JP2001129762A - Particulate matter jet machining method and machining device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a jet machining method machining a cross-sectionally rectangular groove on a surface of a workpiece. SOLUTION: In this particulate matter jet machining method, a polishing material acceleration chamber 56 of a nozzle 12 is divided into two, while the two divided chambers are inclined to each other such that solid-gas two- phase flows are jetted to directions inclined to the normal direction to a machined surface of the work piece 11, allowing going away from each other, and perpendicular to the length direction of a resist mask 60.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for spraying powder and granules, and more particularly, to a method for spraying powder and granules from a nozzle to a workpiece as a gas-solid two-phase flow together with a gas. TECHNICAL FIELD The present invention relates to a method and an apparatus for jetting powder and granules for processing.

[0002]

2. Description of the Related Art A solid-gas two-phase flow of high-pressure air containing an abrasive is jetted from a nozzle onto the surface of a workpiece, and blind holes or through holes of various shapes such as high-precision grooves or cylinders are formed. A method and an apparatus for grinding a hole are known.

In such processing, an abrasive is sucked into a flow of high-pressure air, and is injected into a work 2 from an injection port of a round nozzle 1 as shown in FIG. Here, for example, a resist 3 is formed in a stripe shape on the surface of the work 2, and a processing groove 4 is formed in a portion where the resist 3 is not formed. Here, while slowly moving the work 2 in the direction orthogonal to the direction of the stripes of the resist 3,
The nozzle 1 is reciprocated in the direction of the stripes of the resist 3.

[0004] Another conventional processing method uses a rectangular nozzle 1 as shown in FIG. Here, a nozzle 1 having an elongated slit-like outlet at which an abrasive is injected is used. Here, the abrasive supplied into the nozzle 1 is
After being spread inside, it is focused and accelerated and ejected from a rectangular or slit-shaped ejection port on the tip side. For this reason, the sprayed abrasive is less spread in the lateral direction. The nozzle 1 is arranged so that the length direction of the nozzle is orthogonal to the resist pattern 3, and the nozzle 1 is scanned in a direction parallel to the resist pattern 3.

[0005]

In the case of processing with a circular nozzle 1 as shown in FIG. 15, the abrasive coming out of the nozzle 1 is moved 36 degrees with respect to the axis of the nozzle 1 as shown in FIG.
It spreads 0 degrees and collides with the surface of the work 2. As shown in FIG. 17, the side surface of the resist 3 and the side surface of the processing groove 4 collide while spreading from an oblique direction. After having hit the center of the groove 4 and also grinding this portion, it flows along the processing groove 4 in the length direction thereof. For this reason, in the case of glass or ceramic, the processing groove 4 is
As shown in (1), there was a disadvantage that the cross section was processed into a curved surface. Due to such a drawback, there is a problem that the groove is unsuitable when the cross-sectional shape of the groove needs to be rectangular as in the ink flow path of the printer head.

In the case of processing a rib of a plasma display panel (PDP) with high precision, as shown in FIG. 18, a work piece made of a low-melting glass 6 screen-printed on a surface of a base 5 made of glass or the like is used. A stripe-shaped resist pattern 3 is formed on the surface. An abrasive is sprayed onto the surface on the side of the resist layer 3 to form a portion of the low-melting glass 6 other than the resist layer 3 in a groove shape serving as a discharge space, and a rib is formed at the portion of the resist layer 3.

The abrasive sprayed by the nozzle 1 spread 360 degrees from the round nozzle 1 collides with the side surface of the processing groove 4 of the low-melting glass paste 6 and polishes. Flows along. Since the substrate 5 having high hardness is not processed, when the substrate 5 is exposed at the bottom of the groove 4, it does not become deeper. As a result, the side surface of the machining groove 4 is cut into a rib shape, which lowers the rib strength. Further, when used for a plasma display panel, there is a problem that the luminance is reduced.

In the case of a rectangular nozzle as shown in FIG. 19 in which the abrasive material spreads less than the round nozzle, as shown in FIGS. 20 and 21, when the work 2 is a single material such as glass or ceramic, The abrasive that comes out of the nozzle 1 and hits the bottom of the processing groove 4 is ground and rebounds, and flows along the processing groove 4. The abrasive material that has hit the side surface of the processing groove 4 rebounds by grinding this portion, and returns to the bottom of the processing groove 4 again to grind this portion, and then flows along the processing groove 4. As a result, the amount of grinding at the center of the processing groove 4 increases, so that the cross-sectional shape of the groove 4 becomes the same curved surface shape as that of the round nozzle, and a rectangular cross-section having a right-angled edge cannot be obtained.

FIG. 22 shows a state in which a groove is formed in a plasma display panel by the rectangular nozzle 1. That is, since the abrasive sprayed from the rectangular nozzle 1 does not spread laterally, there is no need to directly grind the side surface of the processing groove 4 so as to gouge. However, the abrasive that has hit the side surface of the processing groove 4 rebounds by grinding this portion, and once again hits the bottom of the groove 4, flows along the groove 4. Since the side surface of the groove 4 has a weak grinding force, the taper of the side surface remains until the end, and the cross-sectional shape of the groove 4 does not become rectangular.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has been made in view of the above problem. It is an object to provide a method and a processing device.

[0011]

SUMMARY OF THE INVENTION One aspect of the present invention is a method of processing a workpiece by injecting the particulate into a gas-solid two-phase flow together with a gas from a nozzle to the workpiece. In the body injection processing method, the solid-gas two-phase flow is divided into two,
The present invention relates to a powder and particle blasting method characterized by blasting in a direction inclined to a direction perpendicular to a processing surface of the workpiece and away from each other.

Another aspect of the present invention relates to a method of spraying a powder and a granular material, wherein the powder and the particulate are jetted from a nozzle to a workpiece as a gas-solid two-phase flow together with a gas to process the workpiece. Supplying the granular material together with the gas to the granular material dispersion space of the nozzle, then converging the granular material and the gas substantially linearly, and further rectifying and accelerating in the acceleration space from the injection port of the nozzle. The present invention relates to a method for jetting a powdery or granular material, which is jetted to a workpiece as a solid-gas two-phase flow.

Here, the injection port of the nozzle has a slit shape, and a solid-gas two-phase flow is generated in the length direction or width direction of the nozzle by two.
It may be divided. In addition, the cross-sectional shape of the acceleration space of the nozzle in a direction perpendicular to the axis direction is rectangular, and the long side has a length of 10 times or more the short side, and the dimension of the acceleration space in the axial direction is the short side. 20 times or more.
In addition, the cross-sectional shape of the acceleration space of the nozzle in a direction perpendicular to the axial direction is rectangular, and the short side is 0.3 to 5 mm,
The long side may be 10 to 1000 mm.

Further, the solid-gas two-phase flow is divided into two parts in a region of substantially the entire length of the acceleration space of the nozzle in the axial direction, and is divided in a direction inclined by 5 to 40 degrees with respect to a direction perpendicular to the processing surface of the workpiece. You may make it jet. Further, the groove processing may be performed on the surface of the workpiece, and the inclined direction of the solid-gas two-phase flow which is divided and injected may be a direction substantially orthogonal to the length direction of the processing groove. Further, the granular material may be an abrasive having a size of # 240 to # 6000.

[0015] A main invention relating to a processing apparatus is a powder-granular material injection processing for processing a workpiece by injecting a granular material together with gas into a gas-solid two-phase flow from a nozzle to the workpiece. In the apparatus, the nozzle is provided with the solid gas 2
A dispersion chamber for dispersing the phase flow, a focusing chamber for focusing the solid-gas two-phase flow in a substantially linear cross section, and an acceleration chamber for accelerating the focused solid-gas two-phase flow. The cross-sectional shape in the direction perpendicular to the axial direction is rectangular, the long side has a length of at least 10 times the short side, and the axial dimension of the acceleration chamber is at least 20 times the short side. The acceleration chamber is divided into two over substantially the entire length in the axial direction of the acceleration chamber, and is inclined with respect to the axial direction of the nozzle. Things.

Here, the cross section of the acceleration chamber in a direction perpendicular to the axial direction may be rectangular, with its short side being 0.3 to 5 mm and its long side being 10 to 1000 mm. Further, the inclination angle of the acceleration chamber with respect to the axial direction may be 5 to 40 degrees. Further, the nozzle may include a metal housing and a metal or ceramic nozzle tip, and may be integrally joined via a seal member.

[0017]

According to the above-mentioned invention and another invention relating to the processing method, the solid-gas two-phase flow allows the powder and the particulate material to be more completely dispersed in the powder and particle dispersion space in the nozzle, and then the powder and particle focusing space. The particles and the gas are converged in a substantially straight line, and are rectified and accelerated in the acceleration space, and are ejected from the ejection port of the nozzle in a direction inclined and away from a direction perpendicular to the processing surface of the workpiece. Will be.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION
A certain amount of abrasive is extruded into a flow of high-pressure gas by screw rotation from a screw tank filled with abrasive and to which high-pressure gas is applied, and dispersed, and the resulting solid-gas two-phase flow is processed. It is a method of processing the processing surface of the workpiece by spraying on the surface of
The solid-gas two-phase flow injected to the workpiece is divided into two parts, and the two directions are perpendicular to the processing surface of the workpiece and are injected such that the two directions are separated from each other. Things.

Here, the nozzle for injecting the solid-gas two-phase flow has an abrasive dispersion space into which a solid-gas two-phase flow is supplied, and then this solid-gas two-phase flow is straightened in the abrasive focusing space. After converging into a shape and rectifying and accelerating in the abrasive acceleration space, the abrasive is injected onto the processing surface of the workpiece.

Here, the cross section of the abrasive processing space in a direction perpendicular to the axial direction is rectangular, and the long side is 1 to the short side.
It has a length of 0 times or more, and the dimension in the axial direction is defined as a constant shape at a distance of 20 times or more of the short side. Also, the cross-sectional shape of the abrasive acceleration space has a narrow, horizontally long slit shape with a short side of 0.3 mm or more and a long side of 10 to 1000 mm, and a solid-gas two-phase flow over the entire length of the abrasive acceleration space in the axial direction. Is divided into two parts, and the liquid is ejected onto the processing surface of the workpiece at an inclination of 5 to 30 degrees from the vertical direction. In addition, the direction in which the injection is performed while being inclined from the vertical direction with respect to the processing surface of the workpiece is inclined in a direction orthogonal to the length direction of the recess or groove formed on the surface of the workpiece. . Here, as the abrasive, # 240
A size of ~ # 6000 is preferably used.

The processing equipment used for such processing is as follows:
A screw tank filled with an abrasive and to which a high-pressure gas is applied is provided, and a dispersion chamber for extruding and dispersing a certain amount of the abrasive into a flow of the high-pressure gas by rotating the screw of the screw tank is obtained. What is claimed is: 1. A jet processing apparatus comprising: an injection nozzle for injecting a gas-solid two-phase flow onto a surface of a workpiece, wherein the nozzle disperses the gas-solid two-phase flow;
It has a focusing chamber for linearly focusing and an acceleration chamber for rectifying and accelerating, wherein the cross-sectional shape in a direction orthogonal to the axial direction of the acceleration chamber is formed from a longer side at least 10 times longer than a shorter side. And at least 20 times the short side in the axial direction.
The present invention relates to a processing apparatus that is divided and jetted at an angle to a processing surface of a processing object from a vertical direction.

In particular, the cross section of the acceleration chamber in a direction perpendicular to the axial direction has a short side of 0.3 mm or more and a long side of 10 to 1000 mm.
mm and the inclination angle of the abrasive accelerating chamber with respect to the direction perpendicular to the processing surface of the workpiece may be 5 to 40 degrees. The nozzle may include a metal housing and a metal or ceramic nozzle tip, and may be integrated with an O-ring seal.

According to the processing method and the processing apparatus as described above, the abrasive is dispersed in the high-pressure gas, and the obtained solid-gas 2
In the injection processing for processing the processing surface of the workpiece by injecting the phase flow onto the surface of the workpiece, a screw tank containing an abrasive and a high-pressure gas is divided into two, and the abrasive is oblique from an outlet. The device is constituted by the nozzles jetted to the nozzle. Then, the workpiece is positioned so that the abrasive injected at an angle is orthogonal to the stripe pattern of the resist, so that the cross-sectional shape of the groove of the stripe pattern can be processed into a substantially accurate rectangular shape. Will be possible.

[0024]

FIG. 1 shows the entire configuration of a powder and grain injection processing apparatus for performing processing according to an embodiment of the present invention. This apparatus has a processing chamber 10. A work 11 is held in the processing chamber 10 via a work holder 50, and the nozzle 12 is arranged to face the work holder 50. The nozzle 12 is scanned by an actuator 14 via an arm 13. The wall of the processing chamber 10 through which the arm 13 passes is sealed by the bellows 15.

The bottom of the processing chamber 10 is connected to a separating device 20 via a pipe 19. The separation device 20 includes a filter 21, and the filter 21 separates air and powder. The air separated by the filter 21 is discharged to the upper part, and the collected powders are stored and used repeatedly.

An on-off valve 24 is provided at the lower part of the separation device 20, and is connected to the intermediate tank 25 via the on-off valve 24. The intermediate tank 25 is provided with a screw conveyor 26 at the bottom thereof, and pushes the powder particles accumulated at the bottom of the intermediate tank 25 rightward in FIG.

The bottom of the intermediate tank 25 is connected to a supply tank 32 via a connection tube 30. A conical valve 31 is provided at the bottom of the connecting cylinder 30 and at a portion connected to the supply tank 32, and the supply of the granular material from the intermediate tank 25 to the supply tank 32 is controlled by the conical valve 31. I have to.

In the supply tank 32, a stirring rod 33 and a screw conveyor 34 are vertically arranged. The stirring rod 33 and the screw conveyor 34 are respectively connected to the motor 3
5 and 36 are driven to rotate.

The apparatus further comprises an air pressure source 40, to which a dry unit 41, a flow sensor 42, a flow controller 43, and a branch unit 44 are connected in series. One branch pipe of the branch unit 44 is connected to the mixing pipe 45. And this mixing tube 4
5 is connected to the ejector 46. The ejector 46 sucks the air flow containing the powdery material from the mixing pipe 45 and supplies the air flow to the nozzle 12 in the processing chamber 10.

Next, an outline of the operation of such a granular material jet machining apparatus will be described. The high-pressure air supplied from the air pressure source 40 is supplied to a lower portion of the mixing pipe 45 through a dry unit 41, a flow sensor 42, a flow control unit 43, and a branch unit 44. The high-pressure air flowing through the mixing pipe 45 sucks the powder and the granular material extruded from the supply hole 47 at the bottom of the supply tank 32 and supplies the powder to the ejector 46. In the ejector 46, the granular material is mixed into the high-pressure air supplied from the branch unit 44, whereby a solid-gas two-phase flow is generated. Such a solid-gas two-phase flow is supplied to the nozzle 12 in the processing chamber 10.

The nozzle 12 has a slit-shaped injection port at the tip end thereof,
Arm 1 by actuator 14 along the surface of
The surface of the work 11 is processed while scanning through the work 3. That is, a solid-gas two-phase flow of high-pressure air and granular material is vigorously blown from the injection port of the nozzle 12 onto the surface of the work 11, thereby performing the granular material injection processing.

The processed mixture of the granular material and air is led to a separation device 20 through a pipe 19. The air and the powder are separated by the filter 21 in the separation device 20, and the air is discharged from the upper portion of the separation device 20 to the outside. A part of the air is supplied into the processing chamber 10, the air is rectified in the processing chamber 10, and the flow of the solid-gas two-phase flow of the granular material and the air from the nozzle 12 is rectified. ing. Further, some air is stored in the intermediate tank 25.
And the pressure in the intermediate tank 25 is increased.

The granular material separated by the separating device 20 falls into the intermediate tank 25 as the on-off valve 24 opens. When the screw conveyor 26 is driven, the intermediate tank 2
5 accumulates in the supply tank 32 in synchronization with the opening of the conical valve 31 of the connection cylinder 30. The granular material in the supply tank 32 is stirred by the stirring rod 33. When the screw conveyor 34 is driven by the motor 36 below the stirring rod 33, the powder particles accumulated at the bottom of the supply tank 32 are sequentially supplied from the supply holes 47 to the mixing pipe 45. In this way, the granules are repeatedly used many times.

Next, the nozzle 12 used in such a processing apparatus will be described with reference to FIGS. The nozzle 12 includes an abrasive dispersion chamber 54 in which a powder or a granular material supplied by high-pressure air is supplied from an abrasive inlet 53, an abrasive collection chamber 55 for collecting the abrasive, and polishing for accelerating the abrasive. A material accelerating chamber 56 is provided, and an injection port 57 on the tip side of the acceleration chamber 56 is provided. The injection port 57 is used to jet the abrasive.

Therefore, the nozzle 1 carried by the high pressure air
The abrasive supplied into the nozzle 2 through the abrasive inlet 53 is spread over the entire internal space of the nozzle 12 by the abrasive dispersion chamber 54, then collected linearly by the focusing chamber 55, and then divided into two parts. Is supplied to the acceleration chamber 56. In the acceleration chamber 56, the flow velocity of the solid-gas two-phase flow is maximized, and the direction of the abrasive can be changed obliquely simultaneously with acceleration. That is, the abrasive is sprayed toward the outside of the nozzle 12 at the same angle.

On the surface of a workpiece such as glass, ceramics, plastic, or metal, for example, BF of Tokyo Ohka Kogyo
A resist mask 60 such as a resist is formed as shown in FIG. The nozzle 12 is scanned back and forth in the stripe direction of the resist mask 60. On the other hand, the workpiece 11 constituting the work is scanned in a direction perpendicular to the scanning direction of the nozzle 12 to be scanned and in a direction perpendicular to the direction in which the mask 60 is formed.

As shown in FIG. 3 and FIG.
Is composed of a metal housing 51 and a metal or ceramic nozzle tip 52, an abrasive dispersion chamber 54 is formed in the housing 51, and a focusing chamber 55 and an acceleration chamber 56 are formed in the nozzle tip 52. ing. The housing 51 and the nozzle tip 52 are connected to each other via an O-ring 58 while being sealed. That is, the nozzle tip 52 is fixed to the housing 51 by screwing.

The gap t of the acceleration chamber 56 of the nozzle tip 52 shown in FIG. Therefore, the standard of replacement of the nozzle tip 52 is when the gap t becomes 1.5 t, which is 1.5 times the initial value. If the gap t is used more than this, the uniformity of the processing depth becomes remarkably deteriorated. By replacing only the consumable nozzle tip 52, the nozzle 12
Maintenance costs can be reduced.

FIG. 5 to FIG. 7 show such a nozzle 12.
Will be described. Injection port 57 of nozzle 12
Comes out from the surface of the workpiece such as glass, ceramic, plastic, or metal at an angle θ shown in FIG. The abrasive material hitting the bottom of the processing groove 63 bounces off by grinding this portion, hits the corner of the processing groove 63 and also grinds this portion, and flows along the groove 63 in the length direction thereof. The abrasive material that has hit the side surface of the processing groove 63 polishes this side surface, hits the corner of the groove 63 again, polishes this corner, and then flows along the groove.

FIG. 7 shows an example of rib processing of a plasma display panel (PDP). In this case, the same principle as in the case of the groove processing of the glass is used, and a groove 6 having a rectangular
3 can be formed. When the low melting point glass paste 61 at the bottom of the groove 63 disappears and the substrate 62 is exposed, the groove 6
The glass paste at the corner 3 is intensively ground, and
3 becomes a rectangle. That is, by using the nozzle 12, the processing capability of the side surface and the corner of the processing groove 63 is increased, so that it is possible to form the processing groove 63 having a substantially accurate rectangular cross section without taper on the side surface.

The length w (see FIG. 3) of the injection port 57 of the nozzle 12 varies depending on the size of the workpiece 11 and the ease of processing. For example, when processing a small electronic component made of glass or ceramic that is difficult to process, or when processing a part of the component, the length w of the injection port 57 of the nozzle 12 is determined by the processing power if the processing range is narrow. Nozzles with shorter lengths are more suitable in that
About 20 mm is appropriate. On the other hand, in the case of a large workpiece 11 having a width of about 1 m, such as a plasma display panel (PDP), the larger the length w of the injection port 57, the higher the processing efficiency. Therefore, in this case, it is appropriate that w is about 500 to 1000 mm.

FIG. 8 shows the result of examining the relationship between the processing speed and the ratio h / t between the length h and the width t of the acceleration chamber 56 of the nozzle 12 in the axial direction. As shown in FIG.
The ratio h / of the dimension h in the axial direction of the acceleration chamber 56 to the gap t
The value of the processing speed with respect to t, when the gap t of the acceleration chamber 56 is constant, the processing speed increases as the height h increases,
When h / t is 20, it becomes almost constant and saturates.

FIG. 9 shows the particle size distribution of # 240 abrasive having the largest average particle diameter among commercially available abrasives, using GC as an example. That is, the horizontal axis shows the particle size, the left vertical axis shows the frequency by the particle size, and the right vertical axis shows the cumulative frequency. When the particle diameter on the horizontal axis is 200 μm or more, the unit is 30 μm, and the maximum particle diameter is 260 μm.

Since a commercially available abrasive is generally used, the gap t of the acceleration chamber 56 should be set to a minimum value of 300 μm with a margin from the maximum particle diameter of 260 μm, and the gap t should be set to a larger value. is there. Among the commercially available abrasives, # 10000 has the smallest average particle size. However, this powder is too small to be processed. The smallest powder that can be processed by the processing apparatus of this embodiment is # 600
0. For this reason, the powder generally used in this embodiment falls within the range of # 240 to # 6000.

FIG. 10 shows the relationship between the ratio w / t between the gap t and the length w of the injection port 57 at the outlet of the nozzle 12, and the ratio Fw / Ft between the flow rate Fw in the width direction and the flow rate Ft in the gap direction. Things. This indicates that if the gap t is smaller than the length w of the nozzle 12, the flow of air in the gap t direction is naturally reduced. Fw / F when w / t is 10 times or more
It is understood from this graph that t becomes constant. In order to minimize the flow of air in the direction of the gap t, it is necessary that the w / t of the outlet 57 of the nozzle 12 is 10 times or more.

FIG. 11 shows the relationship between the abrasive injection angle θ equal to the inclination θ of the abrasive acceleration chamber 56 of the nozzle 12 (see FIG. 3) and the taper angle β of the processing groove 63 of the workpiece 11. It is. Taper angle β of the processing groove 63 of the workpiece 11
Becomes 0 when the injection angle θ is 3 in the case of soda glass.
At 0 degree, injection angle θ in case of PZT ceramics
Is 10 degrees, and the injection angle θ is 5 degrees in the case of PDP rib processing. The processing speed of PZT ceramics is about three times faster than soda glass. For a material that can be easily processed, the taper angle β of the groove 63 of the workpiece can be reduced to almost zero at a small spray angle θ. Therefore, the inclination θ of the nozzle processing chamber is 5
It can be said that a range of 30 degrees is appropriate.

Next, the nozzle 12 of the second embodiment will be described with reference to FIGS. Nozzle 12 of this embodiment
Has a dispersion chamber 54 for dispersing the abrasive, a focusing chamber 55 for linearly focusing the abrasive, and an accelerating chamber 56 for accelerating the solid-gas two-phase flow by dividing it into two.

The feature of this embodiment is that, as shown in FIGS. 12 and 14, the nozzle 12 is divided into two in the width direction of the injection port 57, and a solid-gas two-phase flow is injected from each of the pair of injection ports 57. It is characterized by: Here, the acceleration room 5
Reference numeral 6 indicates that the flow velocity of the solid-gas two-phase flow is maximum, and the direction of the abrasive is changed simultaneously with acceleration. The direction in which the abrasive is sprayed is symmetrical with respect to its axis in FIG.
Are sprayed at an angle θ inclined with respect to the axis.

As shown in FIG. 12, a stripe-shaped resist mask 6 is previously formed on the surface of a workpiece such as glass, ceramics, plastic, or metal which constitutes the work 11.
0, for example, a BF resist 60 of Tokyo Ohka Kogyo is formed. The workpiece 11 is placed so that the direction of the abrasive sprayed from the nozzle 12 is orthogonal to the stripe pattern of the resist 60 on the workpiece 11. The nozzle 12 scans back and forth so as to be orthogonal to the stripe of the resist mask 60. The workpiece 11 is moved in one direction under the scanning nozzle 12.

As shown in FIGS. 13 and 14, the nozzle 12 is composed of a metal housing 51 and a nozzle tip 52 made of metal or ceramics. Has been The gap t of the acceleration chamber 56 of the nozzle tip 52 is worn and widened. The standard of replacement is 1.5 times the initial gap t.
When it is 1.5 t, which is twice as large, if it is used any more, the uniformity of the working depth deteriorates and it becomes conspicuous. Here, by replacing only the nozzle tip 52, the maintenance cost of the nozzle 12 can be reduced.

As shown in FIG. 12, the abrasive material is obliquely sprayed by being divided into two in the width direction of the slit-like spray opening 57. Therefore, in the nozzle 12 of this embodiment, the scan is performed. Is a direction orthogonal to the nozzle of the first embodiment shown in FIG. That is, the nozzle 12 shown in FIG. 12 scans the surface of the work 11 in a direction orthogonal to the length direction of the mask 60. Therefore, the direction of inclination of the solid-gas two-phase flow including the abrasive which is divided and injected is substantially perpendicular to the length direction of the processing groove 63, and with such a configuration, substantially the same as in the first embodiment. An accurate rectangular processing groove 63 can be formed.

[0052]

According to one aspect of the present invention, there is provided a method of spraying a powder and a granular material, wherein the powder and the gas are jetted from a nozzle to the workpiece as a gas-solid two-phase flow to process the workpiece. , The solid-gas two-phase flow is divided into two, and the two-phase flow is inclined in a direction perpendicular to the processing surface of the workpiece and injected in a direction away from each other.

Therefore, according to such an injection processing method,
In particular, by inclining the nozzle in a direction substantially perpendicular to the length direction of the stripe-shaped mask with respect to the work on which the mask is formed in a stripe-like manner, it is possible to perform a groove processing having a rectangular cross section.

Another invention is to provide a method in which a powdery material is solid-gas 2 together with a gas.
In a powder material jet processing method in which a workpiece is processed by being jetted from a nozzle to a workpiece as a phase flow, the powder material is supplied together with a gas to a powder particle dispersion space of the nozzle, Next, the particles and the gas are substantially linearly focused in the particle-gathering space, and the gas is rectified and accelerated in the acceleration space to be jetted from the nozzle orifice to the workpiece as a solid-gas two-phase flow. It is.

Therefore, according to such a method of spraying a granular material, a solid-gas two-phase flow in which the granular material is uniformly dispersed in a gas is injected at a high speed from the nozzle orifice to the workpiece. It becomes possible to process the surface of the leverage workpiece.

The invention related to a processing apparatus is a powder and particle injection processing apparatus for processing a workpiece by injecting the powder as a gas-solid two-phase flow together with a gas from a nozzle to the workpiece. The nozzle includes a dispersion chamber for dispersing the solid-gas two-phase flow, a focusing chamber for focusing the solid-gas two-phase flow in a substantially linear cross section, and an acceleration chamber for accelerating the focused solid-gas two-phase flow. Moreover, the cross section of the acceleration chamber in a direction perpendicular to the axial direction has a rectangular shape, the longer side has a length of 10 times or more the shorter side, and the dimension of the acceleration chamber in the axial direction is 20 times the shorter side. The acceleration chamber having the above-mentioned length is divided into two substantially along the entire length of the acceleration chamber in the axial direction, and is inclined with respect to the axial direction of the nozzle.

Therefore, according to such a processing apparatus, the processing of the surface of the workpiece is performed by injecting the solid-gas two-phase flow at a high speed in a direction perpendicular to and inclined to the surface of the workpiece. Becomes possible. Moreover, by applying a stripe-shaped mask on the surface of the workpiece in advance and setting the inclination direction of the solid-gas two-phase flow to a direction substantially orthogonal to the length direction of the stripe,
It becomes possible to subject a workpiece to a rectangular groove processing whose cross section is almost accurate.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an overall configuration of an injection processing apparatus.

FIG. 2 is an external perspective view of a nozzle according to the first embodiment.

FIG. 3 is a vertical sectional view of the nozzle.

FIG. 4 is a longitudinal sectional view of the nozzle at an angle perpendicular to FIG. 3;

FIG. 5 is a plan view of a main part showing a state of injection processing by a nozzle.

FIG. 6 is an enlarged front view showing a state of the injection processing.

FIG. 7 is an enlarged front view showing a state in which processing of the plasma display panel is performed.

FIG. 8 is a graph showing a processing speed of a nozzle.

FIG. 9 is a graph showing a particle size distribution.

FIG. 10 is a graph showing a flow rate ratio of air.

FIG. 11 is a graph showing a taper angle of a side surface of a processing groove.

FIG. 12 is an external perspective view of a nozzle according to a second embodiment.

FIG. 13 is a longitudinal sectional view of the nozzle.

FIG. 14 is a longitudinal sectional view of the nozzle in a direction perpendicular to FIG.

FIG. 15 is an external perspective view showing injection processing by a round nozzle.

FIG. 16 is a plan view of the same.

FIG. 17 is a front view showing a processing state by the nozzle.

FIG. 18 is a front view showing a processing state of the plasma display panel by the nozzle.

FIG. 19 is an external perspective view showing a groove processing state by a rectangular nozzle.

FIG. 20 is a main part plan view showing the same processing state.

FIG. 21 is a front view of the same processing state.

FIG. 22 is a main part front view showing processing of the plasma display panel by the nozzle.

[Explanation of symbols]

1 ‥‥ nozzle, 2 ‥‥ work, 3 ‥‥ resist, 4 ‥‥
Machining groove, 5 mm base, 6 mm low melting point glass, 10 mm machining room, 11 mm workpiece (workpiece), 12 mm nozzle,
13 ‥‥ arm, 14 ‥‥ actuator, 15 ‥‥ bellows, 19 路 pipe, 20 ‥‥ separator, 21 ‥‥ filter, 24 ‥‥ open / close valve, 25 ‥‥ intermediate tank, 26 ‥‥ screw conveyor, 30 ° connection cylinder, 31 ° conical valve, 3
2 ‥‥ supply tank, 33 ‥‥ stirring rod, 34 ‥‥ screw conveyor, 35, 36 ‥‥ motor, 40 ‥‥ air pressure source,
41 ‥‥ dry unit, 42 ‥‥ flow sensor, 43 ‥
{Flow control unit, 44} Branch unit, 45} Mixing tube, 46 # Ejector, 47 # Supply hole, 51 # Housing, 52 # Nozzle tip, 53 # Abrasive material inlet,
54 ‥‥ abrasive dispersion chamber, 55 ‥‥ abrasive collection chamber, 56 ‥
‥ Abrasive material acceleration chamber, 57 ‥‥ Injection port, 58 ‥‥ O-ring,
60 ‥‥ resist mask, 61 ‥‥ low melting glass paste, 62 ‥‥ base, 63 ‥‥ processing groove

Claims (13)

[Claims] 1. A method for jetting a powder and a particle together with a gas as a gas-solid two-phase flow from a nozzle to a workpiece to process the workpiece, A method of spraying powder and granules, wherein a phase flow is divided into two parts, and the two parts are sprayed in a direction inclined toward a direction perpendicular to a processing surface of the workpiece and away from each other. 2. A method for jetting a powdery or granular material together with a gas as a gas-solid two-phase flow from a nozzle to a workpiece to process the workpiece. The particles and the gas are supplied to the particle dispersion space together with the gas, and then the particles and the gas are focused substantially linearly, and further rectified and accelerated in the acceleration space to be solidified on the workpiece from the nozzle orifice of the nozzle. A method for jetting a powder and granules, wherein the jetting is performed as a two-phase gas flow. 3. The granular material according to claim 1, wherein the injection port of the nozzle has a slit shape and divides the solid-gas two-phase flow into two in the length direction of the injection port. Injection processing method. 4. The granular material according to claim 1, wherein the injection port of the nozzle has a slit shape, and the solid-gas two-phase flow is divided into two in the width direction of the injection port. Injection processing method. 5. A cross-sectional shape of the acceleration space of the nozzle in a direction perpendicular to the axial direction of the acceleration space has a rectangular shape, and its long side has a length of 10 times or more of the short side, and the dimension of the acceleration space in the axial direction. Is at least 20 times the short side.
3. The method for spraying powdery and granular materials according to item 1. 6. A cross-sectional shape of the acceleration space of the nozzle in a direction perpendicular to the axial direction of the nozzle has a rectangular shape, and its short side is 0.3 to 5 mm and its long side is 10 to 1000 mm. The method for spraying a powdery substance according to claim 5. 7. A direction in which the solid-gas two-phase flow is divided into two parts in a region of substantially the entire length of the acceleration space of the nozzle in the axial direction, and is inclined at 5 to 40 degrees with respect to a direction perpendicular to the processing surface of the workpiece. 3. The method according to claim 2, wherein the powder is sprayed onto the surface. 8. The method according to claim 1, wherein a groove is formed on the surface of the workpiece, and a direction of inclination of the solid-gas two-phase flow which is divided and injected is substantially perpendicular to a length direction of the processing groove. The method for spraying a powdery substance according to claim 1. 9. The method according to claim 1, wherein the granular material is an abrasive having a size of # 240 to # 6000.
3. The method for spraying powdery and granular materials according to item 1. 10. A powder and particle material jet processing apparatus in which a powder and a particle are jetted from a nozzle as a gas-solid two-phase flow together with a gas to a workpiece to process the workpiece, wherein the nozzle comprises: A dispersion chamber for dispersing the solid-gas two-phase flow,
A focusing chamber for converging the solid-gas two-phase flow in a substantially linear cross section; and an accelerating chamber for accelerating the condensed solid-gas two-phase flow, and a cross-sectional shape perpendicular to the axial direction of the accelerating chamber. Has a rectangular shape, the long side of which has a length of at least 10 times the short side, and the axial dimension of the acceleration chamber has a length of at least 20 times the short side, and the axis of the acceleration chamber The acceleration / acceleration chamber is divided into two parts over substantially the entire length in the direction, and is inclined with respect to the axial direction of the nozzle. 11. A cross-sectional shape of the acceleration chamber in a direction perpendicular to the axial direction is rectangular, the short side of which is 0.3 to 5 mm,
The powdery and granular material jet processing apparatus according to claim 10, wherein the long side is 10 to 1000 mm. 12. The inclination angle of the acceleration chamber with respect to the axial direction is 5
The powder and granule spraying apparatus according to claim 10, wherein the angle is from 40 to 40 degrees. 13. The powder and granular material injection according to claim 10, wherein the nozzle comprises a metal housing and a metal or ceramic nozzle tip, and is integrally joined via a sealing member. Processing equipment.