JP2005246943A - Method for manufacturing glass substrate/laminated protection sheet and automatic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laminate production method related to a laminated sheet for aiming an etching processing, a processing method therefor or the like and a washing, drying and etching process by setting a holder which indirectly incorporates an ultrasonic vibration, and an automatic apparatus to be used for this method. <P>SOLUTION: In the processing steps related to a glass substrate processing step, a lawful means for laminating the laminated sheet for etching a glass substrate is used, a roller pressing is applied, by utilizing a processed mold to etch the stacked sheets, the laminated sheet for a glass substrate which enables a half cut blanking to adhere to the glass substrate is obtained. The automatic apparatus comprises the etching process having a characteristic for using them (shown above) and the washing and drying process related to the etching treatment, indirectly integrating an action by ultrasonic vibration as the processing method in a holder separately prepared and making it operate, and the washing, drying related to the etching treatment. The automatic apparatus is controlled by using a wireless run system for controlling each apparatus, electromagnetic valves, electromagnetic valves, various measuring instruments used, a transporting equipment and an automatic liquid mixer for a detergent or the like. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention is a glass substrate for FPD (flat panel display), such as various organic EL (electroluminescence) glass substrates, and a glass substrate PDP (plasma display) for LCD (liquid crystal display), which has a life function of IT information electronic component equipment. In addition to a conventional method for manufacturing a laminated protective sheet for glass substrates, a conventional processing method for glass substrates, and a glass substrate for panels), a cleaning method with ultrasonic vibration added to each work holder, and hydrogen fluoride It is an etching method with ultrasonic vibration and a hot-air drying method with ultrasonic vibration that uses an acid solution. Also, it is extremely dangerous for the liquid agent to be handled as a poison. .

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Japanese Patent Application No. 11-193858. “Filing date” 1999.7.8 “Title of Invention” A method for forming a surface fine texture structure at low temperature and a substrate having the structure. Japanese Patent No. 3184888. “Filing date” 1999.11.10 “Title of Invention” Crystal plane anisotropic dry etching method. Japanese Patent No. 3080860. “Filing date” 1995.5.30 “Title of Invention” Dry etching method. Japanese Patent Application No. 2000-155696. “Application Date” 2000.5.26 “Title of Invention” A spray-type wet etching method with an improved etching factor. Japanese Patent No. 3247424 “Title of Invention” A gas etching method for a Group III-V compound semiconductor. Patent No. 3184888 “Title of Invention” Directional dry etching method Japanese Patent Application No. 2000-155696. “Filing date” 2000.5.26 “Title of Invention” Spray type wet etching method with improved etching factor. Japanese Patent Application No. 11-272565. “Filing date” 1999.9.27 “Title of Invention” A quartz glass etching mask and a quartz glass etching method. Japanese Patent Application No. 9-337868. “Filing date” 1997.11. “Title of Invention” A method and apparatus for etching a semiconductor wafer. Japanese Patent Application No. 7-228950. “Filing date” 1995.9.6 “Title of Invention” A method for anisotropic etching of a single crystal semiconductor. Japanese Patent Application No. 7-109114. “Filing date” 1995.4.11 “Title of Invention” Etching method and apparatus. Japanese Patent Application No. 5-341313. “Filing date” 1993. 12.9 “Title of Invention” A method of etching a silicon single crystal substrate.
As described above, as a conventional technique related to the invention for which a patent is sought, the present invention is the present invention 1.2.3.4. There were no similar items in the category.
As the technology, in each cleaning process, etching process, drying process, and ultrasonic vibrator added to it, ultrasonic vibration is transmitted to an etching solution tank, a box made of a wafer and a glass substrate or the package case itself to be stored. In most cases, the size of the ultrasonic transducer was appropriately set according to the frequency.
There are a lot of etching solutions, and the concentration / surfactant mixture, the ratio of this mixture, etc. are shown. .
Conventionally, the industry related to this case was an industry that cannot be handled by general small and medium-sized enterprises. It is too expensive for capital investment, and it is difficult for large enterprises to compete.
Therefore, in this case, the etching process is particularly performed with an etching solution that is very dangerous to handle because a liquid medicine mainly composed of a hydrofluoric acid solution is designated as a legally toxic substance.
Based on the notification of administrative guidance, we provide technical support to the world and try to make it available to general SMEs for anyone, and invented the invention up to claim 4.

1. In the present invention, there are two methods for processing the surface of a glass substrate: a physical method and a chemical method. Physical methods include a spraying process by shot blasting and a chemical method by fluorination by solution immersion. This is processing using an etchant mainly composed of a hydrogen acid solution or the like, and this case is both of them. However, recently, quality improvement as shown below is required.
2. Surface scratches on the raw glass substrate are eliminated. Insufficient flatness of mechanical polishing, which is a pre-processing, cracks, surface scratches, residual polishing patterns, and limitations on polishing ability may be unavoidable.
3. Laminated sheet material PV / PVC / PET / YUPO sheet, PET with fine adhesion, sheet, PET separate, etc., quality by the sheet, scratches, dents, peeling, curling, breakage, cuts, etc. Bugs.
4. A nitrogen gas bubble generating device is provided at the bottom of an etching solution tank that stores hydrofluoric acid as a main component on a glass substrate and the etching solution is stored in the etching solution by bubbles generated from the nitrogen gas bubble generating device. There was a deficiency in the fresh blend mixture that kept the average.
5. An attempt is made to achieve uniform processing of the glass substrate surface by blending and mixing the processing liquid with the bottom of the etching solution tank and nitrogen gas rising bubbles, but after the rising bubbles and the processing liquid reach the liquid surface Since the descending flow hinders the uniformity of the ascending flow, the surface may not be processed uniformly.
6. Conventionally, the processing method of the glass substrate was that the liquid generated from the ultrapure water production apparatus was washed away from the shower form and circulated downward, but the residue such as foreign matters still remained without being washed.
7. Because the liquid used for hydrofluoric acid and surfactant is legally toxic, it is very dangerous to handle. .

1. As shown in FIG. 02, which is a die that has been subjected to trimming and punching on a laminated (laminated) sheet, [FIG. 02] shows a laminated capacity to be trimmed and punched. -3] is formed by forming a step of the cutting blade, removing the outer periphery, punching a hole in the middle, and punching and stacking a figure that is a repeat of window punching, etc. FIG.
The composition of the synthetic resin sheet is as follows: (1)-This material-(PV / PVC / PET / YUPO etc. sheet), (2)-PET material etc./sheet, (3)-PET separate etc. sheet (33) -A protective sheet (masking sheet) is provided, and a laminated sheet is assembled by performing rubber roller pressing on the upper surface or both surfaces of the glass substrate. (35)-laminated sheet for glass substrate [FIG. 14].
However, it is [Figure-05], [Figure-10], and [Figure-12] that it is hard to remove some areas during these steps.
2. Consisting of the previous item (1) (35)-For removing, scattering, and preventing re-adhesion (prevention of spatter) consisting of removing impurities, oils, and impurities due to electrification to the glass substrate laminate sheet. (43) -Ultrasonic vibrator and holder, (44) -Glass substrate holding jig [Figure-27], [Figure-28], [Figure-29] -15] and [FIG. 16] are diagrams showing the use of (76a) -the hot water cleaning method in which the ultrasonic vibration is operated while being continuously transported using the automatic transport device set, and the ultrasonic vibration This is a hot air drying method.
Conventionally, in this respect, some of them are processed at once while they are in the storage case, and they are also stacked and stored too much, so that the solution does not reach the whole workpiece to be processed, There was a spot or pattern on the processing surface, and there was a problem later, and there was also a function of ultrasonic vibration in the etching solution tank, but this is for etching the storage case However, the present invention is a partially processed area as shown in (35) -laminated glass substrate laminated sheet (28) -empty window [FIG. 16] (01)- Laminated sheet material-(PV / PVC / PET / YUPO etc. sheet), (02)-PET, etc. with slight adhesion, (03)-PET separate, etc.-The area where the sheet has been left off is this case (28)- Empty window, part of It is a place for the etching process to.
In the present invention, the laminated (laminated) sheet is also a laminated protective sheet that makes use of the adhesive force, and these are sequentially conveyed for each workpiece (43) -This is incorporated in the ultrasonic vibrator and holder, (44)-The glass substrate holding jig is a method provided with an ultrasonic vibration function using this for automatic holding for conveyance. Above all, as part of anti-sputtering measures, these (35) -glass substrate laminated sheets are an etching processing method provided by applying ultrasonic vibration.
3. As a second re-adhesion prevention measure, the (35) glass substrate laminate sheet consisting of the previous item (2) is dissolved during the etching process using a hydrofluoric acid solution or the like which is a chemical surface treatment method. In order to prevent re-deposition of reaction products such as substances and fluorides on the glass substrate surface, and anionic surfactants and amine-based amphoteric surfactants, reaction products such as fluoride are It is a surfactant that serves as a method for injecting additives for preventing re-deposition during etching of the substrate.
Use this to add to prevent re-adhesion to the surface, but remove the chemical processing liquid to be used together sequentially from the chemical processing liquid solution tank (including precipitates). Through this, nitrogen gas is mixed while forcibly stirring, and a new high-concentration chemical processing liquid can be continuously supplied. The chemical processing liquid is applied to the processing surface of the glass substrate. The chemical processing apparatus can be provided by using a chemical processing method that continuously generates fine bubbles such as nitrogen gas from the bottom of the processing liquid while generating a substantially parallel liquid flow. The surface roughness becomes even more uniform, leading to shortening of the processing time and further improving the flatness.
4, [Fig. 20] shows a general cross-sectional view of the entire glass substrate etching solution tank apparatus, and (72) -etching solution is automatically poured and inserted into the etching process (74) -etching solution tank And (62) -surfactant-A / B is also automatically injected into a mixed solution using automatic measurement.
Separately (59) using nitrogen gas (58) as described in [FIG. 19] (60) through the bubble pipeline by the bubble generator (74) as shown in [FIG. 20] In the etching solution tank, (72)-Microbubbles such as nitrogen gas are generated from the bottom of the etching solution under the processing solution, and this is repeatedly given (62)-Interfacial activator-A / B is melt-mixed Forcibly (55)-Stirring from both sides where the stirrer is provided (59)-Nitrogen gas mixed in (35)-Get liquid flow of the solution to the glass substrate laminate sheet The etching effect is adapted to the surface.
In this case, it is always possible to provide a new chemical working fluid as a specification condition and to generate a liquid flow thereof, and it is possible to continuously supply a freshly-concentrated one containing fine bubbles by nitrogen gas. .
5. Etching chemical processing method of glass substrate which is a wet method, a glass substrate is immersed in a chemical processing solution, part of trimming / blank shape constituting the surface of this glass substrate, or all, part or all of both sides The chemical working fluid contains an inorganic acid selected from hydrochloric acid, sulfuric acid, phosphoric acid, and nitric acid. It contains an ionic surfactant.
6. The automatic device that has both etching process, cleaning process and drying process shows the skeleton of the main body frame as shown in [Fig.-21], [Fig.-22], and [Fig.-23]. Various devices and instruments, measuring instruments, various solenoid valves, and various gas cylinders are externally attached. Etching was performed as a separate device shown in this figure [Fig. 23]. A function is provided for storing a package case for a substrate in (1), 2F, and 3F.

1. As an effect of providing a laminated sheet having different sheets as shown in [FIG. 01] for etching processing, the conventional (35) glass shatter blasting process is performed after the manufacturing process of the glass substrate laminated sheet. However, this is no longer necessary, and as an effect of this case, it is possible to control and control the roughness of the surface etched, and it is possible to control and control equipment that has functions that operate on each device. These input operations are made possible by manual data input from inside and outside, and as shown in [Fig. 23], (98) in the processing area ( 72)-To avoid as much as possible against the erosion damage related to chemicals caused by etching solution etc. (100)-During wireless control (78)-Radio interference caused by operating from the central radio control sensor (76)-Electric control by various (80)-Lifting lift-1/2 etc. Measures are in place.
Therefore, an automatic device that processes in a safe box as shown in [Fig.
2. (28)-Trimming related to the shape to be etched, which consists of using (18)-Etching half-cut punching die as shown in [Fig.-02] and [Fig.-03] in order to provide an empty window Free graphics and free graphics to be punched can be selected.
3. As shown in [Fig.-09], (28)-A state of providing an empty window for etching, (24) -After pressing the pressure roller A, as shown in [Fig.-10] (28)-An empty window.
4, (35)-during the conveyance of the glass substrate laminate sheet, and from protective measures due to scratches, dents, breakage, etc. (23) shown in [Figure 13]-(30)-provided on the upper surface of the glass substrate- (35) -Laminated glass substrate sheet.
5. It can clean even fine parts, and it has the effect of preventing re-adhesion and shortens the processing time, satisfying ultrasonic vibration. (43)-Ultrasonic vibrator and holder, and (44)-Glass substrate holding [Fig. 27], [Fig. 28], [Fig. 29] shown in FIG. 27, and [Fig. 15], [Fig. 16], and [Fig. [Fig. 17] and [Fig. 18] are the hot air drying functions.
6, (35)-In the conveyance of the glass substrate laminated sheet, there is a case where holding is impossible from different products, which is provided to cause scratches, damage, dent marks, cuts on the sheet, etc. 43)-Ultrasonic vibrator and holder, and (44) -Glass substrate holding jig are prepared, and an ultrasonic vibration mechanism is used in order to prepare an object for holding a workpiece indirectly [Fig. 27], [ FIG. 28] and [FIG. 29] are shown, and these are provided to transport the (35) -glass substrate laminated sheet by etching.
As a result, it was possible to etch even fine details, prevent re-adhesion, and shorten the processing time. The frequency of ultrasonic vibration could also be utilized from control control.
7. From surfactant, (62) -surfactant-A / B is shown (described in [Fig.-27]), because there are two different solution mixing automatic containers, The ratio can be controlled by external input, and the liquid mixture mixed with the surfactant can be simultaneously injected into the (74) -etching solution tank.
In addition, since it is a wet system, various conditions can be changed while looking at the etching processing effect poured into the etching processing solution, so that it is possible to test mixing of test solutions and mass production processing (62) -Surfactant-activator-A / B.
8, 74-As a method of stirring various etching chemicals used in an etching solution tank, (59)-Nitrogen gas was supplied and (58)-consisting of a bubble generating device (55)-stirring device This is the result of a separate method of use.
9. Since it is a device that can change the mixture of (72) -etching solution, which is a liquid agent, to perform processing with the quality of the glass substrate changed, hydrofluoric acid is the main ingredient as the chemical processing liquid It is possible to contain an anionic surfactant by containing an inorganic acid selected from hydrochloric acid, sulfuric acid, phosphoric acid and nitric acid.
10. The mass production function of glass substrates is enhanced, and the sequential processing with repeatability to make multiple sheets at the same time will lead to the next step. It was a work that had been taken out.
This case recognizes that it is dangerous and impossible to take out by hand, and also removes a little space between the board and uses the BOX to store it. The actual situation was that after several tens of minutes, the substrate was taken out and moved to a separate room and washed.
In the present invention, the time passed through the washing process, the etching process, and the drying process is about one minute, and the process is completed.In the etching process, the time for immersion is calculated based on 30 minutes through one sheet. The present invention is equivalent to 45 to 50 seconds per sheet, and is an effect that a mass production plan can be made.

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1. Some of the contents invented in this case consisted of some parts, but all of them are expensive and time-consuming and sometimes far from being implemented. However, in the present case, the contents, features, etc., which have led to the invention to solve these problems, are described below.
2. First, the present invention has two methods for processing the surface of a glass substrate: a physical method and a chemical method. This is a problem that requires further study of the former, such as a process of spraying from shot blasting, which is a process using an etchant, which mainly uses a soaking hydrofluoric acid solution.
This is because the shot blasting process may be caused by spraying powder powder, which may cause the protection sheet to sag during processing, and the spraying spots are more present than before. In the future, the processing surface is considered to be processed in micron units.
3. In the past, there was a place to process as a processing method with an etching solution and a place with a protective sheet, but this case is described because it also corresponds to the contents taking into account the processing by shot blasting It is characterized by (35)-a glass substrate laminate sheet (Fig. 14), which is a glass substrate laminate sheet assembled by laminating a roller sheet on the upper surface or both surfaces of the glass substrate. The posture can be used as a processing method, and processing by shot blasting can also be handled.
4. In the present invention, the laminated (laminated) sheets are also referred to as laminated protective sheets that make use of the adhesive force, and these are sequentially conveyed for each workpiece (43 -This is incorporated into the ultrasonic vibrator and holder, (44)-The glass substrate holding jig is a method provided with an ultrasonic vibration function using this for automatic holding for conveyance. Above all, as a part of anti-sputtering measures, these (35) -glass substrate laminate sheets are provided by indirectly applying ultrasonic vibration to the etching processing method.
In addition, (35) in the etching process using a hydrofluoric acid solution or the like which is a chemical surface treatment method for the glass substrate laminate sheet, sequentially from a solution tank of chemical processing liquids such as dissolved substances and fluorides It can be continuously removed and passed through a filter (including precipitates), mixed with nitrogen gas while forcibly stirring it, and continuously supplied with fresh, high-concentration chemical processing liquid. Combined with chemical processing, chemical processing liquid continuously generates fine bubbles such as nitrogen gas from the bottom of the processing liquid while generating a liquid flow substantially parallel to the processing surface of the glass substrate By providing the chemical processing apparatus, the surface roughness becomes more uniform, the processing time can be shortened, and the flatness can be further improved.
5. The present invention, shown in [FIG. 20], shows a general cross-sectional view of the entire glass substrate etching solution tank, and is etched (74) -etching solution tank with (72) -etching solution It is made to flow and insert automatically, and is automatically injected into a mixed solution using automatic measurement, consisting of two containers of (62) -surfactant-A / B, separately (59) -using nitrogen gas, As shown in [Fig. 19] (58)-By the bubble generating device, (60)-Through the bubble pipeline, as shown in [Fig. 20] (74)-In the etching solution tank (72 )-Microbubbles such as nitrogen gas are generated from the bottom of the etching solution under the processing solution and repeatedly given to this (62)-Interfacial activator-A / B is forcibly mixed, (55)-Stirrer From both sides where 9) - it is stirred while mixing nitrogen gas addition, (35) - A glass substrate laminated sheet, in which the etching effect tailored to its surface to receive the liquid flow of the solution.
In this case, it is always possible to provide a new chemical working fluid as a specification condition and to generate a liquid flow thereof, and those containing fine bubbles by nitrogen gas can be continuously supplied with a fresh concentration. It is a factor.
6. The automatic device that has both etching process, cleaning process and drying process shows the skeleton of the main body frame as shown in [Fig.-21], [Fig.-22], and [Fig.-23]. Various devices and instruments, measuring instruments, various solenoid valves, and various gas cylinders are externally attached. Etching was performed as a separate device shown in this figure [Fig. 23]. Something (99) for stocking (97)-A function to store the package case for the board in 1F, 2F, and 3F is provided. As shown in [Fig.-27], the operation and operation by electric control and their numbers are added in sequence, and (96) -the operation is started by operating from the central control BOX, which will be described below.
No-01-Start-(Start)
No-02-Movement process- (First chamber-Work movement)
No-03-Washing process- (102-No. 2 chamber NO-1 hot water shower washing)
No-04-cleaning process- (103-second chamber NO-2 warm water shower sink)
No-05-Drying process- (104-No. 2 room NO-1 warm air shower)
No-06-Drying process- (105-No. 2 room NO-2 warm air shower)
No-07-Movement process-(Work movement)
No-08-Etching process- (4th chamber-dipping operation)
No-09-Etching process- (5th chamber-immersion raising operation)
No-10-Movement process- (Workpiece movement)
No-11-Cleaning step-(106-6th chamber NO-1 hot water shower cleaning)
No-12-cleaning process- (107-sixth chamber NO-2 warm water shower sink)
No-13-Drying process- (108-No.6 room NO-1 warm air shower)
No-14-drying process-(109-6th chamber NO-2 warm air shower)
No-15-Movement process-(6th chamber-Work movement)
No-16-moving process-(80-lift lift -1/2)
No-17-Transfer process- (99-stock)
The above is the basis of operation, and the operation of solenoid valves, valve opening and closing, etc., expanding from this number, and transmission / reception signals from instruments, measuring instruments, devices, etc. (96)-from central control BOX (100)-wireless It is a program control that operates and operates through the control rule repeater.

It is a system diagram which shows lamination sheet * laminate manufacture. It is a perspective view which shows the whole metal mold | die for an etching and half cut punching. It is sectional drawing to which the cutting edge level | step difference of the metal mold | die for an etching and half cut punching was expanded. It is sectional drawing to which the cutting edge level | step difference which extracted the metal mold | die for an etching and half cut punching was expanded. It is a cross-sectional view showing a state where only a part of the extracted laminated sheet material has been peeled off.- It is expanded sectional drawing which shows a mode that the board | substrate and plate for glass are stuck. It is sectional drawing which shows the figure which has applied the pressurizing roller (A pressurization). FIG. 6 is an enlarged cross-sectional view showing details of sheet sinking by applying a pressure roller. It is a perspective view which shows the press roller situation as a whole. It is sectional drawing which shows the condition which has peeled a part of laminated sheet. It is sectional drawing which shows the condition which peeled off and left some laminated sheets. It is sectional drawing which shows the condition which peeled and left the outline contour part which is a part of laminated sheet. It is sectional drawing which shows the press roller of a lamination sheet and a protection sheet. It is a perspective view which shows the completed condition of a glass substrate lamination sheet. It is a front view which shows the warm water shower washing | cleaning liquid injection condition from a washing | cleaning process. It is a left view which shows warm water shower cleaning from a washing | cleaning process. It is a front view which shows the condition which has applied the warm air shower from the drying process. It is a left view which shows a warm air shower condition from a drying process. It is a top view which shows the etching solution tank for glass substrates, and the upper surface of an apparatus. It is sectional drawing which shows the etching solution tank for glass substrates, and the whole apparatus front. It is a top view which shows the whole automatic apparatus, arrangement | positioning, etc. It is a front view which shows the whole automatic apparatus, arrangement | positioning, etc. It is a right view which shows the whole automatic apparatus, arrangement | positioning, etc. It is a front view which shows the package case for substrates used for conveyance of an automatic apparatus. It is a right view which shows the package case for substrates used for conveyance of an automatic apparatus. It is a top view which shows the package case for substrates used for conveyance of an automatic apparatus. It is a top view which shows the combination of a glass substrate to an ultrasonic transducer | vibrator and a holder. It is a right view which shows a glass substrate combined with an ultrasonic transducer | vibrator and a holder. It is a front view which shows the combination of a glass substrate to an ultrasonic transducer | vibrator and a holder. It is a top view which shows the whole automatic apparatus, arrangement | positioning, etc. It is a front view which shows the whole automatic apparatus, arrangement | positioning, etc.

Explanation of symbols

01-Laminated sheet material-(PV / PVC / PET / YUPO sheet)
02-PET with slight adhesion, sheet 03-PET separate, etc.-sheet 04-A-PET sheet winding drive roller 05-B-PET sheet winding drive roller 06-A-separate roller 07-separate roller 08-With slight adhesive 09-With adhesive 10-A-Feeding roller 11-B-Feeding roller 12-Presser roller a
13-Presser roller b
14-A-crimp driving roller 15-B-crimp driving roller 16-laminated sheet / length cut 17-laminated sheet / laminate material 18-etching half-cut punching die 19-positioning cutting hole 20-trimming & Blank cutting blade 21-Cutting step 22-(03) Partially peeled off 23-Glass substrate 24-Pressure roller A pressurization 25-Shaded area-(03) partial space 26-Spring 27-Positioning with cushion Pin 28-Empty window 29-Disposal 30-Protection sheet 31-Slight adhesive 32-Engagement roller 33-Pressure roller B pressurization 34-Cut 35-Glass substrate laminated sheet 36-Gas pressure gauge 37-Air line 38-Air supply 39-Valve switch 40-Hot water shower cleaning liquid 41-Liquid volume / pressure gauge 42-Liquid flow line 43-Ultrasonic vibrator and holder 4-Glass substrate holding jig 45-Nozzle holder 46-Nozzle with wide angle adjustment 47-Hot air line 48-Hot air pressure gauge 49-Valve switch 50-Air nozzle holder 51-Air nozzle with wide angle adjustment 52-Water absorption Pump 53-Emergency lamp 54-Heater 55-Stirrer 56-Filter 57-Bubble outlet 58-Bubble generator 59-Nitrogen gas 60-Bubble pipeline 61-Ion resin exchange device 62-Interfacial activator-A / B
63-ion gas pressure gauge 64-nitrogen pressure gauge 65-nitrogen gas cylinder 66-nitrogen gas bubble 67-drain a-neutralization 68-drain b-neutralization 69-floor 70-neutralization tank 71-precipitation tank 72-etching solution 73-heat-resistant plate 74-etching solution tank 75-automatic fire extinguisher sensor 76a-automatic transfer device set
76b-set
76c-set
76d-set
76e-set
76f-set
77-deodorizing device 78-central radio control sensor 79-workbench 80-lift lift 1/2
81-Hot air drying 82-Elevating lift-3-
83-LP gas 84-water supply / drainage pump 1/2/3/4
85-lift lift-3-
86-roller movement 87-a frame division 88-b frame division 89-c frame division 90-d frame division 91-e frame division 92-lift lift-4
93-Ultrasonic vibration transmitter 94-Water heater 95-R / Compressor 96-Central control BOX
97-Board package case 98-Processing area 99-Stock 100-Radio control rule repeater 101-Ultrapure water production apparatus 102-Second chamber NO-1 warm water shower cleaning 103-Second chamber NO-2 warm water shower sink 104 -2nd chamber NO-1 warm air shower 105-2nd chamber NO-2 warm air shower 106-6th chamber NO-1 warm water shower wash 107-6th chamber NO-2 warm water shower sink 108-6th chamber NO- 1 warm air shower 109-6th chamber NO-2 warm air shower 110-ozone device

Claims (4)

(01) -Laminated sheet material (PV / PVC / PET / YUPO sheet), (02) -PET with slight adhesion, which is a punched trimmed blanked and blanked synthetic resin sheet in an etched die Etc. ・ Sheet, (03) -PET separate etc. ・ Sheet is subjected to pressure roller processing, (17) -Laminated sheet and laminate material, (23) -Glass substrate and (30) -Protective sheet or masking sheet, etc. (23)-(35) -Glass substrate laminated sheet shown in FIG. 14 consisting of (33) -pressurizing roller B pressurization on the upper surface or both surfaces of the glass substrate. (35) comprising the glass substrate laminated sheet according to claim 1 (43)-ultrasonic vibrator and holder, and (44)-ultrasonic vibration (frequency in the glass substrate holding jig) when conveying the glass substrate laminated sheet -120KHz internal control) is installed and provided, and as a shower form that becomes separately heated hot water, a water jet spray shower cleaning and flowing method and a hot air drying method. (35)-Prevention of re-adhesion of a substance that has become a dissolved substance in an etching process that uses a chemical surface treatment method to erode a liquid chemical containing a hydrofluoric acid solution as a main ingredient on a glass substrate laminate sheet surface In addition, the etching processing method according to claim 1 and claim 2, wherein an ultrasonic vibration that makes the surface roughness uniform, which is a finished state of the etched surface, is provided. (35) An automatic apparatus according to claim 2 and claim 3, wherein the glass substrate laminate sheet is provided with a process cycle program operation such as a cleaning process, a drying process, and an etching process.

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