The method for fixing the abrasive grains can be arbitrarily selected according to the substrate to be used and the abrasive grains, but the method for fixing with a resin adhesive, the method for brazing, the plating method It is preferable to use a metallizing method.

  The average particle interval of the transferred abrasive particles is preferably in the range of 0.5 to 10 times the average particle size of the abrasive particles. Further, the standard deviation of the number of abrasive particles transferred to the support is preferably 0.5 times or less, more preferably 0.3 times or less of the average number of transfer particles.

  Examples of a method for transferring and fixing using a resin adhesive layer include the following methods.

  The temperature for transferring and fixing is preferably in the range of 30 ° C. to 200 ° C., more preferably 50 ° C. to 150 ° C.

  For the adhesive forming the adhesive layer, a curable resin can be used. For example, a thermosetting resin, a photocurable resin, a light and thermosetting resin, and an electron beam curable resin can be used. In view of ease of handling, it is preferable to use a thermosetting insulating resin. As the thermosetting resin, an epoxy resin, an acrylic resin, a phenol resin, a polyimide resin or the like can be used, and an epoxy resin is particularly preferable.

  The epoxy resin is a compound having two or more epoxy groups in one molecule, and is preferably a compound having a glycidyl ether group, a glycidyl ester group or an alicyclic epoxy group, or a compound obtained by epoxidizing a double bond in the molecule. . Specifically, bisphenol A type epoxy resin, bisphenol F type epoxy resin, naphthalene type epoxy resin, novolac phenol type epoxy resin, or modified epoxy resins thereof can be used.

  In the adhesive forming the adhesive layer, a thermoplastic resin or the like may be blended in addition to the curing agent and the curable insulating resin. By blending a thermoplastic resin, it can be easily formed into a sheet. In this case, the blending amount is preferably 100 parts by mass or less, particularly preferably 10 parts by mass or less, based on 100 parts by mass of the components including the curing agent and the curable insulating resin.

  When brazing, use a metal brazing composition containing a mixture of these metals alloyed with silver, nickel, zinc, lead, copper, tin, and other metals such as phosphorus, cadmium, vanadium, etc. I can do it. In particular, when diamond is used as the abrasive grains, it is preferable to add a metal selected from titanium, tantalum, chromium and zirconium to the brazing composition. These metals are preferred because they can react with carbon to form carbides and thereby improve the wettability of the brazing composition. It is also possible to use a joining material such as a resinous brazing composition filled with a metal that is mostly metal.

  The present invention also relates to a precision grinding tool in which abrasive grains are transferred by an abrasive grain transfer sheet.

  The material of the supporting base material constituting the precision grinding tool of the present invention may be an organic substrate, an inorganic substrate, or a metal base material. Organic base materials include polyimide film base material, polyamide film base material, polyethersulfone film base material, rigid base material in which glass cloth is impregnated with epoxy resin, and rigid base in which glass cloth is impregnated with bismaleimide-triazine resin. A material etc. can be used. As the inorganic base material, a single base material such as silica, glass, alumina, aluminum nitride, zirconia oxide, or a sintered body containing them as a main component can be used. When using diamond as abrasive grains, it is preferable that the Young's modulus is 190 GPa or more and the Vickers hardness is 9 GPa or more. When the Young's modulus is higher than 190 GPa, deformation due to a mechanical load at the time of use is small, which is preferable. When the Vickers hardness is higher than 9 GPa, it is preferable that the abrasive grains hardly bite into the substrate.

  Applications of the precision grinding tool to which the abrasive particle transfer sheet of the present invention is applied include grinding and polishing of semiconductor wafers, display substrates related to liquid crystal display devices, display substrates related to plasma display devices, and display devices such as electroluminescence display devices. The display substrate can be suitably used for grinding, polishing and use.

  Next, the present invention will be described with reference to examples and comparative examples.

[Example 1]
Diamond coated with a nitrile rubber latex-methyl methacrylate graft copolymer adhesive having a thickness of 4 μm on an unstretched polypropylene film having a thickness of 100 μm, and an average particle diameter of 3.0 μm as abrasive grains Particles (Mohs hardness = 10, major axis / minor axis = 1.1) (A laser microscope was used to measure the major axis and minor axis of any 30 abrasive grains and calculate the major axis / minor axis from the average value thereof. )) Was applied in a single layer with almost no gap. That is, prepare the diamond particles spread in a container larger than the film width so as to have a thickness of several layers or more, and attach the adhesive to the abrasive particles by pressing the adhesive surface downward. Thereafter, excess particles were scraped off with a scrubber made of soft rubber.

  By repeating this operation twice, an abrasive grain adhesion film coated with a single layer without a gap was obtained.

  This film was fixed using 10 chucks in the vertical and horizontal directions using a biaxial stretching device (X6H-S, Toyo Seiki X6H-S, pantograph type corner stretching type biaxial stretching device) and preheated at 135 ° C. for 120 seconds. Thereafter, the film was stretched and fixed by 200% at a speed of 10% / second. Then, it fixed using the 15-cm square glass plate (thickness 7mm) which apply | coated the adhesive agent to 1 cm of outer periphery, and obtained the abrasive grain transfer sheet.

  Of the diamond particles of the obtained abrasive grain transfer sheet, 100 particles were randomly selected and observed using a laser microscope (VK9500, manufactured by Keyence Corporation, shape measurement resolution 0.01 μm). 0.3 μm, which was 4.1 times the average particle size.

When the thickness of the adhesive layer was measured with a stylus type film thickness meter, it was 1 μm, which was 0.33 times the average particle diameter of the abrasive grains.
[Example 2]
The same nitrile rubber latex-methyl methacrylate graft copolymer adhesive as in Example 1 was applied to a thickness of 18 μm on an unstretched polypropylene film having a thickness of 100 μm, and an average particle size of 5.0 μm as abrasive particles. An abrasive particle-adhered film was obtained in which diamond particles (Mohs' hardness = 10, major axis / minor axis = 1.2) were applied in a single layer with substantially no gap in the same manner as in Example 1.

  This film was stretched and fixed 500% in the longitudinal and lateral directions using a biaxial stretching apparatus in the same manner as in Example 1. Then, it fixed to the acrylic board (square, 15 cm square, thickness 5mm) which apply | coated the adhesive agent to 1 cm of outer periphery, and obtained the abrasive grain transfer sheet.

  As a result of selecting 100 particles randomly from the abrasive particles of the obtained abrasive particle transfer sheet and using a laser microscope (Keyence Corporation, VK9500, shape measurement resolution 0.01 μm), the average particle spacing is It was 36.2 μm, which was 7.24 times the average particle size.

When the thickness of the adhesive layer was measured with a stylus type film thickness meter, it was 0.7 μm, which was 0.14 times the average particle diameter of the abrasive grains.
[Example 3]
The same nitrile rubber latex-methyl methacrylate graft copolymer adhesive as in Example 1 was applied to a thickness of 4 μm on an unstretched polypropylene film having a thickness of 100 μm. An abrasive particle-adhered film was obtained in which diamond particles (Mohs' hardness = 10, major axis / minor axis = 1.2) were applied in a single layer with substantially no gap in the same manner as in Example 1.

  This film was fixed by stretching 50% in the longitudinal and lateral directions using a biaxial stretching apparatus in the same manner as in Example 1. Then, it fixed to the acrylic board (square, 15 cm square, thickness 5mm) which apply | coated the adhesive agent to 1 cm of outer periphery, and obtained the abrasive grain transfer sheet.

  As a result of selecting 100 particles randomly from the abrasive particles of the obtained abrasive particle transfer sheet and using a laser microscope (Keyence Corporation, VK9500, shape measurement resolution 0.01 μm), the average particle spacing is It was 15.3 μm, which was 3.06 times the average particle size.

  When the thickness of the adhesive layer was measured with a stylus type film thickness meter, it was 1.78 μm, which was 0.35 times the average particle diameter of the abrasive grains.

[Comparative Example 1]
50 g of bisphenol A type epoxy resin (epoxy equivalent 240, semi-solid), 50 g of bisphenol A type epoxy resin (epoxy equivalent 220, viscosity at 25 ° C., 14000 mPa · S), 4 g of dicyandiamide (1 μm pulverized product), 2-ethyl-4-methyl -Dissolve 0.2 g of imidazole in methyl ethyl ketone to make a 40% solid content solution. 5 g of diamond particles having an average particle diameter of 5.0 μm were added to this solution, and the mixture was stirred and mixed with a stirring blade (200 rpm, 5 minutes) to obtain an abrasive particle dispersion. This liquid is applied onto a zirconia oxide substrate having a diameter of 140 mm and a thickness of 2 mm, and is blown and dried at 120 ° C. for 30 minutes. Obtained.

A precision grinding tool is prepared using the abrasive particle transfer sheet of the example and the test result of grinding is described below. First, test methods and the like are shown below.
(Preparation of substrate with adhesive layer)
50 g of bisphenol A type epoxy resin (epoxy equivalent 240, semi-solid), 50 g of bisphenol A type epoxy resin (epoxy equivalent 220, viscosity at 25 ° C., 14000 mPa · S), 4 g of dicyandiamide (1 μm pulverized product), 2-ethyl-4-methyl -Dissolve 0.2 g of imidazole in methyl ethyl ketone to give a solid content solution of 30% by mass.

The adhesive solution was applied onto a zirconia oxide substrate having a diameter of 140 mm and a thickness of 2 mm, and air-dried at 120 ° C. for 30 minutes to obtain a zirconia oxide support with an adhesive layer having a thickness of 2 μm.
(Precision grinding tool manufacturing method)
The abrasive grain transfer sheets obtained in Examples 1 to 3 were subjected to pressure and heat treatment at 60 ° C. for 60 seconds on the adhesive layer surface of the support. Thereafter, the abrasive grain transfer sheet is removed, and a support on which the abrasive grains are transferred is prepared. Thereafter, it is heated and cured in an oven at 200 ° C. for 120 minutes to produce a precision grinding tool.
(Precision grinding test method)
A precision grinding tool is fixed to a rotating grinding table, rotated at 240 rpm, and a 15 mm square, 5 mm thick alkali-free glass test piece is brought into contact with the outer periphery while rotating at 30 rpm for 3 minutes while applying a load of 300 g. Grind. The glass specimen is observed on the entire surface with a differential interference microscope (Nikon, ECLIPSE, LV150, 20 times), and the number of scratches is evaluated. The case where the number of generated scratches is 5 or less is indicated as ◯, the case where 5 to 10 scratches are generated is indicated as Δ, and the case where 11 or more are generated is indicated as ×.

  The results are shown in Table 1. As is apparent from Table 1, the abrasive particle transfer sheet of the present invention shows that a very excellent precision grinding tool can be produced.

  In Table 1, Comparative Example 1 could not be precisely ground because it did not maintain an appropriate abrasive grain spacing and had a large variation in abrasive grain density.

  The abrasive particle transfer sheet of the present invention is suitable for the production of a precision grinding tool, and the precision grinding tool exhibits low scratch generation, good removal of polishing debris, and precision grindability, and requires precision grinding. It is suitable as a precision grinding tool for semiconductor material processing and a precision grinding tool such as a high-definition display device.

Claims (8)

  A biaxially stretchable film is used as a support, and an adhesive layer is formed on the biaxially stretchable film to form a laminate, and abrasive particles are adhered to the surface of the adhesive layer of the laminate. Step of producing a grain-particle-adhered film, the abrasive grain-adhered film is biaxial so that the average particle spacing between adjacent abrasive grains is 0.5 to 10 times the average particle diameter of the abrasive grains A method for producing an abrasive grain transfer sheet, comprising a step of stretching and holding.   An abrasive grain transfer sheet for transferring abrasive grains to a grinding surface of a grinding tool, produced by the method according to claim 1.   The abrasive particle transfer sheet according to claim 2, wherein the thickness of the adhesive layer in the abrasive particle transfer sheet is in the range of 0.05 to 0.7 times the average particle size of the abrasive particles.   The abrasive particle transfer sheet according to claim 2 or 3, wherein the average particle size of the abrasive particles is 1 µm to 250 µm.   The abrasive grain transfer sheet according to any one of claims 2 to 4, wherein a major axis / minor axis of the abrasive grains is in a range of 1.0 to 1.5.   6. The abrasive grain according to claim 2, wherein the abrasive grain is in the range of Mohs hardness of 5 to 10, and is at least one kind of abrasive grain selected from the group consisting of diamond, metal oxide, and carbide. The abrasive grain transfer sheet according to any one of the above.   The abrasive grain transfer sheet produced by the method for producing an abrasive grain transfer sheet according to claim 1 is brought into close contact with the grinding surface of the support plate to transfer the abrasive grains, and then the abrasive grains are placed on the support plate. A method of manufacturing a precision grinding tool characterized by fixing.   The precision grinding tool manufactured by the manufacturing method of the precision grinding tool of Claim 7.