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JP2003089718A - Epoxy resin composition and semiconductor device - Google Patents

Epoxy resin composition and semiconductor device

Info

Publication number
JP2003089718A
JP2003089718A JP2001283377A JP2001283377A JP2003089718A JP 2003089718 A JP2003089718 A JP 2003089718A JP 2001283377 A JP2001283377 A JP 2001283377A JP 2001283377 A JP2001283377 A JP 2001283377A JP 2003089718 A JP2003089718 A JP 2003089718A
Authority
JP
Japan
Prior art keywords
epoxy resin
resin composition
weight
formula
general formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001283377A
Other languages
Japanese (ja)
Other versions
JP4380101B2 (en
Inventor
Fumihiro Umiga
文広 海賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP2001283377A priority Critical patent/JP4380101B2/en
Publication of JP2003089718A publication Critical patent/JP2003089718A/en
Application granted granted Critical
Publication of JP4380101B2 publication Critical patent/JP4380101B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain an epoxy resin composition for semiconductor sealing use having good moldability, high flame retardancy even if using no flame retardant, and high soldering crack resistance. SOLUTION: The epoxy resin composition for semiconductor sealing use essentially comprises (A) a phenolaralkyl-type epoxy resin with diphenylene skeleton, (B) a phenolaralkyl resin with diphenylene skeleton, (C) 80-90 wt.% of an inorganic filler, and (D) a phosphorus-containing curing promoter of the formula [wherein, R1 to R4 are each a substituent selected from monovalent aromatic ring-containing organic groups and monovalent aliphatic residues; and an organic acid: Y<n-> [H<+> ]n-m represents an organic anion resulted from releasing (m) protons out of the molecule, wherein n>=m>=1], wherein the phosphorus content of the resin composition attributable to the above curing promoter is 0.015-0.05 wt.%.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、成形性に優れた半
導体封止用エポキシ樹脂組成物及び半導体装置に関する
ものである。
TECHNICAL FIELD The present invention relates to an epoxy resin composition for semiconductor encapsulation, which is excellent in moldability, and a semiconductor device.

【0002】[0002]

【従来の技術】従来からダイオード、トランジスタ、集
積回路等の電子部品は、主にエポキシ樹脂組成物を用い
て封止されている。特に集積回路では、エポキシ樹脂、
フェノール樹脂及び溶融シリカ、結晶シリカ等の無機充
填材を配合した耐熱性、耐湿性に優れたエポキシ樹脂組
成物が用いられている。近年、電子機器の小型化、軽量
化、高性能化の市場動向において、半導体素子の高集積
化が年々進み、又半導体装置の表面実装化が促進される
なかで、半導体素子の封止に用いられているエポキシ樹
脂組成物への要求は益々厳しいものとなってきており、
特に環境負荷物質の撤廃の一環として、無鉛半田への代
替が進められている。
2. Description of the Related Art Conventionally, electronic parts such as diodes, transistors and integrated circuits have been sealed mainly with an epoxy resin composition. Especially in integrated circuits, epoxy resin,
An epoxy resin composition having excellent heat resistance and moisture resistance, which is a mixture of a phenol resin and an inorganic filler such as fused silica or crystalline silica, is used. In recent years, in the market trend of miniaturization, weight reduction, and high performance of electronic devices, semiconductor elements have been highly integrated, and surface mounting of semiconductor devices has been promoted. The demands on the existing epoxy resin compositions are becoming more and more stringent.
In particular, as part of the elimination of environmentally hazardous substances, replacement with lead-free solder is being promoted.

【0003】従来の有鉛半田は融点が183℃で、実装
時の半田リフロー温度は220〜240℃であったが、
無鉛)半田では融点が高いため、実装時の半田リフロー
温度は、従来より20℃程度高く、260℃が必要とさ
れる。無鉛半田対応のための半田リフロー温度の変更に
よって、エポキシ樹脂組成物の硬化物とパッドとの界面
での剥離、半導体素子と半導体樹脂ペーストとの界面で
の剥離に起因する半導体装置のクラックの問題が生じて
きた。これら半田クラックや剥離は、半田リフロー処理
前の半導体装置自身が吸水し、半田リフロー時の高温下
でその水分が水蒸気爆発を起こすことによって生じると
考えられており、それを防ぐためにエポキシ樹脂組成物
に低水性を付与する等の手法がよく用いられ、その低水
化の手法の一つとして、低吸水性の一般式(1)で示さ
れるエポキシ樹脂及び一般式(2)で示されるフェノー
ル樹脂を用いて、エポキシ樹脂組成物の硬化物の低吸水
化を図ることが提案されていた。
Conventional leaded solder has a melting point of 183 ° C. and a solder reflow temperature of 220 to 240 ° C. during mounting.
Since the lead-free solder has a high melting point, the solder reflow temperature at the time of mounting is higher by about 20 ° C. than before, and 260 ° C. is required. The problem of cracking of the semiconductor device due to peeling at the interface between the cured product of the epoxy resin composition and the pad and peeling at the interface between the semiconductor element and the semiconductor resin paste due to the change in the solder reflow temperature for handling lead-free solder Has occurred. These solder cracks and peeling are considered to be caused by water absorption by the semiconductor device itself before the solder reflow treatment, and the water content causing a steam explosion at high temperature during solder reflow, and an epoxy resin composition for preventing it. Is often used, and as one of the methods for reducing the water content, an epoxy resin represented by the general formula (1) and a phenol resin represented by the general formula (2) having a low water absorption property are used. It has been proposed to reduce the water absorption of a cured product of an epoxy resin composition by using.

【0004】又通常エポキシ樹脂組成物中には十分な難
燃性を付与するために、臭素含有有機化合物及び三酸化
アンチモン、四酸化アンチモン等のアンチモン化合物が
配合されていることが多い。しかしながら、近年、地球
環境に配慮した企業活動の重視によって有害性のおそれ
のある物質の削減・撤廃の動きがあり、臭素含有有機化
合物、アンチモン化合物を使用しないで、難燃性に優れ
たエポキシ樹脂組成物の開発が要求されている。これら
に代わる環境対応難燃剤として、水酸化アルミニウム、
水酸化マグネシウム等の金属水酸化物や赤燐を含むエポ
キシ樹脂組成物が提案されており、これらの難燃剤を含
むエポキシ樹脂組成物を用いた半導体装置は、難燃性試
験のUL−94垂直試験(試験片厚さ3.2mm、1.
6mm共)でV−0を達成するものの、成形性、硬化性
を低下させ、表面実装時の耐半田クラック性の低下を引
き起こすおそれがある。更には耐湿信頼性、高温保管性
を低下させ、十分に満足させるエポキシ樹脂組成物が得
られないという問題があった。一般式(1)で示される
エポキシ樹脂と一般式(2)で示されるフェノール樹脂
を組合せた場合で、難燃剤を使用しない場合には、難燃
性はUL−94垂直試験(試験片厚さ3.2mm)では
V−0は達成するものの、最近の表面実装用半導体装置
を考慮した試験片厚さ1.6mmではV−0を達成する
ことが出来ず、全ての要求に対応することができなかっ
た。
In addition, usually, in order to impart sufficient flame retardancy to the epoxy resin composition, an bromine-containing organic compound and an antimony compound such as antimony trioxide or antimony tetroxide are often mixed. However, in recent years, there has been a movement to reduce or eliminate substances that may be harmful due to the emphasis on corporate activities that consider the global environment, and epoxy resins with excellent flame retardancy without using bromine-containing organic compounds and antimony compounds. The development of compositions is required. As an environmentally friendly flame retardant alternative to these, aluminum hydroxide,
Epoxy resin compositions containing metal hydroxides such as magnesium hydroxide and red phosphorus have been proposed, and semiconductor devices using the epoxy resin compositions containing these flame retardants are UL-94 vertical in flame retardancy test. Test (test piece thickness 3.2 mm, 1.
6 mm), V-0 is achieved, but moldability and curability are deteriorated, and solder crack resistance during surface mounting may be deteriorated. Further, there is a problem that the moisture resistance reliability and the high temperature storability are lowered, and an epoxy resin composition which is sufficiently satisfied cannot be obtained. When the epoxy resin represented by the general formula (1) and the phenol resin represented by the general formula (2) are combined and the flame retardant is not used, the flame retardancy is UL-94 vertical test (test piece thickness). 3.2 mm), V-0 can be achieved, but V-0 cannot be achieved with a test piece thickness of 1.6 mm considering recent surface mounting semiconductor devices, and it is possible to meet all requirements. could not.

【0005】[0005]

【発明が解決しようとする課題】本発明は、成形性に優
れた半導体封止用エポキシ樹脂組成物及び難燃剤を含ま
なくとも難燃性に優れ、かつ耐半田クラック性に優れた
半導体装置を提供するものである。
DISCLOSURE OF THE INVENTION The present invention provides a semiconductor device excellent in flame retardancy and excellent in solder crack resistance even if it does not contain a semiconductor encapsulating epoxy resin composition having excellent moldability and a flame retardant. It is provided.

【0006】[0006]

【課題を解決するための手段】本発明は、 [1](A)一般式(1)で示されるエポキシ樹脂、
(B)一般式(2)で示されるフェノール樹脂、(C)
無機充填材及び(D)一般式(3)で示されるリンを含
む硬化促進剤を必須成分とし、全エポキシ樹脂組成物中
の無機充填材が80〜90重量%で、かつ全エポキシ樹
脂組成物中のリンを含む硬化促進剤に起因するリン含有
量が0.015〜0.05重量%であることを特徴とす
る半導体封止用エポキシ樹脂組成物、
The present invention provides [1] (A) an epoxy resin represented by the general formula (1),
(B) Phenolic resin represented by the general formula (2), (C)
An inorganic filler and (D) a curing accelerator containing phosphorus represented by the general formula (3) as essential components, and the inorganic filler in the total epoxy resin composition is 80 to 90% by weight, and the total epoxy resin composition An epoxy resin composition for semiconductor encapsulation, wherein the phosphorus content due to the curing accelerator containing phosphorus is 0.015 to 0.05% by weight,

【0007】[0007]

【化4】 (式中のR1、R2は、炭素数1〜4のアルキル基から選
択される基であり、互いに同一であっても、異なってい
ても良い。aは0〜3の整数、bは0〜4の整数、nは
平均値で1〜5の正数)。
[Chemical 4] (In the formula, R 1 and R 2 are groups selected from alkyl groups having 1 to 4 carbon atoms and may be the same or different. A is an integer of 0 to 3 and b is An integer of 0 to 4, and n is a positive number of 1 to 5 on average.

【0008】[0008]

【化5】 (式中のR1、R2は、炭素数1〜4のアルキル基から選
択される基であり、互いに同一であっても、異なってい
ても良い。aは0〜3の整数、bは0〜4の整数、nは
平均値で1〜5の正数)。
[Chemical 5] (In the formula, R 1 and R 2 are groups selected from alkyl groups having 1 to 4 carbon atoms and may be the same or different. A is an integer of 0 to 3 and b is An integer of 0 to 4, and n is a positive number of 1 to 5 on average.

【0009】[0009]

【化6】 (式中のR1〜R4は各々1価の芳香環を含む有機基及び
1価の脂肪族残基よりなる群より選ばれた置換基を表
し、それぞれ同じであっても異なっていても良く、有機
酸Yn-[H+]n-mはプロトンm個を分子外に放出した有機
アニオンを表す。n≧m≧1)
[Chemical 6] (In the formula, R 1 to R 4 each represent a substituent selected from the group consisting of a monovalent aromatic ring-containing organic group and a monovalent aliphatic residue, and may be the same or different. Well, the organic acid Y n- [H + ] nm represents an organic anion that releases m protons out of the molecule, n ≧ m ≧ 1).

【0010】[2]第[1]項記載のエポキシ樹脂組成
物を用いて半導体素子を封止してなることを特徴とする
半導体装置、である。
[2] A semiconductor device comprising a semiconductor element encapsulated with the epoxy resin composition as described in the item [1].

【0011】[0011]

【発明の実施の形態】本発明で用いられる一般式(1)
で示されるエポキシ樹脂は、エポキシ基間に疎水性で剛
直なジフェニレン骨格を有しており、架橋密度が低い割
には耐熱性の低下が少なく、これを用いたエポキシ樹脂
組成物の硬化物は、吸水率が低く、ガラス転移温度を越
えた高温域での弾性率が低く、半導体素子やリードフレ
ームとの密着性に優れる。従って、このエポキシ樹脂を
用いたエポキシ樹脂組成物で封止された半導体装置は、
実装時の半田リフロー下でも高い信頼性を得ることが出
来る。
BEST MODE FOR CARRYING OUT THE INVENTION General formula (1) used in the present invention
The epoxy resin represented by has a diphenylene skeleton that is hydrophobic and rigid between epoxy groups, and the heat resistance is less reduced despite the low crosslink density, and a cured product of an epoxy resin composition using this is It has a low water absorption rate, a low elastic modulus in a high temperature range exceeding the glass transition temperature, and is excellent in adhesion to a semiconductor element or a lead frame. Therefore, the semiconductor device sealed with the epoxy resin composition using this epoxy resin,
High reliability can be obtained even under solder reflow during mounting.

【0012】一般式(1)中のnは平均値で、好ましく
は1〜5の正数、特に好ましくは1〜3である。n=1
未満だとエポキシ樹脂組成物の硬化性が低下するので好
ましくない。n=5を越えると樹脂粘度が高くなりエポ
キシ樹脂組成物の流動性が低下するので好ましくない。
一般式(1)で示されるエポキシ樹脂の使用量は、これ
を調節することにより、耐半田クラック性を最大限に引
き出すことが出来る。耐半田クラック性の効果を引き出
すためには、一般式(1)で示されるエポキシ樹脂を全
エポキシ樹脂中50重量%以上、更に好ましくは70重
量%以上含むものが望ましい。50重量%未満だと硬化
物が燃焼しやすくなったり吸水率が高くなったり、弾性
率が高くなったりして、耐半田クラック性が低下するお
それがある。
In the general formula (1), n is an average value, preferably a positive number of 1 to 5, and particularly preferably 1 to 3. n = 1
If it is less than the above range, the curability of the epoxy resin composition is deteriorated, which is not preferable. When n = 5 is exceeded, the resin viscosity increases and the fluidity of the epoxy resin composition decreases, which is not preferable.
By adjusting the amount of the epoxy resin represented by the general formula (1) to be used, the solder crack resistance can be maximized. In order to bring out the effect of resistance to solder cracking, it is desirable that the epoxy resin represented by the general formula (1) is contained in an amount of 50% by weight or more, more preferably 70% by weight or more, based on the whole epoxy resin. If it is less than 50% by weight, the cured product may be easily burned, the water absorption may be increased, or the elastic modulus may be increased, so that the solder crack resistance may be deteriorated.

【0013】一般式(1)で示されるエポキシ樹脂と併
用する場合のエポキシ樹脂としては、分子中にエポキシ
基を有するモノマー、オリゴマー及びポリマー全般で、
例えばフェノールノボラック型エポキシ樹脂、オルソク
レゾールノボラック型エポキシ樹脂、クレゾールノボラ
ック型エポキシ樹脂、ビフェニル型エポキシ樹脂、ビス
フェノール型エポキシ樹脂、スチルベン型エポキシ樹
脂、トリフェノールメタン型エポキシ樹脂、ナフトール
型エポキシ樹脂、ナフタレン型エポキシ樹脂、アルキル
変性トリフェノールメタン型エポキシ樹脂、トリアジン
核含有エポキシ樹脂、ジシクロペンタジエン変性フェノ
ール型エポキシ樹脂等が挙げられる。他のエポキシ樹脂
を併用すると成形性が劣るおそれがあり、後述する本発
明の硬化促進剤を用いることにより成形性を改善するこ
とができる。
When used in combination with the epoxy resin represented by the general formula (1), the epoxy resin includes all monomers, oligomers and polymers having an epoxy group in the molecule,
For example, phenol novolac type epoxy resin, ortho-cresol novolac type epoxy resin, cresol novolac type epoxy resin, biphenyl type epoxy resin, bisphenol type epoxy resin, stilbene type epoxy resin, triphenol methane type epoxy resin, naphthol type epoxy resin, naphthalene type epoxy resin. Examples thereof include resins, alkyl modified triphenol methane type epoxy resins, triazine nucleus-containing epoxy resins, dicyclopentadiene modified phenol type epoxy resins and the like. If another epoxy resin is used in combination, the moldability may be poor, and the moldability can be improved by using the curing accelerator of the present invention described later.

【0014】本発明で用いられる一般式(2)で示され
るフェノール樹脂は、フェノール性水酸基間に疎水性で
剛直なジフェニレン骨格を有しており、これを用いたエ
ポキシ樹脂組成物の硬化物は、吸水率が低く、ガラス転
移温度を越えた高温域での弾性率が低く、半導体素子や
リードフレームとの密着性に優れる。又架橋密度が低い
割には耐熱性が高いという特徴を有している。従って、
このフェノール樹脂を用いたエポキシ樹脂組成物で封止
された半導体装置は、実装時の半田リフロー下でも高い
信頼性を得ることが出来る。
The phenol resin represented by the general formula (2) used in the present invention has a hydrophobic and rigid diphenylene skeleton between phenolic hydroxyl groups, and a cured product of an epoxy resin composition using this is It has a low water absorption rate, a low elastic modulus in a high temperature range exceeding the glass transition temperature, and is excellent in adhesion to a semiconductor element or a lead frame. Further, it has a feature that it has high heat resistance despite its low crosslink density. Therefore,
The semiconductor device sealed with the epoxy resin composition using the phenol resin can obtain high reliability even during solder reflow during mounting.

【0015】一般式(2)中のnは平均値で、好ましく
は1〜5の正数、特に好ましくは1〜3である。n=1
未満だとエポキシ樹脂組成物の硬化性が低下するので好
ましくない。n=5を越えると樹脂粘度も高くなりエポ
キシ樹脂組成物の流動性が低下するので好ましくない。
一般式(2)で示されたフェノール樹脂の使用量は、こ
れを調節することにより耐半田クラック性を最大限に引
き出すことが出来る。耐半田クラック性の効果を引き出
すためには、一般式(2)で示されるフェノール樹脂
を、全フェノール樹脂中50重量%以上、更に好ましく
は70重量%以上含むものが望ましい。50重量%未満
であると、燃焼しやすくなったり、吸水率が高くなった
り、弾性率が高くなったりして、耐半田クラック性が低
下する可能性がある。
In the general formula (2), n is an average value, preferably a positive number of 1 to 5, and particularly preferably 1 to 3. n = 1
If it is less than the above range, the curability of the epoxy resin composition is deteriorated, which is not preferable. When n = 5 is exceeded, the resin viscosity also increases and the fluidity of the epoxy resin composition decreases, which is not preferable.
By adjusting the amount of the phenol resin shown by the general formula (2) to be used, solder crack resistance can be maximized. In order to bring out the effect of the solder crack resistance, it is desirable that the phenol resin represented by the general formula (2) is contained in an amount of 50% by weight or more, more preferably 70% by weight or more, based on the total phenol resin. If it is less than 50% by weight, it is easy to burn, the water absorption is high, the elastic modulus is high, and the solder crack resistance may be lowered.

【0016】一般式(2)で示されるフェノール樹脂と
併用する場合は、分子中にフェノール性水酸基を有する
モノマー、オリゴマー、ポリマー全般で、例えばフェノ
ールノボラック樹脂、クレゾールノボラック樹脂、ナフ
トールアラルキル樹脂、トリフェノールメタン樹脂、テ
ルペン変性フェノール樹脂、ジシクロペンタジエン変性
フェノール樹脂等が挙げられる。本発明に用いられる全
エポキシ樹脂のエポキシ基数と全フェノール樹脂のフェ
ノール性水酸基数の当量比[(エポキシ基数)/(フェ
ノール性水酸基数)]は、好ましくは0.5〜2であ
り、特に0.7〜1.5が望ましい。0.5〜2の範囲
を外れると、エポキシ樹脂組成物の硬化性の低下或いは
硬化物のガラス転移温度の低下、耐湿信頼性の低下等が
生じるので好ましくない。
When used in combination with the phenol resin represented by the general formula (2), it can be used for all monomers, oligomers and polymers having a phenolic hydroxyl group in the molecule, such as phenol novolac resin, cresol novolac resin, naphthol aralkyl resin, triphenol. Examples thereof include methane resin, terpene modified phenol resin, dicyclopentadiene modified phenol resin and the like. The equivalent ratio [(the number of epoxy groups) / (the number of phenolic hydroxyl groups)] of the number of epoxy groups of all epoxy resins and the number of phenolic hydroxyl groups of all phenolic resins used in the present invention is preferably 0.5 to 2, and particularly 0. 0.7 to 1.5 is desirable. When it is out of the range of 0.5 to 2, the curability of the epoxy resin composition is lowered, the glass transition temperature of the cured product is lowered, the humidity resistance is lowered, and the like, which is not preferable.

【0017】本発明で用いる無機充填材の種類について
は特に制限はなく、例えば溶融シリカ、球状シリカ、結
晶シリカ、2次凝集シリカ、多孔質シリカ、2次凝集シ
リカ又は多孔質シリカを粉砕したシリカ、アルミナ、チ
タンホワイト、水酸化アルミニウム、窒化珪素等が挙げ
られ、無機充填材の形状としては、破砕状でも球状でも
かまわないが、耐半田クラック性を向上させるために高
充填する点や、流動性、機械強度及び熱的特性のバラン
スの点から球状溶融シリカが好ましい。最大粒径として
は75μm以下、平均粒径としては5〜25μmが好ま
しい。粒度分布として、流動性改善と成形時のエポキシ
樹脂組成物の溶融粘度を低減さすため粒度分布がブロー
ドであることが好ましい。
The type of the inorganic filler used in the present invention is not particularly limited, for example, fused silica, spherical silica, crystalline silica, secondary agglomerated silica, porous silica, secondary agglomerated silica or silica obtained by pulverizing porous silica. , Alumina, titanium white, aluminum hydroxide, silicon nitride, etc., the shape of the inorganic filler may be a crushed shape or a spherical shape, but in order to improve solder crack resistance, a high filling point or a flow Spherical fused silica is preferred from the viewpoint of the balance of the properties, mechanical strength and thermal properties. The maximum particle size is preferably 75 μm or less, and the average particle size is preferably 5 to 25 μm. As for the particle size distribution, the particle size distribution is preferably broad in order to improve the fluidity and reduce the melt viscosity of the epoxy resin composition during molding.

【0018】無機充填材の配合量としては、全エポキシ
樹脂組成物中80〜90重量%が好ましい。80重量%
未満だとエポキシ樹脂組成物の硬化物の低吸水性が得ら
れず、しかも半田リフロー温度での強度が低下してしま
うため、耐半田クラック性が不十分となり、又臭素化オ
ルソクレゾールノボラック型エポキシ樹脂、臭素化ビス
A型エポキシ樹脂等の臭素含有有機化合物及び三酸化ア
ンチモン、四酸化アンチモン等のアンチモン化合物の難
燃剤を添加しないと難燃性が不足し好ましくない。90
重量%を越えるとエポキシ樹脂組成物の流動性が低下
し、成形時に充填不良や半導体素子のパッドシフトが発
生し易くなり、又高粘度化による半導体装置内の金線変
形等の不都合生じるおそれがあるので好ましくない。無
機充填材はなるべく多く配合した方が、エポキシ樹脂組
成物の硬化物の吸水率を減少でき、耐半田クラック性が
向上するので、成形時の流動性が許容される範囲内で適
宜配合量を調整すれば良い。
The content of the inorganic filler is preferably 80 to 90% by weight in the total epoxy resin composition. 80% by weight
If the amount is less than this, low water absorption of the cured product of the epoxy resin composition cannot be obtained, and further, the strength at the solder reflow temperature decreases, resulting in insufficient solder crack resistance, and brominated orthocresol novolac type epoxy. Resins, bromine-containing bis-A type epoxy resins and other bromine-containing organic compounds and antimony compounds such as antimony trioxide and antimony tetroxide are not preferred because flame retardancy is insufficient unless flame retardants are added. 90
If the content exceeds 10% by weight, the fluidity of the epoxy resin composition will decrease, filling defects and pad shifts of semiconductor elements are likely to occur during molding, and there is a risk of inconvenience such as deformation of the gold wire in the semiconductor device due to high viscosity. It is not preferable because it exists. The inorganic filler should be blended as much as possible, so that the water absorption of the cured product of the epoxy resin composition can be reduced and the solder crack resistance is improved. Just adjust it.

【0019】本発明に用いる無機充填材は、予め十分に
混合しておくことが好ましく、必要に応じて無機充填材
をシランカップリング剤やエポキシ樹脂或いはフェノー
ル樹脂で予め処理しても良く、処理の方法としては溶剤
を用いて混合した後に溶媒を除去する方法や直接無機充
填材に添加し、混合機を用いて処理する方法等がある。
The inorganic filler used in the present invention is preferably thoroughly mixed in advance, and if necessary, the inorganic filler may be previously treated with a silane coupling agent, an epoxy resin or a phenol resin. Examples of the method include a method of removing the solvent after mixing with a solvent and a method of directly adding to the inorganic filler and treating with a mixer.

【0020】本発明に用いる一般式(3)で示されるリ
ンを含む硬化促進剤は、テトラ置換ホスホニウムと有機
酸との分子会合体である。テトラ置換ホスホニウムカチ
オンと有機アニオンで構成され、テトラ置換ホスホニウ
ムイオンの正電荷の周囲を有機アニオンが取り囲み、安
定化した構造となっているものと考えられる。このよう
な構造をとり得るホスホニウムイオンは、置換又は無置
換のアリール基やアルキル基を置換基として有するテト
ラ置換ホスホニウムイオンが、熱や加水分解に対して安
定であり好ましく、具体的にはテトラフェニルホスホニ
ウム、テトラトリルホスホニウム等のテトラアリール置
換ホスホニウム、トリフェニルメチルホスホニウム等ど
のトリアリールホスフィンとアルキルハライドから合成
されたトリアリールモノアルキルホスホニウム、テトラ
ブチルホスホニウム等のテトラアルキル置換ホスホニウ
ム等が例示される。
The curing accelerator containing phosphorus represented by the general formula (3) used in the present invention is a molecular association product of a tetra-substituted phosphonium and an organic acid. It is considered that it is composed of a tetra-substituted phosphonium cation and an organic anion, and the positive charge of the tetra-substituted phosphonium ion is surrounded by the organic anion to have a stabilized structure. The phosphonium ion capable of having such a structure is preferably a tetra-substituted phosphonium ion having a substituted or unsubstituted aryl group or alkyl group as a substituent because it is stable against heat and hydrolysis, and specifically, tetraphenyl Examples thereof include tetraaryl-substituted phosphoniums such as phosphonium and tetratolylphosphonium; triarylmonoalkylphosphoniums synthesized from triarylphosphines and alkyl halides such as triphenylmethylphosphonium; and tetraalkyl-substituted phosphoniums such as tetrabutylphosphonium.

【0021】又分子化合物を形成するもう一方の成分で
ある有機酸としては、ビスフェノールA(2,2−(4
−ヒドロキシフェニル)プロパン、4,4’−ビフェニ
ル、ビスフェノールF(4,4’−メチレンビスフェノ
ール、2,4’−メチレンビスフェノール、2,2’−
メチレンビスフェノール)、ビス(4−ヒドロキシフェ
ニル)スルホン(ビスフェノールS)、3,3’−ジメ
チルビスフェノールS、ビスフェノールE(4,4’−
エチリデンビスフェノール)、ビスフェノールフルオレ
ン(4,4’−(9H−フルオレン−9−イリデン)ビ
スフェノール)、4,4’−メチリデンビス(2,6−
ジメチルフェノール)、ビス(4−ヒドロキシフェニ
ル)メタン等のビスフェノール類、4,4’−ビフェノ
ール、2,2’−ビフェノール、3,3’,5,5’−
テトラメチルビフェノール、2,2−ビス(4−ヒドロ
キシフェニル)1,1,1−3,3,3−ヘキサフルオ
ロプロパン等のビフェノール類、ヒドロキノン、レゾル
シノール、カテコール、ビス(4−ヒドロキシフェニ
ル)エーテル、2,6−ジヒドロキシナフタレン、1,
4−ジヒドロキシナフタレン、2,3−ジヒドロキシナ
フタレン、1,6−ジヒドロキシナフタレン、1,1’
−ビ−2−ナフトール、1,4−ジヒドロキシアントラ
キノン、2,2’−ジ(オキソビフェニル)ボレート等
が例示されるが、分子化合物の安定性や硬化性、硬化物
物性の点で、ビスフェノールA、ビスフェノールF
(4,4’−メチレンビスフェノール、2,4’−メチ
レンビスフェノール、2,2’−メチレンビスフェノー
ルや本州化学工業(株)製ビスフェノールF−Dのよう
なこれらの異性体混合物を含む)、ビスフェノールS,
3,3’−ジメチルビスフェノールS、4,4’−ビフ
ェノール、2,2−ビス(4−ヒドロキシフェニル)
1,1,1−3,3,3−ヘキサフルオロプロパン、ビ
ス(4−ヒドロキシフェニル)エーテル、2,3−ジヒ
ドロキシナフタレン、4,4’−ビフェニル、2,2’
−ジ(オキソビフェニル)ボレートが好適である。
The organic acid which is the other component forming the molecular compound is bisphenol A (2,2- (4
-Hydroxyphenyl) propane, 4,4'-biphenyl, bisphenol F (4,4'-methylenebisphenol, 2,4'-methylenebisphenol, 2,2'-
Methylene bisphenol), bis (4-hydroxyphenyl) sulfone (bisphenol S), 3,3'-dimethylbisphenol S, bisphenol E (4,4'-
Ethylidene bisphenol), bisphenol fluorene (4,4 '-(9H-fluorene-9-ylidene) bisphenol), 4,4'-methylidene bis (2,6-
Dimethylphenol), bisphenols such as bis (4-hydroxyphenyl) methane, 4,4′-biphenol, 2,2′-biphenol, 3,3 ′, 5,5′-
Biphenols such as tetramethylbiphenol, 2,2-bis (4-hydroxyphenyl) 1,1,1-3,3,3-hexafluoropropane, hydroquinone, resorcinol, catechol, bis (4-hydroxyphenyl) ether, 2,6-dihydroxynaphthalene, 1,
4-dihydroxynaphthalene, 2,3-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 1,1 '
-Bi-2-naphthol, 1,4-dihydroxyanthraquinone, 2,2'-di (oxobiphenyl) borate, etc. are exemplified, but in view of stability of the molecular compound, curability, and physical properties of the cured product, bisphenol A is used. , Bisphenol F
(Including 4,4'-methylenebisphenol, 2,4'-methylenebisphenol, 2,2'-methylenebisphenol and a mixture of these isomers such as bisphenol FD manufactured by Honshu Chemical Industry Co., Ltd.), bisphenol S ,
3,3'-Dimethylbisphenol S, 4,4'-biphenol, 2,2-bis (4-hydroxyphenyl)
1,1,1-3,3,3-hexafluoropropane, bis (4-hydroxyphenyl) ether, 2,3-dihydroxynaphthalene, 4,4′-biphenyl, 2,2 ′
-Di (oxobiphenyl) borate is preferred.

【0022】リンを含む硬化促進剤の含有量としては、
全エポキシ樹脂組成物中0.1〜1重量%が好ましく、
0.1重量%未満だとエポキシ樹脂組成物の硬化促進が
十分でなく、1重量%を越えるとエポキシ樹脂組成物の
流動性が低下し好ましくない。全エポキシ樹脂組成物中
の前記リンを含む硬化促進剤に起因するリン含有量は、
難燃性を発現するため0.015〜0.05重量%が好
ましい。0.015重量%未満だと難燃性のUL−94
垂直試験(試験片厚さ1.6mm)で、V−0が達成で
きず、十分な難燃性が得られない。一方0.05重量%
を越えるとエポキシ樹脂組成物の流動性が低下するため
好ましくない。
The content of the curing accelerator containing phosphorus is
0.1 to 1% by weight in the total epoxy resin composition is preferable,
If the amount is less than 0.1% by weight, the curing of the epoxy resin composition will not be sufficiently accelerated, and if the amount exceeds 1% by weight, the fluidity of the epoxy resin composition will decrease, which is not preferable. The phosphorus content due to the curing accelerator containing the phosphorus in the total epoxy resin composition,
In order to exhibit flame retardancy, 0.015 to 0.05% by weight is preferable. If it is less than 0.015% by weight, it is flame-retardant UL-94.
In a vertical test (test piece thickness: 1.6 mm), V-0 cannot be achieved and sufficient flame retardancy cannot be obtained. On the other hand, 0.05% by weight
If it exceeds the range, the fluidity of the epoxy resin composition decreases, which is not preferable.

【0023】本発明のエポキシ樹脂組成物には、臭素含
有有機化合物、アンチモン化合物、金属水酸化物等の難
燃剤を含有しなくUL−94垂直試験(試験片厚さ1.
6mm)で、V−0を達成できるものである。しかし、
意図して難燃剤を添加しなくとも原料や製造段階におい
て混入する難燃剤を0重量%にすることは経済上の理由
から困難であるため、ppm、ppbのオーダーで混入
しても本発明の成形性、耐半田クラック性等の効果は達
成される。
The epoxy resin composition of the present invention does not contain a flame retardant such as a bromine-containing organic compound, an antimony compound and a metal hydroxide, and the UL-94 vertical test (test piece thickness 1.
6 mm), V-0 can be achieved. But,
It is difficult to reduce the amount of the flame retardant mixed in the raw material or the manufacturing stage to 0% by weight even if the flame retardant is not intentionally added. Therefore, even if the flame retardant is mixed in the order of ppm and ppb, Effects such as moldability and solder crack resistance are achieved.

【0024】本発明のエポキシ樹脂組成物は、(A)〜
(D)成分の他、必要に応じて酸化ビスマス水和物等の
無機イオン交換体、γ-グリシドキシプロピルトリメト
キシシラン等のカップリング剤、カーボンブラック、ベ
ンガラ等の着色剤、シリコーンオイル、シリコーンゴム
等の低応力化成分、天然ワックス、合成ワックス、高級
脂肪酸及びその金属塩類もしくはパラフィン等の離型
剤、酸化防止剤等の各種添加剤を配合することができ
る。一般式(3)で示される硬化促進剤の特性を損なわ
ない範囲で、1,8−ジアザビシクロ(5,4,0)ウ
ンデセン−7、2−メチルイミダゾール等の触媒と併用
しても何ら問題はない。
The epoxy resin composition of the present invention comprises (A)-
In addition to the component (D), if necessary, an inorganic ion exchanger such as bismuth oxide hydrate, a coupling agent such as γ-glycidoxypropyltrimethoxysilane, a coloring agent such as carbon black and red iron oxide, a silicone oil, It is possible to add various additives such as a stress reducing component such as silicone rubber, a natural wax, a synthetic wax, a releasing agent such as higher fatty acids and their metal salts or paraffin, and an antioxidant. There is no problem even if it is used in combination with a catalyst such as 1,8-diazabicyclo (5,4,0) undecene-7 or 2-methylimidazole as long as the properties of the curing accelerator represented by the general formula (3) are not impaired. Absent.

【0025】本発明のエポキシ樹脂組成物は、(A)〜
(D)成分及びその他の添加剤等をミキサー等を用いて
常温混合し、ロール、ニーダー、押出機等の混練機で加
熱混練し、冷却後粉砕して得られる。本発明のエポキシ
樹脂組成物は、電気部品或いは電子部品であるトランジ
スタ、集積回路等の被覆・絶縁・封止等に適用すること
ができる。本発明のエポキシ樹脂組成物を用いて、半導
体素子等の電子部品を封止し、半導体装置を製造するに
は、トランスファーモールド、コンプレッションモール
ド、インジェクションモールド等の成形方法で成形硬化
すればよい。
The epoxy resin composition of the present invention comprises (A)-
It is obtained by mixing the component (D) and other additives at room temperature using a mixer or the like, heating and kneading with a kneader such as a roll, kneader or extruder, cooling and pulverizing. INDUSTRIAL APPLICABILITY The epoxy resin composition of the present invention can be applied to coating / insulating / sealing of transistors, integrated circuits, etc., which are electric or electronic parts. In order to manufacture a semiconductor device by sealing an electronic component such as a semiconductor element using the epoxy resin composition of the present invention, molding and curing may be performed by a molding method such as a transfer mold, a compression mold or an injection mold.

【0026】[0026]

【実施例】以下に、本発明の実施例を挙げて詳細に説明
するが、本発明はこれらに限定されるものではない。各
成分の配合割合は重量部とする。 実施例1 式(4)で示されるエポキシ樹脂a(軟化点60℃、エポキシ当量270、1 50℃でのICI溶融粘度0.8×102mPa・s、) 6.6重量部
The present invention will be described in detail below with reference to examples of the present invention, but the present invention is not limited thereto. The mixing ratio of each component is parts by weight. Example 1 Epoxy resin a represented by the formula (4) (softening point 60 ° C., epoxy equivalent 270, ICI melt viscosity at 150 ° C. 0.8 × 10 2 mPa · s,) 6.6 parts by weight

【0027】[0027]

【化7】 [Chemical 7]

【0028】 式(5)で示されるフェノール樹脂c(軟化点65℃、水酸基当量203、1 50℃でのICI溶融粘度1.0×102mPa・s、) 4.5重量部4.5 parts by weight of a phenolic resin c represented by the formula (5) (softening point: 65 ° C., hydroxyl group equivalent: 203, ICI melt viscosity at 150 ° C .: 1.0 × 10 2 mPa · s,)

【0029】[0029]

【化8】 [Chemical 8]

【0030】 式(6)で示される硬化促進剤e(水酸基当量185、リン含有量4.2重量 %) 0.4重量部[0030]   The curing accelerator e represented by the formula (6) (hydroxyl group equivalent: 185, phosphorus content: 4.2% by weight) %) 0.4 parts by weight

【0031】[0031]

【化9】 [Chemical 9]

【0032】 球状溶融シリカ(平均粒径22μm) 87.0重量部 カルナバワックス 0.4重量部 無機イオン交換体 0.4重量部 γ−グリシドキシプロピルトリメトキシシラン 0.4重量部 カーボンブラック 0.3重量部 をミキサーを用いて常温で混合し、70〜110℃でロ
ールを用いて混練し、冷却後粉砕し、タブレット化して
エポキシ樹脂組成物を得た。このエポキシ樹脂組成物を
以下の方法で評価した。結果を表1に示す。
Spherical fused silica (average particle size 22 μm) 87.0 parts by weight Carnauba wax 0.4 parts by weight Inorganic ion exchanger 0.4 parts by weight γ-glycidoxypropyltrimethoxysilane 0.4 parts by weight Carbon Black 0 0.3 part by weight was mixed at room temperature with a mixer, kneaded with a roll at 70 to 110 ° C., cooled, pulverized, and tableted to obtain an epoxy resin composition. This epoxy resin composition was evaluated by the following methods. The results are shown in Table 1.

【0033】評価方法 ・スパイラルフロー:EMMI−1−66に準じたスパ
イラルフロー測定用の金型を用いて、金型温度175
℃、注入圧力6.9MPa、硬化時間120秒で測定し
た。単位はcm。 ・硬化トルク:キュラストメータ((株)オリエンテッ
ク・製、JSRキュラストメータIVPS型)を用い、
金型温度175℃、加熱開始90秒後のトルクを求め
た。キュラストメータにおけるトルクは硬化性のパラメ
ータであり、数値の大きい方が硬化性が良好である。単
位はN・m。 ・熱時曲げ強度・熱時曲げ弾性率:低圧トランスファー
成形機を用いて、金型温度175℃、9.8MPa、硬
化時間120秒で試験片を成形し、ポストキュアとして
175℃で8時間処理した後、熱時曲げ強度及び熱時曲
げ弾性率をJIS K6911に準じて(260℃で)
測定した。単位はいずれもN/mm2。 ・吸水率:低圧トランスファー成形機を用いて金型温度
175℃、9.8MPa、硬化時間120秒で直径50
mm、厚さ3mmの円盤状試験片を成形し、ポストキュ
アとして175℃で8時間処理した。試験片の吸水処理
前と、85℃、相対湿度85%の環境下で168時間吸
湿処理した後の重量変化を測定し、試験片の吸水率を百
分率で示した。単位は%。 ・耐半田クラック性:低圧トランスファー成形機を用い
て金型温度175℃、注入圧力9.3MPa、硬化時間
120秒で160pLQFP(厚さ1.4mm、チップ
サイズ7mm×7mm)を成形した。ポストキュアとし
て175℃で8時間処理したパッケージ5個を、85
℃、相対湿度60%の環境下で168時間処理した後、
IRリフロー処理(260℃)を行った。処理後の内部
の剥離又はクラックの有無を超音波探傷装置で観察し、
不良パッケージの個数を数えた。不良パッケージの個数
がn個であるとき、n/5と表示する。 ・難燃性:低圧トランスファー成形機を用いて、金型温
度175℃、9.8MPa、硬化時間120秒で試験片
を成形し、ポストキュアとして175℃で8時間処理し
た後、UL−94垂直試験(試験片厚さ1.6mm及び
3.2mm)を行い、難燃性を判定した。
Evaluation method-Spiral flow: A mold temperature of 175 was used using a mold for spiral flow measurement according to EMMI-1-66.
The measurement was performed at a temperature of ℃, injection pressure of 6.9 MPa, and curing time of 120 seconds. The unit is cm. -Curing torque: Using a curast meter (JSR curast meter IVPS type manufactured by Orientec Co., Ltd.),
The mold temperature was 175 ° C. and the torque 90 seconds after the start of heating was determined. The torque in the curast meter is a parameter of curability, and the larger the value, the better the curability. The unit is Nm. -Hot bending strength-Hot bending elastic modulus: A low-pressure transfer molding machine is used to mold a test piece at a mold temperature of 175 ° C, 9.8 MPa, and a curing time of 120 seconds, and post-cure at 175 ° C for 8 hours. After that, the bending strength under heat and the bending elastic modulus under heat are measured according to JIS K6911 (at 260 ° C).
It was measured. The unit is N / mm 2 . Water absorption rate: using a low-pressure transfer molding machine, mold temperature 175 ° C., 9.8 MPa, curing time 120 seconds, diameter 50
A disc-shaped test piece having a thickness of 3 mm and a thickness of 3 mm was molded and post-cured at 175 ° C. for 8 hours. The change in weight of the test piece before the water absorption treatment and after the moisture absorption treatment in an environment of 85 ° C. and a relative humidity of 85% for 168 hours were measured, and the water absorption rate of the test piece was shown in percentage. Units%. Solder crack resistance: Using a low-pressure transfer molding machine, 160 pLQFP (thickness 1.4 mm, chip size 7 mm × 7 mm) was molded at a mold temperature of 175 ° C., an injection pressure of 9.3 MPa, and a curing time of 120 seconds. As a post cure, 85 packages of 5 packages treated at 175 ° C for 8 hours
After processing for 168 hours in an environment of ℃ and 60% relative humidity,
IR reflow treatment (260 ° C.) was performed. Observe the presence or absence of internal peeling or cracks after treatment with an ultrasonic flaw detector,
Counted the number of defective packages. When the number of defective packages is n, it is displayed as n / 5. -Flame retardancy: A low-pressure transfer molding machine was used to mold a test piece at a mold temperature of 175 ° C, 9.8 MPa, and a curing time of 120 seconds, and post cure was performed at 175 ° C for 8 hours, and then UL-94 vertical. A test (test piece thickness 1.6 mm and 3.2 mm) was performed to determine flame retardancy.

【0034】実施例2〜8、比較例1〜11 表1及び表2の処方に従い、実施例1と同様にしてエポ
キシ樹脂組成物を得て、実施例1と同様にして評価し
た。結果を表1、表2に示す。以下に実施例1以外で用
いた材料を示す。式(7)で示される硬化促進剤f(水
酸基当量224、リン含有量3.46重量%)
Examples 2 to 8 and Comparative Examples 1 to 11 Epoxy resin compositions were obtained in the same manner as in Example 1 according to the formulations in Tables 1 and 2 and evaluated in the same manner as in Example 1. The results are shown in Tables 1 and 2. The materials used in other than Example 1 are shown below. Curing accelerator f represented by formula (7) (hydroxyl group equivalent 224, phosphorus content 3.46% by weight)

【0035】[0035]

【化10】 [Chemical 10]

【0036】式(8)で示される硬化促進剤g(水酸基
当量165、リン含有量4.71重量%)
A curing accelerator g represented by the formula (8) (hydroxyl group equivalent 165, phosphorus content 4.71% by weight)

【0037】[0037]

【化11】 [Chemical 11]

【0038】式(9)で示される硬化促進剤h(水酸基
当量718、リン含有量4.31重量%)
A curing accelerator h represented by the formula (9) (hydroxyl group equivalent 718, phosphorus content 4.31% by weight)

【0039】[0039]

【化12】 [Chemical 12]

【0040】式(10)で示される硬化促進剤i(水酸
基当量238、リン含有量4.34重量%)
A curing accelerator i represented by the formula (10) (hydroxyl group equivalent: 238, phosphorus content: 4.34% by weight)

【0041】[0041]

【化13】 [Chemical 13]

【0042】1,8−ジアザビシクロ(5,4,0)ウ
ンデセン−7(硬化促進剤j)式(11)を主成分とす
るエポキシ樹脂b(融点105℃、エポキシ当量18
5、150℃でのICI溶融粘度0.2×102mPa
・s)
1,8-diazabicyclo (5,4,0) undecene-7 (curing accelerator j) Epoxy resin b containing the formula (11) as a main component (melting point 105 ° C., epoxy equivalent 18)
5, ICI melt viscosity at 150 ℃ 0.2 × 10 2 mPa
・ S)

【0043】[0043]

【化14】 [Chemical 14]

【0044】式(12)で示されるフェノール樹脂d
(軟化点65℃、水酸基当量168、150℃でのIC
I溶融粘度0.9×102mPa・s)
Phenolic resin d represented by the formula (12)
(IC at a softening point of 65 ° C, a hydroxyl equivalent of 168, and 150 ° C
I melt viscosity 0.9 × 10 2 mPa · s)

【0045】[0045]

【化15】 [Chemical 15]

【0046】[0046]

【表1】 [Table 1]

【0047】[0047]

【表2】 [Table 2]

【0048】[0048]

【発明の効果】本発明に従うと、成形性に優れる半導体
封止用エポキシ樹脂組成物が得られ、難燃剤を用いなく
とも難燃性に優れ、かつ耐半田クラック性に優れた半導
体装置を得ることができる。
INDUSTRIAL APPLICABILITY According to the present invention, an epoxy resin composition for semiconductor encapsulation having excellent moldability is obtained, and a semiconductor device excellent in flame retardancy and solder crack resistance is obtained without using a flame retardant. be able to.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4J002 CC04X CD04W CD05W CD06W CD07W CD13W CD20W DE136 DE146 DJ006 DJ016 EW177 FD016 FD130 FD14X FD157 GQ01 GQ05 4J036 AC01 AC02 AC03 AD01 AD08 AF01 AF06 DD07 FA01 FA03 FA05 FB08 4M109 AA01 EA02 EB04 EB12    ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 4J002 CC04X CD04W CD05W CD06W                       CD07W CD13W CD20W DE136                       DE146 DJ006 DJ016 EW177                       FD016 FD130 FD14X FD157                       GQ01 GQ05                 4J036 AC01 AC02 AC03 AD01 AD08                       AF01 AF06 DD07 FA01 FA03                       FA05 FB08                 4M109 AA01 EA02 EB04 EB12

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】(A)一般式(1)で示されるエポキシ樹
脂、(B)一般式(2)で示されるフェノール樹脂、
(C)無機充填材及び(D)一般式(3)で示されるリ
ンを含む硬化促進剤を必須成分とし、全エポキシ樹脂組
成物中の無機充填材が80〜90重量%で、かつ全エポ
キシ樹脂組成物中のリンを含む硬化促進剤に起因するリ
ン含有量が0.015〜0.05重量%であることを特
徴とする半導体封止用エポキシ樹脂組成物。 【化1】 (式中のR1、R2は、炭素数1〜4のアルキル基から選
択される基であり、互いに同一であっても、異なってい
ても良い。aは0〜3の整数、bは0〜4の整数、nは
平均値で1〜5の正数)。 【化2】 (式中のR1、R2は、炭素数1〜4のアルキル基から選
択される基であり、互いに同一であっても、異なってい
ても良い。aは0〜3の整数、bは0〜4の整数、nは
平均値で1〜5の正数)。 【化3】 (式中のR1〜R4は各々1価の芳香環を含む有機基及び
1価の脂肪族残基よりなる群より選ばれた置換基を表
し、それぞれ同じであっても異なっていても良く、有機
酸Yn-[H+]n-mはプロトンm個を分子外に放出した有機
アニオンを表す。n≧m≧1)
1. An epoxy resin represented by the general formula (1) (A), a phenol resin represented by the general formula (2) (B),
(C) an inorganic filler and (D) a phosphorus-containing curing accelerator represented by the general formula (3) as an essential component, and the inorganic filler in the total epoxy resin composition is 80 to 90% by weight, and the total epoxy is An epoxy resin composition for semiconductor encapsulation, wherein the phosphorus content in the resin composition due to the curing accelerator containing phosphorus is 0.015 to 0.05% by weight. [Chemical 1] (In the formula, R 1 and R 2 are groups selected from alkyl groups having 1 to 4 carbon atoms and may be the same or different. A is an integer of 0 to 3 and b is An integer of 0 to 4, and n is a positive number of 1 to 5 on average. [Chemical 2] (In the formula, R 1 and R 2 are groups selected from alkyl groups having 1 to 4 carbon atoms and may be the same or different. A is an integer of 0 to 3 and b is An integer of 0 to 4, and n is a positive number of 1 to 5 on average. [Chemical 3] (In the formula, R 1 to R 4 each represent a substituent selected from the group consisting of a monovalent aromatic ring-containing organic group and a monovalent aliphatic residue, and may be the same or different. Well, the organic acid Y n- [H + ] nm represents an organic anion that releases m protons out of the molecule, n ≧ m ≧ 1).
【請求項2】 請求項1記載のエポキシ樹脂組成物を用
いて半導体素子を封止してなることを特徴とする半導体
装置。
2. A semiconductor device obtained by encapsulating a semiconductor element using the epoxy resin composition according to claim 1.
JP2001283377A 2001-09-18 2001-09-18 Epoxy resin composition and semiconductor device Expired - Fee Related JP4380101B2 (en)

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Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006009147A1 (en) * 2004-07-22 2006-01-26 Sumitomo Bakelite Company, Ltd. Resin composition for semiconductor sealing and semiconductor device
JP2006274185A (en) * 2005-03-30 2006-10-12 Sumitomo Bakelite Co Ltd Epoxy resin composition for semiconductor encapsulation and semiconductor device
KR101254524B1 (en) * 2004-11-02 2013-04-19 스미토모 베이클라이트 가부시키가이샤 Epoxy resin composition and semiconductor device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006009147A1 (en) * 2004-07-22 2006-01-26 Sumitomo Bakelite Company, Ltd. Resin composition for semiconductor sealing and semiconductor device
US7956136B2 (en) 2004-07-22 2011-06-07 Sumitomo Bakelite Company, Ltd. Resin composition for semiconductor encapsulation and semiconductor device
US8124695B2 (en) 2004-07-22 2012-02-28 Sumitomo Bakelite Company, Ltd. Resin composition for semiconductor encapsulation and semiconductor device
KR101193005B1 (en) 2004-07-22 2012-10-19 스미토모 베이클라이트 가부시키가이샤 Resin composition for semiconductor sealing and semiconductor device
KR101254524B1 (en) * 2004-11-02 2013-04-19 스미토모 베이클라이트 가부시키가이샤 Epoxy resin composition and semiconductor device
TWI455991B (en) * 2004-11-02 2014-10-11 Sumitomo Bakelite Co Epoxy resin composition and semiconductor device
JP2006274185A (en) * 2005-03-30 2006-10-12 Sumitomo Bakelite Co Ltd Epoxy resin composition for semiconductor encapsulation and semiconductor device
JP4687195B2 (en) * 2005-03-30 2011-05-25 住友ベークライト株式会社 Epoxy resin composition for semiconductor encapsulation and semiconductor device

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