JP2000280112A - Accurate machining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To aim at the machining with high cylindricity and high straightness by preventing the relative movement between the center axis of the relative rotation and a machining point. SOLUTION: Since output of a displacement sensor 24 and driven quantity of a piezoelectric element or a magneto strictive element 22 form a closed loop, rotation accuracy of a shaft B can be controlled by the resolution of the displacement sensor 24. Since the piezoelectric element or the magneto strictive element 22 is used for drive, high-speed response is possible and high rigidity can be secured. Correction by this mechanism has the fine resolution for each second. Even if a work 1 and a tool 5 are relatively moved during the machining, relative movement between a machining point and the center of rotation of the shaft B is prevented during that time. The shaft B is arranged so as to be synchronously moved with the movement of the tool 5. Two of the piezoelectric element and the magneto strictive element 22 are arranged so as to provide the high responsiveness independently of the driving direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-precision machining apparatus for obtaining a high-precision shape accuracy such as squareness, straightness, cylindricity, flatness and the like in a short time, and is particularly used for a scroll compressor. In the side processing of the scroll spiral body
The present invention relates to a processing apparatus provided with means for correcting tool deflection or the like caused by cutting resistance or grinding resistance.

[0002] Further, the present invention relates to an internal grinding apparatus provided with a means for compensating for a tool deflection or the like which similarly occurs in the internal grinding of a long hole, particularly where high precision cylindricity and straightness are required.

[0003]

2. Description of the Related Art A scroll scroll having an outline shown in FIG. 2 used in a scroll compressor is manufactured by a method using a machining center. The mainstream has been shifted to a method of processing by, for example, Japanese Patent Publication No. 6-028812 and Japanese Patent Publication No. 2-41.
No. 847 and the like disclose the contents.

On the other hand, when grinding the inner surface of a long hole work, the work is rotated by a work rotating shaft of a grinding machine, and a grindstone rotated at a high speed through a grindstone shaft and a spindle rotor is used to grind the work inside diameter. The inner surface is ground by cutting in the radial direction and traversing in the direction of the grindstone rotation axis.

[0005]

When a side surface (wall surface) of a scroll scroll used in a scroll compressor is machined, a machining system using a machining center or a machining system based on simultaneous two-axis control of work rotation and tool linear movement is used. In any case, since the tool is in a cantilever state, it receives a cutting resistance or a grinding resistance in a radial direction and bends. As a result, the machined side that has been cut or ground deviates from the expected involute shape, and the perpendicularity of the scroll scroll to the base plate deteriorates. Further, not only the tool but also the scroll scroll itself of the work itself is bent by the cutting or grinding resistance, so that there is a problem that the processing accuracy is deteriorated.

[0006] In order to solve such a problem, the present applicant has previously disclosed in Japanese Patent Laid-Open Publication No. 5-57518.
It discloses that the amount of deformation at the cutting point is determined in advance, and the shape of the tool cutting edge is shaped so that the envelope of the cutting edge cancels the amount of tool deformation.

However, since the shape of the scroll scroll has a different radius of curvature of the workpiece at each point, the bending of the tool and the bending of the workpiece when processing the side surface of the scroll are different at each processing point. Regarding the deformation of the work, it is difficult to deform because the radius of curvature is small and the work rigidity is high at the center portion, but the work is easily deformed at the outer peripheral portion because the radius of curvature is large and the work rigidity is reduced. On the other hand, when looking at the deformation of the tool, the situation is different depending on whether the inward surface (the surface facing the center of the spiral) of the spiral body is machined or the outward surface (the opposite surface).

That is, the radius of curvature is small on the inward surface of the center portion of the scroll scroll, so that the contact length with the tool is long and the machining resistance is large, so that the tool bends greatly, and the radius of curvature increases toward the inward surface of the outer peripheral portion. Is large and the contact length is short, so that the amount of deflection is reduced. Since the contact length is further reduced in the case of the outer surface machining of the spiral body, the machining resistance is smaller and the tool deformation is smaller. As described above, the ideal tool shape changes depending on the processing point of the scroll scroll.

If the purpose is only to improve the processing accuracy,
Countermeasures such as lowering the feed speed of the processing or controlling the work rotation speed to be slower as the contact length becomes longer as described in Japanese Patent Application Laid-Open No. 2-41846 are conceivable. However, these measures cannot be expected to increase the speed, resulting in a decrease in work efficiency.

Further, as described in Japanese Patent Laid-Open Publication No. Hei 8-318418, a cam and a cam follower are provided,
There is a method of rotating the spindle cage by operating the cam by the driving force of the servo motor to deform the flexible trunnion, but the trunnion has a low rigidity and is not suitable for high-speed machining.

On the other hand, in the case of the inner surface grinding of a long hole, since the grinding wheel shaft is very long, the inner surface shape of the long hole has a tapered shape with a smaller diameter toward the back, and there is a problem that the cylindricity and straightness are reduced. . In order to solve this problem, there is a method in which the grindstone shaft or the work shaft is intentionally tilted by the amount of the tool deflection (for example, disclosed in Japanese Patent Application Laid-Open Nos. 61-252064 and 62-166555). However, the responsiveness and resolution of varying the angle of the spindle main shaft during traverse are poor. Further, there is a method of inclining the spindle rotor shaft using a magnetic bearing disclosed in Japanese Patent Laid-Open Publication No. Hei 1-240267, but there is a disadvantage that the cost is extremely high.

[0012]

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and the means for solving the problems are as follows. That is, the present invention according to claim 1 is a processing apparatus for processing an inner surface of a workpiece, wherein a Z axis in a depth direction of the inner wall of the workpiece, an X axis in a feed direction of the tool orthogonal to the Z axis, Regarding a total of four axes, a Y axis orthogonal to the Z axis and the X axis and a work axis C axis parallel to the Z axis, the work and the tool are at least the X axis and the Z axis.
It is possible to perform relative movement in two axis directions with respect to the axis, to perform simultaneous control of the relative movement with respect to at least two axes, and to correct a processing error accompanying a change in processing conditions.
The relative rotation between the work spindle rotation axis and the spindle main axis rotation axis is possible at a resolution down to the second (angle) unit, and the center axis of the relative rotation is:
It is characterized in that there is no relative movement between the work and the tool during the relative movement between the work and the tool.

According to a second aspect of the present invention, in the processing apparatus, the relative rotation between the workpiece and the spindle main shaft rotation axis for correcting the processing error is parallel to the A axis parallel to the X axis and the Y axis. It is characterized by relative rotation about two axes with respect to the basic B axis.

According to a third aspect of the present invention, in the processing apparatus, one of the relative rotations about the two axes of the A axis and the B axis is driven on the work side, and the other is on the other side. The relative rotation of the shaft is characterized in that the spindle main shaft side is driven.

According to a fourth aspect of the present invention, there is provided a processing apparatus for processing a scroll spiral, wherein a Z-axis in a groove depth direction of the spiral and a feed direction X of a tool orthogonal to the Z-axis.
Axis and a Y axis orthogonal to the Z axis and the X axis, the workpiece and the tool are at least the X axis and the Z axis.
Relative movement with respect to the axis, the relative movement in the X axis direction and the C axis (axis parallel to the Z axis) which is the axis of the work
The rotation of the workpiece spindle and the rotation of the workpiece spindle can be controlled simultaneously at a resolution of up to the second (angle) unit in order to correct a processing error accompanying a change in processing conditions. Relative rotation between the spindle main shaft rotation axis is possible, and the B-axis (axis parallel to the Y-axis), which is the center of the relative rotation, is set to the processing point even when the relative movement between the workpiece and the tool is performed. The feature is that there is no relative movement between.

According to a fifth aspect of the present invention, a workpiece is traversed in the Z-axis direction, which is the axis of the cylinder of the workpiece, and fed in the X-axis direction, which is orthogonal to the axis and is the radial direction of the cylinder. In a processing machine that performs internal grinding, it is finely divided into seconds (angles) to correct processing errors due to changes in processing conditions.
With a resolution down to the unit, relative rotation between the work spindle rotation axis and the spindle main shaft rotation axis is possible, and the B axis, which is the center of the relative rotation, is the relative rotation between the work and the tool during machining. It is characterized in that there is no relative movement with the processing point when moving.

According to a sixth aspect of the present invention, there is provided a processing apparatus, wherein the headstock is provided between a headstock for fixing a spindle main shaft and a base plate supporting the headstock. A rotation guide portion rotatably supported; an actuator for applying a rotational driving force to a headstock supported by the rotation guide portion; a sensor for monitoring a rotation amount around the B-axis; and a reference value for the rotation amount. It has a data bank, and a feedback circuit for controlling the rotation amount based on data included in the data bank.

According to a seventh aspect of the present invention, there is provided the processing apparatus according to the present invention, wherein the actuator for applying a rotational driving force to the spindle headstock includes a piezoelectric element, a magnetostrictive element, a feed screw mechanism driven by motor rotation, or a motor rotation. Each is characterized by a cam mechanism for driving.

According to a tenth aspect of the present invention, in the processing apparatus according to the present invention, the data bank including the reference value of the rotation amount includes a processing error correction amount at each processing position, that is, a rotation amount about the B axis, and each processing amount. The amount of rotation around the B-axis at the elapsed time after the start, the amount of tool deformation with respect to the motor current of the spindle main shaft and the corresponding amount of rotation around the B-axis, the amount of tool deformation with respect to the torsion angle of the tool or spindle main shaft rotation shaft, and the corresponding amount. Includes either the amount of rotation around the B-axis or the amount of tool deformation relative to the power of the spindle main shaft and the corresponding amount of rotation around the B-axis, and compares these data with the corresponding in-process input data. By doing so, the relative rotation amount between the work spindle rotation shaft and the spindle main shaft rotation shaft is controlled.

A processing apparatus according to the present invention according to the present invention, wherein a workpiece processed based on a comparison operation with data included in the data bank is measured at a predetermined frequency, and the data bank is measured based on the measurement result. Is sequentially updated.

According to a sixteenth aspect of the present invention, when compensating the tool deflection due to the machining resistance, in addition to the relative rotation of the work spindle rotation axis and the spindle main axis rotation axis around the B axis, It is characterized by further comprising means for correcting an error in the X-axis direction due to a deviation between the B-axis rotation center and the spindle main shaft.

According to a seventeenth aspect of the present invention, in the processing apparatus, the center axis of the B-axis rotation in the relative rotation between the work spindle rotation axis and the spindle main shaft rotation is on or off the processing point group or from the processing point group. It is characterized by being arranged offset within a radius.

In the processing apparatus according to the present invention, the transmission direction of the rotational driving force in the relative rotation of the work spindle rotation axis and the spindle main shaft rotation axis around the B axis is a B-axis center circle. Tangential direction.

A machining apparatus according to the present invention as set forth in claim 19, wherein the mechanism for driving and controlling the relative rotation about the B axis between the work spindle rotation axis and the spindle main shaft rotation axis includes a work spindle. The work spindle rotating shaft is rotated about the B axis with respect to the spindle main shaft rotating shaft.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, an outline of a scroll machine and a scroll spiral body will be described with reference to the drawings. FIG. 1 is a perspective view showing a general scroll machine for processing a scroll scroll. Reference numeral 1 denotes a work, which is held by a work spindle 2 so as to be rotatable about the C axis in the figure. The work spindle 2 is provided on a work spindle base 3 and is capable of moving in the Y-axis direction in the drawing by a base circle having a scroll / involute shape. Work 1
A tool 5 is opposed to the front surface of the device, and a spindle 6 for holding the tool 5 is fixed to a slide table 7. In this figure, a three-axis processing device is shown. The slide table 7 has a Z-axis table 8 attached to the pedestal and capable of moving in the scroll groove depth direction, that is, the Z-axis direction in the figure, and further has a Z-axis table 8 mounted on the base in the X-axis direction in the figure. It is mounted on an X-axis table 9 that enables movement. Therefore, in conjunction with the movement of the work spindle 2 in the Y-axis direction, relative movement between the work 1 and the tool 5 in the mutually orthogonal X-axis, Y-axis, and Z-axis directions is possible. At the time of machining, the tool 5 and the spindle main shaft 6 advance in the Z-axis direction to the depth of the scroll groove with the rotation, and X synchronized with the rotation of the C-axis of the work spindle 2 is rotated.
The side surface of the scroll scroll is machined by the axial feed movement.

Next, FIG. 2 shows the scroll scroll 10
FIG. The scroll scroll 10 generally has an involute shape, and has an inward surface 12 and an outward surface 1.
And 4. The involute shape is formed by cutting or grinding the tool 5 while linearly moving in the direction of arrow 15 on the tangent to the base circle of the involute curve, and rotating the work 10 in the direction of arrow 16 synchronized with the linear movement. Done.

As can be seen from the scroll shape shown in FIG. 2, while the tool 5 moves from the inner circumference to the outer circumference in synchronization with the rotation of the work 10, the radius of curvature at each point gradually increases. go. FIG. 3 shows this in a graph, and the relationship is indicated by a straight line in the graph. In this graph, the dotted line indicates the work 1
The contact length between 0 and the tool 5. As is clear from the above, the contact length becomes longer as the position is closer to the inner peripheral portion of the scroll and the radius of curvature is smaller, and the machining resistance is accordingly increased. As shown in FIG. 1, since the processing method supports the tool in a cantilever manner, in a conventional processing method, the fluctuation of the processing resistance greatly affects the processing accuracy.

FIG. 4 is a model drawing of this, and shows the condition of the work 10, the spindle 6 and the tool 5 viewed from the Y-axis direction. FIG. 1A shows a processing state in the conventional method. Since the spindle 6 is parallel to the rotation axis C of the work 10, the tool 5 is bent by the processing resistance. In addition, the deflection is larger at the center (the lower side in the figure) of the work having a small radius of curvature of the scroll. As a result, the side surface of the scroll scroll 10 has a perpendicularity and a reduced involute shape, and the wall thickness of the scroll becomes non-uniform as shown in the figure. On the other hand, in the present invention, as shown in (B), by controlling the relative angle between the spindle main shaft 6 and the work 10 in accordance with the fluctuation of the processing load, the deformation amount of the tool is corrected, and as a result, the scrolling is performed. This is to enable the right angle and the involute shape of both sides of the spiral part to be formed into a desired shape.

Hereinafter, embodiments of the processing apparatus according to the present invention will be described with reference to the drawings. 5 to 7 show:
1 shows a first embodiment of a machining apparatus according to the present invention, which is applied to the scroll machining apparatus as described above. In FIG. 5, reference numeral 1 denotes a work, which is fixed to a work spindle (not shown) and is rotatable about an axis C in the figure. Reference numeral 5 denotes a tool, and a spindle spindle 6 for rotating the tool 5 is attached to a spindle headstock 17.
At the time of machining, the tool 5 which is rotated by the drive of the spindle main shaft 6 advances in the Z-axis direction in the figure to come into contact with the work 1, and after reaching the scroll groove depth, the work 5 in the X-axis direction in synchronization with the C-axis rotation. The side surface of the scroll scroll is worked by relative movement with the tool 5.

In such a processing machine, the aforementioned tool 5
The means for giving a correction corresponding to the machining resistance is to rotate the spindle headstock 17 equipped with the spindle spindle 3 by a predetermined angle about the B axis in FIG. The tool 5 is sent to the work 1 so as to correct the deflection of the tool 5 due to the resistance. The mechanism defines a rotation direction by a rail-shaped rotation guide portion 20 formed on a circle centered on the B axis, and is driven to rotate by a piezoelectric element or a magnetostrictive element 22 mounted on the spindle headstock 17. It is. The amount of rotation about the B axis is monitored by a displacement sensor 24, via an A / D conversion circuit 25, a difference from a target position input in advance by a personal computer 26 is calculated, and a drive signal is output, and D / A conversion is performed. Circuit 27
Then, the voltage is applied to the piezoelectric element or the magnetostrictive element 22 by the amplifier 28 for driving the piezoelectric element or the magnetostrictive element, and a voltage is applied to the piezoelectric element or the magnetostrictive element 22.

At this time, since the output of the displacement sensor 24 and the driving amount of the piezoelectric element or the magnetostrictive element 22 form a closed loop circuit, the rotation accuracy of the B axis can be controlled by the resolution of the displacement sensor 24. In addition, since driving is performed using the piezoelectric element or the magnetostrictive element 22, high-speed response is possible and high rigidity can be secured. The correction by this mechanism has a resolution down to the second (angular second). The work 1 and the tool 5 move relative to each other during the processing, but the relative movement does not occur between the processing point and the B-axis rotation center even during the processing. Specifically, in the present embodiment, the B axis is also arranged to move in synchronization with the movement of the tool 5.

As shown in FIG. 5, in the present embodiment, two piezoelectric elements or magnetostrictive elements 22 are provided to obtain high responsiveness regardless of the driving direction. FIG. 6 shows a side view and FIG. 7 shows a rear view of the present embodiment. In FIG. 6, the rotation guide portion 20 is used as a method for defining the rotation direction.
And the case where the rotation center pin 21 is used together, is shown, but the rotation center pin 21 is not always necessary as long as the rotation about the B axis is restricted by the rotation guide unit 20. Conversely, if the rotation center pin 21 is provided, the rotation guide unit 20 does not necessarily need a mechanism for restricting rotation, and may simply support the spindle headstock 6 so as to be rotatable. In this specification, the rotation guide unit 2
0 shall include both cases. According to the present embodiment, for example, by using a processing machine as shown in FIG. 1 as a base machine and attaching the above-described mechanism that enables rotation about the B axis to the slide table, a highly accurate squareness and straightness can be obtained. It is possible to obtain a processing machine that realizes shape accuracy such as degree, roundness, and flatness.

FIGS. 8 to 10 show a processing apparatus according to a second embodiment of the present invention. In FIG. 8, 1
Denotes a work 5 and a tool, and a spindle 6 for rotating the tool 5 is mounted on a spindle headstock 17.
As a structure for rotating the spindle headstock 17 with respect to the base plate 18 about the B axis, the rotation direction is defined by a rotation guide unit 20, and a feed screw 31 and a motor 32 apply a rotational driving force. Since the rotation amount is very small, a linear drive feed screw 31 can be used. The amount of rotation about the B axis is monitored by the displacement sensor 24, and the difference from the target displacement stored in the database 30 is calculated by the personal computer 26 via the A / D conversion circuit 25, and a drive signal is output. The signal is amplified by an amplifier 28 via an A conversion circuit 27 and a rotation amount signal of a feed screw 31 is applied to a motor 32.

Since the output of the displacement sensor 24 and the rotation amount of the motor 32 form a closed loop circuit, the displacement sensor 2
The resolution of 4 can control the rotation accuracy of the B axis. In addition, when the rotation amount of the feed screw 31 is controlled by the DC servo motor 32, a high-speed response is possible and the rigidity is increased. The correction by this mechanism has a resolution down to the second (angle) unit. The workpiece 1 and the tool 5 move relative to each other during machining, but there is no relative movement between the machining point and the B-axis rotation center during the machining.

Thus, in accordance with the fluctuation of the processing load,
By controlling the rotational position of the spindle 3, the amount of deformation of the tool can be corrected, so that shapes such as scrolls having different processing resistances at processing points can be processed with high accuracy. By attaching a mechanism that enables such rotation about the B axis to the slide table using, for example, a general scroll machine shown in FIG. 1 as a base machine, highly accurate squareness, straightness, and roundness can be obtained. It is possible to obtain a processing machine realizing shape accuracy such as flatness. FIG. 9 is a side view of the present embodiment, and FIG.
Shown in the figure. In this embodiment, the control speed for driving is slower than that of the first embodiment, but the range of the rotation angle for correction control can be widened.

FIGS. 11 to 13 show a processing apparatus according to a third embodiment of the present invention. The same components as those in the previous embodiment are denoted by the same reference numerals, and description thereof will be omitted. In the present embodiment, in FIG. 11, as a structure for rotating around the B axis, the rotation direction is defined by the rotation guide unit 20, and the cam 36 transmits the force to the actuator 37 by the rotation drive by the motor 32. The rotation about the B axis is performed. At this time, a reaction element 38 such as a spring is disposed on the opposite side of the cam 36, and by appropriately adjusting the cam 36 on the side transmitting the force with the reaction element 38, it is possible to apply a preload to the operation element 37. As a result, the rotation around the B axis becomes smooth.

If the rotational position of the cam 36 is controlled by the DC servomotor by performing the monitoring by the sensor and the precision control based on the calculation by the personal computer in the same manner, a high-speed response is possible. High rigidity. The correction by this mechanism is also detailed in seconds (angle)
Has resolution down to the unit. The workpiece 1 and the tool 5 move relative to each other during machining, but there is no relative movement between the machining point and the B-axis rotation center during the machining. The same applies to a case where such a mechanism is attached to a scroll processing machine, and a processing machine that realizes high-precision squareness, straightness, roundness, flatness, and other shape accuracy can be obtained. FIG. 12 is a side view of the present embodiment, and FIG.
It is shown in FIG. This embodiment has a slower control speed for driving than the first embodiment, but has an advantage in that the mechanism for correction control can be made compact and inexpensive.

Next, a fourth embodiment according to the present invention will be described with reference to FIG. In this embodiment, FIG.
In a processing apparatus equipped with a mechanism that enables rotation about the B-axis shown in FIG. 13, a rotation amount about the B-axis is calculated based on an X coordinate value signal from the processing machine body.

The X-coordinate signal 41 from the machine body and the signal 42 from the displacement sensor are input to the comparison operation section inside the personal computer. In the comparison calculation unit, first, the rotation amount of the center of the B axis based on the involute curve processing position of the scroll spiral body is calculated by:
Data bank 44 and X coordinate 43 stored in advance
In step 45, the current rotational position about the B axis is calculated. Next, in step 46, the current displacement amount of the displacement sensor is calculated using a conversion coefficient determined from the B-axis rotation center and the installation position of the displacement sensor.

Next, at step 47, the calculated displacement amount is compared with the output signal 42 from the displacement sensor, and at step 48, a drive output based on the deviation is calculated, and a piezoelectric element, a magnetostrictive element, The data is input to an actuator 49 such as a motor for driving a screw or a cam. The actuator 49 is driven by this input signal, and the spindle main shaft rotates around the B axis, and the rotation changes the output signal 42 of the displacement sensor. The output signal 42 of the displacement sensor after the change and the X coordinate signal 41 are recalculated, and the drive output 48 is corrected. This is controlled in real time until machining is completed.

Next, a fifth embodiment according to the present invention will be described with reference to FIG. In the present embodiment, in a scroll machining apparatus equipped with a mechanism for enabling rotation about the B axis shown in FIGS. 5 to 13, the rotation amount about the B axis is determined based on a start signal from the machine body. It is a method of calculating.

The start signal 51 from the machine body and the signal 42 from the displacement sensor are input to the comparison operation section inside the personal computer. In the comparison operation unit, first, B based on the involute curve machining position of the scroll spiral body using time as a variable
The amount of rotation about the axis center is stored in a data bank 53 in advance, and a processing condition parameter 54 is added to the stored data bank 53 and an internal timer 52 starting from a start signal 51 of the machine body. Of B
Calculate the shaft rotation position. Next, using a conversion coefficient determined from the B-axis rotation center and the installation position of the displacement sensor, step 5 is performed.
In step 6, the current displacement amount of the displacement sensor is calculated.

Next, at step 57, the calculated displacement amount is compared with the output signal 42 from the displacement sensor, and at step 58, a drive output based on the deviation is calculated and input to an actuator 49 such as a piezoelectric element. I do. The actuator 49 is driven by this input signal, and the spindle
It rotates around the axis, and the rotation changes the output signal 42 of the displacement sensor. Output signal 4 of the displacement sensor after the change
2 and the elapsed time of the internal timer 52.
8 is corrected. This is controlled in real time until machining is completed.

Next, a sixth embodiment according to the present invention will be described with reference to FIG. In this embodiment, FIG.
In the scroll machining apparatus equipped with a mechanism that enables the rotation of the B-axis shown in FIG. 13, the amount of rotation about the B-axis is calculated from the motor current of the spindle 6.

The current flowing through the motor 61 of the spindle main shaft is monitored by an ammeter or the like, and the current value 62 is taken into the personal computer in real time. The motor current value 62 and the signal 42 from the displacement sensor are
Is entered. In the comparison calculation unit, first, the processing load for the motor current value is stored as a data bank, and the tool deformation calculated from the processing load is further stored as a B-axis rotation amount in the data bank. At step 65, the current B-axis rotational position is calculated from the stored data bank 63 and the motor current 62 measured by an ammeter or the like. Next, in step 66, the current displacement amount of the displacement sensor is calculated using a conversion coefficient determined from the B-axis rotation center and the installation position of the displacement sensor.

Next, in step 67, the calculated displacement amount is compared with the output signal 42 from the displacement sensor, and in step 68, a drive output is calculated based on the deviation, and the drive output is input to an actuator 49 such as a piezoelectric element. I do. The actuator 49 is driven by this input signal, and the spindle
It rotates around the axis, and the rotation changes the output signal 42 of the displacement sensor. Output signal 4 of the displacement sensor after the change
Recalculate with 2 and monitor current to correct the drive output. This is controlled in real time until machining is completed.

Next, a seventh embodiment according to the present invention will be described with reference to FIG. In this embodiment, FIG.
In the scroll machining apparatus equipped with a mechanism for enabling the rotation of the B-axis shown in FIG. 13, the amount of rotation about the B-axis is calculated from the torsion angle of the rotation axis of the tool 5 or the spindle 6 of the spindle.

The torsion angle of the rotation axis of the tool or the spindle of the spindle is monitored by a torque sensor 71 such as a photoelasticity measuring method using laser light, and the torsion angle 72 is taken into the personal computer in real time. The torsion angle 72 and the signal 42 from the displacement sensor are input to a comparison operation unit inside the personal computer. In the comparison calculation unit, first, the processing load for the torsion angle is stored as a data bank, and the tool deformation calculated from the processing load is further stored as a B-axis rotation amount in the data bank. From the stored data bank 73 and the torsion angle 72 measured by the torque sensor 71 or the like, the current rotational position of the center of the B axis is calculated in step 75. Next, in step 76, the current displacement amount of the displacement sensor is calculated using a conversion coefficient determined from the B-axis rotation center and the installation position of the displacement sensor.

Next, in step 77, the calculated displacement amount is compared with the output signal 42 from the displacement sensor, and in step 78, a drive output based on the deviation is calculated and input to an actuator 49 such as a piezoelectric element. . The actuator 49 is driven by this input signal, and the spindle main shaft rotates about the B axis.
2 changes. The output signal 42 of the displacement sensor after the change
And the torsion angle are recalculated to correct the drive output. this,
Control is performed in real time until the end of machining.

Next, an eighth embodiment according to the present invention will be described with reference to FIG. This embodiment employs a method of calculating the rotation amount of the center of the B axis from the cutting / grinding power during machining in a scroll machining apparatus equipped with a mechanism for enabling the rotation of the B axis shown in FIGS. is there.

The cutting / grinding power during machining is monitored by a dynamometer 81 with a built-in piezoelectric element provided below the spindle headstock.
The processing power, that is, the processing resistance 82 is taken into the personal computer in real time. The processing resistor 82 and the signal 42 from the displacement sensor are input to a comparison operation unit inside the personal computer. In the comparison operation unit, first, the amount of tool deformation with respect to the machining resistance and the amount of rotation about the B axis are stored in a data bank. From the stored data bank 83 and the machining resistance 82 measured by the dynamometer 81 and the like, the current rotational position of the center of the B axis is calculated in step 85. Next, in step 86, the current displacement amount of the displacement sensor is calculated using a conversion coefficient determined from the B-axis rotation center and the installation position of the displacement sensor.

Next, at step 87, the calculated displacement amount is compared with the output signal 42 from the displacement sensor, and at step 88, a drive output is calculated based on the deviation and input to the actuator 49 such as a piezoelectric element. . The actuator 49 is driven by this input signal, and the spindle main shaft rotates about the B axis.
2 changes. The output signal 42 of the displacement sensor after the change
And recalculate with the machining resistance to correct the drive output. this,
Control is performed in real time until the end of machining.

A ninth embodiment according to the present invention will be described with reference to FIG. This embodiment is shown in FIG.
4 to 18 (fifth to eighth embodiments) for calculating the amount of rotation about the B-axis,
In order to reduce the influence of the instability factor of machining accuracy due to tool wear and variation in machining performance of the tool, the data bank is updated according to the flow shown in the figure.

In the drawing, after the scroll shape machining in step 91 is performed in a state in which the rotation amount of the spindle main shaft around the B axis is controlled, in step 92, the straightness of the determined portion of the scroll side wall is measured. In the next step 93, the measurement result is compared with the previous measurement result,
If there is a change equal to or greater than the specified value between the two, in step 94, the data bank registered in the comparison operation unit is updated. If the change is equal to or less than the specified value, the process returns to step 91 and the processing based on the conventional data bank is continued.

As a method of updating, for example, the rotation amount of the spindle main shaft with respect to various reference signals is multiplied by a correction coefficient by using the measurement data immediately after machining to correct the rotation amount of the B axis. When the data bank has been updated, the process returns to step 91 using the updated data bank, and the processing is performed again. Updating of the data bank by this feedback needs to be performed continuously when processing stability is poor, and may be extracted when processing stability is good.

The relative rotation about the B axis between the work spindle rotation axis and the tool spindle rotation axis described in the fourth to ninth embodiments is controlled in-process. However, control by a post process is also possible.

Next, a tenth embodiment according to the present invention will be described with reference to FIG. In the scroll machining apparatus equipped with the mechanism that enables rotation about the B-axis shown in the first to ninth embodiments, the deviation of the B-axis rotation center deteriorates the shape accuracy of the involute shape. In order to prevent this, it is necessary to appropriately arrange the B-axis rotation center.

FIG. 20 shows a state in which the tool 5 driven by the spindle 6 is processing the work 1 while being fed in the X-axis direction along the processing point group AA line, as viewed from the Y-axis direction. It is. In the figure, when the rotation center 23 is determined by the rotation center pin 21, the rotation center 23 is outside the tool shown in FIG. In this case, there are three cases, that is, in the case of the tool (c). If the deflection due to the machining resistance that degrades the squareness is only the tool 5 in principle, that is, if the other rigidity is sufficiently larger than the rigidity of the tool 5, the deflection of the machining point group AA in FIG. If the rotation center 25 is arranged, the shape accuracy of the involute curve does not deteriorate. However, if the rigidity of the spindle main shaft 6 and the rigidity of the work 1 are not sufficiently large as compared with the rigidity of the tool 5, the ideal rotation center 2
The position of 3 is slightly shifted from above the processing point group AA. It is sufficient that the amount of deviation is at most the tool radius in consideration of the machining accuracy to be obtained.

Even when the ideal rotation center position is known, the actual rotation center pin 21 may be misaligned. Therefore, in the rotation about the B-axis, only the squareness between the rotation center pin 21 and the spindle table 17 is made highly accurate, and the deviation in the X-axis direction due to the rotation center deviation at that time is N
It is possible to cancel the correction by shifting the deviation in the X-axis direction into the processing program of the C processing machine in advance. As a result, a highly accurate involute shape can be obtained, and also a highly accurate squareness can be obtained.

Assuming that the displacement in the X-axis direction is corrected by a machining program or the like, in principle, the rotational center 23 of the B-axis may be located anywhere within the maximum displacement of the tool radius as described above. Even if it exists, it can be corrected, and it is possible to achieve high accuracy, which is a problem.

Next, an eleventh embodiment according to the present invention will be described with reference to FIG. The present embodiment relates to a drive transmitting means for providing the B-axis rotation in a scroll machining apparatus equipped with a mechanism for enabling the B-axis rotation shown in FIGS. In the figure, in order to rotate the spindle main shaft 6 around the B axis, it is necessary to apply a driving force in the rotation direction. In order to transmit the driving force efficiently, an operation plate 95 attached to the spindle headstock 17 is arranged on the radial shaft 96, and a linear actuator 97 such as a piezoelectric element is rotated perpendicular to the radial shaft 96. Are arranged tangentially to. With this arrangement, the driving force acts in the tangential direction of the B-axis rotation, so that the B-axis can be rotated efficiently. Other rotation structures and feedback methods are the same as those of the other embodiments. As described above, when the rotation range is the pivot motion, the configuration can be made cheaper and more compact than when a rotary actuator is used.

Next, a description will be given of a twelfth embodiment in which the machining axis angle correcting mechanism according to the present invention is applied to an internal grinding machine. FIG. 22 is a perspective view of a general internal grinding machine. Work spindle 1 for rotating work 101
02, an X-axis table 103 movable in the X-axis direction for cutting in the radial direction of the workpiece inner diameter, a spindle main shaft 106 for rotating the tool 105, and a Z-axis table 107 for traversing in the axial direction of the workpiece inner diameter, that is, the Z-axis direction. It has. The operation is such that the workpiece 101 and the tool 105 are rotated, and the X-axis table 103 feeds the workpiece 101 in the radial direction (X-axis direction) while the Z-axis table is used to move the tool 105 in the axial direction (Z-axis ) To perform processing.

When a long hole workpiece 101 as shown in FIG. 23 is machined by using such a machining apparatus, the inner diameter becomes smaller as the tool 105 goes deeper by traversing in the Z-axis direction, and the cylindricity becomes smaller. A phenomenon is observed in which the inner diameter of the work after processing deteriorates and becomes tapered. In order to deal with this, the grinding machine shown in FIG.
The mechanism for enabling the B-axis rotation as shown in FIG.
By mounting on the table 107 and mounting a method of correcting and controlling the rotation amount around the B-axis shown in FIGS. 14 to 19 by in-process or post-process, high-precision squareness, straightness, roundness, It is possible to obtain a grinding device that realizes shape accuracy such as cylindricity.

Further, the cylindricity and straightness of the long hole are deteriorated due to the shift of the B-axis rotation center. To prevent this, B
It is necessary to arrange the center of rotation of the shaft appropriately. This is the first
The rotation center position may be arranged on the processing point group or in the vicinity thereof as in the embodiment of FIG. Even if the center of rotation is shifted, if the base machine can be machined by the two-axis control of the X axis and the Z axis, the shift in the X axis direction can be corrected by the machining program. As a result, high precision roundness,
Straightness and cylindricity are obtained.

Also, in a grinding machine equipped with a mechanism for enabling B-axis rotation, the drive transmission direction for providing the B-axis rotation is set to the tangential direction of B-axis rotation as in the eleventh embodiment. , The driving force can be transmitted efficiently.

Next, a thirteenth embodiment according to the present invention will be described with reference to FIG. In the embodiments described above, the relative rotation about the B axis rotates the spindle main shaft rotation axis with respect to the work spindle rotation axis. In the present embodiment, on the contrary, the work spindle rotating shaft side is rotated.

As described above, the center of the relative rotation B axis is
It is located on the machining point group or at a position offset by at most the tool radius from the machining point group, and there should be no relative movement between the B axis and the machining point during machining. In the above embodiments of the scroll spiral processing, the feed in the X-axis direction is performed by the movement of the spindle main shaft side provided with a tool. Therefore, a mechanism for rotating the B-axis is provided on the same spindle headstock. Relative movement was avoided.

In the present embodiment, a mechanism for performing the feed movement in the X-axis direction is provided on the work table side, so that the relative movement between the B-axis and the processing point can be maintained even when the work side is rotated about the B-axis. Can be avoided. FIG. 24 shows the mechanism. The work table 3 shown in FIG.
At this time, the work table 3 is attached to the work base 12
1 is supported so as to be movable in the X-axis direction (a direction perpendicular to the drawing). By this movement, feed in the X-axis direction necessary for processing is performed. The work pedestal 121 has a base plate 123 supporting the work pedestal 121 thereunder.
A rotation guide unit 20 rotatably supported about the center of the B axis similar to that described in the previous embodiment is provided, and the work pedestal 121 is rotatable by an amount necessary for correction. With this configuration, even when the workpiece and the tool relatively move in the X-axis direction due to the progress of the processing, the relative movement between the B-axis at the center of the relative rotation and the processing point can be eliminated. In this case, the drive mechanism and the control mechanism may be exactly the same as those of the previous embodiment that rotates the spindle main shaft side.

The advantage of adopting the configuration as in the present embodiment is that, in particular, in a processing apparatus equipped with a multi-spindle spindle, it is sufficient to rotate a worktable lighter than the spindle spindle. When the rotating mechanism can be miniaturized, and when performing scroll machining, the above-described two-axis control of the rotation of the C-axis (work rotation axis) and the feed in the X-axis direction can be performed on the work table 3 which is the same bed. The point is that accuracy control becomes easy.

In order to apply this principle to the internal grinding apparatus, there is a movement of the processing point in the Z-axis direction which is the axial direction of the cylinder, and it is necessary to avoid the relative movement between this processing point and the B-axis. There is. Therefore, for example, in the case of a grinding apparatus as shown in FIG. 22, the relative movement can be avoided by further moving the feed mechanism in the Z-axis direction from the spindle headstock 107 side to the work table 103 side. Become.

Next, a fourteenth embodiment according to the present invention will be described. In the scroll machining, the method of rotating the work 1 and moving the tool 5 in the X-axis direction in accordance with the rotation has been described so far to machine the scroll groove. By doing so, the bending directions of the tool 5 and the work 1 are determined in one direction (X-axis direction).
The correction in this direction should have been made about the center of the B axis (the axis parallel to the Y axis). As another scroll machining method, there is a method of forming a scroll groove while rotating the work 1 relatively to the tool 5 in the X-axis and Y-axis directions without rotating the work 1. In this case, since the deflection directions of the tool 5 and the work 1 are also added to the Y-axis direction in addition to the X-axis, in order to correct the deflection, the B-axis (parallel to the Y-axis) is applied between the work 1 and the tool 5. In addition to the relative rotation about the axis), the relative rotation about the A axis (the axis parallel to the X axis) is required.

In order to cope with this, it is possible to solve the problem by providing a mechanism similar to the rotation mechanism, the driving mechanism, and the control mechanism about the B axis described above in addition to the rotation about the A axis. it can. In this case, it is necessary to support the weight of the entire mechanism of the movable portion, but the rotation is regulated by the rotation guide section 20 so that the rotation axis and the processing point do not move relative to each other, and driven by the piezoelectric element 22 and other actuators 49. For example, the above concept can be applied as it is. Further, the structure becomes complicated by the addition of the rotation mechanism about the A axis in addition to the rotation about the B axis. However, for example, as in the above-described embodiment, in addition to the spindle headstock side, the work table side is also provided. This can be mitigated by providing a movable mechanism and sharing either the rotation about the A axis or the B axis on both the work table side and the spindle headstock side.

Although the above embodiment is directed to scroll machining, the concept of relative rotation about two axes can be applied to other machining as it is. The application to the cutting and grinding of a long hole according to the above embodiment is one example, and when the bending direction of the tool and / or the work cannot be determined in one direction, this biaxial relative Accuracy can be improved by applying a correction method by rotation. That is, if a relative rotation mechanism having two axes as centers is provided, it is possible to cope with correction of tool and / or workpiece deflection in all directions. In this case, the control mechanism can be provided for each relative rotation axis as described above, but it is more efficient to adopt a two-axis simultaneous control system in which the control mechanisms are integrated.

Various embodiments of the high-precision processing apparatus according to the present invention have been described so far with reference to the accompanying drawings. However, the present invention is not limited to these embodiments. For example, the tool described in the embodiment can obtain the same effect not only in cutting and grinding, but also in other tools generally used in a processing method in which a reaction force is generated. Further, it goes without saying that the angle correction of the processing axis can be applied not only to the deformation due to the reaction force such as the processing resistance but also to the correction for other factors such as reproducible thermal deformation.

[0075]

In the machining apparatus according to the present invention, the machining resistance acts from one direction of the tool, and the tool deflection direction and the workpiece deflection direction are determined in one direction. It has a simple structure in the uniaxial direction, and the tool deflection and the workpiece deflection can be corrected. In the processing apparatus according to the present invention, this is corrected by the relative rotation between the work spindle rotation axis and the tool spindle main axis rotation axis. By using the processing apparatus provided with such a mechanism according to the present invention, for example, processing with good squareness is performed in scroll spiral processing, and processing with good cylindricity or straightness is performed in the inner surface processing of a long hole. Can be.

When the bending direction of the tool and the work extends in two directions, the same effect can be obtained by correcting the spindle main shaft in two directions.
In addition, performing the correction in two axes can deal with the deflection of the tool and the work in all directions. By compensating one axis of the two-axis correction by driving the work side and correcting the other axis by driving the spindle main shaft, the complexity of the apparatus can be reduced.

In addition, since the B-axis rotation is controlled by in-process or post-process for the variation of the machining load caused by the scroll shape, the workpiece shape angle in the tool axis direction can be arbitrarily controlled. The shape of the workpiece in the tool axis direction can be arbitrarily controlled.

In addition, the shift in the X-axis direction due to the rotation about the B-axis is optimized at the position of the B-axis rotation center or is corrected by a machining program. Deterioration of the shape can be prevented, and a more accurate cylindricity or straightness can be obtained in slotting.

Further, by arranging the driving direction of the rotation about the B axis in the tangential direction of the rotation, the driving force can be transmitted efficiently, and a smooth movement can be performed. Inexpensive.

The rotation about the B axis can be performed not only on the spindle main shaft side but also on the work spindle side, and flexibility such as miniaturization of the rotating mechanism, maintenance / improvement of scroll machining accuracy, and apparatus layout selectivity can be achieved. Can be increased.

[Brief description of the drawings]

FIG. 1 is a perspective view of a general scroll machine according to the related art.

FIG. 2 is a front view showing the general condition of the scroll scroll.

FIG. 3 is a graph showing a relationship between a position of a scroll shape, a radius of curvature, and a contact length.

FIG. 4 is an explanatory diagram comparing processing according to a conventional technique and processing according to the present invention.

FIG. 5 is a plan view showing the processing apparatus according to the embodiment of the present invention.

6 is a side view of the processing apparatus shown in FIG.

FIG. 7 is a rear view of the processing apparatus shown in FIG. 5;

FIG. 8 is a plan view showing a processing apparatus according to another embodiment of the present invention.

FIG. 9 is a side view of the processing apparatus shown in FIG.

FIG. 10 is a rear view of the processing apparatus shown in FIG. 8;

FIG. 11 is a plan view showing a processing apparatus according to another embodiment of the present invention.

FIG. 12 is a side view of the processing apparatus shown in FIG.

FIG. 13 is a rear view of the processing apparatus shown in FIG. 11;

FIG. 14 is a block diagram illustrating a method of calculating a B-axis rotation amount based on an X coordinate value signal.

FIG. 15 is a block diagram showing a method of calculating a B-axis rotation amount from a start signal as a starting point.

FIG. 16 is a block diagram showing a method of calculating a B-axis rotation amount from a motor current.

FIG. 17 is a block diagram illustrating a method of calculating a B-axis rotation amount from a torsion angle.

FIG. 18 is a block diagram showing a method of calculating a B-axis rotation amount from cutting / grinding power.

FIG. 19 is a flowchart of a data bank updating method.

FIG. 20 is a plan view showing a difference in a B-axis rotation center position.

FIG. 21 is a plan view showing an embodiment of an apparatus according to the present invention in which a driving force transmission direction is a tangential direction.

FIG. 22 is a perspective view showing an internal grinding machine according to the prior art.

FIG. 23 is an explanatory diagram showing a relationship between a long hole work and a grindstone in an internal grinding machine.

FIG. 24 is a side view showing a processing apparatus according to another embodiment of the present invention.

[Explanation of symbols]

Reference Signs List 1 work, 2 work spindle, 3 work table, 5 tool, 6 spindle main shaft, 10 scroll spiral body, 17 spindle main shaft, 20 rotation guide section, 21 B axis rotation center pin, 22 piezoelectric element / magnetostrictive element, 23 B axis Center of rotation, 24 displacement sensor, 30 database, 31 feed screw, 32
Motor, 36 cams, 49 actuators,
101 long hole work, 102 work spindle, 1
05 tools, 106 spindle spindle.

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Yoshinori Hirai 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsubishi Electric Corporation F-term (reference) 3C022 AA01 AA07 AA08 AA09 AA10 EE05 EE11 EE12 EE17 GG00 3C043 AB01 AB09 CC03 DD02 EE04

Claims (19)

[Claims] 1. A processing apparatus for processing a workpiece by a relative movement between a held workpiece and a tool which is held by a spindle main shaft at a position facing the workpiece and performs a predetermined rotation. A Z axis in the depth direction of the tool, an X axis which is a feed direction of the tool orthogonal to the Z axis, a Y axis orthogonal to the Z axis and the X axis, and a work axis C axis parallel to the Z axis. Regarding a total of four axes, the work and the tool can be relatively moved with respect to at least two axes of the X axis and the Z axis. Simultaneous control of relative movement with the tool is possible, and relative rotation between the work and the spindle main shaft rotation axis is possible to correct a processing error due to a change in processing conditions. Finely down to the second (angle) unit Has a resolution of up to, the central axis of the relative rotation, there is no relative movement between the machining point, machining apparatus according to claim. 2. The relative rotation between the workpiece and the spindle main shaft rotation axis for correcting the machining error is centered on two axes, an A axis parallel to the X axis and a B axis parallel to the Y axis. The processing apparatus according to claim 1, wherein the relative rotation is as follows. 3. The relative rotation of one of the two axes, the A axis and the B axis, is driven on the workpiece side, and the relative rotation of the other axis is driven on the spindle main axis side. The processing apparatus according to claim 2, wherein: 4. A relative movement between a work held by a work spindle and rotating at a predetermined speed and at least one tool held at at least one spindle main shaft and rotating at a predetermined position at a position facing the work. Thus, in a processing device for processing a scroll spiral, a Z-axis in a groove depth direction of the spiral, an X-axis which is a feed direction of a tool orthogonal to the Z-axis, and a direction orthogonal to the Z-axis and the X-axis Regarding a total of three mutually orthogonal axes with respect to the Y axis, the work and the tool can relatively move at least with respect to the X axis and the Z axis, and the relative movement in the X axis direction and the movement of the work The rotation of at least two axes with respect to the rotation of the C-axis (axis parallel to the Z-axis) can be simultaneously controlled. In order to correct a processing error due to a change in processing conditions, the work spindle rotation is performed. Relative rotation about the B axis (axis parallel to the Y axis) is possible between the spindle and the spindle main shaft rotation axis, and the relative rotation has a resolution down to the second (angle) unit. The processing apparatus, wherein the B-axis, which is the center of the relative rotation, does not move relative to the processing point even when the workpiece and the tool move relative to each other. 5. An inner surface of a cylindrical work, which is held by a work spindle and makes a predetermined rotation, is rotated by a grinding tool which is held by a spindle main shaft at a position facing the work and rotates by a predetermined amount. In a processing apparatus for performing internal grinding by traversing in the Z-axis direction, which is the axis of the cylinder, and feeding in the X-axis direction of the cylindrical radial direction orthogonal to the Z-axis, a processing error due to a change in processing conditions is reduced. In order to compensate, relative rotation about the B axis (axis parallel to the Y axis) is possible between the work spindle rotation axis and the spindle main shaft rotation axis. A) the B axis, which is the center of the relative rotation, does not move relative to the processing point even during relative movement between the workpiece and the tool. apparatus. 6. A rotation guide portion provided between a headstock for fixing a spindle main shaft and a base plate supporting the headstock, the rotation guide portion rotatably supporting the headstock about the B axis, and the rotation guide. An actuator for applying a rotational driving force about the B axis to the headstock supported by the section; a sensor for monitoring the amount of rotation about the B axis; a data bank including a reference value of the amount of rotation; The processing device according to claim 4, further comprising: a feedback circuit that controls the rotation amount based on data to be obtained. 7. The processing apparatus according to claim 6, wherein the actuator that applies a rotational driving force to the spindle headstock is a piezoelectric element or a magnetostrictive element. 8. The processing apparatus according to claim 6, wherein the actuator that applies a rotational driving force to the spindle headstock is a feed screw mechanism driven by a motor. 9. The processing apparatus according to claim 6, wherein the actuator that applies a rotational driving force to the spindle headstock is a cam mechanism that drives a motor to rotate. 10. The data bank containing the reference value of the rotation amount includes a processing error correction amount at each processing position, that is, a rotation amount around the B axis, and the data bank includes the X coordinate value signal from the processing machine body as a reference. 7. The processing apparatus according to claim 6, wherein a relative rotation amount between the work spindle rotating shaft and the spindle main shaft rotating shaft is controlled by performing a comparison operation with the data. 11. The data bank including the reference value of the rotation amount includes a processing error correction amount at an elapsed time after each processing start, that is, a rotation amount around the B-axis, and a processing start signal is transmitted from the processing machine body to a starting point. 7. The processing apparatus according to claim 6, wherein a relative rotation amount between the work spindle rotating shaft and the spindle main shaft rotating shaft is controlled by performing a comparison operation with the data. 12. The data bank containing the reference value of the rotation amount includes a tool deformation amount with respect to the motor current of the spindle main shaft and a corresponding machining error correction amount, that is, a rotation amount around the B-axis, and 7. The processing apparatus according to claim 6, wherein a relative rotation amount between the work spindle rotating shaft and the spindle main shaft rotating shaft is controlled by comparing a result of monitoring the spindle spindle motor current with the data. 13. The data bank including the reference value of the rotation amount includes a tool deformation amount with respect to a torsion angle of a tool or a spindle main shaft rotation axis and a corresponding machining error correction amount, that is, a rotation amount around a B-axis. The relative rotation amount between the work spindle rotation axis and the spindle main shaft rotation axis is controlled by comparing the torsion angle monitoring result of the tool or the spindle main shaft rotation axis in the in-process with the above data, and controlling the relative rotation amount. Item 6. A processing apparatus according to Item 6. 14. The data bank containing the reference value of the rotation amount includes a tool deformation amount with respect to the power of the spindle main shaft and a machining error correction amount corresponding to the tool deformation amount, that is, a rotation amount around the B-axis. 7. The processing apparatus according to claim 6, wherein a relative rotation amount between the work spindle rotation shaft and the spindle main shaft rotation shaft is controlled by comparing and calculating a spindle power monitoring result with the data. 15. A method of measuring a workpiece processed based on a comparison operation with data included in the data bank at a predetermined frequency, and sequentially updating data included in the data bank based on the measurement result. The processing apparatus according to any one of claims 10 to 14, wherein the processing apparatus is characterized in that: 16. In correcting a tool deflection due to the machining resistance, the rotation of the work spindle rotation axis and the spindle main shaft rotation axis in addition to the relative rotation about the B axis center,
The processing apparatus according to claim 6, further comprising a unit configured to correct an error in the X-axis direction due to a shift between the shaft rotation center and the spindle main shaft. 17. A center axis of B-axis rotation in a relative rotation between the work spindle rotation shaft and the spindle main shaft rotation is offset from a group of machining points or within a radius of a tool from the group of machining points. The processing apparatus according to claim 4, wherein: 18. The method according to claim 6, wherein the direction of transmission of the rotational driving force in the relative rotation of the work spindle rotation shaft and the spindle main shaft rotation shaft around the B axis is tangential to the B axis center circle. ~ 15 processing equipment. 19. The mechanism for driving and controlling relative rotation about the B axis between the work spindle rotation shaft and the spindle main shaft rotation shaft is provided on a work table side on which a work spindle is mounted, and wherein the spindle main shaft is provided. 19. The processing apparatus according to claim 4, wherein the work spindle rotation axis is rotated about the B axis with respect to the rotation axis.