JP2002246128A - Electrical connection device - Google Patents

Abstract

(57) [Summary] To improve the elastic force of an elastic body. An electrical connection device includes a plate-shaped housing having a plurality of holes formed in at least one row penetrating in a thickness direction of the housing, assembling the housing on one surface side of a wiring board, and forming a conductive board on the wiring board. A plurality of contacts for electrically connecting the conductive portion and the electrode portion of the integrated circuit are arranged in the hole, and a long elastic body contacting the housing and the contact is arranged in the housing so as to extend in a direction crossing the long hole. are doing. The elastic body has its elastic force reinforced by a coil spring disposed in a long rubber member.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for electrically connecting a conductive portion of a substrate such as a wiring substrate and an electrode portion of a device under test such as an integrated circuit.

[0002]

2. Description of the Related Art In general, a conduction test of an integrated circuit is performed by electrically connecting a conductive portion such as a wiring pattern of a wiring board and electrode portions such as a lead electrode, a pad electrode, a bump electrode, and a bump electrode of the integrated circuit. This is performed using a connecting device.

As one of such electrical connection devices, there is a device using a plurality of contacts having an arc shape, a J shape, an S or Z shape, and an I shape (for example, Japanese Patent Application Laid-Open No. H10-17788).
No. 6, JP-A-11-31566, JP-A-11-31566
162605, JP-A-10-116670).

[0004] In any of these electrical connection devices, a plurality of long holes penetrating in the thickness direction of the plate-shaped housing are formed in at least one row, and the housing is assembled on one surface side of a wiring board. A plurality of contacts for electrically connecting the conductive portion of the wiring board and the electrode portion of the integrated circuit are arranged in the elongated hole, and the elongated elastic body contacting the housing and the contact traverses the elongated hole in the housing. It is arranged to extend in the direction.

[0005] In the above electrical connection device, when the electrode portion of the integrated circuit is pressed against the contact, the contact elastically deforms the elastic body and is pressed against the conductive portion of the wiring board.
As a result, the conductive portion of the wiring board is electrically connected to the electrode portion of the integrated circuit, and the conduction test of the integrated circuit is performed in this state.

[0006]

However, in the conventional electrical connection device, the narrower the pitch of the electrodes of the integrated circuit, the smaller the cross-sectional area of the elastic body must be. Since it is only used as a body, if the cross-sectional area of the elastic body is reduced, the elastic force of the elastic body becomes insufficient, and as a result, the conductive part and the electrode part cannot be maintained in a good electrical connection state. .

An object of the present invention is to increase the elastic force of an elastic body.

[0008]

An electrical connection device according to the present invention is a plate-like housing having at least one row of a plurality of holes penetrating in the thickness direction of the housing, each of which has a conductive board. A plurality of contacts arranged in the hole for electrically connecting the active portion and the electrode portion of the device under test; and the housing and the contact arranged in the housing so as to extend in a direction crossing the hole. And a long elastic body that comes into contact with. The elastic body includes a long rubber member, and a coil spring disposed in the rubber member so as to extend in a longitudinal direction of the rubber member.

Another electrical connection device according to the present invention is a board having a plurality of conductive portions on one surface, and a plate-like housing disposed on one side of the board, wherein the housing is A housing having a plurality of holes penetrating in the thickness direction at least in a row, and a plurality of contacts each arranged in the hole to electrically connect the conductive portion and the electrode portion of the device under test. A long elastic body arranged in the housing so as to extend in a direction crossing the hole and in contact with the housing and the contact. The elastic body includes a long rubber member, and a coil spring disposed in the rubber member so as to extend in a longitudinal direction of the rubber member.

When the electrode portion of the test object is pressed by the contact, the contact elastically deforms the rubber member so that the rubber member is compressed and is pressed by the conductive portion of the wiring board. When the rubber member is elastically deformed, the coil spring in the rubber member is also elastically deformed to a compressed state. Thereby, the elastic force of the elastic body is significantly higher than that of the conventional elastic body having the same cross-sectional area.

[0011] The coil spring may be arranged coaxially in the rubber member. The elastic body may have a columnar or cylindrical shape. Further, the housing may have a plurality of holes in a plurality of rows, and the elastic body may be provided for each of the rows of the holes.

The contact comprises a needle tip which comes into contact with the electrode portion, a needle central portion having an arc-shaped outer surface, and a needle rear portion having an outer surface following the arc-shaped outer surface. And the outer surface of at least one of the rear portion of the needle is in contact with the conductive portion, and the central portion of the needle and the rear portion of the needle are in contact with the elastic body. According to such a contact, the needle tip is reliably elastically deformed at a portion on the needle tip side from the contact portion with the conductive portion, or the contact tip reliably elastically deforms the elastic body, so that the needle tip is Because it is displaced with respect to the electrode part, a part of the film such as an oxide film present in the electrode part is scraped or scraped off by the needle tip,
As a result, the contact and the electrode section are maintained in a good electrical connection state.

The contact has a rod-like shape extending in a direction penetrating the hole, and has a recess extending in a direction crossing the hole to receive a part of the elastic body. Can be. According to such a rod-shaped contact, the contact is supported by the elastic and the housing by being arranged in the hole and receiving a part of the elastic in the recess. Further, the rod-shaped contact can be arranged at a higher density than the arc-shaped, J-shaped, S- or Z-shaped contact, and can be easily manufactured with a simple shape.

[0014] The electrical connection device may further include a plurality of pins for positioning the housing on the substrate. According to such an electrical connection device, the contact and the conductive portion of the substrate are accurately positioned by the pins.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 3, an electrical connection device 10 is used as a socket used for an electrical test of a flat plate-shaped device under test 12, that is, an electrical test. The device under test 12 is, in the illustrated example, a semiconductor device such as a package or a molded integrated circuit.

The device under test 12 includes a main body 14 packaged or molded in the shape of a rectangular plate, and a main body 1.
And a plurality of electrode portions 16 protruding outward from a pair of four opposed sides. The electrode units 16 are divided into a plurality of electrode unit groups respectively corresponding to a pair of opposing sides, and are arranged in parallel at a predetermined pitch for each electrode unit group. The electrode section 16 is a lead electrode in the illustrated example.

The socket or electrical connection device 10 comprises:
A substrate 20, a plurality of contacts 22 individually corresponding to the electrode portions 16, a flat cover or housing 24 assembled on the upper surface of the substrate 20, and a plurality of elastic bodies 26 arranged on the housing 24; And a thick plate-like guide block 28 assembled on the upper side of the housing 24. The contact 22 is formed of a metal material having conductivity into a plate-like contact having a J-shape.

The substrate 20 is a wiring substrate in which a wiring pattern is formed on one surface of a plate member 30 formed of an electrically insulating material by a printed wiring technique.
A plurality of strip-shaped printed wiring portions, that is, conductive portions 32 respectively corresponding to the pairs of the second and electrode portions 16 are provided on one surface of the plate member 30.

Each conductive part 32 is a part of a wiring pattern. The conductive part 32 is divided into a plurality of conductive part groups individually corresponding to the electrode part group of the device under test 12. In the illustrated example, the conductive portions 32 are divided into two conductive portion groups spaced apart in the longitudinal direction, and the arrangement pitch of the electrode portions 16 of the electrode portion group corresponding to each conductive portion group is determined. They are formed in parallel at the same pitch.

Each contact 22 is an ono-type needle whose tip extends in the longitudinal direction of the contact 22 as viewed in plan. The contact 22 includes a needle tip portion 34 having a needle tip, a needle central portion 36 integrally following the rear end of the needle tip portion 34, and a needle rear portion 38 integrally following the rear end of the needle central portion 36. Have.

The needle central portion 36 is curved in an arc shape. The needle rear portion 38 has an outer surface that follows the arcuate outer surface of the needle central portion 36, and has an arcuate inner surface that follows the arcuate inner surface of the needle central portion 36. The contacts 22 are divided into a plurality of contact groups individually corresponding to the electrode group of the device under test 12.

In the illustrated example, the contact 22 is the conductive part 3
The two contact groups are spaced apart in the longitudinal direction and are formed in parallel at the same pitch as the arrangement pitch of the electrode sections 16 of the electrode section group corresponding to each contact group.

As will be described later, each contact 22 acts as a first contact portion where the tip of the needle contacts the electrode portion 16, and at least the outer surface of the needle rear portion 38 is pressed against the conductive portion 32. 2 to act as a contact.

The housing 24 is provided on the conductive portion 3 of the substrate 20.
A plurality of elongated holes 40 formed in parallel to face
And a plurality of recesses 42 extending continuously in the arrangement direction of the elongated holes 40 and communicating with the elongated holes 40, and openings 44 communicating with the elongated holes 40 and the recesses 42. The housing 24 can be manufactured from an electrically insulating material.

The elongated hole 40 has an oblong plane shape that is long in the longitudinal direction of the conductive portion 32.
Through the thickness direction to open to the upper surface of the housing 24 and to the opening 44 on the substrate 20 (lower end) side. The long hole 40 is a long hole for accommodating at least the needle central portion 36 of the contact 22, and therefore, in the illustrated example, the same number of long holes 40 as the contact 22 are provided.

The elongated holes 40 are also divided into a plurality of elongated holes individually corresponding to the electrode groups of the device under test 12. In the illustrated example, the elongated holes 40 are divided into two elongated hole groups spaced apart in the longitudinal direction, and are arranged at the same pitch as the arrangement pitch of the electrode portions 16 of the electrode group corresponding to each elongated hole group. They are formed in parallel.

The recess 42 has a rectangular shape that is long in the direction in which the long holes 40 are arranged, and is open to the lower part of the long hole 40 and the upper part of the opening 44. The opening 44 has a rectangular shape, and is open to the surface (lower surface) of the housing 24 on the substrate 20 side. In the illustrated example, two recesses 42 and two openings 4 spaced apart in the longitudinal direction of the conductive portion 32 are provided.
4 are formed.

The pair of the recess 42 and the opening 44 corresponds to a group of slots, a group of conductive parts, and a group of contacts. Double recess 42
Are formed at positions opposite to each other with respect to the elongated hole group, and a corresponding surface on the elongated hole group side is an arc-shaped surface 46.

As shown in FIGS. 3 and 4, each elastic body 26 has a coil spring 50 coaxially embedded in a cylindrical rubber member 48. In the illustrated example, two elastic bodies 26 respectively corresponding to the recesses 42 are used. Each elastic body 26 is arranged in the corresponding recess 42 so as to extend in the arrangement direction of the elongated holes 40 in the elongated hole group.

The rubber member 48 is made of a rubber material such as silicone rubber having excellent electrical insulation, heat resistance, chemical resistance and the like. The coil spring 50 extends in the longitudinal direction of the rubber member 48. The coil spring 50 may be tightly wound in a tension coil spring shape so that adjacent ring portions are in contact with each other, or may be roughly wound in a compression coil spring shape so that adjacent ring portions are not in contact with each other. Good.

The guide block 28 is manufactured in the form of a rectangular plate from an electrically insulating material, and has a rectangular guide hole 52 for guiding an object to be inspected at the center.

In the electrical connection device 10, the contact 22
Before the housing 24 is mounted on the substrate 20, in a state where the elastic body 26 is disposed in the recess 42, the needle tip protrudes from the elongated hole 40 and the needle rear portion 38 is located in the recess 42. It is arranged on the housing 24 from the side where it is mounted on the board 20. Such work is preferably performed with the housing 24 turned upside down in order to enhance workability.

The housing 24 is formed by screwing a plurality of bolts 54 passing through the housing 24 into the screw holes of the board 20 after the contacts 22 are arranged as described above.
Each contact 22 has at least an arcuate outer surface of the needle rear portion 38 (second
(Contact portion) is attached to the substrate 20 so as to contact the corresponding conductive portion 32.

The board 20 and the housing 24 are
This is performed by inserting a plurality of positioning pins 56 attached to the housing 24 so as to extend from the substrate 20 toward the housing 24 into positioning holes 58 formed in the housing 24 so as to penetrate the housing 24 in the thickness direction. Thus, the contact 22 and the conductive portion 32 are accurately positioned and electrically contact.

The guide block 28 may be assembled to the housing 24 by a plurality of bolts (not shown), or may be assembled to the board 20 together with the housing 24 by bolts 54.

In the electrical connection device 10, the DUT 1
2 is arranged in the guide hole 52 of the guide block 28,
The electrode portion 16 is pressed against the needle tip (first contact portion) of the contact 22. As a result, the contact member 22 elastically deforms the rubber member 48 into a compressed state, and the conductive member 3 of the substrate 20.
2 is pressed.

When the rubber member 48 is elastically deformed by the contact 22, the coil spring 50 in the rubber member 48 is also elastically deformed together with the rubber member 48 into a compressed state. Resilient body (elastic body without a coil spring).

As a result, in an apparatus for a device under test where the arrangement pitch of the electrode portions is small, even if the cross-sectional area of the elastic body 26 is reduced, there is no possibility that the elastic force of the elastic body 26 becomes insufficient. The part 32 and the electrode part 16 are connected to and maintained in a good electrical state by the contact 22.

Each contact 22 is reliably elastically deformed at a position closer to the needle tip than the contact portion with the conductive portion 32 when the electrode portion 16 is pressed against the contact, or the contact 22 is elastically deformed. By making the body 26 elastically deform,
The needle tip is displaced with respect to the electrode section 16. Thereby, a part of the film such as the oxide film present on the electrode portion 16 is scraped or scraped off by the needle tip, and as a result, the contact 22 and the electrode portion 16 are connected to a good electrical state. Is maintained in that state.

In the above embodiment, the elastic body 26 having a solid cylindrical shape is used, but an elastic body 60 having a hollow cylindrical shape as shown in FIG. 5 may be used instead. Also, instead of using an ono-type needle whose needle tip extends in the longitudinal direction of the contact as viewed in plan, as a contact, a flea needle in which the needle tip extends in a direction intersecting with the longitudinal direction of the contact in plan view Alternatively, a contact having another shape such as a conical or pyramid-shaped needle having a needle tip portion may be used.

Referring to FIG. 6 and FIG. 7, the electrical connection device 70 is used as a socket used for an electrical test, that is, an electrical test of the flat test object 72. Inspection object 72
In the illustrated example, is an integrated circuit in which a plurality of electrode portions 76 are formed in a matrix at high density within a rectangular area on one surface of the chip body 74, such as BGA and CPS.
Therefore, the electrode portion 76 is formed as a hemispherical protruding electrode from a conductive metal material having a low melting point such as solder.

The socket or electrical connection device 70 is
A substrate 80, a plurality of contacts 82 individually corresponding to the electrode portions 76 of the device under test 72, a thick cover or housing 84 assembled on the upper surface of the substrate 80, and a plurality of And a plate-like guide 88 assembled on the upper side of the housing 84. The contact 82 is formed of a conductive material into a rod-shaped, i.e., I-shaped contact having a circular cross-sectional shape.

The substrate 80 is a wiring substrate in which a wiring pattern is formed on one surface of a plate member 90 formed of an electrically insulating material by a printed wiring technique.
A plurality of strip-shaped printed wiring portions, that is, conductive portions 92 respectively corresponding to pairs of the second and electrode portions 76 are provided on one surface of the plate member 90.

Each conductive part 92 is a part of a wiring pattern, and a part of each conductive part 92 is used as an electrode land corresponding to a pair of the electrode part 76 and the contact 82. Therefore, a part of the conductive portion 92, that is, the electrode land,
It is formed in the same matrix as the electrode section 76 of the device under test 72.

As shown in FIGS. 8 and 9, each contact 82 has a concave portion 94 extending diametrically on the outer peripheral surface, a first contact portion 96 formed at one end in the axial direction, and an axial direction. And a second contact portion 98 formed at the other end of the second contact portion.

The housing 84 has a plurality of elongated holes 100 penetrating in the thickness direction thereof, arranged in a matrix in first and second directions orthogonal to each other, that is, corresponding to the electrode lands of the electrode portion 76 and the conductive portion 92. It is provided in the form of a matrix. The oblong hole 100 has an oblong plane shape that is long in the same direction, and is inclined in a longitudinal direction (second direction) of the oblong with respect to a plane parallel to the housing 84.

The long hole 100 is arranged such that the axis of the long hole 100 located on one side of the center line of the housing 84 in the longitudinal direction of the long hole 100 is one side with respect to an imaginary plane perpendicular to the housing 84. The housing 8
4 long hole 1 of a hole row located on the other side with respect to the center line
The axis of 00 is inclined to the other side with respect to the virtual plane.

As shown in FIG. 9, each elastic body 86 is formed in the same manner as the elastic body 26 in the above-described embodiment by embedding the coil spring 50 in the rubber material 48, and also in the first direction. It is provided for each row of the elongated holes 100 to be aligned.

Each elastic body 86 has a corresponding row of elongated holes 100.
Extending in a first direction across the housing 84.
And is fitted in a U-shaped notch 104 formed in a wall between adjacent elongated holes 100 of the housing 84 and opened to the substrate 80 side. For this reason, by fitting the elastic body 86 into the notch 104, the elastic body 86
Can be assembled to the housing 84, and the work of assembling the elastic body 86 to the housing 84 becomes easy.

Each contact 82 is also arranged such that the first and second contact portions 96 and 98 are on the guide block 88 side and the substrate 80 side, respectively, and a part of the elastic body 86 is received in the recess 94. It is arranged in the elongated hole 100.

The end face of the contact 82 on the first contact portion 96 side is a flat area inclined with respect to the axis of the contact 82. On the other hand, the end face of the contact 82 on the second contact portion 98 side is a flat surface 1 substantially perpendicular to the axis of the contact 82.
06. Therefore, it is not necessary to perform special processing on one end and the other end of the contact 82, and the contact 82 can be easily manufactured.

The second contact portion 98 includes a flat surface 106 and a flat outer surface 108 extending from the flat surface 106 toward the opening of the recess 94 at a small angle of less than 90 degrees with respect to the axis of the contact 82. It is a corner forming a boundary.

When the contact 82 has the above-mentioned outer surface portion 108 at the end on the second contact portion 98 side, the contact 82
Is inserted between the inner surface of the elongated hole 100 and the elastic body 86 from above the housing 84 against the force of the elastic body 86, the contact 82 can be easily assembled to the housing 84, and therefore, the housing 84 The operation of assembling the contact 82 to the contact is facilitated.

The recess 94 is a groove having a U-shaped cross section corresponding to the cross section of the elastic body 86, and is opened outward in the diameter direction of the contact 82. For this reason, the contact 82 is moved from above the housing 84 until the elastic body 86 is partially received in the recess 94.
The contact 82 can be assembled to the housing 84 by inserting the contact 82 between the inner surface of the elongated hole 100 and the elastic body 86 against the force of the above, and the assembling work of the contact to the housing 84 becomes easier. .

The contact 82 has a portion (recess 9) on its outer peripheral surface.
4 is opposite to the inner surface of the elongated hole 100. For this reason, in combination with the fact that a part of the elastic body 86 is received in the recess 94, even when the contact 82 is not in contact with any of the electrode portion 76 and the conductive portion 92, The position and posture of the contact 82 are stably maintained. In this case, the contact 8
If 2 is pressed against the inner surface of the elongated hole 100 by the elastic body 86, the position and the posture of the contact 82 are more stably maintained.

The elastic body 86 is fitted into the notch 104 in a tight fit state, or the end is inserted into a hole formed in the housing 84, or is bonded to the housing 84 at least at the end. , The housing 84.

The guide block 88 is provided with an opening 110 having a rectangular planar shape for receiving the device 72 to be inspected.
2 at a location corresponding to the arrangement area. The upper part of the opening 110 is an inclined surface 112 that becomes narrower toward the center.
The guide block 88 is superimposed on the housing 84, and is assembled to the substrate 80 with the housing 84 by a plurality of screw members 114 which are screwed to the substrate 80 through the guide block 88 and the housing 84. I have.

In a state where the housing 84 and the guide block 88 are assembled to the substrate 80, the first contact portion 96 of the contact 82 projects from the hole 22 but the second contact 96
The contact portion 98 is located substantially on the lower surface of the housing 84. However, the second contact portion 98 may be in contact with the conductive portion 92 or may be slightly away from the conductive portion 92.

The relative positioning of the substrate 80, the housing 84 and the guide block 88 is determined by the plurality of guide pins 116 provided on one of the housing 84 and the guide block 88.
This is performed by being received in the guide hole 118 formed on the other side of 8. The housing 80 and the guide block 88 can also be formed of an electrically insulating material.

The test object 72 is disposed in the opening 110 of the guide block 88 as shown in FIG. 7, and the electrode portion 76 is pressed by the first contact portion 96 of the contact 82. As a result, the contact 82 receives the force of moving the elastic body 86 toward the substrate 80 against the force of the elastic body 86, and as shown in FIG. Pressed. As a result, the electrode portions 76 and the conductive portions 92 are electrically connected to each other by the contacts 82 in a one-to-one manner. Also, the second contact portion 9
Since 8 is a corner at the boundary between the flat surface 106 and the outer surface portion 108, the second contact portion 98 reliably contacts the conductive portion 92.

In the electrical connection device 70, the test object 7
When the second electrode portion 76 is pressed by the first contact portion 96 of the contact 82, the contact 82 elastically deforms the rubber member 48 and the coil spring 50 into a compressed state. It is significantly higher than a conventional elastic body having the same cross-sectional area (an elastic body without a coil spring).

As a result, in an apparatus for a device under test where the arrangement pitch of the electrode portions is narrow, even if the cross-sectional area of the elastic body 86 is reduced, there is no possibility that the elastic force of the elastic body 86 becomes insufficient. The portion 92 and the electrode portion 76 are connected to and maintained in a good electrical state by the contact 82.

In the electrical connection device 70, the first contact portion 96 is a plane region inclined with respect to the axis of the contact 82, and the elongated hole 100 has an angle with respect to the axis perpendicular to the substrate 80. From the first contact portion 96
8B, the contact 82 is inclined toward the elastic body 86 with respect to the axis perpendicular to the housing 84 and the axis of the elongated hole 100 against the force of the elastic body 86 as shown in FIG. Acts on the contact 82.

The first and second contact portions 96 and 98 reliably contact the electrode portion 76 and the conductive portion 92, respectively, due to the inclination force. When the inclination force is released, the contact portions 96 and 98 are released. Is returned to the original state by the restoring force of the elastic body 86, and the contact 82 is stably maintained in the housing 84.
Even when the contact 82 is tilted and restored,
The elastic force of the elastic body 86 is reinforced by a coil spring,
Not shortage.

If the contact area of the first contact portion 96 with the electrode section 76 is a plane area inclined with respect to the axis of the contact 82, the electrode section 76 may be a projecting electrode such as a hemispherical electrode. In addition, the planar region is pressed against the side around the top of the electrode section 76, and there is no possibility that the top of the electrode section 76 will be crushed.

As described above, the bar-shaped contact 82 can be arranged at a higher density than the arc-shaped, J-shaped, S- or Z-shaped contact, is simple in shape, and can be easily formed. Can be manufactured. Further, the shape of the elastic body 86 disposed in the housing 84 so as to cross the elongated hole 100 is simple, and the elastic body 86 can be easily manufactured.

As a result, the long hole 10 of the housing 84
According to the electrical connection device 70 using the elastic body 86 crossing the zero and the rod-shaped contact 82 having the recess 94 for receiving at least a part of the elastic body 86, the contact 8
Despite being able to increase the placement density of 2,
Manufacture and arrangement work of the contact 82 and the elastic body 86 are facilitated.

The axis of the long hole 100 and the contact 82 located on one side of the virtual line 102 and the axis of the long hole 100 and the contact 82 located on the other side are reversed. Then, when the contact portions 96 and 98 are pressed by the electrode portion 76 and the conductive portion 92, a force for displacing the housing 84 with respect to the conductive portion 92 in a direction parallel to the housing 84 is applied to one of the hole rows. Since the contact and the contact in the other row of holes are reversed, the housing 84 does not move with respect to the conductive portion 92.

In any of the above embodiments, the guide block may be formed integrally with the housing, or may not be provided with the guide block. In an electrical connection device in which a plurality of housings are assembled on the same substrate,
One guide block may have a common shape for a plurality of housings.

The present invention can be applied to an electrical connection device using a contact having a shape other than that of the above-described embodiment, and can be used for conducting a current test of another flat test object such as a liquid crystal display panel. The present invention can also be applied to an electrical connection device used in a state where the upper and lower sides are reversed in the above-described embodiment.

The present invention is not limited to the above embodiment, but can be variously modified without departing from the gist thereof.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of an electrical connection device according to the present invention, with a guide block removed.

FIG. 2 is a sectional view taken along line 2-2 in FIG.

FIG. 3 is an enlarged sectional view showing the vicinity of a contact in the electrical connection device shown in FIG.

FIG. 4 is a perspective view showing one embodiment of an elastic body.

FIG. 5 is a perspective view showing another embodiment of the elastic body.

FIG. 6 is a plan view showing another embodiment of the electrical connection device according to the present invention.

FIG. 7 is a sectional view taken along the line 7-7 in FIG. 6;

FIG. 8 is a perspective view showing an embodiment of a contact used in the electrical connection device shown in FIG.

9A and 9B are enlarged cross-sectional views showing the vicinity of a contact in the electrical connection device shown in FIG. 6, wherein FIG. 9A is a diagram showing a state where an electrode portion is in contact with the contact, and FIG. It is a figure showing the state where a child was pressed by an electrode part.

[Explanation of symbols]

 10, 70 Electrical connection device 12, 72 Device under test 14, 74 Body of device under test 16, 76 Electrode section 20, 80 Substrate 22, 82 Contact 24, 84 Housing 26, 60, 86 Elastic body 28, 88 Guide Block 30, 90 Plate member 32, 92 Conductive part 34 Needle tip 36 Needle center 38 Needle rear 40, 100 Long hole 42 Recess 44 Opening 48 Rubber member 50 Coil spring 56, 114 Positioning pin 58, 116 Positioning hole

Claims (8)

[Claims] An apparatus for electrically connecting a plurality of conductive portions formed on one surface of a substrate and a plurality of electrode portions of a device under test, comprising: a plate-like housing; A housing having at least one row of a plurality of holes penetrating in the thickness direction; a plurality of contacts each arranged in the hole to electrically connect the conductive portion and the electrode portion; A long elastic member disposed in the housing so as to extend in the transverse direction and in contact with the housing and the contactor; the elastic member includes a long rubber member, and the rubber member in the rubber member. And a coil spring arranged to extend in the longitudinal direction of the electrical connection device. 2. A substrate having a plurality of conductive portions on one surface, and a plurality of holes formed in a plate-like housing disposed on one side of the substrate and penetrating in a thickness direction of the housing. A plurality of contacts arranged in the hole to electrically connect the conductive portion and the electrode portion of the device under test, and a plurality of contacts each extending in a direction crossing the hole. A long elastic body disposed in the housing and in contact with the housing and the contact, wherein the elastic body extends into the rubber member in a longitudinal direction of the rubber member; Electrical connection device comprising: a coil spring disposed at 3. The electrical connection device according to claim 1, wherein the coil spring is coaxially arranged in the rubber member. 4. The electrical connection device according to claim 1, wherein said elastic body has a columnar or cylindrical shape. 5. The electrical device according to claim 1, wherein the housing has a plurality of holes in a plurality of rows, and the elastic body is provided for each of the rows of the holes. Connection device. 6. The contactor includes a needle tip contacting the electrode portion, a needle central portion having an arc-shaped outer surface, and a needle rear portion having an outer surface following the arc-shaped outer surface. 2. The outer peripheral surface of at least one of a central portion and the rear portion of the needle is in contact with the conductive portion, and the elastic body is in contact with at least one of the central portion of the needle and the rear portion of the needle. The electrical connection device according to any one of claims 1 to 5, wherein 7. The contact has a rod-like shape extending in a direction penetrating the hole, and has a recess extending in a direction crossing the hole to receive a part of the elastic body. The electrical connection device according to any one of claims 1 to 5, wherein: 8. The electrical connection device according to claim 1, further comprising a plurality of pins for positioning said housing on said substrate.