JP2006330010A - Microlens and microlens array - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive microlens and a microlens array.
A microlens array 10 is configured by two-dimensionally arranging a plurality of microlenses 3 each having a lens portion 1 and a substrate portion 2, and has a flat plate-like appearance as a whole. Each of the lens portions 1 has a cylindrical shape with a predetermined diameter, and an amorphous portion 1a made of amorphous glass located on one surface side of the microlens array 10 and a crystallization located on the other surface side. It is comprised with the crystalline part 1b which consists of glass. The surface of the amorphous portion 1a is raised in a curved shape from the position of the surface of the substrate portion 2 to form a convex curved lens surface 1a1. The substrate part 2 is made of the same crystallized glass as the crystalline part 1 b of the lens part 1, and surrounds the periphery of the lens part 1.
[Selection] Figure 1

Description

  The present invention relates to a microlens and a microlens array, and more particularly to a microlens and a microlens array used in the field of optical communication.

  The microlens is a general term for lenses having a minute lens portion having a diameter of 2 mm or less in general, and has a function of forming a minute spot in optical recording and a function of coupling an output light beam from a semiconductor laser to an optical fiber. It is used in liquid crystal projectors, optical communication devices (for example, optical switches, multiplexers / demultiplexers, etc.). In particular, the microlens used in the field of optical communication is required to have a lens portion having a diameter as small as possible in accordance with the core diameter of an optical fiber of about 10 μm. In DWDM and parallel optical communication, A microlens array in which a plurality of microlenses are two-dimensionally arranged is used.

  As such a microlens, there has been proposed a microlens using a glass (so-called photosensitive crystallized glass) in which crystals are precipitated only at an exposed portion (see, for example, Patent Document 1). That is, this microlens masks a region corresponding to the lens portion on the surface of the original glass substrate with a masking material made of a silica glass plate on which a Cr film having a size corresponding to the lens portion is formed, and is exposed with ultraviolet rays. A lens made of amorphous glass with the upper surface and the lower surface of the unexposed portion curved and raised as a result of crystallizing only the exposed portion (the portion surrounding the lens portion) by heat treatment. The part is formed.

As another microlens, a microlens (array) in which the irradiation area is relaxed by irradiating a carbon dioxide laser to a minute area on the surface of the densified quartz glass, and the raised structure is relaxed in the minute area. Has been proposed (see, for example, Non-Patent Document 1).
Japanese Patent Publication No. 5-84481 Naoyuki Kitamura and two others, “Bridge structure on the glass surface formed by laser irradiation”, Proceedings of the 50th Joint Conference on Applied Physics, March 2003, p983, 28p-M-1

  However, the microlens described in Patent Document 1 has a manufacturing cost because it is necessary to prepare a masking material for each type when microlens arrays having different lens diameters or different distances are used. Get higher.

  In addition, the microlens (array) described in Non-Patent Document 1 requires expensive manufacturing equipment and uses quartz glass densified by HIP processing, which is difficult to produce continuously, so that the manufacturing cost increases.

  Accordingly, an object of the present invention is to provide an inexpensive microlens and microlens array.

  To achieve the above object, the present invention comprises a lens portion having a convex lens surface and a substrate portion made of crystallized glass surrounding the lens portion, and the lens portion constitutes the substrate portion. Provided are a microlens in which a crystallized glass substrate includes an amorphous portion that is amorphous vitrified by laser irradiation, and a microlens array in which a plurality of microlenses are two-dimensionally arranged.

  When a predetermined region of a substrate made of crystallized glass is irradiated with a laser, the predetermined region of the substrate irradiated with the laser melts part or all of the crystallized glass substrate constituting the predetermined region by the irradiation energy of the laser. Then, it becomes amorphous and becomes an amorphous part. This amorphous vitrified amorphous part has a relatively small density compared to the substrate part of the crystallized glass substrate that surrounds the amorphous part. Therefore, the volume of the amorphous part is relative to that of the substrate part. Increase. As a result, the amorphous portion receives a compressive force from the surrounding substrate portion, and the surface thereof is raised in a curved shape to form a convex lens surface. Accordingly, the predetermined region of the base material irradiated with the laser is a lens portion having a convexly curved lens surface, and the other region of the base material not irradiated with the laser is formed of crystallized glass surrounding the lens portion. It becomes the substrate part.

  For example, when irradiating a predetermined region from one side of the substrate with a laser, if only the portion close to the surface of the predetermined region is melted by the irradiation energy of the laser, only the portion close to the surface becomes amorphous, The lens surface is formed only on one side of the substrate. When the full thickness portion of the predetermined region is melted by the laser irradiation energy, the full thickness portion of the predetermined region becomes amorphous, and lens surfaces are formed on both sides of the substrate. When the laser is irradiated onto the predetermined regions from both sides of the substrate, lens surfaces are formed on both sides of the substrate regardless of the melting range by the laser irradiation energy.

  Further, when a plurality of predetermined regions of the substrate are irradiated with laser at intervals, a microlens array in which a plurality of microlenses as described above are two-dimensionally arranged is formed.

In the above configuration, when the amorphous portion of the lens portion has a thermal expansion coefficient of 30 to 130 × 10 ⁻⁷ / ° C. in the temperature range of −40 to 80 ° C., the focal length change rate (df / dT) is small (for example, within 2 nm / ° C. in absolute value), and even if the environmental temperature fluctuates, light loss is small, which is preferable.

The thermal expansion coefficient of the amorphous part of the lens part is more preferably 30 to 95 × 10 ⁻⁷ / ° C. in the temperature range of −40 to 80 ° C., and in particular, the thermal expansion coefficient of the amorphous part of the lens part. Is less than 60 × 10 ⁻⁷ / ° C., since the difference in thermal expansion from the substrate portion is small and cracks are less likely to occur.

In general, microlenses (arrays) are sometimes used with infrared light incident and output from an optical fiber fixed to the optical fiber array substrate. The optical fiber array substrate has a thermal expansion coefficient close to that of the optical fiber. In addition, Li ₂ O—Al ₂ O ₃ —SiO ₂ -based crystallized glass having a thermal expansion coefficient of −10 to + 10 × 10 ⁻⁷ / ° C. is used as a base material because it has excellent V-groove workability. There are many. Accordingly, when the substrate portion has a thermal expansion coefficient of −30 to + 20 × 10 ⁻⁷ / ° C. in the temperature range of −40 to 80 ° C., the microlens and the optical fiber array substrate have close thermal expansion coefficients. When it is used as a lens array, it is preferable because the axial deviation due to temperature change is small, and the optical loss is reduced even if the environmental temperature fluctuates. In addition, the preferable range of the thermal expansion coefficient of the substrate portion is −25 to + 15 × 10 ⁻⁷ / ° C. Further, when the amorphous part of the lens part has a temperature dependency of the refractive index of −1 to + 8 × 10 ⁻⁶ / ° C. (preferably 5 to 7 × 10 ⁻⁶ / ° C.), the focus on the temperature. This is preferable because the rate of change in distance is small.

Further, when the amorphous part of the lens part is made of Li ₂ O—Al ₂ O ₃ —SiO ₂ amorphous glass, the heat of 30 to 130 × 10 ⁻⁷ / ° C. in the temperature range of −40 to 80 ° C. It tends to have an expansion coefficient, and the substrate portion is precipitated as a main crystal phase of Li ₂ O—Al ₂ O ₃ —SiO ₂ crystallized glass, specifically β-quartz solid solution and / or β-spodumene solid solution. Li ₂ O—Al ₂ O ₃ —SiO ₂ crystallized glass is preferable because it tends to have a thermal expansion coefficient of −30 to + 20 × 10 ⁻⁷ / ° C. in the temperature range of −40 to 80 ° C. .

The lens portion and the substrate portion, by mass%, contains _{SiO 2 55~75%, Al 2 O} 3 14~35%, Li 2 O 2~8%, the TiO ₂ + ZrO ₂ 0.7~8% Particularly preferably, by mass%, SiO ₂ 55 to 75%, Al ₂ O ₃ 14 to 35%, Li ₂ O 2 to 8%, TiO ₂ + ZrO ₂ 0.7 to 5%, MgO 0 to 4 %, ZnO 0-4%,
TiO ₂ 0-4%, ZrO ₂ 0-4%, SnO ₂ 0-4%, P ₂ O ₅ 0-4%,
When Na ₂ O 0-7%, K ₂ O 0-7% and BaO 0-7% are contained, the amorphous part of the lens part is 30-130 × 10 6 in the temperature range of −40-80 ° C. ^It tends to be an amorphous glass having a thermal expansion coefficient of ⁻⁷ / ° C., and the substrate part tends to be a crystallized glass having a thermal expansion coefficient of −30 to + 20 × 10 ⁻⁷ / ° C.

The base material made of crystallized glass has a coefficient of thermal expansion of −30 to + 20 × 10 ⁻⁷ / ° C. in the temperature range of −40 to 80 ° C., and is mainly composed of β-quartz solid solution and / or β-spodumene solid solution. When Li ₂ O—Al ₂ O ₃ —SiO ₂ based crystallized glass precipitated as a crystalline phase is used, the amorphous part of the lens part formed by laser irradiation is 30 in the temperature range of −40 to 80 ° C. It tends to be an amorphous glass having a thermal expansion coefficient of ˜130 × 10 ⁻⁷ / ° C., and the substrate part tends to be a crystallized glass having a thermal expansion coefficient of −30 to + 20 × 10 ⁻⁷ / ° C.

The base material contains, in mass%, SiO ₂ 55 to 75%, Al ₂ O ₃ 14 to 35%, Li ₂ O 2 to 8%, TiO ₂ + ZrO ₂ 0.7 to 8%, and more preferably, by _{mass%, SiO 2 55~75%, Al} 2 O 3 14~35%, Li 2 O 2~8%, TiO 2 + ZrO 2 0.7~5%, 0~4% MgO, ZnO 0~4% TiO ₂ 0-4%, ZrO ₂ 0-4%, SnO ₂ 0-4%, P ₂ O ₅ 0-4%, Na ₂ O 0-7%, K ₂ O 0-7%,
It preferably contains 0-7% BaO.

  When the laser is an ultraviolet laser having a wavelength of 400 nm or less, preferably 266 to 355 nm, specifically a YAG laser, the laser output can be increased, the irradiation spot diameter can be reduced, and the roundness of the spot can be increased. A small-diameter lens portion with high dimensional accuracy can be formed in a short time. Further, when the output of the ultraviolet laser is 0.5 to 5 W, a part of the base material made of crystallized glass melts in a short time, and an amorphous part can be easily formed. In particular, it is preferable that the base material made of crystallized glass has a large absorption of light having a wavelength of 400 nm or less because the base material can be easily melted by a laser.

  The microlens and the microlens array of the present invention do not require high-density substrate by HIP processing, which requires expensive manufacturing equipment and is difficult to continuously produce, and does not require masking material. Therefore, according to the present invention, an inexpensive microlens and microlens array can be provided.

  1 and 2 conceptually show microlens arrays 10 and 20 according to embodiments of the present invention, respectively.

  A microlens array 10 shown in FIG. 1 is configured by two-dimensionally arranging a plurality of microlenses 3 including a lens portion 1 and a substrate portion 2, and has a flat plate-like appearance as a whole. Each of the lens portions 1 has a cylindrical shape with a predetermined diameter, and an amorphous portion 1a made of amorphous glass located on one surface side of the microlens array 10 and a crystallization located on the other surface side. It is comprised with the crystalline part 1b which consists of glass. The surface of the amorphous portion 1a is raised in a curved shape from the position of the surface of the substrate portion 2 to form a convex curved surface, for example, a convex spherical lens surface 1a1 having one curvature radius. The substrate part 2 is made of the same crystallized glass as the crystalline part 1 b of the lens part 1, and surrounds the periphery of the lens part 1. In FIG. 1, the substrate portion 2 and the crystalline portion 1 b of the lens portion 1 are conceptually divided and shown, but actually there is no difference in the structure between the two.

  The microlens array 10 can be manufactured by, for example, irradiating a plurality of predetermined regions of a base material made of crystallized glass with a laser from one surface side. That is, in a predetermined region of the substrate irradiated with the laser, a portion close to one surface is melted by the irradiation energy of the laser, and becomes amorphous vitrified to become an amorphous portion 1a. The amorphous vitrified amorphous portion 1a has a relatively smaller density than the substrate portion 2 of the crystallized glass substrate that surrounds the amorphous portion 1a. Compared to the relative increase. As a result, the amorphous portion 1a receives a pressing force from the surrounding substrate portion 2, and the surface thereof is raised in a curved shape to form a convex curved lens surface 1a1. Accordingly, the predetermined region of the base material irradiated with the laser becomes the lens portion 1 having the convex curved lens surface 1a1, and the other region of the base material not irradiated with the laser crystallizes surrounding the lens portion 1. The substrate portion 2 is made of glass. The diameter of the lens portion 1 is substantially equal to the spot diameter of the laser beam to be irradiated, and the lens portion 1 having a desired diameter can be accurately formed by adjusting the spot diameter of the laser beam.

  A microlens array 20 shown in FIG. 2 is configured by two-dimensionally arranging a plurality of microlenses 13 including a lens portion 11 and a substrate portion 12, and has a flat plate-like appearance as a whole. Each of the lens portions 11 has a cylindrical shape with a predetermined diameter, and is composed of an amorphous portion 11a made of amorphous glass. Both surfaces of the amorphous part 11a are raised from the surface of the substrate part 12 in a curved shape to form a convex curved surface, for example, a convex spherical lens surface 11a1 having one radius of curvature. Yes. The substrate portion 12 is made of crystallized glass and surrounds the periphery of the lens portion 11.

  Similarly to the microlens array 10 shown in FIG. 1, the microlens array 20 can be manufactured by irradiating a plurality of predetermined regions of a base material made of crystallized glass with a laser from one surface side. The difference is that the entire thickness portion of the lens portion 11 is melted and amorphized by laser irradiation, and lens surfaces 11a1 are formed on both sides of the substrate.

Table 1 shows Examples 1 to 5, and Table 2 shows Comparative Examples 1 and 2. The microlens arrays of Examples 1 to 3 and 5 correspond to the configuration shown in FIG. 1, and the microlens array of Example 4 corresponds to the configuration shown in FIG.

  First, raw materials prepared so as to have the composition shown in Table 1 were placed in a platinum crucible, and glass melted at 1550 ° C. for 10 hours was poured into a carbon mold and slowly cooled to room temperature to produce an original glass plate. . Then, it crystallized on the crystallization conditions shown in Table 1, and the original plate which consists of crystallized glass which precipitated (beta) -quartz solid solution or (beta) -spodumene solid solution was obtained.

  Next, the base plate is cut into a size of 3 × 4 × 0.5 tmm, and both sides are mirror-polished to prepare a base material. By irradiating a YAG laser with a width of 10 ns, a frequency of 1 kHz, and a wavelength of 355 nm at an output of 0.5 to 2.5 W for 2 seconds per location, as shown in FIG. 1, the lens unit 1 (region irradiated with the ultraviolet laser) And a microlens array 10 in which eight microlenses 3 having a substrate portion 2 (region not irradiated with an ultraviolet laser) were two-dimensionally arranged (Examples 1 to 3 and 5).

  In addition, the base plate is cut into a size of 3 × 4 × 0.2 tmm, and both sides are mirror-polished to prepare a base material, and at eight locations at intervals of 0.2 mm, over the entire thickness direction of the base material, By irradiating a YAG laser with a pulse width of 10 ns, a frequency of 1 kHz and a wavelength of 355 nm at an output of 0.5 to 2.5 W for 2 seconds per location, as shown in FIG. 2, the lens unit 11 (region irradiated with the ultraviolet laser) And a microlens array 20 in which eight microlenses 13 having a substrate portion 12 (region not irradiated with an ultraviolet laser) are two-dimensionally arranged (Example 4). Of the lens portions 1 and 11, the portions where the ultraviolet laser was irradiated and the base material was melted were amorphous portions 1a and 11a made of amorphous glass. Moreover, in Examples 1-3, the part in which the base material did not melt | dissolve among the lens parts 1 was the crystalline part 1b in which the crystal | crystallization as a base material precipitated. Moreover, although this crystalline part 1b has precipitated β-quartz solid solution, since the precipitated crystal size is 0.05 μm or less, the infrared transmittance in the wavelength region of 1000 to 1650 nm is 60% or more, It could be used sufficiently for optical communication applications.

  In Comparative Example 1, a high-density silica glass whose density was increased by 4% by HIP treatment at 1 GPa and 1200 ° C. was used as an original plate, and a carbon dioxide gas laser having a wavelength of 10.6 μm was irradiated at an output of 0.5 W for 120 seconds. A microlens array was produced in the same manner as in Example 1 except for the above.

In Comparative Example 2, the raw materials prepared so as to have the composition shown in Table 2 were placed in a platinum crucible, and glass melted at 1450 ° C. for 4 hours was poured into a carbon mold and slowly cooled to room temperature to produce an original plate. did. Next, this original plate is cut into a size of 3 × 4 × 0.5 tmm, and both sides are mirror-polished to produce a base material, and a silica glass having a size corresponding to the lens portion is formed on the silica glass The area corresponding to the lens portion on the surface of the base material was masked with a plate, and ultraviolet rays were irradiated for 100 seconds using a 1000 W mercury-xenon lamp. Thereafter, the substrate was heat-treated at 540 ° C. for 1 hour and at 580 ° C. for 1 hour, Li ₂ O · SiO ₂ crystals were deposited on the irradiated portion of the substrate, and convex curved surfaces were formed on both sides of the substrate. A microlens array having 8 microlenses having lens surfaces was produced.

  In Examples 1 to 5 and Comparative Examples 1 and 2, the diameter of the lens portion was approximately equal to the radius of curvature of the lens surface, and was 50 to 300 μm. Also, in the “lens shape” column in Tables 1 and 2, “convex flat” indicates that the lens has a lens surface only on one side as shown in FIG. This represents a lens shape having lens surfaces on both sides as shown in FIG.

  The precipitated crystal phase was identified using an X-ray diffractometer.

  The thermal expansion coefficient of the amorphous part was evaluated by the thermal expansion coefficient of the original glass plate in Examples 1 to 5, and by the thermal expansion coefficient of the original plate in Comparative Examples 1 and 2. Moreover, the thermal expansion coefficient of the substrate portion was evaluated by the thermal expansion coefficient of the original plate in Examples 1 to 5 and Comparative Example 1, and by the thermal expansion coefficient after heat treatment of the original plate in Comparative Example 2. These thermal expansion coefficients were measured in a temperature range of −40 to 80 ° C. using a dilatometer (TD-5000S manufactured by Mac Science).

  The radius of curvature of the lens part was measured using a laser microscope.

  The refractive index of the lens part and the temperature dependence of the refractive index (dn / dT) were determined by measuring the refractive index by the optical probe method in the temperature range of −40 to 80 ° C.

  The focal length change rate (df / dT) with respect to temperature was calculated as follows.

The focal length f is expressed by Equation 1, and the focal length change rate (df / dT) with respect to the temperature shown in Equation 2 is derived by differentiating Equation 1 with temperature T.
f = (r ₁ · r ₂ ) / {(r ₂ −r ₁ ) · (n−1)} Equation 1
df / dT = f · [α− {1 / (n−1) · dn / dT}] Equation 2

Here, r ₁ and r ₂ are curvature radii (μm) of the lens surface of the lens portion, α is a thermal expansion coefficient (× 10 ⁻⁷ / ° C.), n is a refractive index at room temperature at a wavelength of 1550 nm, and dn / dT is The refractive index change rate with respect to temperature (× 10 ⁻⁶ / ° C.). When the lens shape is convex, r ₂ is ∞.

  The change in focal length and the axis deviation due to the temperature change are evaluated by the insertion loss with respect to the temperature change. The light loss (dB) at −5 ° C., 25 ° C., and 65 ° C. was measured for eight microlenses using a power meter, and the average value of all the light losses was measured.

  In Examples 1 to 5, a microlens array could be produced without requiring HIP processing or a masking material, and the insertion loss with respect to temperature change was small. On the other hand, Comparative Example 1 had to be subjected to HIP processing in order to produce an original plate, and furthermore, since the focal length change rate (df / dT) with respect to temperature was large, insertion loss with respect to temperature change was large. In Comparative Example 2, a masking material had to be prepared. Further, although the focal length change rate (df / dT) with respect to the temperature was small, the insertion loss with respect to the temperature change was large. This is presumed to be due to the fact that the axis deviation with respect to the temperature of the microlens array has increased due to the large thermal expansion coefficient of the substrate portion.

  The microlens and microlens array of the present invention are suitable for optical communication devices such as optical switches and multiplexers / demultiplexers, and in particular DWDM and parallel that require strict focal length accuracy and high chemical durability. Suitable for optical communication.

It is sectional drawing which shows notionally the microlens array which concerns on embodiment. It is sectional drawing which shows notionally the microlens array which concerns on other embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Lens part 1a, 11a Amorphous part 1a1, 11a1 Lens surface 12 Substrate part 13 Micro lens 10, 20 Micro lens array

Claims (19)

A lens unit having a convex lens surface; and a substrate unit made of crystallized glass surrounding the periphery of the lens unit, wherein the crystallized glass substrate constituting the substrate unit is irradiated by laser irradiation. A microlens including an amorphous vitrified amorphous part. 2. The microlens according to claim 1, wherein the amorphous part of the lens part has a thermal expansion coefficient of 30 to 130 × 10 ⁻⁷ / ° C. in a temperature range of −40 to 80 ° C. 3. The microlens according to claim 1, wherein the substrate portion has a thermal expansion coefficient of −30 to + 20 × 10 ⁻⁷ / ° C. in a temperature range of −40 to 80 ° C. The amorphous part of the lens part is made of Li ₂ O—Al ₂ O ₃ —SiO ₂ based amorphous glass, and the substrate part is made of Li ₂ O—Al ₂ O ₃ —SiO ₂ based crystallized glass. Item 4. The microlens according to any one of Items 1 to 3. To claim 1, wherein the substrate portion is made of a β- quartz solid solution and / or β- and spodumene solid solution comprising precipitated as a main crystal phase _{Li 2 O-Al 2 O 3} -SiO 2 based crystallized glass The microlens described. The lens part and the substrate part are in mass%, SiO ₂ 55 to 75%,
The microlens according to claim 1, comprising Al ₂ O ₃ 14 to 35%, Li ₂ O 2 to 8%, TiO ₂ + ZrO ₂ 0.7 to 8%. The lens part and the substrate part are in mass%, SiO ₂ 55 to 75%,
Al ₂ O ₃ 14-35%, Li ₂ O 2-8%, TiO ₂ + ZrO ₂ 0.7-5%,
0~4% MgO, 0~4% ZnO, TiO 2 0~4%, ZrO 2 0~4%,
It contains SnO ₂ 0-4%, P ₂ O ₅ 0-4%, Na ₂ O 0-7%, K ₂ O 0-7%, BaO 0-7%. Micro lens. The microlens according to claim 1, wherein the laser output is 0.5 to 5 W. A method for manufacturing a microlens comprising a lens portion having a convex lens surface and a substrate portion made of crystallized glass surrounding the lens portion, and a predetermined region of a base material made of crystallized glass The lens is irradiated with the laser, and the crystallized glass substrate in the predetermined region of the base material is amorphous vitrified by the laser irradiation to form an amorphous part, and the lens part including the amorphous part is formed. Manufacturing method of a micro lens. The base material has a thermal expansion coefficient of −30 to + 20 × 10 ⁻⁷ / ° C. in a temperature range of −40 to 80 ° C., and is precipitated with β-quartz solid solution and / or β-spodumene solid solution as a main crystal phase. method for producing a micro lens according to Li ₂ O-Al ₂ O ₃ according to claim 9 consisting of -SiO ₂ based crystallized glass is formed by. The base material contains, by mass%, SiO ₂ 55 to 75%, Al ₂ O ₃ 14 to 35%, Li ₂ O 2 to 8%, TiO ₂ + ZrO ₂ 0.7 to 8%. A method for producing a microlens according to 9 or 10. The base material is SiO ₂ 55-75%, Al ₂ O ₃ 14-35%, Li ₂ O 2-8%, TiO ₂ + ZrO ₂ 0.7-5%, MgO 0-4% by mass%. ZnO 0-4%, TiO ₂ 0-4%, ZrO ₂ 0-4%, SnO ₂ 0-4%,
P ₂ O ₅ 0~4%, the manufacture of micro-lenses according to any one of _{Na 2 O 0~7%, K 2} O 0~7%, claim 9-11 comprising a 0 to 7% BaO Method. The method of manufacturing a microlens according to any one of claims 9 to 12, wherein an output of the laser is 0.5 to 5W. A microlens array in which a plurality of the microlenses according to claim 1 are two-dimensionally arranged. This is a method for manufacturing a microlens array in which a plurality of microlenses having a lens portion having a convex lens surface and a substrate portion made of crystallized glass surrounding the lens portion are two-dimensionally arranged. Then, a plurality of predetermined regions of the base material made of crystallized glass are irradiated with a laser, and the crystallized glass substrate of each predetermined region of the base material is converted into amorphous vitreous by the laser irradiation to generate an amorphous part. A method of manufacturing a microlens for forming the lens portion including the amorphous portion. The base material has a thermal expansion coefficient of −30 to + 20 × 10 ⁻⁷ / ° C. in a temperature range of −40 to 80 ° C., and is precipitated with β-quartz solid solution and / or β-spodumene solid solution as a main crystal phase. The method for producing a microlens array according to claim 15, comprising Li ₂ O—Al ₂ O ₃ —SiO ₂ based crystallized glass. The base material contains, by mass%, SiO ₂ 55 to 75%, Al ₂ O ₃ 14 to 35%, Li ₂ O 2 to 8%, TiO ₂ + ZrO ₂ 0.7 to 8%. The manufacturing method of the micro lens array of 15 or 16. The base material is SiO ₂ 55-75%, Al ₂ O ₃ 14-35%, Li ₂ O 2-8%, TiO ₂ + ZrO ₂ 0.7-5%, MgO 0-4% by mass%. ZnO 0-4%, TiO ₂ 0-4%, ZrO ₂ 0-4%, SnO ₂ 0-4%,
_{P 2 O 5 0~4%, Na} 2 O 0~7%, K 2 O 0~7%, the microlens array according to any one of claims 15 to 17 comprising a 0 to 7% BaO Production method. The method of manufacturing a microlens array according to any one of claims 15 to 18, wherein the output of the laser is 0.5 to 5W.