JP2005042144A - Heat- resisting member, and its production method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve a heat barrier effect while keeping heat-resisting cycle characteristics and erosion-resisting characteristics when applying a heat barrier coating layer consisting of a ceramics material onto a heat-resisting member. <P>SOLUTION: The heat-resisting member 1 comprises: a base material 2 consisting of a heat resistant alloy or a ceramics member; and a bond coating layer 3 and the heat barrier coating layer 4 which are formed by coating on the base material 2 in this order. The heat barrier coating layer 4, thermalle, consisting of a ceramics material has a columnar structure grown to a direction forming an acute angle to the vertical direction of the base material 2 or the bond coating layer 3, concretely to a direction forming an angle of 1 to 80°. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heat resistant member used in a high temperature corrosive atmosphere, a high temperature oxidizing atmosphere, and the like, and a method for manufacturing the same.
[0002]
[Prior art]
In recent years, high efficiency and high performance of high temperature equipment represented by gas turbines for power generation and engines have been energetically advanced. As the most effective means for achieving such high performance of high temperature equipment, there is an increase in equipment operating temperature. Therefore, in order to cope with the increase in operating temperature of equipment, equipment constituent materials are required to have higher temperature strength, corrosion resistance, oxidation resistance, and erosion resistance.
[0003]
On the other hand, there is a limit to the improvement of material characteristics in the development of a single superalloy material based on Ni, Co, Fe, etc., so in the fields of power generation gas turbines and aircraft jet engines, etc. A technology to apply corrosion and oxidation resistant metal coatings made of M-Cr-Al-Y alloy (M: Ni, Co, Fe) to superalloys has been developed and recognized as an indispensable technology for achieving high temperatures. ing. In order to enable use in higher temperature environments, a ceramic layer with low thermal conductivity is formed as a thermal barrier coating (TBC) layer on the corrosion and oxidation resistant metal coating layer to improve the cooling efficiency of the substrate. Technology to enhance has been developed.
[0004]
The thermal barrier coating layer as described above has already been applied to actual machines such as a turbine vane having a low stress load. A ceramic material such as zirconia, hafnia, alumina, silicon nitride, sialon, titanium nitride, or aluminum nitride can be used as a material for forming the thermal barrier coating layer. In addition, when applying a thermal barrier coating layer, the corrosion-resistant and oxidation-resistant metal coating layer made of an M-Cr-Al-Y alloy or the like serves to relieve thermal stress caused by the difference in thermal expansion between the base material and the ceramic material. It also functions as a bond coating layer between the substrate and the thermal barrier coating layer.
[0005]
When forming a thermal barrier coating layer made of a ceramic material, plasma spraying method, spraying method such as high-speed gas flame spraying (HVOF) method, PVD (physical vapor deposition) method, CVD (chemical vapor deposition) method, spin coating method Various film forming methods such as can be applied. In particular, the plasma spraying method is used for thermal barrier coatings for moving and stationary blades such as gas turbines and jet engines because a thick film can be easily formed and a wide range of coating materials can be selected. However, the thermal barrier coating layer formed by the thermal spraying method has problems such as being easily peeled off from the inside of the layer due to thermal cycles and erosion, and it is difficult to form a uniform film on a portion having a small curvature of the substrate. Yes.
[0006]
On the other hand, application of an electron beam PVD (EB-PVD) method has been studied as a method for improving heat cycle resistance and erosion resistance. According to the EB-PVD method, a ceramic layer having a columnar structure growing in a direction perpendicular to the interface with the bond coating layer can be obtained. The thermal barrier coating layer having such a columnar structure can suppress propagation in a direction parallel to the interface of the crack, for example, and has a higher hardness than a plasma spraying method. Cycling and erosion resistance can be improved.
[0007]
In order to prevent exfoliation of layered ceramics by the plasma spraying method as described above, a technique for dispersing and arranging dispersed particles made of a composite oxide within a ceramic layer has also been developed (see, for example, Patent Document 1). In addition, there is an example in which a layered ceramic layer by a plasma spraying method and a columnar ceramic layer by an EB-PVD method are selectively used depending on the part of the heat-resistant member (see, for example, Patent Document 2).
[0008]
However, even though the thermal barrier coating layer by the EB-PVD method has a columnar structure interface and voids that can hinder heat conduction, these exist in parallel with the heat conduction direction. Can't earn the route. For this reason, the thermal conductivity of the thermal barrier coating layer by the EB-PVD method is about twice as high as that of the thermal barrier coating layer by the plasma spraying method or the like, and there is a difficulty in the original thermal barrier property of the thermal barrier coating. .
[0009]
[Patent Document 1] Japanese Patent Laid-Open No. 11-264084 [Patent Document 2] Japanese Patent Laid-Open No. 9-195067
[Problems to be solved by the invention]
As described above, as a method for forming the thermal barrier coating layer, an EB-PVD method capable of obtaining a ceramic layer superior in heat cycle resistance and erosion resistance as compared with a plasma spraying method is expected. However, in the conventional EB-PVD method, due to the columnar structure that grows in a direction perpendicular to the interface, it is not possible to gain a heat conduction path. It has the disadvantage that it cannot be increased.
[0011]
For this reason, in high-temperature equipment parts used in power turbines and stationary blades for power generation gas turbines and aircraft jet engines, so-called heat-resistant parts, problems that occur in their usage environment, that is, thermal cycles and erosion, etc. It is required to improve the heat shielding property, which is the original characteristic of the thermal barrier coating, while preventing the thermal barrier coating layer from peeling off. Then, by applying such a thermal barrier coating layer, it is strongly desired to develop a heat-resistant member that achieves high efficiency due to an increase in device operating temperature and realizes long life and high reliability.
[0012]
The present invention has been made in order to cope with such a problem, and without increasing the heat cycle performance and erosion resistance, the heat insulation property of the thermal insulation coating layer is improved, so that the high operation temperature is increased. An object of the present invention is to provide a heat-resistant member and a method for manufacturing the heat-resistant member that achieve efficiency, long life, and high reliability.
[0013]
[Means for Solving the Problems]
The heat-resistant member of the present invention is a heat-resistant member comprising a substrate, a bond coating layer formed on the surface of the substrate, and a heat-shield coating layer formed on the bond coating layer. The layer is characterized by having a columnar structure grown in a direction that forms an acute angle with respect to the vertical direction of the substrate or the bond coating layer.
[0014]
Further, the method for producing a heat-resistant member of the present invention includes forming a bond coating layer on the surface of the substrate, and forming an acute angle on the bond coating layer with respect to a vertical direction of the substrate or the bond coating layer. And a step of growing a columnar structure in a direction to form a thermal barrier coating layer.
[0015]
In the heat-resistant member of the present invention, a thermal barrier coating layer having a columnar structure is applied, and the columnar structure is grown in a direction that forms an acute angle with respect to the vertical direction of the substrate or the bond coating layer. In the thermal barrier coating layer having such a columnar structure growth direction, the interface and voids of the columnar structure are arranged at an angle with respect to the direction of heat conduction. It can be used effectively as an obstacle. Therefore, a heat conduction path of the thermal barrier coating layer having a columnar structure can be gained, thereby improving the thermal barrier property. In addition, since the thermal barrier coating layer having a columnar structure is excellent in heat cycle resistance, erosion resistance, etc., it is possible to provide a heat resistant member with improved heat resistance temperature, longer life, and higher reliability. It becomes possible.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, modes for carrying out the present invention will be described.
FIG. 1 is a cross-sectional view showing a schematic structure of a heat-resistant member according to an embodiment of the present invention. A heat-resistant member 1 shown in the figure has a base material 2 made of a heat-resistant alloy or ceramic member containing at least one element selected from Ni, Co, and Fe as a main component. As the constituent material of the substrate 2, various known heat-resistant alloys or ceramic members can be appropriately selected and used according to the intended use.
[0017]
Examples of heat-resistant alloys effective for the base material 2 of the heat-resistant member 1 include Ni-base superalloys such as IN738, IN939, Mar-M247, RENE80, CMSX-2, and CMSX-4, and Co such as FSX-414 and Mar-M509. Examples include base superalloys. Moreover, when applying a ceramic member to the base material 2, a silicon carbide sintered body, a silicon nitride sintered body, a sialon sintered body, a zirconia sintered body, etc. can be used.
[0018]
A bond coating layer 3 is formed on the surface of the substrate 2 described above. The bond coating layer 3 is an M-Cr-Al-Y alloy (M is Ni, Co, and Ni) having excellent corrosion resistance and oxidation resistance and having an intermediate thermal expansion coefficient between the substrate 2 and a thermal barrier coating layer 4 described later. It is preferable to form at least one element selected from Fe). The thickness of the bond coating layer 3 can be appropriately selected from the range of 10 to 500 μm according to the application. For example, in the gas turbine blade portion, about 50 to 300 μm is appropriate from the viewpoint of the oxidation life and the stress relaxation effect between the base material 2 and the thermal barrier coating layer 4.
[0019]
The bond coating layer 3 made of M-Cr-Al-Y alloy guarantees corrosion resistance and oxidation resistance, and at the same time, alleviates thermal stress caused by the difference in thermal expansion between the substrate 2 and the thermal barrier coating layer 4 It is. Therefore, considering these performances comprehensively, generally 0.1 to 20% by mass of Al, 10 to 35% by mass of Cr, 0.1 to 5% by mass of Y, and the balance being Ni It is preferable to apply an M-Cr-Al-Y alloy having a composition substantially composed of at least one element selected from Co and Fe (in particular, at least one element selected from Ni and Co). Depending on the application, one or more of Ti, Nb, Hf, Zr, Ta, W, etc. may be added to the M-Cr-Al-Y alloy in a range of 5 mass% or less. Here, the alloy containing these additive elements is referred to as an M-Cr-Al-Y alloy.
[0020]
The bond coating layer 3 can be formed by applying a film forming method such as a plasma spraying method, a high-speed gas flame spraying (HVOF) method, a PVD (physical vapor deposition) method, or a CVD (chemical vapor deposition) method. For example, according to the low-pressure plasma spraying method, which is a kind of plasma spraying method and performs a spraying process in a low-pressure atmosphere, it is possible to suppress oxidation of the bond coating layer 3 during film formation and to provide excellent oxidation resistance. it can. Thus, the low pressure plasma spraying method is suitable as a method for forming the bond coating layer 3.
[0021]
A thermal barrier coating layer 4 is formed on the bond coating layer 3 described above. The thermal barrier coating layer 4 is made of, for example, a ceramic material that is excellent in heat resistance and has lower thermal conductivity than a metal material or the like. The thickness of such a thermal barrier coating layer 4 is appropriately selected from the range of 50 to 3000 μm, for example, depending on the application. For example, when the heat-resistant member 1 is applied to a gas turbine blade portion or the like, it is preferably in the range of 100 to 300 μm.
[0022]
As a material for forming the thermal barrier coating layer 4, ceramic materials such as zirconia, hafnia, alumina, silicon nitride, sialon, titanium nitride, and aluminum nitride can be used. Among these, zirconia (ZrO ₂ ) and hafnia (HfO ₂ ) are preferably applied because they have a particularly low thermal conductivity and a large thermal expansion coefficient and are relatively close to metals. As zirconia and hafnia, those containing yttria, calcia, magnesia and the like are more preferably used as stabilizers for suppressing phase change.
[0023]
The thermal barrier coating layer 4 made of the ceramic material as described above has a columnar structure 5 as shown in an enlarged view in FIG. The columnar structure 5 constituting the thermal barrier coating layer 4 has an acute angle α with respect to the vertical direction a of the substrate 2 or the bond coating layer 3 (direction perpendicular to the surface of the substrate 2 or the bond coating layer 3). In the direction b. The thermal barrier coating layer 4 composed of such a columnar structure 5 can be obtained with good reproducibility by applying, for example, an electron beam PVD (EB-PVD) method, but the columnar structure is controlled according to film forming conditions. If possible, other film formation methods such as a PVD method other than the CVD method or the EB-PVD method may be applied.
[0024]
In the thermal barrier coating layer 4 having the columnar structure 5 grown in the direction b in which the angle α with respect to the vertical direction a of the substrate 2 or the bond coating layer 3 forms an acute angle, the interface 5a and the voids 5b of the columnar structure 5 are heated. They are arranged at an angle with respect to the conduction direction, that is, the direction that forms the shortest path from the surface of the thermal barrier coating layer 4 to the substrate 2. Therefore, the interface 5a and the voids 5b of the columnar structures 5 become obstacles to heat conduction, and the heat conduction path of the thermal barrier coating layer 4 can be earned. Thereby, it becomes possible to enhance the heat shielding effect by the thermal barrier coating layer 4 having the columnar structure 5. In other words, the thermal conductivity of the thermal barrier coating layer 4 can be reduced.
[0025]
Specifically, the angle α formed between the vertical direction a of the substrate 2 or the bond coating layer 3 and the growth direction b of the columnar structure 5 of the thermal barrier coating layer 4 is preferably set in the range of 1 to 80 °. When the growth angle α of the columnar structure 5 is less than 1 °, the interface 5a, the gap 5b, etc. of the columnar structure 5 that may be an obstacle to heat conduction are almost parallel to the heat conduction direction, and a heat conduction path can be obtained. Can not. Therefore, the heat shielding effect of the thermal barrier coating layer 4 cannot be sufficiently enhanced. On the other hand, when the growth angle α of the columnar structure 5 exceeds 80 °, it is difficult to form the thermal barrier coating layer 4 in an actual manufacturing process.
[0026]
From these facts, by setting the growth angle α of the columnar structure 5 in the range of 1 to 80 °, it is possible to enhance the heat shield effect by the heat shield coating layer 4 with good reproducibility and practically. The growth angle α of the columnar structure 5 is more preferably in the range of 20 to 70 °, and further preferably in the range of 30 to 60 °. The growth angle α of the columnar structure 5 constituting the thermal barrier coating layer 4 (the angle α formed between the vertical direction a of the substrate 2 or the bond coating layer 3 and the growth direction b of the columnar structure 5) is, for example, the thermal barrier coating. It can obtain | require by performing structure | tissue observation using an optical microscope (metal microscope) or an electron microscope, after mirror-finishing the arbitrary cross sections of the layer 4. FIG.
[0027]
In addition, the thermal barrier coating layer 4 having the columnar structure 5 can suppress the propagation of cracks in a direction parallel to the interface with the bond coating layer 3, and is based on the columnar structure 5 and the film forming method. And has a relatively high hardness. By these, the heat cycle resistance and erosion resistance of the thermal barrier coating layer 4 can be improved. That is, it is possible to obtain the thermal barrier coating layer 4 which is excellent in heat cycle resistance, erosion resistance and the like and has an improved thermal barrier effect. By applying such a thermal barrier coating layer 4, it is possible to provide the heat-resistant member 1 that achieves an improvement in heat-resistant temperature and high reliability, and achieves a long life.
[0028]
Next, a manufacturing process of the heat-resistant member 1 having the above-described configuration will be described with reference to FIG. First, as shown in FIG. 3A, a bond coating layer 3 made of, for example, an M—Cr—Al—Y alloy is formed on the surface of a base material 2 made of a heat-resistant alloy or a ceramic member. As described above, the bond coating layer 3 can be formed by applying a film forming method such as a plasma spraying method, an HVOF method, a PVD method, or a CVD method.
[0029]
The thermal barrier coating layer 4 is formed on the bond coating layer 3 by, for example, the EB-PVD method. At this time, as shown in FIG. 3 (b), the vapor or particle flux direction c of the material forming the columnar structure of the thermal barrier coating layer 4 is an angle with respect to the vertical direction a of the substrate 2 or the bond coating layer 3. The thermal barrier coating layer 4 is formed so that β forms an acute angle. Specifically, the angle (material flux angle) β of the thermal barrier coating layer 4 with respect to the vertical direction a in the material flux direction c is preferably set in the range of 10 to 80 °.
[0030]
When the material flux angle β is less than 10 °, the growth direction b of the columnar structure 5 may be angled with respect to the vertical direction a of the substrate 2 or the bond coating layer 3 in the growth process of the columnar structure 5. The growth angle α of the columnar structure 5 becomes almost 0 °. In this case, the interface and voids of the columnar structure 5 that can be an obstacle to heat conduction are almost parallel to the heat conduction direction, and a heat conduction path cannot be obtained. On the other hand, when the material flux angle β exceeds 80 °, it is difficult to form the thermal barrier coating layer 4 having the columnar structure 5 in the actual manufacturing process of the thermal barrier coating layer 4.
[0031]
Accordingly, the angle β of the thermal barrier coating layer 4 with respect to the vertical direction a in the material flux direction c is preferably set in the range of 10 to 80 °, thereby improving the thermal barrier effect. 4 can be obtained with good reproducibility. The material flux angle β is more preferably set in the range of 20 to 70 °, and further preferably in the range of 30 to 60 °. Here, in the EB-PVD method, for example, the base material 2 is inclined in advance so that the vertical direction a forms a predetermined angle β with respect to the material flux direction c, or a rare gas or an inert gas is used. By controlling the material flux direction c by the gas flow, the angle β formed by the flux direction c of the forming material and the vertical direction a of the substrate 2 or the bond coating layer 3 can be made acute.
[0032]
By applying the formation process of the thermal barrier coating layer 4 as described above, the vertical direction a of the substrate 2 or the bond coating layer 3 and the growth direction b of the columnar structure are formed as shown in FIG. The thermal barrier coating layer 4 with the angle α set to an acute angle, more specifically in the range of 1 to 80 °, is obtained. The heat-resistant member 1 having such a thermal barrier coating layer 4 is capable of realizing high efficiency by increasing the device operating temperature based on the improvement of the heat-resistant temperature, and further realizing high reliability and long life. .
[0033]
The heat-resistant member 1 having such a thermal barrier coating layer 4 is a constituent material of a high-temperature device represented by a gas turbine for power generation or an engine, more specifically, a gas turbine for power generation or an aircraft jet engine. It is suitably used for a moving blade and a stationary blade. However, the heat-resistant member of the present invention is not limited to the constituent material of the moving and stationary blades of the gas turbine, and can be applied to the constituent materials of various high-temperature equipment.
[0034]
【Example】
Next, specific examples of the present invention and evaluation results thereof will be described.
[0035]
Example 1
Ni base superalloy CMSX-2 was prepared as a base material, and this was processed into a size of 30 × 30 × 3 mm. A bond coating layer made of a Ni—Co—Cr—Al—Y alloy having a thickness of 100 μm was formed on the surface of the Ni-based superalloy plate by a plasma spraying method. Next, a thermal barrier coating layer made of zirconia stabilized with yttria was formed on the bond coating layer by an EB-PVD method.
[0036]
In forming the thermal barrier coating layer composed of stabilized zirconia, the flux direction of zirconia vapor or particles is 45 ° with respect to the vertical direction of the bond coating layer by controlling the tilt angle of the substrate in the EB-PVD apparatus. It set so that it might become. Under such conditions, a thermal barrier coating layer (stabilized zirconia layer) having a thickness of 200 μm was formed.
[0037]
About the heat-resistant member thus obtained, after mirror-finishing an arbitrary cross section of the thermal barrier coating layer, the structure was observed using an electron microscope. The thermal barrier coating layer was composed of a columnar structure of zirconia crystals. In addition, the angle formed between the growth direction of the columnar structure of the zirconia crystal and the vertical direction of the bond coating layer was confirmed to be about 45 °. As a comparative example with the present invention, a thermal barrier coating layer in which a columnar structure of zirconia is grown in the vertical direction of the bond coating layer (a thermal barrier coating layer in which the angle between the growth direction of the columnar structure and the vertical direction is 0 °) ) And the thermal conductivity of the thermal barrier coating layer was also measured.
[0038]
In order to confirm the heat shielding effect of the heat-resistant members of Example 1 and Comparative Example 1 described above, the thermal conductivity of the thermal barrier coating layer was measured. As a result, the thermal conductivity of the thermal barrier coating layer of Comparative Example 1 was about 1.7 W / m K, whereas in Example 1, the thermal conductivity of the thermal barrier coating layer was about 1.2 W / m. It was reduced to about 70% of K and Comparative Example 1. Furthermore, when the heat-resistant members of Example 1 and Comparative Example 1 were each subjected to a heat cycle test, it was confirmed that the same heat cycle characteristics were exhibited.
[0039]
Example 2
A Ni-base superalloy IN-738 was prepared as a base material and processed into a size of 30 × 30 × 3 mm. A bond coating layer made of a Ni—Co—Cr—Al—Y alloy having a thickness of 100 μm was formed on the surface of the Ni-based superalloy plate by a plasma spraying method. Next, a thermal barrier coating layer composed of hafnia stabilized with yttria was formed on the bond coating layer by an EB-PVD method.
[0040]
In the formation of the thermal barrier coating layer made of stabilized hafnia, the flux direction of hafnia vapor or particles is bonded by controlling the flow direction of hafnia vapor or particles by the gas flow of argon gas in the EB-PVD method apparatus. It set so that it might become 45 degrees with respect to the perpendicular direction of a coating layer. Under such conditions, a thermal barrier coating layer (stabilized hafnia layer) having a thickness of 200 μm was formed.
[0041]
About the heat-resistant member thus obtained, after mirror-finishing an arbitrary cross section of the thermal barrier coating layer, the structure was observed using an electron microscope. The thermal barrier coating layer was composed of a columnar structure of hafnia crystals. The angle between the growth direction of the columnar structure of the hafnia crystal and the vertical direction of the bond coating layer was confirmed to be about 45 °. Further, as a comparative example with the present invention, a thermal barrier coating layer in which a columnar structure of hafnia was grown in the vertical direction of the bond coating layer was formed, and the thermal conductivity of this thermal barrier coating layer was also measured.
[0042]
In order to confirm the heat shielding effect of the heat-resistant members of Example 2 and Comparative Example 2 described above, the thermal conductivity of the thermal barrier coating layer was measured. As a result, the thermal conductivity of the thermal barrier coating layer of Comparative Example 2 was about 1.7 W / m K, whereas in Example 2, the thermal conductivity of the thermal barrier coating layer was about 1.3 W / m. It decreased to about 75% of K and Comparative Example 1. Furthermore, when the heat-resistant members of Example 2 and Comparative Example 2 were each subjected to a heat cycle test, it was confirmed that the same heat cycle characteristics were exhibited.
[0043]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a heat-resistant member having an enhanced heat shielding effect of the thermal barrier coating layer. Therefore, it is possible to improve the heat-resistant temperature of heat-resistant members applied to high-temperature parts such as gas turbines and jet engines, and to improve efficiency, reliability, and life by increasing the device operating temperature based on it. Become.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view schematically showing a main structure of a heat-resistant member according to an embodiment of the present invention.
2 is an enlarged schematic view showing a microstructure of a thermal barrier coating layer of the heat-resistant member shown in FIG. 1. FIG.
FIG. 3 is a cross-sectional view schematically showing a manufacturing process of the heat-resistant member according to one embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Heat-resistant member, 2 ... Base material, 3 ... Bond coating layer, 4 ... Thermal barrier coating layer, 5 ... Columnar structure

Claims (10)

In a heat-resistant member comprising a base material, a bond coating layer formed on the surface of the base material, and a thermal barrier coating layer formed on the bond coating layer,
The heat-shielding coating layer has a columnar structure grown in a direction that forms an acute angle with respect to a vertical direction of the base material or the bond coating layer. The heat-resistant member according to claim 1,
The columnar structure of the thermal barrier coating layer grows in a direction that forms an angle of 1 to 80 ° with respect to the vertical direction. In the heat-resistant member according to claim 1 or claim 2,
The heat-shielding coating layer is made of a ceramic material mainly containing at least one selected from zirconia, hafnia, alumina, silicon nitride, sialon, titanium nitride, and aluminum nitride. In the heat-resistant member according to any one of claims 1 to 3,
The substrate is made of a heat-resistant alloy or ceramic member containing at least one element selected from Ni, Co and Fe as a main component, and the bond coating layer is an M-Cr-Al-Y alloy (where M is Ni , A heat-resistant member comprising at least one element selected from Co and Fe). In the heat-resistant member according to any one of claims 1 to 4,
The heat-resistant member is a constituent material of a moving blade or a stationary blade of a turbine. Forming a bond coating layer on the substrate surface; and
Forming a thermal barrier coating layer by growing a columnar structure on the bond coating layer in a direction that forms an acute angle with respect to a vertical direction of the base material or the bond coating layer. Manufacturing method of member. In the manufacturing method of the heat-resistant member of Claim 6,
Growing the columnar structure so that the vapor or particle flux direction of the material forming the columnar structure of the thermal barrier coating layer forms an acute angle with the vertical direction of the substrate or the bond coating layer. The manufacturing method of the heat-resistant member characterized by these. In the manufacturing method of the heat-resistant member of Claim 7,
A method for producing a heat-resistant member, characterized in that the vapor or particle flux direction of the material is set to a direction that forms an angle of 10 to 80 degrees with respect to a vertical direction of the base material or the bond coating layer. In the manufacturing method of the heat-resistant member of any one of Claims 6 thru | or 8,
A method for producing a heat-resistant member, wherein the thermal barrier coating layer is formed by an electron beam PVD method. In the manufacturing method of the heat-resistant member of any one of Claim 6 thru | or 9,
The method for manufacturing a heat-resistant member, wherein the thermal barrier coating layer is made of a ceramic material mainly containing at least one selected from zirconia, hafnia, alumina, silicon nitride, sialon, titanium nitride, and aluminum nitride.

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