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JP2000183230A - Mounting structure of high frequency circuit package - Google Patents

Mounting structure of high frequency circuit package

Info

Publication number
JP2000183230A
JP2000183230A JP10359243A JP35924398A JP2000183230A JP 2000183230 A JP2000183230 A JP 2000183230A JP 10359243 A JP10359243 A JP 10359243A JP 35924398 A JP35924398 A JP 35924398A JP 2000183230 A JP2000183230 A JP 2000183230A
Authority
JP
Japan
Prior art keywords
conductor
ground
side wall
line conductor
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10359243A
Other languages
Japanese (ja)
Other versions
JP3725983B2 (en
Inventor
Takayuki Miyao
貴幸 宮尾
Katsuyuki Yoshida
克亨 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP35924398A priority Critical patent/JP3725983B2/en
Publication of JP2000183230A publication Critical patent/JP2000183230A/en
Application granted granted Critical
Publication of JP3725983B2 publication Critical patent/JP3725983B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

(57)【要約】 【課題】 従来の高周波回路用パッケージの実装構造で
は、接続部で反射損失や放射損失を生じて高周波信号の
伝送特性が劣化するという問題点があった。 【解決手段】 下部接地導体23と搭載部22aが形成され
た誘電体基板22と、上部接地導体25が形成された誘電体
枠体24と、下面の線路導体26と、側面の側壁線路導体27
と、側壁線路導体27の両側の側壁接地導体28と、線路導
体26の他方の端部から誘電体基板22の上面にかけて形成
された貫通導体29とを具備する高周波回路用パッケージ
21を、下面側に接地導体35が、また上面に接続用線路導
体36が形成された基板34と、側壁接地導体28に対応して
形成された基板側接地貫通導体37とを具備する実装基板
33に載置し、側壁線路導体27を接続用線路導体36に、側
壁接地導体28を基板側接地貫通導体37に接続した高周波
回路用パッケージの実装構造である。接続部の接地状態
が安定して反射損失や放射損失を低減できる。
(57) [Problem] To provide a conventional mounting structure of a high-frequency circuit package, there is a problem that reflection loss or radiation loss occurs at a connection portion and transmission characteristics of a high-frequency signal deteriorate. SOLUTION: A dielectric substrate 22 on which a lower ground conductor 23 and a mounting portion 22a are formed, a dielectric frame 24 on which an upper ground conductor 25 is formed, a line conductor 26 on a lower surface, and a side wall line conductor 27 on a side surface.
And a side wall ground conductor 28 on both sides of the side wall line conductor 27, and a through conductor 29 formed from the other end of the line conductor 26 to the upper surface of the dielectric substrate 22.
21, a mounting board including a substrate 34 on which a ground conductor 35 is formed on the lower surface side and a connection line conductor 36 formed on the upper surface, and a board-side ground through conductor 37 formed corresponding to the side wall ground conductor 28.
This is a mounting structure of a high-frequency circuit package in which the side wall line conductor 27 is mounted on a connection line conductor 33 and the side wall ground conductor 28 is connected to a substrate side ground through conductor 37. The grounding state of the connection portion is stabilized, and the reflection loss and the radiation loss can be reduced.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、高速で、あるいは
高周波帯で動作する高周波用半導体素子や高周波回路等
の高周波回路部品を収容するための高周波回路用パッケ
ージおよび実装基板に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-frequency circuit package and a mounting substrate for accommodating high-frequency circuit components such as high-frequency semiconductor elements and high-frequency circuits that operate at high speed or in a high-frequency band.

【0002】[0002]

【従来の技術】MHz帯やGHz帯の高周波信号を用い
る無線通信機器等の高周波回路あるいは高周波用半導体
素子等の高周波回路部品を収容する高周波回路用パッケ
ージにおいては、パッケージ内部に回路や素子が収納さ
れて気密封止され、それら内部の回路や素子と外部の高
周波回路とを電気的に接続して高周波信号の良好な伝送
特性を得るために、配線に線路導体を使用した高周波信
号入出力部が形成される。そして、外部電気回路基板で
ある実装用基板に表面実装されることにより、その実装
構造が構成されている。
2. Description of the Related Art In a high-frequency circuit package for housing a high-frequency circuit such as a wireless communication device using a high-frequency signal in the MHz band or the GHz band or a high-frequency circuit component such as a high-frequency semiconductor element, the circuit or element is housed inside the package. High-frequency signal input / output section using line conductors for wiring in order to obtain good transmission characteristics of high-frequency signals by electrically connecting internal circuits and elements to external high-frequency circuits. Is formed. The mounting structure is configured by being surface-mounted on a mounting board which is an external electric circuit board.

【0003】そのような高周波回路用パッケージの実装
構造は、従来は、その例を図3(a)に断面図で、およ
び同図(b)にその要部平面図で示すような構成であっ
た。
Conventionally, such a mounting structure of a high-frequency circuit package has a structure as shown in a sectional view of FIG. 3A and a plan view of a main part thereof in FIG. 3B. Was.

【0004】図3に示す高周波回路用パッケージ1にお
いては、下面または内部に接地導体層3が形成され、上
面に高周波用半導体素子等の高周波回路部品8を搭載す
る搭載部2aと、この搭載部2a近傍から外周に至る高
周波信号伝送用の線路導体4とが形成された誘電体基板
2と、この誘電体基板2の上面に搭載部2aを囲むとと
もに線路導体4の一部を挟んでいわゆるハーメチックシ
ール部を構成するように接合された誘電体枠体5とから
成り、誘電体基板2の側面に誘電体基板2と誘電体枠体
5との間を通って外周まで形成された線路導体4と連続
的に形成されて接続された表面実装用の側壁線路導体6
を形成して信号入出力部が構成されていた。
In the high-frequency circuit package 1 shown in FIG. 3, a grounding conductor layer 3 is formed on the lower surface or inside, and a mounting portion 2a for mounting a high-frequency circuit component 8 such as a high-frequency semiconductor element on the upper surface, and this mounting portion A dielectric substrate 2 on which a line conductor 4 for high frequency signal transmission from the vicinity of 2a to the outer periphery is formed, and a so-called hermetic sandwiching a part of the line conductor 4 on the upper surface of the dielectric substrate 2 while surrounding the mounting portion 2a. A line conductor 4 formed on the side surface of the dielectric substrate 2 and extending to the outer periphery through the space between the dielectric substrate 2 and the dielectric frame 5; Side wall line conductor 6 for surface mounting, formed continuously and connected to
To form a signal input / output unit.

【0005】そして、搭載部2aに搭載した高周波回路
部品8をボンディングワイヤ等の導電性接続部材(図示
せず)により線路導体4と電気的に接続し、誘電体枠体
5の上面に蓋体(図示せず)を取着して高周波回路部品
8を気密封止した後、この高周波回路用パッケージ1を
実装基板9に実装し、側壁線路導体6を実装基板9の接
続用線路導体12と電気的に接続することにより、パッケ
ージ1内部の高周波回路部品8と実装基板2の外部電気
回路とが電気的に接続されていた。
The high-frequency circuit component 8 mounted on the mounting portion 2a is electrically connected to the line conductor 4 by a conductive connection member (not shown) such as a bonding wire. After attaching a high-frequency circuit component 8 (not shown) to hermetically seal the high-frequency circuit component 8, the high-frequency circuit package 1 is mounted on a mounting substrate 9, and the side wall line conductor 6 is connected to the connection line conductor 12 of the mounting substrate 9. By the electrical connection, the high-frequency circuit component 8 inside the package 1 and the external electric circuit of the mounting board 2 are electrically connected.

【0006】なお、10は実装基板9を構成する誘電体基
板、11は誘電体基板10の下面に被着形成された接地導体
である。
Reference numeral 10 denotes a dielectric substrate constituting the mounting substrate 9, and reference numeral 11 denotes a ground conductor formed on the lower surface of the dielectric substrate 10.

【0007】また、高周波回路用パッケージ1の側壁線
路導体6を誘電体基板2の側面の下まで形成し、さらに
誘電体基板2の下面にこの側壁線路導体6と連続的に同
様の線路導体により実装用端子導体7を形成し、実装信
頼性を高めることも行なわれていた。
Further, the side wall line conductor 6 of the high frequency circuit package 1 is formed under the side surface of the dielectric substrate 2, and is further formed on the lower surface of the dielectric substrate 2 by a line conductor continuously similar to the side wall line conductor 6. The mounting terminal conductor 7 is also formed to improve the mounting reliability.

【0008】[0008]

【発明が解決しようとする課題】しかしながら、このよ
うな従来の高周波回路用パッケージの実装構造によれ
ば、高周波回路用パッケージ1の線路導体4に対するハ
ーメチックシール部において、高周波信号の伝送がマイ
クロストリップモードからストリップモードへ切り替わ
るため、この部分においてインピーダンスのミスマッチ
ングが生じて反射損失が増大し、伝送線路の高周波特性
が劣化してしまうという問題点があった。
However, according to such a conventional mounting structure of a high-frequency circuit package, transmission of a high-frequency signal in the hermetic seal portion with respect to the line conductor 4 of the high-frequency circuit package 1 is in a microstrip mode. Since the mode is switched to the strip mode, there is a problem that impedance mismatch occurs in this portion, so that the reflection loss increases and the high-frequency characteristics of the transmission line deteriorate.

【0009】さらに、線路導体4の上部に存在する誘電
体枠体5の誘電率に応じて線路導体4の特性インピーダ
ンスがその前後の部分よりも低下するため、それらの間
で特性インピーダンスの不整合が生じ、高周波信号の反
射損失が増大して高周波信号の伝送特性が劣化するとい
う問題点もあった。
Further, since the characteristic impedance of the line conductor 4 is lower than that before and after the line conductor 4 in accordance with the dielectric constant of the dielectric frame 5 existing above the line conductor 4, there is a mismatch in characteristic impedance between them. This causes a problem that the reflection loss of the high-frequency signal increases and the transmission characteristics of the high-frequency signal deteriorate.

【0010】また、このような従来の高周波回路用パッ
ケージの実装構造においては、実装基板9の接続用線路
導体12への実装用端子電極として、誘電体基板2の側面
において線路導体4に側壁線路導体6が連続的に形成さ
れていたことから、この側壁線路導体6の存在によって
キャパシタンス成分が減少し、あるいはインダクタンス
成分が増大して高インピーダンスとなって高周波信号の
反射が増大することとなり、高周波信号の伝送特性が低
下してしまうという問題点があった。特に、側壁線路導
体6の長さが長くなった場合にはインピーダンスの増加
が顕著となり、高周波信号の伝送特性が大きく低下して
しまうという問題点があった。
In such a conventional structure for mounting a package for a high-frequency circuit, a side wall line is formed on the line conductor 4 on the side surface of the dielectric substrate 2 as a terminal electrode for mounting on the connection line conductor 12 of the mounting substrate 9. Since the conductor 6 is formed continuously, the presence of the side wall line conductor 6 reduces the capacitance component, or increases the inductance component to increase the impedance and increase the reflection of the high frequency signal. There has been a problem that signal transmission characteristics are degraded. In particular, when the length of the side wall line conductor 6 is increased, the impedance is remarkably increased, and there is a problem that the transmission characteristics of a high-frequency signal are greatly reduced.

【0011】さらに、高周波回路用パッケージと実装基
板との接続部において特性インピーダンスの不整合が生
じ、これによっても高周波信号の反射が増加することと
なるという問題点があった。
Further, there is a problem that characteristic impedance mismatching occurs at a connection portion between the high-frequency circuit package and the mounting board, which also increases the reflection of high-frequency signals.

【0012】本発明はかかる従来技術の問題点に鑑み案
出されたものであり、その目的は、誘電体基板の側面に
表面実装用の信号入出力部として側壁線路導体を有する
表面実装型の高周波回路用パッケージの実装構造とし
て、高周波信号に対して低反射特性を有する伝送特性が
良好な高周波回路用パッケージの実装構造を提供するこ
とにある。
The present invention has been devised in view of the problems of the prior art described above, and has as its object to provide a surface mount type having a side wall line conductor as a signal input / output unit for surface mount on a side surface of a dielectric substrate. It is an object of the present invention to provide a mounting structure for a high-frequency circuit package having a low reflection characteristic with respect to a high-frequency signal and having good transmission characteristics.

【0013】[0013]

【課題を解決するための手段】本発明の高周波回路用パ
ッケージは、内部に下部接地導体が形成され、上面に高
周波回路部品を搭載する搭載部が形成された誘電体基板
と、この誘電体基板の上面に前記搭載部を囲んで接合さ
れ、上面に上部接地導体が形成された誘電体枠体と、前
記誘電体基板の下面に形成され、前記誘電体枠体の内側
に対応する位置から外周に至る線路導体と、前記誘電体
基板の側面に前記線路導体と連続的に形成された、その
長さが前記線路導体により伝送される高周波信号の波長
の4分の1以下である側壁線路導体と、この側壁線路導
体の両側の前記高周波信号の波長の2分の1以下の距離
の位置に形成され、前記上部接地導体と電気的に接続さ
れた側壁接地導体と、前記線路導体の他方の端部から前
記誘電体枠体の内側の前記誘電体基板の上面にかけて形
成された貫通導体とを具備する高周波回路用パッケージ
を、下面側に接地導体が形成され、上面に前記側壁線路
導体が電気的に接続される接続用線路導体が形成された
誘電体から成る基板と、前記接続用線路導体の両側の前
記側壁接地導体に対応する位置に前記接地導体から前記
基板の上面にかけて形成された基板側接地貫通導体とを
具備する実装基板に載置し、前記側壁線路導体を前記接
続用線路導体に、および前記側壁接地導体を前記基板側
接地貫通導体にそれぞれ電気的に接続したことを特徴と
するものである。
SUMMARY OF THE INVENTION A high-frequency circuit package according to the present invention has a dielectric substrate having a lower grounding conductor formed therein and a mounting portion for mounting a high-frequency circuit component formed on an upper surface thereof. A dielectric frame having an upper grounding conductor formed on the upper surface thereof and being joined to the upper surface of the dielectric frame, and a dielectric frame formed on the lower surface of the dielectric substrate and corresponding to a position corresponding to the inside of the dielectric frame. And a side wall line conductor formed continuously on the side surface of the dielectric substrate with the line conductor, the length of which is equal to or less than a quarter of the wavelength of a high-frequency signal transmitted by the line conductor. And a side wall ground conductor formed at a position on both sides of the side wall line conductor at a distance of one half or less of the wavelength of the high frequency signal and electrically connected to the upper ground conductor, and the other of the line conductors From inside the dielectric frame A high-frequency circuit package comprising a through conductor formed over the upper surface of the dielectric substrate, a grounding conductor formed on the lower surface side, and a connection line conductor electrically connected to the side wall line conductor on the upper surface. A mounting substrate comprising: a substrate made of a formed dielectric; and a substrate-side ground through conductor formed from the ground conductor to the upper surface of the substrate at a position corresponding to the side wall ground conductor on both sides of the connection line conductor. And the side wall line conductor is electrically connected to the connection line conductor, and the side wall ground conductor is electrically connected to the substrate side ground through conductor.

【0014】また、本発明の高周波回路用パッケージの
実装構造は、上記構成において、前記高周波回路用パッ
ケージは、前記線路導体の両側の前記貫通導体から前記
高周波信号の波長の2分の1以下の距離の位置に、前記
下部接地導体に電気的に接続された前記誘電体基板の上
面から下面にわたる接地貫通導体を形成したことを特徴
とするものである。
In the above structure, the package for a high-frequency circuit according to the present invention may be arranged such that the high-frequency circuit package has a half or less wavelength of the high-frequency signal from the through conductors on both sides of the line conductor. A ground through conductor extending from an upper surface to a lower surface of the dielectric substrate electrically connected to the lower ground conductor is formed at a distance.

【0015】[0015]

【発明の実施の形態】以下、本発明を図面に基づき説明
する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings.

【0016】図1(a)および(b)は、本発明の高周
波回路用パッケージの実施の形態の一例を示すそれぞれ
断面図および要部平面図である。
FIGS. 1A and 1B are a cross-sectional view and a plan view of a main part, respectively, showing an embodiment of a high-frequency circuit package according to the present invention.

【0017】これらの図において21は高周波回路用パッ
ケージであり、22は上面に高周波回路部品32が搭載され
る搭載部22aを有する誘電体基板、23はその内部に形成
された下部接地導体である。
In these figures, 21 is a high-frequency circuit package, 22 is a dielectric substrate having a mounting portion 22a on which a high-frequency circuit component 32 is mounted, and 23 is a lower ground conductor formed therein. .

【0018】24は誘電体基板22上に搭載部22aを囲むよ
うに接合されて内側に高周波回路部品32を収容する収容
部の側壁となる誘電体枠体、25はその上面に形成された
上部接地導体である。これら誘電体基板22と誘電体枠体
24とにより高周波回路部品32を収容するためのパッケー
ジ本体の容器が構成される。そして、この誘電体枠体24
の上面に蓋体(図示せず)を接合することにより内部が
気密に封止される。また、高周波回路用パッケージ21の
仕様によっては、蓋体を使用せず、封止樹脂によって高
周波回路部品32を封止してもよい。
Reference numeral 24 denotes a dielectric frame which is joined on the dielectric substrate 22 so as to surround the mounting portion 22a and serves as a side wall of a housing portion for housing the high-frequency circuit component 32, and 25 is an upper portion formed on the upper surface thereof. It is a ground conductor. These dielectric substrate 22 and dielectric frame
24 constitutes a container of a package body for accommodating the high-frequency circuit component 32. And this dielectric frame 24
The inside is hermetically sealed by joining a lid (not shown) to the upper surface of the device. Further, depending on the specifications of the high-frequency circuit package 21, the high-frequency circuit component 32 may be sealed with a sealing resin without using a lid.

【0019】26は誘電体基板22の下面に誘電体枠体24の
内側の搭載部22a近傍に対応する位置から外周に至るよ
うに形成された高周波信号伝送用の線路導体であり、必
要に応じて複数本あるいは誘電体基板22の種々の方向に
向けて形成される。このような線路導体26と誘電体基板
22・下部接地導体23とにより、マイクロストリップ線路
構造の伝送線路が構成される。なお、この線路導体26
は、その両側に同一面接地導体を設けて、コプレーナ線
路構造の伝送線路としてもよい。
Reference numeral 26 denotes a line conductor for high-frequency signal transmission formed on the lower surface of the dielectric substrate 22 from the position corresponding to the vicinity of the mounting portion 22a inside the dielectric frame 24 to the outer periphery. To form a plurality of or dielectric substrates 22 in various directions. Such a line conductor 26 and a dielectric substrate
A transmission line having a microstrip line structure is constituted by 22 and the lower ground conductor 23. Note that this line conductor 26
May be provided with coplanar conductors on both sides thereof to form a transmission line having a coplanar line structure.

【0020】27は誘電体基板22の側面に線路導体26と連
続的に形成された側壁線路導体であり、外部電気回路で
ある実装基板33の接続用線路導体36と電気的に接続する
ことにより、パッケージ内部の高周波回路部品32と外部
電気回路とが電気的に接続される。この側壁線路導体27
の長さは、高周波回路部品32が使用され線路導体26によ
り伝送される高周波信号の波長の4分の1以下とされて
いる。これにより、伝送線路の長さによる損失を最小限
に抑えることが可能であるため、この側壁線路導体によ
り高周波特性上で問題となるキャパシタンス成分の減少
やインダクタンス成分の増大が生じることがなく、その
ために伝送線路が高インピーダンスとなって高周波信号
の反射が増大して高周波信号の伝送特性が低下してしま
うことがなくなる。このような作用効果は、特に高周波
信号の周波数が10GHz以上の場合に特に効果的なもの
である。中でも、周波数が30GHz以上の高周波信号に
対しては、側壁線路導体27の長さをその高周波信号の波
長の8分の1以下とすることにより、そのようなより高
周波の領域においてもインピーダンスの増加を有効に抑
制することができ、低反射特性を有する良好な高周波特
性の高周波回路用パッケージ21となる。
Reference numeral 27 denotes a side wall line conductor formed continuously on the side surface of the dielectric substrate 22 with the line conductor 26. The side wall line conductor 27 is electrically connected to a connection line conductor 36 of a mounting substrate 33 which is an external electric circuit. The high-frequency circuit component 32 inside the package and the external electric circuit are electrically connected. This side wall conductor 27
Is set to be less than or equal to a quarter of the wavelength of the high-frequency signal transmitted by the line conductor 26 using the high-frequency circuit component 32. As a result, it is possible to minimize the loss due to the length of the transmission line, so that the sidewall component does not cause a decrease in the capacitance component or an increase in the inductance component, which is a problem in the high-frequency characteristics. In addition, it is possible to prevent the transmission line from becoming high impedance, increasing the reflection of the high-frequency signal and deteriorating the transmission characteristics of the high-frequency signal. Such an effect is particularly effective when the frequency of the high-frequency signal is 10 GHz or more. In particular, for a high-frequency signal having a frequency of 30 GHz or more, the impedance is increased even in such a higher-frequency region by setting the length of the side wall line conductor 27 to 1/8 or less of the wavelength of the high-frequency signal. Can be effectively suppressed, and the high-frequency circuit package 21 having good reflection characteristics and high-frequency characteristics can be obtained.

【0021】このような側壁線路導体27は、通常は誘電
体基板22の側面の長さ(側壁の高さ)とほぼ同じ長さに
設定されることとなるが、誘電体基板22の側面の長さよ
り短いものとして誘電体基板22の側面に形成してもよ
い。これにより、誘電体基板22に必要な強度と高周波信
号伝送用の伝送線路に必要な高周波特性とをともに確保
して、信頼性に優れた高周波回路用パッケージ21とする
ことができる。なお、下部接地導体23と側壁線路導体26
との間は、電気的な絶縁が確保でき、高周波特性に悪影
響を与えない距離が設けられていればよい。
Such a side wall line conductor 27 is usually set to a length substantially equal to the length of the side surface (height of the side wall) of the dielectric substrate 22. It may be formed on the side surface of the dielectric substrate 22 as shorter than the length. As a result, both the strength required for the dielectric substrate 22 and the high-frequency characteristics required for the transmission line for transmitting a high-frequency signal are ensured, and the high-frequency circuit package 21 having excellent reliability can be obtained. The lower ground conductor 23 and the side wall line conductor 26
It is sufficient that an electrical insulation is provided between them and a distance that does not adversely affect high-frequency characteristics is provided.

【0022】28は、誘電体基板22および誘電体枠体24の
側面の側壁線路導体27の両側において、側壁線路導体27
から高周波信号の波長の2分の1以下の距離の位置に形
成され、上部接地導体25と電気的に接続された側壁接地
導体である。このような側壁接地導体28は、例えば誘電
体基板22および誘電体枠体24の側面に直接に、あるいは
その側面に設けた凹部(いわゆるキャスタレーション)
の表面に導体層を被着させることにより形成される。
Reference numeral 28 denotes a side wall line conductor 27 on both sides of the side wall line conductor 27 on the side surfaces of the dielectric substrate 22 and the dielectric frame 24.
And a side wall ground conductor electrically formed with the upper ground conductor 25 at a distance of not more than half of the wavelength of the high frequency signal. Such a side wall ground conductor 28 is formed, for example, directly on the side surface of the dielectric substrate 22 and the dielectric frame 24, or a concave portion (so-called castellation) provided on the side surface.
Is formed by applying a conductor layer to the surface of the substrate.

【0023】29は線路導体26の他方の端部すなわち誘電
体枠体24の内側の搭載部22a近傍に対応する位置の側の
端部から誘電体枠体24の内側の搭載部22a近傍に対応す
る誘電体基板22の上面にかけて形成された貫通導体であ
り、この貫通導体29には電極パッド30を介して、あるい
は直接その上端に高周波回路部品32が電気的に接続され
る。なお、線路導体26および貫通導体29は、それぞれ誘
電体基板22の比誘電率εr の値に応じて、特性インピー
ダンスZ0 を所望の値とするようにその幅・直径や長さ
が設定される。
Numeral 29 corresponds to the other end of the line conductor 26, that is, the end on the side corresponding to the vicinity of the mounting portion 22a inside the dielectric frame 24, from the vicinity of the mounting portion 22a inside the dielectric frame 24. A high-frequency circuit component 32 is electrically connected to the through conductor 29 via the electrode pad 30 or directly at the upper end thereof. Incidentally, the line conductor 26 and through conductor 29, respectively depending on the value of the relative dielectric constant epsilon r of the dielectric substrate 22, the characteristic impedance Z 0 of the desired width, diameter and length so that the value is set You.

【0024】また、31は、線路導体26の両側の貫通導体
29から高周波信号の波長の2分の1以下の距離の位置
に、下部接地導体23に電気的に接続された誘電体基板22
の上面から下面にわたる接地貫通導体である。この接地
貫通導体31は必要とする高周波特性に応じて設ければよ
く、接地貫通導体31と線路導体26との距離は、貫通導体
29から図1(b)中に一点鎖線で示す高周波信号の波長
の2分の1以下の距離の範囲内に設定すればよい。
Reference numeral 31 denotes a through conductor on both sides of the line conductor 26.
A dielectric substrate 22 electrically connected to the lower ground conductor 23 at a distance of less than half the wavelength of the high-frequency signal from 29.
Is a ground through conductor extending from the upper surface to the lower surface of the ground. The ground through conductor 31 may be provided according to the required high-frequency characteristics, and the distance between the ground through conductor 31 and the line conductor 26 is determined by the length of the through conductor.
The distance may be set within a range from 29 to a half or less of the wavelength of the high-frequency signal indicated by a dashed line in FIG.

【0025】さらに、接地貫通導体31は線路導体26の両
側にそれぞれ複数本形成してもよく、誘電体基板22の下
面において線路導体26の両側にいわゆるコプレーナ線路
構造を構成するように同一面接地導体を設けておき、こ
れらと接地貫通導体31とを接続するようにしてもよい。
Further, a plurality of grounding through conductors 31 may be formed on both sides of the line conductor 26, respectively. On the lower surface of the dielectric substrate 22, both sides of the line conductor 26 are grounded on the same plane so as to form a so-called coplanar line structure. Conductors may be provided, and these may be connected to the ground through conductor 31.

【0026】このような接地貫通導体31を形成すること
により、高インピーダンスの貫通導体29に対して容量成
分を補うことが可能であるため、貫通導体29におけるイ
ンピーダンスの不整合を防ぐことができる。その結果、
高周波回路部品32と外部電気回路との間の電気的接続に
おけるインピーダンスのミスマッチングを効果的に抑え
て高周波信号の伝送特性の劣化を抑えることができ、さ
らに低反射損失の高周波回路用パッケージ21とすること
ができる。この接地貫通導体31は、貫通導体29と同様に
スルーホール導体やビア導体等により形成すればよい。
By forming such a grounding through conductor 31, it is possible to supplement a capacitance component to the high impedance through conductor 29, so that impedance mismatch in the through conductor 29 can be prevented. as a result,
The impedance mismatch in the electrical connection between the high-frequency circuit component 32 and the external electric circuit can be effectively suppressed, the deterioration of the transmission characteristics of the high-frequency signal can be suppressed, and the low-reflection loss high-frequency circuit package 21 can be used. can do. The ground through conductor 31 may be formed of a through-hole conductor, a via conductor, or the like, similarly to the through conductor 29.

【0027】32は搭載部22aに搭載される高周波用半導
体素子や高周波回路等の高周波回路部品であり、電極パ
ッド30あるいは貫通導体29とは、図示しないワイヤボン
ディングやリボンボンディングあるいはいわゆるバンプ
接続により電気的に接続される。
Reference numeral 32 denotes a high-frequency circuit component such as a high-frequency semiconductor device or a high-frequency circuit mounted on the mounting portion 22a. The electrode pad 30 or the through conductor 29 is electrically connected to the electrode pad 30 or the through conductor 29 by wire bonding or ribbon bonding (not shown) or so-called bump connection. Connected.

【0028】一方、33は実装基板であり、34は誘電体か
ら成る基板、35は基板34の下面側、ここでは下面上に形
成された接地導体、36は側壁線路導体27が電気的に接続
される、外部電気回路(図示せず)の一部をなす接続用
線路導体である。この接続用線路導体36を側壁線路導体
27および線路導体26と電気的に接続することにより、高
周波回路部品32と外部電気回路とが電気的に接続される
こととなる。なお、接地導体35は、基板34の下面側であ
れば基板34の内部に形成されていてもよい。
On the other hand, 33 is a mounting substrate, 34 is a substrate made of a dielectric material, 35 is a lower surface side of the substrate 34, here a ground conductor formed on the lower surface, and 36 is a side wall line conductor 27 electrically connected. And a connection line conductor that forms part of an external electric circuit (not shown). This connection line conductor 36 is used as a side wall line conductor.
By electrically connecting with the line conductor 27 and the line conductor 26, the high-frequency circuit component 32 and the external electric circuit are electrically connected. Note that the ground conductor 35 may be formed inside the substrate 34 as long as it is on the lower surface side of the substrate 34.

【0029】また、37は、接続用線路導体36の両側の側
壁接地導体28に対応する位置に接地導体35から基板34の
上面にかけて形成された基板側接地貫通導体である。こ
の基板側接地貫通導体37をそれぞれ側壁接地導体28と電
気的に接続することにより、高周波回路用パッケージ21
の上部接地導体25と実装基板33の接地導体35とが、側壁
接地導体28および基板側接地貫通導体37を介して、側壁
線路導体27と接続用線路導体36との接続部を取り囲むよ
うにして電気的に接続されることとなる。
Reference numeral 37 denotes a board-side ground through conductor formed from the ground conductor 35 to the upper surface of the board 34 at a position corresponding to the side wall ground conductor 28 on both sides of the connection line conductor 36. By electrically connecting the substrate-side grounded through conductors 37 to the side wall grounded conductors 28, the high-frequency circuit package 21 is formed.
The upper ground conductor 25 and the ground conductor 35 of the mounting board 33 surround the connection portion between the side wall line conductor 27 and the connection line conductor 36 via the side wall ground conductor 28 and the board side ground through conductor 37. It will be electrically connected.

【0030】このような本発明の高周波回路用パッケー
ジの実装構造によれば、高周波回路用パッケージ21には
上端が誘電体枠体24の内側で搭載部22aの近傍に位置す
る貫通導体29に高周波回路部品32が電気的に接続され、
この貫通導体29から誘電体基板22の下面に形成された線
路導体26を介して接続された側壁線路導体27に外部電気
回路である実装基板33の接続用線路導体36が電気的に接
続されることから、従来のハーメチックシール部を経由
する線路導体のようにマイクロストリップモードからス
トリップモードへの切り替わりがないため、インピーダ
ンスのミスマッチングが生じることがなく、反射損失が
増大して伝送線路の高周波特性が劣化してしまうことが
ない。
According to such a mounting structure of the high-frequency circuit package of the present invention, the high-frequency circuit package 21 has the high-frequency wave applied to the through conductor 29 located near the mounting portion 22a inside the dielectric frame 24. The circuit components 32 are electrically connected,
A connection line conductor 36 of a mounting substrate 33 as an external electric circuit is electrically connected from the through conductor 29 to a side wall line conductor 27 connected via a line conductor 26 formed on the lower surface of the dielectric substrate 22. Therefore, there is no switching from microstrip mode to strip mode as in the case of conventional line conductors that pass through a hermetic seal, so that impedance mismatch does not occur, reflection loss increases, and the high-frequency characteristics of the transmission line increase. Does not deteriorate.

【0031】また、高周波回路用パッケージ21の側壁線
路導体27は、その長さが高周波回路部品32が使用され線
路導体26により伝送される高周波信号の波長の4分の1
以下であることから、伝送線路の長さによる損失を最小
限に抑えることが可能であるため、この側壁線路導体27
により高周波特性上で問題となるキャパシタンス成分の
減少やインダクタンス成分の増大が生じることがない。
その結果、伝送線路が高インピーダンスとなって高周波
信号の反射が増大して高周波信号の伝送特性が低下して
しまうことがなくなる。
The length of the side wall line conductor 27 of the high frequency circuit package 21 is a quarter of the wavelength of the high frequency signal transmitted by the line conductor 26 using the high frequency circuit component 32.
From the following, it is possible to minimize the loss due to the length of the transmission line.
Therefore, a decrease in the capacitance component and an increase in the inductance component, which are problems in the high frequency characteristics, do not occur.
As a result, it is possible to prevent the transmission line from becoming high impedance, increasing the reflection of the high-frequency signal, and deteriorating the transmission characteristics of the high-frequency signal.

【0032】そして、本発明の高周波回路用パッケージ
の実装構造によれば、高周波信号を伝送するための高周
波回路用パッケージ21の線路導体26および側壁線路導体
27と実装基板33の接続用線路導体36とがパッケージ21の
誘電体基板22と実装基板33の誘電体から成る基板34とに
挟まれた高周波用伝送線路の接続部に対して、実装基板
33の基板34を介して基板側の接地導体35を、誘電体基板
22および誘電体枠体24を介して上部接地導体25を配し、
また、その両側に側壁接地導体28を併設し、さらに、こ
の側壁接地導体28直下の基板34にそれぞれ実装基板33側
の接地導体35と電気的に接続された基板側接地貫通導体
37を形成したことから、線路導体26および側壁線路導体
27がパッケージ21の側面において実装基板33の接続用線
路導体36に接続される部分の線路構成が、接地導体で囲
まれた疑似導波管構造となる。その結果、伝送線路を取
り囲む接地のための導体について接地状態を安定させ、
かつ高次モードの発生を抑制して反射損失を低減するこ
とができるとともに、電磁波シールド効果により放射損
失を抑制することができる。これにより、高周波回路用
パッケージの実装構造として高周波信号の接続部におけ
る高周波信号の伝送特性を低損失で良好なものとするこ
とができる。
According to the mounting structure of the high-frequency circuit package of the present invention, the line conductor 26 and the side-wall line conductor of the high-frequency circuit package 21 for transmitting a high-frequency signal.
27 and the connecting line conductor 36 of the mounting substrate 33 are connected to the connecting portion of the high-frequency transmission line between the dielectric substrate 22 of the package 21 and the substrate 34 made of the dielectric of the mounting substrate 33.
The ground conductor 35 on the board side is connected to the dielectric board via the board 34
Arrange the upper ground conductor 25 via 22 and the dielectric frame 24,
Further, side wall ground conductors 28 are provided on both sides thereof, and further, a board side ground through conductor electrically connected to a ground conductor 35 of the mounting board 33 side on a substrate 34 immediately below the side wall ground conductor 28, respectively.
37, the line conductor 26 and the side wall line conductor
The line configuration of the portion where 27 is connected to the connection line conductor 36 of the mounting board 33 on the side surface of the package 21 has a pseudo waveguide structure surrounded by a ground conductor. As a result, the grounding state of the grounding conductor surrounding the transmission line is stabilized,
In addition, the occurrence of higher-order modes can be suppressed to reduce the reflection loss, and the radiation loss can be suppressed by the electromagnetic wave shielding effect. As a result, it is possible to improve the transmission characteristics of the high-frequency signal at the connection portion of the high-frequency signal with low loss and good performance as the mounting structure of the high-frequency circuit package.

【0033】さらに、高周波回路用パッケージ21におい
て、線路導体26の両側の貫通導体29から高周波信号の波
長の2分の1以下の距離の位置に、下部接地導体23に電
気的に接続された誘電体基板22の上面から下面にわたる
接地貫通導体31を形成した場合には、線路導体26と接地
貫通導体31との間に適切な容量成分を持たせることが可
能となるため、貫通導体29におけるインピーダンスの不
整合を防ぐことができるものとなる。
Further, in the high-frequency circuit package 21, a dielectric electrically connected to the lower grounding conductor 23 at a distance of not more than half the wavelength of the high-frequency signal from the through conductor 29 on both sides of the line conductor 26. When the ground through conductor 31 extending from the upper surface to the lower surface of the body substrate 22 is formed, an appropriate capacitance component can be provided between the line conductor 26 and the ground through conductor 31, so that the impedance in the through conductor 29 can be increased. Mismatch can be prevented.

【0034】本発明の高周波回路用パッケージの実装構
造における高周波回路用パッケージ21の誘電体基板22・
誘電体枠体24ならびに実装基板33の基板34には、例えば
アルミナセラミックスや窒化アルミニウムセラミックス
等のセラミックス材料あるいはガラスセラミックス等の
無機系材料、またはPTFE(ポリテトラフルオロエチ
レン)・ガラスエポキシ・ポリイミド等の樹脂系材料等
が用いられる。例えばガラスセラミックスから成る場合
であれば、ガラスセラミックスのグリーンシートに必要
に応じて凹部や貫通導体となる貫通孔を形成し、所定の
箇所に下部接地導体23・上部接地導体25・線路導体26・
側壁線路導体27・側壁接地導体28・接地導体35・接続用
線路導体36や貫通導体29・接地貫通導体31・基板側接地
貫通導体37となる金属ペーストを印刷塗布・充填して、
これらのグリーンシートをそれぞれ上下に積層して約10
00℃で一体焼成することにより製作すればよい。
The dielectric substrate 22 of the high-frequency circuit package 21 in the mounting structure of the high-frequency circuit package of the present invention.
The dielectric frame 24 and the substrate 34 of the mounting substrate 33 are made of, for example, a ceramic material such as alumina ceramics or aluminum nitride ceramics, an inorganic material such as glass ceramics, or a material such as PTFE (polytetrafluoroethylene), glass epoxy, or polyimide. A resin material or the like is used. For example, in the case of a glass ceramic, a concave portion or a through hole serving as a through conductor is formed in a green sheet of the glass ceramic as necessary, and a lower ground conductor 23, an upper ground conductor 25, a line conductor 26,
The metal paste which becomes the side wall line conductor 27, the side wall ground conductor 28, the ground conductor 35, the connection line conductor 36 and the through conductor 29, the ground through conductor 31, and the board side ground through conductor 37 is printed and filled,
These green sheets are stacked one on top of the other
What is necessary is just to manufacture by baking integrally at 00 degreeC.

【0035】あるいは、焼成された誘電体基板22・誘電
体枠体24ならびに基板34の上面・側面・下面に種々の薄
膜法や印刷・焼成法によりそれぞれ所定パターンの下部
接地導体23・上部接地導体25・線路導体26・側壁線路導
体27・側壁接地導体28・接地導体35・接続用線路導体36
や貫通導体29・接地貫通導体31・基板側接地貫通導体37
を形成してもよい。
Alternatively, the lower ground conductor 23 and the upper ground conductor having a predetermined pattern may be formed on the upper surface, side surfaces, and lower surface of the fired dielectric substrate 22, dielectric frame 24, and substrate 34 by various thin film methods or printing and firing methods. 25 ・ Line conductor 26 ・ Side wall conductor 27 ・ Side wall ground conductor 28 ・ Ground conductor 35 ・ Connection line conductor 36
And through conductor 29, ground through conductor 31, board side ground through conductor 37
May be formed.

【0036】これら誘電体基板22・誘電体枠体24ならび
に基板34の形状・寸法(厚みや幅・長さ)は、使用され
る高周波信号の周波数や特性インピーダンスなどに応じ
て適宜設定すればよい。
The shapes and dimensions (thickness, width, and length) of the dielectric substrate 22, the dielectric frame 24, and the substrate 34 may be appropriately set according to the frequency and characteristic impedance of the high-frequency signal used. .

【0037】なお、誘電体枠体24と誘電体基板22とには
通常は同じ材料を用いればよいが、異なる材料を用いて
誘電体枠体24の誘電率と誘電体基板22の誘電率とを異な
らせてもよい。この場合は、例えば、誘電体基板22より
も誘電体枠体24の誘電率が低い方が好ましく、誘電体枠
体24の誘電率をなるべく真空の誘電率に近づけるのがよ
い。それにより、誘電体基板22と誘電体枠体24との接合
部分とそれ以外の部分とにおける高周波信号の伝搬モー
ドの変化が小さくなり、伝送損失が小さくなるという点
で好ましいものとなる。
It should be noted that the same material may be used for the dielectric frame 24 and the dielectric substrate 22 in general, but the dielectric constant of the dielectric frame 24 and the dielectric constant of the dielectric substrate 22 may be reduced by using different materials. May be different. In this case, for example, the dielectric constant of the dielectric frame 24 is preferably lower than that of the dielectric substrate 22, and the dielectric constant of the dielectric frame 24 is preferably as close as possible to the vacuum dielectric constant. This is preferable in that the change in the propagation mode of the high-frequency signal at the junction between the dielectric substrate 22 and the dielectric frame 24 and the other portions is reduced, and the transmission loss is reduced.

【0038】下部接地導体23・上部接地導体25・線路導
体26・側壁線路導体27・側壁接地導体28・接地導体35・
接続用線路導体36および貫通導体29・接地貫通導体31・
基板側接地貫通導体37を形成するための導体としては、
タングステンや銅・ニッケル・金・クロム・ニクロム・
窒化タンタル・チタン・パラジウムおよびこれらの合金
等を用いればよく、その形成は、種々の薄膜法や薄膜法
とフォトリソグラフィ法との組合せ、あるいは印刷・焼
成法等によればよい。これらの厚みや幅・径(断面の形
状および寸法)・長さも、基本的には伝送される高周波
信号の周波数や特性インピーダンスなどに応じて適宜設
定すればよい。
A lower ground conductor 23, an upper ground conductor 25, a line conductor 26, a side wall line conductor 27, a side wall ground conductor 28, a ground conductor 35,
Connection line conductor 36 and through conductor 29 / ground through conductor 31
As a conductor for forming the board-side ground through conductor 37,
Tungsten, copper, nickel, gold, chrome, nichrome,
Tantalum / titanium / palladium nitride, an alloy thereof, or the like may be used, and the formation may be performed by various thin film methods, a combination of the thin film method and the photolithography method, or a printing / firing method. These thickness, width, diameter (cross-sectional shape and dimensions), and length may be basically set as appropriate according to the frequency and characteristic impedance of the transmitted high-frequency signal.

【0039】なお、上部接地導体25・側壁接地導体28お
よび接地導体35は、線路導体26や下部接地導体23と同様
の材料を用いて同様の方法により被着形成すればよい
が、これらは導体被膜層として形成する他にも、他の導
電部材、例えば金属板や金属ブロックを取着することに
より形成してもよい。
The upper ground conductor 25, the side wall ground conductor 28, and the ground conductor 35 may be formed by using the same material as the line conductor 26 and the lower ground conductor 23 by the same method. Besides forming as a coating layer, it may be formed by attaching another conductive member, for example, a metal plate or a metal block.

【0040】また、貫通導体29・接地貫通導体31・基板
側接地貫通導体37は、スルーホール導体やビア導体とし
て形成する他にも、金属板や金属棒・金属パイプ等を埋
設することにより形成してもよい。
The through conductor 29, the ground through conductor 31, and the substrate side ground through conductor 37 are formed by burying a metal plate, a metal rod, a metal pipe or the like in addition to forming them as through-hole conductors or via conductors. May be.

【0041】また、側壁線路導体27からそれぞれ高周波
信号の波長の2分の1以下の距離の位置に形成される側
壁接地導体28は、さらにそれらの間のギャップgを下記
式の範囲で表わされるギャップg0 よりも小さな値とし
ておくと、共振による高周波信号の減衰を避けることが
できるため、側壁線路導体27と接続用線路導体36との接
続部を伝送させる高周波信号の周波数において、その伝
送特性を優れたものとすることができる。 g0 =C0 /2f・√εreff ただし、g0 は共振の発生する側壁接地導体28間のギャ
ップ、C0 は光速、fは高周波信号の周波数、εreff
誘電体枠体24および誘電体基板22の比誘電率を合成した
比誘電率である。
In the side wall ground conductor 28 formed at a distance of less than half the wavelength of the high frequency signal from the side wall line conductor 27, the gap g between them is represented by the following formula. If the value is smaller than the gap g 0, the attenuation of the high-frequency signal due to resonance can be avoided, so that the transmission characteristic at the frequency of the high-frequency signal transmitted through the connection between the side wall line conductor 27 and the connection line conductor 36 is reduced. Can be excellent. g 0 = C 0 / 2f · √ε reff where g 0 is the gap between the side wall ground conductors 28 at which resonance occurs, C 0 is the speed of light, f is the frequency of the high frequency signal, ε reff is the dielectric frame 24 and the dielectric It is a relative dielectric constant obtained by synthesizing the relative dielectric constant of the body substrate 22.

【0042】また、側壁線路導体28を誘電体基板22およ
び誘電体枠体24側面の凹部に形成する場合は、凹部を誘
電体枠体24の内側に向かって深く形成するほど、より長
い距離にわたって疑似導波管構造となるため接地状態が
より安定するようになり、高周波信号の伝送特性をより
優れたものとすることができる。従って、側壁接地導体
28を誘電体基板22および誘電体枠体24の側面の凹部に形
成する場合には、パッケージ21内部の気密封止を維持で
きる範囲で凹部をできる限り深く形成することが望まし
い。
When the side wall line conductor 28 is formed in the concave portion on the side surface of the dielectric substrate 22 and the dielectric frame 24, the deeper the concave portion is formed toward the inside of the dielectric frame 24, the longer the distance. Due to the pseudo waveguide structure, the grounding state becomes more stable, and the transmission characteristics of the high-frequency signal can be further improved. Therefore, the side wall ground conductor
In the case where 28 is formed in a concave portion on the side surface of dielectric substrate 22 and dielectric frame 24, it is desirable to form the concave portion as deep as possible within a range where airtight sealing inside package 21 can be maintained.

【0043】上記のような高周波回路用パッケージ21を
用いて、その搭載部22aに高周波回路部品32を搭載し、
その電極をボンディングワイヤやボンディングリボンあ
るいは接続用バンプ等を介して誘電体枠体24の内側に位
置する貫通導体29と電気的に接続し、誘電体枠体24の上
面にFe−Ni−CoやFe−Ni42アロイ等のFe−
Ni合金・無酸素銅・アルミニウム・ステンレス・Cu
−W合金・Cu−Mo合金などから成る蓋体を半田・A
uSnろう等の低融点金属ろう材やAuGeロウ等の高
融点金属ろう材、あるいはシームウェルド(溶接)等に
より取着することによって、もしくは封止用樹脂によっ
て封止することによって高周波回路部品32がパッケージ
21内部に気密封止して収容され、製品としての高周波回
路装置となる。
Using the high-frequency circuit package 21 as described above, a high-frequency circuit component 32 is mounted on the mounting portion 22a,
The electrode is electrically connected to the through conductor 29 located inside the dielectric frame 24 via a bonding wire, a bonding ribbon, a connection bump, or the like, and the upper surface of the dielectric frame 24 is made of Fe-Ni-Co or Fe- such as Fe-Ni42 alloy
Ni alloy, oxygen-free copper, aluminum, stainless steel, Cu
-W alloy, Cu-Mo alloy, etc.
The high-frequency circuit component 32 is formed by attaching with a low melting point metal brazing material such as uSn brazing or the like or a high melting point metal brazing material such as AuGe brazing or by seam welding (welding) or by sealing with a sealing resin. package
It is housed in a hermetically sealed manner inside 21 and becomes a high-frequency circuit device as a product.

【0044】そして、これを外部電気回路基板である実
装基板33に載置するとともに、側壁線路導体27を接続用
線路導体36に、および側壁接地導体28を基板側接地貫通
導体37にそれぞれバンプ・ボール・リードあるいは表面
実装リフロー等を介して接合することにより本発明の高
周波回路用パッケージの実装構造が構成され、パッケー
ジ21内部の高周波回路部品32と外部電気回路とが電気的
に接続されて高周波回路装置が使用されることとなる。
Then, this is mounted on a mounting board 33 which is an external electric circuit board, and the side wall line conductor 27 is connected to the connection line conductor 36 and the side wall ground conductor 28 is connected to the board side ground through conductor 37, respectively. By bonding via a ball lead or surface mount reflow, etc., the mounting structure of the high frequency circuit package of the present invention is formed, and the high frequency circuit components 32 inside the package 21 and the external electric circuit are electrically connected to each other. A circuit device will be used.

【0045】[0045]

【実施例】図1に示した本発明の実装構造に係る高周波
回路用パッケージとして、内部に下部接地導体23を形成
した比誘電率εr が9の誘電体基板22の下面に、誘電体
枠体24の内側の搭載部22a近傍に対応する位置から誘電
体基板22の外周に至る線路幅が100 μmの線路導体26を
形成した。
A package for high frequency circuit according to the mounting structure of the present invention shown in EXAMPLES 1, on the lower surface of the dielectric substrate 22 of the dielectric constant to form a lower ground conductor 23 epsilon r is 9 therein, the dielectric frame A line conductor 26 having a line width of 100 μm from the position corresponding to the vicinity of the mounting portion 22a inside the body 24 to the outer periphery of the dielectric substrate 22 was formed.

【0046】また、誘電体基板22および誘電体枠体24
(比誘電率εr =9)の側面に線路幅が150 μm・長さ
が高周波信号の波長の4分の1以下である400 μm(80
GHzに対応)の側壁線路導体27を誘電体基板22の外周
において線路導体26と連続的に形成した。一方、線路導
体26の他方の端部から誘電体枠体24の内側の搭載部22a
近傍に対応する位置の誘電体基板22の上面から下面にか
けて、直径が100 μmの貫通導体29を形成した。
The dielectric substrate 22 and the dielectric frame 24
On the side of (relative permittivity ε r = 9), the line width is 150 μm and the length is 400 μm (80
(Corresponding to 1 GHz) side wall line conductor 27 is formed continuously with line conductor 26 on the outer periphery of dielectric substrate 22. On the other hand, the mounting portion 22a inside the dielectric frame 24 from the other end of the line conductor 26
A through conductor 29 having a diameter of 100 μm was formed from the upper surface to the lower surface of the dielectric substrate 22 at a position corresponding to the vicinity.

【0047】さらに、誘電体基板22および誘電体枠体24
の側面の側壁線路導体27の両側には、側壁線路導体27と
のギャップを高周波信号の波長の2分の1以下である60
0 μmとし、線路幅を200 μmとして、誘電体枠体24の
上面に形成した上部接地導体25と電気的に接続された側
壁接地導体28を形成した。
Further, the dielectric substrate 22 and the dielectric frame 24
The gap between the side wall line conductor 27 and the side wall line conductor 27 on the side surface of the high frequency signal is not more than half of the wavelength of the high frequency signal.
With the line width set to 0 μm and the line width set to 200 μm, the side wall ground conductor 28 electrically connected to the upper ground conductor 25 formed on the upper surface of the dielectric frame 24 was formed.

【0048】また、線路導体26の両側の貫通導体29から
高周波信号の波長の2分の1以下である1mmの距離
に、誘電体基板22の上面から下面にかけて下部接地導体
23に電気的に接続された接地貫通導体29を形成した。
The lower ground conductor extends from the upper surface to the lower surface of the dielectric substrate 22 at a distance of 1 mm, which is less than half the wavelength of the high-frequency signal, from the through conductor 29 on both sides of the line conductor 26.
A ground through conductor 29 electrically connected to 23 was formed.

【0049】このようにして、本発明の実装構造に係る
高周波回路用パッケージ21の試料Aを作製した。
Thus, a sample A of the high-frequency circuit package 21 according to the mounting structure of the present invention was manufactured.

【0050】一方、実装基板33としては、比誘電率εr
=2.6 であり厚みが400 μmである基板34の上面に、線
路幅が900 μmであり接地導体との距離が250 μmであ
るコプレーナ線路構造の接続用線路導体36を形成し、そ
の接地導体と基板34の下面の接地導体35とは、基板側接
地貫通導体37を利用して電気的に同電位に接続してい
る。なお、誘電体基板22の下面に当たる部分では50Ωに
なるように、接続用線路導体36の線路幅を350 μmに、
接地導体との距離を300 μmに設定した。
On the other hand, as the mounting substrate 33, the relative permittivity ε r
= 2.6 and a thickness of 400 μm on the upper surface of the substrate 34, a connecting line conductor 36 having a coplanar line structure having a line width of 900 μm and a distance of 250 μm from the ground conductor is formed on the upper surface of the substrate 34. The ground conductor 35 on the lower surface of the substrate 34 is electrically connected to the same potential by using the substrate-side ground through conductor 37. In addition, the line width of the connecting line conductor 36 is set to 350 μm so that the portion corresponding to the lower surface of the dielectric substrate 22 becomes 50Ω.
The distance from the ground conductor was set to 300 μm.

【0051】このようにして、本発明の実装構造に係る
実装基板33の試料Aを作製した。
Thus, a sample A of the mounting board 33 according to the mounting structure of the present invention was manufactured.

【0052】そして、この高周波回路用パッケージの試
料Aを実装基板の試料Aに載置し、側壁線路導体27を接
続用線路導体36に、および側壁接地導体28を基板側接地
貫通導体37にそれぞれろう付けにより電気的に接続し
て、本発明の高周波回路用パッケージの実装構造の試料
Aを得た。
Then, the sample A of the high-frequency circuit package is placed on the sample A of the mounting board, and the side wall line conductor 27 is connected to the connection line conductor 36 and the side wall ground conductor 28 is connected to the substrate side ground through conductor 37. It was electrically connected by brazing to obtain a sample A of the mounting structure of the high-frequency circuit package of the present invention.

【0053】次に、上記の高周波回路用パッケージの試
料Aに対して側壁接地導体28を除いた試料Bを作製し
た。また、実装基板の試料Aに対して基板側接地貫通導
体37を除いた試料Bを作製した。
Next, a sample B was prepared by removing the side wall grounding conductor 28 from the sample A of the above-described high frequency circuit package. A sample B was prepared by removing the board-side ground through conductor 37 from the sample A of the mounting board.

【0054】そして、この高周波回路用パッケージの試
料Bを実装基板の試料Bに載置し、側壁線路導体27を接
続用線路導体36に上記と同様に電気的に接続して、比較
例の高周波回路用パッケージの実装構造の試料Bを得
た。
Then, the sample B of the high-frequency circuit package was placed on the sample B of the mounting board, and the side wall line conductor 27 was electrically connected to the connection line conductor 36 in the same manner as described above. A sample B having a mounting structure of a circuit package was obtained.

【0055】これら試料A・Bについて、3次元構造解
析シミュレータ(HFSS)によりSパラメータの周波
数特性を求めて、反射係数S11の周波数特性を得た。そ
の結果を図2に示す。図2はこれら反射係数の周波数特
性を示す線図であり、横軸は周波数(単位:GHz)
を、縦軸は反射係数(単位:dB)を表わし、図中の実
線は試料Aの反射係数についての特性曲線を、破線は試
料Bの反射係数についての特性曲線を示している。
[0055] For the samples A · B, seeking the frequency characteristics of S parameters by the three-dimensional structural analysis simulator (HFSS), to obtain a frequency characteristic of a reflection coefficient S 11. The result is shown in FIG. FIG. 2 is a diagram showing the frequency characteristics of these reflection coefficients, where the horizontal axis represents frequency (unit: GHz).
The vertical axis indicates the reflection coefficient (unit: dB), and the solid line in the figure indicates the characteristic curve for the reflection coefficient of the sample A, and the broken line indicates the characteristic curve for the reflection coefficient of the sample B.

【0056】図2より分かるように、試料Bにおいては
30GHzで反射特性の悪化が見られるが、試料Aにおい
てはその悪化がなくなり、ミリ波帯においても良好な反
射特性が得られた。
As can be seen from FIG. 2, in sample B,
Deterioration of the reflection characteristics was observed at 30 GHz, but the deterioration was eliminated in the sample A, and favorable reflection characteristics were obtained even in the millimeter wave band.

【0057】この結果より、本発明の高周波回路用パッ
ケージの実装構造によれば、高周波信号の接続部を疑似
導波管構造としたことから、従来の実装構造に比べて高
周波帯においても低反射な良好な伝送特性を有するもの
であることが確認できた。
According to the result, according to the mounting structure of the high-frequency circuit package of the present invention, since the connection portion of the high-frequency signal is formed as the pseudo waveguide structure, the reflection is lower in the high-frequency band than in the conventional mounting structure. It was confirmed that the device had excellent transmission characteristics.

【0058】なお、本発明は以上の実施の形態の例に限
定されるものではなく、本発明の要旨を逸脱しない範囲
で種々の変更・改良を施すことは何ら差し支えない。例
えば、高周波信号の接続部として、線路導体26・側壁線
路導体27および接続用線路導体36ならびに側壁接地導体
28・基板側接地貫通導体37は必要に応じて複数設けても
よい。また、接続用線路導体36にリードを用いること
で、実装信頼性を向上させることもできる。
It should be noted that the present invention is not limited to the above-described embodiments, and that various changes and improvements can be made without departing from the scope of the present invention. For example, the line conductor 26, the side wall line conductor 27, the connection line conductor 36, and the side wall ground conductor
28. A plurality of substrate-side ground through conductors 37 may be provided as necessary. In addition, by using leads for the connection line conductor 36, mounting reliability can be improved.

【0059】[0059]

【発明の効果】本発明の高周波回路用パッケージの実装
構造によれば、高周波回路用パッケージには上端が誘電
体枠体の内側で搭載部の近傍に位置する貫通導体に高周
波回路部品が電気的に接続され、この貫通導体から誘電
体基板の下面に形成された線路導体を介して接続された
側壁線路導体に実装基板の接続用線路導体が電気的に接
続されることから、従来の高周波回路用パッケージにお
いてハーメチックシール部を経由する線路導体のように
マイクロストリップモードからストリップモードへの切
り替わりがないため、インピーダンスのミスマッチング
が生じることがなく、反射損失が増大して伝送線路の高
周波特性が劣化してしまうことがない。
According to the mounting structure of the high-frequency circuit package of the present invention, the high-frequency circuit component is electrically connected to the through conductor whose upper end is located inside the dielectric frame and near the mounting portion. And the connection line conductor of the mounting board is electrically connected to the side wall line conductor connected from the through conductor to the side wall line conductor formed on the lower surface of the dielectric substrate. There is no switching from microstrip mode to strip mode as in the case of line conductors passing through the hermetic seal part in the package for the package, so there is no impedance mismatching, reflection loss increases, and the high-frequency characteristics of the transmission line deteriorate. I won't.

【0060】また、高周波回路用パッケージの側壁線路
導体は、その長さが高周波信号の波長の4分の1以下で
あることから、伝送線路の長さによる損失を最小限に抑
えることが可能であるため、この側壁線路導体により高
周波特性上で問題となるキャパシタンス成分の減少やイ
ンダクタンス成分の増大が生じることがなく、その結
果、伝送線路が高インピーダンスとなって高周波信号の
反射が増大して高周波信号の伝送特性が低下してしまう
ことがない。
Further, since the length of the side wall line conductor of the high frequency circuit package is not more than 以下 of the wavelength of the high frequency signal, it is possible to minimize the loss due to the length of the transmission line. Because of this, the side wall line conductor does not cause a decrease in capacitance component or an increase in inductance component, which is a problem in high frequency characteristics, and as a result, the transmission line has a high impedance and the reflection of high frequency signals increases, so that high frequency Signal transmission characteristics do not deteriorate.

【0061】そして、本発明の高周波回路用パッケージ
の実装構造によれば、高周波信号を伝送するための高周
波用伝送線路の接続部に対して、実装基板の基板を介し
て基板側の接地導体を、誘電体基板および誘電体枠体を
介して上部接地導体を配し、また、その両側に側壁接地
導体を併設し、さらに、この側壁接地導体直下の基板に
それぞれ実装基板側の接地導体と電気的に接続された基
板側接地貫通導体を形成したことから、高周波用伝送線
路の接続部の線路構成が接地導体で囲まれた疑似導波管
構造となる。その結果、伝送線路を取り囲む接地のため
の導体について接地状態を安定させ、かつ高次モードの
発生を抑制して反射損失を低減することができるととも
に、電磁波シールド効果により放射損失を抑制すること
ができ、これにより高周波信号の接続部における高周波
信号の伝送特性が低損失で良好な高周波回路用パッケー
ジの実装構造とすることができる。
According to the mounting structure of the high-frequency circuit package of the present invention, the ground conductor on the board side is connected to the connection portion of the high-frequency transmission line for transmitting the high-frequency signal via the board of the mounting board. An upper ground conductor is arranged via a dielectric substrate and a dielectric frame, and side wall ground conductors are provided on both sides of the upper ground conductor. Since the substrate-side grounded through conductors connected to each other are formed, the line configuration of the connection portion of the high-frequency transmission line becomes a pseudo waveguide structure surrounded by the grounding conductor. As a result, it is possible to stabilize the grounding state of the grounding conductor surrounding the transmission line, suppress the occurrence of higher-order modes, reduce the reflection loss, and suppress the radiation loss by the electromagnetic wave shielding effect. As a result, a high-frequency circuit package mounting structure with low loss and good high-frequency signal transmission characteristics at the high-frequency signal connection portion can be obtained.

【0062】さらに、高周波回路用パッケージにおい
て、線路導体の両側の貫通導体から高周波信号の波長の
2分の1以下の距離の位置に、下部接地導体に電気的に
接続された誘電体基板の上面から下面にわたる接地貫通
導体を形成した場合には、線路導体と接地貫通導体との
間に適切な容量成分を持たせることが可能となるため、
貫通導体におけるインピーダンスの不整合を防ぐことが
できるものとなる。
Further, in the high-frequency circuit package, the upper surface of the dielectric substrate electrically connected to the lower ground conductor at a distance of less than half the wavelength of the high-frequency signal from the through conductor on both sides of the line conductor. In the case where a ground through conductor extending from the lower surface to the lower surface is formed, an appropriate capacitance component can be provided between the line conductor and the ground through conductor.
The impedance mismatch in the through conductor can be prevented.

【0063】以上のように、本発明によれば、誘電体基
板の側面に表面実装用の信号入出力部として側壁線路導
体を有する表面実装型の高周波回路用パッケージの実装
構造として、高周波信号に対して低反射特性を有する伝
送特性が良好な高周波回路用パッケージの実装構造を提
供することができた。
As described above, according to the present invention, a surface mounting type high frequency circuit package having side wall conductors as signal input / output portions for surface mounting on the side surfaces of the dielectric substrate is used for mounting high frequency signals. On the other hand, a mounting structure of a high-frequency circuit package having low reflection characteristics and good transmission characteristics can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)および(b)は、それぞれ本発明の高周
波回路用パッケージの実装構造の実施の形態の一例を示
す断面図および要部平面図である。
FIGS. 1A and 1B are a cross-sectional view and a plan view of a main part, respectively, showing an example of an embodiment of a mounting structure of a high-frequency circuit package according to the present invention.

【図2】高周波回路用パッケージの実装構造における反
射係数の周波数特性を示す線図である。
FIG. 2 is a diagram showing a frequency characteristic of a reflection coefficient in a mounting structure of a high-frequency circuit package.

【図3】(a)および(b)は、それぞれ従来の高周波
回路用パッケージの実装構造の例を示す断面図および要
部平面図である。
FIGS. 3A and 3B are a cross-sectional view and a main part plan view, respectively, showing an example of a mounting structure of a conventional high-frequency circuit package.

【符号の説明】[Explanation of symbols]

21・・・・・高周波回路用パッケージ 22・・・・・誘電体基板 22a・・・・搭載部 23・・・・・下部接地導体 24・・・・・誘電体枠体 25・・・・・上部接地導体 26・・・・・線路導体 27・・・・・側壁線路導体 28・・・・・側壁接地導体 29・・・・・貫通導体 31・・・・・接地貫通導体 32・・・・・高周波回路部品 33・・・・・実装基板 34・・・・・基板 35・・・・・接地導体 36・・・・・接続用線路導体 37・・・・・基板側接地貫通導体 21: High frequency circuit package 22: Dielectric substrate 22a: Mounting part 23: Lower ground conductor 24: Dielectric frame 25 ...・ Top ground conductor 26 ・ ・ ・ ・ ・ Line conductor 27 ・ ・ ・ ・ ・ ・ Side wall conductor 28 ・ ・ ・ ・ ・ ・ Side wall conductor 29 ・ ・ ・ ・ ・ Through conductor 31 ・ ・ ・ ・ ・ Ground through conductor 32 ・ ・・ ・ ・ High frequency circuit parts 33 ・ ・ ・ ・ ・ ・ Mounting board 34 ・ ・ ・ ・ ・ ・ Substrate 35 ・ ・ ・ ・ ・ ・ Ground conductor 36 ・ ・ ・ ・ ・ ・ Line conductor for connection 37 ・ ・ ・ ・ ・ ・ Ground through conductor on board side

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】内部に下部接地導体が形成され、上面に高
周波回路部品を搭載する搭載部が形成された誘電体基板
と、該誘電体基板の上面に前記搭載部を囲んで接合さ
れ、上面に上部接地導体が形成された誘電体枠体と、前
記誘電体基板の下面に形成され、前記誘電体枠体の内側
に対応する位置から外周に至る線路導体と、前記誘電体
基板の側面に前記線路導体と連続的に形成された、その
長さが前記線路導体により伝送される高周波信号の波長
の4分の1以下である側壁線路導体と、該側壁線路導体
の両側の前記高周波信号の波長の2分の1以下の距離の
位置に形成され、前記上部接地導体と電気的に接続され
た側壁接地導体と、前記線路導体の他方の端部から前記
誘電体枠体の内側の前記誘電体基板の上面にかけて形成
された貫通導体とを具備する高周波回路用パッケージ
を、 下面側に接地導体が形成され、上面に前記側壁線路導体
が電気的に接続される接続用線路導体が形成された誘電
体から成る基板と、前記接続用線路導体の両側の前記側
壁接地導体に対応する位置に前記接地導体から前記基板
の上面にかけて形成された基板側接地貫通導体とを具備
する実装基板に載置し、 前記側壁線路導体を前記接続用線路導体に、および前記
側壁接地導体を前記基板側接地貫通導体にそれぞれ電気
的に接続したことを特徴とする高周波回路用パッケージ
の実装構造。
1. A dielectric substrate having a lower grounding conductor formed therein and a mounting portion for mounting a high-frequency circuit component formed on an upper surface thereof, and a dielectric substrate joined to the upper surface of the dielectric substrate so as to surround the mounting portion. A dielectric frame having an upper ground conductor formed thereon, a line conductor formed on a lower surface of the dielectric substrate and extending from a position corresponding to the inside of the dielectric frame to an outer periphery, and a side surface of the dielectric substrate. A side wall line conductor formed continuously with the line conductor, the length of which is equal to or less than a quarter of the wavelength of the high frequency signal transmitted by the line conductor; A side wall ground conductor formed at a distance of one-half wavelength or less and electrically connected to the upper ground conductor, and the dielectric on the inside of the dielectric frame from the other end of the line conductor; Through conductor formed over the top surface of the body substrate A high-frequency circuit package, comprising: a substrate made of a dielectric having a ground conductor formed on a lower surface side and a connection line conductor formed on an upper surface to be electrically connected to the side wall line conductor; And a substrate side ground through conductor formed from the ground conductor to the upper surface of the substrate at a position corresponding to the side wall ground conductor on both sides of the mounting substrate, and the side wall line conductor is connected to the connection line conductor. And the side wall ground conductor is electrically connected to the board-side ground through conductor, respectively.
【請求項2】前記高周波回路用パッケージは、前記線路
導体の両側の前記貫通導体から前記高周波信号の波長の
2分の1以下の距離の位置に、前記下部接地導体に電気
的に接続された前記誘電体基板の上面から下面にわたる
接地貫通導体を形成したことを特徴とする請求項1記載
の高周波回路用パッケージの実装構造。
2. The high-frequency circuit package is electrically connected to the lower ground conductor at a distance of not more than half the wavelength of the high-frequency signal from the through conductor on both sides of the line conductor. The mounting structure for a high-frequency circuit package according to claim 1, wherein a ground through conductor extending from an upper surface to a lower surface of the dielectric substrate is formed.
JP35924398A 1998-12-17 1998-12-17 High frequency circuit package Expired - Fee Related JP3725983B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35924398A JP3725983B2 (en) 1998-12-17 1998-12-17 High frequency circuit package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35924398A JP3725983B2 (en) 1998-12-17 1998-12-17 High frequency circuit package

Publications (2)

Publication Number Publication Date
JP2000183230A true JP2000183230A (en) 2000-06-30
JP3725983B2 JP3725983B2 (en) 2005-12-14

Family

ID=18463499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35924398A Expired - Fee Related JP3725983B2 (en) 1998-12-17 1998-12-17 High frequency circuit package

Country Status (1)

Country Link
JP (1) JP3725983B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3438132B2 (en) 1999-04-23 2003-08-18 富士通カンタムデバイス株式会社 High frequency device package
JP2004088067A (en) * 2002-06-27 2004-03-18 Kyocera Corp Laminated structure for high-frequency signal transmission and high-frequency semiconductor package using the same
JP2007053411A (en) * 2006-11-30 2007-03-01 Sumitomo Metal Electronics Devices Inc Package for high frequency module
JP2013077746A (en) * 2011-09-30 2013-04-25 Fujitsu Ltd Electronic device
US8981881B2 (en) 2012-03-28 2015-03-17 Fujitsu Limited Stacked module

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61225842A (en) * 1985-03-30 1986-10-07 Fujitsu Ltd semiconductor equipment
JPS6442155A (en) * 1987-08-10 1989-02-14 Nec Corp Semiconductor chip carrier package
JPH05259793A (en) * 1992-03-09 1993-10-08 Toyo Commun Equip Co Ltd Structure of package for high frequency device
JPH07221512A (en) * 1994-02-04 1995-08-18 Sony Corp High frequency connection line
JPH09134981A (en) * 1995-11-08 1997-05-20 Fujitsu Ltd Microwave / millimeter wave functional module package
JPH10303333A (en) * 1997-04-22 1998-11-13 Kyocera Corp High frequency package

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61225842A (en) * 1985-03-30 1986-10-07 Fujitsu Ltd semiconductor equipment
JPS6442155A (en) * 1987-08-10 1989-02-14 Nec Corp Semiconductor chip carrier package
JPH05259793A (en) * 1992-03-09 1993-10-08 Toyo Commun Equip Co Ltd Structure of package for high frequency device
JPH07221512A (en) * 1994-02-04 1995-08-18 Sony Corp High frequency connection line
JPH09134981A (en) * 1995-11-08 1997-05-20 Fujitsu Ltd Microwave / millimeter wave functional module package
JPH10303333A (en) * 1997-04-22 1998-11-13 Kyocera Corp High frequency package

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3438132B2 (en) 1999-04-23 2003-08-18 富士通カンタムデバイス株式会社 High frequency device package
JP2004088067A (en) * 2002-06-27 2004-03-18 Kyocera Corp Laminated structure for high-frequency signal transmission and high-frequency semiconductor package using the same
JP2007053411A (en) * 2006-11-30 2007-03-01 Sumitomo Metal Electronics Devices Inc Package for high frequency module
JP2013077746A (en) * 2011-09-30 2013-04-25 Fujitsu Ltd Electronic device
US8981881B2 (en) 2012-03-28 2015-03-17 Fujitsu Limited Stacked module

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