JP2002221510A - Storage type chemical / physical phenomenon detection device - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To detect a plurality of chemical physical phenomena by arranging sensor elements for detecting chemical physical phenomena in an array or to detect the distribution of the same chemical physical phenomenon at once. Provide a storage-type chemical and physical phenomenon detection device that can be used. A plurality of cumulative chemical / physical phenomena devices are provided.
A storage type chemical / physical phenomenon detection device array 1, which is arranged two-dimensionally or two-dimensionally, a vertical selector 2, and a horizontal selector 4, for detecting a plurality of chemical / physical phenomena at once, or for the same chemical / physical phenomenon. One-dimensional or two-dimensional distribution of physical phenomena is detected at once.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an accumulation type chemical / physical phenomenon detecting device (AMIS) for detecting a chemical / physical phenomenon.

[0002]

2. Description of the Related Art Conventionally, techniques in such a field include:
For example, Japanese Patent Application No. 2000-
No. 293669.

FIG. 4 is a block diagram of such a storage type chemical / physical phenomenon detecting apparatus.

In this figure, _ID is an input diode, _IG is an input gate, SP is a sensing unit,
O _G is an output gate, FD is a floating diode, V _DD is a power supply voltage terminal, V _RST is a reset terminal,
V _OUT is an output terminal, and V _bN is a bias voltage setting terminal.

For example, an ion sensitive field effect transistor (ISFET) will be described as an example. MOS
Field-effect transistor (MOSFET: Metal-
Oxide-Semiconductor Field
An ISFET having a structure in which a thin film serving as an ion-sensitive film (a silicon nitride film is generally used for hydrogen ions) is deposited on a gate electrode of an Effect Transistor, and after appropriately waterproofing, an ion concentration is measured. Apply to the aqueous solution you want to know.

In the aqueous solution, a reference electrode for determining the potential of the aqueous solution is further disposed. Through a gate electrode provided with a silicon nitride film, a change in the potential corresponding to the hydrogen ion concentration is applied to the silicon substrate. Appear on the surface. Then, the hydrogen ion concentration changes, and its potential also changes. This potential change on the silicon surface is used to determine the change in transistor current,
Alternatively, the ion concentration of the aqueous solution can be known by taking out the change as a change in the threshold voltage.

As described above, in the conventional AMIS configuration, V
_{When a} reset signal is applied to the _RST terminal, the FD section is fixed at a certain potential, and the signal charge from the sensing section SP is accumulated there.

[0008]

However, according to the conventional storage type chemical / physical phenomenon detecting apparatus described above, only one detecting unit is detected, and it is impossible to detect a plurality of chemical / physical phenomena. It was possible. Further, it was impossible to detect the distribution of the same chemical physical phenomenon at a time.

The present invention eliminates the above problems and arranges sensor elements for detecting chemical physical phenomena in an array to detect a plurality of chemical physical phenomena.
An object of the present invention is to provide a storage-type chemical / physical phenomenon detection device capable of detecting the distribution at a time.

[0010]

In order to achieve the above object, the present invention provides: [1] In a cumulative chemical / physical phenomenon detecting device, a plurality of one-dimensional or two-dimensional cumulative chemical / physical phenomenon devices are provided. An array of chemical / physical phenomena detectors, a vertical selector, and a horizontal selector arranged side by side to detect multiple chemical / physical phenomena at once, or one-dimensional or two-dimensional of the same chemical / physical phenomena Is characterized by detecting the distribution situation at a time.

[2] The accumulative chemical / physical phenomenon detecting apparatus according to the above [1], further comprising a column-parallel noise removing circuit.

[0012]

Embodiments of the present invention will be described below in detail.

FIG. 1 is a block diagram of a storage type chemical / physical phenomenon detecting device according to an embodiment of the present invention, FIG. 2 is a block diagram of a sensing unit when the device is arrayed, and FIG. FIG. 3 is a configuration diagram of a noise removal circuit (column CDS circuit).

In FIG. 1, reference numeral 1 denotes an accumulation type chemical / physical phenomenon detection device array, and 2 denotes a vertical selector (V. SCANNE).
R), 3 is a column CDS circuit, 4 is a horizontal selector (H.S.
CANNER).

As described above, FIG. 1 shows a plurality of storage-type chemical / physical phenomenon detecting devices arranged one-dimensionally or two-dimensionally to form an array.

A row is selected by a vertical selector (V. SCANNE).
R) 2, and a selection transistor for that was provided in the pixel. Then, an operation circuit for sequentially driving the plurality of detection devices was added. By selecting a column at an output stage of a reset noise elimination circuit provided for each column, reset noise can be eliminated for each column.

By adopting the above structure, the data of the factors put in each pixel can be obtained simultaneously and in parallel, the distribution and the time change can be more easily analyzed, and the original FET type sensor can be used. It is possible to improve the output amplification and the S / N ratio, and to obtain a chemical / physical phenomenon detecting device with improved functions.

In the case of the AMIS array configuration (two-dimensional example), V _sel : select signal The configuration of one sensor unit of the AMIS array will be described later.
Arrange the elements vertically and horizontally. A vertical selector 2 and a horizontal selector 4 are added in order to obtain signals sequentially by arranging the signals vertically and horizontally. The column CDS circuit is formed by arranging one-element reset noise elimination circuits of the related art in a row. One noise removal circuit may be added to one sensor unit, but this time, a row when one is inserted in one row is shown. The output can be obtained by taking the difference between V _{re s} and V _sig.

In the case of a sensing unit when arrayed, V _{sel is a} vertical selection signal.

In order to sequentially drive the sensor section by the vertical selector 2, the sensor section is selected by the _Vsel signal to obtain an output.

The configuration of the column parallel noise elimination circuit (column CDS circuit) is configured as shown in FIG.

Here, A: AMIS element V _OUT matches the configuration of AMIS C _rst : Capacity for storing reset level C _sig : Capacity for storing signal level V _rst : Output of reset V _sig : Output of signal RH (i ): I-th capacitance reset signal SH (i): i-th sensor output signal The operation of each section in the column parallel noise elimination circuit (column CDS circuit) will be described below.

The column parallel noise elimination circuit is as follows: Before leading the signal to the reset noise removal circuit, RH (i)
Is turned on to equalize the potentials of both capacitors, and then turned off.

2. The output immediately after resetting the FD section of the AMIS by turning on ΦR is the reset level storage capacity C
Store in _rst and turn off ΦR.

3. After turning on ΦS and storing the signal in the FD section of the AMIS a plurality of times, the signal is stored in the signal level storage capacitor C _sig , and ΦS is turned off.

4. Next, SH (i) is turned on to output signals from both capacitors.

5. By reading the signal of the difference between the two with a differential amplifier or the like, a signal from which reset noise has been removed can be obtained.

6. Next, the first to fifth operations are performed using RH
A signal is applied to the terminal (i + 1) to drive sequentially.

It should be noted that the present invention is not limited to the above-described embodiment, and various modifications are possible based on the gist of the present invention, and these are not excluded from the scope of the present invention.

[0030]

As described above, according to the present invention, the following effects can be obtained.

Data of a plurality of different factors can be obtained at the same time. That is, it is possible to acquire a plurality of chemical physics phenomena at the same time or to obtain the distribution of the same chemical physics at a time.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an accumulation type chemical / physical phenomenon detection device in an array showing an embodiment of the present invention.

FIG. 2 is a configuration diagram of a sensing unit in an array according to the embodiment of the present invention.

FIG. 3 is a configuration diagram of a column-parallel noise elimination circuit (column CDS) according to an embodiment of the present invention.

FIG. 4 is a configuration diagram of a conventional storage-type chemical / physical phenomenon detection device.

[Explanation of symbols]

 Reference Signs List 1 Storage type chemical / physical phenomenon detection device array 2 Vertical selector (V. SCANNER) 3 Column CDS circuit 4 Horizontal selector (H. SCANNER)

Claims (2)

[Claims] 1. An accumulation type chemical / physical phenomenon detection device array in which (a) a plurality of accumulation type chemical / physical phenomenon devices are arranged in one or two dimensions, (b) a vertical selector, and (c) a horizontal direction. (D) detecting a plurality of chemical / physical phenomena at one time, or one-dimensional or two-dimensional of the same chemical / physical phenomena
An accumulative chemical / physical phenomena detection device characterized by detecting a dimensional distribution situation at a time. 2. The cumulative chemical / physical phenomenon detecting device according to claim 1, further comprising a column parallel type noise elimination circuit.