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JP2002150956A - Substrate for plasma display device, method of manufacturing the same, and plasma display device using the same - Google Patents

Substrate for plasma display device, method of manufacturing the same, and plasma display device using the same

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Publication number
JP2002150956A
JP2002150956A JP2000345500A JP2000345500A JP2002150956A JP 2002150956 A JP2002150956 A JP 2002150956A JP 2000345500 A JP2000345500 A JP 2000345500A JP 2000345500 A JP2000345500 A JP 2000345500A JP 2002150956 A JP2002150956 A JP 2002150956A
Authority
JP
Japan
Prior art keywords
partition
discharge electrode
substrate
display device
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000345500A
Other languages
Japanese (ja)
Inventor
Shinichi Handa
真一 半田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2000345500A priority Critical patent/JP2002150956A/en
Publication of JP2002150956A publication Critical patent/JP2002150956A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To suppress the occurrence of separation defects of the peel off of walls and discharge electrode in the substrate for plasma display device. SOLUTION: A jointing face 3a of the discharge electrode 3 with the partition wall 2 and the jointing face 4a of the ground layer 4 with the discharge electrode 3 are made into convex shape.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、高精度かつ安価な
薄型の大画面用カラー表示装置等に用いられるプラズマ
表示装置用基板とその製造方法及びこれを用いたプラズ
マ表示装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display substrate used for a high-precision, inexpensive, thin, large-screen color display device and the like, a method of manufacturing the same, and a plasma display device using the same.

【0002】[0002]

【従来の技術】従来から画像表示装置として多用されて
きたCRTは、容積及び重量が大である等の欠点から、
近年のマルチメディアの浸透に伴い、情報のインターフ
ェイスとして発光ダイオード(LED)や液晶(LC
D)、或いは、プラズマアドレス液晶(PALC)、電
界放出素子(FED)、プラズマディスプレイ(PD
P)等の大型画面で高画質、その上、軽量薄型で設置場
所を選ばない等の特長を有する平面画像表示装置が開発
され、これらの利用範囲が拡大しつつある。
2. Description of the Related Art CRTs, which have been widely used as image display devices, have disadvantages such as large volume and weight.
With the spread of multimedia in recent years, light emitting diodes (LEDs) and liquid crystal (LC) have been used as information interfaces.
D) or plasma addressed liquid crystal (PALC), field emission device (FED), plasma display (PD)
Planar image display devices having features such as P) and other large screens with high image quality, light weight, thinness, and any installation location have been developed, and the range of use thereof has been expanding.

【0003】かかる要求に応える平面画像表示装置とし
て、プラズマ放電を液晶のスウィッチングに利用したP
ALCが大型画面用カラー画像表示装置として近年特に
注目されている。
[0003] As a flat-panel image display device that meets such demands, a P-type display device using plasma discharge for switching of liquid crystal is used.
ALC has recently received particular attention as a large-screen color image display device.

【0004】このようなPALCは、図5に示すよう
に、背面板1には所定の間隔で並列的に放電電極3が形
成されており、この放電電極3の下には背面板1と放電
電極3のマッチングを整合する為の下地層4が、放電電
極3上には絶縁物から成る隔壁2が形成され、ガラスシ
ート8と隔壁2で囲まれた微少な表示セル9と呼ばれる
空間に希ガス等の放電可能なガスを封入した構造をなし
ており、放電電極3間の放電によりガラスシート8上に
配置した液晶パネル6を駆動させて画面の表示素子とし
て利用するものである。
In such a PALC, as shown in FIG. 5, discharge electrodes 3 are formed in parallel on a rear plate 1 at predetermined intervals, and the discharge electrodes 3 and the discharge electrodes 3 are formed below the discharge electrodes 3. A base layer 4 for matching the matching of the electrodes 3 is formed on the discharge electrode 3 by forming a partition 2 made of an insulating material. The base layer 4 is formed in a space called a small display cell 9 surrounded by the glass sheet 8 and the partition 2. It has a structure in which a dischargeable gas such as a gas is sealed, and the discharge between the discharge electrodes 3 drives the liquid crystal panel 6 disposed on the glass sheet 8 to be used as a screen display element.

【0005】尚、PALCでは、発色は背面板1下部に
設けたバックライト7の発光を液晶でスウィッチング
し、ガラスシート8上部に設けた液晶パネル6表面のカ
ラーフィルター5で各表示色を発色させている。したが
って、表示セル9を形成する背面板1表面には高い透光
性及び開口性が要求される。
In PALC, the emission of a backlight 7 provided below the back plate 1 is switched by liquid crystal, and each display color is developed by a color filter 5 on the surface of a liquid crystal panel 6 provided above a glass sheet 8. Let me. Therefore, the surface of the back plate 1 on which the display cells 9 are formed is required to have high translucency and aperture.

【0006】具体的な構造は、背面板1の一面に平行な
多数の隔壁2を形成し、各隔壁2間を表示セル9とし、
その底部に放電電極3と下地層4を備えている。この背
面板1と液晶パネル6をガラスシート8を介して貼り合
わせ、表示セル9にガスを封入することでPALCを構
成している。
A specific structure is as follows. A large number of partitions 2 are formed parallel to one surface of the back plate 1, and a display cell 9 is provided between the partitions 2.
A discharge electrode 3 and a base layer 4 are provided at the bottom. The back plate 1 and the liquid crystal panel 6 are bonded together via a glass sheet 8, and a gas is sealed in the display cell 9 to form a PALC.

【0007】隔壁2の形成方法としては、特開平6−3
42149号記載のスクリーン印刷法や、特開平10−
213791号記載のサンドブラスト法等が一般的に知
られている。スクリーン印刷法は、数μm程度のスクリ
ーン印刷層を必要な高さまで積み重ねて隔壁形状を形成
する方法である。サンドブラスト法は、隔壁2を形成す
る塗布膜の上に、感光性樹脂を貼り付け、露光によりパ
ターンニングを行った後、サンドブラストで不要部を削
り取り、隔壁形状を形成する方法である。
A method for forming the partition 2 is disclosed in
No. 42149, the screen printing method described in
The sand blasting method described in Japanese Patent No. 213791 is generally known. The screen printing method is a method in which a screen printing layer of about several μm is stacked to a required height to form a partition wall shape. The sand blast method is a method in which a photosensitive resin is adhered onto a coating film for forming the partition walls 2, patterning is performed by exposure, and unnecessary portions are scraped off by sand blast to form a partition wall shape.

【0008】また、放電電極3の形成方法としては、一
般のスクリーン印刷法やグラビア印刷法、高精度パター
ンに関してはフォトリソグラフィー法等が挙げられる。
The method for forming the discharge electrode 3 includes a general screen printing method and a gravure printing method, and a high-precision pattern such as a photolithography method.

【0009】[0009]

【発明が解決しようとする課題】しかしながら、上記の
スクリーン印刷法では、1回の印刷では数μm程度の膜
厚しか得られず、複数回繰り返す必要がある。また、ス
クリーンの伸び、ペーストのダレ、繰り返し印刷の不安
定性等から精度についても不安定となり易かった。その
ため、精度、効率共に非常に悪いものであった。
However, in the above-mentioned screen printing method, a film thickness of about several μm can be obtained by one printing, and it is necessary to repeat the film printing a plurality of times. In addition, accuracy tends to be unstable due to screen elongation, paste dripping, instability of repeated printing, and the like. Therefore, both the accuracy and the efficiency were very poor.

【0010】一方、上記のサンドブラスト法では、ブラ
スト処理を行う際に、隔壁と放電電極の接合面や、放電
電極と下地層の接合面、もしくはその両方から隔壁や放
電電極が剥がれてしまうという問題があり、また、大量
の隔壁材料が切削粉として無駄に発生するという問題も
あった。、更に、露光装置等の高額な設備が必要であ
り、製品コストを引き上げてしまっていた。
[0010] On the other hand, in the above sandblasting method, when performing the blasting process, there is a problem that the partition wall and the discharge electrode are peeled off from the joint surface between the partition wall and the discharge electrode, the joint surface between the discharge electrode and the base layer, or both. In addition, there is a problem that a large amount of partition wall material is wasted as cutting powder. Further, expensive equipment such as an exposure apparatus is required, which has raised the product cost.

【0011】これらに対し、特開平10−188793
号に示されるように、隔壁となる溝形状を有するロール
型を隔壁材料に押しつけ回転させ、隔壁を形成する方法
が提案されている。しかしながら、この方法では隔壁間
の底部に隔壁材料が必ず残ってしまい、基板表面の透光
性が求められるような場合や、隔壁と隔壁間底部の材料
を異ならせる場合などのように、隔壁単体を精度良く形
成することは不可能である。
On the other hand, Japanese Patent Application Laid-Open No. 10-188793
As shown in the above publication, there has been proposed a method of forming a partition by pressing a roll having a groove shape serving as a partition against a partition material and rotating the roll. However, in this method, the partition wall material is always left at the bottom between the partition walls, and when the light transmissivity of the substrate surface is required or when the material of the partition wall and the bottom between the partition walls is made different, the partition wall alone is used. Cannot be formed with high accuracy.

【0012】本発明は、上記課題を解決する為に成され
たものであり、その目的は、歩留まり良く、安価で高精
度なプラズマ表示装置用基板並びにその製造方法を提供
することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a low-cost, high-precision substrate for a plasma display device with good yield, and a method of manufacturing the same.

【0013】[0013]

【課題を解決するための手段】本発明者等は前記課題に
鑑み鋭意研究検討した結果、プラズマ表示装置用基板の
製造方法において、全面に放電電極層と下地層を積層形
成した絶縁基板上の隔壁成形用組成物を型を用いて成形
し、成形した隔壁間の隔壁成形用組成物と放電電極層と
下地層を除去することで、隔壁や放電電極の剥がれ不良
の発生を抑制すると同時に、品位、効率の両方を同時に
改善できることを見いだし、本発明に至った。
Means for Solving the Problems The present inventors have conducted intensive studies in view of the above-mentioned problems, and as a result, have found that in a method of manufacturing a substrate for a plasma display device, an insulating substrate having a discharge electrode layer and an underlayer laminated on the entire surface is provided. The partition wall forming composition is molded using a mold, and by removing the partition wall forming composition and the discharge electrode layer and the base layer between the formed partition walls, while suppressing the occurrence of peeling failure of the partition walls and the discharge electrode, The inventors have found that both the quality and the efficiency can be improved at the same time, and have led to the present invention.

【0014】即ち、本発明は、絶縁基板上に所定の間隔
をおいて並列に複数の隔壁を有し、該隔壁の下部に放電
電極と下地層を積層して成るプラズマ表示装置用基板に
おいて、上記放電電極の隔壁との接合面が凸形状であ
り、また、上記下地層の放電電極との接合面が凸形状で
あることを特徴とするものである。
That is, the present invention relates to a plasma display device substrate comprising a plurality of partition walls arranged in parallel at predetermined intervals on an insulating substrate, and a discharge electrode and a base layer are laminated below the partition walls. The bonding surface of the discharge electrode with the partition has a convex shape, and the bonding surface of the base layer with the discharge electrode has a convex shape.

【0015】更に、本発明は、絶縁基板上に所定の間隔
をおいて並列に複数の隔壁を有し、該隔壁の下部に放電
電極と下地層を積層して備えて成るプラズマ表示装置用
基板を、 (1)単層若しくは複数層の隔壁成形用組成物に、隔壁
成形用凹部を有する型を押圧して上記隔壁成形用組成物
の一部を上記隔壁成形用凹部内に充填する工程 (2)上記型表面上に付着した隔壁成形用組成物を除去
する工程 (3)全面に放電電極層と下地層を積層形成した絶縁基
板上に、上記隔壁成形用型を接触させ隔壁成形用凹部内
の隔壁成形用組成物を上記絶縁基板上に転写する工程 (4)上記絶縁基板上に転写した隔壁間の放電電極層と
下地層を除去する工程 (5)上記工程により得られた形成体を一括焼成する工
程により製造することを特徴とするものである。
Further, the present invention provides a substrate for a plasma display device, comprising: a plurality of partition walls arranged in parallel at a predetermined interval on an insulating substrate, and a discharge electrode and a base layer laminated below the partition walls. (1) A step of pressing a mold having a partition wall forming recess into a single layer or a plurality of layers of the partition wall forming composition to fill a part of the partition wall forming composition into the partition wall forming recess. 2) Step of removing the partition wall forming composition adhered on the mold surface. (3) The above partition wall forming mold is brought into contact with an insulating substrate having a discharge electrode layer and an underlayer laminated on the entire surface to form a partition wall forming recess. (4) Step of removing the discharge electrode layer and the underlayer between the partition walls transferred onto the insulating substrate (5) Formed body obtained by the above step Characterized by being manufactured by a process of firing all at once A.

【0016】また、本発明は、上記プラズマ表示装置用
基板を、 (1)単層若しくは複数層の隔壁成形用組成物に、隔壁
成形用凹部を有する型を押圧して上記隔壁成形用組成物
の一部を上記隔壁成形用凹部内に充填する工程 (2)全面に放電電極層と下地層を積層形成した絶縁基
板上に、上記隔壁成形用型を接触させ隔壁成形用凹部内
及び表面上の隔壁成形用組成物を上記絶縁基板上に転写
する工程 (3)上記絶縁基板上に転写した隔壁間の隔壁成形用組
成物と放電電極層と下地層を除去する工程 (4)上記工程により得られた形成体を一括焼成する工
程により製造することを特徴とするものである。
Further, according to the present invention, there is provided a plasma display device substrate comprising: (1) pressing a mold having a partition wall forming recess into a single layer or a plurality of layers of the partition wall forming composition; (2) a step of contacting the partition-forming mold on an insulating substrate on which a discharge electrode layer and a base layer are formed by lamination on the entire surface and contacting the inside of the partition-forming recess and on the surface (3) removing the partition-forming composition, the discharge electrode layer and the base layer between the partitions transferred onto the insulating substrate; and (4) performing the above-described step. It is characterized in that the obtained formed body is manufactured by a step of firing all at once.

【0017】また、本発明は、上記プラズマ表示装置用
基板を、 (1)全面に放電電極層と下地層を積層形成した絶縁基
板上に、単層若しくは複数層の隔壁成形用組成物を形成
し、隔壁成形用凹部を有する型を押圧して上記絶縁基板
上に隔壁を成形する工程 (2)上記絶縁基板上に成形した隔壁間の隔壁成形用組
成物と放電電極層と下地層を除去する工程 (3)上記工程により得られた形成体を一括焼成する工
程により製造することを特徴とするものである。
Further, according to the present invention, there is provided a plasma display device substrate comprising: (1) forming a single layer or a plurality of layers for forming a partition wall on an insulating substrate having a discharge electrode layer and a base layer laminated on the entire surface; And pressing a mold having a partition-forming concave portion to form partitions on the insulating substrate. (2) Removing the partition-forming composition, the discharge electrode layer, and the base layer between the partitions formed on the insulating substrate. Step (3) The method is characterized in that the formed body obtained in the above step is manufactured by a step of firing all at once.

【0018】[0018]

【作用】本発明のプラズマ表示装置用基板の製造方法に
よれば、全面に放電電極層と下地層を積層形成した絶縁
基板上に、圧力を加えながら隔壁を転写又は成形する為
に、放電電極の隔壁との接合面及び下地層の放電電極と
の接合面がそれぞれ凸形状となる。その結果、それぞれ
の接合面は加圧密着され、同時に、接触面積は大きくな
り、その後の工程において、隔壁や放電電極の剥がれ不
良の発生を抑制できるようになる。更に、放電電極は隔
壁の内部に入り込んだ形となる為、放電電極の断面積が
大きくなりライン抵抗の低抵抗化につながり、しいては
低消費電力化につながる。
According to the method of manufacturing a substrate for a plasma display device of the present invention, a discharge electrode is formed on an insulating substrate having a discharge electrode layer and an underlayer laminated on the entire surface while transferring or molding a partition wall while applying pressure. The joining surface with the partition wall and the joining surface with the discharge electrode of the underlayer have convex shapes. As a result, the respective bonding surfaces are pressed and adhered, and at the same time, the contact area is increased, and in the subsequent process, the occurrence of peeling failure of the partition walls and the discharge electrodes can be suppressed. Further, since the discharge electrode has a shape that enters the inside of the partition wall, the cross-sectional area of the discharge electrode is increased, leading to a reduction in line resistance, and thus to a reduction in power consumption.

【0019】また、隔壁自体は型を用いて成形する為、
無駄となる除去材料は最小限で済み、更に、露光設備等
の高額な装置も不要となり、製品の低コスト化にもつな
がる。
Further, since the partition wall itself is molded using a mold,
Wasteful removal materials are minimized, and expensive equipment such as exposure equipment is not required, which leads to cost reduction of products.

【0020】[0020]

【発明の実施の形態】以下に本発明のプラズマ表示装置
用基板について、図面に基づき詳細に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a substrate for a plasma display device according to the present invention will be described in detail with reference to the drawings.

【0021】図1はプラズマ表示装置の断面図を示すも
のであり、プラズマ表示装置は、背面板1の一面に、複
数の放電電極3が形成される。この放電電極3の下には
背面板1と放電電極3のマッチングを整合する為の下地
層4が形成され、放電電極3上には空間を仕切る為の隔
壁2が形成され、表示セル9が形成される。
FIG. 1 is a sectional view of a plasma display device. In the plasma display device, a plurality of discharge electrodes 3 are formed on one surface of a back plate 1. Under the discharge electrode 3, a base layer 4 for matching the matching between the back plate 1 and the discharge electrode 3 is formed. On the discharge electrode 3, a partition 2 for partitioning a space is formed. It is formed.

【0022】ガラスシート8を介し、液晶パネル6と背
面板1とを接合、封止しパネル内部に放電ガスを充填す
ることでプラズマ放電によるスウィッチング部を形成す
る。更に、バックライト7を背面板1下部に接合するこ
とでPALCのパネルを構成する。
The liquid crystal panel 6 and the back panel 1 are joined and sealed via the glass sheet 8, and the inside of the panel is filled with a discharge gas to form a switching portion by plasma discharge. Further, a PALC panel is formed by bonding the backlight 7 to a lower portion of the back plate 1.

【0023】本発明のプラズマ表示装置用基板において
は、放電電極3の隔壁2との接合面3aが凸形状となる
ことを特徴としている。これによって、隔壁2と放電電
極3の接合強度は向上し、不要部除去等の後工程におい
て、隔壁2の剥がれ不良の発生を抑制できるとともに、
放電電極3の断面積を大きくしてライン抵抗を低抵抗化
し、低消費電力化することができる。
The substrate for a plasma display device according to the present invention is characterized in that the joint surface 3a of the discharge electrode 3 with the partition 2 has a convex shape. As a result, the bonding strength between the partition 2 and the discharge electrode 3 is improved, and the occurrence of peeling failure of the partition 2 can be suppressed in a post-process such as removal of an unnecessary portion.
By increasing the cross-sectional area of the discharge electrode 3, the line resistance can be reduced and the power consumption can be reduced.

【0024】そのためには、放電電極3の接合面3aが
隔壁2内部に入り込んでいる放電電極3の凸部高さhは
10μm以上が好ましい。これは10μm未満では接合
強度向上の効果がみられない為である。
For this purpose, it is preferable that the height h of the convex portion of the discharge electrode 3 in which the bonding surface 3a of the discharge electrode 3 enters the inside of the partition wall 2 is 10 μm or more. This is because the effect of improving the bonding strength is not seen below 10 μm.

【0025】また、本発明のプラズマ表示装置用基板に
おいては、下地層4の放電電極3との接合面4aが凸形
状となることを特徴としている。これによって、放電電
極3と下地層4の接合強度は向上し、不要部除去等の後
工程において、放電電極3の剥がれ不良の発生を抑制で
きる。そのためには、下地層4の接合面4aが放電電極
3内部に入り込んでいる下地層4の凸部高さtは10μ
m以上が好ましい。これは10μm未満では接合強度向
上の効果がみられない為である。
The substrate for a plasma display device of the present invention is characterized in that the bonding surface 4a of the underlayer 4 with the discharge electrode 3 has a convex shape. Thereby, the bonding strength between the discharge electrode 3 and the underlayer 4 is improved, and the occurrence of peeling failure of the discharge electrode 3 can be suppressed in a post-process such as removal of an unnecessary portion. For this purpose, the height t of the protrusion of the underlayer 4 in which the bonding surface 4a of the underlayer 4 enters the inside of the discharge electrode 3 is 10 μm.
m or more is preferable. This is because the effect of improving the bonding strength is not seen below 10 μm.

【0026】次に、図2、図3、図4に本発明のプラズ
マ表示装置用基板の製造方法について、図面に基づき詳
細に説明する。
Next, a method of manufacturing a substrate for a plasma display device according to the present invention will be described in detail with reference to FIGS.

【0027】図2は、本発明のプラズマ表示装置用基板
の製造方法を示すものである。
FIG. 2 shows a method of manufacturing a substrate for a plasma display device according to the present invention.

【0028】先ず図2(a)に示すように、平面板12
上に可塑性を有した隔壁形成用組成物からなる隔壁材料
シート10を形成する。尚、この時に形成する隔壁材料
シート10は単層又は、材質の異なる複数層の何れでも
良い。
First, as shown in FIG.
A partition material sheet 10 made of a plastic-forming partition-forming composition is formed thereon. The partition material sheet 10 formed at this time may be a single layer or a plurality of layers made of different materials.

【0029】次に図2(b)に示すように、隔壁成形用
凹部11aを有する隔壁成形型11で隔壁材料シート1
0を加圧成形し、隔壁材料シート10を塑性変形させて
その一部を隔壁成形用凹部11a内に充填するととも
に、隔壁成形型11に貼り付ける。
Next, as shown in FIG. 2B, a partition material sheet 1 is formed by a partition forming die 11 having a partition forming recess 11a.
0 is press-formed, the partition material sheet 10 is plastically deformed, a part of which is filled in the partition-forming recess 11 a, and attached to the partition-forming mold 11.

【0030】そして図2(c)に示すように、スクレッ
パー13等にて隔壁成形型11表面に付着した隔壁材料
シート10を除去する。
Then, as shown in FIG. 2C, the partition material sheet 10 adhered to the surface of the partition mold 11 is removed by a scraper 13 or the like.

【0031】次に図2(d)に示すように、予め背面板
1全面に放電電極3と下地層4を印刷法またはグラビア
印刷法など従来の手法で形成した背面板1に、上記隔壁
成形型11を位置合わせしつつ加圧接触させ、隔壁成形
用凹部11a内に充填して成形された隔壁2を背面板1
に転写する。
Next, as shown in FIG. 2 (d), the above-mentioned partition wall is formed on the back plate 1 in which the discharge electrodes 3 and the underlayer 4 are formed on the entire back plate 1 in advance by a conventional method such as a printing method or a gravure printing method. The partition 2 formed by filling the partition 11 into the recess 11a for partition formation is brought into contact with the mold 11 under pressure while being positioned.
Transfer to

【0032】この時、放電電極3と下地層4は隔壁2の
転写の際の加圧力により、隔壁成形用凹部11a内に一
部充填する挙動をとる。その結果、放電電極3の隔壁2
との接合面3a及び、下地層4の放電電極3との接合面
4aが凸形状となる。
At this time, the discharge electrode 3 and the underlayer 4 behave partially so as to partially fill the recess 11a for forming the partition wall due to the pressure applied during the transfer of the partition wall 2. As a result, the partition 2 of the discharge electrode 3
And the bonding surface 4a of the underlayer 4 with the discharge electrode 3 are convex.

【0033】次に図2(e)に示すように、サンドブラ
スト法などの従来の手法にて隔壁2間の放電電極3と下
地層4の除去を行う。尚、この際、隔壁2を除去工程か
ら守る為に、隔壁2表面に保護層を付けても良い。最後
に、得られた成形体を所定の温度パターンで一括焼成を
行う。
Next, as shown in FIG. 2E, the discharge electrode 3 and the base layer 4 between the partition walls 2 are removed by a conventional method such as a sand blast method. At this time, a protective layer may be provided on the surface of the partition 2 in order to protect the partition 2 from the removing step. Finally, the obtained compact is fired at a predetermined temperature pattern.

【0034】図3は、本発明のプラズマ表示装置用基板
の他の製造方法を示すものである。
FIG. 3 shows another method of manufacturing a substrate for a plasma display device according to the present invention.

【0035】先ず図3(a)に示すように、平面板12
上に可塑性を有した隔壁形成用組成物からなる隔壁材料
シート10を形成する。尚、この時に形成する隔壁材料
シート10は単層又は、材質の異なる複数層の何れでも
良い。
First, as shown in FIG.
A partition material sheet 10 made of a plastic-forming partition-forming composition is formed thereon. The partition material sheet 10 formed at this time may be a single layer or a plurality of layers made of different materials.

【0036】次に図3(b)に示すように、隔壁成形用
凹部11aを有する隔壁成形型11で隔壁材料シート1
0を加圧成形し、隔壁材料シート10を塑性変形させて
その一部を隔壁成形用凹部11a内に充填するととも
に、隔壁成形型11に貼り付ける。
Next, as shown in FIG. 3B, a partition material sheet 1 is formed by a partition forming die 11 having a partition forming concave portion 11a.
0 is press-formed, the partition material sheet 10 is plastically deformed, a part of which is filled in the partition-forming recess 11 a, and attached to the partition-forming mold 11.

【0037】次に図3(c)に示すように、予め背面板
1全面に放電電極3と下地層4を印刷法またはグラビア
印刷法など従来の手法で形成した背面板1に、上記隔壁
成形型11を位置合わせしつつ加圧接触させ、隔壁成形
用凹部11a内及び表面上に成形された隔壁2を背面板
1に転写する。
Next, as shown in FIG. 3 (c), the partition walls are formed on the back plate 1 in which the discharge electrodes 3 and the underlayer 4 are previously formed on the entire back plate 1 by a conventional method such as a printing method or a gravure printing method. The mold 11 is brought into contact under pressure while being positioned, and the partition 2 formed in the inside and on the surface of the partition-forming recess 11 a is transferred to the back plate 1.

【0038】この時、放電電極3と下地層4は隔壁2の
転写の際の加圧力により、隔壁成形用凹部11a内に一
部充填する挙動をとる。その結果、放電電極3の隔壁2
との接合面3a及び、下地層4の放電電極3との接合面
4aが凸形状となる。
At this time, the discharge electrode 3 and the base layer 4 have a behavior of partially filling the partition wall forming recess 11a by the pressing force at the time of transferring the partition wall 2. As a result, the partition 2 of the discharge electrode 3
And the bonding surface 4a of the underlayer 4 with the discharge electrode 3 are convex.

【0039】次に図3(d)に示すように、サンドブラ
スト法などの従来の手法にて隔壁2間の隔壁材料シート
10と放電電極3と下地層4の除去を行う。尚、この
際、隔壁2を除去工程から守る為に、隔壁2表面に保護
層を付けても良い。最後に、得られた成形体を所定の温
度パターンで一括焼成を行う。
Next, as shown in FIG. 3D, the partition material sheet 10, the discharge electrodes 3 and the base layer 4 between the partitions 2 are removed by a conventional method such as a sand blast method. At this time, a protective layer may be provided on the surface of the partition 2 in order to protect the partition 2 from the removing step. Finally, the obtained compact is fired at a predetermined temperature pattern.

【0040】図4は、本発明のプラズマ表示装置用基板
の他の製造方法を示すものである。
FIG. 4 shows another method of manufacturing a substrate for a plasma display device according to the present invention.

【0041】先ず図4(a)に示すように、予め背面板
1全面に放電電極3と下地層4を印刷法またはグラビア
印刷法など従来の手法で形成した背面板1上に、隔壁成
形用組成物から成る隔壁材料シート10を形成する。
尚、この時に形成する隔壁材料シート10は単層又は、
材質の異なる複数層の何れでも良い。
First, as shown in FIG. 4 (a), a discharge electrode 3 and a base layer 4 are formed on the entire surface of the back plate 1 by a conventional method such as a printing method or a gravure printing method. A partition material sheet 10 made of the composition is formed.
The partition material sheet 10 formed at this time is a single layer or
Any of a plurality of layers made of different materials may be used.

【0042】次に図4(b)に示すように、隔壁成形用
凹部11aを有する隔壁成形型11で隔壁材料シート1
0を加圧成形し、背面板1上に隔壁2を成形する。この
時、放電電極3と下地層4は隔壁2の成形の際の加圧力
により、隔壁成形用凹部11a内に一部充填する挙動を
とる。その結果、放電電極3の隔壁2との接合面3a及
び、下地層4の放電電極3との接合面4aが凸形状とな
る。
Next, as shown in FIG. 4B, a partition material sheet 1 is formed by a partition forming die 11 having a partition forming recess 11a.
0 is pressure-formed to form a partition 2 on the back plate 1. At this time, the discharge electrode 3 and the base layer 4 take a behavior of partially filling the partition wall forming concave portion 11 a by the pressing force at the time of forming the partition wall 2. As a result, the joint surface 3a of the discharge electrode 3 with the partition 2 and the joint surface 4a of the base layer 4 with the discharge electrode 3 have convex shapes.

【0043】次に図4(c)に示すように、サンドブラ
スト法などの従来の手法にて隔壁2間の隔壁材料シート
10と放電電極3と下地層4の除去を行う。尚、この
際、隔壁2を除去工程から守る為に、隔壁2表面に保護
層を付けても良い。最後に、得られた成形体を所定の温
度パターンで一括焼成を行う。
Next, as shown in FIG. 4C, the partition material sheet 10, the discharge electrodes 3 and the base layer 4 between the partitions 2 are removed by a conventional method such as a sand blast method. At this time, a protective layer may be provided on the surface of the partition 2 in order to protect the partition 2 from the removing step. Finally, the obtained compact is fired at a predetermined temperature pattern.

【0044】前記隔壁材料シート10は、セラミック又
はガラス粉末と有機性添加物及び溶媒からなる隔壁成形
用組成物を平面板12上に直接塗布し乾燥させる手法
や、予め隔壁成形用組成物をテープ成形し、それを平面
板12上に転写、密着させる手法などいずれの手法でで
も形成することが可能である。
The partition wall material sheet 10 may be prepared by directly applying a partition wall forming composition comprising a ceramic or glass powder, an organic additive, and a solvent on the flat plate 12 and drying the sheet, or by previously applying a tape to the partition wall forming composition. It can be formed by any method such as molding, transferring the image onto the flat plate 12, and bringing it into close contact.

【0045】本発明で使用する前記隔壁成形用組成物と
しては、焼成後にガラス質となり、気密性を保持できる
セラミック又はガラス粉末から成るガラス材料であれば
何れでも良く、例えば、低融点ガラス粉末と酸化物セラ
ミック粉末の混合物等を無機成分として使用することが
でき、該無機成分と溶媒及び有機性添加物の混合物を適
宜、隔壁2の成形条件に応じて調整して使用することが
できる。
The partition wall forming composition used in the present invention may be any glass material made of ceramic or glass powder which becomes vitreous after firing and can maintain airtightness. A mixture of the oxide ceramic powder and the like can be used as the inorganic component, and a mixture of the inorganic component, the solvent, and the organic additive can be appropriately adjusted and used according to the molding conditions of the partition 2.

【0046】前記低融点ガラス粉末としては、ケイ酸塩
を主成分とし、酸化鉛、亜鉛、硫黄、セレン、明礬、マ
ンガン、アルカリ塩、酸化ビスマス等の一種以上を含有
した各種ガラス材料を用いることができる。なお、前記
セラミック又はガラス粉末の粒径は、数十μmからサブ
ミクロンのものが好適に用いることができ、具体的には
0.2〜10μm、好ましくは0.2〜5μmの範囲が望
ましい。
As the low melting point glass powder, various glass materials containing silicate as a main component and containing at least one of lead oxide, zinc, sulfur, selenium, alum, manganese, alkali salt, bismuth oxide and the like are used. Can be. The ceramic or glass powder has a particle size of several tens of μm to submicron, and is preferably in the range of 0.2 to 10 μm, more preferably 0.2 to 5 μm.

【0047】前記溶媒としては、前記有機性添加物と相
溶するものであれば特に限定するものではない。
The solvent is not particularly limited as long as it is compatible with the organic additive.

【0048】前記有機性添加物としては、熱可塑性樹
脂、あるいは紫外線硬化樹脂、光硬化性樹脂、熱硬化性
樹脂等を用いることができる。その他としては、分散
剤、離型剤、硬化剤、滑材、可塑剤等の各種有機物を用
いることができる。
As the organic additive, a thermoplastic resin, an ultraviolet curable resin, a photocurable resin, a thermosetting resin, or the like can be used. In addition, various organic substances such as a dispersant, a release agent, a curing agent, a lubricant, and a plasticizer can be used.

【0049】前記隔壁形成用成形型11隔壁2の大き
さ、ピッチ等の形状に対応するような溝からなる隔壁成
形用凹部11aを多数有しており、その形状は平板形
状、円筒形状等如何なるものでも良く、また、その材質
は、金属、セラミック、樹脂等を使用することができ
る。
The partition forming die 11 has a large number of partition forming recesses 11a each having a groove corresponding to the size, pitch and the like of the partition 2. The shape may be any of a flat plate shape, a cylindrical shape, and the like. The material may be metal, ceramic, resin, or the like.

【0050】前記スクレッパー13としては、金属、樹
脂、セラミックなどからなるブレード、メッシュ、ワイ
ヤー、ブラシなど成形型表面上の材料シートが除去可能
なものならば如何なるものでも良い。
The scraper 13 may be any material such as a blade, a mesh, a wire, a brush made of metal, resin, ceramic or the like, as long as the material sheet on the surface of the mold can be removed.

【0051】また、本発明の背面板1として用いる透明
絶縁基板としては、ソーダライムガラスや低ソーダガラ
ス、鉛アルカリケイ酸ガラス、ホウケイ酸塩ガラス、無
アルカリガラス等の透明ガラス基板を用いることができ
る。
As the transparent insulating substrate used as the back plate 1 of the present invention, a transparent glass substrate such as soda lime glass, low soda glass, lead alkali silicate glass, borosilicate glass, and alkali-free glass can be used. it can.

【0052】また、背面板1上に予め形成する放電電極
3としては、Ag、Ni、Al、Pt、Au、Pd、C
u等の導体金属、あるいはこれらの合金、化合物、又は
前記導体金属やその合金に少量の低融点ガラスを混合し
た導電性ペーストを用いて形成することができる。
The discharge electrodes 3 formed in advance on the back plate 1 include Ag, Ni, Al, Pt, Au, Pd, C
It can be formed using a conductive metal such as u, an alloy or a compound thereof, or a conductive paste in which a small amount of low-melting glass is mixed with the conductive metal or an alloy thereof.

【0053】また、背面板1上に予め形成する下地層4
としては、焼成後にガラス質となり、背面板1と放電電
極3を整合できるセラミック又はガラス粉末から成るガ
ラス材料であれば何れでも良く、例えば、低融点ガラス
粉末と酸化物セラミック粉末の混合物等を無機成分とし
て使用することができる。
An underlayer 4 previously formed on the back plate 1
Any material can be used as long as it becomes glassy after firing and can be made of a ceramic or glass powder capable of matching the back plate 1 and the discharge electrode 3. For example, a mixture of a low-melting glass powder and an oxide ceramic powder is made of inorganic material. Can be used as a component.

【0054】また、前記平面板12上に各組成物から成
る各材料シートを形成する手段は、特に限定するもので
はないが、例えば、ロールコーター、ドクターブレー
ド、スクリーン印刷、グラビア印刷等で直接に平面板1
2上に形成する手法、テープ成形機やロール圧延機など
により所定のシート形状とした物を、所望の形状に切断
し、平面板12上に転写する手法などを用いることがで
き、最終的に均一な膜厚で形成できればよい。
The means for forming each material sheet made of each composition on the flat plate 12 is not particularly limited, but may be, for example, a roll coater, a doctor blade, screen printing, gravure printing or the like. Flat plate 1
2, a method of cutting a material having a predetermined sheet shape by a tape forming machine or a roll rolling machine into a desired shape, and transferring it to the flat plate 12 can be used. What is necessary is just to be able to form with a uniform film thickness.

【0055】また、前記平面板12は平坦であるものな
らばいずれでも良く、特に限定されるものではない。
The flat plate 12 may be any flat plate, and is not particularly limited.

【0056】さらに、上記実施形態ではプラズマアドレ
ス液晶(PALC)を例にして説明したが、本発明はそ
の他に電界放出素子(FED)、プラズマディスプレイ
(PDP)等のプラズマ表示装置用基板全般に適用でき
る。
Further, in the above-described embodiment, the description has been made by taking a plasma addressed liquid crystal (PALC) as an example. However, the present invention is also applicable to general substrates for plasma display devices such as a field emission device (FED) and a plasma display (PDP). it can.

【0057】[0057]

【実施例】次に、本発明のプラズマ表示装置用基板とそ
の製造方法について以下のように評価した。 (実施例1)先ず、平面板12として厚さ3mmで40
インチサイズのソーダライムガラスを使用し、隔壁成形
用組成物として鉛ガラスを主成分とした粉末にバインダ
ー、溶剤、分散剤、粘度調整剤、可塑剤を添加した物を
用いて、これを平面板12上にスリットコーターにて塗
布し、それを乾燥し、隔壁材料シート10を形成した。
EXAMPLES Next, the substrate for a plasma display device of the present invention and a method of manufacturing the same were evaluated as follows. (Embodiment 1) First, a flat plate 12 having a thickness of 3 mm and 40
Using an inch size soda lime glass, using a powder containing lead glass as a main component as a composition for forming a partition wall, a binder, a solvent, a dispersant, a viscosity adjuster, and a plasticizer added thereto, and using this as a flat plate 12 was applied by a slit coater and dried to form a partition material sheet 10.

【0058】次に隔壁成形型11としてピッチ600μ
m、隔壁成形型凹部11aの幅が150μm、凸部の幅
が450μm、凹部の深さが250μmのものを用い
て、隔壁材料シート10を加圧し塑性変形させ隔壁2を
成形すると同時に隔壁成形型11への貼り付けを行っ
た。次に、隔壁成形型11の表面に付着した隔壁材料シ
ート10を、硬質ゴム製のブレード型スクレッパー13
にて除去を行った。
Next, as the partition wall forming mold 11, a pitch of 600 μm was used.
m, the width of the concave portion 11a is 150 μm, the width of the convex portion is 450 μm, and the depth of the concave portion is 250 μm. 11 was attached. Next, the partition wall material sheet 10 adhered to the surface of the partition wall forming mold 11 is hardened with a hard rubber blade-type scraper 13.
Was removed.

【0059】その後、厚さ2mmで40インチサイズの
無アルカリガラス全面にスクリーン印刷法により厚み2
0μmの下地層4を、厚み60μmの放電電極3を予め
積層形成した背面板1に、隔壁成形型11を位置合わせ
し、加圧接触させ隔壁2を背面板1上に転写した。
Thereafter, the entire surface of the alkali-free glass having a thickness of 2 mm and a size of 40 inches was screen-printed to a thickness of 2 mm.
The partition wall mold 11 was aligned with the back plate 1 on which the discharge electrode 3 having a thickness of 60 μm was previously formed by laminating a 0 μm base layer 4, and the partition wall 2 was transferred onto the back plate 1 by pressurized contact.

【0060】その後、成形した隔壁2間の放電電極3と
下地層4をサンドブラストにより除去を行い、背面板1
を大気中580℃の焼成を行い、本発明のプラズマ表示
装置用基板を得た。
Thereafter, the discharge electrode 3 and the base layer 4 between the formed partition walls 2 are removed by sandblasting, and the back plate 1 is removed.
Was fired at 580 ° C. in the air to obtain a substrate for a plasma display device of the present invention.

【0061】得られたプラズマ表示装置用基板を、画像
処理による外観検査装置にて検査を行ったところ、隔壁
2及び放電電極3の剥がれはみとめられず、良好な結果
であった。また、この基板の断面を走査型電子顕微鏡
(SEM)にて観察を行ったところ、放電電極3が隔壁
2内部に入り込んでいる放電電極3の凸部高さhは32
μmであり、下地層4が放電電極3内部に入り込んでい
る下地層4の凸部高さtは19μmであった。 (実施例2)先ず、平面板12として厚さ3mmで40
インチサイズのソーダライムガラスを使用し、隔壁成形
用組成物として鉛ガラスを主成分とした粉末にバインダ
ー、溶剤、分散剤、粘度調整剤、可塑剤を添加した物を
用いて、これを平面板12上にスリットコーターにて塗
布し、それを乾燥し、隔壁材料シート10を形成した。
When the obtained substrate for a plasma display device was inspected with an appearance inspection device by image processing, peeling of the partition walls 2 and the discharge electrodes 3 was not observed, and a favorable result was obtained. When the cross section of the substrate was observed with a scanning electron microscope (SEM), the height h of the projection of the discharge electrode 3 into which the discharge electrode 3 entered the partition 2 was 32.
μm, and the height t of the protrusion of the underlayer 4 in which the underlayer 4 entered the inside of the discharge electrode 3 was 19 μm. (Embodiment 2) First, a flat plate 12 having a thickness of 3 mm and 40
Using an inch size soda lime glass, using a powder containing lead glass as a main component as a composition for forming a partition wall, a binder, a solvent, a dispersant, a viscosity adjuster, and a plasticizer added thereto, and using this as a flat plate 12 was applied by a slit coater and dried to form a partition material sheet 10.

【0062】次に隔壁成形型11としてピッチ600μ
m、隔壁成形型凹部11aの幅が150μm、凸部の幅
が450μm、凹部の深さが250μmのものを用い
て、隔壁材料シート10を加圧し塑性変形させ隔壁2を
成形すると同時に隔壁成形型11への貼り付けを行っ
た。
Next, a 600 μm pitch was used as the partition mold 11.
m, the width of the concave portion 11a is 150 μm, the width of the convex portion is 450 μm, and the depth of the concave portion is 250 μm. 11 was attached.

【0063】その後、厚さ2mmで40インチサイズの
無アルカリガラス全面にスクリーン印刷法により厚み2
0μmの下地層4を、厚み60μmの放電電極3を予め
積層形成した背面板1に、隔壁成形型11を位置合わせ
し、加圧接触させ隔壁2を背面板1上に転写した。
Thereafter, the entire surface of the non-alkali glass having a thickness of 2 mm and a size of 40 inches was screen-printed to a thickness of 2 mm.
The partition wall mold 11 was aligned with the back plate 1 on which the discharge electrode 3 having a thickness of 60 μm was previously formed by laminating a 0 μm base layer 4, and the partition wall 2 was transferred onto the back plate 1 by pressurized contact.

【0064】その後、成形した隔壁2間の隔壁材料シー
ト10と放電電極3と下地層4をサンドブラストにより
除去を行い、背面板1を大気中580℃の焼成を行い、
本発明のプラズマ表示装置用基板を得た。
Thereafter, the partition material sheet 10, the discharge electrode 3 and the base layer 4 between the formed partition walls 2 are removed by sandblasting, and the back plate 1 is fired at 580 ° C. in the air.
A substrate for a plasma display device of the present invention was obtained.

【0065】得られたプラズマ表示装置用基板を、画像
処理による外観検査装置にて検査を行ったところ、隔壁
2及び放電電極3の剥がれはみとめられず、良好な結果
であった。また、この基板の断面を走査型電子顕微鏡
(SEM)にて観察を行ったところ、放電電極3が隔壁
2内部に入り込んでいる放電電極3の凸部高さhは23
μmであり、下地層4が放電電極3内部に入り込んでい
る下地層4の凸部高さtは14μmであった。 (実施例3)先ず、厚さ2mmで40インチサイズの無
アルカリガラス全面にスクリーン印刷法により厚み20
μmの下地層4を、厚み60μmの放電電極3を予め積
層形成した背面板1上に、鉛ガラスを主成分とした粉末
にバインダー、溶剤、分散剤、粘度調整剤、可塑剤を添
加した隔壁成形用組成物をスリットコーターにて塗布
し、それを乾燥し、隔壁材料シート10を形成した。
When the obtained substrate for a plasma display device was inspected with an appearance inspection device by image processing, peeling of the partition walls 2 and the discharge electrodes 3 was not observed, and a favorable result was obtained. When the cross section of the substrate was observed with a scanning electron microscope (SEM), the height h of the projection of the discharge electrode 3 into which the discharge electrode 3 entered the partition 2 was 23.
μm, and the height t of the protrusion of the underlayer 4 in which the underlayer 4 entered the inside of the discharge electrode 3 was 14 μm. Example 3 First, the entire surface of a non-alkali glass having a thickness of 2 mm and a size of 40 inches was screen-printed to a thickness of 20 mm.
On a back plate 1 on which a 60 μm-thick discharge electrode 3 is previously formed by laminating a 60 μm-thick underlayer 4, a partition wall obtained by adding a binder, a solvent, a dispersant, a viscosity modifier and a plasticizer to a powder mainly composed of lead glass. The composition for molding was applied with a slit coater, and dried to form a partition material sheet 10.

【0066】次に隔壁成形型11としてピッチ600μ
m、隔壁成形型凹部11aの幅が150μm、凸部の幅
が450μm、凹部の深さが250μmのものを用い
て、隔壁材料シート10を加圧し塑性変形させ隔壁2を
成形した。
Next, a 600 μm pitch was used as the partition mold 11.
m, the partition wall material sheet 10 was pressurized and plastically deformed to form the partition wall 2 using a partition wall forming die having a concave portion 11a having a width of 150 μm, a convex portion having a width of 450 μm, and a concave portion having a depth of 250 μm.

【0067】その後、成形した隔壁2間の隔壁材料シー
ト10と放電電極3と下地層4をサンドブラストにより
除去を行い、背面板1を大気中580℃の焼成を行い、
本発明のプラズマ表示装置用基板を得た。
After that, the partition wall material sheet 10 between the formed partition walls 2, the discharge electrodes 3 and the base layer 4 are removed by sandblasting, and the back plate 1 is baked at 580 ° C. in the air.
A substrate for a plasma display device of the present invention was obtained.

【0068】得られたプラズマ表示装置用基板を、画像
処理による外観検査装置にて検査を行ったところ、隔壁
2及び放電電極3の剥がれはみとめられず、良好な結果
であった。また、この基板の断面を走査型電子顕微鏡
(SEM)にて観察を行ったところ、放電電極3が隔壁
2内部に入り込んでいる放電電極3の凸部高さhは27
μmであり、下地層4が放電電極3内部に入り込んでい
る下地層4の凸部高さtは16μmであった。 (比較例)厚さ2mmで40インチサイズの無アルカリ
ガラス全面にスクリーン印刷法により厚み20μmの下
地層4を、厚み60μmの放電電極3を予め積層形成し
た背面板1上に、鉛ガラスを主成分とした粉末にバイン
ダー、溶剤、分散剤、粘度調整剤、可塑剤を添加した隔
壁組成物をスリットコーターにて塗布し、それを乾燥
し、厚み250μmの隔壁材料シート10を形成した。
When the obtained substrate for a plasma display device was inspected by an appearance inspection device by image processing, peeling of the partition walls 2 and the discharge electrodes 3 was not observed, and a favorable result was obtained. When the cross section of this substrate was observed with a scanning electron microscope (SEM), the height h of the projection of the discharge electrode 3 into which the discharge electrode 3 entered the inside of the partition wall 2 was 27.
μm, and the height t of the protrusion of the underlayer 4 in which the underlayer 4 entered the inside of the discharge electrode 3 was 16 μm. (Comparative Example) Lead glass was mainly formed on a back plate 1 on which a 20 μm-thick underlayer 4 and a 60 μm-thick discharge electrode 3 were previously formed by screen printing over the entire surface of a non-alkali glass having a thickness of 2 mm and a size of 40 inches. A partition composition obtained by adding a binder, a solvent, a dispersant, a viscosity modifier, and a plasticizer to the powder as a component was applied using a slit coater, and dried to form a partition material sheet 10 having a thickness of 250 μm.

【0069】次に、隔壁材料シート10上に感光性レジ
スト材を塗布し、露光、現像処理を行い、ライン幅15
0μmのレジストを形成した。
Next, a photosensitive resist material is applied on the partition wall material sheet 10, exposed and developed, and the line width 15
A 0 μm resist was formed.

【0070】その後、サンドブラストにより選択的に隔
壁材料シート10と放電電極3と下地層4の除去を行
い、レジスト洗浄を行った後に、背面板1を大気中58
0℃の焼成を行い、本発明のプラズマ表示装置用基板を
得た。
After that, the partition wall material sheet 10, the discharge electrodes 3 and the underlayer 4 are selectively removed by sandblasting, and the resist is washed.
The substrate was baked at 0 ° C. to obtain a substrate for a plasma display device of the present invention.

【0071】得られたプラズマ表示装置用基板を、画像
処理による外観検査装置にて検査を行ったところ、面内
において隔壁2の剥がれ不良が31点、放電電極3の剥
がれ不良が9点発生していることが確認された。また、
この基板の断面を走査型電子顕微鏡(SEM)にて観察
を行ったところ、隔壁2と放電電極3の接合面及び放電
電極3と下地層4の接合面ほぼ直線的なものであった。
When the obtained substrate for a plasma display device was inspected by an appearance inspection apparatus by image processing, 31 peeling failures of the partition wall 2 and 9 peeling failures of the discharge electrode 3 occurred in the plane. It was confirmed that. Also,
Observation of the cross section of this substrate with a scanning electron microscope (SEM) revealed that the joint surface between the partition 2 and the discharge electrode 3 and the joint surface between the discharge electrode 3 and the underlayer 4 were almost linear.

【0072】これらの結果からも明らかなように、比較
例においては隔壁2及び放電電極3の剥がれ不良の発生
を抑制することはできない。一方、本発明実施例1〜3
においては隔壁2及び放電電極3の剥がれ不良の発生を
抑制することができる。
As is clear from these results, in the comparative example, the occurrence of peeling failure of the partition wall 2 and the discharge electrode 3 cannot be suppressed. On the other hand, Examples 1 to 3 of the present invention
In this case, the occurrence of peeling failure of the partition wall 2 and the discharge electrode 3 can be suppressed.

【0073】尚、本発明は実施例に何等限定されるもの
ではない。
The present invention is not limited to the embodiments.

【0074】[0074]

【発明の効果】以上のように本発明のプラズマ表示装置
用基板の製造方法によれば、放電電極の隔壁との接合面
及び下地層の放電電極との接合面を凸形状とすることが
でき、隔壁及び放電電極の剥がれ不良の発生を抑制でき
るとともに、放電電極の断面積を大きくしてライン抵抗
を低抵抗化することができる。
As described above, according to the method for manufacturing a substrate for a plasma display device of the present invention, the bonding surface of the discharge electrode with the partition wall and the bonding surface of the base layer with the discharge electrode can be made convex. In addition, the occurrence of peeling failure of the partition and the discharge electrode can be suppressed, and the cross-sectional area of the discharge electrode can be increased to reduce the line resistance.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明によるプラズマ表示装置用基板の概略断
面図である。
FIG. 1 is a schematic sectional view of a plasma display device substrate according to the present invention.

【図2】(a)〜(e)は本発明に係るプラズマ表示装
置用基板の製造方法を示す図である。
FIGS. 2A to 2E are diagrams illustrating a method of manufacturing a substrate for a plasma display device according to the present invention.

【図3】(a)〜(d)は本発明に係るプラズマ表示装
置用基板の製造方法を示す図である。
FIGS. 3A to 3D are diagrams illustrating a method of manufacturing a substrate for a plasma display device according to the present invention.

【図4】(a)〜(c)は本発明に係るプラズマ表示装
置用基板の製造方法を示す図である。
FIGS. 4A to 4C are diagrams illustrating a method of manufacturing a substrate for a plasma display device according to the present invention.

【図5】一般的なPALC用基板の概略断面図である。FIG. 5 is a schematic sectional view of a general PALC substrate.

【符号の説明】[Explanation of symbols]

1:背面板 2:隔壁 3:放電電極 3a:接合面 4:下地層 4a:接合面 5:カラーフィルター 6:液晶パネル 7:バックライト 8:ガラスシート 9:表示セル 10:隔壁材料シート 11:隔壁成形型 11a:隔壁成形用凹部 12:平面板 13:スクレッパー h:放電電極凸部高さ t:下地層凸部高さ 1: back plate 2: partition wall 3: discharge electrode 3a: bonding surface 4: underlayer 4a: bonding surface 5: color filter 6: liquid crystal panel 7: backlight 8: glass sheet 9: display cell 10: partition material sheet 11: Partition forming die 11a: Partition forming concave portion 12: Flat plate 13: Scraper h: Discharge electrode convex portion height t: Underlayer convex portion height

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】絶縁基板上に所定の間隔をおいて並列に複
数の隔壁を有し、該隔壁の下部に放電電極と下地層を積
層して成るプラズマ表示装置用基板において、上記放電
電極の隔壁との接合面が凸形状であることを特徴とする
プラズマ表示装置用基板。
1. A plasma display device substrate comprising: a plurality of partition walls arranged in parallel at predetermined intervals on an insulating substrate, and a discharge electrode and a base layer laminated below the partition walls. A substrate for a plasma display device, wherein a bonding surface with a partition has a convex shape.
【請求項2】上記下地層の放電電極との接合面が凸形状
であることを特徴とする請求項1記載のプラズマ表示装
置用基板。
2. The substrate for a plasma display device according to claim 1, wherein a bonding surface of the underlayer with the discharge electrode has a convex shape.
【請求項3】絶縁基板上に所定の間隔をおいて並列に複
数の隔壁を有し、該隔壁の下部に放電電極と下地層を積
層して成るプラズマ表示装置用基板を、次の工程により
製造することを特徴とするプラズマ表示装置用基板の製
造方法。 (1)単層若しくは複数層の隔壁成形用組成物に、隔壁
成形用凹部を有する型を押圧して上記隔壁成形用組成物
の一部を上記隔壁成形用凹部内に充填する工程 (2)上記型表面上に付着した隔壁成形用組成物を除去
する工程 (3)全面に放電電極層と下地層を積層形成した絶縁基
板上に、上記隔壁成形用型を接触させ隔壁成形用凹部内
の隔壁成形用組成物を上記絶縁基板上に転写する工程 (4)上記絶縁基板上に転写した隔壁間の放電電極層と
下地層を除去する工程 (5)上記工程により得られた形成体を一括焼成する工
3. A plasma display device substrate comprising a plurality of partition walls arranged in parallel at a predetermined interval on an insulating substrate, and a discharge electrode and a base layer laminated below the partition walls by the following steps: A method for manufacturing a substrate for a plasma display device, characterized by manufacturing. (1) A step of pressing a mold having a partition wall forming recess into a single layer or a plurality of layers of the partition wall forming composition to fill a part of the partition wall forming composition into the partition wall forming recess. Step of removing the partition wall forming composition adhered on the mold surface (3) The above partition wall forming mold is brought into contact with an insulating substrate on which a discharge electrode layer and a base layer are formed by lamination on the entire surface, so that the inside of the partition wall forming recess is formed. Step of transferring the composition for partition wall formation onto the insulating substrate (4) Step of removing the discharge electrode layer and the base layer between the partition walls transferred onto the insulating substrate (5) Collectively forming the formed body obtained by the above step Firing process
【請求項4】絶縁基板上に所定の間隔をおいて並列に複
数の隔壁を有し、該隔壁の下部に放電電極と下地層を積
層して成るプラズマ表示装置用基板を、次の工程により
製造することを特徴とするプラズマ表示装置用基板の製
造方法。 (1)単層若しくは複数層の隔壁成形用組成物に、隔壁
成形用凹部を有する型を押圧して上記隔壁成形用組成物
の一部を上記隔壁成形用凹部内に充填する工程 (2)全面に放電電極層と下地層を積層形成した絶縁基
板上に、上記隔壁成形用型を接触させ隔壁成形用凹部内
及び表面上の隔壁成形用組成物を上記絶縁基板上に転写
する工程 (3)上記絶縁基板上に転写した隔壁間の隔壁成形用組
成物と放電電極層と下地層を除去する工程 (4)上記工程により得られた形成体を一括焼成する工
4. A plasma display device substrate comprising a plurality of partition walls arranged in parallel at a predetermined interval on an insulating substrate, and a discharge electrode and a base layer laminated below the partition walls by the following steps: A method for manufacturing a substrate for a plasma display device, characterized by manufacturing. (1) A step of pressing a mold having a partition wall forming recess into a single layer or a plurality of layers of the partition wall forming composition to fill a part of the partition wall forming composition into the partition wall forming recess. (3) a step of bringing the above-mentioned partition-forming mold into contact with an insulating substrate having a discharge electrode layer and a base layer formed on the entire surface thereof and transferring the partition-forming composition in the partition-forming concave portion and on the surface to the insulating substrate; ) A step of removing the partition wall forming composition between the partition walls transferred onto the insulating substrate, the discharge electrode layer, and the underlayer. (4) A step of collectively firing the formed body obtained in the above step.
【請求項5】絶縁基板上に所定の間隔をおいて並列に複
数の隔壁を有し、該隔壁の下部に放電電極と下地層を積
層して成るプラズマ表示装置用基板を、次の工程により
製造することを特徴とするプラズマ表示装置用基板の製
造方法。 (1)全面に放電電極層と下地層を積層形成した絶縁基
板上に、単層若しくは複数層の隔壁成形用組成物を形成
し、隔壁成形用凹部を有する型を押圧して上記絶縁基板
上に隔壁を成形する工程 (2)上記絶縁基板上に成形した隔壁間の隔壁成形用組
成物と放電電極層と下地層を除去する工程 (3)上記工程により得られた形成体を一括焼成する工
5. A plasma display device substrate having a plurality of partition walls arranged in parallel at predetermined intervals on an insulating substrate, and a discharge electrode and a base layer laminated below the partition walls by the following steps: A method for manufacturing a substrate for a plasma display device, characterized by manufacturing. (1) A single layer or a plurality of layers of a composition for forming a partition is formed on an insulating substrate having a discharge electrode layer and a base layer laminated on the entire surface, and a mold having a recess for forming a partition is pressed to form the composition on the insulating substrate. (2) Step of removing the partition wall forming composition, the discharge electrode layer and the underlayer between the partition walls formed on the insulating substrate (3) Batch firing the formed body obtained in the above step Process
【請求項6】請求項1又は2に記載のプラズマ表示装置
用基板を用いたことを特徴とするプラズマ表示装置。
6. A plasma display device using the substrate for a plasma display device according to claim 1.
JP2000345500A 2000-11-13 2000-11-13 Substrate for plasma display device, method of manufacturing the same, and plasma display device using the same Pending JP2002150956A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000345500A JP2002150956A (en) 2000-11-13 2000-11-13 Substrate for plasma display device, method of manufacturing the same, and plasma display device using the same

Publications (1)

Publication Number Publication Date
JP2002150956A true JP2002150956A (en) 2002-05-24

Family

ID=18819527

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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