JP2005191553A - Work levitation device - Google Patents

Abstract

An object of the present invention is to suppress consumption of a pressure fluid derived for floating a workpiece and to float and hold the workpiece in a stable state.
A pressure fluid is introduced into a communication chamber of a body through a pipe connected to a supply port, and the pressure fluid is attached to an end face of the body and is made of a porous body. To the work 18 through Therefore, the workpiece 18 is held in a state where it floats upward by the pressure fluid led out toward the workpiece 18 and the pressure fluid flowing between the workpiece 18 and the plate member 34.
[Selection] Figure 4

Description

  The present invention relates to a workpiece floating apparatus capable of holding and conveying a thin plate-shaped workpiece while floating in the air.

  Conventionally, for example, when a thin plate-like workpiece such as a liquid crystal glass substrate or a semiconductor wafer used in a liquid crystal display device is transported, a floating device that floats and holds the workpiece with a fluid has been used. After the work is levitated by this levitation device, the work is moved in a non-contact state with other objects.

  When transporting such a thin plate-like workpiece such as a liquid crystal glass substrate or a semiconductor wafer, a levitation device having a porous body having a plurality of holes is used, and air is ejected from the porous body toward the workpiece. The workpiece is lifted and held upward by a predetermined amount by the air jet power. Then, by transporting the work to a desired position in a state where the work is levitated by the levitation device, the work is brought into a non-contact state with other objects to protect the work from dust (for example, patent document) 1).

  Moreover, when conveying such a workpiece | work, in order to avoid that dust etc. adhere to the surface of a workpiece | work, conveyance in a clean room is performed. In the clean room, by generating an air flow from the upper side to the lower side of the worker who performs the work, the dust generated by the worker is prevented from adhering to a work such as a glass substrate or a semiconductor wafer. .

JP 2000-62950 A

  By the way, in the prior art according to the above-mentioned Patent Document 1, depending on the shape and weight of the work that is levitated and held in the air, while increasing the number of porous bodies for ejecting air toward the work, It is necessary to increase the flow rate of air ejected from the porous body. Therefore, there is a problem in that the amount of air that is supplied to the levitation device and ejected to levitate the workpiece by the levitation device increases, and the cost increases accordingly.

  Further, by increasing the flow rate of the air ejected from the porous body, the flow of the air flow generated in the clean room under the influence of the air flowing toward the workpiece is disturbed, and dust generated from the worker There is a concern that it will adhere to.

  Further, in such a levitation device, since the workpiece is generally a thin plate, it is required that the workpiece is not distorted or bent when the workpiece is lifted and held upward. However, since the work is given an air jet force only above and in the vicinity of the plurality of porous bodies, for example, when the surface area of the work to be levitated by air is large, it is adjacent to the porous body. The distance between the porous body and the other porous body increases, and the area where the jet power is not applied between the porous bodies in the workpiece increases. For this reason, there is a concern that distortion or deflection may occur under the action of gravity at a portion where no jet power is applied to the workpiece.

  The present invention has been made in view of the above-described various problems and the like, and it is possible to suppress consumption of the pressure fluid derived for floating the work and to hold the work in a stable state. An object of the present invention is to provide a work floating device.

In order to achieve the above object, the present invention provides a workpiece floating apparatus that presses a workpiece with a pressure fluid and floats and holds the workpiece in the air.
A main body having an opening to which the pressure fluid is supplied and which opens toward the workpiece;
A fluid derivation member made of a porous body, which is provided so as to close the opening of the main body, and allows the pressure fluid supplied to the main body to pass through and lead out toward the workpiece;
It is provided on a holding surface facing the workpiece in the main body, and exists between the holding surface and the workpiece by suppressing the flow rate of the pressure fluid flowing between the holding surface and the workpiece. A flow rate suppression unit for increasing the pressure of the pressure fluid;
It is characterized by providing.

  According to the present invention, by providing the flow rate suppressing portion on the holding surface facing the workpiece of the body, the pressure fluid (for example, positive pressure compressed air) derived from the fluid deriving member toward the workpiece is When flowing between the holding surface, the flow rate of the pressure fluid discharged into the atmosphere by the flow rate suppressing unit is reduced, and the pressure fluid is sequentially introduced between the workpiece and the holding surface via the fluid outlet member. By being supplied, the pressure drop of the pressure fluid between the workpiece and the holding surface is suppressed.

  Therefore, the desired pressing force against the workpiece can be obtained even with a small flow rate of the pressure fluid, and the workpiece can be lifted and held, so that the amount of pressure fluid supplied when the workpiece is lifted and held in the air is suppressed. Accordingly, consumption of the pressure fluid can be reduced.

  In addition, by setting the flow rate suppressing portion as the flow path resistance of the pressure fluid that flows between the holding surface and the workpiece, the pressure fluid between the holding surface and the workpiece flows through the flow path resistance. As a result, the flow rate is reduced, and the pressure drop of the pressure fluid can be suppressed. Therefore, the pressure of the pressure fluid existing between the holding surface and the workpiece can be relatively increased as compared with the case where the flow rate suppressing unit is not provided. In other words, when the flow rate suppressing unit is not provided, the pressure fluid flowing between the workpiece and the holding surface is discharged into the atmosphere, whereby the pressure of the pressure fluid is reduced, but the flow rate suppressing unit is provided. Thus, a decrease in the pressure fluid pressure can be suppressed. As a result, a pressing force can be suitably applied to the workpiece, and the workpiece can be stably held.

  Furthermore, it is preferable that the flow rate suppressing portion is a groove portion that is recessed in the holding surface in a direction away from the workpiece facing the holding surface.

  Furthermore, the groove portion may be a plurality of annular grooves whose diameter is increased in a direction away from the fluid outlet member.

  Furthermore, it is preferable that the plurality of annular grooves be formed at predetermined intervals in the radial direction.

  Moreover, it is good to make a flow volume suppression part into the uneven | corrugated | grooved part by which the surface which opposes a workpiece | work on the holding surface was formed in uneven | corrugated shape.

  As a result, when the pressure fluid derived through the fluid deriving member flows between the holding surface of the main body portion and the workpiece, a part of the pressure fluid is removed from the inside of the concave portion in the plurality of grooves or uneven portions. Can be allowed to flow into. Therefore, the flow rate of the pressure fluid discharged from the space between the workpiece and the holding surface to the atmosphere can be reduced by a plurality of grooves or uneven portions, and the pressure fluid pressure existing between the workpiece and the holding surface can be reduced. The decrease can be suppressed.

  Furthermore, by providing the surface of the fluid outlet member that faces the workpiece so as to be substantially flush with the holding surface, in addition to the fluid outlet member, the surface of the fluid outlet member is also pressed by the pressure fluid above the holding surface. Can hold the workpiece. Accordingly, since it is possible to hold the thin plate-like workpiece over a wide range, the workpiece is not distorted or bent under the action of gravity, and the workpiece is stably held in a state substantially parallel to the holding surface. be able to.

  Furthermore, a plurality of fluid derivation members are provided at a predetermined interval in the main body, and a plurality of fluid derivation members are provided at a predetermined interval by providing the surface facing the work so as to be substantially flush with the holding surface. In addition to above the fluid outlet member, the workpiece can be held under the pressing action of the pressure fluid also above the holding surface. Accordingly, since it is possible to hold a thin plate-shaped workpiece having a large surface area over a wide range, there is no distortion or bending of the workpiece under the action of gravity, and the workpiece can be stabilized in a state substantially parallel to the holding surface. Can be held.

  Furthermore, by arranging the fluid outlet member in a straight line along the longitudinal direction of the main body portion, it is possible to suitably apply a pressing force to a long workpiece, and the workpiece is led to a plurality of fluid outlets. It becomes possible to hold stably through the member.

  Further, the surface area of the fluid lead-out member can be further increased by arranging the one fluid lead-out member and the other fluid lead-out member in a straight line along the longitudinal direction of the main body and substantially in parallel. A pressing force can be suitably applied to a large workpiece, and the workpiece can be stably held via a plurality of fluid outlet members.

  According to the present invention, the following effects can be obtained.

  That is, by providing a flow rate suppressing portion on the holding surface of the main body, the flow rate of the pressure fluid flowing between the workpiece and the holding surface and discharged into the atmosphere is reduced, and the flow between the workpiece and the holding surface is reduced. The pressure drop of the pressure fluid is suppressed. Therefore, a desired pressing force against the workpiece can be obtained even with a small flow rate of the pressure fluid, and the supply amount of the pressure fluid for floating and holding the workpiece in the air can be suppressed. Can be reduced.

  A preferred embodiment of a workpiece floating apparatus according to the present invention will be described below and described in detail with reference to the accompanying drawings.

  In FIG. 1, reference numeral 10 indicates a workpiece transfer system to which a workpiece floating device 12 (hereinafter simply referred to as a floating device 12) according to an embodiment of the present invention is applied.

  The workpiece transfer system 10 includes a set of guide rails 14a and 14b provided on a straight line substantially in parallel, a slide mechanism 16 that is displaced in the axial direction along the guide rails 14a and 14b, and an upper surface of the slide mechanism 16. And a plurality of floating devices 12 that float and hold a thin plate-like workpiece 18 (for example, a liquid crystal glass substrate).

  The pair of guide rails 14a and 14b are provided in parallel at a predetermined interval, and a slide mechanism 16 is engaged with the upper portions of the guide rails 14a and 14b. The slide mechanism 16 connects a set of guide blocks 20a, 20b engaged on the respective guide rails 14a, 14b and the set of guide blocks 20a, 20b, and is a plate-like table provided substantially horizontally. Part 22.

  The guide blocks 20a and 20b are formed in a substantially U-shaped cross section, and a recess 24 that is recessed by a predetermined depth is engaged with the upper portions of the guide rails 14a and 14b. In other words, the table portion 22 connected to the pair of guide blocks 20a and 20b is integrated with the guide blocks 20a and 20b and the guide rails 14a and 14b integrally with the guide blocks 20a and 20b under a driving action by a conveying device (not shown) connected to the slide mechanism 16. Displacement along

  In addition, a plurality of (for example, six) levitation devices 12 are mounted on the upper surface of the table portion 22 at a predetermined distance from each other and substantially in parallel.

  As shown in FIGS. 3 and 4, the levitation device 12 includes a body 28 to which a pressurized fluid (for example, positive compressed air) is supplied through a supply port 26, and an opening of the body 28. 30 includes a fluid outlet member 32 provided so as to close 30, and a plate member 34 that holds the fluid outlet member 32 between the body 28. The body 28 and the plate member 34 are integrally connected to function as a main body.

  The body 28 is formed in a bottomed cylindrical shape, and as shown in FIG. 4, a supply port 26 communicating with the communication chamber 36 inside the body 28 is formed on the side portion thereof. A pipe 38 connected to a pressure fluid supply source (not shown) is connected via a connection plug 40. That is, a pressure fluid supplied from a pressure fluid supply source (not shown) is introduced from the supply port 26 into the communication chamber 36 of the body 28 through the pipe 38.

  Further, on the upper side of the body 28 to which the plate member 34 is mounted, the convex portion 42 is formed so as to be reduced in diameter in the radial direction, and the opening 30 is formed at the end of the convex portion 42. However, it communicates with the communication chamber 36. A seal member 44 is attached to the end surface of the convex portion 42 on the outer peripheral side of the opening 30 via an annular groove.

  Further, on the lower side of the body 28, a bolt hole 46 penetrates along the axial direction of the body 28 with a predetermined spacing in the radial direction from the communication chamber 36, and the table portion 22 passes through the bottom surface of the body 28. (See FIG. 2).

  The fluid lead-out member 32 is formed of a porous material such as a thin plate-shaped breathable ceramics or sintered material having a substantially circular shape, and is disposed on the end face of the convex portion 42 of the body 28. Then, the upper side of the fluid outlet member 32 is inserted into a hole 50 (described later) of the plate member 34, and a flange portion 48 whose diameter is increased radially outward is formed on the lower side of the fluid outlet member 32.

  The plurality of pores formed in the fluid lead-out member 32 have an inner diameter of about 100 μm or more. The material of the fluid outlet member 32 is not particularly limited as long as it is a porous body having open pores of about 100 μm or more.

  The plate member 34 is formed in a donut shape having a hole portion 50 in the substantially central portion, and when the upper side of the fluid outlet member 32 is inserted into the hole portion 50, the engagement step portion 52 having a diameter larger than that of the hole portion 50. The flange portion 48 is engaged with. At this time, the work holding surface (holding surface) 53 that is the upper surface of the plate member 34 and the upper surface of the fluid outlet member 32 inserted into the hole 50 that faces the work 18 are substantially flush with each other.

  A plurality of annular grooves 55a and 55b are formed on the work holding surface 53 of the plate member 34 at a predetermined distance from the hole 50 of the plate member 34 in the radially outward direction. The number of the annular grooves 55a and 55b is not particularly limited as long as the annular grooves 55a and 55b are formed in an annular shape so as to surround the hole 50 on the work holding surface 53.

  In addition, as shown in FIG. 7, an uneven portion 57 made of minute unevenness may be formed on the surface of the work holding surface 53 instead of the annular grooves 55 a and 55 b of the plate member 34 described above. The concavo-convex portion 57 is formed in a concavo-convex shape by, for example, shot blasting that projects a steel ball at a high speed onto the work holding surface 53.

  As described above, by forming the annular grooves 55a and 55b functioning as the flow rate suppressing portion or the uneven portion 57 on the work holding surface 53 of the plate member 34, the pressure fluid is transferred from the fluid outlet member 32 to the lower surface of the work 18. Derived toward. When the pressure fluid flows radially outward from the center of the plate member 34 via the work 18 and the plate member 34, a part of the pressure fluid is inside the annular grooves 55 a and 55 b. Or flows into the concave portion of the concavo-convex portion 57.

  Therefore, the annular groove 55a, 55b or the concavo-convex portion 57 circulates between the workpiece 18 and the workpiece holding surface 53, and the flow rate of the pressure fluid discharged to the atmosphere is reduced by a predetermined amount and discharged to the atmosphere. The flow rate of the pressurized fluid is reduced.

  Note that the flow rate suppressing portion formed on the workpiece holding surface 53 of the plate member 34 for suppressing the flow rate of the pressure fluid is not limited to the annular grooves 55a and 55b and the uneven portion 57. For example, the flow resistance of the pressure fluid flowing between the workpiece 18 and the plate member 34, such as a protrusion protruding from the workpiece holding surface 53 toward the workpiece 18, is generated between the workpiece 18 and the plate member 34. What is necessary is just to have the throttle function for restrict | squeezing the flow volume of the pressure fluid discharged | emitted to air | atmosphere.

  On the other hand, a concave portion 54 having a diameter larger than that of the engaging step portion 52 is formed on the lower side of the plate member 34, and the convex portion 42 of the body 28 is inserted into the concave portion 54.

  A screw hole 56 is formed in the plate member 34 at a position facing the bolt hole 46 of the body 28. When the convex portion 42 of the body 28 is inserted into the concave portion 54 of the plate member 34, the screw hole 56 is inserted into the bolt hole 46. The connecting bolt 58 to be inserted is screwed into the screw hole 56. The plate member 34 and the body 28 are connected in a state where the fluid outlet member 32 is sandwiched. At this time, the head 58 a of the connecting bolt 58 is preferably stored in the storage hole 60 formed on the lower surface side of the body 28, and thus does not protrude from the lower surface of the body 28.

  Further, when the plate member 34 is mounted on the upper side of the body 28, the seal member 44 maintains the airtightness between the upper surface of the body 28 and the fluid outlet member 32 and the plate member 34. Pressure fluid does not leak to the outside.

  The workpiece transfer system 10 to which the levitation device 12 according to the embodiment of the present invention is applied is basically configured as described above. Next, the operation and effect thereof will be described. Here, for example, a case where a thin plate-like workpiece 18 having a large surface area such as a liquid crystal glass substrate is conveyed will be described.

  First, the pressure fluid is supplied into the communication chamber 36 of the body 28 in each levitation device 12 via a pipe 38 connected to a pressure fluid supply source (not shown). At that time, the pressure fluid supplied to each levitation device 12 is controlled by a controller or the like (not shown) so that the flow rate is uniform.

  Then, the pressure fluid supplied to each levitation device 12 passes through the inside of the fluid deriving member 32 from the first passage surface 62 on the communication chamber 36 side in the fluid deriving member 32 made of a porous body, and the workpiece 18 side The second passage surface 64 leads to the workpiece holding surface 53 side of the plate member 34. At that time, the pressure fluid led out from the second passage surface 64 of the fluid lead-out member 32 is controlled and led out so that the lead-out amount from the entire surface of the second passage surface 64 becomes substantially equal.

  Next, the workpiece 18 is placed substantially horizontally from above the workpiece conveyance system 10 so as to cover the plurality of floating devices 12 via a robot mechanism or the like (not shown) (see FIG. 1).

  The workpiece 18 is pressed with the pressure fluid led upward from the fluid outlet member 32 of the levitation device 12, and after the pressure fluid is pressed against the lower surface of the workpiece 18, the workpiece 18 is pressed. Between the plate member 34 and the work holding surface 53 of the plate member 34 in a radially outward direction and discharged to the atmosphere.

  At this time, since a part of the pressure fluid flows into the annular grooves 55a and 55b, the annular grooves 55a and 55b become flow resistance, so that the air flows through the workpiece 18 and the workpiece holding surface 53 to the atmosphere. The flow rate of the pressure fluid discharged into the air is reduced by a predetermined amount, and the flow rate of the pressure fluid discharged into the atmosphere is reduced.

  On the other hand, the pressure fluid is sequentially supplied from the fluid outlet member 32 between the workpiece 18 and the plate member 34, and the flow rate of the pressure fluid sequentially supplied from the fluid outlet member 32 flows between the workpiece 18 and the plate member 34. More than the flow rate of pressure fluid. Therefore, the pressure fluid is sequentially pushed between the workpiece 18 and the plate member 34, and accordingly, the pressure P1 of the pressure fluid between the workpiece 18 and the plate member 34 increases.

  That is, in the levitation apparatus according to the comparative example, which is a flat surface in which the groove is not provided in the work holding surface 53 of the plate member 34a as shown in FIG. The pressure fluid led in between is discharged to the atmosphere through the space between the workpiece 18 and the workpiece holding surface 53 while being maintained without reducing the flow rate.

  However, in the levitation device according to the comparative example, as the pressure fluid led out from the fluid lead-out member 32 circulates in the radial outward direction of the plate member 34 and the workpiece 18, Since the pressure gradually decreases from the pressure P to become the pressure P2 (P> P2), it is necessary to increase the flow rate of the pressure fluid in order to float and hold the workpiece 18 at a predetermined height.

  On the other hand, in the workpiece floating apparatus 12 according to the present embodiment, as shown in FIG. 5, the inside of the annular grooves 55a and 55b provided on the workpiece holding surface 53, or the uneven portion 57 (see FIG. 7). A part of the pressure fluid is caused to flow into the concave portion in the above, and the flow rate of the pressure fluid discharged into the atmosphere between the workpiece 18 and the workpiece holding surface 53 is reduced. Thereby, the pressure P1 can be increased and the pressure P1 can be maintained substantially equal to the pressure P derived from the fluid deriving member 32 (P1≈P). Therefore, even when the flow rate of the pressure fluid derived from the fluid deriving member 32 is suppressed, the workpiece 18 can be lifted to a predetermined height and can be held substantially parallel to the end surface of the plate member 34.

  At that time, the work 18 is in the air at a position where the surface area and weight of the work 18 that receives the pressure fluid derived from the second passage surface 64 and the pressing force of the pressure fluid that pushes the work 18 upward are balanced. Is held in. As a result, the workpiece 18 is spaced apart from the workpiece holding surface 53 of the plate member 34 by a predetermined length under the pressing action of the pressure fluid derived from the fluid outlet member 32 in the levitation device 12, and the plate member 34. Is held substantially parallel to the workpiece holding surface 53 (see FIG. 2).

  The separation distance between the workpiece 18 held in the air by the pressure fluid and the plate member 34 is the pressure of the pressure fluid led out through the fluid lead-out member 32, the shape and weight of the work 18, and the fluid lead-out member 32. It is set by the inner diameter of the opened pores, the positions and shapes of the annular grooves 55a and 55b, and the like.

  Finally, as shown in FIG. 2, the slide mechanism 16 provided with the levitation device 12 in a state where the workpiece 18 is held above the levitation device 12 under the pressing action of the pressure fluid is transferred to a transport device (not shown). (For example, an actuator) is displaced in the direction of arrow A. As a result, the table portion 22 of the slide mechanism 16 is displaced in the direction of arrow A along the guide rails 14a and 14b via the guide blocks 20a and 20b, and the work 18 is conveyed while being lifted in the air by the slide mechanism 16. be able to. In addition, since the displacement of the workpiece 18 in the substantially horizontal direction is restricted by a stopper mechanism (not shown) provided in the levitation device 12, the levitation device 12 is displaced in the axial direction via the slide mechanism 16. At this time, the workpiece 18 does not deviate from above the floating device 12.

  That is, the workpiece 18 can be conveyed in a non-contact state with the workpiece conveyance system 10 including the levitation device 12, and therefore dust and the like can be prevented from adhering to the workpiece 18.

  Further, after the workpiece 18 is conveyed in the direction of arrow A through the slide mechanism 16 and the conveyance of the workpiece 18 is completed, the slide mechanism 16 is displaced in the opposite direction (in the direction of arrow B) via a conveyance device (not shown). By doing so, the plurality of levitation devices 12 provided in the slide mechanism 16 can be returned to the initial positions again.

  In the above-described embodiment, a plurality of levitation devices 12 are provided on the slide mechanism 16 at a predetermined interval, and the plurality of levitation devices 12 hold a workpiece 18 such as a liquid crystal glass substrate having a large surface area in the air. However, as shown in FIG. 8, a work 66 such as a disk-shaped semiconductor wafer is levitated using a single levitating device 12a and is conveyed by a conveying device (not shown). Also good.

  As described above, in the present embodiment, the fluid lead-out member 32 made of a porous body is inserted into the hole 50 of the plate member 34 and assembled, and the workpiece is held facing the workpieces 18 and 66 of the plate member 34. On the surface 53, a plurality of annular grooves 55a, 55b or uneven portions 57 made of minute unevenness are formed.

  Thereby, when the pressure fluid led out from the fluid lead-out member 32 through the body 28 is discharged to the atmosphere through the work 18, 66 and the work holding surface 53, a part of the pressure fluid is Then, it flows into the inside of the annular grooves 55 a and 55 b or the inside of the concave portion in the concave and convex portion 57. Thereby, it becomes resistance when the said pressure fluid distribute | circulates, the flow volume of the said pressure fluid is restrict | squeezed, and the flow volume of the pressure fluid discharged | emitted in air | atmosphere reduces.

  Accordingly, the pressure P1 of the pressure fluid between the workpieces 18 and 66 and the plate member 34 increases, and the pressure P1 of the pressure fluid is substantially equal to the pressure P of the pressure fluid derived from the fluid deriving member 32 (P1≈P). Can be maintained.

  Therefore, by providing the annular grooves 55a and 55b or the concavo-convex portions 57 on the work holding surface 53, the work 18 and 66 can be levitated in the air with a smaller flow rate of the pressure fluid, and the consumption amount of the pressure fluid is increased. Can be reduced.

  The workpieces 18 and 66 are pressed by the pressure fluid not only above the fluid outlet member 32 but also above the workpiece holding surface 53 that is substantially flush with the second passage surface 64 of the fluid outlet member 32. . Therefore, the workpieces 18 and 66 are not substantially distorted or bent by the pressing force applied over a wide range of the workpieces 18 and 66, and the workpieces 18 and 66 are substantially parallel to the workpiece holding surface 53. Can be held stably and suitably.

  Furthermore, in the fluid lead-out member 32 having a plurality of pores, dust or the like contained in the pressure fluid flowing through the fluid lead-out member 32 may be accumulated over many years of use. Even in such a case, by removing the fluid lead-out member 32 from the levitation device 12 and cleaning it, the pores of the fluid lead-out member 32 have an opening of about 100 μm or more, so that dust accumulated in the fluid lead-out member 32 is accumulated. Etc. can be suitably excluded to the outside through the pores.

  Next, work floating devices 100, 110, 130, 140, and 150 according to first to fifth modifications in which a plurality of fluid outlet members are mounted on a single plate member will be described. In addition, the same referential mark is attached | subjected to the component same as the workpiece | work floating apparatus 12 which concerns on this Embodiment mentioned above, and the detailed description is abbreviate | omitted.

  First, as shown in FIG. 9, in the workpiece floating device 100 according to the first modification, a plurality (for example, five) of fluid outlet members 102 a to 102 e are arranged in a straight line on the plate member 104, and A plate member 104 is mounted on the upper portion of the body 106. The fluid lead-out members 102 a to 102 e are disposed at a predetermined interval along the longitudinal direction of the plate member 104.

  A supply port (not shown) that communicates with the inside of the body 106 and supplies pressure fluid to the fluid outlet members 102a to 102e is formed on the side of the body 106. A pipe 38 connected to a pressure fluid supply source (not shown) is connected via a connection plug 40.

  Further, the workpiece holding surface 104a of the plate member 104 is formed with a not-shown annular groove or an uneven portion made of minute unevenness like the workpiece floating device 12 according to the present embodiment, and such an annular groove or uneven portion. Thus, the flow resistance when the pressure fluid flows along the workpiece holding surface 104a is set.

  The supply port for supplying the pressure fluid, the pipe 38 and the connection plug 40 are not limited to the case where they are connected to one end surface of the body 106, but are respectively provided on one end surface and the other end surface of the body 106. You may make it provide (refer the dashed-two dotted line shape in FIG. 9).

  In the workpiece levitation apparatus 100 according to the first modification, the pressure fluid is supplied to the inside of the body 106 from a pressure fluid supply source (not shown) through a pipe 38 and a supply port (not shown), so that the pressure fluid is a plate member. The plurality of fluid lead-out members 102 a to 102 e provided on 104 are led out to the workpiece holding surface 104 a side of the plate member 104. At this time, the derived amounts of the pressure fluid derived from the plurality of fluid deriving members 102a to 102e are controlled inside the body 106 so that the respective amounts are substantially the same.

  Then, the workpiece 108 is held above the workpiece holding surface 104a of the plate member 104 by the pressure fluid derived from each of the fluid outlet members 102a to 102e.

  In this way, by providing a plurality of fluid outlet members 102a to 102e for the single plate member 104 and floating and holding the workpiece 108 by the pressure fluid supplied from the single pipe 38 and the supply port, It becomes possible to efficiently float and hold the workpiece 108 having a larger surface area.

  Further, in the workpiece levitation apparatus 110 according to the second modification shown in FIG. 10, a groove 114 extending in a straight line along the longitudinal direction of the plate member 112 is formed at a substantially central portion of the plate member 112. A plurality of first fluid outlet members 116a to 116e and second fluid outlet members 118a to 118e are provided in a straight line so as to be substantially symmetrical about the groove 114. The first fluid outlet members 116a to 116e and the second fluid outlet members 118a to 118e are provided substantially in parallel.

  The plate member 112 is mounted on the upper part of the body 120 to which the pipe 38 and the connection plug 40 connected to a pressure fluid supply source (not shown) are connected. The workpiece holding surface 112a of the plate member 112 is formed with a not-shown annular groove or a concavo-convex portion including minute irregularities as in the workpiece floating device 12 according to the present embodiment. The portion serves as a flow resistance when the pressure fluid flows along the work holding surface 112a.

  As described above, the plurality of first and second fluid outlet members 116a to 116e and 118a to 118e are provided for the single plate member 112, and the first fluid outlet members 116a to 116e and the second fluid outlet member are provided. 118a to 118e are arranged substantially in parallel. Thereby, since the range in which the workpiece 122 can be lifted by the workpiece floating device 110 can be expanded in the width direction, the workpiece 122 having a larger surface area than the workpiece floating device 100 according to the first modification. Can be efficiently levitated and held.

  Furthermore, in the workpiece floating apparatus 130 according to the third modification shown in FIG. 11, the first fluid outlet members 116 a to 116 e and the second fluid outlet members 118 a to 118 e are staggered along the longitudinal direction of the plate member 112. Thus, it is different from the workpiece floating device 110 according to the second modified example shown in FIG.

  Furthermore, in the workpiece floating apparatus 140 according to the fourth modification shown in FIG. 12, a plurality (for example, 20) of fluid lead-out members 144a to 144t are separated from each other by a predetermined interval with respect to the substantially rectangular plate member 142. Are arranged as follows.

  The plate member 142 is mounted on the upper portion of the body 146, and a supply port for supplying pressure fluid to the fluid outlet members 144a to 144t in communication with the inside of the body 146 at a substantially central portion on the side portion of the body 146. (Not shown) is formed.

  The workpiece holding surface 142a of the plate member 142 is formed with a not-shown annular groove or a concavo-convex portion made of minute irregularities as in the workpiece floating device 12 according to the present embodiment. The portion serves as a flow resistance when the pressure fluid flows along the work holding surface 142a.

  A pipe 38 connected to a pressure fluid supply source (not shown) is connected to the supply port via a connection plug 40, and the pressure fluid flows into the body 146 through the pipe 38 and a supply port (not shown). Supplied.

  As a result, the pressure fluid is led out from the plurality of fluid lead-out members 144a to 144t to the work holding surface 142a side of the plate member 142. At this time, the derived amounts of the pressure fluid derived from the plurality of fluid deriving members 144a to 144t are controlled inside the body 146 so as to be substantially the same.

  As a result, the workpiece 148 is held above the workpiece holding surface 142a of the plate member 142 by the pressure fluid derived from each of the fluid outlet members 144a to 144t.

  As described above, the plate member 142 having a larger width than the workpiece floating devices 100 and 110 according to the first and second modifications is provided, and the pressure fluid is supplied from the plurality of fluid outlet members 144a to 144t provided on the plate member 142. Thus, the workpiece 148 having a larger surface area can be levitated and held by the pressure fluid.

  Further, in the workpiece levitation apparatus 150 according to the fifth modification shown in FIG. 13, the fluid derivation members 154 a to 154 w arranged adjacent to each other are alternately arranged between the plurality of fluid derivation members 154 a to 154 w provided on the plate member 152. Is different from the workpiece floating device 140 according to the fourth modification described above. At this time, the workpiece holding surface 152a of the plate member 152 is formed with an annular groove (not shown) or a concavo-convex portion including minute irregularities as in the workpiece floating device 12 according to the present embodiment. The uneven portion serves as a flow resistance when the pressure fluid flows along the work holding surface 152a.

It is a perspective view which shows the workpiece conveyance system to which the workpiece floating apparatus which concerns on embodiment of this invention was applied. It is a side view of the workpiece conveyance system of FIG. It is a single-piece top view of the workpiece floating apparatus of FIG. FIG. 4 is a longitudinal sectional view taken along line IV-IV in FIG. 3. FIG. 5 is an enlarged longitudinal sectional view in which a part of the annular groove and the work on the work holding surface of FIG. 4 is enlarged. FIG. 6 is an enlarged longitudinal sectional view showing a levitation device according to a comparative example in which an annular groove is not provided on the work holding surface of FIG. 5. FIG. 5 is an enlarged vertical cross-sectional view when an uneven portion is formed on the surface of the work holding surface instead of the annular groove in the plate member of FIG. 4. It is a perspective view which shows the state which floated and hold | maintained the semiconductor wafer used as a workpiece | work in the single workpiece | work floating apparatus. It is a perspective view which shows the 1st modification of the workpiece | work levitation | floating apparatus which has arrange | positioned the several fluid derivation | leading-out member linearly with respect to the elongate plate member. It is a perspective view which shows the 2nd modification of the workpiece | work levitation | floating apparatus which has arrange | positioned the several fluid derivation | leading member arrange | positioned in a straight line with respect to the plate member in parallel substantially spaced apart. It is a perspective view which shows the 3rd modification of the workpiece | work floating apparatus which has arrange | positioned so that the adjacent fluid derivation | leading member arrange | positioned so that it may become substantially parallel in the workpiece | work floating apparatus of FIG. It is a perspective view which shows the 4th modification of the workpiece | work levitation | floating apparatus which has arrange | positioned the several fluid derivation | leading member spaced apart with the predetermined spacing with respect to the plate member formed in the substantially rectangular shape. It is a perspective view which shows the 5th modification of the workpiece | work floating apparatus which has arrange | positioned several adjacent fluid derivation | leading-out members alternately in the longitudinal direction of a plate in the workpiece | work floating apparatus of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Work conveyance system 12, 12a, 100, 110, 130, 140, 150 ... Work floating apparatus 14a, 14b ... Guide rail 16 ... Slide mechanism 18, 66, 108, 122, 148 ... Work 20a, 20b ... Guide block 22 ... Table portion 26 ... Supply port 28, 106, 120, 146 ... Body 32, 102a-102e, 144a-144t, 154a-154w ... Fluid outlet member 34, 34a, 104, 112, 142, 152 ... Plate member 36 ... Communication Chamber 44 ... Sealing member 48 ... Flange 50 ... Hole 53, 104a, 112a, 142a, 152a ... Work holding surface 54 ... Recessed portion 55a, 55b ... Annular groove 57 ... Uneven portion 58 ... Connection bolt 62 ... First passage surface 64 ... 2nd passage surfaces 116a-116e ... 1st fluid derivation member 118 ～118E ... second fluid outlet member

Claims (10)

In the workpiece floating device that presses the workpiece with the pressure fluid and floats and holds the workpiece in the air,
A main body having an opening to which the pressure fluid is supplied and which opens toward the workpiece;
A fluid derivation member made of a porous body, which is provided so as to close the opening of the main body, and allows the pressure fluid supplied to the main body to pass through and lead out toward the workpiece;
It is provided on a holding surface facing the workpiece in the main body, and exists between the holding surface and the workpiece by suppressing the flow rate of the pressure fluid flowing between the holding surface and the workpiece. A flow rate suppression unit for increasing the pressure of the pressure fluid;
A workpiece levitation apparatus comprising: The apparatus of claim 1.
The work flow levitation apparatus, wherein the flow rate suppressing unit serves as a flow path resistance of a pressure fluid flowing between the holding surface and the work. The apparatus of claim 1.
The said flow volume control part consists of a groove part hollow in the direction separated from the said workpiece | work facing the holding surface in the said holding surface, The workpiece floating apparatus characterized by the above-mentioned. The apparatus of claim 3.
The workpiece levitation apparatus, wherein the groove portion includes a plurality of annular grooves whose diameter is increased in a direction away from the fluid lead-out member. The apparatus of claim 4.
The workpiece floating device, wherein the plurality of annular grooves are formed at predetermined intervals in the radial direction. The apparatus of claim 1.
The said flow volume suppression part consists of an uneven | corrugated | grooved part by which the surface facing the said workpiece | work was formed in the uneven | corrugated shape on the said holding surface. The apparatus of claim 1.
A workpiece floating device, wherein a surface of the fluid lead-out member facing the workpiece is provided so as to be substantially flush with the holding surface. The apparatus of claim 1.
The fluid levitation device is provided with a plurality of fluid derivation members spaced apart from each other at a predetermined interval, and a surface facing the workpiece is provided so as to be substantially flush with the holding surface. The apparatus of claim 8.
The workpiece floating device, wherein the fluid lead-out member is arranged in a straight line along a longitudinal direction of the main body. The apparatus of claim 8.
The fluid lead-out member is characterized in that one fluid lead-out member and the other fluid lead-out member are arranged in a straight line along the longitudinal direction of the main body and are arranged substantially in parallel. Work levitation device.

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