JP2005158132A - Magnetic head cleaning method and magnetic head using the same - Google Patents

Abstract

In a method for manufacturing a magnetic head, there is provided a cleaning and drying method capable of obtaining a high-quality magnetic head with high cleanliness by using a cleaning liquid that does not deteriorate the magnetic characteristics of the magnetic head.
SOLUTION: Using a semi-aqueous cleaning agent in the washing process, using pure water in the rinsing process, applying a sweep of the modulation frequency to the fundamental frequency, and further applying vibration using ultrasonic waves of several kinds of frequencies, washing and rinsing And drying the magnetic head by rotating the object to be cleaned at a high speed.
[Selection] Figure 1

Description

  The present invention relates to a magnetic head suitable for recording / reproducing a large amount of magnetic information on a magnetic recording medium and a manufacturing method thereof, and further, a fixing wax used in a process of processing a magnetic head member in manufacturing such a magnetic head. The present invention relates to a cleaning method for cleaning and removing grinding residues, cutting agents and processing residues generated in processing steps after processing.

  In the method of manufacturing a magnetic head, a winding groove is formed in a pair of magnetic core halves, and a track groove that defines a track width is further formed. Next, the gap facing surface is polished, a magnetic material or the like is formed as necessary, and a gap material is formed thereon by sputtering. Then, the pair of magnetic core halves are butted together at the gap surface, and the magnetic core halves are joined at the gap to produce one magnetic core block. Thereafter, the magnetic core block is cut to a predetermined thickness to produce a head chip, and processing such as base bonding and winding is performed to complete the magnetic head. In order to process such a small magnetic core half or magnetic core block with high accuracy, it is generally handled by attaching it to a jig with wax. Therefore, at least after cutting out from the substrate, the magnetic core half and the magnetic core block are peeled off from the jig, and the magnetic core half, the wax attached to the magnetic core block, the abrasive, the cutting agent, and the processing residue attached during processing Need to be removed.

As a conventional technique of the above-mentioned cleaning method, as a method for removing the wax, heating of a chlorinated hydrocarbon organic solvent such as methylene chloride, trichloroethylene, trichloroethane or ultrasonic cleaning is performed, followed by immersion in a cold bath and finally steam drying. The finishing method is taken. In addition, as a method of removing grinding agent, cutting agent and processing residue adhered during processing, after ultrasonic cleaning with water-soluble detergent, ultrasonic cleaning with pure water, rinsing with pure water, and ultrasonic cleaning with isopropyl alcohol The magnetic head was cleaned by dipping in isopropyl alcohol and steam-dried with isopropyl alcohol (see, for example, Patent Document 1).
Japanese Patent No. 3171408

  However, in the conventional magnetic head cleaning method as described above, the chlorinated hydrocarbon organic solvent used for the wax removal cleaning and the steam drying, the abrasive, the cutting agent, and the water-soluble detergent used for the processing residue removal cleaning are used for the magnetic head. The possibility of adversely affecting the magnetic characteristics is high, and the quality of the magnetic head is deteriorated.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems, and to provide a magnetic head cleaning method capable of obtaining a high-quality magnetic head with high cleanliness using a cleaning liquid that does not deteriorate the magnetic characteristics of the magnetic head. And

  In order to achieve this object, the cleaning method of the present invention includes a rough cleaning 1 step and a rough cleaning 2 step in which an object to be cleaned is immersed in a cleaning liquid and ultrasonic cleaning, and an object to be cleaned is immersed in a cleaning liquid. The rinsing process for removing the cleaning liquid adhering to the object to be cleaned, the finish cleaning process for immersing the object to be cleaned in the cleaning liquid, and further cleaning the residue adhering to the object to be cleaned with ultrasonic waves, In the process that includes the process of drying the washed product, one coarse cleaning process uses an aqueous cleaning agent containing a nonionic surfactant as a component, and two coarse cleaning processes consist of aliphatic hydrocarbons and nonionic surfactants. In the ultrasonic, in the ultrasonic, the modulation frequency is swept to the modulation frequency, the frequency is continuously fluctuated with a certain width, and vibrations of several kinds of frequencies are given simultaneously or sequentially, Rinsing process is 0.1MΩ · cm Using the above pure water, in ultrasonic, the fundamental frequency is swept by the modulation frequency, the frequency is continuously changed with a certain width, and vibrations of several kinds of frequencies are given simultaneously or sequentially, Using pure water of 15 MΩ · cm or more and dissolved oxygen content of 1 ppm or less, in ultrasonic, the fundamental frequency is swept by the modulation frequency, the frequency is continuously fluctuated by a certain width, and several types of frequency are simultaneously or sequentially The drying process has a configuration in which the object to be cleaned is rotated at a high speed.

With this configuration, a high-quality magnetic head with high cleanliness can be obtained using a cleaning liquid that does not deteriorate the magnetic characteristics of the magnetic head. Further, a means for cleaning with higher cleanliness will be described.
In addition, when applying ultrasonic waves in the cleaning process and the rinsing process, it is possible to greatly improve the cleanliness by adopting a configuration in which the cleaning surface of the object to be cleaned is inclined at 45 ° with respect to the ultrasonic radiation direction. It becomes.

  The present invention provides an excellent effect that a high-quality magnetic head with high cleanliness can be obtained by using a cleaning liquid that does not deteriorate the magnetic characteristics of the magnetic head.

  The present invention includes a rough cleaning 1 step and a rough cleaning 2 step in which an object to be cleaned is immersed in a cleaning liquid and ultrasonic cleaning, and a cleaning liquid in which the object to be cleaned is immersed in the cleaning liquid and adhered to the object to be cleaned with ultrasonic waves. A rinsing process for removing the object, a finish cleaning process for immersing the object to be cleaned in a cleaning liquid, and further cleaning the residue adhering to the object to be cleaned with an ultrasonic wave, and a process for drying the object to be cleaned In the process, the coarse cleaning 1 step uses an aqueous detergent containing a nonionic surfactant as a component, and the coarse washing 2 step uses a semi-aqueous detergent containing an aliphatic hydrocarbon and a nonionic surfactant as components. When using ultrasonic waves, sweep the modulation frequency to the fundamental frequency, continuously fluctuate the frequency with a constant width, and give vibrations of several types of frequencies simultaneously or sequentially to remove dirt adhering to the cleaning object. The rinsing process is 0.1MΩ Using pure water of cm or more, in ultrasonic waves, apply a sweep of the modulation frequency to the fundamental frequency, continuously fluctuate the frequency with a certain width, and give vibrations of several kinds of frequencies simultaneously or sequentially, and adhere to the cleaning object The removal of dirt is promoted, the reattachment dirt is removed, the cleaning agent is removed, and the final cleaning process uses pure water with 15 MΩ · cm or more and dissolved oxygen content of 1 ppm or less. Applying a sweep of the modulation frequency to the fundamental frequency, continuously changing the frequency with a certain width, and simultaneously giving vibrations of several kinds of frequencies simultaneously or sequentially, removing dirt remaining on the cleaning object, and the drying process This is done by rotating the cleaning object at high speed by blowing clean air, and using a cleaning solution that does not deteriorate the magnetic characteristics of the magnetic head, An effect that the quality of the magnetic head is obtained.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 3, but the present invention is not limited to these examples.

(Embodiment 1)
First, the magnetic core half to be cleaned here will be described. FIG. 2 is a diagram illustrating the state of the magnetic core half according to the present invention. As shown in FIG. 2, the magnetic core half 2 bonded with the wax 4 to the jig 3 that has been processed is heated to soften the wax and peel from the jig 3. At this time, the magnetic core half 2 has the wax 4 and the abrasive, cutting agent, and attached processing residue used in previous processing attached to the surface.

  Next, a method for cleaning the peeled magnetic core half will be described. FIG. 1 is a schematic view of the cleaning method of the present invention, and Table 1 is a list of cleaning methods and cleaning agents used in each step.

  In FIG. 1, 10 is a rough cleaning process, 20 is a rough cleaning process, 30 is a rinsing process, 40 is a finish cleaning process, and 50 is a drying process. The cleaning process is performed several times in the magnetic head manufacturing process. The cleaning method of the present embodiment may be used for all, or the cleaning method of the present embodiment may be used for at least one cleaning step.

  Reference numeral 1 denotes an object to be cleaned by the cleaning method of the present embodiment, which corresponds to the magnetic core half 2 in the configuration of FIG. As a tool used in each process, 11 is a cleaning tank for cleaning the object to be cleaned 1 in the rough cleaning 1 process 10, 21 is a cleaning tank for cleaning the object to be cleaned 1 in the rough cleaning 2 process 20 after the rough cleaning process 10, 31 Is a rinsing tank for rinsing the object to be cleaned 1 in the rinsing process 30 after the cleaning process 20, 41 is a cleaning tank for finishing and cleaning the object 1 in the finishing cleaning process 40 after the rinsing process 30, and 51 is after the finishing cleaning process 40. The drying tanks for drying the objects to be cleaned in the drying step 50, 13, 23, 43 and 33 are cleaning agents filled in the cleaning tanks 11, 12, 41 and the rinsing tank 31, and the detergents used are shown in Table 1. Indicated. 12, 22, 42, and 32 are ultrasonic vibration units that vibrate the cleaning agents 13, 23, 43, and 33 by applying ultrasonic vibrations to the cleaning tanks 11, 21, 41 and the rinsing tank 31, and 53 is filled in the drying tank 51. Clean air that does not contain impurities and dust.

  The operation of the magnetic head cleaning method of the present embodiment configured as described above will be described below. First, the rough cleaning 1 step 10 will be described. The object to be cleaned 1 such as the magnetic core half 2 is immersed in the cleaning agent 13 in the cleaning tank 11. Next, the ultrasonic vibration unit 12 is operated to vibrate the cleaning tank 11, and the cleaning agent 13 is vibrated to clean the article 1 to be cleaned. The cleaning agent 13 is an aqueous detergent, and the components are preferably composed of a nonionic surfactant, an organic amine, and water. The ultrasonic vibration unit 12 applies a sweep of the modulation frequency to the fundamental frequency, prevents the occurrence of standing waves, eliminates unevenness in cleaning power, and causes cavitation generated in the liquid by ultrasonic waves depending on the size of the target dirt. For example, 20 kHz to 35 kHz when the size of the dirt is 2000 nm to 3000 nm, 36 kHz to 60 kHz when 1000 nm to 2000 nm, and 61 kHz to 90 kHz when 500 nm to 1000 nm is selected. In the case of 100 nm to 500 nm, it is preferably 91 kHz to 150 kHz. This vibration promotes detachment of a grinding residue, a cutting agent, and a processing residue attached by processing, which are attached to the core block of the magnetic core half 2 that is the object to be cleaned 1.

  Next, the rough cleaning 2 step 20 will be described. The object to be cleaned 1 that has been cleaned in the rough cleaning 1 step 10 is immersed in the cleaning agent 13 in the cleaning tank 21. Next, the ultrasonic vibration part 22 is operated to vibrate the cleaning tank 21, and the cleaning agent 23 is vibrated to wash the article 1 to be cleaned. The cleaning agent 23 is a semi-aqueous detergent, preferably composed of an aliphatic hydrocarbon (main component) and a nonionic surfactant. The ultrasonic vibration part 22 applies the sweep of the modulation frequency to the fundamental frequency, continuously fluctuates the frequency with a constant width, and gives vibrations of several kinds of frequencies at the same time, based on the same concept as the rough cleaning 1 step 10. It promotes the detachment of the processing residue attached to the core block of the magnetic core half 2 which is the object 1 and attached by wax or processing.

  Next, the rinsing process will be described. The object to be cleaned 1 that has been cleaned in the rough cleaning 2 step 20 is immersed in the cleaning agent 33 in the rinsing tank 31. Next, the ultrasonic vibration unit 32 is operated to apply vibration to the rinsing tank 31 and to apply vibration to the cleaning agent 33 to rinse the article 1 to be cleaned. The cleaning agent 33 is pure water, preferably 0.1 MΩ · cm. Consists of the above pure water. The ultrasonic vibration unit 32 applies the sweep of the modulation frequency to the fundamental frequency, continuously fluctuates the frequency with a certain width, and gives vibrations of several kinds of frequencies at the same time. Accelerates the removal of dirt adhering to the surface, removes reattached dirt, and removes cleaning agents.

  Next, the finish cleaning process 40 will be described. The article to be cleaned 1 that has been rinsed in the rinsing step 30 is immersed in the cleaning agent 43 in the cleaning tank 41. Next, the ultrasonic vibration unit 42 is operated to vibrate the cleaning tank 41 and the cleaning agent 43 is vibrated to clean the article 1 to be cleaned. The cleaning agent 43 is pure water, preferably 15 MΩ · cm or more and a dissolved oxygen amount of 1 ppm or less. The ultrasonic vibration unit 42 is based on the same concept as in the first step 10 of rough cleaning, applies a sweep of the modulation frequency to the fundamental frequency, continuously fluctuates the frequency with a certain width, and simultaneously gives vibrations of several types of frequencies to be cleaned. The removal of the residue attached to the core block of the magnetic core half 2 which is the object 1 and which could not be removed in the rough cleaning step is promoted.

  Next, the drying process 50 will be described. The to-be-cleaned object 1 that has been subjected to finish cleaning in the finish cleaning step 40 is blown out of the cleaning agent 43 adhered in the finish cleaning step 40 by blowing clean air 53 in the drying tank 51 and dried. The object to be cleaned 1 is fixed on the rotating pedestal 52, and the cleaning agent 43 (pure water) adhering to the object 1 to be cleaned is rotated by rotating the object 1 to be cleaned at a high speed of 1000 to 4000 revolutions per minute. It is blown away by clean air 53 and centrifugal force, and is removed in a very short time.

  As described above, according to the present embodiment, the cleaning steps 10, 20, 40 and the rinsing step 30 do not use a conventional chlorine hydrocarbon organic solvent, but are cleaned with an aqueous detergent, a semi-aqueous detergent, pure water, or the like. In addition, since rinsing is performed, a high-quality magnetic head that does not deteriorate the magnetic characteristics of the magnetic head can be obtained.

(Embodiment 2)
Hereinafter, as a second embodiment, a means for cleaning with a higher cleanliness will be described.

  3 is a diagram showing the relationship between the magnetic core half of the present invention and the radiation direction. As shown in FIG. 3, when ultrasonic waves are applied in the cleaning steps 10, 20, and 40 and the rinsing step 30, the cleaning surface 6 of the magnetic core half 2 is changed in various angles θ with respect to the ultrasonic radiation direction 5 to perform cleaning. Table 2 shows the results of the evaluation.

  As shown in Table 2, the cleanliness is greatly improved when the angle θ is in the range of 0 ° to 45 °. Here, the detergency is evaluated by the presence or absence of a residue by observation with an optical microscope on the surface of the object to be cleaned after cleaning and drying, and the amount of residual oil in the object to be cleaned after cleaning and drying. Evaluation criteria are: ○: no residue, no residual oil (below detection limit), Δ: no residue, residual oil, x: residual.

  Here, by setting the angle θ with respect to the ultrasonic radiation direction 5 to 0 ° to 45 °, the ultrasonic wave (vibration) radiated from the ultrasonic vibration part is transmitted through the cleaning agent and reaches the cleaning agent liquid surface, Furthermore, it is considered that the ultrasonic wave (vibration) reflected from the liquid surface effectively acts on the surface of the object to be cleaned and the cleaning property is improved.

  Further, if the angle θ with respect to the ultrasonic radiation direction 5 is 60 ° to 90 °, the surrounding air is entrained when the object to be cleaned is put into the cleaning tank (cleaning agent) and remains on the surface of the object to be cleaned. It is considered that the ultrasonic wave (vibration) radiated from the ultrasonic vibration part is blocked by the remaining air or the like, and the detergency is deteriorated.

  As described above, according to the present embodiment, in the cleaning steps 10, 20, 40 and the rinsing step 30, the angle of the object to be cleaned 1 is in the range of 0 ° to 45 ° with respect to the ultrasonic radiation direction. In addition, a high-quality magnetic head with higher cleanliness can be obtained.

  In the above description, the cleaning agent 23 has an aliphatic hydrocarbon as a main component, but the cleaning agent 13 can obtain the same effect even when the main component is a nonionic surfactant. In addition, the same effect can be obtained even when the cleaning agents 13 and 23 are degassed under reduced pressure or the like in the first and second rough cleaning steps. Further, although the clean air 53 is used in the drying process, the same effect can be obtained by using high purity nitrogen gas. Further, in the rough cleaning 1 step 10, the rough cleaning 2 step 20, the rinsing step 30, and the finish cleaning step 40, each of the cleaning tanks 11, 21, 41 and the rinsing tank 31 is one tank. An effect is obtained. In the cleaning steps 10, 20, and 40, the rinsing step 30 oscillates several types of fundamental frequencies at the same time, but the same effect can be obtained by oscillating several types of fundamental frequencies sequentially or alternately.

  A magnetic head cleaning method, a manufacturing method, and a magnetic head using the same according to the present invention include a fixing wax, an abrasive, a cutting agent, and a processing step used in a processing step of a magnetic head member at the time of manufacturing the magnetic head. It is useful as a cleaning method for removing generated processing residues by cleaning after processing.

Schematic of the cleaning method in the embodiment of the present invention State explanatory drawing of the magnetic core half in the embodiment of the present invention The figure which shows the relationship between the magnetic core half body and radiation | emission direction in embodiment of this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Washing thing 2 Magnetic core half body 3 Jig 4 Wax 5 Radiation direction 6 Cleaning surface 10 Rough cleaning 1 process 11 Cleaning tank 12 Ultrasonic vibration part 13 Cleaning agent 20 Rough cleaning 2 process 21 Cleaning tank 22 Ultrasonic vibration part 23 Cleaning Agent 30 Rinse process 31 Rinse tank 32 Ultrasonic vibration 33 Cleaning agent 40 Finish cleaning process 41 Cleaning tank 42 Ultrasonic vibration part 43 Cleaning agent 50 Drying process 51 Drying tank 52 High-speed rotating seat 53 Clean air

Claims (5)

A washing process in which the object to be cleaned is immersed in the cleaning liquid and ultrasonic cleaning is performed, a rinsing process in which the object to be cleaned is immersed in the cleaning liquid and the cleaning liquid adhering to the object to be cleaned is ultrasonically removed, and a rinsed object In the process including the process of drying the washed product, the washing process uses a semi-aqueous detergent mainly composed of a nonionic surfactant, and in ultrasonic, the fundamental frequency is subjected to a sweep of the modulation frequency, The frequency is continuously varied within a certain width, and vibrations of several kinds of frequencies are applied simultaneously or sequentially to promote the removal of dirt adhering to the cleaning object, and the rinsing process uses pure water of 5 MΩ · cm or more. In the case of ultrasonic waves, the fundamental frequency is swept by the modulation frequency, the frequency is continuously fluctuated by a certain width, and vibrations of several types of frequencies are given simultaneously or sequentially to remove dirt adhering to the cleaning object. Promote Removing the fouling, the detergent is removed, the drying process is a method of cleaning a magnetic head, characterized by being made by high speed rotation of the object to be cleaned. 2. A method of cleaning a magnetic head according to claim 1, wherein the cleaning surface of the object to be cleaned is tilted with respect to the ultrasonic radiation direction with a limit of 45 [deg.]. Form a winding groove on at least one of the pair of magnetic core halves, form a track groove that defines the track width, then polish the gap facing surface, form a gap material on the gap facing surface, The cleaning method according to claim 1 or 2 is used for a cleaning step in a manufacturing process of a magnetic head in which the core halves are butted at the gap surface and the magnetic core halves are joined by the gap to produce one magnetic core block. A magnetic head characterized by Form a winding groove on at least one of a pair of magnetic core halves, form a track groove that defines the track width, then polish the gap facing surface and form a metal magnetic material film on at least one gap facing surface In the cleaning process of the magnetic head manufacturing process, a gap material is formed thereon, a pair of magnetic core halves are butted at the gap surface, and the magnetic core halves are joined by a gap, thereby producing one magnetic core block. A magnetic head using the cleaning method according to claim 1. A pair of magnetic core halves are formed with a winding groove formed in at least one of them, a pair of magnetic core halves formed by sandwiching a metal magnetic film with a non-magnetic substrate are abutted on the gap surface, and the magnetic core halves are joined with a gap. A magnetic head using the cleaning method according to claim 1 or 2 in a cleaning step in a manufacturing process of a magnetic head for producing one magnetic core block.

Images