JP2007313814A - Mold, and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mold with which a complicated pattern shape can easily be fabricated by a less number of steps, and in addition, the heights in the unevenness of which are uniform, and to provide its manufacturing method. <P>SOLUTION: This mold 1 has a structure for which a protrusion-form resist pattern 5 is formed on one surface of a board 3. On the surface of the board 3, a resist is applied by the spinning or spraying method, and a resist layer 7 is formed. Then, a pattern is drawn on the resist layer by an electron ray, and the resist pattern 5 is obtained on the board through the development. The resist pattern 5 is cured by a plasma irradiation or the ion injection method, and this mold 1 is obtained. Also, by repeating these processes, a mold 13 is obtained. Thus, the mold of which the complicated pattern shape can easily be fabricated by less processes, and for which the heights in the unevenness are made equal, and its manufacturing method can be provided. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

  The present invention relates to a mold used for nanoimprinting and a manufacturing method thereof.

In recent years, nanoimprint technology has attracted attention as a technology that allows easy transfer of fine patterns of several tens of nanometers and enables mass production processing at low cost. Nanoimprinting is a micro-molding technique that transfers a mold shape by pressing a mold having nano-level minute irregularities against a substrate to be processed such as resin. Mainly classified into thermal transfer system and photocuring system.
In the nanoimprint process, since a mold affects the quality of a molded product, development of a mold material and development of a three-dimensional fine shape processing technology for the material are required.

The mold manufacturing method is generally performed by lithography and etching (for example, Patent Document 1). In Patent Document 1, a mold is obtained by performing resist coating, exposure, and development on a substrate surface as a mold material, and performing etching using the resist as a mask. In addition, development of a mold having a complicated three-dimensional pattern shape and easy processing is underway (for example, Patent Document 2). In patent document 2, it has a board | substrate and several convex parts with different height formed in one surface of this board | substrate, and the convex part with high height among these convex parts uses at least 2 or more types of materials. A stamper having a laminated structure in which at least two layers are laminated is disclosed.
Japanese Patent Laid-Open No. 10-96808 JP 2004-71587 A

  In the above-described mold manufacturing method, when a pattern having a different area in the same surface or a pattern having a different shape even in the same area exists in the mold, etching is performed so that all the patterns in the surface have the same depth. It is difficult. Also, as in Patent Document 2, when each pattern layer having the same height is made of a material having a different etching rate, the cost of the film material and the film forming apparatus is increased, and the process takes time, so the productivity is improved. Was desired.

  The present invention has been made in view of the above-described problems, and the object of the present invention is to provide a mold that can easily form a complicated pattern shape with few steps, and has a uniform unevenness and a method for manufacturing the same. Is to provide.

In order to achieve the above-mentioned object, a first invention of the present invention is a nanoimprint mold, comprising: a substrate; and micro unevenness (hereinafter referred to as a resist pattern) formed by a resist on the upper surface of the substrate. And the resist pattern is cured by plasma irradiation or ion implantation.
In addition, the resist pattern has a structure in which at least one layer of at least one kind of resist is laminated.
Further, the substrate is characterized by having irregularities.

The second invention is a method for producing a mold for nanoimprint, the step of applying a resist layer on the upper surface of the substrate, the step of forming a concavo-convex pattern on the resist layer (b), and the formation And a step (c) of curing a resist including the formed uneven pattern.
Also, a method for producing a mold for nanoimprinting, the step (d) of applying a second resist layer on the fine irregularities, the step (e) of forming a resist pattern on the resist layer, and curing the resist And a step (f), wherein the steps (d) to (f) are repeated.
The steps (c) and (f) are characterized by being cured by plasma irradiation.
Further, the steps (c) and (f) are characterized by being cured by ion implantation.
Further, the present invention is a method for producing a mold, wherein the substrate has irregularities.

  According to the present invention, it is possible to provide a mold that can easily form a complicated pattern shape with fewer steps and that has a uniform unevenness, and a manufacturing method thereof.

  Hereinafter, a nanoimprint mold according to an embodiment of the present invention and a manufacturing method thereof will be described with reference to the drawings.

  FIG. 1 is a cross-sectional view of a mold 1 according to an embodiment of the present invention. The mold 1 has a structure in which a convex resist pattern 5 is formed on one surface of a substrate 3.

Although it does not specifically limit about the board | substrate 3, Generally, the following materials are used. Examples of the semiconductor material include silicon (Si), silicon oxide (SiO ₂ ), silicon carbide (SiC), and silicon nitride (SiN). Examples of the metal material include aluminum (Al), tungsten (W), tantalum (Ta), and copper (Cu). Further, ceramics are used as the dielectric material, and quartz, soda glass, cubic boron nitride, and the like are used as the glass and optical materials.

As the material of the convex resist pattern 5, a resist that is cured by plasma irradiation or ion implantation is used.
The resist curing process is carbonization of the resist surface due to temperature rise, and impurity atoms, ions, and radicals react with atoms and functional groups contained in the resist to form a strong bonded state. In the case of plasma irradiation, the curing of the resist may be accelerated by UV light generated when the plasma is generated. Therefore, the resist material used in the present invention is not particularly limited, but the types of plasma and ions to be used are determined by the resist-containing components.
The thickness of the resist pattern 5 depends on the target pattern depth, but the aspect ratio is preferably 0.1 to 100 in terms of the aspect ratio indicating the ratio of the width and depth of the pattern.

  Next, a method for manufacturing the mold 1 will be described. FIG. 3 shows a flow chart using the substrate 3 as a starting material, and FIG.

  A resist is applied to the surface of the substrate 3 in FIG. 4A by spin or spray as shown in FIG. 4B to form a resist layer 7 (step 101 in FIG. 3). Next, as shown in FIG. 4C, a pattern is drawn on the resist layer with an electron beam, and development is performed to obtain a resist pattern 5 on the substrate (step 102 in FIG. 3). Other resist pattern forming methods include laser drawing and UV exposure. In either case, a resist pattern can be obtained through development.

  In the present specification, the resist is described using a so-called positive resist in which exposed portions are removed by development. However, the same effect can be obtained even when a negative resist in which an exposed area remains is used.

Next, as shown in FIG. 4D, the resist pattern 5 is cured by plasma irradiation or ion implantation to obtain the mold 1 (step 103 in FIG. 3).
As described above, according to the present embodiment, a complicated pattern shape can be easily produced with few steps.

  Next, a mold 13 according to another embodiment of the present invention will be described. FIG. 2A shows a cross-sectional view of the mold 13.

  The mold 13 shown in FIG. 2A has a structure in which a resist pattern 11 is further laminated on the mold 1 shown in FIG. The material constituting the mold 13 is the same as that of the mold 1 shown in FIG. However, the resist used may be the same material as the resist pattern 5 of the first layer or may be different.

Next, a method for manufacturing the mold 13 in FIG. A manufacturing process using the mold 1 of FIG. 4 (d) as a starting material is shown in FIGS. 4 (d) to 4 (g). A resist is applied to the surface of the mold 1 as shown in FIG. Next, as shown in FIG. 4F, a pattern is drawn on the resist layer with an electron beam, and development is performed to obtain a resist pattern 11 on the substrate. Further, as shown in FIG. 4G, the resist pattern 11 is cured by plasma irradiation or ion implantation to obtain a mold 13. That is, the mold 13 can be obtained by repeating the steps shown in the flowchart of FIG.

  Moreover, it is possible to produce a complicated uneven mold having a plurality of steps by repeating the above steps.

  Further, not only the resist is used as described above, but also a plurality of resists are formed by applying a resist to the substrate 31 on which the unevenness is formed in advance as shown in FIG. It is also possible to produce the mold 15 having the steps.

  As mentioned above, although embodiment of this invention was described with reference to drawings, these are illustrations of this invention and are not limited to the manufacturing process mentioned above.

  Examples are shown below for each of the case where a mold is produced by curing by plasma irradiation and the case where a mold is produced by curing by ion implantation.

A resist “PMER P-LA900PM” (manufactured by Tokyo Ohka Kogyo Co., Ltd.) was applied on a synthetic quartz glass substrate to a thickness of 10 μm by a spin method. Next, a pattern was drawn on the resist layer by ultraviolet exposure using a photomask. At this time, 1: 2 line and space processing with a line width of 2.0 μm was performed. Through development, a resist pattern was obtained on the substrate. Furthermore, irradiated with plasma using a CHF ₃ gas, it could be obtained mold.

On a silicon wafer, polymethyl methacrylate (PMMA) was applied to a thickness of 300 nm by a spin method. Next, a pattern was drawn on the resist layer with an electron beam exposure apparatus. At this time, 1: 2 line and space processing with a line width of 100 nm was performed. Through development, a resist pattern was obtained on the substrate. Further, boron atoms ^{(11 B +) 2.1E10 / cm} 2 implanted by an ion implantation apparatus, it was possible to obtain a mold.

  It is possible to provide a mold that can easily form a complicated pattern shape with few steps and that has a uniform unevenness, and a method for manufacturing the mold.

A sectional view of mold 1 concerning a 1st embodiment is shown. Sectional drawing of the molds 13 and 15 which concern on other embodiment is shown. The flowchart of the manufacturing process of the mold 1 and the mold 13 is shown. Sectional drawing of the manufacturing process of the mold 1 and the mold 13 is shown.

Explanation of symbols

1, 13, 15 ......... Mold 3, 31 ......... Substrate 5, 11, 51 ......... Resist pattern 7, 9 ......... Resist layer

Claims (8)

A mold for nanoimprinting,
A substrate,
Micro unevenness formed by resist on the upper surface of the substrate;
Have
A mold wherein the resist is cured by plasma irradiation or ion implantation.   The mold according to claim 1, wherein the resist has a structure in which at least one layer of at least one kind of resist is laminated.   The mold according to claim 1, wherein the substrate has irregularities. A method for producing a mold for nanoimprinting,
Applying a resist layer on the upper surface of the substrate (a);
A step (b) of forming minute irregularities in the resist layer;
A step (c) of curing the resist;
The manufacturing method of the mold characterized by having. It is a manufacturing method of the mold according to claim 4,
Applying a second resist layer on the cured resist (d);
Forming fine irregularities in the resist layer (e);
A step (f) of curing a resist that forms the formed fine unevenness;
The method for producing a mold according to claim 4, wherein the steps (d) to (f) are repeated.   6. The method for manufacturing a mold according to claim 4, wherein the steps (c) and (f) are cured by plasma irradiation.   6. The mold manufacturing method according to claim 4, wherein the steps (c) and (f) are cured by ion implantation. The method for producing a mold according to claim 4, wherein the substrate has irregularities.

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