JP2005247636A - Method of manufacturing porous preform for optical fiber and glass preform - Google Patents
Method of manufacturing porous preform for optical fiber and glass preform Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000013307 optical fiber Substances 0.000 title description 7
- 239000005304 optical glass Substances 0.000 title 1
- 239000011521 glass Substances 0.000 claims abstract description 63
- 238000000151 deposition Methods 0.000 claims abstract description 55
- 230000008021 deposition Effects 0.000 claims abstract description 46
- 239000005373 porous glass Substances 0.000 claims abstract description 29
- 239000010419 fine particle Substances 0.000 claims abstract description 26
- 239000002994 raw material Substances 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims description 34
- 239000002245 particle Substances 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000567 combustion gas Substances 0.000 claims description 5
- 230000007062 hydrolysis Effects 0.000 claims description 4
- 238000006460 hydrolysis reaction Methods 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 3
- 239000002019 doping agent Substances 0.000 claims description 2
- 239000004071 soot Substances 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 5
- 238000005253 cladding Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 6
- 229910003902 SiCl 4 Inorganic materials 0.000 description 3
- 230000012447 hatching Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06C—LADDERS
- E06C1/00—Ladders in general
- E06C1/02—Ladders in general with rigid longitudinal member or members
- E06C1/38—Special constructions of ladders, e.g. ladders with more or less than two longitudinal members, ladders with movable rungs or other treads, longitudinally-foldable ladders
- E06C1/383—Foldable ladders in which the longitudinal members are brought together on folding
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06C—LADDERS
- E06C7/00—Component parts, supporting parts, or accessories
- E06C7/08—Special construction of longitudinal members, or rungs or other treads
- E06C7/082—Connections between rungs or treads and longitudinal members
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06C—LADDERS
- E06C7/00—Component parts, supporting parts, or accessories
- E06C7/50—Joints or other connecting parts
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/62—Distance
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/70—Control measures
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
本発明は、ガラス原料の火炎加水分解で生成したガラス微粒子を出発部材上に堆積させて多孔質ガラス母材を製造する方法、特には、ガラス微粒子の堆積効率を向上させる光ファイバ用多孔質ガラス母材の製造方法及びガラス母材に関する。 The present invention relates to a method for producing a porous glass preform by depositing glass fine particles produced by flame hydrolysis of a glass raw material on a starting member, and in particular, porous glass for an optical fiber that improves the deposition efficiency of glass fine particles. The present invention relates to a base material manufacturing method and a glass base material.
合成石英ガラスは、光ファイバやマスク基板、レンズ等、様々な用途に用いられているが、合成石英ガラスの製造方法としては、VAD法が広く採用されている。
VAD法は、SiCl4などのガラス原料をバーナ火炎中で火炎加水分解させ、生成したガラス微粒子を回転しつつ一定の速度で上昇する出発部材上に堆積させて多孔質ガラス母材を作り、これを高温中で脱水・透明ガラス化して合成石英ガラスを得る方法である。
Synthetic quartz glass is used in various applications such as optical fibers, mask substrates, and lenses, and the VAD method is widely adopted as a method for producing synthetic quartz glass.
In the VAD method, glass raw materials such as SiCl 4 are flame-hydrolyzed in a burner flame, and the generated glass particles are deposited on a starting member that rises at a constant speed while rotating to make a porous glass base material. Is a method in which synthetic quartz glass is obtained by dehydration and transparent vitrification at a high temperature.
VAD法では、予め用意したガラスロッドを出発部材とし、その周囲にガラス微粒子を堆積させて外周部を合成する方法に加えて、先の出発部材に相当する中心部と外周部を同時に合成することもできる。
火炎加水分解で生成したガラス微粒子は、火炎流とともに出発部材の堆積面に吹き付けられ、付着・堆積するが、その一部(条件にもよるが、約5割)が堆積されることなく、排ガスとともに系外に排出される。
In the VAD method, in addition to a method in which a glass rod prepared in advance is used as a starting member and glass fine particles are deposited around it to synthesize the outer peripheral portion, the central portion and the outer peripheral portion corresponding to the starting member are simultaneously synthesized. You can also.
The glass particles produced by flame hydrolysis are sprayed onto the deposition surface of the starting member together with the flame flow, and adhere and accumulate, but a part (approximately 50% depending on the conditions) is not deposited, but the exhaust gas. At the same time, it is discharged outside the system.
VAD法により合成される光ファイバ用多孔質ガラス母材は、通常、図1に示すような形状を有しており、中心から順にコア部(a)、第1クラッド部(b)、第2クラッド部(c)が形成されている。この場合、各堆積層はその径が単調に増大している(特許文献1参照)。 The porous glass preform for optical fiber synthesized by the VAD method usually has a shape as shown in FIG. 1, and the core portion (a), the first cladding portion (b), and the second portion are sequentially formed from the center. A clad part (c) is formed. In this case, the diameter of each deposited layer monotonously increases (see Patent Document 1).
多孔質ガラス母材は、図2に示すように、先ず、コア部堆積用バーナ1によりコア部となる中心棒2が形成され、その上に第1クラッド部堆積用バーナ3により第1クラッド部が、さらにその上に第2クラッド部堆積用バーナ4により第2クラッド部が堆積され、多孔質ガラス母材が形成される。
第1クラッド部堆積用バーナ3によるガラス微粒子流5は、ハッチングで示したように、中心部2に当たって左右に分かれつつ上昇し、その後表面から離れ、最終的に系外に排出される。このとき、堆積されなかった未付着のガラス微粒子(スート)は、排ガスとともに大部分のものは系外に排出されるが、その一部は反応容器の内壁に付着・堆積する。
As shown in FIG. 2, in the porous glass base material, first, a
As indicated by hatching, the glass
合成石英ガラスは様々な用途に用いられているが、近年、光ファイバ用向けのものは特に大型化の要求が強く、これにともない未付着のスート量も増大し、原料コストを増大させている。さらに、堆積面でのガラス微粒子の付着率が低いと、未付着のスートが反応容器の内壁に付着・堆積し、これが剥がれ落ちたものが堆積面に付着すると、製品に泡を発生させる原因となり、歩留まりを低下させる。
このため、生成したガラス微粒子をより高効率で堆積面に付着させる方法が求められている。
Synthetic quartz glass is used in various applications, but recently, there is a strong demand for larger size for optical fibers, and the amount of unattached soot has increased accordingly, increasing raw material costs. . Furthermore, if the adhesion rate of the glass particles on the deposition surface is low, unattached soot will adhere to and deposit on the inner wall of the reaction vessel, and if this comes off and adheres to the deposition surface, it will cause bubbles in the product. , Reduce the yield.
For this reason, a method for adhering the generated glass fine particles to the deposition surface with higher efficiency is demanded.
本発明は、堆積面でのガラス微粒子の付着率を高め、反応容器内を浮遊するスートを低減させ、製品中に生じる気泡の発生を防止することのできる多孔質ガラス母材の製造方法及びガラス母材を提供することにある。 The present invention relates to a method for producing a porous glass base material and glass capable of increasing the adhesion rate of glass fine particles on the deposition surface, reducing soot floating in the reaction vessel, and preventing the generation of bubbles generated in the product. To provide a base material.
本発明者等は、鋭意研究の結果、上記課題を解決したものであり、すなわち、本発明の多孔質ガラス母材の製造方法は、ガラス原料を酸水素火炎中で火炎加水分解させ、生成したガラス微粒子を堆積させて多孔質ガラス母材を製造するに際し、ガラス微粒子の堆積に合わせて中心棒をほぼ一定の速度で上昇させ、ガラス微粒子堆積面に向けて斜め下方から、堆積用バーナにより合成されたガラス微粒子を含む火炎流を噴射し、堆積体の堆積下面に凹部を形成し、堆積することを特徴としている。 As a result of intensive studies, the present inventors have solved the above problems, that is, the method for producing a porous glass base material of the present invention is produced by flame hydrolysis of a glass raw material in an oxyhydrogen flame. When producing a porous glass base material by depositing glass particles, the central rod is raised at a substantially constant rate in accordance with the deposition of the glass particles, and synthesized by a deposition burner obliquely from below toward the glass particle deposition surface. It is characterized in that a flame flow containing the glass fine particles is sprayed to form a concave portion on the bottom surface of the deposited body and deposit.
中心棒には、堆積用バーナとは異なるバーナを用いて軸方向にガラス微粒子を堆積させ成長させた多孔質ガラス材からなるもの、あるいは透明ガラス材、より好ましくは石英ガラス材からなるものを用いることもできる。石英ガラス材は、径方向に一様なもの、あるいは一部にドーパントを含むものであってもよい。 The center rod is made of a porous glass material obtained by depositing and growing glass particles in the axial direction using a burner different from the deposition burner, or a transparent glass material, more preferably a quartz glass material. You can also. The quartz glass material may be uniform in the radial direction or may contain a dopant in part.
堆積下面に形成する凹部の形状を、堆積用バーナに供給するガラス原料の流量により調整するのが好ましいが、堆積用バーナに供給する燃焼ガス又は助燃ガスの流量により調整してもよい。なお、堆積用バーナは、垂直に配設された中心棒に対して角度30度〜50度となるように設置するのが好ましい。
このようにして製造された多孔質ガラス母材を脱水、焼結後、透明ガラス化することにより、光学特性に優れたガラス母材が得られる。
The shape of the recess formed on the bottom surface of the deposition is preferably adjusted by the flow rate of the glass raw material supplied to the deposition burner, but may be adjusted by the flow rate of the combustion gas or auxiliary combustion gas supplied to the deposition burner. The deposition burner is preferably installed at an angle of 30 ° to 50 ° with respect to the vertically arranged central bar.
A glass base material excellent in optical properties can be obtained by dehydrating and sintering the produced porous glass base material and then converting it into a transparent glass.
このようにして得られた多孔質ガラス母材を脱水し、焼結・透明ガラス化することで、例えば、光ファイバ用ガラス母材として好適な光学特性に優れた石英ガラスを低コストで製造することができる。 By dehydrating the porous glass base material thus obtained and sintering and forming a transparent glass, for example, quartz glass excellent in optical properties suitable as a glass base material for optical fibers is manufactured at low cost. be able to.
本発明者等は、ガラス原料の流量、バーナ火炎の流速、堆積面の温度等以外にも、ガラス微粒子の付着率を高める方法があることを見出し、堆積面を堆積に適した形状に調整することにより、具体的には、堆積体の堆積下面に凹部を形成するようにして堆積することにより、課題を達成した。 The present inventors have found that there is a method for increasing the adhesion rate of the glass fine particles in addition to the flow rate of the glass raw material, the flow rate of the burner flame, the temperature of the deposition surface, and the like, and adjust the deposition surface to a shape suitable for deposition. Thus, specifically, the problem was achieved by depositing so as to form a recess on the bottom surface of the deposit.
堆積中の多孔質ガラス母材の下部は、図1,2から明らかなように、主として第1クラッド部堆積用バーナ3により形成されている。この第1クラッド部堆積用バーナは、第1クラッド部の形成に加えて、コア部の側面を加熱することにより屈折率分布の調整を行う役割を担っており、このため、他の堆積用バーナと比較してガラス微粒子の付着率が低い。
As is apparent from FIGS. 1 and 2, the lower portion of the porous glass base material being deposited is mainly formed by the first cladding
本発明はこれを改善したものであり、堆積体の堆積下面に凹部を形成することにより、第1クラッド部堆積用バーナ3から噴射されるガラス微粒子の付着率を上げることができ、さらに第1クラッド部の外径が大きくなることにより、第2クラッド部の付着率も向上し、反応容器内を浮遊する余剰のスートを減らすことができる。
The present invention is an improvement of this, and by forming a recess on the bottom surface of the deposit, the adhesion rate of the glass particles sprayed from the first cladding
図3を用いてさらに詳細に説明する。
先ず、コア部堆積用バーナ1により中心棒2が形成され、その周囲に第1クラッド部が第1クラッド部堆積用バーナ3(以下、単にバーナ3と称する)により形成されている。第1クラッド部の堆積下面には、中心棒2を取り巻くように凹部6が形成されている。この凹部6の形状は、バーナ3に供給するガス流量で調整することができる。なお、バーナ3は、中心棒2に対して角度30度〜50度となるように設置されている。この角度が30度未満では付着率が低くなり、50度を越えると凹部6を形成するのが困難となるため好ましくない。
This will be described in more detail with reference to FIG.
First, a
バーナ3により生成されたガラス微粒子流5は、ハッチングで示されているように、中心棒2に当たって左右に分かれたものが凹部6によって形成された凹溝を通って、中心棒2の反対側にまで回り込み、再び合流した後に堆積面から離れている。このため、ガラス微粒子流5は、凹部6の凹溝を通るため、堆積面との接触時間が増し、ガラス微粒子の付着率が高くなる。
As shown by hatching, the glass
凹部6の形状は、ガラス微粒子流5が当たる中心棒2の太さ、バーナ3に供給される原料ガスや燃焼ガス等の流量、速度、さらにバーナ3の口径等に依存するため、凹部6の形状調整は、一概には論じられないが、通常よりもガラス原料ガスの流量を増す方向で行うのがよく、特に有効である。
なお、図3の例は、第1クラッド部の形成を一本のバーナ3で行っているが、複数のバーナ3を配置して行ってもよい。また、コア堆積用バーナ1でコア部となる中心棒2を同時に形成しているが、予め用意した石英ガラス棒等を中心棒2として使用してもよい。
The shape of the
In the example of FIG. 3, the first cladding portion is formed by one
実施例1;
バーナへの供給ガス量は、H2 13 L/min、O2 14 L /min、Ar 2 L/minとし、ガラス原料(SiCl4)は通常より多い0.8 L/minとした。バーナは、直径30mmの透明石英ガラスからなる中心棒に対して45°で上向きに配置し、中心棒を回転させつつ速度0.8 mm/minで上昇させ、中心棒の周囲にガラス微粒子を堆積させ、多孔質ガラス母材を合成した。
堆積中、堆積体の堆積下面、中心棒の周囲に通路状に凹部(凹溝)が形成され、バーナ火炎流はこの凹溝を通って流れ、ガラス微粒子の付着率は極めて高い87 %に達した。
Example 1;
The amount of gas supplied to the burner was H 2 13 L / min, O 2 14 L / min, Ar 2 L / min, and the glass raw material (SiCl 4 ) was 0.8 L / min, which is higher than usual. The burner is placed upward at 45 ° with respect to the center rod made of transparent quartz glass with a diameter of 30 mm, and the center rod is rotated at a speed of 0.8 mm / min while rotating the center rod to deposit glass particles around the center rod, A porous glass matrix was synthesized.
During deposition, a recess (concave groove) is formed in the shape of a passage around the bottom surface of the deposit and around the central rod, and the burner flame flow flows through the concave groove, and the adhesion rate of glass particles reaches 87%, which is extremely high. did.
比較例1;
ガラス原料(SiCl4)の供給量を通常の 0.45 L/minとした以外は全て、実施例1と同じ条件で堆積を行ったところ、堆積体に凹部は形成されず、その径は多孔質ガラス母材の長手方向に単調に増大していた。なお、ガラス微粒子の付着率は62%であった。
Comparative Example 1;
Except that the supply rate of the glass raw material (SiCl 4 ) was changed to the usual 0.45 L / min, the deposition was performed under the same conditions as in Example 1. As a result, no recess was formed in the deposited body, and the diameter was porous glass. It increased monotonously in the longitudinal direction of the base material. The adhesion rate of the fine glass particles was 62%.
本発明の多孔質ガラス母材の製造方法によれば、ガラス微粒子の付着率の向上を図ることができ、光ファイバのコスト低減に寄与する。 According to the method for producing a porous glass preform of the present invention, the adhesion rate of glass fine particles can be improved, which contributes to the cost reduction of the optical fiber.
1.……コア部堆積用バーナ、
2.……中心棒(コア部)、
3.……第1クラッド部堆積用バーナ、
4.……第2クラッド部堆積用バーナ、
5.……ガラス微粒子流、
6.……凹部。
1. ...... Core burner
2. …… Center rod (core part),
3. ... Burner for depositing the first cladding
4). ... Burner for depositing second cladding part
5). ...... Glass particulate flow,
6). ... concave.
Claims (8)
A glass base material obtained by dehydrating and sintering a porous glass base material manufactured using the manufacturing method according to any one of claims 1 to 7, and then forming a transparent glass.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004060499A JP4530687B2 (en) | 2004-03-04 | 2004-03-04 | Method for producing porous glass preform for optical fiber |
KR1020050003780A KR101157674B1 (en) | 2004-03-04 | 2005-01-14 | Fabrication Method of Porous Glass Preform for Optical Fiber, and Glass Preform Fabricated Thereby |
PCT/JP2005/002930 WO2005085144A1 (en) | 2004-03-04 | 2005-02-23 | Method for producing porous glass base material for optical fiber and glass base material |
CNA2005800124770A CN1946640A (en) | 2004-03-04 | 2005-02-23 | Method for producing porous glass base material for optical fiber and glass base material |
TW094106454A TW200533616A (en) | 2004-03-04 | 2005-03-03 | Method for producing porous glass base material for optical fiber and glass base material |
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JP2004060499A JP4530687B2 (en) | 2004-03-04 | 2004-03-04 | Method for producing porous glass preform for optical fiber |
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JP2005247636A true JP2005247636A (en) | 2005-09-15 |
JP4530687B2 JP4530687B2 (en) | 2010-08-25 |
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JP (1) | JP4530687B2 (en) |
KR (1) | KR101157674B1 (en) |
CN (1) | CN1946640A (en) |
TW (1) | TW200533616A (en) |
WO (1) | WO2005085144A1 (en) |
Families Citing this family (4)
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JP4750867B2 (en) * | 2009-02-24 | 2011-08-17 | 信越化学工業株式会社 | Burner for manufacturing porous glass base material and method for manufacturing porous glass base material |
JP6581637B2 (en) * | 2017-10-13 | 2019-09-25 | 信越化学工業株式会社 | Porous glass base material manufacturing apparatus and manufacturing method |
JP7170555B2 (en) * | 2019-02-12 | 2022-11-14 | 信越化学工業株式会社 | Manufacturing method of porous glass base material for optical fiber |
CN113354263B (en) * | 2021-07-03 | 2022-08-26 | 神光光学集团有限公司 | Method and equipment for producing synthetic quartz glass |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60260433A (en) * | 1984-06-04 | 1985-12-23 | Sumitomo Electric Ind Ltd | Method for manufacturing base material for optical fiber |
JPH054825A (en) * | 1991-06-25 | 1993-01-14 | Sumitomo Electric Ind Ltd | Method for manufacturing glass article |
JP2000063141A (en) * | 1998-08-11 | 2000-02-29 | Shin Etsu Chem Co Ltd | Production of porous glass preform for optical fiber |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR850000288B1 (en) * | 1980-10-06 | 1985-03-16 | Nippon Telegraph & Telephone | Method of fabrication malti-mode optical fiber preforms |
JPH01138147A (en) * | 1987-11-26 | 1989-05-31 | Hitachi Cable Ltd | Manufacturing method of single mode optical fiber preform |
JP3053320B2 (en) * | 1993-08-26 | 2000-06-19 | 信越化学工業株式会社 | Method for producing porous glass preform for optical fiber |
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2004
- 2004-03-04 JP JP2004060499A patent/JP4530687B2/en not_active Expired - Fee Related
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2005
- 2005-01-14 KR KR1020050003780A patent/KR101157674B1/en active IP Right Grant
- 2005-02-23 WO PCT/JP2005/002930 patent/WO2005085144A1/en active Application Filing
- 2005-02-23 CN CNA2005800124770A patent/CN1946640A/en active Pending
- 2005-03-03 TW TW094106454A patent/TW200533616A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60260433A (en) * | 1984-06-04 | 1985-12-23 | Sumitomo Electric Ind Ltd | Method for manufacturing base material for optical fiber |
JPH054825A (en) * | 1991-06-25 | 1993-01-14 | Sumitomo Electric Ind Ltd | Method for manufacturing glass article |
JP2000063141A (en) * | 1998-08-11 | 2000-02-29 | Shin Etsu Chem Co Ltd | Production of porous glass preform for optical fiber |
Also Published As
Publication number | Publication date |
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JP4530687B2 (en) | 2010-08-25 |
KR101157674B1 (en) | 2012-06-20 |
WO2005085144A1 (en) | 2005-09-15 |
TW200533616A (en) | 2005-10-16 |
KR20050089747A (en) | 2005-09-08 |
CN1946640A (en) | 2007-04-11 |
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