JP2005103581A - Repair method and device therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a repair method and a device therefor capable of shaping the sectional shape of laser beams in response to a defective portion of a complicated shape, and correctly and rapidly repairing the defective portion. <P>SOLUTION: The shape data of a defective portion G is extracted from the defect image data Ds acquired by picking up an image of the defective portion G on a glass substrate 2, each small mirror 19 of a DMD (digital mirror device) unit 16 is angular-controlled at a high speed according to the shape data, and the defective portion G is irradiated with laser beams by substantially matching the sectional shape of laser beams r reflected by the small mirrors 19 with the shape of the defective portion G. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a repair method and apparatus for irradiating a laser beam onto a defective portion generated on, for example, a glass substrate, a semiconductor wafer, or a printed board of a liquid crystal display (hereinafter referred to as LCD).

  In the LCD manufacturing process, various inspections are performed on the glass substrate processed in the photolithography process. As a result of this inspection, if a defective portion is detected in the resist pattern or etching pattern formed on the glass substrate, the defective portion is repaired by irradiating the defective portion with laser light.

  As a repair method, for example, there are techniques described in Patent Documents 1 and 2. In Patent Document 1, ultraviolet laser light output from an ultraviolet laser oscillator is incident on a variable rectangular opening, and the variable rectangular opening is opened and closed by moving each knife edge, so that the cross-sectional shape of the ultraviolet laser light has a desired size. It describes that the defect part is irradiated after being shaped into a rectangle.

Patent Document 2 describes that a laser beam output from a laser oscillator is incident on an aperture, and a blade having the shape corresponding to the shape of the defect portion is formed by inserting / removing and rotating each blade of the aperture. The aperture corresponds to a defect portion having an arbitrary shape by exchanging and using a straight blade or each blade having a semicircular notch and a semicircular protrusion having different curvatures.
Japanese Patent Laid-Open No. 9-5732 JP-A-3-13946

  Repairs in the LCD manufacturing process include repair of a resist pattern on a glass substrate and repair of an etching pattern. The repair of the resist pattern is performed by irradiating a defective portion of the resist pattern on the metal film formed on the glass substrate with a laser beam. In this repair, there is a metal film on the base of the resist pattern to be repaired, and when the defect portion of the resist pattern is irradiated with laser light, the base metal film may be irradiated with laser light. Even if the metal film is irradiated with the laser beam in this way, the influence on the metal film is small, and the damage on the metal film when irradiated with the laser beam is not much concerned.

  On the other hand, in the repair of the etching pattern, since the laser beam is irradiated to the defective portion of the metal pattern formed by etching on the glass substrate, the base of the metal pattern to be repaired is the glass substrate. For this reason, when a laser beam is irradiated to the glass substrate used as a foundation | substrate when a defective part of a metal pattern is irradiated with a laser beam, it will damage a glass substrate. Repairing a damaged glass substrate is difficult, and the glass substrate itself must be discarded, reducing the yield of LCD manufacturing. For this reason, it is desirable to minimize damage to the glass substrate.

  Further, the shape of each defect portion to be repaired is different for each defect, and has a complicated shape that cannot be expressed simply by combining curves with straight lines. For this reason, it is difficult to make the cross-sectional shape of the ultraviolet laser light coincide with the shape of the defect portion by opening and closing the variable rectangular opening as in Patent Document 1, and the irradiated pattern outside the repair target is removed from the defect portion. Damage to the groundwork.

  In Patent Document 2, by using each blade, the cross-sectional shape of the laser beam can be shaped corresponding to a defect portion having an arbitrary shape. However, since the defect portions have different sizes and shapes, all defect portions Cannot handle. Further, when repairing defect portions having different shapes, each time the defect portions are repaired, it is necessary to replace each blade in accordance with the shape of each defect portion, and the repair operation takes time. In particular, in the LCD manufacturing process, it is required to reduce the product yield and shorten the repair time in order to reduce the cost, but the demand cannot be satisfied.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a repair method and apparatus capable of repairing a defective portion accurately and at high speed by shaping the cross-sectional shape of a laser beam corresponding to a defective portion having a complicated shape.

  In the present invention, laser light output from a laser light source is incident on a digital mirror device group having micromirrors arranged in a plurality of vertical and horizontal directions, and the angle of each micromirror of the digital mirror device group is controlled. This is a repair method in which the cross-sectional shape of the laser beam is shaped into a repair target shape by each micromirror, and the repair target is repaired by irradiating the repaired laser beam to the repair target.

  The present invention relates to a step of extracting repair target shape data from image data, a step of outputting laser light from a laser light source, and a plurality of digital mirror devices arranged in a plurality of vertical and horizontal directions based on the repair target shape data. Controlling the angle of each of the plurality of micromirrors in the group, shaping the laser beam output from the laser light source into a repair target shape, irradiating the repair target with the laser beam shaped by each micromirror, And a repairing process.

  The present invention relates to a laser light source for outputting laser light, a digital mirror device group having a plurality of micromirrors each capable of angle control, arranged in a plurality of vertical and horizontal directions, an imaging device for imaging a repair target, and an imaging device A repair target extracting means for extracting repair target shape data from image data acquired by imaging, and a digital mirror device group based on the repair target shape data extracted by the repair target extraction means The angle control of each micromirror of the laser and the laser shape control means for shaping the laser beam to match the repair target shape by each micromirror, and the laser beam shaped by each micromirror of the digital mirror device group is irradiated to the repair target A repairing device including the optical system.

  ADVANTAGE OF THE INVENTION According to this invention, the repair method and apparatus which can repair a defect part by shaping the cross-sectional shape of a laser beam corresponding to the defect part of a complicated shape at high speed can be provided.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a configuration diagram of a repair device. On the XY stage 1, an LCD glass substrate 2 is placed as a repair target substrate. The repair target substrate may be a substrate on which a fine pattern is formed, such as a semiconductor wafer, a printed circuit board, an LCD color filter, or a pattern mask. The XY stage 1 moves in the XY direction by the drive control of the movement drive control unit 3.

  A substrate inspection device 4 is connected to the movement drive control unit 3. The substrate inspection apparatus 4 performs, for example, a defect inspection on the glass substrate 2 and creates inspection result data including the coordinates, size, defect type, and the like of the defective portion on the glass substrate 2. The movement drive control unit 3 receives the inspection result data from the substrate inspection apparatus 4, controls the movement of the XY stage 1 in the XY direction according to the coordinate data of each defect part of the inspection result data, and controls each defect part on the glass substrate 2. It is automatically positioned at a repair position L, that is, an irradiation position of repair light r emitted from a repair light source 14 described later.

  The illumination light source 5 emits illumination light for illuminating the glass substrate 2. A beam splitter 7 is provided on the optical path of the illumination light via a lens 6. An objective lens 9 is provided on the reflected light path of the beam splitter 7 via a beam splitter 8.

  On the extension of the optical axis p passing through the objective lens 9 and the beam splitters 8 and 7, a camera 11 made of a CCD or the like is provided via a lens 10. The camera 11 images the glass substrate 2 through the lens 10 and the objective lens 9 and outputs the image signal.

  The repair target extraction image processing unit 12 receives the image signal output from the camera 11 to acquire defect image data, compares the defect image data with the reference image data, and uses the difference image data to determine the glass substrate. 2 is extracted, binarization processing is performed, and defect shape data is created. Also, the defect shape data can be created by obtaining the outline of the defect portion from the defect image data or the difference image data. The repair target extraction image processing unit 12 displays defect image data, defect extraction image data, or defect shape data on the monitor 13.

  The repair light source 14 emits a laser beam r for repairing a defective portion of the glass substrate 2. The repair light source 14 uses, for example, a YAG laser oscillator that emits one shot of laser light r having a wavelength of 355 nm.

  On the optical path of the laser beam r emitted from the repair light source 14, a digital micromirror device unit (hereinafter referred to as DMD unit) 16 is provided via a mirror 15. The DMD unit 16 includes a plurality of digital micromirror devices (hereinafter referred to as DMDs) 17 as shown in FIG. 2 arranged two-dimensionally vertically and horizontally as shown in FIG.

  As shown in FIG. 2, the DMD 17 is provided with a micromirror 19 on the top of the driving memory cell 18 so that it can be digitally controlled at angles of ± 10 ° and 0 ° (horizontal), for example.

  These DMDs 17 can be switched at high speed between an angle ± 10 ° and 0 ° by electrostatic attraction generated by a voltage difference acting on a gap between each micromirror 19 and the drive memory cell 18. One disclosed in Japanese Patent No. 28937 is known. The rotation of the micro mirror 19 is limited to an angle of ± 10 ° by a stopper, for example, rotates to an angle of ± 10 ° when the driving memory cell 18 is on, and returns to a horizontal angle of 0 ° when the driving memory cell 18 is off. The micromirror 19 is a micromirror formed using a semiconductor manufacturing technique in a rectangular shape of, for example, several μm to several tens μm, and is two-dimensionally formed on the driving memory cell 18 as shown in FIG. The DMD unit 16 is configured by arranging them.

  The reference reflecting surface 16a of the DMD unit 16 (the reflecting surface where each DMD 17 has an angle of 0 °) 16a sets the exit angle of the laser beam r with respect to the incident optical axis to θi, and each micromirror 19 is turned on to an angle + 10 °. When inclined, the laser beam r is inclined at an inclination angle θa with respect to the XY plane so as to set the emission angle of the laser beam r to θo. The reference reflecting surface 16a is inclined at an inclination angle θa in order to set the reflection angle θo with respect to the incident angle optical axis of the laser beam r from the relationship of the arrangement positions of the mirror 15, the lens 20, the beam splitter 8, and the like. The DMD unit 16 is attached to a support 16b that can adjust the inclination angle θa of the reference reflecting surface 16a in the XYθ directions according to the incident direction and the emitting direction of the laser beam r. The support base 16b can be finely controlled in the XYθ direction by the operation unit of the movement drive control unit 3 in order to make the cross-sectional shape of the laser beam r coincide with the defective part of the glass substrate 2.

  The emission angle θo of the laser beam r is determined by, for example, the rotation angle + 10 ° of each micromirror 19 when the driving memory cell 18 is turned on. The laser beam r emitted at this emission angle θo enters the beam splitter 8 via the lens 20.

  If the driving memory cell 18 is turned off, the laser beam r is reflected in the h direction and does not enter the beam splitter 8 through the lens 20.

  The laser light r emitted from the repair light source 14 is reflected by the mirror 15 and is incident on the DMD unit 16 at an incident angle θi. However, the laser light emitted from the repair light source 14 without the mirror 15 is used. r may be directly incident on the DMD unit 16. Further, a repair position confirmation light source 25 is provided via a mirror 24 detachably provided in the optical path between the repair light source 14 and the mirror 15.

  In the optical system having such a configuration, a camera 11 is disposed from the glass substrate 2 via the beam splitter 8, and a DMD unit 16 is disposed from the glass substrate 2 via the beam splitter 8. The arrangement position with the DMD unit 16 has a conjugate positional relationship with the glass substrate 2.

  The laser shape control unit 21 reads the defect shape data of each defect portion of the glass substrate 2 created by the repair target extraction image processing unit 12, and each micromirror 19 of the DMD unit 16 corresponding to this defect shape data. A control signal for turning on the driving memory cell 18 and turning off the driving memory cell 18 of each micromirror 19 arranged in another region is sent to the DMD driver 22.

  The repair target extraction image processing unit 12 irradiates the defective portion of the glass substrate 2 with the laser beam r and repairs it, obtains image data at the same position from the camera 11, and compares the image data with the reference image data. Then, it is determined from the difference image data whether or not the repair of the defective portion is complete. If the repair is incomplete as a result of this determination, the defect shape data of the defective portion is created again from the difference image data after the repair. The laser shape control unit 21 reads the defect shape data again by the repair target extraction image processing unit 12 and turns on the driving memory cell 18 of each micromirror 19 of the DMD unit 16 corresponding to this shape data. .

  In addition, the laser shape control unit 21 cannot extract all the defective areas from the defect part in the defect shape image data created by the repair target extraction image processing unit 12, for example. In the case of erroneous extraction as a defective portion, the retouch portion 23 is provided for manually correcting the region of the extracted defective portion.

  The retouch unit 23 sets a defect area that could not be extracted by manual operation using a drawing tool and registers it as a defective part, or sets an area that is erroneously extracted as a defective part and registers it as a normal area. .

  The DMD driver 22 drives each drive memory cell 18 of the DMD unit 16 in an on / off state in accordance with a control signal sent from the laser shape control unit 21.

  Next, the operation of the apparatus configured as described above will be described with reference to a repair operation flowchart shown in FIG.

  Inspection result data of the glass substrate 2 is transferred from the substrate inspection apparatus 4 to the movement drive control unit 3. In step # 1, the movement drive control unit 3 receives the coordinate data of the defective part included in the inspection result data of the glass substrate 2, controls the movement of the XY stage 1 in the XY direction, and places the defective part on the optical axis p. Position.

  In step # 2, the camera 11 images a defect on the glass substrate 2 through the lens 10, the beam splitters 7 and 8, and the objective lens 9, and outputs the image signal.

  The repair target extraction image processing unit 12 receives the image signal output from the camera 11 and acquires defect image data Da in which a defect portion G connecting the patterns S exists as shown in FIG.

  Next, in step # 3, the repair target extraction image processing unit 12 compares the defect image data Da with the reference image data Dr having no defect portion as shown in FIG. The defective part G on the substrate 2 is extracted. Then, the repair target extraction image processing unit 12 performs a binarization process on the extracted image data of the defective portion G, for example, as shown in FIG. The defect shape image data Ds is converted to white level. The defect image data (or difference image data) and the defect shape image data Ds are displayed on the monitor 13 by the image processing unit 12.

  Here, the defect shape image data Ds displayed on the monitor 13 is compared and observed with the defect image data (or difference image data). As a result of this observation, a defect region Gn that cannot be extracted as shown in FIG. 8A occurs, or a normal region is erroneously extracted as the defect region Gh as shown in FIG. 9A.

  In this way, the defect portion G cannot be accurately extracted along its shape when the contrast of the defect portion G in the defect shape image data Ds varies, and a region having a high contrast is extracted. The reason is that low regions are not extracted.

  Accordingly, while observing the defect portion G displayed on the monitor 13, when the defect region Gn that cannot be extracted shown in FIG. 8A is manually set using the drawing tool of the retouch portion 23 as a defect portion, In step # 4, the retouch part 23 registers the defect area Gn as a defect part as shown in FIG. 8B, and sets the entire defect part G including the defect area Gn as a defect part.

  For the defect area Gn shown in FIG. 9A, if the defect area Gn erroneously extracted by manual operation using the drawing tool of the retouch section 23 is registered as a normal area, the retouch section 23 In # 4, as shown in FIG. 9B, the registration of the defective area Gn from the defective portion is deleted.

  Next, in step # 5, the laser shape control unit 21 receives the defect shape image data Ds from the repair target extraction image processing unit 12, and the shape data of the defect portion G of the glass substrate 2 from the defect shape image data Ds. And a control signal for turning on each driving memory cell 18 of each micromirror 19 of the DMD unit 16 corresponding to the area of the defective portion G is sent to the DMD driver 22.

  The DMD driver 22 drives each drive memory cell 18 of the DMD unit 16 in an on / off state in accordance with a control signal sent from the laser shape control unit 21.

  For example, as shown in FIG. 10, the laser shape control unit 21 divides the shape of the defect portion G into a plurality of micro regions M corresponding to the micro mirrors 19. Then, the laser shape control unit 21 sends a control signal for turning on each driving memory cell 18 of each micromirror 19 corresponding to each micro region M of the defective part G to the DMD driver 22.

  As a result, each micromirror 19 corresponding to each micro region M of the defective portion G is controlled to rotate by an angle of + 10 ° by the ON control signal of the DMD driver 22.

  Next, in step # 6, the mirror 24 is inserted into the laser light path while the rotation is controlled by the micromirrors 19 of the DMD unit 16, and the light source 25 for checking the repair position is turned on. When illumination light having the same luminous flux diameter as the laser beam r is emitted from the repair position confirmation light source 25 to the DMD unit 16 via the mirrors 24 and 15, the illumination light passes through each of the micromirrors 19 that are in the on state. A defect shape pattern image of the DMD unit 16 is projected onto the glass substrate 2. It is confirmed on the monitor 13 whether the defect shape pattern image projected on the glass substrate 2 coincides with the defect portion G. When the defect part G has shifted | deviated from the defect shape pattern image, the XY stage 1 is moved and the defect part G is match | combined with a defect shape pattern image.

  Thereafter, the mirror 24 is removed from the laser beam path, and one shot of the laser beam r is emitted from the repair light source 14. This one-shot laser beam r is reflected by the mirror 15, enters the DMD unit 16 at an incident angle θi, and is reflected by each minute mirror 19 rotated by an angle + 10 ° corresponding to the region of the defect portion G. The cross-sectional shape of the laser beam r reflected by these micromirrors 19 matches the shape of the defect portion G.

  Then, the laser beam r reflected by the minute mirror 19 passes through the lens 20 and the beam splitter 8, is condensed by the objective lens 9, and is applied to the defective portion G of the glass substrate 2. The laser light r is imaged in a cross-sectional shape that matches the shape of the defect portion G by the objective lens 9 and is irradiated onto the defect portion G. Therefore, the defect portion G on the glass substrate 2 is irradiated with the one-shot laser light r. Is removed.

  Next, in step # 7, the camera 10 images the repaired defective portion G and outputs the image signal. The repair target extraction image processing unit 11 compares the defect image data Da after repair captured by the camera 10 with the reference image data Dr shown in FIG. 6 to determine whether or not the defect portion G has been completely repaired. To do. The repair target extraction image processing unit 11 displays the repaired defect image data Da on the monitor 13 and observes the image of the displayed defect part G to determine whether the defect part G has been completely repaired. It may be judged.

  On the other hand, even if the defective portion G is irradiated with the laser beam r, the entire defective portion G cannot be removed, and the defective portion Ge remains as a part of the defective portion G as shown in FIG. is there. If the defective part G is not completely repaired in this way, the process returns to step # 3, and the repair target extraction image processing part 11 compares the defect image data Da captured in step # 7 with the reference image data Dr. Then, from the difference image data, the defective defective part Ge remaining on the glass substrate 2 as shown in FIG. 11 is extracted.

  Thereafter, similarly to the above, step # 4 to step # 8 are repeated.

  If the defective part G is completely repaired as a result of the determination in step # 8, the movement drive control unit 3 determines that the next defective part from the inspection result data of the glass substrate 2 received from the substrate inspection apparatus 4 in step # 9. If there is a defective part, the process returns to step # 1 again. If there is no defect, the repair is terminated.

  As described above, according to the embodiment, the shape data of the defect portion G is extracted from the defect image data Ds acquired by imaging the defect portion G on the glass substrate 2, and the DMD unit 16 has the shape data according to the shape data. The angle of each micromirror 19 is controlled at a high speed to form a defect shape pattern having the same shape as the defect portion G. The laser beam r is reflected by each micromirror 19 that forms a defect shape pattern, and the cross-sectional shape of the laser beam r is shaped to be the same as the defect portion G and is irradiated to the defect portion G on the glass substrate 2.

  Thereby, since the size of one micromirror 19a or 19b is a micromirror of 16 μm square, for example, the shape of the defect portion G of the resist pattern or the etching pattern is a fine and any complicated shape combining a straight line or a curve, for example. Even so, the laser beam r having a cross-sectional shape substantially coinciding with the shape of the defect portion G can be easily formed at high speed.

For example, even if the defective portion G exists in a portion where the curved pattern P ₁ and the linear pattern P ₂ face each other as shown in FIG. 12, and the shape of the defective portion G is an elliptical shape distorted, the DMD unit If 16 is used, a defect shape pattern having the same shape as the defect portion G can be formed at high speed. Accordingly, by irradiating the defect portion G with the laser beam r shaped into the shape of the defect portion G, it is possible to reliably repair only the defect portion G without irradiating the laser beam r outside the defect portion G region. Therefore, even if the defective part G to be repaired is the defective part G of the etching pattern in the LCD manufacturing process, only the defective part G of the metal pattern on the glass substrate can be irradiated with the laser beam r, Does no damage.

  In addition, since the micro mirror 19 can be controlled at high speed by using the DMD unit 16, a defect shape pattern is instantaneously formed so as to match the shape of the defect portion G with respect to the defect portion G having a different shape to be repaired. Thus, the cross-sectional shape of the laser beam r can be easily shaped, and the time for repairing the defective portion G can be greatly shortened. In addition, the cross sectional shape of the laser beam r can be accurately matched to each shape of the defect portion G and repaired. As a result, the yield of LCD manufacturing can be improved.

  In addition, even if the laser beam r cannot be completely repaired once by irradiating the defect part G, the cross-sectional shape of the laser beam r is shaped into the shape of the defect part G having a defective repair, and the defect is re-irradiated. The repair of the part G can be performed completely and the yield can be improved.

  Further, by manual operation using the drawing tool of the retouch unit 23, the defect region Gn that could not be extracted although it was the defect portion G or the normal region Gh that was erroneously extracted due to the variation in contrast in the defect shape image data Ds. Therefore, even if an error occurs in the automatic extraction of the shape data of the defective portion G, it can be repaired by correcting the accurate shape data of the defective portion G before repairing. .

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage.

  In the above embodiment, the laser beam is shaped into a defect shape pattern by driving the micro mirror 19 of the DMD 17 on, but conversely, the micro mirror 19 corresponding to the defect shape pattern is turned off to turn on the micro beam other than the defect shape pattern. The laser beam may be shaped into a defect shape pattern by turning on the mirror 19.

  Further, the repair target extraction image processing unit 12 compares the defect image data Da with the reference image data Dr and obtains the shape data of the defect portion G from the defect shape image data Ds which is the difference image. The image of the part G may be displayed on the monitor 13 and the shape data of the defective part G may be acquired using a tablet or the like while the operator observes the monitor image.

  In the above embodiment, the case where the defect portion on the glass substrate 2 of the LCD is repaired has been described. However, the repair target is a defect portion on the semiconductor wafer, a defect portion on the reticle, or a precision machine. It can be used for repairing any defective part such as defect shape correction, and is particularly suitable for repairing minute shapes and complex shapes.

  Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.

The block diagram which shows one Embodiment of the repair apparatus concerning this invention. The external view of DMD used for the apparatus. The arrangement | sequence figure of each micromirror of DMD group used for the apparatus. The repair operation | movement flowchart of the apparatus. FIG. 4 is a schematic diagram of defect image data acquired by imaging with a camera in the apparatus. FIG. 3 is a schematic diagram of reference image data in the apparatus. The schematic diagram of the defect extraction image data extracted by the apparatus. The figure which shows correction of the shape data of the defect part by the retouch part in the same apparatus. The figure which shows correction of the shape data of the defect part by the retouch part in the same apparatus. The schematic diagram which shows the division | segmentation into the micro area | region corresponding to each micromirror of DMD group by the apparatus by the shape of a defect part. The figure which shows the defective part of the repair defect by the same apparatus. The figure which shows an example of the shape of the defect part repaired with the same apparatus.

Explanation of symbols

  1: XY stage, 2: glass substrate, 3: movement drive control unit, 4: substrate inspection apparatus, 5: illumination light source, 6, 10, 20: lens, 7, 8: beam splitter, 9: objective lens, 11: Camera: 12: Repair target extraction image processing unit, 13: Monitor, 14: Repair light source, 15: Mirror, 16: DMD unit, 16a: Reference reflecting surface, 17: DMD, 18: Memory cell for driving, 19 : Micromirror, 21: Laser shape control unit, 22: DMD driver, 23: Retouch unit, 24: Mirror, 25: Light source for repair position confirmation.

Claims (11)

The laser light output from the laser light source is incident on a digital mirror device group having micromirrors arranged in a plurality of vertical and horizontal directions,
By controlling the angle of each micromirror of this digital mirror device group, the cross-sectional shape of the laser beam is shaped into a repair target shape by each micromirror,
A repair method comprising repairing the repair target by irradiating the repair target with the shaped laser beam. Extracting the repair target shape data from image data;
Outputting laser light from a laser light source;
Based on the repair target shape data, the angles of the plurality of micromirrors included in the plurality of digital mirror device groups arranged in the vertical and horizontal directions are respectively controlled, and the laser light output from the laser light source is the repair target shape. The process of shaping into
Irradiating the repair target with the laser light shaped by each of the micromirrors, and repairing the repair target;
A repair method characterized by comprising: 3. The repair method according to claim 1, wherein the micromirrors corresponding to the defect shape data to be repaired are turned on among the micromirrors of the digital mirror device group. 3. The repair method according to claim 1, wherein, in each of the micromirrors of the digital mirror device group, the micromirrors facing each other other than the defect shape data to be repaired are controlled to be turned on. If the repair target repair is defective, the angle of each of the micro mirrors of the plurality of digital mirror devices is controlled again based on the repair target shape data of the repair failure, and the laser beam is again transmitted by the micro mirror. The repair method according to claim 1, wherein the repair target with the repair failure is irradiated. A laser light source for outputting laser light;
A group of digital mirror devices each having a micromirror capable of angle control and arranged in a plurality of vertical and horizontal directions;
An imaging device for imaging the repair target;
A repair target extracting means for extracting shape data of the repair target from image data acquired by imaging of the imaging device;
The angle of each micromirror of the digital mirror device group is controlled based on the shape data of the repair target extracted by the repair target extraction means, and the laser light is converted into the repair target shape by each micromirror. Laser shape control means for shaping to match,
An optical system for irradiating the repair target with the laser light shaped by the micromirrors of the digital mirror device group;
A repair device comprising: The repair apparatus according to claim 6, wherein the imaging apparatus and the digital mirror device group are arranged in a conjugate positional relationship with respect to the repair target. The repair apparatus according to claim 6, wherein the digital mirror device group drives the micromirrors arranged in a region corresponding to the repair target shape data in a predetermined angular direction. 8. The repair apparatus according to claim 7, wherein the digital mirror device group drives the micromirrors arranged outside a region corresponding to the repair target shape data in a predetermined angular direction. If the repair target repair is defective, the repair target extraction unit again extracts the shape data of the repair defective repair target from the image data acquired by imaging of the imaging device,
The laser shape control means controls the angle of each of the micromirrors of the digital mirror device group based on the shape data of the repair failure repair target extracted by the repair target extraction means. Item 8. The repair device according to item 7. The imaging device and the optical system are disposed on the same optical axis, and the imaging optical system, the optical system, and the repair target are relatively moved based on the coordinate data of the repair target, and the imaging optical system And a movement control means for moving the repair target on the optical axis of the condensing optical system,
The repair device according to claim 6, further comprising:

Images