JP2008159915A - Thin film transistor manufacturing method - Google Patents

Abstract

A thin-film transistor manufacturing method capable of stably flowing a large current and suppressing a leakage current by avoiding the configuration of a U-shaped electrode TFT.
An a-Si layer (2A) includes a removal region (8) between the inner side of a U-shaped electrode portion (6) of a source electrode (3) and the distal end portion of a parallel electrode limb of the drain electrode (4), A removal region 9 between the inside of the electrode portion 7 and the tip of the parallel electrode limb of the source electrode 3, and a channel region 5 A including the parallel electrode limb of each electrode 3, 4, and at least each electrode 3, 4 and the gate electrode 1 are formed in a region where they overlap in a plane. The removal regions 8 and 9 are formed after the source electrode 3 and the drain electrode 4 are formed.
[Selection] Figure 1

Description

  The present invention relates to a method of manufacturing a thin-film transistor (TFT) having a comb-like source electrode and a drain electrode (first and second electrodes) for supplying a large current, and is particularly arranged in a cross arrangement. In addition, the present invention relates to a method of manufacturing a thin film transistor in which a leakage current in a comb tooth root coupling portion of the first and second electrodes is suppressed.

  Conventionally, in a thin film transistor for supplying a large current used for a display device driving circuit for supplying power to a large-screen liquid crystal display device, for example, the distance between the source and drain electrodes (that is, the channel length) is shortened, and both A comb-like source electrode and drain electrode are applied for the purpose of increasing the length of the opposing portion of the electrode (that is, the channel width) (see, for example, Patent Document 1).

  FIG. 6 is a plan view schematically showing a conventional thin film transistor disclosed in Patent Document 1. In FIG. In FIG. 6, a thin film transistor (TFT) includes a gate electrode 1, a semiconductor layer made of an amorphous silicon layer (hereinafter referred to as “a-Si layer”) 2, a comb-like source electrode 3 and a drain electrode 4 (whichever One of which corresponds to the first electrode and the other corresponds to the second electrode).

Although not recognized in the plan view of FIG. 6, an ohmic contact layer is provided between the source electrode 3 and the drain electrode 4 and the a-Si layer 2 (corresponding to an intrinsic semiconductor layer, i.a-Si layer described later). (Corresponding to a low-resistance semiconductor layer made of an n ⁺ -type a-Si layer) is interposed. As a result, a thin film transistor using an amorphous silicon semiconductor exhibits a good n-ch operation.
Here, in order to avoid complication of the drawings, illustration of an insulating substrate (glass substrate) on which the gate electrode 1 is formed and a gate insulating film covering the upper surface of the gate electrode 1 is omitted.
Furthermore, although the numbers of the parallel electrode limbs of the comb-like source electrode 3 and drain electrode 4 are two and three, respectively, any number can be set as necessary. The number of parallel electrode limbs of the source electrode 3 and the drain electrode 4 is not limited to the case where both electrodes have a comb-teeth shape. May have two comb-like parallel electrode limbs.

The gate electrode 1 is formed on the insulating substrate, and the gate insulating film is formed on the insulating substrate so as to cover the gate electrode 1.
The a-Si layer (intrinsic semiconductor layer) 2 is formed on an insulating substrate via a gate insulating film, and the comb-like source electrode 3 and drain electrode 4 form a channel region 5 of the TFT between both electrodes. Thus, the a-Si layer 2 is disposed so as to face each other.

The source electrode 3 has one U-shaped electrode portion 6 sharing one piece and two parallel electrode limbs extending from the U-shaped electrode portion 6 into the channel region 5.
The drain electrode 4 has two U-shaped electrode portions 7 sharing one piece, and three parallel electrode limbs extending from the U-shaped electrode portion 7 into the channel region 5.

  Here, the U-shaped electrode portions 6 and 7 correspond to comb tooth root connecting portions that connect comb-shaped parallel electrode limbs at the root. And the shape of this comb-tooth root connection part is not limited to U shape, For example, it is also possible to comprise in other shapes, such as U shape.

  The parallel electrode limbs of the source electrode 3 and the drain electrode 4 face each other in parallel, and constitute a parallel counter electrode TFT in the channel region 5 of the TFT.

Further, in this case, between the U-shaped electrode portions 6 and 7 of the source electrode 3 and the drain electrode 4 and the distal ends of the parallel electrode limbs located in the U-shaped electrode portions 6 and 7, A U-shaped electrode TFT is formed in the channel region of the TFT.
That is, as shown in FIG. 6, the TFT characteristics using the comb-like source electrode 3 and drain electrode 4 described in Patent Document 1 are four “parallel counter electrode TFTs” and three “U-shaped electrode TFTs”. Can be thought of as a combination of parallel connected TFT characteristics.

By the way, normally, in a liquid crystal display device, in order to charge and discharge a capacitor corresponding to each pixel, it is necessary to pass a current in both directions between the source electrode 3 and the drain electrode 4, and the source electrode 3 and the drain electrode 4. The polarity relationship with is reversed as necessary.
At this time, the mutual relationship between the two electrodes is almost the same in any polarity in the parallel counter electrode TFT, but in the U-shaped electrode TFT, the mutual relationship between the two electrodes differs depending on the polarity.

Further, in the U-shaped electrode TFT, when the gate voltage applied to the gate electrode 1 is minus Vgs (negative gate voltage), it is recognized that the drain current Ids is increased by the hole carriers formed in the channel region. It is done.
That is, in the TFT using the comb-like electrode, the drain current Ids increases in the minus Vgs region due to the relative contribution ratio of the U-shaped electrode TFT portion.

JP 2004-356646 A

In the conventional thin film transistor, not only the parallel counter electrode TFT by the parallel electrode limbs of the source electrode 3 and the drain electrode 4 but also the U-shaped electrode TFT in each of the U-shaped electrode portions 6 and 7 of the source electrode 3 and the drain electrode 4. Since the Ids (drain current) increases at minus Vgs (gate voltage) in the U-shaped electrode TFT, there is a problem that the Ids on / off ratio (Ion / Ioff) indicating the switching performance decreases. It was.
In particular, when this type of thin film transistor is used in a driving circuit for a display device, an increase in Ids leads to an outflow (leakage) of charge accumulated in a capacitor connected to the driving circuit. There was a problem that the potential could not be maintained (that is, the display screen was hindered).

  The present invention has been made to solve the above-described problems, and completely removes without leaving the a-Si layer in the comb tooth root coupling portion (for example, the U-shaped electrode portions 6 and 7). A thin film transistor that is configured not to operate as a TFT and that can prevent a configuration of a TFT (for example, a U-shaped electrode TFT) at a comb tooth root coupling portion, allows a large current to flow stably and suppresses a leakage current. It aims at obtaining a manufacturing method.

  A thin film transistor according to the present invention includes a gate electrode formed on an insulating substrate, an intrinsic semiconductor layer disposed on the gate electrode via a gate insulating film, and a low resistance semiconductor layer disposed on the intrinsic semiconductor layer. A thin film transistor having a first electrode and a second electrode to be a source electrode and a drain electrode is formed, and a channel region of the thin film transistor has parallel electrode limbs in which the source electrode and the drain electrode are arranged to face each other, and the first electrode Has one comb root joint that shares one piece, and two comb-like parallel electrode limbs extending from the one comb root joint into the channel region, The electrode has one parallel electrode limb extending into the channel region, and the intrinsic semiconductor layer and the low-resistance semiconductor layer are formed on the inner side of the comb root joint of the first electrode and the parallel electrode of the second electrode. Tip of the limb A channel region including the parallel electrode limbs of the first and second electrodes, and a region where at least the first and second electrodes and the gate electrode overlap in a plane. The method of manufacturing the thin film transistor according to claim 1, wherein the removal region is formed after the first and second electrodes are formed.

  The thin film transistor according to the present invention includes a gate electrode formed on an insulating substrate, an intrinsic semiconductor layer disposed on the gate electrode via a gate insulating film, and a low resistance semiconductor layer on the intrinsic semiconductor layer. A thin film transistor having a first electrode and a second electrode to be a source electrode and a drain electrode is formed, and a channel region of the thin film transistor has comb-like parallel electrode limbs in which the source electrode and the drain electrode are arranged to face each other. The first electrode includes M (M is a natural number) comb root joints sharing one piece, and M + 1 parallel electrode limbs extending from the M comb root joints into the channel region. The second electrode has M + 1 comb root joints sharing one piece, and M + 2 parallel electrode limbs extending from the M + 1 comb root joints into the channel region. The intrinsic semiconductor layer and the low-resistance semiconductor layer include a removal region between the inner side of the comb tooth root coupling portion of the first electrode and the tip end portion of the parallel electrode limb of the second electrode, and the comb tooth of the second electrode. A channel region that is completely removed in the removal region between the inside of the root connection and the tip of the parallel electrode limb of the first electrode, and includes at least a first channel region including each parallel electrode limb of the first and second electrodes; A method of manufacturing a thin film transistor formed in a region where the first and second electrodes and the gate electrode overlap in a planar manner, wherein the removal region is formed after the first and second electrodes are formed.

  According to the present invention, after the source electrode and the drain electrode are formed, the removal region corresponding to the comb tooth root connection portion is formed, thereby completely removing the intrinsic semiconductor layer and the low resistance semiconductor layer in the comb tooth root connection portion. Thus, it is possible to obtain a thin film transistor manufacturing method in which a large current is allowed to flow stably and leakage current is suppressed.

Embodiment 1 FIG.
Hereinafter, a thin film transistor and a manufacturing method thereof according to Embodiment 1 of the present invention will be described in detail with reference to the drawings.
Here, as described above, a case where an a-Si layer (amorphous silicon layer) is used as a semiconductor layer will be described as an example.
Moreover, as a shape of the comb-tooth root connection part which connects a comb-tooth-shaped parallel electrode limb with a root, in FIG. 1, the U-shaped thing is shown as an example, and in FIG. It is shown as an example.

FIG. 1 is a plan view schematically showing a thin film transistor according to Embodiment 1 of the present invention. Components similar to those described above (see FIG. 6) are denoted by the same reference numerals as those described above or after the reference numerals. A detailed description is omitted with “A”.
Also in FIG. 1, in order to avoid complication, illustration of an insulating substrate and a gate insulating film (described later with reference to FIG. 2) is omitted. Similarly to the above, the first electrode is the source electrode 3 and the second electrode is the drain electrode 4. However, the present invention is not limited to this, and the first electrode is the drain electrode 4, and the second electrode These electrodes may be used as the source electrode 3.

In FIG. 1, the a-Si layer 2 </ b> A is completely removed in the removal region 8 between the inside of the U-shaped electrode portion 6 of the source electrode 3 and the tip of the parallel electrode limb of the drain electrode 4. . Similarly, the a-Si layer 2 </ b> A is completely removed in the removal region 9 between the inside of the U-shaped electrode portion 7 of the drain electrode 4 and the tip of the parallel electrode limb of the source electrode 3.
The removal regions 8 and 9 are set to an area of a required size (for example, about 1 μm × 1 μm) or more so that a TFT structure is not formed in the U-shaped electrode portions 6 and 7.

That is, the a-Si layer 2A is formed in a channel region 5A including the parallel electrode limbs of the source electrode 3 and the drain electrode 4, and at least a region where the source electrode 3, the drain electrode 4 and the gate electrode 1 overlap in a plane. Has been.
As a result, the TFT structure is not formed in the U-shaped electrode portions 6 and 7.

  FIG. 2 is a cross-sectional view showing the thin film transistor according to the first embodiment of the present invention, and schematically shows the relationship between the peripheral edge of gate electrode 1 and source electrode 3 and drain electrode 4. The thin film transistor in FIG. 2 has one comb-tooth root connection portion having a U-shaped electrode shape, and has two source electrodes 3 having two comb-like parallel electrode limbs and two parallel electrodes of the source electrode 3. It is a figure for demonstrating the cross-sectional structure of the removal area | region 8 as an example when the drain electrode 4 which has one parallel electrode limb extended between the limbs is provided.

  In the following description, a method for manufacturing the removal region 8 in the configuration of FIG. 2 will be described in detail. However, the first and second electrodes both have a comb-teeth shape as shown in FIG. A similar manufacturing method can be applied.

In FIG. 2, the thin film transistor includes a glass substrate (insulating substrate) 10, a gate electrode 1 formed on the glass substrate 10, a gate insulating film 11 formed on the glass substrate 10 so as to cover the gate electrode 1, An a-Si layer 2A formed on the gate electrode 1 via a gate insulating film 11, and an n ⁺ a-Si ohmic contact layer 12 formed on a contact surface between the a-Si layer 2A and each of the electrodes 3 and 4 And a source electrode 3 and a drain electrode 4 which are arranged opposite to each other on the a-Si layer 2A through the ohmic contact layer 12 and form a channel region 5A between the two electrodes.

  Next, a method for manufacturing the thin film transistor shown in FIG. 2 will be described with reference to the drawings. 3A to 3D are plan views showing a manufacturing process using the five masks of the thin film transistor shown in FIG. On the other hand, FIGS. 4A to 4 are plan views showing a manufacturing process using four masks of the thin film transistor shown in FIG. 2, and correspond to the manufacturing method of the present invention. In FIGS. 3A to 3D and FIGS. 4A to 4D, illustration of the insulating substrate and the gate insulating film is omitted to avoid complication.

  First, in FIG. 3A, the gate electrode 1 is formed on a glass substrate (not shown). Thereafter, a gate insulating film 11 made of SiO 2 is formed on the glass substrate by, for example, P (plasma) -CVD method so as to cover at least the upper surface of the gate electrode 1 (not shown).

Subsequently, in FIG. 3B, the i (intrinsic) a-Si layer 2A is formed on the gate insulating film 11 of the gate electrode 1 by the P-CVD method, and at the same time, the a-Si layer 2A is continuously formed. An ohmic contact layer 12 made of an n ⁺ a-Si layer is formed on the upper surface. Further, an island made of the a-Si layer 2A and the ohmic contact layer 12 patterned as shown in FIG. 3B is formed by photolithography and dry etching.
At this time, the island made of the a-Si layer 2A and the ohmic contact layer 12 is not formed in the removed region 8, and the gate insulating film 11 is exposed.

  Next, in FIG. 3C, electrode materials of the source electrode 3 and the drain electrode 4 are formed on the ohmic contact layer 12 by sputtering, and patterned by photolithography + etching as shown in FIG. 3C. A source electrode 3 and a drain electrode 4 are formed.

Finally, in FIG. 3D, the ohmic contact layer (n ⁺ a-Si layer) 12 is completely removed by dry etching, leaving only the lower portions of the source electrode 3 and the drain electrode 4.
As a result, as shown in FIG. 1 above, the a-Si layer 2A is left only in the parallel counter electrode TFT region, and in the removal region 8 of the U-shaped electrode portion (TFT region in the comb root connection portion), A TFT structure from which the a-Si layer 2A is removed can be realized. Thereby, only the parallel counter electrode TFT is formed, and the TFT of the U-shaped electrode portion is not formed.

  Although a detailed description is omitted, in order to stabilize the thin film transistor, a SiN protective film layer, for example, by a P-CVD method is laminated. Finally, in order to form a gate electrode terminal (for connection) and a source / drain electrode terminal (for connection) of the transistor, contact holes are formed in the gate insulating layer and the protective film layer by lithography and etching.

  However, in such a process using five masks, the exposed portion of the gate insulating film 11 corresponding to the removal region 8 as shown in FIG. 3B is formed on the source electrode 3 and the drain electrode 4 as shown in FIG. 3C. It is necessary to make it in advance. Therefore, an alignment margin between the island formed of the a-Si layer 2A and the ohmic contact layer 12 shown in FIG. 3B and the source electrode 3 and the drain electrode 4 shown in FIG. 3C is required.

  As a result of requiring such an alignment margin, as shown in FIG. 3D, the a-Si layer 2A remains slightly around the portion where the gate insulating film 11 corresponding to the removal region 8 is exposed.

  Therefore, the process for completely removing the a-Si layer 2A in the removal region 8 is the four-mask process shown in FIGS. 4A to 4D. In such a process using four masks, the removal region 8 can be formed after the formation of the source electrode 3 and the drain electrode 4, and the above-described problems in the five mask process can be solved.

The procedure of such a four-mask process will be described in order based on FIGS. 4A to 4D.
First, in FIG. 4A, a gate electrode 1 is formed on a glass substrate (not shown). Thereafter, a gate insulating film 11 made of SiO 2 is formed on the glass substrate by, for example, P (plasma) -CVD method so as to cover at least the upper surface of the gate electrode 1 (not shown).

Subsequently, in FIG. 4B, the i (intrinsic) a-Si layer 2A is formed on the gate insulating film 11 of the gate electrode 1 by the P-CVD method, and at the same time, the a-Si layer 2A is continuously formed. An ohmic contact layer 12 made of an n ⁺ a-Si layer is formed on the upper surface. Further, the electrode material of the source electrode 3 and the drain electrode 4 is formed on the ohmic contact layer 12 by sputtering.

  Thereafter, the source electrode 3 and the drain electrode 4 patterned as shown in FIG. 4B are formed by photolithography + etching. Here, FIG. 4B is characterized in that a thin resist 13 is formed in a portion where the parallel counter electrode TFT between the source electrode 3 and the drain electrode 4 is formed by using a halftone photolithography technique. It is said.

  Next, in FIG. 4C, the a-Si layer 2A and the ohmic contact layer 12 other than the thin resist 13 are removed by dry etching. As a result, in the removed region 8, an island made of the a-Si layer 2 </ b> A and the ohmic contact layer 12 is not formed, and the gate insulating film 11 is exposed, and the removed region 8 is formed.

Finally, in FIG. 4D, the ohmic contact layer (n ⁺ a-Si layer) 12 in the thin resist 13 portion between the source electrode 3 and the drain electrode 4 is completely removed by dry etching.

  As a result, as shown in FIG. 1 above, the a-Si layer 2A is left only in the parallel counter electrode TFT region, and in the removal region 8 of the U-shaped electrode portion (TFT region in the comb root connection portion), A TFT structure from which the a-Si layer 2A is removed can be realized. Thereby, only the parallel counter electrode TFT is formed, and the TFT of the U-shaped electrode portion is not formed.

  Furthermore, the alignment margin in the 5-mask process described with reference to FIGS. 3A to 3D is not required, and the a-Si layer 2A and the ohmic contact layer 12 can be completely removed from the removal region 8.

FIG. 5 is a characteristic diagram showing the relationship between the gate voltage Vgs and the drain current Ids according to the first embodiment of the present invention, and shows the Ids drastically reducing effect in the minus Vgs region.
In FIG. 5, the broken line is a characteristic curve by a conventional thin film transistor (see FIG. 6), and the solid line is a characteristic curve by a thin film transistor according to Embodiment 1 (see FIG. 1) of the present invention. A one-dot chain line is a characteristic curve of a thin film transistor having an arcuate electrode.

  As is apparent from FIG. 5, in the conventional characteristic (broken line), the drain current Ids is remarkably increased in the minus Vgs region, but according to the first embodiment (solid line) of the present invention, the drain in the minus Vgs region. The current Ids can be reduced to the characteristic level of only the parallel counter electrode TFT.

  In the above-described embodiment, the removal region 8 in FIG. 1 has been described. However, the same manufacturing method can be applied to the removal region 9, and the description thereof is omitted.

  As described above, in the manufacturing method in which the removal regions 8 and 9 are formed after the source electrode 3 and the drain electrode 4 are formed in the comb-shaped a-Si • TFT capable of handling a large current, the tip of the drain electrode 4 is formed. From the removal region 8 sandwiched between the source electrode 3 and the comb root connection portion of the source electrode 3, and the removal region 9 sandwiched between the tip portion of the source electrode 3 and the comb root connection portion of the drain electrode 4. The Si layer 2A can be completely removed. As a result, the instability factor of increasing Ids can be avoided, and a stable low leakage current TFT structure can be realized.

  Further, when the removal region is not provided as in the present invention, the distance between the electrodes in the TFT region in the comb root connection portion is made constant by making the shape of the comb root connection portion U-shaped. I was able to. However, when the removal region as in the present invention is provided, since the TFT is not configured in the comb root connection portion, the same performance can be obtained even if the shape of the comb root connection portion is a shape other than the U shape. This increases the degree of freedom in design.

Although not shown in the cross-sectional view of FIG. 2, the peripheral end portion of the gate electrode 1 has a stepped portion. As a result, on the gate electrode 1, the a-Si layer 2 </ b> A is always left immediately below the source electrode 3 and the drain electrode 4 and around the electrodes 3 and 4.
As a result, the a-Si layer 2A is left in the intersecting region between the stepped portion at the peripheral edge of the gate electrode 1 and the source electrode 3 and the drain electrode 4, so that it occurs after the yield during manufacturing of the thin film transistor and the long time operation. Image quality defects can be improved.
That is, a step is formed in the gate insulating film 11 in accordance with the stepped portion. Therefore, in the stepped portion of the gate insulating film 11, insulation caused by minute dust or dirt that cannot be removed even in the cleaning process before forming the insulating film. Inhomogeneity of the film occurs. In addition, cracks are likely to occur in the insulating film due to thermal shock or deterioration with time during the process. However, by interposing the a-Si layer 2A, which is a semiconductor, it is possible to avoid a short circuit between the upper electrode and the gate electrode 1 and a leak.

In the first embodiment, the glass substrate 10 is used as the insulating substrate, but another insulating substrate may be used.
Further, although the a-Si (amorphous silicon) layer 2A is used as the semiconductor layer, an organic semiconductor layer or the like may be used, for example.

In the above-described embodiment, the thin film transistor is described with attention paid to the thin film transistor. However, the thin film transistor manufactured by the above-described method may be applied to a display device and a display device driving circuit.
In this case, for example, the leakage current of the drive TFT of the drive circuit integrally formed to drive the liquid crystal display device can be reduced, and a TFT-LCD drive circuit using a-Si-TFT (gate drive circuit or The charge retention characteristics of the data driving circuit) can be improved.

Similarly, when applied to an O (organic) LED (Light-Emitting-Diode) device, the charge retention characteristics of an OLED drive circuit using an a-Si-TFT can be improved.
Further, the thin film transistor may be used in any circuit portion of the display device, or may be used in a pixel portion where a large current is not required.

1 is a plan view schematically showing a thin film transistor according to Embodiment 1 of the present invention. It is sectional drawing which shows the thin-film transistor of FIG. 1 based on Embodiment 1 of this invention. FIG. 3 is a plan view showing a manufacturing process using a five mask of the thin film transistor shown in FIGS. 1 and 2. FIG. 3 is a plan view showing a manufacturing process using a five mask of the thin film transistor shown in FIGS. 1 and 2. FIG. 3 is a plan view showing a manufacturing process using a five mask of the thin film transistor shown in FIGS. 1 and 2. FIG. 3 is a plan view showing a manufacturing process using a five mask of the thin film transistor shown in FIGS. 1 and 2. It is a top view which shows the manufacturing process by 4 masks of the thin-film transistor shown in FIG.1 and FIG.2 which concerns on Embodiment 1 of this invention. It is a top view which shows the manufacturing process by 4 masks of the thin-film transistor shown in FIG.1 and FIG.2 which concerns on Embodiment 1 of this invention. It is a top view which shows the manufacturing process by 4 masks of the thin-film transistor shown in FIG.1 and FIG.2 which concerns on Embodiment 1 of this invention. It is a top view which shows the manufacturing process by 4 masks of the thin-film transistor shown in FIG.1 and FIG.2 which concerns on Embodiment 1 of this invention. It is a characteristic view which shows the relationship between the gate voltage Vgs and drain current Ids by Embodiment 1 of this invention. It is a top view which shows the conventional thin-film transistor typically.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Gate electrode, 2A a-Si layer (amorphous silicon layer, intrinsic semiconductor layer, i * a-Si layer), 3, Source electrode (1st electrode or 2nd electrode), 4 Drain electrode (1st electrode) Or second electrode), 5A channel region (parallel counter electrode TFT region), 6, 7 U-shaped electrode part (comb root connection part), 8, 9 removal area, 10 glass substrate (insulating substrate), 11 gate Insulating layer, 12 ohmic contact layer (low-resistance semiconductor layer, n ⁺ a-Si layer), 13 thin resist.

Claims (3)

A gate electrode formed on an insulating substrate; an intrinsic semiconductor layer disposed on the gate electrode via a gate insulating film; and a source electrode and a drain electrode disposed on the intrinsic semiconductor layer via a low-resistance semiconductor layer A thin film transistor having first and second electrodes is formed,
The channel region of the thin film transistor has parallel electrode limbs in which the source electrode and the drain electrode are arranged to face each other,
The first electrode includes one comb root connecting portion sharing one piece, and two comb-like parallel electrode limbs extending from the one comb root connecting portion into the channel region. Have
The second electrode has one parallel electrode limb extending into the channel region;
The intrinsic semiconductor layer and the low-resistance semiconductor layer are:
Completely removed in the removal region between the inner side of the comb root joint of the first electrode and the tip of the parallel electrode limb of the second electrode;
In the method of manufacturing a thin film transistor, the channel region including the parallel electrode limbs of the first and second electrodes, and a region where at least the first and second electrodes and the gate electrode overlap in a plane are formed. There,
A method of manufacturing a thin film transistor, wherein the removal region is formed after forming the first and second electrodes. A gate electrode formed on an insulating substrate; an intrinsic semiconductor layer disposed on the gate electrode via a gate insulating film; and a source electrode and a drain electrode disposed on the intrinsic semiconductor layer via a low-resistance semiconductor layer A thin film transistor having first and second electrodes is formed,
The channel region of the thin film transistor has comb-like parallel electrode limbs in which the source electrode and the drain electrode are arranged to face each other,
The first electrode includes M (M is a natural number) comb root joints sharing one piece, and M + 1 parallel electrode limbs extending from the M comb root joints into the channel region. And
The second electrode includes M + 1 comb root joints that share one piece, and M + 2 parallel electrode limbs extending from the M + 1 comb root joints into the channel region,
The intrinsic semiconductor layer and the low-resistance semiconductor layer are:
A removal region between the inner side of the comb root joint of the first electrode and the tip of the parallel electrode limb of the second electrode, the inner side of the comb root joint of the second electrode, and the first Completely removed in the removal region between the tip of the parallel electrode limb of one electrode,
In the method of manufacturing a thin film transistor, the channel region including the parallel electrode limbs of the first and second electrodes, and a region where at least the first and second electrodes and the gate electrode overlap in a plane are formed. There,
A method of manufacturing a thin film transistor, wherein the removal region is formed after forming the first and second electrodes. In the manufacturing method of the thin-film transistor of Claim 1 or 2,
Forming a gate insulating film covering an upper surface of the gate electrode after forming the gate electrode on the insulating substrate;
Sequentially forming the intrinsic semiconductor layer and the low-resistance semiconductor layer on the gate insulating film;
Depositing an electrode material of the source electrode and the drain electrode on the low-resistance semiconductor layer; and
Applying a halftone mask to a parallel counter electrode portion between the source electrode and the drain electrode, and etching the source electrode and the drain electrode; and
Removing the intrinsic semiconductor layer and the low-resistance semiconductor layer from the removal region;
A step of removing the low-resistance semiconductor layer in the parallel counter electrode portion.

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