JP2000147063A - Probe card - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the positional deviation of a probe card and damages to pogo pins and improve the efficiency of probing works, etc., by constituting the pogo pins and probe card pins which makes contact with the pogo pins from magnets and magnetic metals. SOLUTION: On a prober motherboard 5, pogo pins 6' for mounting a probe card 7' and pins 13 of the probe card 7' are constituted, using magnets and magnetic metals. The pins 13 are contacted to the pogo pins 6' which are magnetically adhered to the prober card 7'. In tests, required signals for IC operations are transmitted to an IC chip on an IC wafer 9 via the prober motherboard 5, the pogo pins 6' and the pins 13 of the card 7'. The magnets and the magnetic metals are used for the pins 13 of the card 7', hence the card 7' itself is magnetized to facilitate attaching and removing of the card 7' and the damages are prevented because no excessive force is exerted on the pogo pins 6'.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a probe card which is constituted as a part of an IC tester, and which judges electrical acceptability by applying probe pins to an IC chip formed on an IC wafer.

FIG. 4 is a configuration diagram of an IC tester.

[0003] The IC tester has a system capable of performing overall evaluation of electrical characteristics such as DC and AC measurements of an IC chip. A motherboard 2 for connecting a probe card or an evaluation board used for evaluation to the test head and transmitting a voltage, a signal, and the like generated by the test head to the probe card, the evaluation board, and the like;
It comprises a C wafer, a probe card, and a prober 3 used for probing.

[0004] Reference numeral 4 denotes a rotating shaft, and 16 denotes a second shaft of the present invention to be described later.
9 shows a magnetic generator used in the embodiment.

The probe card is attached and detached at the prober 3.

FIG. 5 is an enlarged cross-sectional view of the prober 3 shown in FIG.
FIG. 6 is a view showing a state where FIG. 5 is viewed from the side.

Conventionally, when the probe card 7 is mounted on the prober motherboard 5, as shown in FIGS. 5 and 6, the probe card 7 is stopped by being hooked on the probe card positioning pins 8. The probe card 7 and the prober motherboard 5 have elasticity by a spring, and the contact surface with the probe card 7 is in contact with the flat pogo pins 6. The attachment and detachment of the probe card 7 is performed manually.

A hatched portion in the center of the prober motherboard 5 and the probe card 7 in the drawing indicates that the cavity is hollow.

In the figure, 9 is an IC wafer, 10 is a wafer stage, 11 is a probe card fixing ring, 12
Indicates a ring clamp screw.

[0010]

However, since the operation of attaching and detaching the probe card in the above configuration is performed manually,
There is a problem that the displacement of the probe card and the breakage of the pogo pins are caused depending on the degree of force application, and the efficiency of the probing operation or the like is reduced.

[0011]

SUMMARY OF THE INVENTION According to the present invention, in order to improve the attachment / detachment of a probe card mounted on a prober motherboard, a pogo pin for mounting the probe card on the prober motherboard and a probe card contacting the pogo pin are provided. The pin is formed using a magnet and a magnetic metal, and the probe card and the pogo pin are magnetically bonded.
In addition, a through hole with the motherboard is provided in order to prevent the probe card from contacting in the contact pin direction and preventing displacement.

[0012]

FIG. 1 is a view showing a first embodiment of the present invention, in which (a) is a top view of a probe card,
(B) is a back view of the probe card.

FIG. 2 is a sectional view when a probe card is mounted.

In FIGS. 1 and 2, FIG. 1 (a) is a surface which contacts the pogo pin 6 ', and the pogo pin 6' and the pin 13 which contacts the pogo pin 6 'are made of a magnet and a magnetic metal. Pin 1 on the upper surface shown in FIG. 1A and on the rear surface shown in FIG.
3 is internally conducting. For example, the pogo pin 6 'is made of a magnetic metal, and the pin 13 is made of a magnet or a magnet and a magnetic metal.

The probe card 7 'and the pogo pins 6' are magnetically bonded to each other, and the pins 13 of the probe card 7 '
The probe card 7 'is provided with a through hole 14 with the prober motherboard 5 in order to adjust the direction and prevent displacement.

Next, the operation of the first embodiment will be described.

The probe card 7 'is mounted as shown in FIG. The probe card 7 'is adhered to the pogo pins 6' by magnetic force. At the time of testing, signals necessary for IC operation are supplied to the test head 1, the motherboard 2 shown in FIG. 4 or the prober motherboard 5, the pogo pins 6 shown in FIG. And transmitted to the IC chip on the IC wafer 9 via each pin of the probe card 7 '.

As described above, the fixing ring 11 is conventionally used as shown in FIG. 6 to fix the probe card 7 when the probe card is mounted, but in the present invention, the magnet 13 and the magnetic Since metal is used, the probe card itself is magnetized and the probe card can be easily attached and detached.

Therefore, not only the conventional probe card fixing ring 11 and the ring clamp screw 12 are unnecessary, but also no extra force is applied to the pogo pins 6 ', so that the pogo pins 6' on the probe card mounting surface are prevented from being damaged. be able to.

Further, since the pins 13 are made of a magnet and a magnetic metal and are magnetized, the use of the magnetic wiring material 15 shown in FIG. 1 allows soldering or the like without the need to press the wire with tweezers during wiring. Work efficiency is improved.

In the past, if the ring was used for a long time with the ring fixed, the pin of the probe card 7 would not contact the pogo pin 6 due to the looseness of the portion to be hooked on the ring clamp screw 12, and the probe card would easily be displaced. Although this may hinder the probing work, in the present invention, the misalignment is eliminated by fixing the probe card 7 'to the prober motherboard 5 with the through hole 14 of the probe card 7'.

FIG. 3 is a diagram showing a second embodiment of the present invention.

As a second embodiment, a magnetic generator 16 is provided in the blow bar 3 shown in FIG.
The switch 6 is turned on / off by a switch 18.

A mechanism is adopted in which a direct current is applied to a copper wire coil wound around an iron cylinder 17 to magnetize iron and generate electromagnetism.

The magnetic generator 16 is connected to the prober motherboard 5 via a signal line 20, and the prober motherboard 5 is electrically connected to each test pin via a signal line 21 in a connection ring.

The pogo pins 6 and the pins 13 are made of a magnetic metal.

Next, the operation of the second embodiment will be described.

The magnetic generator 16 incorporated in the prober 3 shown in FIG. When the switch 18 is turned on, magnetism is generated in the coil, and the magnetism flows through the signal line 20 to the prober motherboard 5-pogo pin 6-probe card 7 and the motherboard 2 of FIG.

When the switch 18 is turned off, no magnetism flows. The magnetic generator 16 is a probe card 7
The pins 13 of the probe card 7 are made of metal so that the pins 13 of the probe card 7 can be easily attached or detached depending on the magnetic state.

As described above, the magnetic generator 1 is connected to the prober 3.
6, a magnet generator 16 generates magnetism,
The use of this magnetism facilitates the attachment / detachment of the probe card 7 and the tester work, and prevents the pogo pins 6 from being damaged.

Further, since the positioning of the probe card 7 is not magnetic, the positioning can be easily performed.

[0032]

As described above, according to the present invention, the following effects can be obtained.

By using magnets and magnetic metals for the pins of the probe card, the probe card can be easily attached and detached, and the conventional ring fixing is not required.

By using the magnetic force and the magnetic generator, the conventional ring fixation is not required, and the probe card can be easily attached and detached.

With the easy attachment and detachment of the probe card, the damage of the pogo pins can be reduced.

[Brief description of the drawings]

FIG. 1 is a diagram showing a first embodiment of the present invention.

FIG. 2 is a cross-sectional view when a probe card is mounted.

FIG. 3 is a diagram showing a second embodiment of the present invention.

FIG. 4 is a configuration diagram of an IC tester.

FIG. 5 is a cross-sectional view when a conventional probe card is mounted.

FIG. 6 is a diagram of a conventional example of a probe card mounted state viewed from left and right.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Test head 2 Motherboard 3 Prober 5 Motherboard for prober 6, 6 'Pogo pin 7, 7' Probe card 8 Probe card alignment pin 9 IC wafer 10 Wafer stage 13 Pin 14 Through hole 15 Wiring material 16 Magnetic generator 17 Iron Cylinder 18 Switch 19 DC power supply 20 Signal line from magnetic generator 21 Signal line in connection ring

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G011 AA02 AA16 AA17 AC06 AC12 AF06 2G032 AA00 AB01 AD01 AE12 AF04 AG02 AK03 AL00 4M106 AA01 AA02 BA01 BA14 DD10 DD11 DJ33

Claims (4)

[Claims] 1. A pogo pin for mounting a probe card on a prober motherboard and a pin of the probe card contacting the pogo pin using a magnet and a magnetic metal, and a magnetic force is applied between the probe card and the pogo pin. A probe card characterized in that the probe card is adhered by: 2. The probe card according to claim 1, further comprising a through hole with the mother board for adjusting the alignment and the displacement of the probe card in the pin direction. 3. The probe card according to claim 1, wherein a magnetic wiring member is used for the wiring in the probe card. 4. A pogo pin for mounting a probe card on a prober motherboard and a pin of the probe card contacting the pogo pin using a magnetic metal, and an electromagnetic probe is provided in a prober which is a part of an IC tester configuration. A magnetic generator for generating a magnetic field, using the magnetic generator to generate magnetism at the time of attaching and detaching the probe card and at the time of probing, and using the magnetism to generate the magnetism via a signal line, the prober motherboard, the pogo pin, and the probe card. The probe card is magnetically bonded between the probe card and the pogo pin by sending the probe card to the probe card.